High Vacuum Pumps TURBOVAC / TURBOVAC MAG DIP / LEYBOJET COOLVAC / COOLPOWER / COOLPAK

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1 Excerpt from the Oerlikon Leybold Vacuum Full Line Catalog 2013 Catalog art High Vacuum umps Edition 07/2013 High Vacuum umps TURBOVAC / TURBOVAC MAG DI / LEYBOJET COOLVAC / COOLOWER / COOLAK

2 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

3 Contents High Vacuum umps Turbomolecular umps TURBOVAC / TURBOVAC MAG General General to TURBOVAC umps Applications for TURBOVAC umps Accessories for TURBOVAC umps roducts Turbomolecular umps with Mechanical Rotor Suspension without Compound Stage with or without Compound Stage with Frequency Converter for Attaching or Separate with Compound Stage with Frequency Converter for Attaching or Separate with integrated Frequency Converter without integrated Frequency Converter Special Turbomolecular umps Turbomolecular umps with Magnetic Rotor Suspension MAG INTEGRA with integrated Frequency Converter with Compound Stage MAG DIGITAL with separate Frequency Converter with Compound Stage High Vacuum umps Accessories Electronic Frequency Converters for Turbomolecular umps with Mechanical Rotor Suspension for Turbomolecular umps with Magnetic Rotor Suspension Vibration Absorber Air Cooling Unit for TURBOVAC ClassicLine umps for TURBOVAC SL umps Flange Heater for CF High Vacuum Flanges Fine Filter Securing Collar for Octal Socket lugs Solenoid Venting Valve ower Failure Venting Valve ower Failure Venting Valve, electromagnetically actuated urge Gas and Venting Valve for ClassicLine and SL umps Adapter Set for Seal Gas and Venting Valve for the SL pumps Gas Filter to G 1/4" for urge Gas and Venting Valve Accessories for Serial Interfaces RS 232 C and RS 485 C Miscellaneous Service leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

4 Oil Diffusion umps DI, LEYBOJET General Applications and Accessories for Oil Diffusion umps Oil for Diffusion umps, for different fields of application Oil for Diffusion umps, for different pump types roducts DI umps, Water-Cooled LEYBOJET 630, Water-Cooled Accessories Astrotorus Baffles Temperature dependant Switching Components for Automatic ump System Control Adsorption Traps with Aluminium Oxide Insert Cryo umps, Cold Heads and Compressor Units COOLVAC / COOLOWER / COOLAK General Applications and Accessories Cryo umps Cryogenics Cryo umps Refrigerating Capacity of Cryogenic Cold Heads Cold Heads Compressor Units roducts Cryo umps Standard Cryo umps BasicLine COOLVAC 800 BL Cryo umps with Fully Automatic Control ClassicLine COOLVAC 800 CL, CL COOLVAC CL, CL COOLVAC CL, CL COOLVAC CL, , Cryogenics Cold Heads neumatically driven Single-Stage Cold Head COOLOWER 50 and 140 T Dual-Stage Cold Heads COOLOWER 7/25, 5/100 and 5/100 T Mechanically driven Dual-Stage Cold Heads COOLOWER 10 MD Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

5 Compressor Units for pneumatically driven cold heads and pumps with air cooling COOLAK 2000 A/2200 A with water cooling COOLAK 2000/ COOLAK 6000 H/6200 H/6000 HD for mechanically driven cold heads and pumps with water cooling COOLAK 6000 HMD/6200 HMD General Accessories for Compressor Units COOLAK Refrigerator Cryostats based on the RDK optical, based on the RDK Accessories Cryo umps / Cryogenics Controllers and Monitoring Units for Cryo umps COOLVAC ClassicLine, System Configuration Single Operation Dual Operation Dual and Mutiple Operation Low Temperature Controller MODEL Low Temperature Measurement Instrument MODEL 211S Temperature Sensor Safety Valve High Vacuum umps leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

General to TURBOVAC umps The turbomolecular pumps from Oerlikon Leybold Vacuum generate a clean high and ultra-high vacuum, are easy to operate and are exceptionally reliable.

6 General to TURBOVAC umps The turbomolecular pumps from Oerlikon Leybold Vacuum generate a clean high and ultra-high vacuum, are easy to operate and are exceptionally reliable. In connection with a well rated backing pump, pressures below mbar (0.75 x Torr) can be attained. Oerlikon Leybold Vacuum offers two product lines: 1. TURBOVAC line Turbomolecular pumps with mechanical rotor suspension 2. TURBOVAC MAG line Turbomolecular pumps with magnetic rotor suspension Each of the two product lines contains classic turbomolecular pumps as well as turbomolecular pumps with a compound stage. Oerlikon Leybold Vacuum is one of the world s leading manufacturer of turbomolecular pumps. Consequently, the TURBOVAC and the TURBOVAC MAG pumps are successfully used in many applications. A list of the most important ones is given in the table Applications in the chapter General. rinciple of Operation The turbomolecular pump is a turbine with blades. By the momentum transfer from the rapidly rotating rotor blades to the gas molecules their initially non-directed thermal motion is changed to a directed motion. TURBOVAC SL 80 turbomolecular pump with frequency converter for attaching or separate and compound stage TURBOVAC TW 361 turbomolecular pump with mechanical rotor suspension Hence, the pumping process in a turbomolecular pump results from the directed motion of the gas molecules from the inlet flange to the forevacuum port. In the molecular flow range - i.e. at pressures below 10-3 mbar (0.75 x 10-3 Torr) - the mean free path of the gas molecules is larger than the spacing between rotor and stator blades (typically some tenths of a millimeter). Consequently, the molecules collide primarily with the rotor blades with the result that the pumping process is highly efficient. In the range of laminar flow, i.e. at pressures over 10-1 mbar (0.75 x 10-1 Torr) the situation is completely different. The effect of the rotor is impaired by the frequent collisions between the molecules. Therefore, a turbomolecular pump is not capable of pumping gases at atmospheric pressure thus necessitating the use of a suitably rated forevacuum pump. To create the directed motion of the gas molecules, the tips of the rotor blades have to move at high speeds. Hence, a high rotational speed of the rotor is required. In the case of Oerlikon Leybold Vacuum turbomolecular pumps the rotor speeds vary from about 36,000 rpm for the larger rotor diameters (e.g. TURBOVAC 1000 about 20 cm (7.87 in.)) to 72,000 rpm. for small rotor diameters (e.g. TURBOVAC 50 about 6 cm (2.36 in.)) TURBOVAC MAG W 1500 CT turbomolecular pump with magnetic rotor suspension and compound stage 324 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

7 Characteristic Quantities TURBOVAC roduct Line umping speed (volume flow rate), S, [l x s -1 ] The pumping speed for a given type of gas depends on the diameter of the rotor and the high vacuum flange, the rotor/stator design, the rotor speed and the molecular weight of the gas. The pumping speed S is a non-linear function of the inlet pressure p 1 : S = S(p 1 ). Gas throughput, Q, [mbar x l x s -1 ] Gas throughput Q is linked to the pumping speed S and the inlet pressure p 1 through the relationship Q = Q(p 1 ) = p 1 x S(p 1 ). The maximum permissible gas throughput Q max is attained at the maximum permissible inlet pressure p 1, max : Q max = Q(p 1, max ). Compression, K For a given type of gas, compression K is defined as the ratio between forevacuum pressure p VV (= pressure on the forevacuum side of the turbomolecular pump) and the high vacuum pressure p HV (= pressure on the high vacuum side of the turbomolecular pump): k = k(p VV ) = p VV / p HV = p VV / p HV (p VV ). Compression depends very much on the gas throughput: at a given forevacuum pressure, compression increases when the gas throughput is reduced. Idle compression, K 0 Idle compression K 0 of a turbomolecular pump is defined as the amount of compression of this pump at Zero gas throughput. What is problematic about this definition is the fact that the demanded Zero throughput can never be implemented in practice (finite leak rate, degassing of sealing components, desorption from wall surfaces). Data on idle compression need therefore to be gained from measurements run at extremely low throughputs. Idle compression of a pump equipped with metal seals is significantly higher compared to the same pump sealed with O-rings. Ultimate pressure (base pressure), p ult, [mbar] The ultimate pressure of a turbomolecular pump is defined as that pressure which is attained in the test chamber 48 hours after a 24 hour degassing period of the measurement system. The ultimate pressure will chiefly depend on the foreline pump used and the type of seal used at the high vacuum flange. The TURBOVAC pumps are turbomolecular pumps with mechanical rotor suspension which are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to mbar (0.75 x Torr). umping speeds for air vary from 35 l x s -1 (inlet flange diameter = 40 mm (1.57 in.)) to 1,600 l x s -1 (inlet flange diameter = 250 mm (9.84 in.)). Through the compact design, the most reliable ceramics ball bearings and the simplicity of operation, this line of pumps is used in all high vacuum and ultra-high vacuum areas of application. In particular the TURBOVAC pumps are very successfully operated in mass spectroscopy applications, gas and liquid chromatographic analysis, CD, DVD and hard disk production, manufacturing of large-surface optical layers, and non-corrosive semiconductor fabrication processes. The most important advantages of the TURBOVAC product line are: - Oil-free pumps for the generation of clean high and ultra-high vacuum conditions - Highly performance in any orientation - Highly degree of operating reliability High Vacuum umps - Easy to operate - Compact design leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

8 Ceramic Ball Bearings Technology All TURBOVAC pumps are fitted with ceramic ball bearings, i.e. ceramic balls are running in steel races. The bearings are lubricated for life by grease. Ceramic balls are lighter, harder and smoother than balls made of steel. Therefore, with ceramic balls the wear on the races is significantly reduced. Consequently, the lifetime of the bearings, and hence the lifetime of the pump, is increased. The TURBOVAC pumps fitted with grease-lubricated ceramic ball bearings can be mounted in any orientation. As the ball bearing is encapsulated, the grease can not enter the high vacuum space, even if the pump is mounted up-side-down. F 1,2,3 Components supplied with the Turbomolecular umps High vacuum Flange ISO-KF, ISO-K and ISO-F models - Accessories need to be ordered separately ANSI Models - O-ring included in the delivery CF Models - Without gaskets 1), but with screws 2) Forevacuum ort - Centering rings, O-rings and clamps for all ISO-KF type forevacuum flanges are included. urge / vent ports are blanked-off 1) For CF gaskets, see Catalog art Flanges and Fittings 2) Only for MAG pumps TURBOVAC MAG roduct Line The TURBOVAC MAG pumps are turbomolecular pumps with magnetic rotor suspension which are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to mbar (0.75 x Torr). umping speeds for air vary from 300 l x s -1 (inlet flange diameter = 100 mm (3.94 in.)) to 3,200 l x s -1 (inlet flange diameter = 320 mm (12.6 in.)). The TURBOVAC MAG pumps are mostly installed on semiconductor processing lines like etching, CVD, VD and ion implantation, i.e. in applica tions where corrosive gases need to be pumped. Also electron beam microscopy is an important area of application for these pumps. The most important advantages of the TURBOVAC MAG product line are: - Hydrocarbon-free pumps for the generation of clean high and ultrahigh vacuum conditions - High performance in any orienta-tion - High degree of operating reliability - Extremely low vibration - Designed for pumping of corrosive gases - Almost maintenance-free A B C D E F F 1 F 2 F 3 High vacuum flange Forevacuum flange Venting flange urge gas flange Water cooling connection Electrical connection Connection for DC motor Connection for regulator Connection for axial sensor Flange designations used in this catalog part 326 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

Use of Turbomolecular umps in Analytical Instruments Cartridge benefits, which convince All modern analytical methods for gas, liquid and plasma analysis like for example GC-MS, LC-MS and IC-MS rely

9 Use of Turbomolecular umps in Analytical Instruments Cartridge benefits, which convince All modern analytical methods for gas, liquid and plasma analysis like for example GC-MS, LC-MS and IC-MS rely on mass spectrometers and for this reason require adequate high vacuum conditions. Also in electron microscopes and many surface analysis instruments the production of a high vacuum is essential. In over 90% of all high vacuum applications, the turbomolecular pump has been found to be ideal. Thanks to the hydrocarbon-free vacuum, most simple operation, compact design and almost mainte nance-free operation it has in most cases displaced above all the diffusion pump. On the basis of decades of experience and in cooperation with research facilities and the manufacturers of analytical instruments, Oerlikon Leybold Vacuum has continually optimized its products. Through the TURBOVAC wide range series, a further improvement has been attained, making available to users in the area of analytical engineering highly flexible and reliable products. Owing to the modular concept the user may - adapt his vacuum system precisely to his requirements - perfectly integrate the components within his system and find the most cost-effective system configuration for his needs. Moreover, in response to special customer requirements, though Oerlikon Leybold Vacuum has, through the introduction of the TURBOVAC multi inlet series, achieved a major step ahead for analytical instruments. Up to three analysis chambers can be pumped down simultaneously by a single multi inlet pump. These pumps are fine tuned with regard to pumping speed and gas throughput so as to attain higher detection sensitivities for analytical systems, a smaller footprint and an increased sample throughput. The benefits for the customers are the extreme compactness of the vacuum systems without sacrificing performan ce density, simple installation, stable vacuum connections and, compared to the use of discrete individual pumps, significantly lower investment costs for the entire system. The cartridge solu tion, moreover, allows for an innovative and cost-effective design of the customer s system and during servicing a simple replacement of the active unit without involved assembly work and leak searching. - Higher effective pumping speed - No losses in conductance - Compact vacuum system - Easy pump replacement without having to disassemble the highly sensitive mass spectrometer chambers The benefits for the customers using Oerlikon Leybold Vacuum products are reflected by the efficiency of the analytical instruments: - Increase in detection sensitivity - Smaller analytical systems - Increase in sample throughput - Reduction of system costs - Lower maintenance costs In combination with backing pumps like the TRIVAC or SCROLL pump, Oerlikon Leybold Vacuum is able to offer the best vacuum system optimized for all major applications in the area of analytical instrumentation. High Vacuum umps TURBOVAC multi Inlet TW 220/150/15 fitted in an analytical instrument (by courtesy of Thermo Fisher Scientific) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Use of Turbomolecular umps in the Area of Semiconductor rocesses In the semiconductor industry turbomolecular pumps are used on the following processes, among others: - Etching - Sputtering - Ion

This may necessitate the use of pumps equipped with a purge gas facility or a magnetic suspension in order to avoid damaged bearings.

Such temper a ture controlled variants are optionally available for the MAG 1500 C, MAG 2000 C, MAG 2800 and MAG 3200.

10 Use of Turbomolecular umps in the Area of Semiconductor rocesses In the semiconductor industry turbomolecular pumps are used on the following processes, among others: - Etching - Sputtering - Ion implantation - CVD - Lithography. In these applications pumping of aggressive gases is often required. This may necessitate the use of pumps equipped with a purge gas facility or a magnetic suspension in order to avoid damaged bearings. Especially during metal etching, deposits may occur in the forevacuum space of the turbomolecular pump. In order to prevent this the pumps must be heated to a certain temperature. Such temper a ture controlled variants are optionally available for the MAG 1500 C, MAG 2000 C, MAG 2800 and MAG In contrast to turbo molecular pumps with mechanical bearings, magnetically levitated pumps provide the advantage that they prevent overheating of the bearings at high gas flows and effectively exclude any damage to the magnetic bearings by aggressive media. In electron microscopes and in lithographic equipment, low vibration levels are exceptionally important. For this reason magnetically levitated turbomolecular pumps should be used here. The recommended backing pumps are rotary vane pumps from the TRIVAC range, possibly fitted with the BCS system. Use of Turbomolecular umps in the Area of Coating Systems Coating of optical and magnetic storage media, optical components as well as architectural glass requires high vacuum conditions. This is the only way to ensure that the formed layers will be uniform and adhere to the substrate. The way in which the vacuum is gener ated has a significant impact on the quality of the coating. By pumping the vacuum chamber down to pressures in the range of 10-6 mbar (0.75 x 10-6 Torr), interfering gas and water molecules are removed from the processing chamber. In the case of sputtering the coating process is run in the pressure range between 10-3 and 10-2 mbar (0.75 x 10-3 and 0.75 x 10-2 Torr), and in the case of evaporation coating, pressures below 10-4 mbar (0.75 x 10-4 Torr) are utilized. The turbomolecular pump meets all requirements of the customers as to a hydrocarbon-free vacuum, very simple operation, compact design and almost maintenance-free operation in an almost ideal manner. The range of pumps from Oerlikon Leybold Vacuum includes pumps with flange diameters ranging from 40 mm to 250 mm (1.57 in. to 9.84 in.) nominal width. Thus the right pump is available for each application, be it coating of data memories (CD, DVD, hard discs), coating of tools and coating of precision lenses in the area of optical components, displays or architectural glass. Research and Development In the area of research, all types of turbomolecular pumps from Oerlikon Leybold Vacuum are being used. In the case of particularly stringent requirements such as low vibration levels, a TURBOVAC with magnetic bearings should be selected; the same applies to those applications in which entirely hydrocarbon-free pump systems are required. Nuclear fusion technology High performance glass coating plant Entire high vacuum equipment of a CD/DVD coating system with TURBOVAC TW 250 S pumps 328 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

Magnetic Bearings Technology The world-wide success of the TURBOVAC MAG pro duct line results from more than 30 years of experience of Oerlikon Leybold Vacuum in the development and manufacturing of

11 Magnetic Bearings Technology The world-wide success of the TURBOVAC MAG pro duct line results from more than 30 years of experience of Oerlikon Leybold Vacuum in the development and manufacturing of turbomolecular pumps with magnetically levitated rotors. TURBOVAC MAG W 1600 i turbomolecular pump with magnetic rotor suspension, compound stage and integrated frequency converter In 1976 Oerlikon Leybold Vacuum started the market introduction of the famous TURBOVAC 560 M. This was the first magnetically levitated turbomolecular pump which became commercially available. Today, Oerlikon Leybold Vacuum is employing the well-proven and reliable 5-axes active suspension design principle. Five axes with active bearings The rotor position is actively controlled by electromagnets in all 5 degrees of freedom. The TURBOVAC MAG 300/400, MAG 600/700, MAG 830/1300, MAG 1500, MAG 1600/1700, MAG 2000, MAG 2200 and MAG 2800/3200 are equipped with such a bearing system. High Vacuum umps leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

12 Applications for TURBOVAC umps Analytical Instruments Leak detectors Mass spectrometers Gas chromatography (GC-MS) Liquid chromatography (LC-MS) Quadrupol time of flight (Q-TOF) Matrix assisted laser desorption time of flight (MALDI-TOF) Inductively coupled plasma mass spectrometry (IC-MS) Electron beam microscopy Coating Data storage / optical Data storage / magnetic Flat panel displays Optical coating Large area coating Decorative coating Metallization Wear protection Metallurgy TV tube manufacturing R & D (Research and Development) Surface analysis UHV / XHV systems article accelerators Fusion experiments Space simulation Semiconductor rocesses Load locks and transfer chambers Etch ECVD VD umps Applications Ion implantation , 361 (C) 600 C 1000 C 1100 C SL 80 n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n SL 300 TW 250 S TW 2401 MAG W 300/400/600/700 i MAG W 1300/1600/1700/2200 i(l) MAG W 300/400/600/700 MAG W 830/1300 C MAG W 1500 CT MAG W 2000 C/CT MAG W 2200 C MAG W 2800/3200 C/CT n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n 330 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

13 Accessories for TURBOVAC umps umps Accessories Frequency Converters age TURBO.DRIVE TD 20 classic 420 NT TURBO.DRIVE TD TURBO.DRIVE TD ower supply TURBO.OWER ower supply TURBO.CONTROL MAG.DRIVE S 428 MAG.DRIVE digital 430 ower supply TURBO.OWER Vibration absorber 434 Air cooling unit 434 Air cooling unit for SL pumps 435 Flange heaters for CF flanges 435 Fine filter 436 Securing collar for octal socket plugs 436 Venting valve 436 ower failure venting valve 436/437 urge gas and venting valve 437 urge gas and venting valve for ClassicLine and SL umps 438 Adapter set 438 Gas filter G 1/4" 438 Water cooling kit Accessories for serial interfaces RS 232 C and RS 485 C 439 n 50 n n n n 151, C 1000 C 1100 C n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n SL 300 TW 250 S TW 2401 MAG W 300/400/600/700 i MAG W 1300/1600/1700/2200 i(l) MAG W 300/400/600/700 MAG W 830/1300 C MAG W 1500 CT MAG W 2000 C/CT MAG W 2200 C MAG W 2800/3200 C/CT n n n n n n n n n n n n n n n n n n n n n n n SL 80 n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n High Vacuum umps leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

roducts Mechanical Rotor Suspension without Compound Stage TURBOVAC 50 Typical Applications - Leak detectors - Mass spectrometers - Electron beam microscopy - TV tube manufacturing - Load locks and

14 roducts Mechanical Rotor Suspension without Compound Stage TURBOVAC 50 Typical Applications - Leak detectors - Mass spectrometers - Electron beam microscopy - TV tube manufacturing - Load locks and transfer chambers - High vacuum chambers DN Technical Features A C - Small footprint h C B h 2 h 1 DN 16 KF Ø d a B b Top view - Installation in any orientation - Cooling by convection is sufficient for most applications - Air and water cooling can be added easily - Oil-free pump for generating clean high and ultra-high vacuum conditions DN a b d h h 1 h 2 40 ISO-KF mm in ISO-K mm in Dimensional drawing for the TURBOVAC l x s umping Speed N2 He H2 Advantages to the User - Space-saving - Easy to integrate into complex vacuum systems - Low operating costs - Highly reliable operation also in processes loaded with particles mbar Inlet ressure umping speed as a function of the inlet pressure (TURBOVAC 50 with flange DN 63 ISO-K) 332 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

15 Technical Data TURBOVAC 50 Connection Inlet Outlet DN DN umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Gas throughput mbar I x s -1 Ar mbar I x s -1 He mbar I x s -1 H 2 mbar I x s -1 Compression ratio Ar He H 2 Ultimate pressure Max. foreline pressure for Recommended forevacuum pump Nominal rotation speed Run-up time, approx. Max. power consumption mbar (Torr) mbar (Torr) min -1 (rpm) min ower consumption at ultimate pressure W Admissible ambient temperature Cooling standard optional Cooling water connection W C ( F) Cooling water consumption I x h -1 ermissible cooling water pressure ermissible cooling water temperature Weight bar C ( F) kg (lbs) 40 ISO-KF 40 CF 63 ISO-K 63 ICF 16 ISO-KF 16 ISO-KF ,90 1,00 0,70 0,80 0,30 0,40 0,25 0,30 2 x x x x x x x x 10 2 < 5 x 10-8 (< 3.8 x 10-8 ) < 5 x 10-8 (< 3.8 x 10-8 ) 1 x 10-1 (7.5 x 10-2 ) 1 x 10-1 (7.5 x 10-2 ) TRIVAC D 2,5 E TRIVAC D 2,5 E to +55 (+50 to +131) +10 bis +55 (+50 to +131) Convection Air / Water Convection Air / Water 10 mm hose nozzle 10 mm hose nozzle 15 to to 25 3 to 7 3 to to +35 (+50 to +95) +10 to +35 (+50 to +95) 2.0 (4.4) 2.0 (4.4) High Vacuum umps Technical Data TURBOTRONIK NT 10 Mains connection Max. power consumption Max. output voltage Max. output current rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. 50/60 Hz W V A I C ( F) mm (in.) kg (lbs) or V 45 3 x to +40 (+32 to +104) 106 x 128 x 233 (4.17 x 5.04 x 9.17) 1.5 (3.3) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Ordering Information TURBOVAC 50 TURBOVAC 50 without Compound Stage DN 40 ISO-KF, convection DN 40 CF, convection DN 63 ISO-K, convection DN 63 CF, convection 854 00 853 99 854 01 854 02 Mandatory

5 ft) 05.0 m (17.5 ft) 10.0 m (35.0 ft) 20.0 m (70.

16 Ordering Information TURBOVAC 50 TURBOVAC 50 without Compound Stage DN 40 ISO-KF, convection DN 40 CF, convection DN 63 ISO-K, convection DN 63 CF, convection Mandatory Accessories FC S Electronic frequency converter TURBOTRONIK NT 10 with EURO plug, V with US plug, V Connecting cable converter TURBOVAC 01.0 m (03.5 ft) 03.0 m (10.5 ft) 05.0 m (17.5 ft) 10.0 m (35.0 ft) 20.0 m (70.0 ft) Forevacuum pump TRIVAC D 2,5 E V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version V, V, 50/60 Hz; without plug, world version V, 50/60 Hz; NEMA plug, US version 100 V, 50/60 Hz; NEMA plug, Japan version V For further types, see Catalog art Oil sealed Vacuum umps 334 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

17 TURBOVAC 50 Connecting cable, max. 20 m FC S Mains cable NT 10 Ordering Information TURBOVAC 50 High Vacuum umps Accessories, optional Air cooling unit 230 V AC V AC Water cooling kit (hose nozzles 10 mm (0.4 in.) Vibration absorber DN 63 ISO-K Solenoid venting valve, normally closed 24 V DC, DN 16 ISO-KF ower failure venting valve, normally open 24 V DC, DN 16 ISO-KF Included in the Delivery of the ump Inlet screen, centering ring with FM sealing ring, outer ring Inlet screen, centering ring with FM O-ring, Spannring Centering ring with O-ring, Clamping ring V V V V V0021 ISO-K ISO-KF Foreline Flange Included in the Delivery of the Frequency Converter Mains cable FC S leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

18 Mechanical Rotor Suspension without Compound Stage TURBOVAC 151, 151 C ClassicLine Turbomolecular pumps without a purge gas facility are only suited for pumping of air or inert gases. They are not suited for pumping of aggressive or reactive gases. TURBOVAC pumps with a C in the type designation are equipped with a purge gas facility. The purge gas protects the bearing area and the motor of the TURBOVAC. Typical Applications umping Speed C I x s DN a 1 a 2 D B h 3 E h 1 h 4 b ød Dimensional drawing for the TURBOVAC 151 and 151 C A h 2 h 60 C 30 ød 1 l mbar 10-1 Inlet ressure Ar He H 2 B D F 20 Top view C DN h h h 1 h 2 h 3 h 4 a a 1 a 2 b d d 1 l 100 ISO-K mm in CF mm in E a - Leak detectors - Mass spectrometers - Optical coating - R & D - UHV systems - article accelerators - Load locks and transfer chambers Technical Features - Small footprint - Operation in any orientation - Oil-free pump for generating clean high and ultra-high vacuum conditions - Bearing temperature measurement through the TURBO.DRIVE TD 20 classic Advantages to the User - Space-saving - Easy to integrate into complex vacuum systems - Low operating costs - Highly reliable operation also in processes loaded with particles umping speed as a function of the inlet pressure (TURBOVAC 151 with flange DN 100) 336 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

19 Technical Data TURBOVAC 151 (C) Connection Inlet Outlet DN DN umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Gas throughput mbar I x s -1 Ar mbar I x s -1 He mbar I x s -1 H 2 mbar I x s -1 Compression ratio Ar He H 2 Ultimate pressure Max. foreline pressure for Recommended forevacuum pump Nominal rotation speed Run-up time, approx. Max. power consumption mbar (Torr) mbar (Torr) min -1 (rpm) min ower consumption at ultimate pressure W Admissible ambient temperature Cooling standard optional Cooling water connection W C ( F) Cooling water consumption I x h -1 ermissible cooling water pressure ermissible cooling water temperature Weight bar C ( F) kg (lbs) 100 ISO-K 100 CF 25 ISO-KF 25 ISO-KF x x x x x x x x 10 2 < 1 x (< 7.5 x ) < 1 x (< 7.5 x ) 5 x 10-1 (3.8 x 10-1 ) 5 x 10-1 (3.8 x 10-1 ) from TRIVAC D 4 B to D 16 B from TRIVAC D 4 B to D 16 B to 55 (50 to 131) 10 to 55 (50 to 131) Water Air Water Air 10 mm hose nozzle 10 mm hose nozzle 15 to to 35 3 to 7 3 to 7 10 to 25 (50 to 77) 10 to 25 (50 to 77) 8 (17) 8 (17) High Vacuum umps Technical Data TURBO.DRIVE TD 20 classic Mains connection Max. power consumption Max. output voltage Max. output current Interface rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. 50/60 Hz W V A I C ( F) mm (in.) kg (lbs) 100 to 240 V (+15 % / -10 %) x 47 5 Without, RS 232 C, RS 485 C, rofibus or 25-way terminal strip 20 0 to +45 (+32 to +113) 213 x 128 x 315 (8.39 x 5.04 x 12.40) 4.0 (8.8) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Ordering Information TURBOVAC 151 (C) TURBOVAC 151 (C) without Compound Stage DN 100 ISO-K, water-cooled DN 100 ISO-K, water-cooled (C version) DN 100 CF, water-cooled DN 100 CF, water-cooled (C

20 Ordering Information TURBOVAC 151 (C) TURBOVAC 151 (C) without Compound Stage DN 100 ISO-K, water-cooled DN 100 ISO-K, water-cooled (C version) DN 100 CF, water-cooled DN 100 CF, water-cooled (C version) Mandatory Accessories FC S TURBO.DRIVE TD 20 classic without interface with RS 232 C interface with RS 485 C interface with rofibus with 25-pol I/O Connecting cable TURBOVAC - frequency converter 003 m (10.5 ft) 005 m (17.5 ft) 010 m (35.0 ft) 020 m (70.0 ft) 050 m (175.0 ft) 060 m (210.0 ft) 080 m (280.0 ft) 140 m (490.0 ft) Mains cable 3 m (10.5 ft) EURO plug UK plug US plug m (7.5 ft) US plug 115 V AC Forevacuum pump TRIVAC D 4 B 1 phase motor; 230 V, 50 Hz 1 phase dual voltage motor; V / V; 50/60 Hz TRIVAC D 8 B 1 phase motor; 230 V, 50 Hz 1 phase dual voltage motor; V / V; 50/60 Hz TRIVAC D 16 B 1 phase motor; 230 V, 50 Hz 1 phase motor; 230 V, 50/60 Hz 3 phase motor; V/ V, 50 Hz / V/ V, 60 Hz SCROLLVAC SC 30 D 1 phase motor; V, 50/60 Hz 1 phase motor; V, 50/60 Hz 3 phase motor; V, 50 Hz / V, 460 V 60 Hz For further types, see Catalog arts Oil Sealed Vacuum umps and Dry Compressing Vacuum umps V V V V V V V V V V V V ) ) ) The mains cord ( ) must be ordered additionally 338 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

21 TURBOVAC 151 (C) Connecting cable FC S Mains cable TURBO.DRIVE TD20 classic Ordering Information TURBOVAC 151 (C) Accessories, optional Air cooling unit 230 V AC V AC V0016 High Vacuum umps Flange heater DN 100 CF, 230 V, 50 Hz DN 100 CF, 115 V, 60 Hz Vibration absorber DN 100 ISO-K DN 100 CF Solenoid venting valve, with gas admission filter, normally closed 24 V DC, DN 16 ISO-KF ower failure venting valve, with gas admission filter, normally open 24 V DC, DN 16 ISO-KF urge gas and venting valve gas flow at 1 bar 0.4 mbar x l x s -1 (24 sccm), pump connection DN 10 ISO-KF / gas connection G 1/4" 230 V AC V AC 24 V DC Gas filter to G 1/4" for purge gas and venting valve Replacement filter (for gas filter to G 1/4" for purge gas and venting valve) V V V V V V V0012 E Included in the Delivery of the ump Inlet screen, centering ring with FM sealing ring, outer ring Inlet screen Centering ring with O-ring, clamping ring ivoted threaded fittings to replace the included hose nipples ISO-K CF Foreline Flange Water Cooling leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

22 Mechanical Rotor Suspension without Compound Stage TURBOVAC 361, 361 C ClassicLine Turbomolecular pumps without a purge gas facility are only suited for pumping of air or inert gases. They are not suited for pumping of aggressive or reactive gases. TURBOVAC pumps with a C in the type designation are equipped with a purge gas facility. The purge gas protects the bearing area and the motor of the TURBOVAC. h 3 h 4 C B a a DN ød Dimensional drawing for the TURBOVAC 361 and 361 C a A E D h 2 h 1 h 60 C 30 B D Top view F Torr E l ød C DN h h h 1 h 2 h 3 h 4 a b d 1 l 100 ISO-K mm in CF mm in ISO-K mm in CF mm in b Typical Applications - Leak detectors - Mass spectrometers - Data storage - Optical coating - R & D - UHV systems - article accelerators - Load locks and transfer chambers Technical Features - Small footprint - Installation in any orientation - Oil-free pump for generating clean high and ultra-high vacuum conditions - Bearing temperature measurement through the TURBO.DRIVE TD 20 classic I x s -1 umping speed cfm Advantages to the User - Space-saving - Easy to integrate into complex vacuum systems - Low operating costs - Highly reliable operation also in processes loaded with particles mbar N2 Intake ressure Ar He H2 umping speed as a function of the inlet pressure (TURBOVAC 361 with flange DN 100) 340 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

23 Technical Data TURBOVAC 361 (C) Connection Inlet Outlet DN DN umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Gas throughput mbar I x s -1 Ar mbar I x s -1 He mbar I x s -1 H 2 mbar I x s -1 Compression ratio Ar He H 2 Ultimate pressure Max. foreline pressure for Recommended forevacuum pump Nominal rotation speed Run-up time, approx. Max. power consumption mbar (Torr) mbar (Torr) min -1 (rpm) min ower consumption at ultimate pressure W Admissible ambient temperature Cooling standard optional Cooling water connection W C ( F) Cooling water consumption I x h -1 ermissible cooling water pressure ermissible cooling water temperature Weight bar C ( F) kg (lbs) 100 ISO-K 100 CF 160 ISO-K 160 CF 25 ISO-KF 25 ISO-KF x x x x x x x x 10 3 < 1 x (< 7.5 x ) < 1 x (< 7.5 x ) 5 x 10-1 (4 x 10-1 ) 5 x 10-1 (3.8 x 10-1 ) from TRIVAC D 16 B to D 25 B from TRIVAC D 16 B to D 25 B to 55 (50 to 131) 10 to 55 (50 to 131) Water Air Water Air 10 mm hose nozzle 10 mm hose nozzle 15 to to 35 3 to 7 3 to 7 10 to 25 (50 to 77) 10 to 25 (50 to 77) 12 (26) 12 (26) High Vacuum umps Technical Data TURBO.DRIVE TD 20 classic Mains connection Max. power consumption Max. output voltage Max. output current Interface rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. 50/60 Hz W V A I C ( F) mm (in.) kg (lbs) 100 to 240 V (+15 % / -10 %) x 47 5 Without, RS 232 C, RS 485 C, rofibus or 25-way terminal strip 20 0 to +45 (+32 to +113) 213 x 128 x 315 (8.39 x 5.04 x 12.40) 4.0 (8.8) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Ordering Information TURBOVAC 361 (C) TURBOVAC 361 (C) without Compound Stage DN 100 ISO-K, water-cooled DN 100 ISO-K, water-cooled (C version) DN 100 CF, water-cooled DN 100 CF, water-cooled (C

24 Ordering Information TURBOVAC 361 (C) TURBOVAC 361 (C) without Compound Stage DN 100 ISO-K, water-cooled DN 100 ISO-K, water-cooled (C version) DN 100 CF, water-cooled DN 100 CF, water-cooled (C version) DN 160 ISO-K, water-cooled DN 160 ISO-K, water-cooled (C version) DN 160 CF, water-cooled Mandatory Accessories FC S TURBO.DRIVE TD 20 classic without interface with RS 232 C interface with RS 485 C interface with rofibus with 25-pol I/O Connecting cable TURBOVAC - frequency converter 003 m (10.5 ft) 005 m (17.5 ft) 010 m (35.0 ft) 020 m (70.0 ft) 050 m (175.0 ft) 060 m (210.0 ft) 080 m (280.0 ft) 140 m (490.0 ft) Mains cable 3 m (10.5 ft) EURO plug UK plug US plug m (7.5 ft) US plug 115 V AC Forevacuum pump TRIVAC D 16 B 1 phase motor; 230 V, 50 Hz 1 phase motor; 230 V, 50/60 Hz 3 phase motor; V/ V, 50 Hz / V/ V, 60 Hz TRIVAC D 25 B 1 phase motor; 230 V, 50 Hz 1 phase motor; 230 V, 50/60 Hz 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz SCROLLVAC SC 30 D 1 phase motor; V, 50/60 Hz 1 phase motor; V, 50/60 Hz 3 phase motor; V, 50 Hz / V, 460 V, 60 Hz For further types, see Catalog arts Oil Sealed Vacuum umps and Dry Compressing Vacuum umps V V V V V V V V V V V V Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

25 TURBOVAC 361 (C) Connecting cable FC S Mains cable TURBO.DRIVE TD20 classic Ordering Information TURBOVAC 361 (C) Accessories, optional Air cooling unit 230 V AC V AC V0016 High Vacuum umps Flange heater DN 100 CF, 230 V, 50 Hz DN 100 CF, 115 V, 60 Hz DN 160 CF, 230 V, 50 Hz DN 100 CF, 115 V, 60 Hz Vibration absorber DN 100 ISO-K DN 100 CF DN 160 ISO-K DN 160 CF Solenoid venting valve, with gas admission filter, normally closed 24 V DC, DN 16 ISO-KF ower failure venting valve, with gas admission filter, normally open 24 V DC, DN 16 ISO-KF urge gas and venting valve gas flow at 1 bar 0.4 mbar x l x s -1 (24 sccm), pump connection DN 10 ISO-KF / gas connection G 1/4" 230 V AC V AC 24 V DC Gas filter to G 1/4" for purge gas and venting valve V V V V V V V0012 Replacement filter Included in the Delivery of the ump Inlet screen, centering ring with FM sealing ring, outer ring Inlet screen Centering ring with O-ring, clamping ring ivoted threaded fittings to replace the included hose nipples E ISO-K CF Foreline Flange Water Cooling leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Mechanical Rotor Suspension without Compound Stage TURBOVAC 600 C ClassicLine Typical Applications - Load locks and transfer chambers - Optical coating - Flat panel displays - R & D h 5 DN d A E C*

26 Mechanical Rotor Suspension without Compound Stage TURBOVAC 600 C ClassicLine Typical Applications - Load locks and transfer chambers - Optical coating - Flat panel displays - R & D h 5 DN d A E C* D* B h h 2 3 h 4 h 1 h b 90 a Bottom view a 1 * drawn offset by 45 C E F B E D DN h h 1 h 2 h 3 h 4 h 5 a a 1 b b 1 b 2 d 160 ISO-K mm in CF mm in b 1 b 2 Technical Features - Small footprint - Installation in any orientation - Oil-free pump for generating clean high and ultra-high vacuum conditions - Bearing temperature measurement through the TURBO.DRIVE TD 20 classic - Seal gas connection - Venting connection Dimensional drawing for the TURBOVAC 600 C Advantages to the User umping speed l x s He H 2 Ar - Installation in any orientation - Highly reliable due to hybrid ceramic ball bearings ressure mbar10 umping speed for different gases as a function of intake pressure (TURBOVAC 600 C with flange DN 160 ISO-K) 344 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

27 Technical Data TURBOVAC 600 C Connection Inlet Outlet DN DN umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Gas throughput mbar I x s -1 Ar mbar I x s -1 He mbar I x s -1 H 2 mbar I x s -1 Compression ratio Ar He H 2 Ultimate pressure Max. foreline pressure for Recommended forevacuum pump Nominal rotation speed Run-up time, approx. Max. power consumption mbar (Torr) mbar (Torr) min -1 (rpm) min ower consumption at ultimate pressure W Admissible ambient temperature Cooling standard optional Cooling water connection W C ( F) Cooling water consumption I x h -1 ermissible cooling water pressure ermissible cooling water temperature Weight bar C ( F) kg (lbs) 160 ISO-K 160 CF 40 ISO-KF > 10 9 > x x 10 3 < 1.0 x (< 7.5 x ) 1.0 x 10-1 (7.5 x 10-2 ) TRIVAC D 25 B / D 40 B to 55 (50 to 131) Water Air 10 mm hose nozzle 20 to 80 3 to 7 10 to 30 (50 to 86) 17.0 (37.5) High Vacuum umps Technical Data TURBO.DRIVE TD 20 classic Mains connection Max. power consumption Max. output voltage Max. output current Interface rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. 50/60 Hz W V A I C ( F) mm (in.) kg (lbs) 100 to 240 V (+15 % / -10 %) x 47 5 Without, RS 232 C, RS 485 C, rofibus or 25-way terminal strip 20 0 to +45 (+32 to +113) 213 x 128 x 315 (8.39 x 5.04 x 12.40) 4.0 (8.8) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Ordering Information TURBOVAC 600 C TURBOVAC 600 C without Compound Stage DN 160 ISO-K, water-cooled DN 160 CF, water-cooled 800150V0015 800150V0017 Mandatory Accessories FC S TURBO.

28 Ordering Information TURBOVAC 600 C TURBOVAC 600 C without Compound Stage DN 160 ISO-K, water-cooled DN 160 CF, water-cooled V V0017 Mandatory Accessories FC S TURBO.DRIVE TD 20 classic without interface with RS 232 C interface with RS 485 C interface with rofibus with 25-pol I/O Connecting cable TURBOVAC - frequency converter 003 m (10.5 ft) 005 m (17.5 ft) 010 m (35.0 ft) 020 m (70.0 ft) 050 m (175.0 ft) 060 m (210.0 ft) 080 m (280.0 ft) 140 m (490.0 ft) Mains cable 3 m (10.5 ft) EURO plug UK plug US plug m (7.5 ft) US plug 115 V AC Forevacuum pump TRIVAC D 25 B 1 phase motor; 230 V, 50 Hz 1 phase motor; 230 V, 50/60 Hz 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz; TRIVAC D 40 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 3 phase motor; 200/346 V, 50 Hz / 208/360 V, 60 Hz SCROLLVAC SC 30 D 1 phase motor; V, 50/60 Hz 1 phase motor; V, 50/60 Hz 3 phase motor; V, 50 Hz / V, 460 V, 60 Hz For further types, see Catalog arts Oil Sealed Vacuum umps and Dry Compressing Vacuum umps V V V V V V V V V V V V Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

29 TURBOVAC 600 C Connecting cable FC S Mains cable TURBO.DRIVE TD20 classic Ordering Information TURBOVAC 600 C Accessories, optional Air cooling unit 230 V AC V AC V0017 High Vacuum umps Flange heater DN 160 CF, 230 V, 50 Hz DN 100 CF, 115 V, 60 Hz Vibration absorber DN 160 ISO-K DN 160 CF Solenoid venting valve, with gas admission filter, normally closed 24 V DC, DN 16 ISO-KF ower failure venting valve, with gas admission filter, normally open 24 V DC, DN 16 ISO-KF urge gas and venting valve gas flow at 1 bar 0.6 mbar x l x s -1 (36 sccm), pump connection DN 10 ISO-KF / gas connection G 1/4" 230 V AC V AC 24 V DC Gas filter to G 1/4" for purge gas and venting valve Replacement filter V V V V V V0012 E Included in the Delivery of the ump Inlet screen, centering ring with FM sealing ring, outer ring Inlet screen Centering ring with O-ring, clamping ring ivoted threaded fittings to replace the included hose nipples ISO-K CF Foreline Flange Water Cooling leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Mechanical Rotor Suspension without Compound Stage TURBOVAC 1000 C ClassicLine Typical Applications - Research systems h h 1 DN d A a 1 d 1 D a C E B h 2 F h 3 Bottom view E 45 B α h 4 F E D (C) α b

30 Mechanical Rotor Suspension without Compound Stage TURBOVAC 1000 C ClassicLine Typical Applications - Research systems h h 1 DN d A a 1 d 1 D a C E B h 2 F h 3 Bottom view E 45 B α h 4 F E D (C) α b 1) DN 40 ISO-KF, cast base flange 2) DN 63 ISO-K, screwed in DN h h 1 h 2 h 3 h 4 a a 1 b d d ISO-K/40 ISO-KF 1) mm in ISO-K/63 ISO-K 2) mm in CF/40 ISO-KF 1) mm in ISO-K/40 ISO-KF 1) mm in CF/40 ISO-KF 1) mm in ISO-K/40 ISO-KF 1) mm in ISO-K/63 ISO-K ISO-KF 2) mm in Technical Features - Robust rotor design - Installation in any orientation - Highest pumping speed and highest throughput - Bearing temperature measurement through the TURBO.DRIVE TD 20 classic - Seal gas connection - Venting connection Dimensional drawing for the TURBOVAC 1000 C umping speed l x s TURBOV AC 1000 C ressure mbar 10 Advantages to the User - Installation in any orientation - Highly reliable due to hybrid ceramic ball bearings - Standard model: water cooling - urge gas facility umping speed for air as a function of intake pressure (TURBOVAC 1000 C with D50 flange) 348 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

31 Technical Data TURBOVAC 1000 C Connection Inlet Outlet DN DN umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Gas throughput mbar I x s -1 Ar mbar I x s -1 He mbar I x s -1 H 2 mbar I x s -1 Compression ratio Ar He H 2 Ultimate pressure Max. foreline pressure for Recommended forevacuum pump for standard operation for purge gas operation Nominal rotation speed Run-up time, approx. Max. power consumption mbar (Torr) mbar (Torr) min -1 (rpm) min ower consumption at ultimate pressure W Admissible ambient temperature Cooling standard optional Cooling water connection W C ( F) Cooling water consumption I x h -1 ermissible cooling water pressure ermissible cooling water temperature Weight bar C ( F) kg (lbs) 160 ISO-K 160 CF 200 ISO-K 200 CF 250 ISO-K 40 ISO-KF 63 ISO-K 40 ISO-KF 40 ISO-KF 63 ISO-K > 1 x 10 9 > 1 x 10 9 > 1 x 10 9 > 1 x 10 9 > 1 x 10 9 > 1 x x x x x x x 10 4 < 1 x (< 7.5 x ) < 1 x (< 7.5 x ) < 1 x (< 7.5 x ) 5 x 10-2 (3.8 x 10-2 ) 5 x 10-2 (3.8 x 10-2 ) 5 x 10-2 (3.8 x 10-2 ) TRIVAC D 25 B / D 40 B TRIVAC D 25 B / D 40 B TRIVAC D 25 B / D 40 B TRIVAC D 40 B / D 65 B TRIVAC D 40 B / D 65 B TRIVAC D 40 B / D 65 B to 55 (50 to 131) 10 to 55 (50 to 131) 10 to 55 (50 to 131) Water Water Water Air Air Air 10 mm hose nozzle 10 mm hose nozzle 10 mm hose nozzle 20 to to to 80 3 to 7 3 to 7 3 to 7 10 to 30 (50 to 86) 10 to 30 (50 to 86) 10 to 30 (50 to 86) 25.0 (55.1) 25.0 (55.1) 25 (55.1) High Vacuum umps Technical Data TURBO.DRIVE TD 20 classic Mains connection Max. power consumption Max. output voltage Max. output current Interface rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. 50/60 Hz W V A I C ( F) mm (in.) kg (lbs) 100 to 240 V (+15 % / -10 %) x 47 5 Without, RS 232 C, RS 485 C, rofibus or 25-way terminal strip 20 0 to +45 (+32 to +113) 213 x 128 x 315 (8.39 x 5.04 x 12.40) 4.0 (8.8) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

32 Ordering Information TURBOVAC 1000 C TURBOVAC 1000 C without Compound Stage DN 160 ISO-K / DN 40 ISO-KF, water-cooled DN 160 ISO-K / DN 63 ISO-K, water-cooled DN 160 CF / DN 40 ISO-KF, water-cooled D00 ISO-K / DN 40 ISO-KF, water-cooled D00 CF / DN 40 ISO-KF, water-cooled D50 ISO-K / DN 40 ISO-KF, water-cooled D50 ISO-K / DN 63 ISO-K, water-cooled Mandatory Accessories FC S TURBO.DRIVE TD 20 classic without interface with RS 232 C interface with RS 485 C interface with rofibus with 25-pol I/O Connecting cable TURBOVAC - frequency converter 003 m (10.5 ft) 005 m (17.5 ft) 010 m (35.0 ft) 020 m (70.0 ft) 050 m (175.0 ft) 060 m (210.0 ft) 080 m (280.0 ft) 140 m (490.0 ft) Mains cable 3 m (10.5 ft) EURO plug UK plug US plug m (7.5 ft) US plug 115 V AC Forevacuum pump TRIVAC D 25 B 1 phase motor; 230 V, 50 Hz 1 phase motor; 230 V, 50/60 Hz 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz TRIVAC D 40 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 3 phase motor; 200/346 V, 50 Hz / 208/360 V, 60 Hz TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 3 phase motor; 230/346 V, 50 Hz / 208/360 V, 60 Hz SCROLLVAC SC 30 D 1 phase motor; V, 50/60 Hz 1 phase motor; V, 50/60 Hz 3 phase motor; V, 50 Hz / V, 460 V, 60 Hz For further types, see Catalog arts Oil Sealed Vacuum umps and Dry Compressing Vacuum umps V V V V V V V V V V V V Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

33 TURBOVAC 1000 C Connecting cable FC S Mains TURBO.DRIVE TD20 classic Ordering Information TURBOVAC 1000 C Accessories, optional Air cooling unit 230 V AC V AC V0017 High Vacuum umps Flange heater DN 160 CF, 230 V, 50 Hz DN 100 CF, 115 V, 60 Hz Vibration absorber DN 160 ISO-K DN 160 CF Solenoid venting valve, with gas admission filter, normally closed 24 V DC, DN 16 ISO-KF ower failure venting valve, with gas admission filter, normally open 24 V DC, DN 16 ISO-KF urge gas and venting valve gas flow at 1 bar 0.6 mbar x l x s -1 (36 sccm), pump connection DN 10 ISO-KF / gas connection G 1/4" 230 V AC V AC 24 V DC Gas filter to G 1/4" for purge gas and venting valve Replacement filter V V V V V V0012 E Included in the Delivery of the ump Inlet screen, centering ring with FM sealing ring, outer ring Inlet screen Centering ring with O-ring, clamping ring ivoted threaded fittings to replace the included hose nipples ISO-K CF Foreline Flange Water Cooling leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

34 Mechanical Rotor Suspension without Compound Stage TURBOVAC 1100 C ClassicLine Typical Applications - Data storage - Flat panel displays - Optical coating - Large area coating - Load locks and transfer chambers h h 1 h 3 DN ød a D a 1 A C B E F h 6 h 2 h 4 h 5 Top view E b F B E DN h h 1 h 2 h 3 h 4 h 5 h 6 a a 1 b d 160 ISO-K mm in ISO-K mm in ISO-K mm in D (C) 45 Technical Features - Robust rotor design - Installation in any orientation - Highest pumping speed and highest throughput - Bearing temperature measurement through the TURBO.DRIVE TD 20 classic - Oil-free pump for generating clean high and ultra-high vacuum conditions - Seal gas connection - Venting connection Dimensional drawing for the TURBOVAC 1100 C I x s -1 umping Speed Torr mbar 1 N2 Inlet ressure Ar H2 750 Advantages to the User - Space-saving - Easy to integrate into complex vacuum systems - High productivity - Low operating costs - Highly reliable operation also in processes loaded with particles umping speed as a function of the inlet pressure (TURBOVAC 1100 C with flange D50) 352 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

35 Technical Data TURBOVAC 1100 C Connection Inlet Outlet DN DN umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Gas throughput mbar I x s -1 Ar mbar I x s -1 He mbar I x s -1 H 2 mbar I x s -1 Compression ratio Ar He H 2 Ultimate pressure Max. foreline pressure for Recommended forevacuum pump Nominal rotation speed Run-up time, approx. Max. power consumption mbar (Torr) mbar (Torr) min -1 (rpm) min ower consumption at ultimate pressure W Admissible ambient temperature Cooling standard optional Cooling water connection W C ( F) Cooling water consumption I x h -1 ermissible cooling water pressure ermissible cooling water temperature Weight bar C ( F) kg (lbs) 160 ISO-K 200 ISO-K 250 ISO-K 63 ISO-K 63 ISO-K 63 ISO-K > 1 x 10 7 > 1 x 10 7 > 1 x 10 7 > 1 x 10 7 > 1 x 10 7 > 1 x x x x x x x 10 3 < 3.0 x (< 2.3 x ) < 3.0 x (< 2.3 x ) < 3.0 x (< 2.3 x ) < 1.0 x 10-1 (< 7.5 x 10-2 ) < 1.0 x 10-1 (< 7.5 x 10-2 ) < 1.0 x 10-1 (< 7.5 x 10-2 ) TRIVAC D 65 B / TRIVAC D 65 B / TRIVAC D 65 B / SCROLLVAC SC 15/30 D SCROLLVAC SC 15/30 D SCROLLVAC SC 15/30 D to 55 (50 to 131) 10 to 55 (50 to 131) 10 to 55 (50 to 131) Water Water Water Air Air Air 10 mm hose nozzle 10 mm hose nozzle 10 mm hose nozzle 24 to to to 60 3 to 7 3 to 7 3 to 7 10 to 30 (50 to 86) 10 to 30 (50 to 86) 10 to 30 (50 to 86) 22 (48) 22 (48) 22 (48) High Vacuum umps Technical Data TURBO.DRIVE TD 20 classic Mains connection Max. power consumption Max. output voltage Max. output current Interface rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. 50/60 Hz W V A I C ( F) mm (in.) kg (lbs) 100 to 240 V (+15 % / -10 %) x 47 5 Without, RS 232 C, RS 485 C, rofibus or 25-way terminal strip 20 0 to +45 (+32 to +113) 213 x 128 x 315 (8.39 x 5.04 x 12.40) 4.0 (8.8) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Ordering Information TURBOVAC 1100 C TURBOVAC 1100 C without Compound Stage DN 160 ISO-K / DN 63 ISO-K, water-cooled D00 ISO-K / DN 63 ISO-K, water-cooled D50 ISO-K / DN 63 ISO-K, water-cooled

36 Ordering Information TURBOVAC 1100 C TURBOVAC 1100 C without Compound Stage DN 160 ISO-K / DN 63 ISO-K, water-cooled D00 ISO-K / DN 63 ISO-K, water-cooled D50 ISO-K / DN 63 ISO-K, water-cooled V V V0032 Mandatory Accessories FC S TURBO.DRIVE TD 20 classic without interface with RS 232 C interface with RS 485 C interface with rofibus with 25-pol I/O Connecting cable TURBOVAC - frequency converter 003 m (10.5 ft) 005 m (17.5 ft) 010 m (35.0 ft) 020 m (70.0 ft) 050 m (175.0 ft) 060 m (210.0 ft) 080 m (280.0 ft) 140 m (490.0 ft) Mains cable 3 m (10.5 ft) EURO plug UK plug US plug m (7.5 ft) US plug 115 V AC Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 3 phase motor; 230/346 V, 50 Hz / 208/360 V, 60 Hz SCROLLVAC SC 30 D 1 phase motor; V, 50/60 Hz 1 phase motor; V, 50/60 Hz 3 phase motor; V, 50 Hz / V, 460 V, 60 Hz For further types, see Catalog arts Oil Sealed Vacuum umps and Dry Compressing Vacuum umps V V V V V V V V V V V V Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

37 TURBOVAC 1100 C Connecting cable FC S Mains cable TURBO.DRIVE TD20 classic Ordering Information TURBOVAC 1100 C Accessories, optional Vibration absorber DN 160 ISO-K High Vacuum umps Solenoid venting valve, with gas admission filter, normally closed 24 V DC, DN 16 ISO-KF ower failure venting valve, with gas admission filter, normally open 24 V DC, DN 16 ISO-KF urge gas and venting valve gas flow at 1 bar 0.6 mbar x l x s -1 (36 sccm), pump connection DN 10 ISO-KF / gas connection G 1/4" 230 V AC V AC 24 V DC Gas filter to G 1/4" for purge gas and venting valve Replacement filter V V V V V V0012 E Included in the Delivery of the ump Inlet screen, centering ring with FM sealing ring, outer ring Inlet screen Centering ring with O-ring, clamping ring ivoted threaded fittings to replace the included hose nipples ISO-K CF Foreline Flange Water Cooling leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Mechanical Rotor Suspension with Frequency Converter for Attaching or Separate with or without Compound Stage TURBOVAC SL 80 / L 80 H / SL 80 C Typical Applications - Helium leak detectors - Mass

) - Electron beam microscopy - XHV-/UHV systems - Transfer chambers ISO-K Ø d DN d h h 1 h 2 63 ISO-K mm 95 145-22 ISO-K in. 3.74 5.71-0.87 63 CF mm 95 166 150 27 Ø d in. 3.74 5.71 5.91 1.

38 Mechanical Rotor Suspension with Frequency Converter for Attaching or Separate with or without Compound Stage TURBOVAC SL 80 / L 80 H / SL 80 C Typical Applications - Helium leak detectors - Mass spectrometers (gas chromatography GC-MS), liquid chromatography (LC-MS), residual gas analysis, mobile analytical systems, etc.) - Electron beam microscopy - XHV-/UHV systems - Transfer chambers ISO-K Ø d DN d h h 1 h 2 63 ISO-K mm ISO-K in CF mm Ø d in h 3 b b 1 63 ISO-K mm in CF mm in b 2 b 3 b 4 63 ISO-K mm in CF mm in TURBOVAC SL 80 Ø Dimensional drawing for the TURBOVAC SL 80: attachment examples S CF Ø d Technical Features - Oil-free pump - High pressure foreline tolerance - Excellent resistance to vibration due to proven mechanical bearings - Efficient convection cooling due to a large number of cooling fins - urge gas/venting connection - Installation in any orientation - Flexible attachment of the frequency converter to the pump - Small footprint - Delayed venting through the frequency converter TURBO.DRIVE TD 400 (optional) - Selection of interfaces, USB, RS 232 C, RS 485 C, rofibus umping Speed l x s Ar He H Inlet ressure mbar 1 Advantages to the User - Easy to integrate into complex vacuum systems - Space-saving - repared for pumping of slightly corrosive gases owing to the seal gas connection - High reliability, MTTF over 200,000 hours - Matching accessories (fan, water cooling, seal gas/venting valves, power failure venting valves, flange heaters, different cable lengths etc.) - High reliability due to self-monitoring umping speed as a function of the inlet pressure 356 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

39 Technical Data TURBOVAC SL 80 SL 80 H SL 80 C Connection Inlet Outlet DN DN umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Gas throughput mbar I x s -1 Ar mbar I x s -1 He mbar I x s -1 H 2 mbar I x s -1 Compression ratio Ar He H 2 Ultimate pressure Max. foreline pressure for Recommended forevacuum pump Nominal rotation speed Run-up time, approx. Max. power consumption mbar Torr) mbar (Torr) min -1 (rpm) min ower consumption at ultimate pressure W Admissible ambient temperature Cooling standard optional Cooling water connection W C ( F) Cooling water consumption I x h -1 ermissible cooling water pressure ermissible cooling water temperature Weight, approx. bar C ( F) kg (lbs) 40 ISO-KF 63 ISO-K 63 CF 63 ISO-K 63 CF 63 ISO-K 16 ISO-KF 16 ISO-KF 16 ISO-KF > 1 x > 1 x x 10 6 > 1 x > 1 x x x x x x x x 10 2 < 2 x < 2 x < 5 x 10-8 (< 1.5 x ) (< 1.5 x ) (< 4.0 x 10-8 ) 16 (12) 16 (12) 0.35 (0.26) TRIVAC D 2,5 E / D 4 B TRIVAC D 2,5 E / D 4 B TRIVAC D 2,5 E / D 4 B SCROLLVAC SC 5 D / 15 D SCROLLVAC SC 5 D / 15 D SCROLLVAC SC 5 D / 15 D DIVAC 1.4 HV3 DIVAC 1.4 HV to +45 (+50 to +113) +15 to +45 (+50 to +113) +15 to +45 (+50 to +113) Convection Convection Convection Water / Air Water / Air Water / Air G 1/8", inside thread / G 1/8", inside thread / G 1/8", inside thread / 8 mm hose nozzle 8 mm hose nozzle 8 mm hose nozzle 15 to to to 60 2 to 7 2 to 7 2 to 7 10 to 40 (50 to 104) 10 to 40 (50 to 104) 10 to 40 (50 to 104) ) (3.97) (4.19) (6.84) (4.19) (6.84) (4.19) High Vacuum umps Technical Data TURBO.DRIVE TD 400 Mains connection Max. current consumption Max. power consumption Max. output voltage Interface rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. V DC A W V I C ( F) mm (in.) kg (lbs) x 24 USB, RS 232 C, RS 485 C or rofibus to +45 (+41 to +113) 100 x 90 x 100 (3.9 x 3.5 x 3.9) 0.7 (1.6) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Ordering Information TURBOVAC SL 80 with compound stage DN 40 ISO-KF DN 63 ISO-K / DN 16 ISO-KF DN 63 ISO-K / DN 16 ISO-KF (SL 80 H) DN 63 CF / DN 16 ISO-KF DN 63 CF / DN 16 ISO-KF (SL 80 H) without

40 Ordering Information TURBOVAC SL 80 with compound stage DN 40 ISO-KF DN 63 ISO-K / DN 16 ISO-KF DN 63 ISO-K / DN 16 ISO-KF (SL 80 H) DN 63 CF / DN 16 ISO-KF DN 63 CF / DN 16 ISO-KF (SL 80 H) without compound stage DN 63 ISO-K / DN 16 ISO-KF (SL 80 C) Mandatory Accessories Electronic frequency converter TURBO.DRIVE TD 400 with USB interface with RS 232 C interface with RS 485 C interface with rofibus Connecting cable pump - frequency converter 00.2 m (0.7 ft) 00.3 m (1.1 ft) 00.4 m (1.4 ft) 00.5 m (1.75 ft) 01.0 m (3.5 ft) 02.5 m (8.75 ft) 03.0 m (10.5 ft) 05,0 m (17.5 ft) 10.0 m (35.0 ft) ower supply and control unit TURBO.CONTROL V connecting cable power supply - TURBO.CONTROL m (03.5 ft) 03 m (10.5 ft) 05 m (17.5 ft) 10 m (35.0 ft) 20 m (70.0 ft) ower supply TURBO.OWER V connecting cable power supply - TURBO.OWER m (03.5 ft) 03 m (10.5 ft) 05 m (17.5 ft) 10 m (35.0 ft) 20 m (70.0 ft) Mains cable 3 m (10.5 ft) - TURBO.CONTROL 300 / TURBO.OWER 300 with EURO plug with UK plug with US plug 5-15 with US plug 115 V AC, 2 m (7.5 ft) START/STO switch for manual operation of the turbomolecular pump Forevacuum pump TRIVAC D 2,5 E V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version V / V, 50/60 Hz, without plug, (world version) TRIVAC D 4 B 1 phase EURO motor; 230 V, 50 Hz 1 phase dual voltage motor; V / V; 50/60 Hz DIVAC 1.4 HV V, 50/60 Hz SCROLLVAC SC 5 D 1 phase motor; V, 50/60 Hz 1 phase motor; V, 50/60 Hz SCROLLVAC SC 15 D 1 phase motor; V, 50/60 Hz 1 phase motor; V, 50/60 Hz 3 phase motor; V, 50 Hz / V, 460 V, 60 Hz For further types, see Catalog arts Oil Sealed Vacuum umps and Dry Compressing Vacuum umps FC S TURBOVAC SL 80 / SL 80 H / SL 80 C V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V ) V ) The mains cord ( ) must be ordered additionally 358 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

41 Connecting cable FC Connecting cable S Mains cable TURBOVAC SL 80 TURBO.DRIVE TD 400 TURBO.OWER 300 TURBO.CONTROL 300 Ordering Information TURBOVAC SL 80 / SL 80 H / SL 80 C Accessories, optional FC S Mounting kit TD 400 for SL 80, incl. 0.2 m (0.7 ft.) long connecting cable pump - frequency converter for installing the frequency converter beside the pump for installing the frequency converter beneath the pump (not for V0007) V V0008 Water cooling unit with 2x G 1/8" connections, including 2 hose nozzles G 1/8" 8 mm (0.3 in.) OD, 2 gaskets (copper) 10 x 14 x 1 mm (0.4 x 0.6 x 0.04 in.) and hose clamps V0001 High Vacuum umps Air cooling unit Flange heater DN 63 CF, 230 V, 50 Hz DN 63 CF, 115 V, 60 Hz Inlet screen DN 40 ISO-KF DN 63 ISO-K (coarse) DN 63 CF (coarse) Fine filter with centering ring DN 63 ISO-K Vibration absorber DN 63 ISO-K DN 63 CF ump connection adapter DN 10 ISO-KF / pump connection M 8 (incl. O-ring, filter and clamping ring) urge gas and venting valve gas flow at 1 bar 0.4 mbar x l x s -1 (24 sccm), pump connection DN 10 ISO-KF / gas connection G 1/4" 230 V AC V AC 24 V DC Gas filter to G 1/4" for purge gas and venting valve Replacement filter ower failure venting valve, normally open 24 V DC, DN 16 ISO-KF ower failure venting valve, normally open 024 V DC, DN 10 ISO-KF 230 V AC / 50/60 Hz, DN 10 ISO-KF Hat rail adaptor as mounting aid Fin type cooler V E E E V V V V V V0012 E V V V0001 leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Mechanical Rotor Suspension with Frequency Converter for Attaching or Separate with Compound Stage TURBOVAC SL 300 Typical Applications - article accelerators - Mass spectrometers (gas chromatography

) - Electron beam microscopy - Coating technology - XHV-/UHV systems - Transfer chambers Technical Features DN d d 1 d 2 100 ISO-K mm 130 140 154 in. 5.12 5.51 6.

42 Mechanical Rotor Suspension with Frequency Converter for Attaching or Separate with Compound Stage TURBOVAC SL 300 Typical Applications - article accelerators - Mass spectrometers (gas chromatography GC-MS), liquid chromatography (LC-MS), time of flight (TOF-MS), residual gas analysis, etc.) - Electron beam microscopy - Coating technology - XHV-/UHV systems - Transfer chambers Technical Features DN d d 1 d ISO-K mm in CF mm in Oil-free pump - High pressure foreline tolerance - Excellent resistance to vibration due to proven mechanical bearings h h 1 h ISO-K mm in CF mm in Efficient convection cooling due to a large number of cooling fins - urge gas/venting connection - Installation in any orientation b b ISO-K mm in CF mm in Fan connection - Flexible attachment of the frequency converter to the pump - Small footprint - Delayed venting through the frequency converter TURBO.DRIVE TD 400 (optional) - Selection of interfaces, USB, RS 232 C, RS 485 C, rofibus Dimensional drawing for the TURBOVAC SL 300 umping Speed 350 l x s Ar 250 He 200 H Inlet ressure mbar 1 Advantages to the User - Easy to integrate into complex vacuum systems - Space-saving - repared for pumping of slightly corrosive gases owing to the seal gas connection - High reliability, MTTF over 200,000 hours - Matching accessories (fan, water cooling, seal gas/venting valves, power failure venting valves, flange heaters, different cable lengths etc.) - High reliability due to self-monitoring umping speed as a function of the inlet pressure 360 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

43 Technical Data TURBOVAC SL 300 Connection Inlet Outlet DN DN umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Gas throughput mbar I x s -1 Ar mbar I x s -1 He mbar I x s -1 H 2 mbar I x s -1 Compression ratio Ar He H 2 Ultimate pressure Max. foreline pressure for Recommended forevacuum pump Nominal rotation speed Run-up time, approx. Max. power consumption mbar (Torr) mbar (Torr) min -1 (rpm) min ower consumption at ultimate pressure W Admissible ambient temperature Cooling standard optional Cooling water connection W C ( F) Cooling water consumption I x h -1 ermissible cooling water pressure ermissible cooling water temperature Weight bar C ( F) kg (lbs) 100 ISO-K 100 CF 16 ISO-KF 16 ISO-KF > 1 x > 1 x > 1 x > 1 x x x x x 10 5 < 1 x (< 7.5 x ) < 1 x (< 7.5 x ) 8 (6) 8 (6) TRIVAC D 2,5 E / TRIVAC D 4 B SCROLLVAC SC 5 /15 D DIVAC 3.8 HV3 TRIVAC D 2,5 E / TRIVAC D 4 B SCROLLVAC SC 5 /15 D DIVAC 3.8 HV to +45 (+50 to +113) +15 to +45 (+50 to +113) Convection Water / Air G 1/8", inside thread / 8 mm hose nozzle Convection Water / Air G 1/8", inside thread / 8 mm hose nozzle 30 to to 60 3 to 7 3 to 7 15 to 35 (59 to 95) 15 to 35 (59 to 95) 5.2 (11.5) 7.4 (16.3) High Vacuum umps Technical Data TURBO.DRIVE TD 400 Mains connection Max. current consumption Max. power consumption Max. output voltage Interface rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. V DC A W V I C ( F) mm (in.) kg (lbs) x 24 USB, RS 232 C, RS 485 C or rofibus to +45 (+41 to +113) 100 x 90 x 100 (3.9 x 3.5 x 3.9) 0.7 (1.6) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Ordering Information TURBOVAC SL 300 TURBOVAC SL 300 with Compound Stage DN 100 ISO-K / DN 16 ISO-KF DN 100 CF / DN 16 ISO-KF 800170V3005 800170V3006 Mandatory Accessories Electronic frequency

44 Ordering Information TURBOVAC SL 300 TURBOVAC SL 300 with Compound Stage DN 100 ISO-K / DN 16 ISO-KF DN 100 CF / DN 16 ISO-KF V V3006 Mandatory Accessories Electronic frequency converter TURBO.DRIVE TD 400 with USB interface with RS 232 C interface with RS 485 C interface with rofibus Connecting cable pump - frequency converter 00.2 m (00.7 ft) 00.3 m (01.1 ft) 00.4 m (01.4 ft) 00.5 m (1.75 ft) 01.0 m (03.5 ft) 02.5 m (8.75 ft) 03.0 m (10.5 ft) 05,0 m (17.5 ft) 10.0 m (35.0 ft) ower supply and control unit TURBO.CONTROL V connecting cable power supply - TURBO.CONTROL m (03.5 ft) 03 m (10.5 ft) 05 m (17.5 ft) 10 m (35.0 ft) 20 m (70.0 ft) ower supply TURBO.OWER V connecting cable power supply - TURBO.OWER m (03.5 ft) 03 m (10.5 ft) 05 m (17.5 ft) 10 m (35.0 ft) 20 m (70.0 ft) Mains cable 3 m (10.5 ft) - TURBO.CONTROL 300 / TURBO.OWER 300 with EURO plug with UK plug with US plug 5-15 with US plug 115 V AC, 2 m (7.5 ft) START/STO switch for manual operation of the turbomolecular pump Forevacuum pump TRIVAC D 2,5 E V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version V / V, 50/60 Hz, without plug, (world version) DIVAC 3.8 HV3 230 V, Hz TRIVAC D 4 B 1 phase EURO motor; 230 V, 50 Hz 1 phase dual voltage motor; V / V; 50/60 Hz SCROLLVAC SC 5 D 1 phase motor; V, 50/60 Hz 1 phase motor; V, 50/60 Hz SCROLLVAC SC 15 D 1 phase motor; V, 50/60 Hz 1 phase motor; V, 50/60 Hz 3 phase motor; V, 50 Hz / V, 460 V, 60 Hz For further types, see Catalog arts Oil Sealed Vacuum umps and Dry Compressing Vacuum umps FC S V V V V V V V V V V V V V V V V V V V V V V V V V ) ) The mains cord ( ) must be ordered additionally 362 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

45 Connecting cable FC Connecting cable S Mains cable TURBOVAC SL 300 TURBO.DRIVE TD 400 TURBO.OWER 300 TURBO.CONTROL 300 Ordering Information TURBOVAC SL 300 Accessories, optional FC S Mounting kit TD 400 for SL 300, incl. 0.2 m (0.7 ft.) long connecting cable pump - frequency converter for installing the frequency converter beside the pump for installing the frequency converter beneath the pump (not for V0007) Water cooling unit with 2x G 1/8" connections, including 2 hose nozzles G 1/8" 8 mm (0.3 in.) OD, 2 gaskets (copper) 10 x 14 x 1 mm (0.4 x 0.6 x 0.04 in.) and hose clamps V V V0002 High Vacuum umps Air cooling unit Flange heater DN 100 CF, 230 V, 50 Hz DN 100 CF, 115 V, 60 Hz Inlet screen DN 100 ISO-K (coarse) DN 100 ISO-K (fine) DN 100 ISO-CF (coarse) DN 100 ISO-CF (fine) Vibration absorber DN 100 ISO-K DN 100 CF ump connection adapter DN 10 ISO-KF / pump connection M 8 (incl. O-ring, filter and clamping ring) urge gas and venting valve gas flow at 1 bar 0.2 mbar x l x s -1 (12 sccm), pump connection DN 10 ISO-KF / gas connection G 1/4" 230 V AC V AC 24 V DC Gas filter to G 1/4" for purge gas and venting valve Replacement filter ower failure venting valve, normally open 24 V DC, DN 16 ISO-KF ower failure venting valve, normally open 024 V DC, DN 10 ISO-KF 230 V AC / 50/60 Hz, DN 10 ISO-KF Hat rail adaptor as mounting aid Fin type cooler V V V E V V V V V0012 E V V V0001 leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Mechanical Rotor Suspension with integrated Frequency Converter with Compound Stage TURBOVAC TW 250 S Typical Applications - Analytical Instruments - Coating - R & D - Transfer chambers b b 1 d d 1 h

46 Mechanical Rotor Suspension with integrated Frequency Converter with Compound Stage TURBOVAC TW 250 S Typical Applications - Analytical Instruments - Coating - R & D - Transfer chambers b b 1 d d 1 h DN 100 ISO-K mm in DN 100 CF mm in h 1 h 2 h 3 h 4 h 5 DN 100 ISO-K mm in DN 100 CF mm in Bottom view 7,5 120 d1 M4 DN 105 Technical Features - High gas throughput - Oil-free pump - Insensitive to impact and movement due to the mechanical bearing concept - Installation in any orientation - Small footprint h - Integrated fan - urge gas/venting connection h1 h5 h2 b b 1 d h3 h4 Dimensional drawing for the TURBOVAC TW 250 S without frequency converter 10 2 Advantages to the User -1 - Highest throughput for and Ar 10 - Highest reliability in operation 1 - Space-saving Throughput TURBOVAC TW 250 S TRIV AC D 16 B TRIV AC D 8 B - High reliability due to self-monitoring - Easy to integrate into complex vacuum systems mbar Inlet pressure Operation diagram for nitrogen for TURBOVAC TW 250 S 364 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

47 Technical Data TURBOVAC TW 250 S Connection Inlet Outlet DN DN umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Gas throughput mbar I x s -1 Ar mbar I x s -1 He mbar I x s -1 H 2 mbar I x s -1 Compression ratio Ar He H 2 Ultimate pressure mbar (Torr) Max. foreline pressure for mbar (Torr) Recommended forevacuum pump diaphragm pump with an ultimate pressure < 3 mbar (< 2.3 Torr) Nominal rotation speed Run-up time, approx. Max. power consumption min -1 (rpm) min ower consumption at ultimate pressure W Admissible ambient temperature Cooling standard optional Cooling water connection W C ( F) Cooling water consumption I x h -1 ermissible cooling water pressure ermissible cooling water temperature Weight bar C ( F) kg (lbs) 100 ISO-K 100 CF 16 ISO-KF x x x x 10 2 < 2 x 10-8 (< 1.5 x 10-8 ) 3.0 (2.3) TRIVAC D 2,5 E TRIVAC D 8 B (at purge gas operation) upon request to +40 (+59 to +104) Air Water G 1/8", inside thread / 10 mm hose nozzle 30 to 60 3 to 7 20 to 40 (+68 to +104) 5.8 (12.8) High Vacuum umps Technical Data TURBO.DRIVE TD 400 Mains connection Max. current consumption Max. power consumption Max. output voltage Interface rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. V DC A W V I C ( F) mm (in.) kg (lbs) x 24 USB, RS 232 C, RS 485 C or rofibus to +45 (+41 to +113) 100 x 90 x 100 (3.9 x 3.5 x 3.9) 0.7 (1.6) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

48 Ordering Information TURBOVAC TW 250 S TURBOVAC TW 250 S with Compound Stage DN 100 ISO-K / DN 16 ISO-KF, water-cooled, rofibus DN 100 ISO-K / DN 16 ISO-KF, water-cooled, rofibus, inlet screen coarse DN 100 ISO-K / DN 16 ISO-KF, air-cooled, rofibus, inlet screen coarse DN 100 ISO-K / DN 16 ISO-KF, air-cooled, RS 232 C interface DN 100 ISO-K / DN 16 ISO-KF, air-cooled, RS 485 C interface DN 100 CF/ DN 16 ISO-KF, air-cooled, RS 232 C interface DN 100 CF / DN 16 ISO-KF, air-cooled, RS 485 C interface Mandatory Accessories ower supply and control unit TURBO.CONTROL 300 FC S V V V V V V V V connection line frequency converter TD TURBO.CONTROL m (03.5 ft) 03 m (10.5 ft) 05 m (17.5 ft) 10 m (35.0 ft) 20 m (70.0 ft) ower supply TURBO.OWER V V V V V V V connection line frequency converter TD TURBO.OWER m (03.5 ft) 03 m (10.5 ft) 05 m (17.5 ft) 10 m (35.0 ft) 20 m (70.0 ft) Mains cable 3 m (10.5 ft) - TURBO.CONTROL 300 / TURBO.OWER 300 with EURO plug with UK plug with US plug 5-15 with US plug 115 V AC, 2 m (7.5 ft) START/STO switch for manual operation of the turbomolecular pump Forevacuum pump TRIVAC D 2,5 E V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version V / V, 50/60 Hz, without plug, (world version) TRIVAC D 8 B 1 phase EURO motor; 230 V, 50 Hz 1 phase dual voltage motor; V / V; 50/60 Hz For further types, see Catalog art Oil Sealed Vacuum umps V V V V V V V V ) 1) The mains cord ( ) must be ordered additionally 366 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

49 FC Connecting cable S Mains cable TURBOVAC TW 250 S TURBO.CONTROL 300 TURBO.OWER 300 Ordering Information TURBOVAC TW 250 S Accessories, optional Flange heater DN 100 CF, 230 V, 50 Hz DN 100 CF, 115 V, 60 Hz FC S High Vacuum umps Inlet screen DN 100 ISO-K (coarse) DN 100 ISO-K (fine) V V0102 Vibration absorber DN 100 ISO-K DN 100 CF V Included in the Delivery of the ump Centering ring with FM sealing ring, clamping shoe with gasket Foreline Flange Sealing screw and a gasket ring Vent ort High vacuum connection elements are not part of the supplied equipment leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Mechanical Rotor Suspension without integrated Frequency Converter with Compound Stage TURBOVAC TW 250 S Typical Applications - Analytical Instruments - Coating - R & D - Transfer chambers b b 1 d d

50 Mechanical Rotor Suspension without integrated Frequency Converter with Compound Stage TURBOVAC TW 250 S Typical Applications - Analytical Instruments - Coating - R & D - Transfer chambers b b 1 d d 1 h DN 100 ISO-K mm in DN 100 CF mm in h 1 h 2 h 3 h 4 h 5 DN 100 ISO-K mm in DN 100 CF mm in Bottom view 7,5 120 d1 M4 DN 105 Technical Features - High gas throughput - Oil-free pump - Insensitive to impact and movement due to the mechanical bearing concept - Installation in any orientation - Small footprint h - Integrated fan - urge gas/venting connection h1 h5 h2 b b 1 d h3 h4 Dimensional drawing for the TURBOVAC TW 250 S without frequency converter Advantages to the User - Highest throughput for and Ar 10 - Highest reliability in operation Throughput TURBOVAC TW 250 S TRIV AC D 16 B TRIV AC D 8 B - Space-saving - High reliability due to self-monitoring - Easy to integrate into complex vacuum systems mbar Inlet pressure Operation diagram for nitrogen for TURBOVAC TW 250 S 368 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

51 Technical Data TURBOVAC TW 250 S Connection Inlet Outlet DN DN umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Gas throughput mbar I x s -1 Ar mbar I x s -1 He mbar I x s -1 H 2 mbar I x s -1 Compression ratio Ar He H 2 Ultimate pressure mbar (Torr) Max. foreline pressure for mbar (Torr) Recommended forevacuum pump diaphragm pump with an ultimate pressure < 3 mbar (< 2.3 Torr) Nominal rotation speed Run-up time, approx. Max. power consumption min -1 (rpm) min ower consumption at ultimate pressure W Admissible ambient temperature Cooling standard optional Cooling water connection W C ( F) Cooling water consumption I x h -1 ermissible cooling water pressure ermissible cooling water temperature Weight bar C ( F) kg (lbs) 100 ISO-K 16 ISO-KF x x x x 10 2 < 2 x 10-8 (< 1.5 x 10-8 ) 3.0 (2.3) TRIVAC D 2,5 E TRIVAC D 8 B (at purge gas operation) upon request to +40 (+59 to +104) Air Water G 1/8", inside thread / 10 mm hose nozzle 30 to 60 3 to to +40 (+68 to +104) 5 (11) High Vacuum umps Technical Data TURBO.DRIVE TD 400 Mains connection Max. current consumption Max. power consumption Max. output voltage Interface rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. V DC A W V I C ( F) mm (in.) kg (lbs) x 24 USB, RS 232 C, RS 485 C or rofibus to +45 (+41 to +113) 100 x 90 x 100 (3.9 x 3.5 x 3.9) 0.7 (1.6) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

52 Ordering Information TURBOVAC TW 250 S TURBOVAC TW 250 S with Compound Stage DN 100 ISO-K / DN 16 ISO-KF, air-cooled, inlet screen coarse DN 100 ISO-K / DN 16 ISO-KF, air-cooled, inlet screen coarse (with vibration absorber) V0007 Mandatory Accessories Electronic frequency converter TURBO.DRIVE TD 400 with USB interface RS 232 C interface RS 485 C interface FC S V V V0003 Connecting cable pump - TURBO.DRIVE TD m (03.5 ft) 03 m (10.5 ft) 05 m (17.5 ft) ower supply and control unit TURBO.CONTROL V V connecting cable TURBO.DRIVE TD TURBO.CONTROL m (03.5 ft) 03 m (10.5 ft) 05 m (17.5 ft) 10 m (35.0 ft) 20 m (70.0 ft) ower supply TURBO.OWER V V V V V V V connecting cable TURBO.DRIVE TD TURBO.OWER m (03.5 ft) 03 m (10.5 ft) 05 m (17.5 ft) 10 m (35.0 ft) 20 m (70.0 ft) Mains cable 3 m (10.5 ft) - TURBO.CONTROL 300 / TURBO.OWER 300 with EURO plug with UK plug with US plug 5-15 with US plug 115 V AC, 2 m (7.5 ft) Forevacuum pump TRIVAC D 2,5 E V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version V / V, 50/60 Hz, without plug, (world version) TRIVAC D 8 B 1 phase EURO motor; 230 V, 50 Hz 1 phase dual voltage motor; V / V; 50/60 Hz For further types, see Catalog art Oil Sealed Vacuum umps V V V V V V V V ) 1) The mains cord ( ) must be ordered additionally 370 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

53 Connecting cable FC Connecting cable S Mains cable TURBOVAC TW 250 S TURBO.DRIVE 400 TURBO.CONTROL 300 TURBO.OWER 300 Ordering Information TURBOVAC TW 250 S Accessories, optional Inlet screen DN 100 ISO-K (coarse) DN 100 ISO-K (fine) FC S V V0102 High Vacuum umps Vibration absorber DN 100 ISO-K DN 100 CF V Included in the Delivery of the ump Centering ring with FM sealing ring, blank flange with clamping shoe Foreline Flange Sealing screw and a gasket ring Vent ort DC coupling for the power supply is included leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Mechanical Rotor Suspension with Compound Stage TURBOVAC TW 2401 Typical Applications - R & D - Thermonuclear fusion - Space simulation - Data memories - Coating Technical Features Ø d D50 ISO-F -

54 Mechanical Rotor Suspension with Compound Stage TURBOVAC TW 2401 Typical Applications - R & D - Thermonuclear fusion - Space simulation - Data memories - Coating Technical Features Ø d D50 ISO-F - Robust rotor design - High pressure foreline tolerance - Oil-free pump for generating clean high vacuum conditions c Ø d 1 h 3 h 2 h 1 h - Installation in any orientation - Seal gas/venting connection (purge/vent) - Water cooling h 5 h 6 h 4 Venting connection ISO-G1/4 Seal gas inlet ISO-G1/4 35 Ø d 2 Connection b 1 KF 40 l - CE and NRTL compliant - RS 232 C interface - Electronic frequency converter TD 240 with integrated power supply and display for controlling and monitoring the pump l 1 Cooling water inlet / outlet ISO-Rc1/4 b 6x M16 D25 CD255 Advantages to the User DN d d 1 d 2 b b 1 c l l ISO-F mm in Compact, space saving design - High gas throughput - Extremely rugged and maintenancefree h h 1 h 2 h 3 h 4 h 5 h ISO-F mm in Dimensional drawing for the TURBOVAC TW 2401 with air cooling 372 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

55 Technical Data TURBOVAC TW 2401 Connection Inlet Outlet DN DN umping speed I x s -1 Ar I x s -1 H 2 I x s -1 Gas throughput mbar I x s -1 Ar mbar I x s -1 Compression ratio Ar H 2 Ultimate pressure Max. foreline pressure for Recommended forevacuum pump Nominal rotation speed Run-up time, approx. Max. power consumption mbar (Torr) mbar (Torr) min -1 (rpm) min ower consumption at ultimate pressure W Admissible ambient temperature Cooling standard Cooling water connection W C ( F) Cooling water consumption I x h -1 ermissible cooling water pressure ermissible cooling water temperature Weight bar C ( F) kg (lbs) 250 ISO-F 40 ISO-KF x x x 10 3 < 1 x 10-8 (< 7.5 x 10-9 ) 2.0 (1.5) from TRIVAC D 25 B to D 65 B to 40 (50 to 104) Water ISO-Rc 1/4" > 90 3 to 6 10 to 35 (50 to 95) 47 (104) High Vacuum umps Technical Data TURBO.DRIVE TD 240 Mains connection Max. power consumption Max. output voltage Interface rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. 50/60 Hz W V I C ( F) mm (in.) kg (lbs) 180 to x 110 RS 232 C 20-5 to +40 (+23 to +104) 209 x 149 x 400 (8.2 x 5.7 x 15.7) 8.2 (18.1) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Ordering Information TURBOVAC TW 2401 TURBOVAC TW 2401 D50 ISO-F, water-cooled 800150V0108 Mandatory Accessories FC S Electronic frequency converter TURBO.

56 Ordering Information TURBOVAC TW 2401 TURBOVAC TW 2401 D50 ISO-F, water-cooled V0108 Mandatory Accessories FC S Electronic frequency converter TURBO.DRIVE TD 240 RS 232 C interface V0112 Connecting cable TURBOVAC - frequency converter 03 m (10.5 ft) 10 m (35.0 ft) V V0119 Mains cable 3 m (10.5 ft) EURO plug UK plug US plug 5-15 Forevacuum pump TRIVAC D 25 B 1 phase motor; 230 V, 50 Hz 1 phase motor; 230 V, 50/60 Hz 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz SCROLLVAC SC 30 D 1 phase motor; V, 50/60 Hz 1 phase motor; V, 50/60 Hz 3 phase motor; V, 50 Hz / V, 460 V, 60 Hz For further types, see Catalog arts Oil Sealed Vacuum umps and Dry Compressing Vacuum umps V V V I x s -1 Ar 10 3 N2 umping speed 10 2 H mbar 1 High vacuum pressure umping speed for nitrogen for the TURBOVAC TW Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

57 TURBOVAC TW 2401 Connecting cable FC S TURBO.DRIVE 240 Mains cable Ordering Information TURBOVAC TW 2401 Accessories, optional urge gas adaptor DN 16 ISO-KF, angled Included in the Delivery of the ump Inlet screen, centering ring with FM sealing ring, outer ring V0120 ISO-F High Vacuum umps leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Special Turbomolecular umps Advantages to the User - Reduction of system costs - Smaller size of the analysis system - Reduction in the number of individual

chromatograph to a mass spectrometer) - GC/MS (linking of a gas chromatograph to a mass spectrometer) Sample Inlet Data Base - TOF-MS (time-of-flight mass

Sample inlet ionisation mass filter detector 2-6 mbar Forevacuum ump Application example: GC-MS 10-2 - 10-4 mbar IS 1 HV < 10-5 - 10-7 mbar Multi Inlet

HV stage S = 60 to 400 l/s Interstage IS1 S = 30 to 300 l/s Interstage IS2 S = 05 to 30 l/s - Cartridge solutions (without pump housing) are available - Compact

58 Special Turbomolecular umps Advantages to the User - Reduction of system costs - Smaller size of the analysis system - Reduction in the number of individual vacuum components - Choice between cartridge or custom ized pump housing Typical Applications For example TURBOVAC Multi Inlet - LC-MS (linking of a liquid chromatograph to a mass spectrometer) - GC/MS (linking of a gas chromatograph to a mass spectrometer) Sample Inlet Data Base - TOF-MS (time-of-flight mass spectrometer) Ion Source Mass Analyser Detector - IC-MS (inductively coupled plasma mass spectrometry) - Helium leak detectors Vacuum System Technical Features Sample inlet ionisation mass filter detector 2-6 mbar Forevacuum ump Application example: GC-MS mbar IS 1 HV < mbar Multi Inlet Turbomolecular ump - Dual Inlet (pumping down of two analysis chambers) - Triple inlet (pumping down of three analysis chambers) - High effective pumping speed HV stage S = 60 to 400 l/s Interstage IS1 S = 30 to 300 l/s Interstage IS2 S = 05 to 30 l/s - Cartridge solutions (without pump housing) are available - Compact vacuum system Customized versions are available upon request Multi inlet product examples left: cartridge, right: dual inlet 376 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

59 Notes High Vacuum umps leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

MAG INTEGRA - Magnetic Rotor Suspension with integrated Frequency Converter, with Compound Stage TURBOVAC MAG W 300/400 i Typical Applications - Gas analysis systems - article accelerators - Electron

60 MAG INTEGRA - Magnetic Rotor Suspension with integrated Frequency Converter, with Compound Stage TURBOVAC MAG W 300/400 i Typical Applications - Gas analysis systems - article accelerators - Electron microscopes - Research - Coating systems Technical Features umping speed 700 l x s MAG W 400 MAG W 300 h h DN d 1 d 2 h h 1 h 2 l b b* s 1 s 2 MAG W 300 i mm 100 ISO-K h in mm 100 CF in MAG W 400 i mm 160 ISO-K in mm 160 CF in b* = width with plug of the DRIVE/BEARING cable connected instead of MAG.DRIVE is Dimensional drawing for the TURBOVAC MAG W 300/400 i - Installation in any orientation - DN 100 or 160 ISO-K and/or CF high vacuum connection - DN 16 ISO-KF with clamped fore vacuum connection - urge gas/venting connection DN 16 ISO-KF with clamped connection (purge/vent) - Water or air cooling optional - CE and RoHS compliant; fulfilment of UL requirements - 2 slots for industrial communica tions modules - Standard 9 pin 24 V SS LC-IO in Control Slot - RS 232 C in Service Slot - further interfaces can be fitted: rofibus, RS 485 C Advantages to the User - Highest pumping speed from the smallest possible size - New standard regarding maintenance-free systems - Suitability for vibration sensitive applications in the area of analytical engineering, thin-film technology, electron microscopes, research, development among others - Flexibility due to the modular concept; the converter is optionally also available by way of a bench top unit Inlet pressure mbar 1 umping speed for of the TURBOVAC MAG W 300/400 i as a function of the inlet pressure 378 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

61 Technical Data W 300 i TURBOVAC MAG W 400 i Inlet flange DN umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Operating speed min -1 Compression ratio H 2 He Ultimate pressure Max. degassing temperature Max. foreline pressure for Recommended backing pump Run-up time Foreline flange (clamped) urge / vent port (clamped) Water cooling connection (optional) Weight, approx. mbar (Torr) C ( F) mbar (Torr) min DN DN G kg (lbs) 100 ISO-K 100 CF 160 ISO-K 160 CF x x x x x x x x x x x x 10 4 < 10-8 < < 10-8 < (< 0.75 x 10-8 ) (< 0.75 x ) (< 0.75 x 10-8 ) (< 0.75 x ) 80 (176) 80 (176) 8 (6) 8 (6) 8 (6) 8 (6) TRIVAC D 2,5 E TRIVAC D 2,5 E TRIVAC D 2,5 E TRIVAC D 2,5 E TRIVAC D 8 B TRIVAC D 8 B TRIVAC D 8 B TRIVAC D 8 B < 5 < 5 < 5 < 5 16 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF 1/8" 1/8" 1/8" 1/8" 12 (26) 12 (26) 12 (26) 12 (26) High Vacuum umps Technical Data ower supply Ripple % ower consumption maximum at ultimate pressure DC current consumption, max. DC power supply voltage range V W W Length of the DC connection cable, max. at 3 x 1.5 mm 2 m (ft) at 3 x 2.5 mm 2 m (ft) Contact rating for the relays, max. ermissible ambient temperature during operation C ( F) during storage C ( F) Relative humidity of the air, non-condensing % rotection class Overvoltage category ollution category A V I Integrated Frequency Converter TURBO.DRIVE is < 2 < 2 < 2 < to to to to to to to to 53 5 (17.5) 5 (17.5) 5 (17.5) 5 (17.5) 20 (70.0) 20 (70.0) 20 (70.0) 20 (70.0) 32 V; 0,5 A 32 V; 0,5 A 32 V; 0,5 A 32 V; 0,5 A +10 to to to to +40 (+50 to +104) (+50 to +104) (+50 to +104) (+50 to +104) 0 to to to to +60 (0 to +140) (0 to +140) (0 to +140) (0 to +140) 5 to 85 5 to 85 5 to 85 5 to II II II II leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

62 Ordering Information TURBOVAC MAG W 300/400 i TURBOVAC MAG W 300 i FC with Integrated Frequency Converter and Seal Gas Connection DN 100 ISO-K DN 100 CF TURBOVAC MAG W 400 i FC with Integrated Frequency Converter and Seal Gas Connection DN 160 ISO-K DN 160 CF Mandatory Accessories FC ower supply TURBO.OWER V V V V V0221 DC cable frequency converter - power supply 01 m (03.5 ft) 03 m (10.5 ft) 05 m (17.5 ft) 10 m (35.0 ft) 20 m (70.0 ft) Mains cable, 3 m (10.5 ft) with EURO plug with US plug 5-15 Forevacuum pump TRIVAC D 2,5 E V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version V, 50/60 Hz; NEMA plug, US version TRIVAC D 8 B 1 phase motor; 230 V, 50/60 Hz 3 phase motor; 230/400 V, 50 Hz; 250/440 V, 60 Hz V V V V V V V Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

63 With integrated Frequency Converter FC TURBO.OWER 500 MAG W 300/400 i DC connecting cable max. 20 m S Mains cable Ordering Information TURBOVAC MAG W 300/400 i High Vacuum umps Accessories, optional Inlet screen DN 100 ISO-K coarse (3.2 x 3.2 mm (0.13 x 0.13 in.)) fine (1.6 x 1.6 mm (0.06 x 0.06 in.)) DN 100 CF coarse (3.2 x 3.2 mm (0.13 x 0.13 in.)) fine (1.6 x 1.6 mm (0.06 x 0.06 in.)) DN 160 ISO-K DN 160 CF Flange heater 100 CF, 230 V, 50 Hz 100 CF, 115 V, 60 Hz 160 CF, 230 V, 50 Hz 160 CF, 115 V, 60 Hz Water cooling unit Air cooling unit START/STO switch for manual operation of the turbomolecular pump DC plug Solenoid venting valve, normally closed 24 V DC, DN 16 ISO-KF ower failure venting valve, normally open Included in the Delivery of the ump Flanges for forevacuum, venting and purge gas are blank-flanged Centering ring with FM sealing ring and a clamping yoke V V E E E V V V V0021 leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

64 MAG INTEGRA - Magnetic Rotor Suspension with integrated Frequency Converter, with Compound Stage TURBOVAC MAG W 600/700 i Typical Applications - Gas analysis systems - article accelerators - Electron microscopes - Research - Coating systems Technical Features umping speed 700 l x s MAG W 700 MAG W 600 h h DN d 1 d 2 h h 1 h 2 l b b* s 1 s 2 MAG W 600 i mm 160 ISO-K h in mm 160 CF in MAG W 700 i mm 200 ISO-K in mm 200 CF in b* = width with plug of the DRIVE/BEARING cable connected instead of MAG.DRIVE is Dimensional drawing for the TURBOVAC MAG W 600/700 i - Installation in any orientation - DN 160 or 200 ISO-K and/or CF high vacuum connection - D5 ISO-KF with clamped forevacuum connection - urge gas/venting connection DN 16 ISO-KF with clamped connection (purge/vent) - Water or air cooling optional - CE and RoHS compliant; fulfilment of UL requirements - 2 slots for industrial communica tions modules - Standard 9 pin 24 V SS LC-IO in Control Slot - RS 232 C in Service Slot - further interfaces can be fitted: rofibus, RS 485 C Advantages to the User - Highest pumping speed from the smallest possible size - New standard regarding maintenance-free systems - Suitability for vibration sensitive applications in the area of analytical engineering, thin-film technology, electron microscopes, research, development among others - Flexibility due to the modular concept; the converter is optionally also available by way of a bench top unit Inlet pressure mbar 1 umping speed for of the TURBOVAC MAG W 600/700 i as a function of the inlet pressure 382 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

65 Technical Data W 600 i TURBOVAC MAG W 700 i Inlet flange DN umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Operating speed min -1 Compression ratio H 2 He Ultimate pressure Max. degassing temperature Max. foreline pressure for Recommended backing pump Run-up time Foreline flange (clamped) urge / vent port (clamped) Water cooling connection (optional) Weight, approx. mbar (Torr) C ( F) mbar (Torr) min DN DN G kg (lbs) 160 ISO-K 160 CF 200 ISO-K 200 CF x x x x x x x x x x x x 10 6 < 10-8 < < 10-8 < (< 0.75 x 10-8 ) (< 0.75 x ) (< 0.75 x 10-8 ) (< 0.75 x ) 80 (176) 80 (176) 6.0 (4.5) 6.0 (4.5) 6.0 (4.5) 6.0 (4.5) TRIVAC D 2,5 E TRIVAC D 2,5 E TRIVAC D 2,5 E TRIVAC D 2,5 E TRIVAC D 8 B TRIVAC D 8 B TRIVAC D 8 B TRIVAC D 8 B < 6 < 6 < 6 < 6 25 ISO-KF 25 ISO-KF 25 ISO-KF 25 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF 1/8" 1/8" 1/8" 1/8" 17 (37.5) 17 (37.5) 17 (37.5) 17 (37.5) High Vacuum umps Technical Data ower supply Ripple % ower consumption maximum at ultimate pressure DC current consumption, max. DC power supply voltage range V W W Length of the DC connection cable, max. at 3 x 1.5 mm 2 m (ft) at 3 x 2.5 mm 2 m (ft) Contact rating for the relays, max. ermissible ambient temperature during operation C ( F) during storage C ( F) Relative humidity of the air, non-condensing % rotection class Overvoltage category ollution category A V I Integrated Frequency Converter TURBO.DRIVE is < 2 < 2 < 2 < to to to to to to to to 53 5 (17.5) 5 (17.5) 5 (17.5) 5 (17.5) 20 (70.0) 20 (70.0) 20 (70.0) 20 (70.0) 32 V; 0,5 A 32 V; 0,5 A 32 V; 0,5 A 32 V; 0,5 A +10 to to to to +40 (+50 to +104) (+50 to +104) (+50 to +104) (+50 to +104) 0 to to to to +60 (0 to +140) (0 to +140) (0 to +140) (0 to +140) 5 to 85 5 to 85 5 to 85 5 to II II II II leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Ordering Information TURBOVAC MAG W 600/700 i TURBOVAC MAG W 600 i FC with Integrated Frequency Converter and Seal Gas Connection DN 160 ISO-K DN 160 CF TURBOVAC MAG W 700 i FC with Integrated

66 Ordering Information TURBOVAC MAG W 600/700 i TURBOVAC MAG W 600 i FC with Integrated Frequency Converter and Seal Gas Connection DN 160 ISO-K DN 160 CF TURBOVAC MAG W 700 i FC with Integrated Frequency Converter and Seal Gas Connection V V0506 D00 ISO-K D00 CF Mandatory Accessories ower supply TURBO.OWER 500 FC V V V0221 DC cable frequency converter - power supply 01 m (03.5 ft) 03 m (10.5 ft) 05 m (17.5 ft) 10 m (35.0 ft) 20 m (70.0 ft) Mains cable, 3 m (10.5 ft) with EURO plug with US plug 5-15 Forevacuum pump TRIVAC D 2,5 E V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version V, 50/60 Hz; NEMA plug, US version TRIVAC D 8 B 1 phase motor; 230 V, 50/60 Hz 3 phase motor; 230/400 V, 50 Hz; 250/440 V, 60 Hz V V V V V V V Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

67 With integrated Frequency Converter FC TURBO.OWER 500 MAG W 600/700 i DC connecting cable max. 20 m S Mains cable Ordering Information TURBOVAC MAG W 600/700 i High Vacuum umps Accessories, optional Inlet screen DN 160 ISO-K DN 160 CF D00 ISO-K D00 CF Flange heater 160 CF, 230 V, 50 Hz 160 CF, 115 V, 60 Hz Water cooling unit Air cooling unit START/STO switch for manual operation of the turbomolecular pump DC plug Solenoid venting valve, normally closed 24 V DC, DN 16 ISO-KF ower failure venting valve, normally open Included in the Delivery of the ump Flanges for forevacuum, venting and purge gas are blank-flanged Centering ring with FM sealing ring and a clamping yoke E E V V V V0021 leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

68 MAG INTEGRA - Magnetic Rotor Suspension with integrated Frequency Converter, with Compound Stage TURBOVAC MAG W 1300 i(l) to 2200 i(l) Typical Applications - VD coatings systems - Coating of architectural glass - Optical coatings - LC displays Similar - Flat panels - Research i il Ø d 1 DN - Analytical systems Technical Features - Installation in any orientation I s 3 h 5 h - D00 and/or 250 in ISO-F and/or CF high vacuum connection h 7 - DN 40 KF forevacuum connection s 6 b Ø d 1 s 4 h 6 s 5 - urge gas/venting connection DN 16 KF with clamped connection (purge/vent) Ø d 2 - Water cooling h - CE and RoHS compliant; fulfilment of UL requirements h 4 Forevacuum s 1 h 3 h 2 urge gas h 1 Type DN b d 1 d 2 h h 1 h 2 h 3 h 4 h 5 h 6 MAG W ISO-F mm 420 1) s 2 in ) CF mm in MAG W 1600/ ISO-F mm in CF mm in MAG W ISO-F mm in CF mm in h 7 l l 1 l 2 s 1 s 2 s 3 s 4 s 5 s 6 MAG W ISO-F mm ) 311 1) 332 1) in ) ) ) CF mm in MAG W 1600/ ISO-F mm in CF mm in MAG W ISO-F mm in CF mm in l 1 l 2 - rotection class I 54-2 slots for industrial communica tions modules - Standard rofibus - RS 232 C in Service Slot - further interfaces can be fitted: RS 485 C, 9 pin 24 V LC,... Advantages to the User - Highest pumping speed and gas throughput from a very small size - Rugged and reliable operation in industrial applications - Sets new benchmarks for maintenance-free systems - Suited for vibration sensitive applications in the areas of analytical, thin-film, electron microscopy, research and development among others. - Flexibility through the modular concept; the converter is either attached to the side or under the pump 1) 4 mm (o.16 in.) for cooling coil Dimensional drawing for the MAG INTEGRA, dimensions in mm 386 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

69 Technical Data TURBOVAC MAG W 1300 i(l) 1600 i(l) Booster 1700 i(l) 2200 i(l) Inlet flange umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 DN Operating speed min -1 standby speed adjustable from min -1 to nominal speed Max. compression ratio Ar He at 1 sccm H 2 at 1 sccm Max. gas throughput briefly, e.g. during pumpdown mbar x I x s -1 in continuous operation mbar x I x s -1 Ar briefly, e.g. during pumpdown mbar x I x s -1 Ar in continuous operation mbar x I x s -1 Ultimate pressure ISO-F flange CF flange Max. degassing temperature Max. foreline pressure Ar Recommended backing pump Run-up time Foreline flange urge / vent port (clamped) Water cooling connection Weight, approx. Noise level acc. ISO 3744 mbar (Torr) mbar (Torr) C ( F) mbar (Torr) mbar (Torr) min DN DN G kg (lbs) db(a) Vibration level at high vacuum flange at max. speed µm 200 ISO-F 250 ISO-F 250 ISO-F 250 ISO-F 200 CF 250 CF 250 CF (230 Hz) (230 Hz) (230 Hz) (230 Hz) > 10 8 > 10 7 > 10 8 > 10 8 > 10 8 > 10 7 > 10 8 > x x x x x x x x < 10-8 (< 7.5 x 10-9 ) < 10-8 (< 7.5 x 10-9 ) < 10-8 (< 7.5 x 10-9 ) < 10-8 (< 7.5 x 10-9 ) < (< 7.5 x ) < (< 7.5 x ) < (< 7.5 x ) 80 (176) 80 (176) 80 (176) 80 (176) 4.0 (3.00) 1.0 (0.75) 4.0 (3.00) 2.5 (1.9) 0.6 (0.45) 1.0 (0.75) 0.6 (0.45) 2.5 (1.9) TRIVAC B or dry compressing pumps < 5 < 7 < 7 <10 40 KF 40 KF 40 KF 40 KF 16 KF 16 KF 16 KF 16 KF 1/8" 1/8" 1/8" 1/8" 40 (88) 45 (99) 45 (99) 50 (110) < 41 < 41 < 41 < High Vacuum umps Technical Data ower supply Mains frequency ower consumption maximum at ultimate pressure Contact rating for the relays, max. ermissible ambient temperature during operation during storage V Hz W W C ( F) C ( F) Relative humidity of the air, non-condensing % rotection class Overvoltage category ollution category I Integrated Frequency Converter MAG.DRIVE im ±10% 50 / V, 0.5 A +10 to +45 (+50 to +113) -10 to +60 (+14 to +140) 5 to II 2 leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

70 Ordering Information TURBOVAC MAG W 1300 FC S with Integrated Frequency Converter and urge Gas Connection MAG W 1300 i, D00 ISO-F, rofibus MAG W 1300 i, D00 ISO-F, 24 V SS interface MAG W 1300 i, D00 CF, rofibus MAG W 1300 i, D00 CF, 24 V SS interface MAG W 1300 il, D00 ISO-F, rofibus MAG W 1300 il, D00 ISO-F, 24 V SS interface MAG W 1300 il, D00 CF, rofibus MAG W 1300 il, D00 CF 24 V SS interface TURBOVAC MAG W 1600 Booster FC S with Integrated Frequency Converter and urge Gas Connection MAG W 1600 i Booster, D50 ISO-F, rofibus MAG W 1600 i Booster, D50 ISO-F, 24 V SS interface MAG W 1600 il Booster, D50 ISO-F, rofibus MAG W 1600 il Booster, D50 ISO-F, 24 V SS interface TURBOVAC MAG W 1700 FC S with Integrated Frequency Converter and urge Gas Connection MAG W 1700 i, D50 ISO-F, rofibus MAG W 1700 i, D50 ISO-F, 24 V SS interface MAG W 1700 i, D50 CF, rofibus MAG W 1700 i, D50 CF, 24 V SS interface MAG W 1700 il, D50 ISO-F, rofibus MAG W 1700 il, D50 ISO-F, 24 V SS interface MAG W 1700 il, D50 CF, rofibus MAG W 1700 il, D50 CF, 24 V SS interface TURBOVAC MAG W 2200 FC S with Integrated Frequency Converter and urge Gas Connection MAG W 2200 i, D50 ISO-F, rofibus MAG W 2200 i, D50 ISO-F, 24 V SS interface MAG W 2200 i, D50 CF, rofibus MAG W 2200 i, D50 CF, 24 V SS interface MAG W 2200 il, D50 ISO-F, rofibus MAG W 2200 il, D50 ISO-F, 24 V SS interface MAG W 2200 il, D50 CF, rofibus MAG W 2200 il, D50 CF, 24 V SS interface TURBOVAC MAG W 1300/1600/1700/2200 i(l) V V V V V V V V V V V V V V V V V V V V V V V V V V V V0716 Other interfaces upon request 388 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

71 With integrated Frequency Converter and ower Supply FC S Mains cable MAG W 1300 i(l), MAG W 1600 i(l) Booster, MAG W 1700 i(l), MAG W 2200 i(l) Ordering Information Mandatory Accessories Set of bolts, nuts and washers for ISO-F flange (12 each) Bolts M 10 x 50 Bolts M 10 x 35 Centering with O-ring Al/FM D00 D50 Stainless steel/fm D00 D50 Set of bolts, nuts and washers for CF flange (12 each) Bolts M 8 x 40 (For D00, 3 sets are required; for D50, 4 sets) Copper gasket rings for CF flange D00 (Set of 10 pieces) D50 (Set of 5 pieces) Set of hex. bolts with nuts, bolts and washers for CF flange D00 D50 (2 sets required) Accessories, optional Mains cable, 2.5 m (8.75 ft) with EURO plug with US plug Seal Kit D50 Metal Seal kit, metal, for other flanges urge gas and venting valve 24 V DC 0.6 mbar l/s at 1.5 to 6 bar 0.6 mbar l/s at 1 to 1.5 bar Cable set (2 pieces) for connection to the pump Cooling water valve kit Spare arts Inlet screen D00 ISO-F and D00 CF D50 ISO-F and D50 CF Included in the Delivery of the ump Flanges for forevacuum, venting and purge gas are blank-flanged Converter-side mains plug (I 54) Inlet screen FC S TURBOVAC MAG W 1300/1600/1700/2200 i(l) V V V V V upon request V V V02 E E High Vacuum umps leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

72 umping speed l x s He H 2 Ar MAG W mbar 10-1 Highvacuum pressure umping speed l x s He H 2 Ar MAG W mbar 10-1 Highvacuum pressure umping speed l x s He H 2 Ar MAG W mbar 10-1 Highvacuum pressure umping speed l x s He H 2 Ar MAG W mbar 10-1 Highvacuum pressure umping speed curves of the MAG W 1300, W 1600, W 1700 and W Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

73 Notes High Vacuum umps leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

74 MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter, with Compound Stage TURBOVAC MAG W 300/400 Typical Applications - Gas analysis systems - article accelerators - Electron microscopes - Research - Coating systems Technical Features h - Installation in any orientation - DN 100 or 160 ISO-K and/or CF high vacuum connection - DN 16 ISO-KF with clamped fore vacuum connection - urge gas/venting connection DN 16 ISO-KF with clamped con nection (purge/vent) - Water or air cooling optional - CE and RoHS compliant; fulfilment of UL requirements h h Advantages to the User DN d 1 d 2 h h 1 h 2 l b b* s 1 s 2 MAG W ISO-K mm l x s in CF mm in MAG W ISO-K mm in CF mm in b* = width with plug of the DRIVE/BEARING cable connected instead of MAG.DRIVE is Dimensional drawing for the TURBOVAC MAG W 300/400 - Highest pumping speed from the smallest possible size - New standard regarding maintenance-free systems - Suitability for vibration sensitive applications in the area of analytical engineering, thin-film technology, electron microscopes, research, development among others - Flexibility due to the modular concept; alternatively the pump is available also with an integrated frequency converter 500 umping speed MAG W 400 MAG W Inlet pressure mbar 1 umping speed for of the TURBOVAC MAG W 300/400 as a function of the inlet pressure 392 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

75 Technical Data TURBOVAC MAG W 300 W 400 Inlet flange DN 100 ISO-K 100 CF 160 ISO-K 160 CF umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Operating speed min Compression ratio 1.0 x x x x H 2 He Ultimate pressure mbar (Torr) 3.2 x x x x x x x x 10 4 < 10-8 < < 10-8 < (< 0.75 x 10-8 ) (< 0.75 x ) (< 0.75 x 10-8 ) (< 0.75 x ) High Vacuum umps Max. degassing temperature C ( F) 80 (176) 80 (176) Max. foreline pressure for mbar (Torr) 8 (6) 8 (6) 8 (6) 8 (6) Recommended backing pump TRIVAC D 2,5 E TRIVAC D 2,5 E TRIVAC D 2,5 E TRIVAC D 2,5 E TRIVAC D 8 B TRIVAC D 8 B TRIVAC D 8 B TRIVAC D 8 B Run-up time min < 5 < 5 < 5 < 5 Foreline flange (clamped) DN 16 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF urge / vent port (clamped) DN 16 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF Water cooling connection (optional) Weight, approx. G kg (lbs) 1/8" 1/8" 1/8" 1/8" 12 (26) 12 (26) 12 (26) 12 (26) Technical Data MAG.DRIVE S Voltage range V Nominal frequency Hz ower consumption stand-by W maximum W Max. motor voltage V Max. pump current A Fuses F1, F2 5 x 20 mm System fuse Max. frequency Hz Load capability, relay output X1 V / A Temperature during operation C ( F) during storage C ( F) Relative humidity of the air % , ±10 % 50 / A fast blow high breaking capacity 250 V L or G characteristic 0 to / 0,5 0 to +45 (+32 to +113) -10 to +60 (+14 to +140) 95 (non-condensing) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Ordering Information TURBOVAC MAG W 300/400 TURBOVAC MAG W 300 with separate Frequency Converter and Compound Stage DN 100 ISO-K DN 100 CF TURBOVAC MAG W 400 with separate Frequency Converter and

76 Ordering Information TURBOVAC MAG W 300/400 TURBOVAC MAG W 300 with separate Frequency Converter and Compound Stage DN 100 ISO-K DN 100 CF TURBOVAC MAG W 400 with separate Frequency Converter and Compound Stage DN 160 ISO-K DN 160 CF Mandatory Accessories Electronic frequency converter MAG.DRIVE S MAG.DRIVE S with display Connecting cable DRIVE/BEARING (connection between pump and MAG.DRIVE S) 03.0 m (10.5 ft) 05.0 m (17.5 ft) 10.0 m (35.0 ft) 20.0 m (70.0 ft) 1) Mains cable 03.0 m (10.5 ft) EURO plug 0 US plug m (7.5 ft) US plug 115 V AC Forevacuum pump TRIVAC D 2,5 E V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version V, 50/60 Hz; NEMA plug, US version TRIVAC D 8 B 1 phase motor; 230 V, 50/60 Hz 3 phase motor; 230/400 V, 50 Hz; 250/440 V, 60 Hz FC V V V V V V V V V V V V ) Suited for operating the MAG W 300/400 only 394 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

77 With separate Frequency Converter MAG W 300/400 Connecting cable max. 20 m FC S Mains cable MAG.DRIVE S Ordering Information TURBOVAC MAG W 300/400 High Vacuum umps Accessories, optional Inlet screen DN 100 ISO-K coarse (3.2 x 3.2 mm (0.13 x 0.13 in.) fine (1.6 x 1.6 mm (0.06 x 0.06 in.)) DN 100 CF coarse (3.2 x 3.2 mm (0.13 x 0.13 in.)) fine (1.6 x 1.6 mm (0.06 x 0.06 in.)) DN 160 ISO-K DN 160 CF Flange heater 100 CF, 230 V, 50 Hz 100 CF, 115 V, 60 Hz 160 CF, 230 V, 50 Hz 160 CF, 115 V, 60 Hz Water cooling unit Air cooling unit Solenoid venting valve, normally closed 24 V DC, DN 16 ISO-KF ower failure venting valve, normally open Included in the Delivery of the ump Flanges for forevacuum, venting and purge gas are blank-flanged Centering ring with FM sealing ring and a clamping yoke V V E E E V V V V0021 leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

78 MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter, with Compound Stage TURBOVAC MAG W 600/700 Typical Applications - Gas analysis systems - article accelerators - Electron microscopes - Research - Coating systems Technical Features h - Installation in any orientation - DN 160 or 200 ISO-K and/or CF high vacuum connection - D5 ISO-KF with clamped fore vacuum connection - urge gas/venting connection DN 16 ISO-KF with clamped con nection (purge/vent) - Water or air cooling optional - CE and RoHS compliant; fulfilment of UL requirements h h Advantages to the User DN ø d 1 ø d 2 h h 1 h 2 l b b* s 1 s 2 MAG W 600 mm 160 ISO-K l x s in mm 160 CF in MAG W 700 mm 200 ISO-K in mm 200 CF in b* = width with plug of the DRIVE/BEARING cable connected instead of MAG.DRIVE is Dimensional drawing for the TURBOVAC MAG W 600/700 MAG W Highest pumping speed from the smallest possible size - New standard regarding maintenance-free systems - Suitability for vibration sensitive applications in the area of analytical engineering, thin-film technology, electron microscopes, research, development among others - Flexibility due to the modular concept; alternatively the pump is available also with an integrated frequency converter 500 MAG W 600 umping speed Inlet pressure mbar 1 umping speed for of the TURBOVAC MAG W 600/700 as a function of the inlet pressure 396 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

79 Technical Data TURBOVAC MAG W 600 W 700 Inlet flange DN 160 ISO-K 160 CF 200 ISO-K 200 CF umping speed I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Operating speed min Compression ratio 1.6 x x x x H 2 He Ultimate pressure mbar (Torr) 3.4 x x x x x x x x 10 6 < 10-8 < < 10-8 < (< 0.75 x 10-8 ) (< 0.75 x ) (< 0.75 x 10-8 ) (< 0.75 x ) High Vacuum umps Max. degassing temperature C ( F) 80 (176) 80 (176) Max. foreline pressure for mbar (Torr) 6.0 (4.5) 6.0 (4.5) 6.0 (4.5) 6.0 (4.5) Recommended backing pump TRIVAC D 2,5 E TRIVAC D 2,5 E TRIVAC D 2,5 E TRIVAC D 2,5 E TRIVAC D 8 B TRIVAC D 8 B TRIVAC D 8 B TRIVAC D 8 B Run-up time min < 6 < 6 < 6 < 6 Foreline flange (clamped) DN 25 ISO-KF 25 ISO-KF 25 ISO-KF 25 ISO-KF urge / vent port (clamped) DN 16 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF Water cooling connection (optional) Weight, approx. G kg (lbs) 1/8" 1/8" 1/8" 1/8" 17 (37.5) 17 (37.5) 17 (37.5) 17 (37.5) Technical Data MAG.DRIVE S Voltage range V Nominal frequency Hz ower consumption stand-by W maximum W Max. motor voltage V Max. pump current A Fuses F1, F2 5 x 20 mm System fuse Max. frequency Hz Load capability, relay output X1 V / A Temperature during operation C ( F) during storage C ( F) Relative humidity of the air % , ±10 % 50 / A fast blow high breaking capacity 250 V L or G characteristic 0 to / 0,5 0 to +45 (+32 to +113) -10 to +60 (+14 to +140) 95 (non-condensing) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Ordering Information TURBOVAC MAG W 600/700 TURBOVAC MAG W 600 with separate Frequency Converter and Compound Stage DN 160 ISO-K DN 160 CF TURBOVAC MAG W 700 with separate Frequency Converter and

80 Ordering Information TURBOVAC MAG W 600/700 TURBOVAC MAG W 600 with separate Frequency Converter and Compound Stage DN 160 ISO-K DN 160 CF TURBOVAC MAG W 700 with separate Frequency Converter and Compound Stage D00 ISO-K D00 CF Mandatory Accessories Electronic frequency converter MAG.DRIVE S MAG.DRIVE S with display FC V V V V V V0212 Connecting cable DRIVE/BEARING (connection between pump and MAG.DRIVE S) m (10.5 ft) m (17.5 ft) 10.0 m (35.0 ft) Mains cable 3.0 m (10.5 ft) EURO plug 0 US plug m (7.5 ft) US plug 115 V AC Forevacuum pump TRIVAC D 2,5 E V, 50 Hz; 230 V, 60 Hz; Schuko plug, EURO version V, 50/60 Hz; NEMA plug, US version TRIVAC D 8 B 1 phase motor; 230 V, 50/60 Hz 3 phase motor; 230/400 V, 50 Hz; 250/440 V, 60 Hz V V V V V Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

81 With separate Frequency Converter MAG W 600/700 Connecting cable max. 20 m FC S Mains cable MAG.DRIVE S Ordering Information TURBOVAC MAG W 600/700 High Vacuum umps Accessories, optional Inlet screen DN 160 ISO-K DN 160 CF D00 ISO-K D00 CF Flange heater 160 CF, 230 V, 50 Hz 160 CF, 115 V, 60 Hz Water cooling unit Air cooling unit Solenoid venting valve, normally closed 24 V DC, DN 16 ISO-KF ower failure venting valve, normally open Included in the Delivery of the ump Flanges for forevacuum, venting and purge gas are blank-flanged Centering ring with FM sealing ring and a clamping yoke E E V V V V0021 leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter, with Compound Stage TURBOVAC MAG W 830/1300 C Typical Applications - Semiconductor processes, like VD and ion implantation -

82 MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter, with Compound Stage TURBOVAC MAG W 830/1300 C Typical Applications - Semiconductor processes, like VD and ion implantation - Transfer chambers - article accelerators - Research - Coating systems F E G H J A Ø D Ø B Ø C K M L Forevacuum connection Ø N R Bottom view Forevacuum flange Inlet flange A B C D E MAG W 830 C DN 40 ISO-KF 160 ISO-F mm DN 40 ISO-KF 160 ISO-F in MAG W 1300 C DN 40 ISO-KF / D5 ISO-KF 200 ISO-F mm DN 40 ISO-KF / D5 ISO-KF 250 ISO-F in MAG W 1300 C DN 40 ISO-KF 250 ISO-F mm DN 40 ISO-KF 250 ISO-F in S O M8 Q F G H J K L M N MAG W 830 C mm in MAG W 1300 C mm in MAG W 1300 C mm MAG W 1300 C in O Q R S T MAG W 830 C mm in MAG W 1300 C mm in MAG W 1300 C mm in T Technical Features - Active 5-axis magnetic bearing system - Digital monitoring of the bearing system - Low noise and vibration levels - Installation in any orientation - Advanced rotor design for high throughput - urge gas connection - Intelligent power control system Advantages to the User - Maintenance-free - High throughput for all process gases - High pumping speed at low pressure - High foreline pressure tolerance: up to 2 mbar (1.5 Torr) - Lowest weight and size in its class - Application specific design Dimensional drawing for the TURBOVAC MAG W 830/1300 C 400 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

83 Technical Data TURBOVAC MAG W 830 W 830 C W 1300 W 1300 C Inlet flange DN 160 CF 160 ISO-F 200 CF 200 ISO-F 250 ISO-F umping speed according to NEURO I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Operating speed min -1 Compression ratio Ultimate pressure according to DI8 400 mbar (Torr) x 10 8 > 5 x x 10 8 > 10 8 > 10 8 < 1 x < 10-8 < 1 x < 10-8 < 10-8 (< 0.75 x ) (< 0.75 x 10-8 ) (< 0.75 x ) (< 0.75 x 10-8 ) (< 0.75 x 10-8 ) Max. foreline pressure for with convection cooling with water cooling Recommended backing pump Rotary vane pump or dry compressing pump mbar (Torr) mbar (Torr) offering a pumping speed of 100 m 3 /h 0.2 (0.15) 0.2 (0.15) 2.0 (1.5) 2.0 (1.5) 2.0 (1.5) 2.0 (1.5) 2.0 (1.5) TRIVAC TRIVAC TRIVAC TRIVAC TRIVAC D 65 BCS D 65 BCS D 65 BCS D 65 BCS D 65 BCS High Vacuum umps Run-up time Foreline flange urge and vent port Cooling water connection (OD of tube) Weight, approx. min DN DN mm (in.) kg (lbs) < 6 < 4 < 6 < 6 < 6 40 ISO-KF 40 ISO-KF 40 ISO-KF 40 ISO-KF 40 ISO-KF 10 ISO-KF/ 10 ISO-KF/ 10 ISO-KF/ 10 ISO-KF/ 10 ISO-KF/ 16 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF 16 ISO-KF 1/4" 1/4" 1/4" (77.3) 32 (70.6) 35 (77.3) 32 (70.6) 32 (70.6) Technical Data MAG.DRIVE digital Mains connection, 50/60 Hz Current for connected consumers max. Max. motor voltage Nominal frequency ermissible ambient temperature Dimensions (W x H x D) Weight, approx. V A V Hz C ( F) mm (in.) kg (lbs) , +10 %/-15 % /60 0 to +45 (+32 to +113) 483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19") 10 (22) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

84 Ordering Information TURBOVAC MAG W 830 (C) with separate Frequency Converter and Compound Stage DN 160 CF (MAG W 830) DN 160 ISO-F (MAG W 830 C) TURBOVAC MAG W 1300 (C) with separate Frequency Converter and Compound Stage D00 CF (MAG W 1300) D00 ISO-F (MAG W 1300 C) D50 ISO-F (MAG W 1300 C) Mandatory Accessories Electronic frequency converter 1) MAG.DRIVE digital MAG.DRIVE digital, rofibus MAG.DRIVE digital, RS 232 C interface lug-in control Connecting cable converter pump 2) 01.5 m (5.25 ft) DRIVE/BEARING 03.0 m (10.5 ft) DRIVE/BEARING 05.0 m (17.5 ft) DRIVE/BEARING 10.0 m (35.0 ft) DRIVE/BEARING 20.0 m (70.0 ft) DRIVE/BEARING Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 3 phase motor; /460 V, 60 Hz / /380 V, 60 Hz For further types, see Catalog art Oil Sealed Vacuum umps FC TURBOVAC MAG W 830 (C) / W 1300 (C) V V V V V V V V V V V V V ) Included are 2 mains cords. One with EURO plug and one with US plug (220 V AC). Replacement mains cord are art Numbers or respectively 2) Further connecting cables can be found under MAG.DRIVE digital in the chapter Turbomolecular umps with Magnetic Rotor Suspension, para. Electronic Frequency Converters I x s umping Speed N2 He H mbar Inlet ressure 1 umping speed of the TURBOVAC MAG W 1300 C (D50) as a function of the inlet pressure 402 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

85 With separate Frequency Converter Connecting cable max. 20 m MAG W 830/1300 (C) FC S Mains cable MAG.DRIVE digital Ordering Information TURBOVAC MAG W 830 (C) / W 1300 (C) High Vacuum umps Accessories, optional urge gas and venting valve Connecting cable for optional purge gas valve (pump/converter) 01.5 m (5.25 ft) 03.0 m (10.5 ft) 10.0 m (35.0 ft) 20.0 m (70.0 ft) Included in the Delivery of the ump Inlet screen DN 160 ISO-F DN 160 CF D00 ISO-F D00 CF D50 ISO-F V V V V0009 E E E leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

86 MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter, with Compound Stage TURBOVAC MAG W 1500 CT Typical Applications - All major semiconductor processes such as Etch, CVD, VD and Ion Implantation Technical Features - Active 5-axis magnetic bearing system - Bearing and temperature system are controlled digitally - Corrosion resistant - Low noise and vibration levels - Installation in any orientation h5 ø d ø d1 ø d2 a1 26 a Advanced rotor design for high pump speeds and forevacuum pressures - Integrated purge gas system h1 h3 h h2 ø d3 h4 DN 40 KF Heatband ø d5 b b1 ø d6 b Integrated temperature management system (TMS) - Intelligent power control system Advantages to the User a3 ø d4 a h6 h7 105 a4 Bottom view a a 1 a 2 a 3 a 4 a 5 b b 1 b 2 d d 1 d ISO-F mm M8 x in M8 x ISO-F mm M8 x in M8 x a Maintenance-free - High throughput for all process gases - High pumping speed at low pressure d 3 d 4 d 5 d 6 h h 1 h 2 h 3 h 4 h 5 h 6 h ISO-F mm in ISO-F mm in Dimensional drawing for the TURBOVAC MAG W 1500 CT - High foreline pressure tolerance: up to 2.6 mbar (1.95 Torr) - High resistance against corrosive gases - Robust against particles and depos its - Temperature control up to 90 C (194 F) to avoid condensation - Lowest weight and size in its class - Application specific design 404 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

87 Technical Data TURBOVAC MAG W 1500 CT Inlet flange DN 200 ISO-F 250 ISO-F 200 CF umping speed according to NEURO I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Operating speed min -1 Compression ratio > 10 8 > 10 8 > 10 8 Ultimate pressure according to DI8 400 mbar (Torr) Max. foreline pressure for mbar (Torr) < 10-8 (< 0.75 x 10-8 ) < 10-8 (< 0.75 x 10-8 ) < (< ) 2.6 (1.95) 2.6 (1.95) 2.6 (1.95) High Vacuum umps Recommended backing pump Rotary vane pump or dry compressing pump offering a pumping speed of 100 m 3 /h TRIVAC D 65 BCS TRIVAC D 65 BCS TRIVAC D 65 BCS Run-up time at 95% of nominal speed Foreline flange urge and vent port Cooling water connection (OD of tube) Weight, approx. min DN VCR mm (in.) kg (lbs) < 6 < 6 < 6 40 ISO-KF 40 ISO-KF 40 ISO-KF 1/4" 1/4" 1/4" 6.4 (0.25) 6.4 (0.25) 6.4 (0.25) 32 (70.6) 32 (70.6) 32 (70.6) Technical Data MAG.DRIVE digital Mains connection, 50/60 Hz Current for connected consumers max. Max. motor voltage Nominal frequency ermissible ambient temperature Dimensions (W x H x D) Weight, approx. V A V Hz C ( F) mm (in.) kg (lbs) , +10 %/-15 % /60 0 to +45 (+32 to +113) 483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19") 10 (22) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

88 Ordering Information TURBOVAC MAG W 1500 CT TURBOVAC MAG vcw 1500 CT with separate Frequency Converter and Compound Stage D00 ISO-F D50 ISO-F D00 CF V V V0002 Mandatory Accessories Electronic frequency converter 1) MAG.DRIVE digital MAG.DRIVE digital, rofibus MAG.DRIVE digital, RS 232 C interface Connecting cable converter pump 2) 01.5 m (5.25 ft) DRIVE/BEARING 01.5 m (5.25 ft) TMS 03.0 m (10.5 ft) DRIVE/BEARING 03.0 m (10.5 ft) TMS 05.0 m (17.5 ft) DRIVE/BEARING 05.0 m (17.5 ft) TMS 10.0 m (35.0 ft) DRIVE/BEARING 10.0 m (35.0 ft) TMS 20.0 m (70.0 ft) DRIVE/BEARING 20.0 m (70.0 ft) TMS lug-in control Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 3 phase motor; /460 V, 60 Hz / /380 V, 60 Hz For further types, see Catalog art Oil Sealed Vacuum umps FC V V V V V V V V V V V V V ) Included are 2 mains cords. One with EURO plug and one with US plug (220 V AC). Replacement mains cord are art Numbers or respectively 2) Further connecting cables can be found under MAG.DRIVE digital in the chapter Turbomolecular umps with Magnetic Rotor Suspension, para. Electronic Frequency Converters 406 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

89 With separate Frequency Converter Connecting cable max. 20 m MAG W 1500 CT FC S Mains cable MAG.DRIVE digital Ordering Information TURBOVAC MAG W 1500 CT High Vacuum umps Accessories, optional Seal kit D50 metal Included in the Delivery of the ump Inlet screen D00 ISO-F D50 ISO-F D50 CF Integrated purge gas system VRC nut 1/4" Integrated temperature management system Cooling water connection Swagelock 1/4" tube Included in the Delivery of the Frequency Converter Mains cord, 3 m (10.5 ft.) long, approx. with EURO or US plug FC I x s umping Speed N2 He H mbar Inlet ressure 1 umping speed of the TURBOVAC MAG W 1500 CT (D50) as a function of the inlet pressure leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

90 MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter with Compound Stage TURBOVAC MAG W 2000 C/CT Typical Applications - All major semiconductor processes such as Etch, CVD, VD and Ion Implantation Technical Features - Active 5-axis magnetic bearing system - atented KELA-COAT for rotor and stator to prevent corrosion - Low noise and vibration levels - Installation in any orientation Ø 335 D50 ISO-F Bottom view C Advanced rotor design for high pump speeds and forevacuum pressures Ø Integrated purge gas system - CT versions: Integrated temperature management system (TMS) Forevacuum flange DN 40 KF Ø310 Ø Cooling water IN Cooling water OUT urge gas connector Drive Bearing connector Bottom view CT R205 Heater Ø Advantages to the User - Maintenance-free - High throughput for all etch gases - High pumping speed at low pressure - High foreline pressure tolerance: up to 5.3 mbar (4 Torr) 11x30 11 Dimensional drawing for the TURBOVAC MAG W 2000 C/CT 38 - High resistance against corrosive gases - Robust against particles and depos its Temperature management system (TMS) to avoid condensation I x s -1 - Application specific design umping Speed N2 He H mbar Inlet ressure 1 umping speed of the TURBOVAC MAG W 2000 CT (D50) as a function of the inlet pressure 408 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

91 Technical Data W 2000 C TURBOVAC MAG W 2000 CT Inlet flange DN 250 ISO-F 250 ISO-F umping speed according to NEURO I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Operating speed min -1 Compression ratio > 10 8 > 10 8 Ultimate pressure according to DI8 400 mbar (Torr) Max. foreline pressure for mbar (Torr) < 10-8 (< 0.75 x 10-8 ) < 10-8 (< 0.75 x 10-8 ) 3.5 (2.63) 3.5 (2.63) High Vacuum umps Recommended backing pump Rotary vane pump or dry compressing pump offering a pumping speed of 100 m 3 /h TRIVAC D 65 BCS TRIVAC D 65 BCS Run-up time Foreline flange urge and vent port Cooling water connection (OD of tube) Weight, approx. min DN VCR mm (in.) kg (lbs) < 8 < 8 40 ISO-KF 40 ISO-KF 1/4" 1/4" 6.4 (0.25) 6.4 (0.25) 68 (150) 68 (150) Technical Data MAG.DRIVE digital Mains connection, 50/60 Hz Current for connected consumers max. Max. motor voltage Nominal frequency ermissible ambient temperature Dimensions (W x H x D) Weight, approx. V A V Hz C ( F) mm (in.) kg (lbs) , +10 %/-15 % /60 0 to +45 (+32 to +113) 483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19") 10 (22) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Ordering Information TURBOVAC MAG W 2000 C/CT TURBOVAC MAG W 2000 C/CT with separate Frequency Converter and Compound Stage D50 ISO-F (MAG W 2000 C) D50 ISO-F (MAG W 2000 CT) 400047V0001 400047V0002

92 Ordering Information TURBOVAC MAG W 2000 C/CT TURBOVAC MAG W 2000 C/CT with separate Frequency Converter and Compound Stage D50 ISO-F (MAG W 2000 C) D50 ISO-F (MAG W 2000 CT) V V0002 Mandatory Accessories Electronic frequency converter 1) MAG.DRIVE digital MAG.DRIVE digital, rofibus MAG.DRIVE digital, RS 232 C interface Connecting cable converter pump 2) 01.5 m (5.25 ft) DRIVE/BEARING 01.5 m (5.25 ft) TMS 03.0 m (10.5 ft) DRIVE/BEARING 03.0 m (10.5 ft) TMS 05.0 m (17.5 ft) DRIVE/BEARING 05.0 m (17.5 ft) TMS 10.0 m (35.0 ft) DRIVE/BEARING 10.0 m (35.0 ft) TMS 20.0 m (70.0 ft) DRIVE/BEARING 20.0 m (70.0 ft) TMS lug-in control Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 3 phase motor; /460 V, 60 Hz / /380 V, 60 Hz For further types, see Catalog art Oil Sealed Vacuum umps FC V V V V V V V V V V V V V ) Included are 2 mains cords. One with EURO plug and one with US plug (220 V AC). Replacement mains cord are art Numbers or respectively 2) Further connecting cables can be found under MAG.DRIVE digital in the chapter Turbomolecular umps with Magnetic Rotor Suspension, para. Electronic Frequency Converters 410 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

93 With separate Frequency Converter MAG W 2000 (C/CT) Connecting cable max. 20 m FC S Mains cable MAG.DRIVE digital Ordering Information TURBOVAC MAG W 2000 C/CT High Vacuum umps Included in the Delivery of the ump Inlet screen D50 ISO-F Integrated purge gas system VRC nut 1/4" Integrated temperature management system (only CT version) Cooling water connection Swagelock 1/4" tube Included in the Delivery of the Frequency Converter Mains cord, 3 m (10.5 ft.) long, approx. with EURO or US plug FC leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter, with Compound Stage TURBOVAC MAG W 2200 C Typical Applications - All major semiconductor processes such as Etch, CVD, VD and

94 MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter, with Compound Stage TURBOVAC MAG W 2200 C Typical Applications - All major semiconductor processes such as Etch, CVD, VD and Ion Implantation - Coating systems Versions with CF high vacuum connection - article accelerators - Research Technical Features - Active 5-axis magnetic bearing system Ø A - Digital monitoring of the bearing system 36.5 M - Low noise and vibration levels - Installation in any orientation D Ø B DN 40 KF K J L 36 - Advanced rotor design for high pump speeds and forevacuum pressures - urge gas connection - Intelligent power control system E Ø C G F 45 H 8 Bottom view - Integrated temperature management System (TMS) ( CT version only) Advantages to the User A B C D E F G H J K L M 200 ISO-F mm in ISO-F mm in CF mm in Dimensional drawing for the TURBOVAC MAG W 2200 C - Maintenance-free - High throughput for all process gases - High pumping speed at low pressure - High foreline pressure tolerance: up to 2 mbar (1.5 Torr) - Lowest weight and size in its class - Application specific design 412 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

95 Technical Data TURBOVAC MAG W 2200 C/CT W 2200 Inlet flange DN umping speed according to NEURO I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Operating speed min -1 Compression ratio Ultimate pressure according to DI8 400 mbar (Torr) Max. foreline pressure for with convection cooling with water cooling mbar (Torr) mbar (Torr) Recommended backing pump Rotary vane pump or dry compressing pump offering a pumping speed of 100 m 3 /h Run-up time at 95% of nominal speed Foreline flange urge and vent port Cooling water connection (OD of tube) Weight, approx. min DN kg (lbs) 200 ISO-F 250 ISO-F 250 CF > 1 x 10 8 > 1 x x 10 8 < 10-8 (< 0.75 x 10-8 ) < 10-8 (< 0.75 x 10-8 ) < 1 x (< 0.75 x ) 0.1 (0.075) 2 (1.5) 2 (1.5) 1 (0.75) TRIVAC D 65 BCS TRIVAC D 65 BCS TRIVAC D 65 BCS < 8 < 8 < 8 40 ISO-KF 40 ISO-KF 40 ISO-KF 1/4" VCR 1/4" VCR DN 10/16 1/2" 1/2" Swagelok tube 1/4" 48 (106) 48 (106) 60 (132) High Vacuum umps Technical Data MAG.DRIVE digital Mains connection, 50/60 Hz Current for connected consumers max. Max. motor voltage Nominal frequency ermissible ambient temperature Dimensions (W x H x D) Weight, approx. V A V Hz C ( F) mm (in.) kg (lbs) , +10 %/-15 % /60 0 to +45 (+32 to +113) 483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19") 10 (22) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

96 Ordering Information TURBOVAC MAG W 2200 C/CT TURBOVAC MAG W 2200 C/CT with separate Frequency Converter and Compound Stage D00 ISO-F (MAG W 2200 C) D50 ISO-F (MAG W 2200 C) D50 CF (MAG W 2200) D00 ISO-F (MAG W 2200 CT) D50 ISO-F (MAG W 2200 CT) V V V V V0023 Mandatory Accessories Electronic frequency converter 1) MAG.DRIVE digital MAG.DRIVE digital, rofibus MAG.DRIVE digital, RS 232 C interface Connecting cable converter pump 2) 01.5 m (5.25 ft) DRIVE/BEARING 01.5 m (5.25 ft) TMS 3) 03.0 m (10.5 ft) DRIVE/BEARING 03.0 m (10.5 ft) TMS 3) 05.0 m (17.5 ft) DRIVE/BEARING 05.0 m (17.5 ft) TMS 3) 10.0 m (35.0 ft) DRIVE/BEARING 10.0 m (35.0 ft) TMS 3) 20.0 m (70.0 ft) DRIVE/BEARING 20.0 m (70.0 ft) TMS 3) lug-in control Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 3 phase motor; /460 V, 60 Hz / /380 V, 60 Hz For further types, see Catalog art Oil Sealed Vacuum umps FC V V V V V V V V V V V V V ) Included are 2 mains cords. One with EURO plug and one with US plug (220 V AC). Replacement mains cord are art Numbers or respectively 2) Further connecting cables can be found under MAG.DRIVE digital in the chapter Turbomolecular umps with Magnetic Rotor Suspension, para. Electronic Frequency Converters 3) TMS connecting cables are only needed for the CT version of the TURBOVAC MAG W Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

97 With separate Frequency Converter Connecting cable max. 20 m MAG W 2200 (C/CT) FC S Mains cable MAG.DRIVE digital Ordering Information Accessories, optional TURBOVAC MAG W 2200 C/CT High Vacuum umps urge gas and venting valve Connection cable for optional seal gas valve (pump/converter) 01.5 m (5.25 ft) 03.0 m (10.5 ft) 10.0 m (35.0 ft) 20.0 m (70.0 ft) V V V V0009 Seal kit D50 metal Included in the Delivery of the ump Inlet screen D00 ISO-F D50 ISO-F D50 CF E E E Included in the Delivery of the Frequency Converter FC Mains cord, 3 m (10.5 ft.) long, approx. with EURO or US plug I x s umping Speed N2 He H mbar Inlet ressure 1 umping speed of the TURBOVAC MAG W 2200 C (D50) as a function of the inlet pressure leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

98 MAG DIGITAL - Magnetic Rotor Suspension with separate Frequency Converter, with Compound Stage TURBOVAC MAG W 2800/3200 (C/CT) Typical Applications - All major semiconductor processes such as Etch, CVD, VD and Ion Implantation Versions with CF high vacuum connection - article accelerators - Research Technical Features E TURBOVAC MAG W 2800 CT (left) and TURBOVAC MAG W 3200 CT (right) E F F G G Ø D Ø D Ø A Ø A Ø B Ø BØ C Ø C K K L L J J H H DN 40 KF DN 40 KF Dimensional drawing for the TURBOVAC MAG W 2800/3200 C/CT 30 M 8, 14 depth Bottom view Top view A B C D E F G H J 250 ISO-F mm in CF mm in ISO-F mm in K L M N O 250 ISO-F mm in CF mm in ISO-F mm in Ø M Ø N 137 O Active 5-axis magnetic bearing system - Bearing and temperature system are controlled digitally - Corrosion resistant - Low noise and vibration levels - Installation in any orientation - Advanced rotor design for high pump speeds and forevacuum pressures - Integrated purge gas system - CT versions: Integrated temperature management system (TMS) - Intelligent power control system Advantages to the User - Maintenance-free - High throughput for all process gases - High pumping speed at low pressure - High foreline pressure tolerance: up to 2 mbar (1.5 Torr) - High resistance against corrosive gases - Robust against particles and depos its - Temperature control up to 90 C (194 F) to avoid condensation - Lowest weight and size in its class - Application specific design 416 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

99 Technical Data Inlet flange DN TURBOVAC MAG W 2800 C W 2800 CT W 2800 W 3200 CT 250 ISO-F 250 ISO-F 250 CF 320 ISO-F umping speed according to NEURO I x s -1 Ar I x s -1 He I x s -1 H 2 I x s -1 Operating speed min -1 Compression ratio x x x x 10 8 Ultimate pressure according to DI8 400 mbar (Torr) < 10-8 < 10-8 < 1 x < 10-8 (< 0.75 x 10-8 ) (< 0.75 x 10-8 ) (< 0.75 x ) (< 0.75 x 10-8 ) High Vacuum umps Max. foreline pressure for with convection cooling with water cooling mbar (Torr) mbar (Torr) 0.3 (0.23) 2.0 (1.5) 2.0 (1.5) 3.0 (2.3) 2.0 (1.5) Recommended backing pump Rotary vane pump or dry compressing pump offering a pumping speed of 100 m 3 /h Run-up time Foreline flange urge / vent port min DN TRIVAC D 65 BCS TRIVAC D 65 BCS TRIVAC D 65 BCS TRIVAC D 65 BCS < 10 < 10 < 10 < ISO-KF 40 ISO-KF 40 ISO-KF 40 ISO-KF 1/4" VCR 1/4" VCR DN 10/16 1/4" VCR Cooling water connection Weight, approx. Swagelok tube kg (lbs) 1/4" 1/4" 1/4" 1/4" 64 (141.3) 64 (141.3) 75 (165.6) 65 (143.5) Technical Data MAG.DRIVE digital Mains connection, 50/60 Hz V Current for connected consumers, max. A Max. motor voltage V Nominal frequency Hz ermissible ambient temperature C ( F) Dimensions (W x H x D) mm (in.) Weight, approx. kg (lbs) , +10 %/-15 % /60 0 to +45 (+32 to +113) 483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19") 10 (22) leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Ordering Information TURBOVAC MAG W 2800 (C/CT) with separate Frequency Converter and Compound Stage D50 CF (MAG W 2800) D50 ISO-F (MAG W 2800 C) D50 ISO-F (MAG W 2800 CT) TURBOVAC MAG W 2800 / 3200

3200 CT) 400003V0003 400003V0001 400003V0002 Mandatory Accessories Electronic frequency converter 1) MAG.DRIVE digital MAG.DRIVE digital, rofibus MAG.

100 Ordering Information TURBOVAC MAG W 2800 (C/CT) with separate Frequency Converter and Compound Stage D50 CF (MAG W 2800) D50 ISO-F (MAG W 2800 C) D50 ISO-F (MAG W 2800 CT) TURBOVAC MAG W 2800 / 3200 (C/CT) V V V0002 TURBOVAC MAG W 3200 (C/CT) with separate Frequency Converter and Compound Stage DN 320 ISO-F (MAG W 3200) DN 320 ISO-F (MAG W 3200 C) DN 320 ISO-F (MAG W 3200 CT) V V V0002 Mandatory Accessories Electronic frequency converter 1) MAG.DRIVE digital MAG.DRIVE digital, rofibus MAG.DRIVE digital, RS 232 C interface lug-in control FC V V V Connecting cable converter pump 2) 01.5 m (5.25 ft) DRIVE/BEARING 01.5 m (5.25 ft) TMS 03.0 m (10.5 ft) DRIVE/BEARING 03.0 m (10.5 ft) TMS 05.0 m (17.5 ft) DRIVE/BEARING 05.0 m (17.5 ft) TMS 10.0 m (35.0 ft) DRIVE/BEARING 10.0 m (35.0 ft) TMS 20.0 m (70.0 ft) DRIVE/BEARING 20.0 m (70.0 ft) TMS Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440 V, 60 Hz 3 phase motor; /460 V, 60 Hz / /380 V, 60 Hz For further types, see Catalog art Oil Sealed Vacuum umps V V V V V V V V V V ) Included are 2 mains cords. One with EURO plug and one with US plug (220 V AC). Replacement mains cord are art Numbers or respectively 2) Further connecting cables can be found under MAG.DRIVE digital in the chapter Turbomolecular umps with Magnetic Rotor Suspension, para. Electronic Frequency Converters 418 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

101 With separate Frequency Converter Connecting cable max. 20 m MAG W 2800/3200 (C/CT) FC S Mains cable MAG.DRIVE digital Ordering Information Accessories, optional urge gas and venting valve TURBOVAC MAG W 2800 C/CT / 3200 CT High Vacuum umps Seal kit D50 metal Included in the Delivery of the ump Inlet screen D50 ISO-F D50 CF DN 320 ISO-F Included in the Delivery of the Frequency Converter Mains cord, 3 m (10.5 ft.) long, approx. with EURO or US plug FC E E I x s umping Speed He H mbar Inlet ressure 1 umping speed of the TURBOVAC MAG W 3200 C (DN 320) as a function of the inlet pressure leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

102 Accessories Electronic Frequency Converters for umps with Mechanical Rotor Suspension TURBO.DRIVE TD 20 classic Technical Features - For operating the TURBOVAC 151 (C), 361 (C), 600 C, 1000 C and 1100 C turbomolecular pump - Front panel with LED - Status, ower, Error, pump run-up, pumping power - Wide voltage range mains input - Current interfaces like rofibus, DeviceNet, Ethernet/I, RS 232 C, RS 485 C and 25-way terminal strip, available as options Advantages to the User - Easy integration within a vacuum system owing to the large variety of different modern interfaces as well as for modernising older systems - Start/stop function through keys on the front panel - Remote control and process control through analog and LC compatible inputs and outputs - Compatible to frequency converter NT 20, NT 151/361 and NT , Dimensional drawing for the electronic frequency converter TURBO.DRIVE TD 20 classic 420 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

103 Technical Data TURBO.DRIVE TD 20 classic Mains connection Max. power consumption Max. output voltage Max. output current Interface rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. 50/60 Hz W V A I C ( F) mm (in.) kg (lbs) 100 to 240 V (+15 % / -10 %) x 47 5 Without, RS 232 C, RS 485 C, rofibus or 25-way terminal strip 20 0 to +45 (+32 to +113) 213 x 128 x 315 (8.39 x 5.04 x 12.40) 4.0 (8.8) Ordering Information TURBO.DRIVE TD 20 classic High Vacuum umps TURBO.DRIVE TD 20 classic without interface with RS 232 C interface with RS 485 C interface with rofibus with 25-pol I/O Mains cable 3 m (10.5 ft) EURO plug UK plug US plug m (7.5 ft) US plug 115 V AC Connecting cable TURBOVAC - frequency converter 003 m (010.5 ft) 005 m (017.5 ft) 010 m (035.0 ft) 020 m (070.0 ft) 050 m (175.0 ft) 060 m (210.0 ft) 080 m (280.0 ft) 140 m (490.0 ft) 19" rack mounting frame 3 HU ump adapter cable Adapter cable, 0.2 m (0.7 ft) long 25-way LC interface to 2x hoenix plugs (required when a NT 20 with connected LC interface needs to be replaced) C software TURBO.DRIVE Server 1) V V V V V V V V V V V V V V0102 (see Chapter Accessories at the end of the section) 1) Software supports only RS 232 C, RS 485 C and rofibus leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

104 TURBOTRONIK NT 10 Technical Features - For operating the TURBOVAC 50 turbomolecular pump - Bench top unit - Also for rack mounting (1/4 19", 3 HU) - Controls and indicators on the front panel - Inputs for remote control and process controller - Freely assignable relays (e.g. to control the backing pumps) Technical Data TURBOTRONIK NT 10 Mains connection Max. power consumption Max. output voltage Max. output current rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. 50/60 Hz W V A I C ( F) mm (in.) kg (lbs) or V 45 3 x to +40 (+32 to +104) 106 x 128 x 233 (4.17 x 5.04 x 9.17) 1.5 (3.3) Ordering Information TURBOTRONIK NT V (with US plug) V (with EURO plug) Connecting cable pump - converter 01 m (03.5 ft) 03 m (10.5 ft) 05 m (17.5 ft) 10 m (35.0 ft) 15 m (52.5 ft) 20 m (70.0 ft) V Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

105 TURBO.DRIVE TD 240 Technical Features - Operation of the turbomolecular pump TURBOVAC TW Benchtop unit - Display of operating status - Control pushbuttons and display on the front panel - Inputs for remote control and process control (RS 232 C) Technical Data TURBO.DRIVE TD 240 Mains connection Max. power consumption Max. output voltage 50/60 Hz W V 180 to x 110 High Vacuum umps Interface RS 232 C rotection rating I 20 Admissible ambient temperature C ( F) -5 to +40 (+23 to +104) Dimensions (W x H x D) mm (in.) 209 x 149 x 400 (8.2 x 5.7 x 15.7) Weight, approx. kg (lbs) 8.2 (18.1) Ordering Information TURBO.DRIVE TD 240 TURBO.DRIVE TD V0112 Connecting cable pump - converter 3 m (10.5 ft) Connection line air cooler 3 m (10.5 ft) V V0116 leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

TURBO.DRIVE TURBO.DRIVE TD 400 (TD 400) for TURBOVAC SL 80 and SL 300 73,3 100 24 V DC (X4) DRIVE (X3) 18,5 HEAT SINK HEAT SINK 27,6 41,0 79,0 100 TD 400 50 15,9 18,2 63,8 TURBO.

106 TURBO.DRIVE TURBO.DRIVE TD 400 (TD 400) for TURBOVAC SL 80 and SL , V DC (X4) DRIVE (X3) 18,5 HEAT SINK HEAT SINK 27,6 41,0 79,0 100 TD ,9 18,2 63,8 TURBO.DRIVE TD 400 (Front side) Dimensional drawing for the TURBO.DRIVE TD 400 Technical Features - Small footprint - USB, RS 232 C, RS 485 C, rofibus or Ethernet/I interface - Configurations: - as a separate frequency converter - integrated within the turbomolecular pump - Remote control via remote interface - Flexible mounting options - Cost-effective supply of 24 V DC Technical Data TURBO.DRIVE TD 400 Mains connection Max. current consumption Max. power consumption Max. output voltage Interface rotection rating Admissible ambient temperature Dimensions (W x H x D) Weight, approx. V DC A W V I C ( F) mm (in.) kg (lbs) x 24 USB, RS 232 C, RS 485 C or rofibus to +45 (+41 to +113) 100 x 90 x 100 (3.9 x 3.5 x 3.9) 0.7 (1.6) Ordering Information TURBO.DRIVE TD 400 TURBO.DRIVE TD 400 with USB interface with RS 232 C interface with RS 485 C interface with rofibus Connecting cable TD ump 0.2 m (0.70 ft) 0.3 m (1.15 ft) 0.4 m (1.40 ft) 0.5 m (1.75 ft) 1.0 m (3.50 ft) 2.5 m (8.75 ft) 3.0 m (10.5 ft) 5.0 m (17.5 ft) START/STO switch (for manual operation) Hat rail adaptor as mounting aid Accessories for RS 232 C and RS 485 C interfaces V V V V V V V V V0003 (see Chapter Accessories at the end of the section) 424 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

107 Notes High Vacuum umps leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

108 START NORMAL OWER ERROR START STO TURBO.CONTROL 300/ ower Supply Units for TURBO.DRIVE TD Front view Ø ,1 128,4 122,4 Ø 3,2 Dimensional drawing for the power supply TURBO.OWER 300 Technical Features - Cost-effective supply of 24 V DC power for SL 80, SL 300, TW 250 S and TURBO.DRIVE TD lug & play - Bench top unit or for cabinet mounting Dimensional drawing for the power supply TURBO.CONTROL 300 Technical Features - Cost-effective supply of 24 V DC power for SL 80, SL 300, TW 250 S and TURBO.DRIVE TD lug & play - Bench top unit or for cabinet mount ing - Mains switch - START/STO switch for the turbomolecular pump - Remote control via remote interface - Status indicating LEDs and status relays 426 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

109 Technical Data ower Supply TURBO.OWER 300 TURBO.CONTROL 300 Mains connection 50/60 Hz V V Max. power consumption W Max. output voltage V DC Max. current consumption A rotection rating I Admissible ambient temperature C ( F) 0 to +40 (+32 to +104) 0 to +40 (+32 to +104) Dimensions (W x H x D) Weight, approx. Ordering Information mm (in.) kg (lbs) 116 x 53 x x 129 x 320 (4.6 x 2.1 x 10.2) (8.4 x 5.1 x 12.6) 1.5 (3.3) 1.5 (3.3) ower Supply High Vacuum umps TURBO.OWER 300 TURBO.CONTROL 300 ower supply TURBO.OWER 300 TURBO.CONTROL 300 DC cable frequency converter - power supply 01 m (03.5 ft) 03 m (10.5 ft) 05 m (17.5 ft) 10 m (35.0 ft) 20 m (70.0 ft) Mains cable 3 m (10.5 ft) with EURO plug with UK plug with US plug m (7.5 ft) US plug 115 V AC Hat rail adaptor as mounting aid V V V DC power cable 24 V DC control cable V V V V V V V V V V V V V V V V V0003 leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

MainSupply OFF ON STO START CONTROL ERR WR STS SERVICE Electronic Frequency Converters for umps with Magnetic Rotor Suspension MAG.DRIVE S MAG.

Communication to host computer of the customer via serial interface and conventional interface possible - Setting of speed and other func tions - Warning in case the pump is running out of

110 MainSupply OFF ON STO START CONTROL ERR WR STS SERVICE Electronic Frequency Converters for umps with Magnetic Rotor Suspension MAG.DRIVE S MAG.DRIVE S without display Advantages to the User - Operation of turbomolecular pumps with magnetically levitated rotors: MAG W 300/400 and MAG W 600/700 - Easy operation through the controls - Communication to host computer of the customer via serial interface and conventional interface possible - Setting of speed and other func tions - Warning in case the pump is running out of specification - Storing of all parameters in the pump s memory - Small size and low weight - Integrated fan MAG.DRIVE S with display - 2 slots for industrial communications modules - rear side: Standard 9 pin 24 V SS LC-IO in Control Slot - front side: RS 232 C in Service Slot - further interfaces can be fitted: Ethernet, rofibus, DeviceNet, RS 485 C Space for DRIVE/BEARING cable l l1 111 h 2 122,5 h h h h 4 MAG.DRIVE S 198b b(frontplatte) 327l 2l 3 b b 1 h h 1 h 2 h 3 h 4 l l 1 l 2 l 3 mm in Dimensional drawing for the MAG.DRIVE S RS 232 C interface Mains ( V) F1 F2 HV E ET ower ON DRIVE/BEARING LC or optional interface DRIVE/BEARING cable ump accessories, e.g. air cooling Overview connection lines 428 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

111 Technical Data MAG.DRIVE S Voltage range V Nominal frequency Hz ower consumption stand-by W maximum W Max. motor voltage V Max. pump current A Fuses F1, F2 5 x 20 mm System fuse Max. frequency Hz Load capability, relay output X1 V / A Temperature during operation C ( F) during storage C ( F) Relative humidity of the air % Weight, approx. kg (lbs) , ± 10% 50 / A fast blow high breaking capacity 250 V L or G characteristic 0 to / 0,5 0 to +45 (+32 to +113) -10 to +60 (+14 to +140) 95 (non-condensing) 65 (14.35) High Vacuum umps Ordering Information MAG.DRIVE S Electronic frequency converter MAG.DRIVE S MAG.DRIVE S with display Connecting cable DRIVE/BEARING (connection between pump and MAG.DRIVE S) 03.0 m (10.5 ft) 05.0 m (17.5 ft) 10.0 m (35.0 ft) 1) 20.0 m (70.0 ft) 1) Mains cable 3.0 m (10.5 ft) EURO plug US plug m (7.5 ft) US plug 115 V AC V V V V V V V V ) Suited for operating the MAG W 300/400 only leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

112 MAG.DRIVE digital MAG.DRIVE digital without plug-in control MAG.DRIVE digital with plug-in control Advantages to the User - Operation of turbomolecular pumps with magnetically levitated rotors: MAG W 830/1300 C, MAG (W) 1500 CT, MAG W 2000 C/CT, MAG W 2200 C/CT und MAG W 2800/3200 C/CT - Easy operation through the controls or the use of plug-in control unit - Communication to host computer of the customer via serial interface and conventional interface possible - Setting of speed, temperature of the basic flange and other functions - Warning in case the pump is running out of specification - Storing of all parameters in the pump s memory - lug-in control - Small size and low weight - Integrated fan - Integrated temperature management system (TMS) b 40 l 1 l l 2 ød b 1 h 2 h 1 h h 3 l 3 b b 1 d h h 1 h 2 h 3 l l 1 l 2 l 3 mm in Dimensional drawing for the MAG.DRIVE digital Connection DRIVE/BEARING Connection TMS 180 Overview connection lines 430 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

113 Technical Data MAG.DRIVE digital Mains connection, 50/60 Hz Current for connected consumers, max. Max. motor voltage Nominal frequency ermissible ambient temperature Dimensions (W x H x D) Weight, approx. V A V Hz C ( F) mm (in.) kg (lbs) , +10%/-15% /60 0 to +45 (+32 to +113) 483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19") 10 (22) Ordering Information MAG.DRIVE digital Electronic frequency converter 1) MAG.DRIVE digital with rofibus interface with RS 232 C interface lug-in control Connection line leading to the DRIVE/BEARING of the TURBOVAC MAG... C/CT Cable outlet Cable outlet pump frequency converter DRIVE/BEARING DRIVE/BEARING K 01.5 m (5.25 ft) bended 225 straight straight 01.5 m (5.25 ft) bended 40 bended 180 straight 03.0 m (10.5 ft) straight bended 180 straight 03.0 m (10.5 ft) bended 225 straight straight 03.0 m (10.5 ft) straight bended 270 straight 05.0 m (17.5 ft) bended 225 straight straight 05.0 m (17.5 ft) straight straight straight 08.0 m (28.0 ft) bended 225 straight straight 10.0 m (35.0 ft) bended 225 straight straight 20.0 m (70.0 ft) bended 225 straight straight 23.0 m (80.5 ft) bended 225 straight straight 30.0 m (105 ft) bended 225 straight straight TMS (only for CT versions) Cable outlet Cable outlet pump frequency converter TMS TMS Heater 01.5 m (5.25 ft) bended 225 straight bended m (5.25 ft) bended 40 straight bended m (10.5 ft) bended 225 straight bended m (17.5 ft) bended 225 straight bended m (28.0 ft) bended 225 straight bended m (35.0 ft) bended 225 straight bended m (70.0 ft) bended 225 straight bended 180 urge / Vent (only for optional purge vent valve ) Cable outlet Cable outlet pump frequency converter TMS urge Vent 01.5 m (5.25 ft) straight bended bended 03.0 m (10.5 ft) bended 225 bended bended 10.0 m (35.0 ft) bended 225 bended bended 20.0 m (70.0 ft) straight bended bended Connector for hardware interface 19" installation frame V V V V V V V V V V V V V V V V V V V V V V V V V V0009 upon request High Vacuum umps 1) Included are 2 mains cords. One with EURO plug and one with US plug (220 V AC). Replacement mains cord are art Numbers or respectively leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

OWER IN ower Supply TURBO.OWER 500 for TURBOVAC MAG W 300/400/600/700 i Top view Min. distance for venting 80 60 OWER OUT F1 F2 100 100 TURBO.

114 OWER IN ower Supply TURBO.OWER 500 for TURBOVAC MAG W 300/400/600/700 i Top view Min. distance for venting OWER OUT F1 F TURBO.OWER Dimensional drawing for the power supply TURBO.OWER 500 Technical Features - For supplying 48 V DC power to the MAG W 300/400/600/700 i - Bench top unit or for cabinet mount ing 432 Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

115 Technical Data ower Supply ower supply (OWER IN) Nominal frequency ower consumption maximum at ultimate pressure operation of the pump DC voltage range OWER OUT max. V Hz VA VA V DC A TURBO.OWER , ± 10% 50 / Length of the DC connection cable, max. at 3 x 1.5 mm 2 m (ft) at 3 x 2.5 mm 2 m (ft) 5 (17.5) 20 (70.0) High Vacuum umps Ambient temperature during operation during storage C ( F) C ( F) +10 to +40 (+50 to +104) -10 to -70 (+14 to -94) Relative humidity of the air % 5 to 85 (non-condensing) rotection class Overvoltage category ollution category Weight, approx. I kg (lbs) 30 II (8.8) Ordering Information ower supply TURBO.OWER 500 ower Supply TURBO.OWER V0221 DC cable (connection between TURBO.OWER 500 and MAG.DRIVE is) 01.0 m (03.5 ft) 03.0 m (10.5 ft) 05.0 m (17.5 ft) 10.0 m (35.0 ft) 20.0 m (70.0 ft) Mains cable 3.0 m (10.5 ft) EURO plug US plug m (7.5 ft) US plug 115 V AC V V V V V V V leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Vibration Absorber Vibration absorbers are used to inhibit the propagation of vibrations from the turbomolecular pump to highly sensitive instruments like electron beam microscopes, micro-balances or

) long 084 mm (3.31 in.) long 100 mm (4.09 in.

116 Vibration Absorber Vibration absorbers are used to inhibit the propagation of vibrations from the turbomolecular pump to highly sensitive instruments like electron beam microscopes, micro-balances or analytical instruments. Ordering Information Vibration Absorber Vibration absorber DN 063 ISO-K DN 063 CF DN 100 ISO-K DN 100 CF DN 160 ISO-K DN 160 CF 066 mm (2.60 in.) long 081 mm (3.19 in.) long 084 mm (3.31 in.) long 100 mm (4.09 in.) long 084 mm (3.31 in.) long 104 mm (4.09 in.) long V V Air Cooling Unit for TURBOVAC ClassicLine umps For the purpose of retrofitting the TURBOVAC 50, 151, 361 and 600 pumps for air cooling, an air cooling unit is available by way of a retrofit kit. This kit can be easily fitted to the respective pump using the fitting components included with the accessories. Technical Data Rated power consumption of the air cooling unit when connected to TURBOVAC 50, 151 (C)/361 (C) TURBOVAC 600 C, 1000 C W W Air Cooling Unit Ordering Information Air Cooling Unit Air cooling unit for TURBOVAC 50 TURBOVAC 1 51 (C)/361 (C) TURBOVAC 600 C, 1000 C 230 V V V V V Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

Air Cooling Unit for TURBOVAC SL umps For fitting to the turbomolecular pumps SL 80 and SL 300 Air cooling units for the SL pumps, from left to right for: SL 80 and SL 300 Technical Data ower

9 6,2 +10 to +40 (+50 to +104) +10 to +40 (+50 to +104) 20 20 0.23 (0.51) 0.48 (1.

Most TURBOVAC pumps can be baked out in order to improve the ultimate pressure attained in the UHV range.

117 Air Cooling Unit for TURBOVAC SL umps For fitting to the turbomolecular pumps SL 80 and SL 300 Air cooling units for the SL pumps, from left to right for: SL 80 and SL 300 Technical Data ower supply voltage V DC Current rating ma ower W Operating temperature C ( F) rotection class I Weight, approx. kg (lbs) Volume flow m 3 /h Air Cooling Unit SL 80 SL ,2 +10 to +40 (+50 to +104) +10 to +40 (+50 to +104) (0.51) 0.48 (1.1) High Vacuum umps Ordering Information Air cooling unit for TURBOVAC SL 80 TURBOVAC SL 300 Air Cooling Unit SL 80 SL V V0002 Flange Heater for CF High Vacuum Flanges Most TURBOVAC pumps can be baked out in order to improve the ultimate pressure attained in the UHV range. Degassing of the turbo - molecular pump will only be useful when simultaneously baking out the vacuum chamber. Technical Data Rated power consumption of the flange heater DN 063 CF, DN 100 CF DN 160 CF Ordering Information Flange heater DN 063 CF DN 100 CF DN 160 CF W W Flange Heater Flange Heater 230 V 115 V leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

Fine Filter A fine filter integrated in the centering ring protects the pump against par ticles and dust on the high vacuum side.

Socket lugs for ClassicLine umps TURBOVAC 151 (C), 361 (C), 600 C, 1000 C and 1100 C The securing collar serves the purpose of securing the plug on the

Ordering Information Securing collar for octal socket plugs Securing Collar for Octal Socket lugs 800001830 Solenoid Venting Valve Technical Data Drive

Ordering Information Solenoid venting valve, normally closed V DC W DN kg (lbs) Venting Valve 24 4 16 ISO-KF 0.3 (0.

118 Fine Filter A fine filter integrated in the centering ring protects the pump against par ticles and dust on the high vacuum side. Ordering Information Connection flange of the fine filter DN 040 ISO-KF DN 063 ISO-K DN 100 ISO-K Fine Filter Securing Collar for Octal Socket lugs for ClassicLine umps TURBOVAC 151 (C), 361 (C), 600 C, 1000 C and 1100 C The securing collar serves the purpose of securing the plug on the ClassicLine pumps TURBOVAC 151 (C), 361 (C), 600 C, 1000 C and 1100 C against being disconnected inadvertently. Ordering Information Securing collar for octal socket plugs Securing Collar for Octal Socket lugs Solenoid Venting Valve Technical Data Drive voltage ower consumption Connecting flange Weight, approx. Ordering Information Solenoid venting valve, normally closed V DC W DN kg (lbs) Venting Valve ISO-KF 0.3 (0.66) Venting Valve V0011 ower Failure Venting Valve Technical Data Drive voltage ower consumption Connecting flange Weight, approx. V DC W DN kg (lbs) ower Failure Venting Valve ISO-KF 0.3 (0.66) Ordering Information ower failure venting valve, normally open ower Failure Venting Valve V Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

119 ower Failure Venting Valve, Electromagnetically Actuated DN 10 ISO-KF 65, Dimensional drawing for the electromagnetically astuated power failure venting valve Technical Data Technical data Ordering Information ower failure venting valve DN 10 ISO-KF, electromagnetically actuated 024 V DC 230 V AC / 50/60 Hz ower Failure Venting Valve See Catalog Valves, para. Special Valves ower Failure Venting Valve urge Gas and Venting Valve Technical Data urge Gas and Venting Valve High Vacuum umps Connecting flange DN 10 ISO-KF Weight, approx. kg (lbs) 0.7 (1.55) Ordering Information urge Gas and Venting Valve urge gas and venting valve, 230 V 0.2 mbar x l x s -1 (12 sccm) 0.4 mbar x l x s -1 (24 sccm) urge Gas and Venting Valve Technical Data urge Gas and Venting Valve Connecting flange Inlet Outlet 1/4" tube pump specific or DN 16 ISO-KF urge gas pressure, abs. bar 1.5 to 6,0 Weight, approx. kg (lbs) 0.5 (1.1) Ordering Information urge gas and venting valve, 24 V DC 0.6 mbar x l x s -1 urge Gas and Venting Valve Further 0.6 mbar x l x s -1 valves upon request leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

urge Gas and Venting Valve for ClassicLine and SL umps Technical Data Connecting flange ump side Gas connection Seal gas pressure, abs. Weight, approx.

120 urge Gas and Venting Valve for ClassicLine and SL umps Technical Data Connecting flange ump side Gas connection Seal gas pressure, abs. Weight, approx. Ordering Information DN G bar kg (lbs) urge Gas and Venting Valve 10 ISO-KF 1/4" (0.66) urge Gas and Venting Valve urge gas and venting valve at 1 bar 0.2 mbar x l x s -1 (12 sccm), 24 V DC 0.2 mbar x l x s -1 (12 sccm), V AC 0.2 mbar x l x s -1 (12 sccm), 230 V AC 0.4 mbar x l x s -1 (24 sccm), 24 V DC 0.4 mbar x l x s -1 (24 sccm), V AC 0.4 mbar x l x s -1 (24 sccm), 230 V AC 0.6 mbar x l x s -1 (36 sccm), 24 V DC 0.6 mbar x l x s -1 (36 sccm), V AC 0.6 mbar x l x s -1 (36 sccm), 230 V AC V V V V V V V V0040 Adapter Set for Seal Gas and Venting Valve for the SL pumps Technical Data ump flange adapter incl. adapter centering ring with sinter filter insert and clamping ring Ordering Information Adapter Set M8 / DN 10 ISO-KF DN 10/DN 16 ISO-KF Adapter Set Adapter set for purge gas and venting valve V0011 Gas Filter to G 1/4" for urge Gas and Venting Valve Technical Data Gas Filter Gasfilter including fitting G 1/4" and 2 gaskets Ordering Information Gas Filter Gas filter to G 1/4" for seal gas and venting valve Replacement filter for gas filter to G 1/4" for seal gas and venting valve V0012 E Oerlikon Leybold Vacuum Full Line Catalog 07/2013 leybold

Accessories for Serial Interfaces RS 232 C and RS 485 C Through these accessories many control, monitoring and information capabilities can be implemented in connection with the electronic frequency

DRIVE TD 700 TW 250 S / TURBO.DRIVE S / TURBO.DRIVE TD 300 / TURBO.DRIVE TD 400 T 1600, TW 1600 C Software C software for Windows 95 or higher.

turbomolecular pumps - Integration of customer s software - Recording parameter data over time (for example, temperatures, rotor frequency) Ordering Information C Software C software TURBO.

121 Accessories for Serial Interfaces RS 232 C and RS 485 C Through these accessories many control, monitoring and information capabilities can be implemented in connection with the electronic frequency converters and turbo molecular pumps. The following turbomolecular pumps or electronic frequency converters are supported: SL 80, SL 300 / TURBO.DRIVE TD 400 SL 700 / TURBO.DRIVE TD 700 TW 250 S / TURBO.DRIVE S / TURBO.DRIVE TD 300 / TURBO.DRIVE TD 400 T 1600, TW 1600 C Software C software for Windows 95 or higher. Technical Features - Convenient graphical user interface - Several turbomolecular pumps can be operated in parallel High Vacuum umps - Display, modify, save and compare the parameter lists of the turbomolecular pumps - Integration of customer s software - Recording parameter data over time (for example, temperatures, rotor frequency) Ordering Information C Software C software TURBO.DRIVE Server, CD-Rom 1) V0102 1) 1) The C software can be downloaded from Software supports only RS 232 C, RS 485 C and rofibus Interface Adaptor for Frequency Converter with RS 232 C/RS 485 C Interface Ordering Information Interface Adaptor RS 232 C/RS 485 C Adaptor RS 232 C/RS 485 C mains connection 230 V, 50 Hz, EURO plug Adaptor USB/RS 232 C for connection of RS 232 C to USB (C), including CD with drivers and manual V V0103 leybold Oerlikon Leybold Vacuum Full Line Catalog 07/

HIGH VACUUM PUMPS. Hybrid Turbomolecular Pumps. ATH series. Adixen by Alcatel Vacuum Technology

HIGH VACUUM PUMPS. Hybrid Turbomolecular Pumps. ATH series. Adixen by Alcatel Vacuum Technology H I G H V A C U U M P U M P S Adixen by Alcatel Vacuum Technology Hybrid Turbomolecular Pumps 139 Introduction Alcatel offers the of hybrid turbomolecular pumps with pumping speeds ranging from 30 to 300