MEMS Mirror: A8L AU-TINY48.4

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1 MEMS Mirror: A8L AU-TINY48.4 Description: The new A8L2 actuator is based on an established robust two-axis MEMS design which supports various bonded mirror sizes in largeangle beam steering. Previous versions of the design were named 13L1.x were manufactured at our UC Berkeley facility and were popular with many large-mirror customers. As a consequence of increases in orders, we transitioned the manufacture to our serial production line (manufacturing partner in Asia) and name it A8L2. Target Applications: Solid State LiDAR Free Space Optical Communications Biomedical Imaging 3D Metrology and Tracking Eye Tracking (AR/VR) Ramp Response Gimbal-less Dual Axis MEMS Mirror 4.6mm diameter, Gold Coated Mech. Angle: ±5 1 st Resonant Frequency: Hz Q-Factor: Step Response: ~5ms (non-optimized drive) Drive Voltage: 0-180V Connectorized Package: TINY48.4 (20mm x 15mm) Frequency Response Part Name: A8L AU-TINY48.4 Step Response

2 XXL MEMS Mirrors Description: The new A5L2 actuator is based on an established robust two-axis MEMS design which supports extra large bonded mirror sizes in small angle (±1 ) beam steering. Previous versions of the design were named 13L2.x were manufactured at our UC Berkeley facility and were popular with many extra large-mirror customers. As a consequence of increases in orders, we transitioned the manufacture to our serial production line (manufacturing partner in Asia) and name it A5L2. Target Applications: Free Space Optical Communications Solid State LiDAR Q-Switch Biomedical Imaging Eye Tracking 6.4mm Mirror Ramp Response Gimbal-less Dual Axis MEMS Mirror Mech. Angle: ±1 Q-Factor: Drive Voltage: 0-180V Connectorized Package: TINY48.4 (20mm x 15mm) 6.4mm Mirror Frequency Response 6.4mm Mirror, Aluminum Coated 1 st Resonant Frequency: ~ Hz Part Name: A5L AL-TINY mm Mirror, Aluminum Coated 1 st Resonant Frequency: ~ Hz Part Name: A5L AL-TINY mm Mirror Frequency Response Image Shows A5L AL-TINY48.4

3 2D Scanning Mirror System: SMS-2D Scanning Mirror System or SMS is a total solution with a dual axis MEMS mirror and a controller pre-programmed with an optimized scan, and providing the mirror position with digital synchronization outputs to the user. The system is designed to boot on power, and start performing the scan without any additional user inputs. The controller is USB powered, with two analog outputs streaming the X,Y positions of the mirror, and 4 digital synchronization signals for Pixel clock, Start of new frame, Start of each line, and an active frame to denote the linear portion of the scan. Targeted Applications: LiDAR, Biomedical imaging, 3D Metrology and Imaging, etc. 24 lines linear raster scan (23 lines + retrace) 20 Hz frame rate (480 lines/s) 24 x 16 optical field of view (FoV) 0.01 repeatability MEMS Mirror: A8L AU-TINY48.4-A/W/EP USB Powered MEMS Controller: OCCIE 1.1 X and Y Position reporting on Analog Outputs Customized waveform in quantity orders

4 1D Scanning Mirror System: SMS-1D Scanning Mirror System or SMS is a total solution with a Single axis MEMS mirror and a controller pre-programmed with an optimized scan, and providing the mirror position with digital synchronization outputs to the user. This solution is targeted for Array Emitter LiDAR Architectures. The system is designed to boot on power, and start performing the scan without any additional user inputs. The controller is USB powered, with analog output streaming the X-axis position of the mirror, and 3 digital synchronization signals for Pixel clock, Start of each line, and an active frame to denote the linear portion of the scan. Targeted Applications: Array Emitter based LiDAR, PicoProjection, etc. 250Hz liner scan (500 lines/s) 22 Optical Field of View 0.01 repeatability MEMS Mirror: A8L x2400AL-TINY48.4-A/W/EP USB Powered MEMS Controller: OCCIE 1.1 X Position reporting on Analog Output Customized waveform in quantity orders Axis of Rotation

5 Programmable Light System: PLS-01 PLS or Programmable Light System is a MEMS mirror technology demonstrator, scanning a 450nm laser with vector and raster content onto a phosphor to convert the blue laser to white light to demonstrate the concept of programmable light. The system enables the user to project vector content such as text, pictograms, etc. Additional vector functionalities include pointing or scanning a spot light within the field of view. The system also has a raster based projection for smart lighting applications, using a dynamic solid state lighting solution. Targeted Applications: Dynamic Solid State Lighting, Automotive Headlights, etc. Display engine with 25 Lumen Brightness 500mW, 450nm laser ~1500 Hz Bandwidth 40 x 40 optical field of view (FoV) 0.01 resolution MEMS Mirror: A3I AL-TINY48.4/H-NW MEMS Controller: MZDK 1.5 Host connector with correlated digital outputs and Analog Inputs Windows Applications Included Rastered Arrow 3D Model of the PLS Prototype Vector Text Content

6 PLAYZER Evaluation Kit: EVK-01 EVK-01 or Playzer Evaluation Kit is a MEMS mirror technology demonstrator consisting of a MEMS mirror scan module with an eye safe 635nm laser (3-6mW) with 1-bit digital modulation and the OCCIE 1.1 MEMS Controller for host communication and MEMS driving. The OCCIE 1.1 controller interfaces with Windows Applications for Scan Control and software command that results in red laser beam scans and repeatable patterns. This product is available with 1k/month volumes, with a 3 month lead time, and is production line ready Targeted Applications: Entertainment, MEMS Vector Display, Head Up Display, etc. MEMS Mirror Scan Module with Red Laser 635nm laser, 3-6mW, 1-bit Digital Modulation 40 x 40 Field of View 0.01 resolution MEMS Mirror: A3I AL-TO8-NW USB Powered MEMS Controller: OCCIE 1.1 <800mW Power Consumption Host Connector with 2 Analog Inputs and 4 Digital Synchronization Outputs Digital Output connector with 8 Digital Outputs

Iterative Learning Control Algorithm for Greatly Increased Bandwidth and Linearity of MEMS Mirrors in LiDAR and Related Imaging Applications

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