DIRECT DRIVE ROTARY TABLES SRT SERIES

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1 DIRECT DRIVE ROTARY TABLES SRT SERIES Key features: Direct drive Large center aperture Brushless motor design Precision bearing system Integrated position feedback Built-in thermal sensors ServoRing rotary tables provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the ServoRing Stage yields the lowest total cost of ownership. Compact package, Superior design The design of the ServoRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. ServoRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery Brushless Direct Drive To maximize positioning performance ServoRing utilizes direct drive three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. Lo-Cog magnetic design assures smooth rotation and dynamic performance. Accurate Positioning Performance is assured with high resolution encoder that results in sub arc-sec positioning resolution. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make ServoRing the ideal solution for applications requiring frequent directional changes. Applications: Semiconductor assembly Precision machine tools Wafer processing Electronics assembly Robotic handlers Automation

2 Planar ServoRing TM Specifications Parameter Unit SRT SRT SRT SRT Tabletop diameter mm Height mm Aperture mm 30 Motor type Three phase brushless Direct drive Number of pole pairs P 8 Peak Torque (note 1) Tp Nm Continuous torque (note 2) Tc Nm Peak current Ip Amp 14 Continuous current Ic Amp 6 Sine encoder (note 3) Digital encoder (note 4) Lines/rev 2,048 10,000 Counts/rev 409, ,600 to 2,000,000 Axial load Kg 30 Bus voltage (Line voltage) V VDC VAC Rated speed (note 5) Nc RPM 800 Radial/axial run-out (note 6) Microns 20 (-N), 10 (-P), 5 (-SP) Rotating inertia Kg m Stage weight Kg Construction Rotor steel Stator - aluminum Note 1 1sec. duration, coil at 20 C Note 2 Note 3 Note 4 Note 5 Note 6 Coil at 120 C, convection (air) cooling 1V pp differential, quadrature, index mark Interpolation factor (amplifier): x256, x512, x1024 Digitized resolution (amplifier) = Fundamental resolution * Interpolation Factor RS422, TTL, 5VDC, differential, quadrature, index mark Interpolation factor (encoder): x50 (), x100 Digital resolution (encoder) = Fundamental resolution * Interpolation Factor * 4 Rated speed based on amplifier bus voltage and motor Y winding. Higher speed (Δ) winding on request. Actual speed depends on the encoder resolution, interpolation factor, load, eddy current losses and bearing type -N ABEC 5 bearing, -P precision ABEC 7 bearing, -SP special

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5 Parameter Unit SRT SRT SRT Tabletop diameter mm 115 Height mm Aperture mm 45 Motor type Three phase brushless Direct drive Number of pole pairs P 12 Peak Torque (note 1) Tp Nm Continuous torque (note 2) Tc Nm Peak current Ip Amp 14 Continuous current Ic Amp 6 Sine encoder (note 3) Digital encoder (note 4) Lines/rev 2,048 10,000 Counts/rev 409, ,600 to 2,000,000 Axial load Kg 75 Bus voltage (Line voltage) V VDC VAC Rated Tc (note 5) Nc RPM 400 Radial/axial run-out (note 6) Microns 30 (-N), 20 (-P), 10 (-SP) Rotating inertia Kg m Stage weight Kg Construction Rotor steel Stator - aluminum Note 1 1sec. duration, coil at 20 C Note 2 Note 3 Note 4 Note 5 Note 6 Coil at 120 C, convection (air) cooling 1V pp differential, quadrature, index mark Interpolation factor (amplifier): x256, x512, x1024 Digitized resolution (amplifier) = Fundamental resolution * Interpolation Factor RS422, TTL, 5VDC, differential, quadrature, index mark Interpolation factor (encoder): x50 (), x100 Digital resolution (encoder) = Fundamental resolution * Interpolation Factor * 4 Rated speed based on amplifier bus voltage and motor Y winding. Higher speed (Δ) winding on request. Actual speed depends on the encoder resolution, interpolation factor, load, eddy current losses and bearing type -N ABEC 5 bearing, -P precision ABEC 7 bearing, -SP special

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7 Parameter Unit SRT SRT SRT Tabletop diameter mm 120 Height mm Aperture mm 65 Motor type Three phase brushless Direct drive Number of pole pairs P 16 Peak Torque (note 1) Tp Nm Continuous torque (note 2) Tc Nm Peak current Ip Amp 14 Continuous current Ic Amp 6 Sine encoder (note 3) Digital encoder (note 4) Lines/rev 3,600 9,000 Counts/rev 409, ,000 to 3,600,000 Axial load Kg 150 Bus voltage (Line voltage) V VDC VAC Rated Tc (note 5) Nc RPM 300 Radial/axial run-out (note 6) Microns 30 (-N), 20 (-P), 10 (-SP) Rotating inertia Kg m Stage weight Kg Construction Rotor steel Stator aluminum Note 1 1sec. duration, coil at 20 C Note 2 Note 3 Note 4 Note 5 Note 6 Coil at 120 C, convection (air) cooling 1V pp differential, quadrature, index mark Interpolation factor (amplifier): x256, x512, x1024 Digitized resolution (amplifier) = Fundamental resolution * Interpolation Factor RS422, TTL, 5VDC, differential, quadrature, index mark Interpolation factor (encoder): x50 (), x100 Digital resolution (encoder) = Fundamental resolution * Interpolation Factor * 4 Rated speed based on amplifier bus voltage and motor Y winding. Higher speed (Δ) winding on request. Actual speed depends on the encoder resolution, interpolation factor, load, eddy current losses and bearing type -N ABEC 5 bearing, -P precision ABEC 7 bearing, -SP special

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9 Parameter Unit SRT SRT SRT Tabletop diameter mm 225 Height mm Aperture mm 95 Motor type Three phase brushless Direct drive Number of pole pairs P 20 Peak Torque (note 1) Tp Nm Continuous torque (note 2) Tc Nm Peak current Ip Amp 14 Continuous current Ic Amp 6 Sine encoder (note 3) Digital encoder (note 4) Lines/rev ,000 Counts/rev 1,080,000 2,260,000 to 7,200,000 Axial load Kg 300 Bus voltage (Line voltage) V VDC VAC Rated Tc (note 5) Nc RPM 250 Radial/axial run-out (note 6) Microns 30 (-N), 20 (-P), 10 (-SP) Rotating inertia Kg m Stage weight Kg Construction Rotor steel Stator - aluminum Note 1 1sec. duration, coil at 20 C Note 2 Note 3 Note 4 Note 5 Note 6 Coil at 120 C, convection (air) cooling 1V pp differential, quadrature, index mark Interpolation factor (amplifier): x256, x512, x1024 Digitized resolution (amplifier) = Fundamental resolution * Interpolation Factor RS422, TTL, 5VDC, differential, quadrature, index mark Interpolation factor (encoder): x50 (), x100 Digital resolution (encoder) = Fundamental resolution * Interpolation Factor * 4 Rated speed based on amplifier bus voltage and motor Y winding. Higher speed (Δ) winding on request. Actual speed depends on the encoder resolution, interpolation factor, load, eddy current losses and bearing type -N ABEC 5 bearing, -P precision ABEC 7 bearing, -SP special

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11 I-SERV TM DIGITAL SERVO AMPLIFIER and INDEXER Features: Advanced sine wave commutation technology Accurate torque control Stand-alone or CAN distributed drive Step/direction interface Electronic gearing to master encoder ±10V velocity/current command interface Field oriented controls Auto-phasing and auto-tuning of the current loop 115/230VAC operation 24VDC stay-alive control power Operational modes: Torque control from analog to CAN command Velocity control from analog to CAN command Pulse/direction interface Position control indexer or CAN command Motion indexing: Stores up to 8 motion profiles in memory Start motion through CAN or digital I/O Homing function

12 ORDER CODE: STAGE SRT N F Y Series Model Version See drawing for version number Bearing precision N-normal () P-precision SP-special Feedback lines/rev See model number spec Interpolation Sine 1Vpp: A Digital encoder: 50 (), 100 () Cable length (m) 1, 2, 3 (), 5 Cable exit (Model dependent (see drawing) F-front, BK-back, T-top, BT-bottom Winding Y star () T - triangle Note: digital encoder CPR (counts/rev) = lines/rev * encoder_interpolation_factor * 4 sine encoder CPR (counts/rev) = lines/rev * amplifier_interpolation_factor * 4 AMPLIFIER I-SERV AC A D 3 Series Operating voltage DC: VDC AC: 110/220 VAC () Operating mode A-amplifier () I-indexer Encoder interface A- sine D-digital () Cable set length (m) 1, 3 (), 5, Custom Note: Indexer includes single axis motion controller integrated with amplifier. Interfaces: ASCII commands (RS232 link) pulse/direction CAN bus with command libraries LabView PLC I/O with sequencer EtherCat Macro

13 ServoRing TM Inquiry Form Company Address Contact name Telephone / fax Project title Short description Position of the rotary table vertical horizontal angle [ ] to the horizontal plane Controller Manufacturer Model Driver / Inverter Manufacturer Model Motion Unit Value Performance Unit Value Typical move deg Repeatability arc-sec Maximum speed rpm Absolute accuracy arc-sec Maximum acceleration rad/sec 2 Resolution arc-sec Accel /decel time sec Speed stability % Total cycle time sec Position stability arc-sec Load Axial run-out μm Load inertia Kg.m 2 Radial run-out μm Friction torque Nm Other resistance torque Nm Environmental Unit Value Dimensions Unit Value Ambient temperature C Max table outside diameter mm Max temperature rise C Max table inside diameter mm Water cooling available yes/no Max table height mm Clean room requirement yes/no Other parameters Vacuum requirement yes/no Power VDC 1 x 110 V 1 x 220 V 3 x 220 V Expected annual requirement Prototype required by Series production starts by