1.2 Universiti Teknologi Brunei (UTB) reserves the right to award the tender in part or in full.

Transcription

1 TENDER SPECIFICATIONS FOR THE SUPPLY, DELIVERY, INSTALLATION AND COMMISSIONING OF ONE UNIT OF VARIABLE PRESSURE ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE (SEM) CUM ENERGY DISPERSIVE SPECTROSCOPY (EDS) 1 SCOPE OF TENDER 1.1 This tender is for the supply, installation, calibration, testing and commissioning of one unit of Variable Pressure Environmental Scanning Electron Microscope (SEM) cum Energy Dispersive Spectroscopy (EDS) 1.2 Universiti Teknologi Brunei (UTB) reserves the right to award the tender in part or in full. 2 SPECIFICATIONS AND COMPLIANCE STATEMENTS 2.1 The Variable Pressure Environmental Scanning Electron Microscope (SEM) cum Energy Dispersive Spectroscopy (EDS) will be evaluated as a complete system. 2.2 Tenderers must complete and submit the Compliance Statements as part of the tender submission. Tenderers must also provide published specifications as proof when submitting the tender and UTB shall have the right to verify the figures by requesting the tenderers to perform tests. 3 PERSONAL DATA PROTECTION 3.1 If personal data is involved, the successful tenderer(s) shall be accountable for the security, use and disclosure of the data. Specific details pertaining to the personal data protection clauses will be given to the successful tenderer(s) where applicable. Tenderers are to state in the Remarks column the actual specifications of the proposed equipment. (Attach separate sheets if there is insufficient space.) NB: In the following tables the system or the systems refer to all hardware, software components functioning as a whole unit. Page 1 of 11

2 1. Scanning Electron Microscope (SEM) 1.1 The system shall comprise the following: SEM Control Unit Software & Computer System Accessories 2. Electron Gun 2.1 The electron gun resolution requirements must be met: nm guaranteed at 20 kv using secondary electron imaging nm guaranteed at 20 kv using back scattered electron imaging 2.2 The accelerating voltage should be a controllable from at least 0.5 kv to 20 kv. 2.3 The accelerating voltage should be enable elimination of hysteresis. 2.4 The imaging modes should include secondary electron imaging, back scattered imaging or a selectable combination of both. 2.5 The alignment of the electron gun must be performed electromagnetically. 2.6 There must be a built-in automatic beam generation and automatic control functions of the following: magnification correction contrast and brightness astigmatism focus filament heating current gun alignment 2.7 The objective lens and electron beam axial correction must be done automatically by using the provided software. 2.8 Electron gun should be easychange cartridge type with a precentered filament Page 2 of 11

3 3. Electron Optical System 3.1 The microscope column must be fully pre-aligned, including all apertures. 3.2 The gun column should be equipped with electromagnetic optics to reduce stigmatism for better resolution images. 3.3 Focus wobbler must be built-in to assist the mechanical centering of the objective aperture. 3.4 The gun column should have a long linear tube of a minimum length of 20 cm or longer, which helps to prolong the lifespan of the gun column. 3.5 The image resolution of: 4.0 nm guaranteed at 20 kv using secondary electron imaging 5.0 nm guaranteed at 20 kv using back scattered electron imaging must be guaranteed for at least 5 years. 3.6 Must have dynamic focusing function that will correct the focus error on tilted specimen. 4. Scanning System 4.1 Image fine shifting using joystick with ± 10 μm or better in x and y directions. 4.2 Scanning modes must consist of the following mode: full frame, TV scan full frame, fast scan full frame, slow scan Selected area scan High-definitions capture scan Line Lock 4.3 Must be built-in with beam blanking feature and scan rotation function Page 3 of 11

4 5. Specimen Chamber 5.1 Single and multiple specimen holders must be provided and must be user friendly without the need of tooling to adjust and mount the specimens. 5.2 The specimen stage must be a eucentric goniometer stage at all working distance where the area of interest will be locked regardless of tilting angle of the stage. 5.3 The stage tilt angle should be covering from -10 to 90 degrees. 5.4 Stage maximum travel range in the X, Y and Z directions must be at least 40 mm, 80 mm and 43 mm respectively. 5.5 The working distance should be controllable from 5 to 50 mm. 5.6 The X and Y movements of the specimen stage should be motorized. 5.7 There should also be a built-in memory for up to 100 specimen positions. 5.8 The maximum diameter of the specimen allowable in the specimen chamber should be 150 millimeters. 5.9 There should be an option to integrate specimen exchange chamber into the SEM system. 6 Vacuum System 6.1 The microscope column must be evacuated by a maintenance free pump system such as Turbomolecular pump which could reach high vacuum (< 1 Pa) within 5 minutes or less. 6.2 The vacuum system must have a built-in monitor and the control must be fully automatic and sequential. Page 4 of 11

5 6.3 The microscope must be able to support low vacuum capability where non-conducting specimens will not charge up even under high accelerating voltage. 6.4 The orifice should be placed below the objective lens aperture to prevent objective lens contamination. 7. Signal Detection 7.1 Imaging must be with Secondary electrons (SE) and backscattered electrons (BSE) 7.2 The changeover among the two detectors must be quick and easy 7.3 For the High Sensitive Semiconductor BSE detector, the following imaging modes must be available: compositional, topographical, compo/topo mixed signals. 7.4 It should be possible to display two kinds of images (SE and BSE) side by side on the main display area simultaneously. 7.5 The contrast and brightness of each signal should be independently adjustable. 7.6 It should be possible to mix two kinds of images (SE and BSE) and displayed as one image on the main image area. 7.7 The display of the images should be real-time and simultaneous. 8. Computer System for SEM 8.1 The computer system shall be of a reputable brand and have a minimum configuration of intel i7 processor, 4 GByte RAM and Hard drive of 1 TByte or more. 8.2 The system shall include one set of 23 LCD monitor, keyboard and mouse. If equivalent, please provide details. Page 5 of 11

6 8.3 The software should operate under Microsoft Windows operating system. 8.4 A manual-knobs operation box that will implement on the mouse control operation must be provided. 9. Image Processing Software 9.1 Image signal processing, such as image averaging, gamma control, pseudo color and 2-split screen presentation must be available on the SEM. 9.2 The digital images should have resolution better than 5,120 x 3,840 pixels and should be saved in BMP, TIFF or JPEG format. 9.3 Image processing software that is capable of doing line width measurement must be included. 9.4 The software must be equipped with calibration capability, have built-in standard image templates for report printing. It should also allow users to export all selected images in HTML format or as a Web Site D Software 10.1 Software that allows the construction of 3-dimensional (3- D) image without tilting the sample and correcting image shift must be included. The software should be fully integrated into the SEM operation panel The 3-D image should be able to provide the height profile as well as the bird s eye plot of the surface morphology of the samples. 11. Energy Dispersive Spectroscopy (EDS) 11.1 A microanalytical system, computer and software should be attached to the microscope for energy dispersive microanalysis. Page 6 of 11

7 11.2 It must be able to detect all elements above and include Boron and must have a detector resolution of at least 132 ev The analysis system should have the following capabilities: Operation using a simple single window Carry out qualitative and quantitative analysis from an image on the microscope using standardless analysis or user defined standards. Acquire and print digital images with the ability to adjust brightness and contrast at any stage including the report templates. Allow annotation of electron images and x-ray maps. Able to compare unlimited store spectra. Include calipers to measure the size of features on any electron image. Automatically acquire spectra from a feature with a single mouse-click. Automatically acquire and save spectra from individually selected multiple points, regions and features. Automatically identify and label elements present during acquisition. Acquire elemental maps and linescans for all elements from B to U displaying up to 190 at any one time even during acquisition. Allow qualitative and quantitative analysis of regions or features during acquisition of maps/linescans. Re-visit saved data to generate maps or linescans, spectra, qualitative and Page 7 of 11

8 quantitative data for any new element from B to U, even when samples are not present. Generate reports from a range of templates provided and export the report directly to Word if required. On-line help and tutorials capable of stand-alone training of system and microanalysis techniques. Save data in a secure, logical structure for easy retrieval using Keyword search. Autosave Data is done automatically save each time a change is made. Option of keeping data private or sharing with other users The detector must be a liquid Nitrogen (N2) free system using vibration free thermoelectric Peltier cooling technology The system must provide unlimited off-line software. 12. Computer System for EDS 12.1 The computer system shall be of a reputable brand and have a minimum configuration of intel i7 processor, 4 GByte RAM and Hard drive of 1 TByte or more The system shall include one set of 23 LCD monitor, keyboard and mouse. 13. Operating Conditions 13.1 Air condition for room: Room Temperature: 15ºC to 30ºC Humidity: 70% or lower 13.2 Power supply for system should be single phase AC220V, at least 20 Ampere with grounding 100Ω or better. Page 8 of 11

9 14. Other Requirements 14.1 To provide one box (10 pieces) of hairpin filaments To provide at least 10 specimen stubs or more 14.3 To provide one system of sputter coater for non-conducting samples with a carbon source. 15. Delivery 15.1 The successful tenderer shall complete the delivery of all hardware, software, accessories and associated documentation in the total awarded quantity within TWENTY (20) weeks from the date of the purchase order The tenderer shall include a clear and detailed time-table proposing implementation dates in the tender submission. The timetable shall indicate all tasks required for successful implementation of the entire project, including dates for delivery, installation, testing and commissioning of the proposed system. 16. Installation 16.1 The successful tenderer shall provide all necessary test equipment, instruments and labour for the delivery, installation, testing and commissioning of the proposed system Prior to system commissioning, the successful tenderer shall be fully and solely responsible for every aspect of the successful implementation of the systems by the completion date as specified. 17 Commissioning 17.1 The successful tenderer shall complete the testing and commissioning of the system within ONE (1) month from the date of delivery. Page 9 of 11

10 17.2 Commissioning tests should be conducted by the successful tenderer in the presence of representatives from UTB for the purpose of verifying the performance of all hardware and software installed UTB shall reserve the rights to modify the tenderer s commissioning test procedures and to request the tenderer to repeat unsatisfactory tests during acceptance testing. 18. Training 18.1 The successful tenderer shall provide training courses for staff of UTB to manage, use and maintain the proposed hardware, system and application software. This training should be conducted by qualified personnel certified by the system manufacturer at corporate headquarter facility The duration and brief descriptions of the contents of the courses covering the following areas shall be submitted with the tender: Use of system and simple maintenance and upkeep of the system. Use of software provided with the system The successful tenderer shall provide training manuals for any training course conducted for UTB staff. 19. Documentation 19.1 The successful tenderer shall provide TWO (2) sets of documentation and manuals for each item (including software) supplied. The documentation shall include the following where appropriate: Setup guide. Operation and maintenance manual (hardware and software). Page 10 of 11

11 Where available, documentation should also be provided on CD- ROM. 20. Warranty 20.1 All commissioned items are to be subjected to a trial period of ONE (1) month from the date of commissioning before acceptance The on-site warranty period for all supplied hardware and software shall be at least TWELVE (12) months from the date of final acceptance The successful tenderer shall guarantee performance of the equipment in accordance with the specifications in the submitted tender during the warranty period During the warranty period, replacement of all defective parts, items or equipment, and any other work required to make good all defects of the total system shall be carried out at no cost to UTB. 21. Preventive Maintenance (PM) 21.1 The Preventive Maintenance per annum should cover the following: 2 times PM visit PM consumable parts Unlimited service call 22 Optional 22.1 Specimen exchange chamber Able to accommodate sample size up to 100mm in diameter. Comes with an additional exchange chamber pump Page 11 of 11