Ion Pumps. Technical Information. Specifications/Ordering Information. Introduction Ion Pump Guide

Transcription

1 Ion Pumps

2 Ion Pumps Technical Information Introduction... - Ion Pump Guide Specifications/Ordering Information Appendage Pump l/s Diode Pump l/s Diode Pump l/s Diode Pump l/s Triode Pump l/s Triode Pump l/s Diode Pump l/s Triode Pump l/s Diode Pump l/s Triode Pump l/s Diode Pump l/s Diode Pump l/s Diode Pump l/s Triode Pump l/s Diode Pump l/s Diode Pump l/s Triode Pump l/s Diode Pump l/s Triode Pump l/s Diode Pump Combo-Vac Pumps Accessories/Replacement Parts Pump Rebuilding Ion Pump Power Supplies Titanium Sublimation Pumps Ion Pump Theory of Operation

3 Ion Pumps More than 3 Years Experience in Ion Pump Development and Manufacturing s Sold Most complete line of ion pumps, power supplies and accessories Fastest, most reliable ion pumps available Thermionics ion pumps are % compatible with your existing Varian or Perkin-Elmer power supply. We will even match the color of your old pump, and special custom colors are available! Sizes.2 l/sec to, l/sec Models Diode configurations Standard (IP Series) Noble (D-I) (NP Series) Hydrogen (HP Series) Triode configurations Standard (TP Series) Combo-Vac Pumps, combining a Noble (D-I) or Triode ion pump, Titanium sublimation pump (TSP), and cooling panel Each pump is: Able to provide continuous and contaminant free pumping Reliable from x -3 Torr to 2 x - Torr (measured) Free from backstreaming Bakeable to 3 C assembled Bakeable to 45 C magnets removed Able to act as its own vacuum gauge Construction All pumps are manufactured to exacting UHV standards Pump bodies, flanges and element anodes are made of 34 stainless steel Double re-entrant electrical insulators are made of high-quality aluminum oxide, with sputter shields Pump magnets are high-strength ferrites bakeable to 3 C Choosing the Right Pump for Your Application As a full line vacuum manufacturer, TLI can provide the best pump for your job without reservation or bias We manufacture a full range of ion pumps TLI will custom design pumps for a specific application Service and Parts We service, repair, and supply replacement parts for all pumps including: TLI, Varian, Perkin-Elmer, Ultek, Ion Equipment, Hughes, Ulvac, Anelva, and others. Rebuilding We rebuild and repair all sizes and brands of ion pumps, elements, and power supplies. Please refer to page -39 for further information. Power Supplies, Cables We offer five power supply models: from a small power supply, which operates with an input voltage of either 5 Vac or 2 VDC, and is capable of starting and operating small pumps or holding larger pumps; to a large, reliable, no frills,. A output power supply capable of starting and operating the largest ion pump. We sell replacement cables for Varian and P-E power supplies. -

4 Sputtering Ion Pump Guide Choosing the Right Pump for Your Application As a full line vacuum manufacturer, TLI can recommend the best pump for your job without reservation or bias. We cover the full line of ion pumps. The table to the right gives a comparison between pumps for different pumping applications. Naturally, applications differ. Should you have any questions about the applicability of a pump for your use, please give us a call. We have a wide variety of prior applications to draw upon. Pump Characteristics Normalized to the Standard Diode Pump Air Argon Speed Hydrogen Starting Life Time at Type Speed (% of air) Speed Performance x -6 Torr Standard % % 2 27% Average 5 x 4 Diode Light duty only µ hours Noble 95% 6 to 2% Not Below average 5 x 4 Diode recommended 5 µ hours Hydrogen % % 2 27% Average 7.5 x 4 Diode µ hours Triode 85% 2% 2 27%, Good 3.5 x 4 Light duty only 5 µ hours Standard Diode Pumps use two titanium cathodes in each pumping element. They are the pump of choice for most applications for their long life, reliability and high speed per unit price. Not recommended when significant amounts of hydrogen or noble gases are to be pumped or where frequent high starting loads are encountered. Noble Diode Pumps use one titanium and one tantalum cathode to improve pumping speed for noble gases. Increased speed eliminates the pressure and speed instabilities shown by standard diodes when pumping against a prolonged air leak while retaining the long life and reliability of the standard diode. Most stable pump for noble gas loads. Noble diodes were developed to pump noble gases. In every instance but one they are identical to a standard diode. The difference is the use of one tantalum cathode in place of one of the two titanium cathodes in the standard pump (top, Fig. -). The tantalum, because of its larger atomic number, produces a greater number of energetic neutrals which can now bury themselves in locations which are less subject to resputtering. Tantalum is somewhat less effective than titanium as a getter. Therefore the speed of the noble diode is approximately 5% lower than the standard diode. Another fact of note is the lessened solubility of hydrogen in tantalum at elevated temperatures. Since elevated temperatures will be encountered during prolonged starting, it would be wise to avoid applications which require this pump to handle large amounts of hydrogen. Hydrogen Diode Pumps are also similar to standard diodes. There are two differences in construction. The first is a thicker cathode. Because hydrogen diffuses into titanium like water into a sponge, the more titanium, the more capacity for hydrogen the pump has. This absorption of hydrogen can lead to a structural problem, however. Titanium swells and distorts as it absorbs large amounts of hydrogen. Therefore, hydrogen pumps have special structural modifications to prevent distortion from causing electrical shorts. These extra construction details make the hydrogen diode a good choice for long pump life applications. Examples might be pumps operating in radioactive environments or operating at remote locations. Recommended when major gas load is hydrogen or hydrogen-containing gases such as water vapor. Also pumps other non-noble gases. Fig. -. Argon (noble) pumping mechanism. Cross section views of single cells. Magnetic Field Magnetic Field Triode Pumps use reverse electrical polarity and a radically different cathode design to achieve two important advantages over the diode pumps: () an electrically isolated cathode allows the starting glow discharge to be confined at significantly higher pressures, resulting in shorter starting times; (2) the sputter cathode design allows noble and non-noble gases to be permanently buried without resputtering (bottom, Fig. -). Triodes have the highest speeds for noble gases and freedom from argon instability in the event of an air leak. Disadvantage: because of the sputter cathode design, the triode pump requires more frequent service. Anode Argon Titanium Atoms Entrapment of Buried Argon Ions Standard Ion Pump Anode V V+ Argon Ions Sputtered Titanium Argon Atoms Buried Here Pump Wall TI Sputter Cathode Oblique Impact Causes Maximum Sputtering Triode Ion Pump -2

5 Ion Pump Guide Starting Performance For many applications, starting performance is not a criterion when choosing a pump because the system is seldom brought up to air. In other applications, such as some surface analysis equipment or process related equipment, the time lost waiting for pumpdown to operating pressures is a very important consideration. In some cases the labor costs saved by shorter pumpdowns can earn back the differential in the price of a triode pump in less than a month. Fig. -2 demonstrates the value of the higher triode speed at higher pressures. Two pumps, a 6 l/sec triode and a 44 l/sec diode, were attached to the same large vacuum chamber. The smaller triode pump first pumped the chamber down. It was then released to air and pumped down by the larger diode. The triode, despite a 7-to- speed disadvantage, showed a very significant advantage over the diode in reaching the -5 region. The diode, despite its larger rated speed at lower pressures, took more than three hours to match the pressure achieved by the smaller pump. Naturally, pumpdown performance depends on other variables such as the roughing system, prior chamber exposure, etc., but if pumpdown time is important to your ion pumped system, a triode is the pump of choice. Summary Any of the ion pumps will do a good job in a general pumping application. () The diode pump is usually the choice when there is no requirement for pumping noble gases and when initial price is an important criterion. (2) The noble diode is designed for pumping noble gases with longer life, and does so at a lower price. (3) The hydrogen diode is used not only where large amounts of hydrogen are expected, such as tube processing, but also in applications where a longer lifetime is needed. (4) The triode is the pump of choice when frequent pumpdowns are expected. It is also excellent for noble gas pumping. Pressure in Torr Refer to page -44 for Theory of Operation. Minutes Fig. -2. Alternate pumpdown times for a diode and triode on large chamber. -3

6 Ion Pump Guide Sizing the Pump to Your Applications After you have selected the type of pump you need for your application, you must then determine its size. This section gives sample computations for three common pumping applications. They are: () pumping with no load other than wall outgassing; (2) pumping with an additional load; and (3) pumping with an additional pump of another type. If you are accustomed to the large speeds required by diffusion pumped systems, you may be surprised at the capabilities of TLI ion pumps. Ion pumps do not need elaborate baffles to protect the system from contamination, hence effective speeds are not diminished by those conductance considerations. System Information Needed. What species of gases will be found in your system and what is the anticipated outgassing rate? (This, in large part, can be determined from your expected bakeout temperature.) 2. What is the surface area of the system? 3. What additional gas load, if any, will be introduced as a result of the work done in the system? 4. What is the conductance between pump and system? (See Section 3 of this catalog for a selection of high conductance valves.) 5. What is the desired process pressure and/ or desired ultimate pressure? Example Speed Needed for Wall Outgassing Only Internal surface area A =, cm 2 Bakeout temperature T = 2 C Outgassing rate of 34 SS* R = 2 x -3 Torr l/sec cm 2 Desired base pressure P = 2 x - Torr Conductance between pump and chamber C = 48 l/sec** A liters The speed needed at base pressure is given by: S = R x P sec (2 x -3 )x(x 5 ) Inserting values; S = = l/sec (2 x - ) This is the speed needed at the chamber. To adjust for conductance losses, use the formula: (C x S c ) (48 x ) = + S S chamber S pump C pump = = (C S c ) (48 ) = 2 l/sec Looking at the graph below, pumping speed as a function of pressure, we see that the speed at 2 x - is 7% of nominal rated speed. Dividing 2 by.7 yields a minimum nominal speed of 46 l/sec to achieve the desired base pressure. A 5 l/sec pump would therefore meet this requirement. Example 2 Speed Needed for Additional Gas Load Suppose that the operating pressure is to be 2 x -7 Torr with a nitrogen gas load of Q=2.8 x -5 Torr liters/sec. The pump must handle the outgassing load as well as the process load. (Q + R x A) S c = P Adjusting for conductance as above: S c = [(2.8 x -5 )+(2x -3 )x(x 5 )] (2 x -7 ) (C x S c ) (48 x 4) S p = = (C S c ) (48 4) S p = 44 l/sec S c = 4 l/sec Looking once again at the graph below, we see that the pump delivers rated speed at 2 x -7. Therefore a 4 to 5 l/sec pump would meet this requirement. Pumping Speed vs. Pressure % % Pumping Speed l/s Throughput micron l/s Pressure Torr Universal speed and throughput curves for all TLI diode-type ion pumps. To find speed in liters per second at a given pressure, multiply % speed at that pressure times rated speed. -4

7 Ion Pump Guide Example 3 Pumping with an Ion Pump and a Titanium Sublimation Pump Ion pumps are often used in combination with titanium sublimation pumps. Sublimation pumps used with properly designed deposition shrouds can have very high speeds for getterable gases such as H 2, H 2, CO, CO 2, N 2 and 2. They do not pump noble gases or saturated hydrocarbons, such as methane. In fact, sublimation pumps, like ion gauges, can produce methane at their hot surfaces. These non-getterable gases are pumped by ion pumps. For the purposes of speed calculation, it would be tempting to assume that the speeds are additive when applied to the partial pressures of the getterable and nongetterable gases. For several reasons too complex to consider here, this is not the case. As a practical matter, sublimation pumps are a major help in pumpdown at high pressure and will lower the pressure by a factor of ten at low pressures. Thus, as a rule of thumb, you may reduce ion pump size by about half if a sublimation pump is added to a system. This will, in general, lower the initial cost of a system while still assuring the same base pressure. This rule of thumb may seem conservative in view of the high speeds achieved with sublimation pumping, but it can be qualitatively understood if it is realized that the ion pump is pumping a mixture of gases for which it has a lower speed at a lower pressure. For further information, please see the data sheets on our Combo-Vac pumps beginning on page -36 in this section. * Outgassing rates for 34 stainless steel: 2 x -3 Torr l/sec cm 2 after an 85 9 C bakeout in a vacuum furnace for 2 hrs. Ref: R.L. Samuel, Vacuum, Vol 2, 97, p x -2 Torr l/sec cm 2 after a 25 C bakeout for 3 hrs. Ref: J.R. Young, JVST, Vol 6, 969, p ** This is the approximate conductance of a 6 full opening gate valve. Use of a valve is good practice on ion pumped systems which are often brought up to atmospheric pressure. -5

8 Appendage Pumps Appendage pumps are available in.2 l/sec, 2 l/sec, and 8 l/sec sizes, with the following features: Pumps are either vacuum processed and pinched off (after 4 C+ bake out) or shipped in up-to-air configuration Inlet ports are 3/8, 3/4 O.D. copper or SS tubes;.33 mini or 2.75 O.D. ConFlat type flanges High-voltage feedthroughs are TLI, P-E (Alberox type), Varian style or standard BNC type connectors All pumps are tested for vacuum integrity and excessive electrical leakage current AIP-2/33 (shown with magnet) Appendage Pumps Pump Design Nom. TLI Style Varian Style** Speed Pump (l/sec) Inlet Model No. Model No..2 9, 3/8 SS AIP-.2T , 3/8 CU AIP-.2TC , mini flange AIP-.2/ , 3/4 SS AIP-2T , mini flange AIP-2/ , 2.75 flange AIP-8/ Magnets for TLI and Varian Appendage Pumps Size (l/sec) Type Gauss Varian No. Model No. AIP-.2T (shown with magnet).2 Alnico MP Alnico 2 93 MP-2 2. Sm-Co MEV-2* 8. Ferrite 2 93 ME-8 * -6

9 Appendage Pumps Front Right Front Right AIP-.2T (shown with magnet) AIP-2/33 (shown with magnet) Power Supplies Refer to page -4 for more information Model No. PPS-5* (Portable) PS- Physical Rack mount No Yes (requires rack adapter) H x W x D 9 x 8. x x 5 x 8.75 Ship weight 3 lbs (24 lbs actual) 6.5 lbs Electrical Input (Single phase) VAC, 5/6 Hz or2 VDC 5 VAC, 6 Hz Voltage has internal batteries 23 VAC, 5 Hz available Current (<5 Watts).5 A AC cord AC and DC cords included 5 with plug Electrical Output Voltage 4.8 kv 5 ma 4.2 kv ma Current 5 ma ma Protection circuit Adjustable Current limit 2 ma HV coax cable 4 w/dual safety ground w/connector straps and cable halyard both ends Recorder Output No Yes Display Digital Meter LED * -7

10 l/s Diode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% l/s Diode Ion Pump Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Front Right Pumping Speed vs. Pressure Pumping Speed l/s Throughput micron l/s Pressure Torr -8

11 l/s Diode Ion Pumps Specifications & Ordering l/s Diode Ion Pumps Standard Hydrogen Noble Description Diode Diode Diode Operating voltage 5 kv 5 kv 5 kv Nominal pumping speed (l/s) Operating life at x -6 Torr (hours) 5, 75, 5, Maximum starting pressure (Torr) x -3 x -3 x -3 Ultimate pressure (Torr) below - below - below - Inlet flange (O.D./I.D.) 2.75/ / /.5 Operating bakeout temp Maximum bakeout temp. (pump off) 35 with magnets / 45 without magnets Weight, lbs (kg) 4 (6.5) 4 (6.5) 4 (6.5) Model No. IP- HP- NP- Power Supplies Refer to page -4 for more information Diode Model No. PS- PS- Physical Rack mount Yes (requires rack adapter) Yes (requires rack adapter) H x W x D 5.25 x 5 x x 8 x 4 Ship weight 6.5 lbs 4 lbs Electrical Input (Single phase) 5 VAC, 6 Hz 5 VAC, 6 Hz Voltage 23 VAC, 5 Hz available 23 VAC, 5 Hz available Current.5 A 5 A AC cord 5 with plug 5 with plug Electrical Output Voltage 4.2 kv ma 5 kv ma Current ma 2 ma Protection circuit Current limit 2 ma 2 25 ma trip HV coax cable w/connector both ends w/connector both ends Recorder Output Yes Yes Display LED Digital meter Accessories and Replacement Parts Description Model No. Replacement elements Diode Consult Factory Hydrogen Diode Consult Factory Noble Diode Consult Factory High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- A comprehensive list of replacement parts are listed on page

12 2 l/s Diode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% 2 l/s Diode Ion Pump Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Front Right Pumping Speed vs. Pressure 24.5 Pumping Speed l/s Throughput micron l/s Pressure Torr -

13 2 l/s Diode Ion Pumps Specifications & Ordering 2 l/s Diode Ion Pumps Standard Hydrogen Noble Description Diode Diode Diode Operating voltage 5 kv 5 kv 5 kv Nominal pumping speed (l/s) Operating life at x -6 Torr (hours) 5, 75, 5, Maximum starting pressure (Torr) x -3 x -3 x -3 Ultimate pressure (Torr) below - below - below - Inlet flange (O.D./I.D.) 2.75/ / /.5 Operating bakeout temp Maximum bakeout temp. (pump off) 35 with magnets / 45 without magnets Weight, lbs (kg) 26 (2) 26 (2) 26 (2) Model No. IP-2 HP-2 NP-2 Power Supplies Refer to page -4 for more information Diode Model No. PS- PS- Physical Rack mount Yes (requires rack adapter) Yes (requires rack adapter) H x W x D 5.25 x 5 x x 8 x 4 Ship weight 6.5 lbs 4 lbs Electrical Input (Single phase) 5 VAC, 6 Hz 5 VAC, 6 Hz Voltage 23 VAC, 5 Hz available 23 VAC, 5 Hz available Current.5 A 5 A AC cord 5 with plug 5 with plug Electrical Output Voltage 4.2 kv ma 5 kv ma Current ma 2 ma Protection circuit Current limit 2 ma 2 25 ma trip HV coax cable w/connector both ends w/connector both ends Recorder Output Yes Yes Display LED Digital meter Accessories and Replacement Parts Description Model No. Replacement elements Diode Consult Factory Hydrogen Diode Consult Factory Noble Diode Consult Factory High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- Bakeout cartridge heaters IH- A comprehensive list of replacement parts are listed on page -38. Ion Pump Rebuilding Service We offer the following services: Rebuild and repair all makes and sizes of ion pumps, elements and power supplies Reconditioned ion pumps and power supplies comply with new equipment specifications and carry a 9-day guarantee We rebuild all models of ion pumps! See page -39 for details and pricing. -

14 25 l/s Diode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Front Right Pumping Speed vs. Pressure Pumping Speed l/s Throughput micron l/s Pressure Torr -2

15 25 l/s Diode Ion Pumps Specifications & Ordering 25 l/s Diode Ion Pumps Standard Hydrogen Noble Description Diode Diode Diode Operating voltage 5 kv 5 kv 5 kv Nominal pumping speed (l/s) Operating life at x -6 Torr (hours) 5, 75, 5, Maximum starting pressure (Torr) x -3 x -3 x -3 Ultimate pressure (Torr) below - below - below - Inlet flange (O.D./I.D.) 3.38/ / /2. Operating bakeout temp Maximum bakeout temp. (pump off) 35 with magnets / 45 without magnets Weight, lbs (kg) 32 (4) 32 (4) 32 (4) Model No. IP-25 HP-25 NP-25 Power Supplies Refer to page -4 for more information Diode Model No. PS- PS- Physical Rack mount Yes (requires rack adapter) Yes (requires rack adapter) H x W x D 5.25 x 5 x x 8 x 4 Ship weight 6.5 lbs 4 lbs Electrical Input (Single phase) 5 VAC, 6 Hz 5 VAC, 6 Hz Voltage 23 VAC, 5 Hz available 23 VAC, 5 Hz available Current.5 A 5 A AC cord 5 with plug 5 with plug Electrical Output Voltage 4.2 kv ma 5 kv ma Current ma 2 ma Protection circuit Current limit 2 ma 2 25 ma trip HV coax cable w/connector both ends w/connector both ends Recorder Output Yes Yes Display LED Digital meter Accessories and Replacement Parts Description Model No. Replacement elements Diode Consult Factory Hydrogen Diode Consult Factory Noble Diode Consult Factory High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- Bakeout cartridge heaters IH- A comprehensive list of replacement parts are listed on page -38. Ion Pump Rebuilding Service We offer the following services: Rebuild and repair all makes and sizes of ion pumps, elements and power supplies Reconditioned ion pumps and power supplies comply with new equipment specifications and carry a 9-day guarantee We rebuild all models of ion pumps! See page -39 for details and pricing. -3

16 2 l/s & 3 l/s Triode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% 2 l/s & 3 l/s Triode Ion Pump 2 l/s Triode Ion Pump Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Top Front Right Pumping Speed vs. Pressure Pumping Speed 2 l/s Pumping Speed 3 l/s Pressure Torr -4

17 2 l/s & 3 l/s Triode Ion Pumps Specifications & Ordering 2 l/s & 3 l/s Triode Ion Pumps Description Triode Triode Operating voltage 5 kv (N) 5 kv (N) Nominal pumping speed (l/s) 2 3 Operating life at x -6 Torr (hours) 35, 35, Maximum starting pressure (Torr) x -3 x -3 Ultimate pressure (Torr) below - below - Inlet flange (O.D./I.D.) 2.75/.5 4.5/2.84 Operating bakeout temp Maximum bakeout temp. (pump off) 35 with magnets 45 without magnets Weight, lbs (kg) 27 (2) 34 (5) Model No. TP-2 TP-3 Power Supplies Refer to page -4 for more information Triode Model No. PS-N* PS-N* Physical Rack mount Yes (requires rack adapter) Yes (requires rack adapter) H x W x D 5.25 x 5 x x 8 x 4 Ship weight 6.5 lbs 4 lbs Electrical Input (Single phase) 5 VAC, 6 Hz 5 VAC, 6 Hz Voltage 23 VAC, 5 Hz available 23 VAC, 5 Hz available Current.5 A 5 A AC cord 5 with plug 5 with plug Electrical Output Voltage 4.2 kv ma 5 kv ma Current ma 2 ma Protection circuit Current limit 2 ma 2 25 ma trip HV coax cable w/connector both ends w/connector both ends Recorder Output Yes Yes Display LED Digital Meter * Triode pump supplies (N) provide ( ) voltage 3 l/s Triode Ion Pump Dimensions in inches/mm Top Front Right Accessories and Replacement Parts Description Model No. High voltage feedthrough 2 l/s Triode factory replacement 3 l/s Triode HV-/33 Replacement elements 2 l/s Triode factory replacement 3 l/s Triode TE-6 Element insulators (pack of 4) REI-5 High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- Bakeout cartridge heaters 2 l/s Triode not available 3 l/s Triode (requires 2) IH- Ion Pump Rebuilding Service We offer the following services: Rebuild and repair all makes and sizes of ion pumps, elements and power supplies Reconditioned ion pumps and power supplies comply with new equipment specifications and carry a 9-day guarantee We rebuild all models of ion pumps! See page -39 for details and pricing. A comprehensive list of replacement parts are listed on page

18 5 l/s Diode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% 5 l/s Diode Ion Pump Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Top Front Front Pumping Speed vs. Pressure Pumping Speed l/s Throughput micron l/s Pressure Torr -6

19 5 l/s Diode Ion Pumps Specifications & Ordering 5 l/s Diode Ion Pumps Standard Hydrogen Noble Description Diode Diode Diode Operating voltage 5 kv 5 kv 5 kv Nominal pumping speed (l/s) 8/5* 8/5* 6/5* Operating life at x -6 Torr (hours) 5, 75, 5, Maximum starting pressure (Torr) x -3 x -3 x -3 Ultimate pressure (Torr) below - below - below - Inlet flange (O.D./I.D.) 8./4.9 8./4.9 8./4.9 Operating bakeout temp Maximum bakeout temp. (pump off) 35 with magnets / 45 without magnets Weight, lbs (kg) 82 (37) 82 (37) 82 (37) Model No. Single Ended IP-5 HP-5 NP-5 $,6 $,8 $ 2,35 Model No. Double Ended IP-5/DE HP-5/DE NP-5/DE *Pumping Speed Ratings for Ion Pumps The pumps in this table have two pumping speeds shown, i.e.: 5/. The lower number is observed when the measurement standard established by the American Vacuum Society (AVS) is followed. The higher number is observed when the same pump is measured under optimum pumping speed conditions. Some manufacturers only report the optimum pumping speed number. Both ratings are provided here to allow the customer to make an informed choice. Power Supplies Refer to pages -4 & -4 for more information Diode Model No. PS- PS-35 Physical Rack mount Yes (requires rack adapter) Yes H x W x D 5.5 x 8 x 4 8 x 7 x 4 Ship weight 4 lbs 85 lbs Electrical Input (Single phase) 5 VAC, 6 Hz 5/6 Hz Voltage 23 VAC, 5 Hz available 5/23 VAC Current 5 A 5/8 A AC cord 5 with plug 5 with plug Electrical Output Voltage 5 kv ma 5 kv DC Current 2 ma 35 ma Protection circuit 2 25 ma trip 2 28 ma trip HV coax cable w/connector both ends w/connector both ends Recorder Output Yes Yes Display Digital meter Analog meter Accessories and Replacement Parts Description Model No. High voltage feedthrough HV- Replacement elements (requires 2) Diode PE- Hydrogen Diode PE-H Noble Diode PE-N Consult Factory Element insulators (pack of 4) REI-5 High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- NEG mounted on 8" flange Consult Factory Bakeout cartridge heaters (requires 2) IH- Ion Pump Rebuilding Service We offer the following services: Rebuild and repair all makes and sizes of ion pumps, elements and power supplies Reconditioned ion pumps and power supplies comply with new equipment specifications and carry a 9-day guarantee We rebuild all models of ion pumps! See page -39 for details and pricing. A comprehensive list of replacement parts are listed on page

20 6 l/s Triode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Top Front Left Pumping Speed vs. Pressure 75 Pumping Speed l/s Pressure Torr -8

21 6 l/s Triode Ion Pumps Specifications & Ordering 6 l/s Triode Ion Pumps Description Triode Operating voltage 5 kv (N) Nominal pumping speed (l/s) 6 Operating life at x -6 Torr (hours) 35, Maximum starting pressure (Torr) x -3 Ultimate pressure (Torr) below - Inlet flange (O.D./I.D.) 6./4.26 Operating bakeout temp. 25 Maximum bakeout temp. (pump off) 35 with magnets / 45 without magnets Weight, lbs (kg) 56 (25) Model No. Single Ended TP-6 Model No. Double Ended TP-6/DE Power Supplies Refer to pages -4 & -4 for more information Triode Model No. PS-N* PS-35N* Physical Rack mount Yes (requires rack adapter) Yes H x W x D 5.5 x 8 x 4 8 x 7 x 4 Ship weight 4 lbs 85 lbs Electrical Input (Single phase) 5 VAC, 6 Hz 5/6 Hz Voltage 23 VAC, 5 Hz available 5/23 VAC Current 5 A 5/8 A AC cord 5 with plug 5 with plug Electrical Output Voltage 5 kv ma 5 kv DC Current 2 ma 35 ma Protection circuit 2 25 ma trip 2 28 ma trip HV coax cable w/connector both ends w/connector both ends Recorder Output Yes Yes Display Digital meter Analog meter * Triode pump supplies (N) provide ( ) voltage Accessories and Replacement Parts Description Model No. High voltage feedthrough HV- Replacement elements (requires 2) Triode TE-6 Element insulators (pack of 4) REI-5 High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- Bakeout cartridge heaters (requires 2) IH- A comprehensive list of replacement parts are listed on page -38. Ion Pump Rebuilding Service We offer the following services: Rebuild and repair all makes and sizes of ion pumps, elements and power supplies Reconditioned ion pumps and power supplies comply with new equipment specifications and carry a 9-day guarantee We rebuild all models of ion pumps! See page -39 for details and pricing. -9

22 l/s Diode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Top Front Front Pumping Speed vs. Pressure 2 9. Pumping Speed l/s Throughput micron l/s Pressure Torr -2

23 l/s Diode Ion Pumps Specifications & Ordering l/s Diode Ion Pumps Standard Hydrogen Noble Description Diode Diode Diode Operating voltage 5 kv 5 kv 5 kv Nominal pumping speed (l/s) 5/* 5/* 2/* Operating life at x -6 Torr (hours) 5, 75, 5, Maximum starting pressure (Torr) x -3 x -3 x -3 Ultimate pressure (Torr) below - below - below - Inlet flange (O.D./I.D.) 8./6. 8./6. 8./6. Operating bakeout temp Maximum bakeout temp. (pump off) 35 with magnets / 45 without magnets Weight, lbs (kg) 27 (57) 27 (57) 27 (57) Model No. Single Ended IP- HP- NP- Model No. Double Ended IP-/DE HP-/DE NP-/DE *Pumping Speed Ratings for Ion Pumps The pumps in this table have two pumping speeds shown, i.e.: 5/. The lower number is observed when the measurement standard established by the American Vacuum Society (AVS) is followed. The higher number is observed when the same pump is measured under optimum pumping speed conditions. Some manufacturers only report the optimum pumping speed number. Both ratings are provided here to allow the customer to make an informed choice. Power Supplies Refer to page -4 for more information Diode Model No. PS-35 PS- Physical Rack mount Yes Yes H x W x D 8 x 7 x 4 8 x 7 x 4 Ship weight 85 lbs lbs Electrical Input (Single phase) 5/6 Hz 5/6 Hz Voltage 5/23 VAC 28/23 VAC Current 5/8 A 25/22 A AC cord 5 with plug 5 with plug Electrical Output Voltage 5 kv DC 5 kv DC Current 35 ma, ma Protection circuit 2 28 ma trip adjustable 6, ma trip HV coax cable w/connector both ends w/connector both ends Recorder Output Yes Yes Display Analog meter Analog meter Accessories and Replacement Parts Description Model No. High voltage feedthrough HV- Replacement elements (requires 4) Diode PE- Hydrogen Diode PE-H Noble Diode PE-N Consult Factory Element insulators (pack of 4) REI-5 High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- NEG mounted on 8" flange Consult Factory Bakeout cartridge heaters (requires 4) IH- Ion Pump Rebuilding Service We offer the following services: Rebuild and repair all makes and sizes of ion pumps, elements and power supplies Reconditioned ion pumps and power supplies comply with new equipment specifications and carry a 9-day guarantee We rebuild all models of ion pumps! See page -39 for details and pricing. A comprehensive list of replacement parts are listed on page

24 4 l/s Diode & l/s Triode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Top Front Left Pumping Speed vs. Pressure diode pump unsaturated 68 Pumping Speed l/s Diode triode pump unsaturated Pumping Speed l/s Triode Pressure Torr -22

25 4 l/s Diode & l/s Triode Ion Pumps Specifications & Ordering 4 l/s Diode & l/s Triode Ion Pumps Standard Hydrogen Noble Description Diode Diode Diode Triode Operating voltage 5 kv 5 kv 5 kv 5 kv (N) Nominal pumping speed (l/s) 4 4 Operating life at x -6 Torr (hours) 5, 75, 5, 35, Maximum starting pressure (Torr) x -3 x -3 x -3 x -3 Ultimate pressure (Torr) below - below - below - below - Inlet flange (O.D./I.D.) 8./6. 8./6. 8./6. 8./6. Operating bakeout temp Maximum bakeout temp. (pump off) 35 with magnets / 45 without magnets Weight, lbs (kg) 43 (65) 43 (65) 43 (65) 43 (65) Model No. Single Ended IP-4 HP-4 NP-4 TP- Model No. Double Ended IP-4/DE HP-4/DE NP-4/DE TP-/DE Power Supplies Refer to page -4 for more information Diode Triode Model No. PS-35 PS- PS-35N* PS-N* Physical Rack mount Yes Yes Yes Yes H x W x D 8 x 7 x 4 8 x 7 x 4 8 x 7 x 4 8 x 7 x 4 Ship weight 85 lbs lbs 85 lbs lbs Electrical Input (Single phase) 5/6 Hz 5/6 Hz 5/6 Hz 5/6 Hz Voltage 5/23 VAC 28/23 VAC 5/23 VAC 28/23 VAC Current 5/8 A 25/22 A 5/8 A 25/22 A AC cord 5 with plug 5 with plug 5 with plug 5 with plug Electrical Output Voltage 5 kv DC 5 kv DC 5 kv DC 5 kv DC Current 35 ma, ma 35 ma, ma Protection circuit 2 28 ma trip adjustable 6, ma trip 2 28 ma trip adjustable 6, ma trip HV coax cable w/connector both ends w/connector both ends w/connector both ends w/connector both ends Recorder Output Yes Yes Yes Yes Display Analog meter Analog meter Analog meter Analog meter $ 2,95 $ 2,695 $ 2,95 $ 2,695 * Triode pump supplies (N) provide ( ) voltage Accessories and Replacement Parts Description Model No. High voltage feedthrough HV- Replacement elements Diode DE- Hydrogen Diode DE-H Noble Diode DE-N Consult Factory Triode TE- Element insulators (pack of 4) REI-5 High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- NEG mounted on 8" flange Consult Factory Bakeout cartridge heaters Consult Factory Ion Pump Rebuilding Service We offer the following services: Rebuild and repair all makes and sizes of ion pumps, elements and power supplies Reconditioned ion pumps and power supplies comply with new equipment specifications and carry a 9-day guarantee We rebuild all models of ion pumps! See page -39 for details and pricing. A comprehensive list of replacement parts are listed on page

26 5 l/s Diode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Top Front Front Pumping Speed vs. Pressure 8 2 Pumping Speed l/s Throughput micron l/s Pressure Torr -24

27 5 l/s Diode Ion Pumps Specifications & Ordering 5 l/s Diode Ion Pumps Standard Hydrogen Noble Description Diode Diode Diode Operating voltage 5 kv 5 kv 5 kv Nominal pumping speed (l/s) 22/5* 22/5* 6/5* Operating life at x -6 Torr (hours) 5, 75, 5, Maximum starting pressure (Torr) x -3 x -3 x -3 Ultimate pressure (Torr) below - below - below - Inlet flange (O.D./I.D.) 8./6. 8./6. 8./6. Operating bakeout temp Maximum bakeout temp. (pump off) 35 with magnets / 45 without magnets Weight, lbs (kg) 45 (66) 45 (66) 45 (66) Model No. Single Ended IP-5 HP-5 NP-5 Model No. Double Ended IP-5/DE HP-5/DE NP-5/DE *Pumping Speed Ratings for Ion Pumps The pumps in this table have two pumping speeds shown, i.e.: 5/. The lower number is observed when the measurement standard established by the American Vacuum Society (AVS) is followed. The higher number is observed when the same pump is measured under optimum pumping speed conditions. Some manufacturers only report the optimum pumping speed number. Both ratings are provided here to allow the customer to make an informed choice. Power Supplies Refer to page -4 for more information Diode Model No. PS-35 PS- Physical Rack mount Yes Yes H x W x D 8 x 7 x 4 8 x 7 x 4 Ship weight 85 lbs lbs Electrical Input (Single phase) 5/6 Hz 5/6 Hz Voltage 5/23 VAC 28/23 VAC Current 5/8 A 25/22 A AC cord 5 with plug 5 with plug Electrical Output Voltage 5 kv DC 5 kv DC Current 35 ma, ma Protection circuit 2 28 ma trip adjustable 6, ma trip HV coax cable w/connector both ends w/connector both ends Recorder Output Yes Yes Display Analog meter Analog meter Accessories and Replacement Parts Description Model No. High voltage feedthrough HV- Replacement elements (requires 6) Diode PE- Hydrogen Diode PE-H Noble Diode PE-N Consult Factory Element insulators (pack of 4) REI-5 High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- NEG mounted on 8" flange Consult Factory Ion Pump Rebuilding Service We offer the following services: Rebuild and repair all makes and sizes of ion pumps, elements and power supplies Reconditioned ion pumps and power supplies comply with new equipment specifications and carry a 9-day guarantee We rebuild all models of ion pumps! See page -39 for details and pricing. A comprehensive list of replacement parts are listed on page

28 2 l/s Diode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% 2 l/s Diode Ion Pump Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Top Front Front Pumping Speed vs. Pressure Pumping Speed l/s Throughput micron l/s Pressure Torr -26

29 2 l/s Diode Ion Pumps Specifications & Ordering 2 l/s Diode Ion Pumps Standard Hydrogen Noble Description Diode Diode Diode Operating voltage 5 kv 5 kv 5 kv Nominal pumping speed (l/s) 27/2* 27/2* 22/2* Operating life at x -6 Torr (hours) 5, 75, 5, Maximum starting pressure (Torr) x -3 x -3 x -3 Ultimate pressure (Torr) below - below - below - Inlet flange (O.D./I.D.) 8./6. 8./6. 8./6. Operating bakeout temp Maximum bakeout temp. (pump off) 35 with magnets / 45 without magnets Weight, lbs (kg) 75 (8) 75 (8) 75 (8) Model No. Single Ended IP-2 HP-2 NP-2 Model No. Double Ended IP-2/DE HP-2/DE NP-2/DE *Pumping Speed Ratings for Ion Pumps The pumps in this table have two pumping speeds shown, i.e.: 5/. The lower number is observed when the measurement standard established by the American Vacuum Society (AVS) is followed. The higher number is observed when the same pump is measured under optimum pumping speed conditions. Some manufacturers only report the optimum pumping speed number. Both ratings are provided here to allow the customer to make an informed choice. Power Supplies Refer to page -4 for more information Diode Model No. PS-35 PS- Physical Rack mount Yes Yes H x W x D 8 x 7 x 4 8 x 7 x 4 Ship weight 85 lbs lbs Electrical Input (Single phase) 5/6 Hz 5/6 Hz Voltage 5/23 VAC 28/23 VAC Current 5/8 A 25/22 A AC cord 5 with plug 5 with plug Electrical Output Voltage 5 kv DC 5 kv DC Current 35 ma, ma Protection circuit 2 28 ma trip adjustable 6, ma trip HV coax cable w/connector both ends w/connector both ends Recorder Output Yes Yes Display Analog meter Analog meter Accessories and Replacement Parts Description Model No. High voltage feedthrough HV- Replacement elements (requires 8) Diode PE- Hydrogen Diode PE-H Noble Diode PE-N Consult Factory Element insulators (pack of 4) REI-5 High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- NEG mounted on 8" flange Consult Factory Bakeout cartridge heaters (requires 4) IH- Ion Pump Rebuilding Service We offer the following services: Rebuild and repair all makes and sizes of ion pumps, elements and power supplies Reconditioned ion pumps and power supplies comply with new equipment specifications and carry a 9-day guarantee We rebuild all models of ion pumps! See page -39 for details and pricing. A comprehensive list of replacement parts are listed on page

30 27 l/s Diode & 22 l/s Triode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Top Front Left Pumping Speed vs. Pressure diode pump unsaturated 324 Pumping Speed l/s Diode triode pump unsaturated Pumping Speed l/s Triode Pressure Torr -28

31 27 l/s Diode & 22 l/s Triode Ion Pumps Specifications & Ordering 27 l/s Diode & 22 l/s Triode Ion Pumps Standard Hydrogen Noble Description Diode Diode Diode Triode Operating voltage 5 kv 5 kv 5 kv 5 kv (N) Nominal pumping speed (l/s) Operating life at x -6 Torr (hours) 5, 75, 5, 35, Maximum starting pressure (Torr) x -3 x -3 x -3 x -3 Ultimate pressure (Torr) below - below - below - below - Inlet flange (O.D./I.D.) 8./6. 8./6. 8./6. 8./6. Operating bakeout temp Maximum bakeout temp. (pump off) 35 with magnets / 45 without magnets Weight, lbs (kg) 25 (4) 25 (4) 25 (4) 25 (4) Model No. Single Ended) IP-27 HP-27 NP-22 TP-22 Model No. Double Ended IP-27/DE HP-27/DE NP-22/DE TP-22/DE Power Supplies Refer to page -4 for more information Diode Triode Model No. PS-35 PS- PS-35N* PS-N* Physical Rack mount Yes Yes Yes Yes H x W x D 8 x 7 x 4 8 x 7 x 4 8 x 7 x 4 8 x 7 x 4 Ship weight 85 lbs lbs 85 lbs lbs Electrical Input (Single phase) 5/6 Hz 5/6 Hz 5/6 Hz 5/6 Hz Voltage 5/23 VAC 28/23 VAC 5/23 VAC 28/23 VAC Current 5/8 A 25/22 A 5/8 A 25/22 A AC cord 5 with plug 5 with plug 5 with plug 5 with plug Electrical Output Voltage 5 kv DC 5 kv DC 5 kv DC 5 kv DC Current 35 ma, ma 35 ma, ma Protection circuit 2 28 ma trip adjustable 6, ma trip 2 28 ma trip adjustable 6, ma trip HV coax cable w/connector both ends w/connector both ends w/connector both ends w/connector both ends Recorder Output Yes Yes Yes Yes Display Analog meter Analog meter Analog meter Analog meter * Triode pump supplies (N) provide ( ) voltage Accessories and Replacement Parts Description Model No. High voltage feedthrough HV- Replacement elements (requires 2) Diode DE- Hydrogen Diode DE-H Noble Diode DE-N Consult Factory Triode TE- Element insulators (pack of 4) REI-5 High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- NEG mounted on 8" flange Consult Factory Bakeout cartridge heaters Consult Factory Ion Pump Rebuilding Service We offer the following services: Rebuild and repair all makes and sizes of ion pumps, elements and power supplies Reconditioned ion pumps and power supplies comply with new equipment specifications and carry a 9-day guarantee We rebuild all models of ion pumps! See page -39 for details and pricing. A comprehensive list of replacement parts are listed on page

32 4 l/s Diode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Top Front Front Pumping Speed vs. Pressure Pumping Speed l/s Throughput micron l/s Pressure Torr -3

33 4 l/s Diode Ion Pumps Specifications & Ordering 4 l/s Diode Ion Pumps Standard Hydrogen Noble Description Diode Diode Diode Operating voltage 5 kv 5 kv 5 kv Nominal pumping speed (l/s) 5/4* 5/4* 4 Operating life at x -6 Torr (hours) 5, 75, 5, Maximum starting pressure (Torr) x -3 x -3 x -3 Ultimate pressure (Torr) below - below - below - Inlet flange (O.D./I.D.) 8./6. 8./6. 8./6. Operating bakeout temp Maximum bakeout temp. (pump off) 35 with magnets / 45 without magnets Weight, lbs (kg) 325 (47) 325 (47) 325 (47) Model No. Single Ended IP-4 HP-4 NP-4 Model No. Double Ended IP-4/DE HP-4/DE NP-4/DE *Pumping Speed Ratings for Ion Pumps The pumps in this table have two pumping speeds shown, i.e.: 5/. The lower number is observed when the measurement standard established by the American Vacuum Society (AVS) is followed. The higher number is observed when the same pump is measured under optimum pumping speed conditions. Some manufacturers only report the optimum pumping speed number. Both ratings are provided here to allow the customer to make an informed choice. Power Supplies Refer to page -4 for more information Diode Model No. PS-35 PS- Physical Rack mount Yes Yes H x W x D 8 x 7 x 4 8 x 7 x 4 Ship weight 85 lbs lbs Electrical Input (Single phase) 5/6 Hz 5/6 Hz Voltage 5/23 VAC 28/23 VAC Current 5/8 A 25/22 A AC cord 5 with plug 5 with plug Electrical Output Voltage 5 kv DC 5 kv DC Current 35 ma, ma Protection circuit 2 28 ma trip adjustable 6, ma trip HV coax cable w/connector both ends w/connector both ends Recorder Output Yes Yes Display Analog meter Analog meter Accessories and Replacement Parts Description Model No. High voltage feedthrough HV- Replacement elements (requires 6) Diode PE- $ Hydrogen Diode PE-H Noble Diode PE-N Consult Factory Element insulators (pack of 4) REI-5 High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- NEG mounted on 8" flange Consult Factory Bakeout cartridge heaters (requires 8) IH- Ion Pump Rebuilding Service We offer the following services: Rebuild and repair all makes and sizes of ion pumps, elements and power supplies Reconditioned ion pumps and power supplies comply with new equipment specifications and carry a 9-day guarantee We rebuild all models of ion pumps! See page -39 for details and pricing. A comprehensive list of replacement parts are listed on page

34 5 l/s Diode & 4 l/s Triode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% 5 l/s Diode & 4 l/s Triode Ion Pump Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Top Front Right Pumping Speed vs. Pressure diode pump unsaturated 6 Pumping Speed l/s Diode triode pump unsaturated Pumping Speed l/s Triode Pressure Torr -32

35 5 l/s Diode & 4 l/s Triode Ion Pumps Specifications & Ordering 5 l/s Diode & 4 l/s Triode Ion Pumps Standard Hydrogen Noble Description Diode Diode Diode Triode Operating voltage 5 kv 5 kv 5 kv 5 kv (N) Nominal pumping speed (l/s) Operating life at x -6 Torr (hours) 5, 75, 5, 35, Maximum starting pressure (Torr) x -3 x -3 x -3 x -3 Ultimate pressure (Torr) below - below - below - below - Inlet flange (O.D./I.D.) 8./6. 8./6. 8./6. 8./6. Operating bakeout temp Maximum bakeout temp. (pump off) 35 with magnets / 45 without magnets Weight, lbs (kg) 4 (8) 4 (8) 4 (8) 4 (8) Model No. Single Ended IP-5 HP-5 NP-5 TP-4 Model No. Double Ended IP-5/DE HP-5/DE NP-5/DE TP-4/DE Power Supplies Refer to page -4 for more information Diode Triode Model No. PS-35 PS- PS-35N* PS-N* Physical Rack mount Yes Yes Yes Yes H x W x D 8 x 7 x 4 8 x 7 x 4 8 x 7 x 4 8 x 7 x 4 Ship weight 85 lbs lbs 85 lbs lbs Electrical Input (Single phase) 5/6 Hz 5/6 Hz 5/6 Hz 5/6 Hz Voltage 5/23 VAC 28/23 VAC 5/23 VAC 28/23 VAC Current 5/8 A 25/22 A 5/8 A 25/22 A AC cord 5 with plug 5 with plug 5 with plug 5 with plug Electrical Output Voltage 5 kv DC 5 kv DC 5 kv DC 5 kv DC Current 35 ma, ma 35 ma, ma Protection circuit 2 28 ma trip adjustable 6, ma trip 2 28 ma trip adjustable 6, ma trip HV coax cable w/connector both ends w/connector both ends w/connector both ends w/connector both ends Recorder Output Yes Yes Yes Yes Display Analog meter Analog meter Analog meter Analog meter * Triode pump supplies (N) provide ( ) voltage Accessories and Replacement Parts Description Model No. High voltage feedthrough HV- Replacement elements (requires 4) Diode DE- Hydrogen Diode DE-H Noble Diode DE-N Consult Factory Triode TE- Element insulators (pack of 4) REI-5 High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- NEG mounted on 8" flange Consult Factory Bakeout cartridge heaters Consult Factory Ion Pump Rebuilding Service We offer the following services: Rebuild and repair all makes and sizes of ion pumps, elements and power supplies Reconditioned ion pumps and power supplies comply with new equipment specifications and carry a 9-day guarantee We rebuild all models of ion pumps! See page -39 for details and pricing. A comprehensive list of replacement parts are listed on page

36 l/s Diode & 8 l/s Triode Ion Pumps as a Percentage of Rated Ion Pump Speed for Various Gases Diode Speed Noble Diode Triode Gas Standard & Hydrogen Speed Speed Nitrogen % % % Carbon Monoxide % 8% % Water Vapor % % % Carbon Dioxide % % % Hydrogen 2 to 25% 6% 2 to 25% Misc. Hydrocarbons 5 to 5% 9% 5 to 5% Oxygen 5% 7% 5% Helium 2 % 3% 3% Argon % or less 3 6 to 2% 2% Low oxygen speed is thought to be due to formation of a sputter-resistant oxide film on the cathode. Speed for oxygen when other gases are present is undoubtedly much higher. 2 In all ion pumps, the pumping mechanism for helium limits the long-term pumping speed for helium. When helium saturation occurs, which is a function of the load over time, pumping speeds for helium will be less than the percentages shown. 3 Diodes are quite satisfactory for pumpdown of systems backfilled with argon. They do exhibit instabilities when pumping against air or pure argon leaks. Dimensions in inches/mm Top Front Right Pumping Speed vs. Pressure diode pump unsaturated,2 Pumping Speed l/s Diode, triode pump unsaturated Pumping Speed l/s Triode Pressure Torr -34

37 l/s Diode & 8 l/s Triode Ion Pumps Specifications & Ordering l/s Diode & 8 l/s Triode Ion Pumps Standard Hydrogen Noble Description Diode Diode Diode Triode Operating voltage 5 kv 5 kv 5 kv 5 kv (N) Nominal pumping speed (l/s) 8 8 Operating life at x -6 Torr (hours) 5, 75, 5, 35, Maximum starting pressure (Torr) x -3 x -3 x -3 x -3 Ultimate pressure (Torr) below - below - below - below - Inlet flange (O.D./I.D.) 2.75/.75 (wire seal flange) Operating bakeout temp Maximum bakeout temp. (pump off) 35 with magnets / 45 without magnets Weight, lbs (kg) 93 (423) 93 (423) 93 (423) 927 (422) Model No. Single Ended IP- HP- NP-8 TP-8 Model No. Double Ended IP-/DE HP-/DE NP-8/DE TP-8/DE Power Supplies Refer to page -4 for more information Diode Triode Model No. PS-35 PS- PS-35N* PS-N* Physical Rack mount Yes Yes Yes Yes H x W x D 8 x 7 x 4 8 x 7 x 4 8 x 7 x 4 8 x 7 x 4 Ship weight 85 lbs lbs 85 lbs lbs Electrical Input (Single phase) 5/6 Hz 5/6 Hz 5/6 Hz 5/6 Hz Voltage 5/23 VAC 28/23 VAC 5/23 VAC 28/23 VAC Current 5/8 A 25/22 A 5/8 A 25/22 A AC cord 5 with plug 5 with plug 5 with plug 5 with plug Electrical Output Voltage 5 kv DC 5 kv DC 5 kv DC 5 kv DC Current 35 ma, ma 35 ma, ma Protection circuit 2 28 ma trip adjustable 6, ma trip 2 28 ma trip adjustable 6, ma trip Two HV coax cables w/connector both ends w/connector both ends w/connector both ends w/connector both ends Recorder Output Yes Yes Yes Yes Display Analog meter Analog meter Analog meter Analog meter * Triode pump supplies (N) provide ( ) voltage Accessories and Replacement Parts Description Model No. High voltage feedthrough (requires 2) HV- Replacement elements (requires 8) Diode DE- Hydrogen Diode DE-H Noble Diode DE-N Consult Factory Triode TE- Element insulators (pack of 4) REI-5 High voltage cable and connector long; not bakeable HC- 5 long; not bakeable HC-5 long; bakeable BK- NEG mounted on 8" flange Consult Factory Bakeout cartridge heaters Consult Factory Ion Pump Rebuilding Service We offer the following services: Rebuild and repair all makes and sizes of ion pumps, elements and power supplies Reconditioned ion pumps and power supplies comply with new equipment specifications and carry a 9-day guarantee We rebuild all models of ion pumps! See page -39 for details and pricing. A comprehensive list of replacement parts are listed on page

38 Combo-Vac Pumps Combo-Vacs integrate three standard components in one unit for selective pumping: a noble ion pump, a cooling unit, and a titanium sublimator. They are ideal for vacuum applications where many different gases must be pumped. All Combo-Vacs include the appropriate cooling mechanism, control units, cables, internal heaters, 6 spare Ti sublimation filaments, and 2 UHV copper gaskets. Bolt the Combo-Vac to your system in any position, rough it down, and it s ready for operation. The table below will help you to select the Combo-Vac you need for your application DIA DIA. Features High speed, filament-type titanium sublimator/baffle assembly works at a constant current setting for reliable repetitive operation. Four separate, spiral titanium alloy filaments are incorporated in the sublimator assembly to allow continuous pumping over a 2-hour period. Separate power supplied for selective operation of sublimator and noble ion pump(s). Pumping port(s) are fitted with a metalsealed flange and are blanked off for bakeout and shipment. Replaceable noble ion pumps with demountable high-voltage feedthrough. Stainless steel construction. Internal bakeout heaters. Mounting brackets are attached to pump body for assembly and support. Liquid nitrogen/water shroud standard. Operates in any position. Can be supplied with diode, hydrogen diode, or triode elements in a range of sizes. Please contact the factory for custom details. COV-5 COV Combo-Vac Pumping Systems and Controls Model No. COV-5 COV-75 COV- COV-2 Nom. nitrogen speed, l/sec (sublimator & ion pump) 5 plus 2 Nom. air speed, l/sec (ion pump) 3/ Max. argon speed, l/sec (ion pump) Sublimator control unit (see page -42) PS-5 PS-5 PS-5 PS-5 Ion pump control unit (see page -4) PS- PS-35 PS-35 PS- Number of internal heaters UHV flange size (O.D./I.D. in inches) 8./6. 8./6. 8./6. 8./6. Substrate coolant water LN 2 LN 2 LN 2 Shipping Weight (lbs)

39 Combo-Vac Pumps What is a Combo-Vac Pump? COV Combo-Vac pumps are a combination of a Titanium Sublimation Pump (TSP) and a noble diode ion pump in one cryo-cooled package. (Model COV-5 is an exception, as it has an integral water-cooled jacket rather than a cryoshroud.) Combo-Vac pumps are designed for UHV applications where high gas loads or excess hydrogen are of major concern (ex: factory processing of high power vacuum tubes and X-ray sources). While the ion pump can achieve UHV, adding a TSP will ensure the stability of the UHV environment while also decreasing the time that it takes to reach UHV. The TSP s high speed is the result of the ability of a freshly deposited titanium film in vacuum to chemisorb such gases as oxygen, nitrogen, water vapor, carbon monoxide, and carbon dioxide. When the walls on which titanium is deposited are water or cryocooled, speeds of 4 to 9 l/sec (depending upon gas species) for each square inch of surface are obtained; thus, total pump speeds can be quite large. The ion pump handles gases that are not pumped by the sublimation pump. All Combo-Vacs use the SB- sublimator assembly with a PS-5 control unit (see page -42). Combined with an ion pump and control unit for a great package price, the Combo-Vac is the smart choice for a cost-effective pumping package for UHV applications COV-2 Accessories Description Part No. Qty./Pkg OFE copper gaskets for 2.75 O.D. flanges GK-275 /pkg. OFE copper gaskets for 3.38 O.D. flanges GK-338 /pkg. OFE copper gaskets for 8 O.D. flanges GK-8 /pkg. Titanium filaments SB- 2/pkg. Bakeout heater, 25 watt, 2 VAC IH- ea. Ion pump replacement elements PE-N ea. Consult Factory Automatic LN 2 level controller (see Sec. 6, p. 6-) LNC-4 ea. -37

40 Accessories/Replacement Parts Description Model No. Application Glow discharge screen used to improve diode pump starting performance GS-5 GS-2 GS-6 For.5 O.D. tubes; & 2 l/sec pumps For 2. O.D. tubes; 25 l/sec pump Insertion heaters IH- 25 watt, 2 VAC High voltage feedthrough HV- On 2 /8 O.D. f lange For 6. O.D. tubes; 6 to 5 l/sec pumps Replacement elements PE- For most diode pumps and systems PE-H For most hydrogen diode pumps PE-N For most noble diode pumps Consult Factory DE- DE-H For 4, 5 &, l/sec diode pumps For 4, 5 &, l/sec hydrogen diodes DE-N For 4, 5 &, l/sec noble diodes Consult Factory TE-6 TE- PE-75 For 6 l/sec triode pumps For, 22, 4 & 8 l/sec triodes For special 5 l/sec straight pump Replacement diode cathodes RDC- For PE- element, 2 required, price each RDC- For DE- element, 2 required, price each Element insulators REl-5 For all elements, each pack of four High voltage cable and connector HC- feet long; not bakeable HC-5 BK- 5 feet long; not bakeable feet long; bakeable External bakeout shrouds (aluminum cans) BS-2 For 2 l/sec pump BS-3 BS-6 For 3 l/sec pump For 6 l/sec pump -38

41 Ion Pump Control Units Thermionics offers five different ion pump controllers to suit various pump sizes and operating conditions. Features Reliable proven design Includes high voltage cable at no extra cost Recorder output TLI s ion pump control units provide matched power and control for all the pumps listed in this catalog. When ordering, please specify diode or triode operation. Control units for triode pumps have the suffix N added to their model number. Choose the Right Pump for Your Application Ion Pump Application Starting Controller (pump size, l/sec) 2345 Sustaining Output PPS-5 PS- PS-(N) PS-35(N) PS-(N) The table above indicates the range of controller sizes recommended for various pump sizes. For more specific application information, please contact the factory. 5 ma ma 2 ma 35 ma, ma PPS-5 (Portable) PS- PS- or PS-(N) Ion Pump Control Unit Specifications Model No. PPS-5* (Portable) PS- PS-(N)** Physical Rack mount No Yes (requires rack adapter) Yes (requires rack adapter) H x W x D 9 x 8. x x 5 x x 8 x 4 Ship weight 3 lbs (24 lbs actual) 6.5 lbs 4 lbs Electrical Input (Single phase) VAC, 5/6 Hz or2 VDC 5 VAC, 6 Hz 5 VAC, 6 Hz Voltage has internal batteries 23 VAC, 5 Hz available 23 VAC, 5 Hz available Current (<5 Watts).5 A 5 A AC cord AC and DC cords included 5 with plug 5 with plug Electrical Output Voltage 4.8 kv 5 ma 4.2 kv ma 5 kv ma Current 5 ma ma 2 ma Protection circuit Adjustable Current limit 2 ma 2 25 ma trip HV coax cable 4 w/dual safety ground w/connector w/connector straps and cable halyard both ends both ends Recorder Output No Yes Yes Display Digital Meter LED Digital Meter * Capable of maintaining a pump for >48 hours (< ma draw) without external power. ** Triode pump supplies (N) provide ( ) voltage, others provide (+) voltage. -4

42 Ion Pump Control Units PS-35 or PS-35(N) PS- or PS-(N) Ion Pump Control Unit Specifications Model No. PS-35(N)* PS-(N)* Physical Rack mount Yes Yes H x W x D 8 x 7 x 4 8 x 7 x 4 Ship weight 85 lbs lbs Electrical Input (Single phase) 5 / 6 Hz 5 / 6 Hz Voltage 5/23 VAC 28/23 VAC Current 5/8 A 25/22 A AC cord 5 with plug 5 with plug Electrical Output Voltage 5 kv DC 5 kv DC Current 35 ma, ma Protection circuit 2 28 ma trip adj. 6, ma trip HV coax cable w/connector w/connector both ends both ends Recorder Output Yes Yes Display Analog meter Analog meter * Triode pump supplies (N) provide ( ) voltage, others provide (+) voltage. Accessories Rack Adaptor for the PS- and PS-(N) (space for three PS-s or two PS-s) Grounding Rod (recommended for all power supplies) Additional HV Coax Cable Additional Bakeable HV Coax Cable Model No. PS-5HRA DS-GR -4

43 Titanium Sublimation Pumps SB- Titanium Sublimation Pump Titanium Sublimation Pumps (TSP s) are used to pump chemically reactive, getterable gases. Titanium is effective, is easily sublimed, and is inexpensive. TSP s have high pumping speeds. At pressures below -6 Torr, pumping speed is dependent upon available surface area for condensation. Pumping speed is increased by cooling the substrate surfaces with water or liquid nitrogen. The filaments of the titanium sublimation pump are 85% titanium and 5% molybdenum, a combination which prevents premature filament burnout. Titanium Sublimation Pump Titanium Sublimation Pumps Dimensions in inches Description A* B C D Model No. TSP mounted on a 3.38 " flange SB- TSP mounted on a 2.75 " flange SB-2 * Standard length. Special lengths on request. Sublimator Power Supply Specifications PS-5 Sublimator Power Supply Model No. PS-5* Physical Rack mount Yes H x W x D 8.75 x 9 x 4 Ship weight 5 lbs Electrical Input Voltage 5 VAC, 6 Hz Current 5 A AC cord 5 feet with plug Electrical Output Voltage 9 VAC Current 5 A Selector switch for 4 filaments Timer No OFF-time (range) 2 to 2 min ON-time 4 to 2 sec Display Analog meter * Specify if used with 2.75" or 3.38" flange. Example: PS-5/275 or PS-5/

44 TSP Accessories Liquid Nitrogen Shroud High-speed LN 2 cooled cryoshroud. Full-flood design keeps all surfaces at LN 2 temperature. Readily removeable for maintenance purposes. All stainless steel construction. Liquid Nitrogen Controller For specifications, see Section 6, page 6-. Bakeable Adapter and Cable Replacement Filaments Bakeable adapter with Amphenol female MS connector and bakeable cable Material Length Weight Usable Ti 85% Ti, 5% Mo 8 5 /8 before coiling; 4 5 /8 coiled 3.6 grams/filament.5 grams/filament Titanium Sublimation Pump Accessories Description Model No. Replacement Filaments (package of 2) Bakeable adapter and cable (Amphenol female MS connector) Liquid Nitrogen Shroud (3.38" mounting flange) Liquid Nitrogen Shroud (2.75" mounting flange) Liquid Nitrogen Controller SB- SB-2 SS4/338 SS4/275 LNC-4 * Standard length. Special lengths on request. -43