DARPATech 99 DARPA/MTO. Bruce Gnade

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1 DARPATech 99 DARPA/MTO Bruce Gnade

2 High Definition Systems Objective: Develop leading-edge display technology to meet diverse, but specific, DoD needs. The goals include increased power efficiency, reduced weight and improved ruggedness, while pushing the state-of-the-art in display performance. Demonstrate DARPAfunded technology in military applications.

3 High Definition Systems Current emphasis for HDS program Accelerate the development of flexible, rugged displays (organic EL, zero-power reflective, selfassembled materials) Push maturing technologies to demonstration phase (FED, Color EL) Increase the demonstration of HDS supported technology (DMD, TFEL, plasma)

SOLUTION : Technology independent systemti-dmd, dpix- AMLCD, Photonics -

4 CLADS PROBLEM: CRT display systems used in AWACS, JSTARS and ABCCC are becoming unsupportable: Logistics Support: $208K/CRT, MTBF ~ 500 hours SOLUTION : Technology independent systemti-dmd, dpix- AMLCD, Photonics - Plasma, etc. Impact of FPD Technology: lb watts MTBF > 3300 hours +70% viewing area

5 Small Image Sources 640x480 AMEL for Land Warrior 1280 x 1024 AMLCD for Comanche DARPA, SSCOM, CECOM-NVESD, ARL, USARARL, Armstrong Labs, NAWC Kopin Corp, Planar Inc., Sarnoff Corp., Allied Signal, Thesys, UMC, MIT-LL, U of Fl, GTRI, GIT, Oregon Graduate Institute, Honeywell, Hughes, Kaiser

High Brightness Image Sources Rotocraft Avionics Systems Performance goals - 1280x1024-1650 ft-l - 80:1 contrast ratio - <1%

6 High Brightness Image Sources Rotocraft Avionics Systems Performance goals x ft-l - 80:1 contrast ratio - <1% reflectance - Viewing angle +/-30º Proposed Technologies AMLCD - Kopin Joint development program * DARPA * Comanche * Army * NVESD AMEL - Planar

7 Zero-Power Displays Advantages of cholesterics 1) Reflective in visible and IR 2) 2 AA batteries / year 3) Rugged plastic displays prevent breakage 4.0µm 4.5µm 5.5µm BLUE GREEN RED Pixel States BLACK ABSORBER P/2 Color Reflective Planar State Black State

8 Materials for Emissive Displays TFEL Phosphor Efficiency Brightness (cd/m2) Brightness (2kV, 72Hz, 30usec) Green 1.E+05 1.E+04 1.E+03 1.E+02 1.E ZnS:Cu Avg. Current Density (ua/cm2) Y2SiO5:Tb Gd2O2S:Tb Y3Al5O12:Tb SrGa2S4:Eu Required Brightness Normalized Luminous Eff SrCaGa 2 S 4 : Ce,O All with CIE y = SrS:Ce with blue filter SrS:Ce,Ag with blue filter SrS:Cu,F with blue filter SrS:Cu,Ag

9 Active Matrix Backplanes on Flexible Substrates Relative Panel Eff Passive Matrix 100 cd/m 2 10 l/w in DC R col =15Ω/ R row =0.05 Ω/ 0.1 mm pixel 0.3 mm pixel Relative Panel Eff Active Matrix 100 cd/m 2 10 l/w in DC mob.=50cm 2 /Vs 0.1 mm pixel 0.3 mm pixel No. of Row s No. of Rows * Driving force for active matrix is power efficiency * Pulsed operation and low duty cycle in PM require high current * I 2 R losses can reduce PM power efficiency by 25X Provided by Jim Sturm - Princeton Univ. POEM

10 LLNL * Substrate = Polyester * Max. Processing Temp = 100 C *Max. Anneal Temp. = 150 C *Si Crystallization 308nm XeCl Excimer Laser I DS (Amps) Poly-Si TFTs on Plastic 10-3 µ n = 7.5 cm 2 /V-sec V DS = 15V V DS = 0.1V wafer #2 Die 40 L12 50 V GS (Volts) Transistor I-V Curves I DS (µa) V GS = 30V V GS = 27.5V V GS = 25V V DS (Volts) Transistor Process Flow Laser crystallized Si doped polysilicon polyester Source Al SiO 2 poly -Si SiO 2 308nm XeCl 35ns Pulse polyester polyester Gate Drain

Self Orienting, Fluidic Transport SOFT process Flow SOFT Advantages TFT process Flow 1) high performance electronics 2) technology independent 3) size independent 4) low temp.

11 Self Orienting, Fluidic Transport SOFT process Flow SOFT Advantages TFT process Flow 1) high performance electronics 2) technology independent 3) size independent 4) low temp. processing 5) low capital investment 6) 2x10 7 pixels/8 wafer Gate metal Glass Substrate a-si Si 3 N 4 Nitride Source Passivation Drain a-si Si 3 N 4 Glass Substrate Beckman Display Display Process

12 Active Matrix Organic LED Green: (Alq 3 ) Luminance: 850 nits Polysilicon Planar Systems Eastman Kodak Sarnoff Corp Princeton University Back Plane (MgAg) Polysilicon transistor OLED material Quartz Substrate

13 Polymer Switched Matrix Display Column Electrodes Up-Conversion Phosphor Emission Figure 2: Illustration of high brightness full color Blue polymer display using a diode array at 980 nm. Diode Laser Array Optical switches Waveguides Green Red Row Electrodes 1.) 1.) Low Low Power Power 2.) 2.) Large Large 3.) 3.) Flexible Flexible 4.) 4.) Optical Optical toolkit toolkit Energy (cm l ) 20,000 15,000 10,000 5,000 4 F 7/2 4 H 11/2 4 S 3/2 4 F 9/2 4 I 9/2 2 F 5/2 4 I 11/2 4 I 13/2 980 nm 515 nm 550 nm 650 nm 2 F 3/2 Yb 3+ Er 3+ 4 I 15/2 Ytterbium Erbium Optical IC Gemfire Up-Conversion Phosphors

14 Roll-to-Roll Display Processing Roll-to-Roll laser etching electrode patterning Roll-to-Roll display assembly Polaroid

15 Summary What do we want in displays? * Low power * Rugged * Sunlight readable * Interactive * Inexpensive

Pressure sensor. Surface Micromachining. Residual stress gradients. Class of clean rooms. Clean Room. Surface micromachining

Pressure sensor. Surface Micromachining. Residual stress gradients. Class of clean rooms. Clean Room. Surface micromachining Pressure sensor Surface Micromachining Deposit sacrificial layer Si PSG By HF Poly by XeF2 Pattern anchors Deposit/pattern structural layer Etch sacrificial layer Surface micromachining Structure sacrificial