MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE

Transcription

1 MECHANICAL BOOSTERS MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE EH Booster Pumps 5 pxh Booster Pumps 58 Stokes 6 Series Booster Pumps 60 HV8000 Booster Pump 69 HV0000/40000 Booster Pumps 7 Shop online at shop.edwardsvacuum.com Contact our customer service team 47.

2 -- EH Booster Pumps -- pxh Booster Pumps -- Stokes 6 Booster Pumps -- HV Booster Pumps Edwards provides a wide range of mechanical booster pumps to suit all the requirements of Industrial and Chemical processes. Product ranges The EH Booster range gives our customers reassurance and peace of mind thanks to its large installed base, both in Industrial and Chemical markets. EH pumps, available in sizes from 50 to 400 m h - displacement, feature the unique hydrokinetic drive, providing an efficient power transmission with benefits in economy, performance and compactness. The pxh Pumps represent the new generation of large mechanical boosters providing high pumping capacity with reduced footprint. Available in sizes from 6965 to 858 m h - displacement, are packaged as separate pumps with inverter driven controls. They are designed to be easily integrated with GXS, the last generation Edwards Industrial on board controlled dry pumps, into a high pumping speed dry pumping system. The Stokes 6 Series features a rugged design for robust and reliable operation. Available in sizes from 40 to 660 m h - displacement is configurable to customer needs: bare shaft or direct drive, rpm, vertical or horizontal gas flow orientation with by-pass versions available. HV Pumps feature a rugged design for robust and reliable operation in very large scale processes in Industrial and Chemical markets. Available in sizes from 700 to 6000 m h - displacement, are configurable to customer needs: bare shaft or with direct drive motor fitted, can be specified with variable frequency drives for greater versatility. 48.

3 ATEX ATEX classified EH boosters are annotated with the suffix T or T4. EH boosters may be supplied with ATEX classification either as part of a pump system or stand-alone. ATEX compliance is typically specified for use in Europe, but may also be required in other areas. ATEX compliant EH boosters are suitable for operation in ATEX systems: All of the EH50C, EH50 T4, EH500C, EH500 T, EH00C, EH00 T4, EH600C, EH600 T, EH600 T4, EH400C, EH400 T and EH400 T4 chemical EH pumps are fitted with flameproof motors: Pumps suitable for 50 Hz operation are fitted with a flameproof motor approved to EEx d. Gas Group IIA, lib, Temperature Class T4. Pumps suitable for 60 Hz operation are fitted with a flameproof motor approved to CSA, Division area, Gas Class I Group C & D, and Dust Class II Group F & G, Temperature Class TC. The 60Hz pumps with flameproof motors are designated C versions. Gas Auto-Ignition Temperature The temperature classifications applied to the chemical EH pumps relate to the auto-ignition temperature of flammable materials that can be pumped: The EH50C, EH500C, EH00C, EH600C, EH400C and ATEX EH pumps that have a T classification are suitable for pumping flammable materials that have an auto-ignition temperature greater than 00 C. ATEX EH pumps that have a T4 classification are suitable for pumping flammable materials that have an auto-ignition temperature greater than 5 C. Flame Proof Chemical boosters are annotated with the suffix C. EH boosters may be ordered with Flame proof motors either individually, or as part of an Chemical system. Flame proof is generally applicable in N. America and the rest of the world (excluding Europe). Chemical boosters will be supplied with a flame proof motor (suitable for 60 Hz operation) approved to CSA, Division area, Gas Class I Group C & D and Dust Class II Group F & G, Temperature Class TC. Internal and External Classifications Internal External II G bc T4 II G IIB T4 or or II G bc T EH500 II G bc T Internal Atex is suitable for all gas types. II G IIB T II G IIB T The notations used in these ratings are as follows: Symbol Meaning Specifies that the chemical EH pump can be used in a potentially explosive atmosphere II Equipment group II G Equipment category b Control of ignition source c Constructional safety IIB Suitable to pump gas group IIB T / T4 Gas auto-ignition temperature Shop online at shop.edwardsvacuum.com Contact our customer service team 49.

4 EH Pumps with Hydrokinetic Drive EH booster pumps have a unique and patented hydrokinetic fluid drive, which couples the motor to the pumping mechanism. The hydrokinetic drive offers the following advantages: Pump down times cut by up to 50% Reduced capital and operating costs No pressure sensors, by-pass lines or valves Can operate continuously at all pressures when used with a backing pump. EH booster pumps have universal voltage, air-cooled motors and are available with effective pumping speeds of up to 440 m h - / 440 ft min -. The pump bodies of the EH00, EH600 and EH400 pumps are watercooled. Two versions of each EH booster pump are available, with different oils used for the lubrication of the seals and gears. The standard version uses mineral oils, such as Ultragrade 0. The alternative version has PFPE (perfluoropolyether) oils and is suitable for applications where oxygen or other reactive and corrosive gases are processed. Fomblin must be purchased separately for PFPE prepared pumps: Pump-Down Times cut by up to 50% The hydrokinetic drive allows the booster pump to be started at the same time as the backing pump (at atmospheric pressure) as it prevents motor overload. The EH booster pump therefore assists the pumping process from the start of pump-down. In comparison pumping systems with conventional, direct drive mechanical booster pumps (where the booster pump is switched on when the chamber pressure has been reduced to, typically, less than mbar / 7.5 Torr), the total evacuation time can be reduced by as much as 50%. The graph below shows data for a.8 m / 0 ft chamber, with a 600 m h - / 600 ft min - mechanical booster pump and a 55 m h - / 50 ft min - backing pump: Automatic Overload Protection The hydrokinetic drive automatically varies the rotational speed of the pump. This protects the motor from overload, prevents over-heating, and allows the pump to operate with high pressure differentials. Consequently, EH booster pumps are not damaged by sudden increases of inlet pressure and even by the entry of solid debris into the pump. Important Cost Savings When you use EH mechanical booster pumps, you save money on installation and operation. Your capital costs are reduced as you do not need valves, by-pass lines and pressure switches, and you can use a smaller backing pump than with conventional drive booster pumps. Operation costs are reduced because EH booster pumps have smaller motors than direct drive pumps and, when operating at full speed, they use only a fraction of the rated power. 50.

5 EH MECHANICAL BOOSTER PUMP THE INTELLIGENT CHOICE The EH mechanical booster pumps feature the unique hydrokinetic drive, providing an efficient power transmission with benefits in economy, performance and compactness. The hydrokinetic drive provides pump down times cut by 50%, when compared with direct drive pumps, no bypass lines or pressure switches required, universal voltage motors, reduced capital and operating costs, air cooled motors with water cooled options, and quiet, minimum vibration. The EH mechanical booster pumps, based on the simple Roots principle, remain the favorite pumps for applications where high pumping speeds over 000 mh /776 ftmin- are required in the pressure region of 0.0 to 50 mbar/ to 7.5 Torr. These must always be backed by another pump which can deliver against a high pressure differential to atmospheric pressure. Operating at relatively low pressures, the mechanical booster pump is not exposed to the same concentrations of corrosive process media as is the backing pump, which makes it highly reliable. Features and Benefits Applications Performance fast pump down time due to unique hydrokinetic drive. Increased productivity faster pump down time. More performance for less larger displacement than equivalent competitor models. Stable operation optimised clearances and after coolers. Simplicity Continuous operation at all pressures. Simple installation no need for pressure switches, bypass lines or variable frequency drives. Reliability automatic overload protection, reliable shaft seal design. Safe operation automatic overload protection. Robust operation even for harsh duties proven shaft seal design to protect pumping mechanism and gearbox from cross-contamination. High uptime and low maintenance internal evacuation of gearboxes extends shaft seal life. Reassurance. Peace of mind industry proven with large installed base. Shop online at shop.edwardsvacuum.com Vacuum distillation. Vacuum packaging. Steel degassing. Thin film coating. Industrial freeze drying. Semiconductor processing. Pump Range EH EH50 EH500 EH00 EH600 EH400 PFPE Prepared EH50FX EH500FX EH00FX EH600FX EH400FX Contact our customer service team 5.

6 Performance Curves EH50 Booster Pump EH50 EH50 Performance Curve 50 Hz m h - 85 ft min - 60 Hz 75 m h - 0 ft min - (m h - ) EH50, 50Hz EM40 GV80 EH50 HC IE Asia 50 Hz 00 V 50 Hz EH50 HC IE EU/CN 50 Hz V 50 Hz A0594 A (mbar) (Pa) EH50 HC IE Asia 60 Hz 00 V 60 Hz, 80 V60 Hz A0694 EH50 HC IE US 60 Hz 0/460 V 60 Hz A06946 EH50 FX IE Asia 50 Hz 00 V 50 Hz A0794 EH50 FX IE EU/CN 50 Hz V 50 Hz EH50 FX IE Asia 60 Hz 00 V 60 Hz, 80 V 60 Hz A05496 A0894 (ft min - ) EH50 FX IE US 60 Hz 0/460 V 60 Hz EH50C 460 V -ph 60 Hz hp A08946 NRA EH50, 60Hz EM40 GV80 EH50T4 0-40/80-45 V ph 50 Hz. kw NRA Please note that Fomblin must be purchased separately with PFPEprepared pumps. Fomblin YVac 6/6 is appropriate (Torr) EH500 Booster Pump EH500 EH500 Performance Curve 50 Hz 505 m h - 00 ft min - 60 Hz 605 m h - 5 ft min - (m h - ) EH500, 50Hz EH500 HC IE Asia 50 Hz 00 V 50 Hz EH500 HC IE EU/CN 50 Hz V 50 Hz EH500 HC IE Asia 60 Hz 00 V 60 Hz, 80 V 60 Hz EH500 HC IE US 60 Hz 0/460 V 60 Hz EH500 FX IE Asia 50 Hz 00 V 50 Hz EH500 FX IE EU/CN 50 Hz V 50 Hz EH500 FX IE Asia 60 Hz 00 V 60 Hz, 80 V 60 Hz EH500 FX IE US 60 Hz 0/460 V 60 Hz EH500C 460 V -ph 60 Hz hp EH500T 0-40/80-45 V ph 50 Hz. kw A00594 A A00694 A A00794 A A00894 A NRA NRA Please note that Fomblin must be purchased separately with PFPEprepared pumps. Fomblin YVac 6/6 is appropriate (ft min - ) EH500, 60Hz EM80 GV (Torr) 0 0 EM80 GV80 (mbar) 4 5 (Pa) 5.

7 EH00 Performance Curve EH00 Booster Pump EH00 (m h - ) 50 Hz 95 m h - 75 ft min - 60 Hz 45 m h ft min - EH00, 50Hz EM75 EM80 (ft min - ) EH00, 60Hz EM75 EM (Torr) (mbar) (Pa) EH00 HC IE Asia50 Hz 00 V50 Hz EH00 HC IE EU/CN50 Hz V50 Hz EH00 HC IE Asia60 Hz 00 V60 Hz, 80 V60 Hz EH00 HC IE US60 Hz 0 / 460 V60 Hz EH00 FX IE Asia50 Hz 00 V50 Hz EH00 FX IE EU/CN50 Hz V50 Hz EH00 FX IE Asia60 Hz 00 V60 Hz, 80 V60 Hz EH00 FX IE US60 Hz 0 / 460 V60 Hz EH00C 0/460 V -ph 60 Hz 4 hp EH00T V ph 50 Hz kw A A A A A A A A A A Please note that Fomblin must be purchased separately with PFPE-prepared pumps. Fomblin YVac 6/6 is appropriate EH600 Performance Curve EH600 Booster Pump EH600 (m h - ) 4 EH600, 50Hz EM75 EM75 50 Hz 590 m h - 55 ft min - 60 Hz m h - 80 ft min - (ft min - ) EH600, 60Hz EM75 EM (Torr) (mbar) (Pa) EH600 HC IE Asia50 Hz 00 V50 Hz EH600 HC IE EU/CN50 Hz V50 Hz EH600 HC IE Asia60 Hz 00 V60 Hz, 80 V60 Hz EH600 HC IE US60 Hz 0 / 460 V60 Hz EH600 FX IE Asia50 Hz 00 V50 Hz EH600 FX IE EU/CN50 Hz V50 Hz EH600 FX IE Asia60 Hz 00 V60 Hz, 80 V60 Hz EH600 FX IE US60 Hz 0 / 460 V60 Hz EH600C 0/460 V -ph 60 Hz 5 hp EH600T V ph 50 Hz kw EH600T V ph 50 Hz kw A A A A A A A A A A07495 A Please note that Fomblin must be purchased separately with PFPEprepared pumps. Fomblin YVac 6/6 is appropriate Shop online at shop.edwardsvacuum.com Contact our customer service team 5.

8 Performance Curves EH400 Booster Pump EH400 EH400 Performance Curve 50 Hz 440 m h ft min - 60 Hz 4940 m h - 95 ft min - (m h - ) 4 EH400, 50Hz EM75 EH400 HC IE Asia 50 Hz 00 V 50 Hz EH400 HC IE EU/CN 50 Hz V 50 Hz EH400 HC IE Asia 60 Hz 00 V 60 Hz, 80 V 60 Hz EH400 HC IE US 60 Hz 0/460 V 60 Hz EH400 FX IE Asia 50 Hz 00 V 50 Hz EH400 FX IE EU/CN 50 Hz V 50 Hz EH400 FX IE US 60 Hz 0/4 60 V 60 Hz EH400 FX IE Asia 60 Hz 00 V 60 Hz, 80 V 60 Hz EH400C 0/460 V, -ph, 60 Hz, 5 hp EH400T V, -ph, 50 Hz, kw EH400T V, ph, 50 Hz, kw Dimensions EH50 dimensions A A A A A A A A A A09495 A (ft min - ) EH400, 60Hz EM (Torr) (mbar) (Pa) 775 (0.5) 8 (5.4) ISO6 70 (.6) 5 (4.9) (9.09) Ø77 (6.97) 40 (5.5) 9 (.50) x M x 5 (0.59) ISO (7.8) 98 (.86) 8 (0.) EH500 dimensions 86 (.90) ISO0 79 (7.05) (8.74) 96 (7.7) 4 (9.) 6 (4.7) (8.5) Ø80 5 (4.5) 9 (.50) 46 (5.75) M x 5 (0.59) ISO6 (8.74) 98 (.86) 96 (7.7) 4 x M8 x 6 (0.6) 54.

9 EH00 dimensions 8 (40.08) ISO60 77 (.9) 80 (4.96) 4 (.5) Ø98 (7.80) M x 5 (0.59) 0 (9.06) (4.) 0 (8.66) ISO0 (.89) 48 (5.0) 68 (.55) Ø8 (0.7) 60 (.4) EH600 dimensions 55 (6.) 45 (49.0) (.8) 48 (8.94) Ø6 EH400 dimensions M6 x 6 54 (0.6) 75 (.8) (4.) 0 (8.66) 85 (.) 46 (8.5) 6 (9.9) 4 x Ø 70 (4.57) 5 (0.98) 55 (6.) 75 (4.76) ISO0 55 (6.) 45 (56.) 40 (5.8) 48 (8.94) Ø4 46 (8.5) 7 (9.) 75 (4.76) M6 x 6 5 (0.98) 90 (.4) 85 (7.8) 70 (4.57) 85 (.) 4 x Ø 70 (4.57) ISO0 Shop online at shop.edwardsvacuum.com Contact our customer service team 55.

10 Technical Data 56. (swept volume) Units EH50 EH500 EH00 EH600 EH Hz m h - /ft min - /85 505/00 95/75 590/55 440/ Hz m h - /ft min - 75/0 605/5 45/845 / /95 Effective pumping speed with backing pump EM40 m h - /ft min - 40/4 50/06 840/ EM80 m h - /ft min - 74/6 400/6 840/ EM75 m h - /ft min /59 90/ / - EM75 m h - /ft min /7 0/60 900/9 0/85 Pressure differential across pump + 50 Hz mbar/torr 0-80/ / / / / Hz mbar/torr 0-50/ / / / /0-8 Inlet connection ISO6 ISO0 ISO60 ISO60 ISO50 Outlet connection ISO40 ISO6 ISO0 ISO0 ISO0 Rotational speed 50 Hz rpm rpm 60 Hz rpm rpm Operating continuous inlet pressure mbar/torr 0-00 mbar/0-760 Torr Maximum outlet pressure mbar/torr 00 mbar/760 Torr Recommended backing pumps GV80, EM40, EM80, ES0, J GV80, EM80, ES0, ES00, ES00, J, 4J GXS60, GXS50, EM80, EM75, ES00, ES00, ES60, J, 4J, IDX00, IDX00 GXS50, GXS400, EM75, EM75, ES00, ES60, 4J, IDX00, IDX00 GXS450, EM75, ES00, ES60, 4J, IDX00, IDX00 Electrical supply voltage, -ph 50 Hz 00 V/ V 60 Hz 00 V/80 V/0 V/460 V Motor power Hydrocarbon kw/hp./ /4 /5 PFPE kw/hp./ /4 /5 ATEX kw. Explosion proof 4 5 Ambient temperature range Operating C/F 5 to 40/40 to 4 Storage C/F - to 80/4 to 76 Maximum operating humidity RH 90% Cooling method Air cooled Air cooled Water cooled+ Water cooled Water cooled Recommended oil Standard version Ultragrade 0 PFPE version Fomblin YVAC 6/6 Oil capacity Gear case litre Coupling cover litre l Shaft seal reservoir litre Weight kg/lb 75/65 85/87 5/ 9/ /900 + Depends on pressure

11 Service, Spares and Accessories EH Accessories Inlet Mesh Assy ISO6 EH50 Inlet Mesh Assy ISO0 EH500 Inlet Mesh Assy ISO60 EH00/600 Inlet Mesh Assy ISO50 EH400 OLM500 oil level monitor* A A60049 A A A * Not suitable for ATEX boosters Fomblin YVAC6/6 Fomblin YVAC6/6 kg H kg H0600 Ultragrade Oil Ultragrade 0 Oil ( litre) H405 Ultragrade 0 Oil ( x litre) H40 Ultragrade 0 Oil (4 litre) H40 Ultragrade 0 Oil (4 x 4 litre) H40 Service kits Spares Kit Con C&O EH/QMB50/500A A0585 Spares Kit Module EH/QMB50/500A A0580 Spares Kit Shim EH/QMB50/500A A0585 Spares Kit Con C&O EH/QMB00 A05585 Spares Kit Module EH/QMB00 A05580 Spares Kit Con C&O EH/QMB6/400 A07585 Spares Kit Module EH/QMB6/400 A07580 Spares Kit Shim EH/QMB/6/400 A07585 Spares Kit Con C&O EH/QMB6/400 A07585 Spares Kit Module EH/QMB6/400 A07580 Spares Kit Shim EH/QMB/6/400 A07585 Shop online at shop.edwardsvacuum.com Contact our customer service team 57.

12 pxh MECHANICAL BOOSTER PUMPS THE INTELLIGENT CHOICE The pxh pumps represent the new generation of large mechanical boosters providing high pumping capacity with reduced footprint. Available in sizes from 6965 to 858 m h - displacement, are packaged as separate pumps with inverter driven controls. Designed to withstand harsh processes, they have a field proven reliability from the large installed base. pxh can be easily integrated with GXS, the last generation Edwards Industrial on board controlled dry pumps, into a high pumping speed dry pumping system. Features and Benefits Inverter driven control for Plug and Pump, flexible operation and automated control of your process. Low installation costs. Consistent output. Designed to withstand harsh industrial applications. Robust and reliable. Applications R&D/others Space simulation chambers evacuation. Load lock evacuation. Oil treatment. Vacuum packaging. Drying Transformer drying. Transformer vapour phase drying. Pipeline drying. Capacitor drying. Li Ion battery drying. Coating Glass coating. Roll/web coating. Hard coating/cvd. Surface activation. Plasma spray. Steel Degassing VD vacuum degassing. VOD vacuum oxygen decarburising. Metallurgy VIM vacuum induction melting. VAR vacuum arc remelting. MIM/vacuum sintering. PIC (investment casting). Electroslag remelting. Carbon vapour impregnation. 58.

13 Performance Curves pxh Booster Pump pxh Dimensions pxh dimensions H W L pxh V pxh V pxh V pxh V ACG AC ACH AC pxh4500 pxh6000 Length mm Width mm Height mm 5 5 Technical data Units pxh4500 pxh6000 m h System inlet connection ISO00 ISO50 System outlet connection ISO60 NW60 Noise db (A) 66 Mass kg Cooling water Cooling water connection ⅜ BSP quick connect Maximum supply pressure barg 6.9 Supply temperature C -5 Minimum pressure differential barg.5 Typical water cooling flow rate lmin - 6 Electrical supply type 00-0 V 50/60 Hz/ V 50/60 Hz Han K 4/4 Motor rating kw (hp) 7.5 (.0) Power at ultimate pressure ( kw) kw (hp).9 (.5) Shop online at shop.edwardsvacuum.com Contact our customer service team 59.

14 STOKES 6 SERIES MECHANICAL BOOSTER PUMPS THE INTELLIGENT CHOICE Stokes 6 series mechanical boosters are designed to be used in conjunction with rotary piston, dry vacuum, rotary vane, liquid ring or on the inlet of the backing pump to create a compact integrated package to increase pumping speed at working pressures and reduce the pump down time significantly. The 6 Series are available in bare-shaft or direct drive motor variants, horizontal or vertical gas flow and with a single mechanical seal or a Process Isolation variant with 5 mechanical seals for optimum protection from dust and particulate contamination in arduous applications. Also By-pass variants are available which eliminate the need for pressure switches making the 6 Series one of the most versatile and flexible boosters. Features and Benefits Robust Over 80 years of time tested proven performance with experienced service and technical support. Increased lifetime, reliability and simple to use large diameter shafts, ring feeder keyless gear locking system and dynamically balanced impellers. Reliable Easy to maintain single mechanical seal. Increased productivity 5 seal design for optimal process protection. Versatile Configured for your needs bare shaft or direct drive, rpm. Vertical or horizontal gas flow orientation with by-pass versions available. Simple to service simple maintenance requirements result in long term reliability. Applications Automotive. Chemical processing. Heat treatment. Leak detection. Metallurgy. PET processing. Pharmaceuticals. Thermal processing. Transformer drying and cable fluid conditioning. Vacuum coating. Vacuum melting. Many other industrial applications. Pump Range Stokes B

15 Performance Curves Stokes 607 Stokes 607 Series Booster Stokes 607 Series Process Isolation Booster 800 rpm 40 m h - 6 cfm 800 rpm 40 m h - 6 cfm 000 rpm 7 m h - 0 cfm 000 rpm 7 m h - 0 cfm 600 rpm 080 m h - 4 cfm 600 rpm 080 m h - 4 cfm * Note: H = Horizontal Gas Flow V = Vertical Gas Flow * Note: H = Horizontal Gas Flow V = Vertical Gas Flow 607 MHR CE, IE 7.5 kw, EU/US/CH 50/60Hz v 50Hz /0/460v 60Hz (000/600 rpm) 607 MHR CE, IE 7.5 kw, Asia 50/60Hz 00v 50/60Hz 80v 60Hz (000/600 rpm) 607 MVR CE, IE 7.5 kw, EU/US/CH 50/60Hz v 50Hz /0/460v 60Hz (000/600 rpm) 607 MHR CE, IE 7.5 kw, Asia 50/60Hz 00v 50/60Hz 80v 60Hz (000/600 rpm) MHR MHR MVR MVR MHR (bare shaft) Horizontal flow MHR 607 MHR (bare shaft) Horizontal flow MHR (pfpe pre.) 607 MVR (bare shaft) Vertical flow MVR 607 MVR (bare shaft) Vertical flow (pfpe prep.) MVR 607 MHR (bare shaft) Horizontal flow MHR 607 MVR (bare shaft) Vertical flow MVR 607 MH0, 0 hp, 0/460 V, -ph, MH rpm 607 MV05, 5 hp, 0/460 V, -ph, MV rpm 607 MV0, 0 hp, 0/460 V, -ph, MV rpm 607 MH05, 5 hp, 0/460 V, -ph, MH rpm 607 5HR CE, IE 7.5 kw, EU/US/CH 50/60Hz HR v 50Hz /0/460v 60Hz (000/600 rpm) 607 5HR CE, IE 7.5 kw, Asia 50/60Hz HR94 00v 50/60Hz 80v 60Hz (000/600 rpm) 607 5VR CE, IE 7.5 kw, EU/US/CH 50/60Hz VR v 50Hz /0/460v 60Hz (000/600 rpm) 607 5HR CE, IE 7.5 kw, Asia 50/60Hz VR94 00v 50/60Hz 80v 60Hz (000/600 rpm) 607 5HR (bare shaft) Horizontal flow HR 607 5VR (bare shaft) Vertical flow VR 607 5H, hp, 0/460 V, -ph, H H_ rpm 607 5V, hp, 0/460 V, -ph, V rpm *Note: 607, 65 6B and 6 vertical gas flow boosters do not include mounting feet. 6 Mounting foot kit Shop online at shop.edwardsvacuum.com Contact our customer service team 6.

16 Performance Curves Stokes 65 Series Booster Stokes 65 Stokes 65 Series Process Isolation Booster V Belt 750 rpm 800 rpm 000 rpm 600 rpm 75 m h cfm m h - 00 cfm 685 m h - 70 cfm 440 m h cfm V Belt 750 rpm 000 rpm 600 rpm 75 m h cfm 685 m h - 70 cfm 440 m h cfm * Note: H = Horizontal Gas Flow V = Vertical Gas Flow * Note: H = Horizontal Gas Flow V = Vertical Gas Flow 65 MHR CE, IE kw, EU/US/CH 50/60Hz 90065MHR v 50Hz /0/460v 60Hz (000/600 rpm) 65 MHR CE, IE kw, Asia 50/60Hz 90065MHR94 00v 50/60Hz 80v 60Hz (000/600 rpm) 65 MVR CE, IE kw, EU/US/CH 50/60Hz 90065MVR v 50Hz /0/460v 60Hz (000/600 rpm) 65 MVR CE, IE kw, Asia 50/60Hz 90065MVR94 00v 50/60Hz 80v 60Hz (000/600 rpm) 65 MHR (bare shaft) Horizontal flow MHR 65 MHR (bare shaft) Horizontal flow (pfpe pre.) 90065MHR 65 MVR (bare shaft) Vertical flow MVR 65 MVR (bare shaft) Vertical flow (pfpe prep.) 90065MVR 65 MH, hp, 0/460 V, -ph, MH rpm 65 MH5, 5 hp, 0/460 V, -ph, MH rpm 65 MV, hp, 0/460 V, -ph, MV rpm 65 MV5, 5 hp, 0/460 V, -ph, MV rpm 65 5HR CE, IE kw, EU/US/CH 50/60Hz HR v 50Hz /0/460v 60Hz (000/600 rpm) 65 5HR CE, IE kw, Asia 50/60Hz HR94 00v 50/60Hz 80v 60Hz (000/600 rpm) 65 5VR CE, IE kw, EU/US/CH 50/60Hz VR v 50Hz /0/460v 60Hz(000/600 rpm) 65 5VR CE, IE kw, Asia 50/60Hz VR94 00v 50/60Hz 80v 60Hz (000/600 rpm) 65 5HR (bare shaft) Horizontal flow HR 65 5VR (bare shaft) Vertical flow VR 65 5H5, 5 hp, 0/460 V, -ph, MH rpm 65 5V5, 5 hp, 0/460 V, -ph, V rpm For performance curves of the various Stokes 6 booster coupled with a backing pump please consult Edwards *Note: 607, 65 6B and 6 vertical gas flow boosters do not include mounting feet. 6 Mounting foot kit

17 Stokes 6B Stokes 6B Series By-Pass Booster Stokes 6B Series Process Isolation Booster V Belt 750 rpm 75 m h cfm V Belt 750 rpm 75 m h cfm 800 rpm m h - 00 cfm 000 rpm 685 m h - 70 cfm 000 rpm 685 m h - 70 cfm 600 rpm 440 m h cfm 600 rpm 440 m h cfm 6B MHR CE, IE 8.5 kw, EU/US/CH 50/60Hz v 50Hz /0/460v 60Hz (000/600 rpm) 6B MHR CE, IE 8.5 kw, Asia 50/60Hz 00v 50/60Hz 80v 60Hz (000/600 rpm) 6B MVR CE, IE 8.5 kw, EU/US/CH 50/60Hz v 50Hz /0/460v 60Hz (000/600 rpm) 6B MVR CE, IE 8.5 kw, Asia 50/60Hz 00v 50/60Hz 80v 60Hz (000/600 rpm) 6B MHR (bare shaft) Horizontal flow 9006BMHR BMHR BMVR BMVR B-MHR 6B 5HR CE, IE 8.5 kw, EU/US/CH 50/60Hz v 50Hz /0/460v 60Hz (000/600 rpm) 6B MHR CE, IE 8.5 kw, Asia 50/60Hz 00v 50/60Hz 80v 60Hz (000/600 rpm) 6B 5VR CE, IE 8.5 kw, EU/US/CH 50/60Hz v 50Hz /0/460v 60Hz (000/600 rpm) 6B 5VR CE, IE 8.5 kw, Asia 50/60Hz 00v 50/60Hz 80v 60Hz (000/600 rpm) 6B 5HR (bare shaft) Horizontal flow 9006B5HR B5HR B5VR B5VR B-5HR 6B MVR (bare shaft) Vertical flow 900-6B-MVR 6B 5VR (bare shaft) Vertical flow 900-6B-5VR 6B MH, hp, 0/460 V, -ph, rpm 6B MH5, 5 hp, 0/460 V, -ph, rpm 6B MV, hp, 0/460 V, -ph, rpm 900-6B-MH 900-6B-MH B-MV 6B 5H5, 5 hp, 0/460 V, -ph, rpm 6B 5V5, 5 hp, 0/460 V, -ph, rpm 900-6B-5H 900-6B-5V5 6B MV5, 5 hp, 0/460 V, -ph, rpm 900-6B-MV5 *Note: 607, 65 6B and 6 vertical gas flow boosters do not include mounting feet. 6 Mounting foot kit Shop online at shop.edwardsvacuum.com Contact our customer service team 6.

18 Performance Curves Stokes 6 Stokes 6 Series Booster Stokes 6 Series Process Isolation Booster V Belt 750 rpm 750 m h cfm V Belt 750 rpm 750 m h cfm 000 rpm 555 m h - 54 cfm 000 rpm 555 m h - 54 cfm 600 rpm 658 m h cfm 600 rpm 658 m h cfm 6 MHR CE, IE 8.5 kw, EU/US/CH 50/60Hz 9006MHR v 50Hz /0/460v 60Hz (000/600 rpm) 6 MHR CE, IE 8.5 kw, Asia 50/60Hz 9006MHR94 00v 50/60Hz 80v 60Hz (000/600 rpm) 6 MVR CE, IE 8.5 kw, EU/US/CH 50/60Hz 9006MVR v 50Hz /0/460v 60Hz(000/600 rpm) 6 MVR CE, IE 8.5 kw, Asia 50/60Hz 9006MVR94 00v 50/60Hz 80v 60Hz (000/600 rpm) 6 MHR (bare shaft) Horizontal flow MHR 6 MVR (bare shaft) Vertical flow MVR 6 MH5, 5 hp, 0/460 V, -ph, MH rpm 6 MV5, 5 hp, 0/460 V, -ph, MV rpm 6 5HR CE, IE 8.5 kw, EU/US/CH 50/60Hz 90065HR v 50Hz /0/460v 60Hz (000/600 rpm) 6 5HR CE, IE 8.5 kw, Asia 50/60Hz 90065HR94 00v 50/60Hz 80v 60Hz (000/600 rpm) 6 5VR CE, IE 8.5 kw, EU/US/CH 50/60Hz 90065VR v 50Hz /0/460v 60Hz (000/600 rpm) 6 5VR CE, IE 8.5 kw, Asia 50/60Hz 90065VR94 00v 50/60Hz 80v 60Hz (000/600 rpm) 6 5HR (bare shaft) Horizontal flow HR 6 MVR (bare shaft) Vertical flow VR 6 5H5, 5 hp, 0/460 V, -ph, H rpm 6 5V5, 5 hp, 0/460 V, -ph, V rpm * Note: 607, 65 6B and 6 vertical gas flow boosters do not include mounting feet. 6 Mounting foot kit For performance curves of the various Stokes 6 booster coupled with a backing pump please consult Edwards 64.

19 Dimensions Stokes 607 dimensions Ø4 (Ø9.49) A 406 (5.98) 54 (.8) 6 (8.50) 8 (.7) TYP. 0 (7.99) 8 (.5) LC 9 (.50) 6 (0.6) 4 (4.49) 80 (4.5) (5 HP) Ø4 (9.49) 4 x 9 (0.75) B 5 (5.) 965 (7.99) 76 (50.4) (0 HP) 74 (.9) 84 (46.6) (7.5 KW) A 50 (9.76) 4 (7.00) 5 (9.88) LC 75 (6.89) 49 (.74) 94 (5.5) 0 (8.00) 406 (5.98) 4 x 9 (0.75) B LC 54 (.00) 4 (.76) 80 (4.5) (5 HP) 7 (5.00) 76 (50.4) (0 HP) 965 (7.99) 84 (46.6) (7.5 KW) A B 6 pipe flange connection (79 mm) OD x (5 mm) ID 8 x ¾ - NC-B x ⅛ (9 mm) holes straddle both CL both flanges DIA. Holes STD Inlet Optional feet Stokes 65 dimensions A Ø98 (.74) 406 (5.98) 0 (7.99) A Ø98 (.74) LC LC 54 (.8) 6 (8.50) LC 9 (.50) 4 (7.00) 0 (7.99) 406 (5.98) 8 (.7) 8 (.5) 6 (0.6) 4 (4.49) 4 x 9 (0.75) B 74 (.9) 7 (54.0) 9 (54.76) 5 (9.5) 59 (0.8) 55 (59.65) (.50) (6.89) (.76) 94 (5.5) 50 (9.76) 7 (54.0) ( HP) 7 (8.94) 54 9 (54.76) 4 x 9 (0.75) B 55 (59.65) A B 8 pipe flange connection ½ (4 mm) OD x 8 (0 mm) ID 8 x ¾ - NC-B x ⅛ (9 mm) holes straddle both CL both flanges DIA. Holes STD Inlet Optional feet Product length may vary due to motor variant, contact Edwards for specific size for specific regions and voltage variants. Shop online at shop.edwardsvacuum.com Contact our customer service team 65.

20 Stokes 6B dimensions 406 (5.99) A Ø98 (.75) 0 (7.99) A LC (9.75) 6 (8.50) CL 9 (.50) 4 (7.00) 0 (7.99) 406 (5.98) 8 (.7) 9 (9.00) 8 (.5) 6 (0.6) 4 (4.49) 4 x 9 (0.75) B 7 (54.0) 74 (.9) 54 (60.00) 5 (9.5) 470 (8.50) 58 (0.79) 5 (59.88) 8 75 (.7) (6.89) 94 (5.5) 4 x 9 (0.75) B 70 (.76) 7 (54.0) 54 (60.00) 7 (8.94) 54 (0.6) 5 (59.88) A 8 pipe flange connection ½ (4 mm) OD x 8 (0 mm) ID 8 x /4 - NC-B x ⅛ (9 mm) holes straddle both CL both flanges B DIA. Holes STD Inlet Optional feet Stokes 6 dimensions Ø98 (.74) A 48 (7.4) 9 (8.6) 00 Ø98 (.74) A 50 5 (9.88) 648 (5.5) LC 54 (.8) 6 (8.50) 8 (.7) 8 (9.00) 8 (.5) CL 9 (.50) 6 (0.6) 4 (4.49) 4 x 9 (0.75) B 74 (.9) 70 (67.00) 696 (66.77) 4 (.76) 706 (7.80) 47 (8.6) (6.89) (.50) 94 (5.5) 9 (8.6) 48 (7.4) 4 x 9 (0.75) B 74 (.9) 70 (67.00) 7 (7.99) 696 (66.77) 4 (.76) A 8 pipe flange connection ½ (4 mm) OD x 8 (0 mm) ID 8 x ¾ - NC-B x ⅛ (9 mm) holes straddle both CL both flanges B DIA. Holes. STD Inlet. Optional feet 66. Product length may vary due to motor variant, contact Edwards for specific size for specific regions and voltage variants.

21 Technical Data Units PIB PIB V belt 750 rpm m h - /ft min - 589/95 589/95 75/000 75/ rpm m h - /ft min - 40/6 - / rpm m h - /ft min - 7/0 7/0 685/70 685/ rpm m h - /ft min - 080/4 080/4 440 / /600 Inlet/outlet flanges ASA/ANSI flange 6 8 Motor power hp ( kw) 5/0 (7.5) (7.5) () 5 () Cooling method Air cooled - Air cooled - By-pass available Cooling water l min - /gal min / / - Oil capacity (horizontal flow) litre/gal.9/0.5.9/0.5.9/0.5.9/0.5 Oil capacity litre/gal 4./. (vertical flow) Max pressure differential mbar/torr 506/80 Max temp rise C/F 5/75 Max discharge temp C/F 9/75 Weight bare shaft kg/lbs 5/475 4/55 Weight TEFC direct drive kg/lbs 408/900 45/760 90/860 97/875 Recommended oil V- Lube H Units 6B 6B PIB 6 6 PIB V belt 750 rpm m h - /ft min - 75/000 75/000 50/000 50/ rpm m h - /ft min - / / rpm m h - /ft min - 685/70 685/70 555/50 660/ rpm m h - /ft min - 440/ /900 Inlet/outlet flanges ASA/ANSI flange 8 Motor power hp ( kw) /5 (8.5) 5 (8.5) Cooling method Air cooled Air cooled By-pass available Yes - - Cooling water l min - /gal min / /- Oil capacity litre/gal.9/0.5.9/4..9/0.5.9/4. (horizontal flow) Oil capacity litre/gal 4./. 4./8.8 4./. 4./8.8 (vertical flow) Max pressure differential mbar/torr /50 /50 Max temp rise C/F 5/75 5/7 /50 Max discharge temp C/F 9/75 77/50 Weight bare shaft kg/lbs 84/65 5/740 Weight TEFC direct drive kg/lbs 50/70 58/85 67/60 65/70 Recommended oil - V-Lube H Shop online at shop.edwardsvacuum.com Contact our customer service team 67.

22 Service, Spares and Accessories Spares 6 Inch MSeal seal kit Inch MSeal maintenance kit * Process Isolation 6XX-5HR kit Vertical gas flow mounting feet * This kit is the same as kit , but with bearings. This kit is for process isolation booster pumps, and must be used in conjunction with Kit or Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. 68.

23 HV8000 MECHANICAL BOOSTER PUMP MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE The Edwards HV8000 high vacuum mechanical booster has been developed to provide high reliability operation in aggressive environments. With a nominal pumping speed of 700 m h (44 ft min - ) at 50 Hz, it is ideal for large industrial and chemical applications. IE energy efficiency phase motors are now fitted to our standard motor pumps Features and Benefits Applications Performance Stable process for consistent output suitable for continuous operation over wide pressure ranges on heavy duty large scale applications. Reliability No unplanned downtime high performance water cooled mechanical shaft seal, large diameter shaft and large helical gears. Adaptability Easy integration and safe optional water cooled exhaust gas after cooler, shaft seal safety purge, temperature monitoring and VFD available. Flexibility Configured to your needs can be supplied with standard motor or without motor to allow a local motor to be fitted. Horizontal or vertical flow to suit application and system design. Steel degassing. Metallurgy. Coating. Process engineering industries. Pump Range HV -- HV8000 Shop online at shop.edwardsvacuum.com Contact our customer service team 69.

24 Performance Curves HV8000 booster pump HV8000 HV8000 VF IE Asia 50/60 Hz 00 V 50/60 Hz 80 V 60 Hz HV8000 VF IE EU/USA 50/60 Hz 8.5 kw V 50 Hz 0/460 V 60 Hz HV8000 VF IE Asia 50/60 Hz 80 V 60 Hz HV8000 VF IE EU/USA 50/60 Hz 8.5 kw V 50 Hz HV8000IND VF bare shaft HV8000IND HF bare shaft A94 A940 A494 A4940 A985 A985 Dimensions HV8000 dimensions Horizontal Flow Vertical Flow HV8000 pumps tend to be used in large pumping systems rather than simple combinations. 70.

25 Technical Data (swept volume) Units HV Hz m h - /ft min - 700/44 60 Hz m h - /ft min /5089 Max rotation speed 50 Hz rpm Hz rpm 600 Max pressure differential 50 Hz mbar/torr 90/4 60 Hz mbar/torr 0/90 Ultimate (depends on backing set) 50 Hz mbar/torr.5 x -4 / x Hz mbar/torr x -4 /.5 x -4 Standard motor power kw/hp 8.5/5 Standard backing set speed m h - /ft min - 600/50 requirements Recommended oil Mobil SHC 69 Max oil capacity litre/us gal 8./.8 (vertical gas flow config) Inlet/outlet connection class 50 ASME B6.5 Inlet/outlet cooling water Rp ½ ISO 7- (½ BSP) connection End cover purge gas inlet Rp ⅜ ISO 7- (⅜ BSP) Max cooling water supply pressure bar/psi 4/58 Max cooling water supply temp C/F 5/95 Cooling water flow rate lmin - /US gal min - 5/.96 Noise level 8 db(a) Weight (without motor) kg/lb 570/57 Weight (with standard motor) kg/lb 670/474 Shop online at shop.edwardsvacuum.com Contact our customer service team 7.

26 Service, Spares and Accessories HV Kit HV8000 VF motor mounting kit IEC HV8000 VF motor mounting kit NEMA HV8000 HF motor mounting kit IEC HV8000 HF motor mounting kit NEMA After cooler kit HV8000 Gear Box Oil Gear Box Oil 4 Ltr Mobil SHC 69 Spares HV8000 Set of O-Rings spare HV8000 mech seal kit spare HV8000 mech seal + sleeve kit spare HV8000 gear set spare HV8000 bearings kit spare HV8000 rotors kit spare HV8000 oil reservoir spare HV8000 sight glass spare A0 A06 A00 A006 A H0 A80 A80 A80 A804 A805 A806 A807 A808 Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. 7.

27 HV0000/40000 MECHANICAL BOOSTER PUMP MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE HV0000/40000 is a high capacity mechanical booster used in the manufacture and assembly of large industrial vacuum systems. These pumps are backed by Edwards dry pumps or mechanical booster pumps. This range of high capacity booster pumps is designed to operate reliably for long periods with no need for maintenance. The HV pumps can be fitted with an inverter to allow them to be started at atmospheric pressure, at the same time as the dry pumps. Features and Benefits Water cooled oil boxes and after cooler. Vertical flow, direct drive. Control with inverter or interlock with a pressure switch input. Very reliable with little maintenance. Pump Range HV -- HV HV40000 Applications Steel degassing. Metallurgy. Coating. Process engineering industries. Shop online at shop.edwardsvacuum.com Contact our customer service team 7.

28 Performance Curves HV0000/40000 Booster Pump HV0000 HV40000 (supply) 50 Hz 0000 m h - (7660 ft min - ) 60 Hz 6000 m h - (00 ft min - ) (supply) 50 Hz m h - (960 ft min - ) 60 Hz m h - (540 ft min - ) HV0000 Vertical Flow Vacuum Booster Pump On request HV40000 Vertical Flow Vacuum Booster Pump On request Dimensions HV0000/40000 dimensions Unit HV0000 HV0000 HV0000 HV0000 HV40000 HV40000 HV40000 HV40000 Motor size 00 l (0 kw) 50 m (55 kw) A (77.4) B (4.9) (77.4) (4.9) 4 td (40 hp) (77.4) (4.9) 65 td (75 hp) (77.4) (4.9) 00 l (0 kw) 50 m (55 kw) 099. (8.65) 8.6 (44.04) 099. (8.65) 8.6 (44.04) 4 td (40 hp) 099. (8.65) 8.6 (44.04) 65 td (75 hp) 099. (8.65) 8.6 (44.04) C 7.9 (8.58) (9.7) (9.7) (9.7) 7.9 (8.58) (9.7) (9.7) (9.7) D Shaft Ø E 9.76 (0.78) (.9) (.9) (.9) 9.76 (0.78) (.9) (.9) (.9) F 0.4 (0.80).4 (0.84) 0.94 (0.8) 4.44 (0.57) 0.4 (0.80).4 (0.84) 0.94 (0.8) 4.44 (0.57) Motor face to back of coupler. End of shaft to front of coupler. 74.

29 Technical Data Units HV0000 HV Hz m h - /ft min /7660 / Hz m h - /ft min / /540 Maximum pressure differential 50 Hz mbar Hz mbar 9 4 Recommended backing pumps IDX00 and HV8000 IDX00 and HV8000 Maximum motor power kw/hp 55/75 55/75 Ambient operating temperature C/ F -0 to 40/-4 to 40-0 to 40/-4 to 40 Cooling water supply Maximum supply temperature C/ F 0/85 0/85 Maximum supply pressure bar/psi 5/7 5/7 Maximum operating humidity 90% RH 90% RH Weight( without motor) kg/lb 07/ /7495 Shop online at shop.edwardsvacuum.com Contact our customer service team 75.

30 Service, Spares and Accessories HV0000/40000 Accessories For HV0000/40000 accessories and spares please refer to the manual on our website Service Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required: Model and item number of your equipment. Serial number (if any). Item number and description of the part. 76.