Vacuum measurement and control units

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1 Vacuum analysis and measurement Vacuum measurement and control units Vacuum measurement and control units Page 450

2 Page Vacuum measurement and control units Selection aid and analysis equipment DigiLine Digital Piezo CPT Digital Piezo / Pirani RPT Digital Pirani PPT Digital Pirani / Bayard-Alpert HPT Digital Pirani / Cold cathode MPT Controllers DPG Power supply units without display DPS Accessoires DigiLine AvtiveLine Active Piezo s APR Active capacitive s CMR Active capacitive s CMR Active capacitive s CCR Active capacitive s CCR Active Pirani / capacitive s PCR Active Pirani s TPR Active cold cathode s IKR Active Pirani / cold cathode PKR Active hot cathode s IMR Active Pirani / Bayard-Alpert PBR Pirani manual measurement unit TPG Controller TPG SingleGauge measurement equipment DualGauge measurement equipment MaxiGauge TPG Controller ModulLine Pirani gauge heads TPR Cold cathode gauge heads IKR Accessoires board Interface and relay board Basic unit TPG 300 Complete units TPG Control Units Page 451

3 Vacuum analysis and measurement Vacuum measurement and control units Selection aid range Application Recommended Possible max. (mbar) min. (mbar) Vacuum furnaces Sputterring Evaporation Chambers Reactive Processes Loadlock Acceleratorr Transmitter/Gauges DigiLine Digital Piezo Transmitter Digital Pirani Transmitter Digital Piezo/Pirani Transmitter Digital Pirani/Kaltkathode Transmitter Digital Pirani/Bayard-Alpert Transmitter ActiveLine Active Piezo Transmitter Active Capacitance Transmitter Temperature compensated Temperature regulated Active Pirani Transmitter Active Pirani / Capacitance Transmitter Active Cold Cathode Transmitter Active Cold Cathode Transmitter Active Hot Cathode Transmitter Active Pirani Bayard-Alpert Transmitter ModulLine Pirani pressure gauge Cold Cathode pressure gauge CPT 100 PPT 100 RPT 100 MPT 100 HPT 100 APR 250 APR 260 APR 262 APR 265 APR 266 APR 267 CMR 361 CMR 362 CMR 363 CMR 364 CMR 365 CMR 271 CMR 272 CMR 273 CMR 274 CMR 275 TPR 280 TPR 281 PCR 260 IKR 251 IKR 261 IKR 270 PKR 251 PKR 261 IMR 265 PBR 260 TPR 010 TPR 017 TPR 018 IKR 050 IKR 060 IKR 070 2,000 1,000 1,200 1,000 1,000 1,100 1,100 2,200 5,500 11,000 55, , ,000 1,000 1, ,000 1,000 1,000 1,000 1,000 1,000 1, , Page 452

4 and analysis equipment Many vacuum applications operate only in a given pressure range. Analog and digital vacuum and total pressure measurement equipment is used to determine and regulate the total pressure in a vacuum system. Pfeiffer Vacuum offers three different series of equipment for total pressure measurement. The criteria used in selecting the sensor will depend upon the differing conditions: Pressure range to be detected Gas composition (inert or corrosive) Required accuracy and repeatability Ambient conditions, radioactivity Each series, in its own right, covers the entire pressure range. This means that Pfeiffer Vacuum supplies you with the best solution for your total pressure measurement task, matched to the pump technology in question. Series at a glance DigiLine Total pressure measurement with digital signal output ActiveLine Total pressure measurement with analog signal output ModulLine Total pressure measurement in radioactive environments Control Units Total pressure measurement with an HPT 100 on a coating system Employment of an HPT 100 on a calibration pumping station Integration of an HPT 100 into a plant control system via Profibus Page 453

5 Vacuum analysis and measurement Vacuum measurement and control units DigiLine Innovative Vacuum! Digital Transmitters. What is DigiLine? The sensors in the DigiLine series are supplied with a 24 V direct current. The measured values are output via a digital RS-232 or RS-485 interface. The DPG 101 power supply can be used to operate individual s (combinations of sensor and electronics) and display their measured values. The DPG 109 can supply up to nine s. Transmitter signals can also be presented and processed directly on a PC or PLC with the aid of DokuStar Plus software. Converters can be used to convert the RS-485 signal to a fieldbus signal (Profibus-DP or DeviceNet), enabling it to be utilized in plant control systems with fieldbus control, which affords simple and cost-effective cabling. Page 454

6 Profibus-DP Fieldbus solution Bus system for a uniform system control concept. Transmitter with attached Profibus converter. For up to 126 units. Further actuators, e.g. turbopump, valves Programmable logic control (PLC) RS-485 Customer-specific solution Data is input directly into a PLC or a PC (software DokuStar Plus). Up to 32 units (up to 15 s can be addressed). 24 V PLC or PC Combination solution Operation of up to 9 s with display unit DPG 109. Very simple calibration through the DPG 109. Data can be input directly to the PLC or a PC. RS-485 RS-232 PLC or PC Control Units Alternative: Power supply without a display through the power supply DPS 109. Single solution Operation of one with the display unit DPG 101. Very simple calibration through the DPG 101. Alternatively, the data can be input directly to a PC using the power supply DPS 101. RS-232 PC with DPS 101 power supply and DokuStar software DigiLine application concepts Page 455

7 Vacuum analysis and measurement Vacuum measurement and control units Advantages at a glance Perfect for the industry Reliable data transfer through digital signals Serial interface RS-232/485 selectable Components freely combinable Data can be directly input to a PC With Profibus converter for integration in system controllers Suited for heavy duty industrial applications Directly transferable values, i. e., no complex characteristics are necessary Very easy to calibrate Connecting up all components without problems Low wiring complexity Applications Coating systems Vacuum furnaces Accelerators Mass spectrometers Semiconductor production Leak detection systems HPT 100 (Pirani / Bayard-Alpert) and CPT 100 (Piezo) on a vacuum furnace for producing sintered metals RPT 100 (Piezo / Pirani) replaces in a helium leak detection unit two conventionalgauge heads. Data transfer through Profibus module Page 456

8 Notes Control Units Page 457

9 Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Digital Piezo CPT 100 Piezo ( mbar) DigiLine TM Accurate Rugged For industrial applications G = Cylindrical pipe thread Dimensions A A Ø B Ø B C C D D DN 16 ISO-KF G 1/4" DN 16 ISO-KF G 1/4" A 120 mm 120 mm B 30 mm G 1/4" C 35 mm 35 mm D 60 mm 60 mm Page Page

10 Technical data Digital Piezo CPT 100, DN 16 ISO-KF Digital Piezo CPT 100, G1/4" Flange (in) DN 16 ISO-KF G 1/4" Seal FPM FPM Pressure max. 4 bar 4 bar Feedthrough Glass Glass Flange DN 16 ISO-KF G 1/4" Accuracy: % of measurement mbar: +/- 0.5 % F.S. >1200 mbar: +/-2 % F.S mbar: +/- 0.5 % F.S. >1200 mbar: +/-2 % F.S. Weight 0.2 kg 0.2 kg Materials in contact with media Ceramic, Stainless steel, FPM Ceramic, Stainless steel, FPM range max mbar 2000 mbar range min. 1 mbar 1 mbar Sensor cable length max m 1000 m Method of measurement Piezo Piezo Measuring cycle 40 ms 40 ms Interface: Connection Digital RS-232 / RS-485, 9-pin, Sub-D-socket Digital RS-232 / RS-485, 9-pin, Sub-D-socket Protection category IP 40 / IP 54 IP 40 / IP 54 Temperature: Bakeout 70 C 70 C Temperature: Operating C C Temperature: Storage C C Supply: Voltage 24 V DC 24 V DC Supply: Power consumption max. 0.5 W 0.5 W Order number Digital Piezo CPT 100 PT R PT R Mess- und Steuergeräte controll units Accessories TIC 251, Profibus converter for CPT 100, PPT 100, PT PT RPT 100 TIC 002, converter for DigiLine TM Transmitter PM T PM T Centering ring with poral filter, FPM/stainless steel, PF T DN 16 ISO-KF Fine filter for TPR 265, pore size mm PT T Centering ring, with fine filter, DN 16 ISO-KF PT T Page Page

11 Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Digital Piezo/Pirani RPT 100 Piezo/Pirani combination ( mbar) DigiLine TM range from mbar to 1200 mbar For industrial applications with Profibus interface Highly accurate throughout the entire measurement range Dimensions A A Ø B Ø B C C D D DN 16 ISO-KF DN 16 CF DN 16 ISO-KF DN 16 CF A 120 mm 132 mm B 30 mm 34 mm C 35 mm 35 mm D 60 mm 60 mm Page Page

12 Technical data Digital Piezo/ Pirani RPT 100, DN 16 ISO-KF Digital Piezo/ Pirani RPT 100, DN 16 CF Flange (in) DN 16 ISO-KF DN 16 CF Seal Metal Metal Pressure max. 4 bar 4 bar Feedthrough Glass Glass Flange DN 16 ISO-KF DN 16 CF Accuracy: % of measurement mbar: +/- 0.5 % F.S mbar: +/-5 % mbar: +/- 0.5 % F.S mbar: +/-5 % Weight 0.2 kg 0.2 kg Materials in contact with media Tungsten, Gold, Silicon Tungsten, Gold, Silicon range max mbar 1200 mbar range min mbar mbar Sensor cable length max m 1000 m Method of measurement Piezo / Pirani Piezo / Pirani Measuring cycle 40 ms 40 ms Interface: Connection Digital RS-232 / RS-485, 9-pin, Sub-D-socket Digital RS-232 / RS-485, 9-pin, Sub-D-socket Protection category IP 40 / IP 54 IP 40 / IP 54 Temperature: Bakeout 70 C 70 C Temperature: Operating C C Temperature: Storage C C Supply: Voltage 24 V DC 24 V DC Supply: Power consumption max. 2 W 2 W Repeatability: % of measurement mbar: +/- 0.5 % F.S mbar: +/- 1 % mbar: +/- 0.5 % F.S mbar: +/- 1 % Mess- und Steuergeräte controll units Order number Digital Piezo/Pirani RPT 100 PT R PT R Accessories TIC 251, Profibus converter for CPT 100, PPT 100, PT PT RPT 100 TIC 002, converter for DigiLine TM Transmitter PM T PM T Centering ring with poral filter, FPM/stainless steel, PF T DN 16 ISO-KF Centering ring, with fine filter, DN 16 ISO-KF PT T Page Page

13 Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Digital Pirani PPT 100 Pirani ( mbar) DigiLine TM range from mbar to 1000 mbar Extremely accurate For industrial applications with Profibus interface Dimensions A A Ø B Ø B C C D D DN 16 ISO-KF DN 16 CF DN 16 ISO-KF DN 16 CF A 120 mm 132 mm B 30 mm 34 mm C 35 mm 35 mm D 60 mm 60 mm Page Page

14 Technical data Digital Pirani PPT 100, DN 16 ISO-KF Digital Pirani PPT 100, DN 16 CF Flange (in) DN 16 ISO-KF DN 16 CF Seal Metal Metal Pressure max. 4 bar 4 bar Feedthrough Glass Glass Flange DN 16 ISO-KF DN 16 CF Accuracy: % of measurement mbar: +/-5 % mbar: +/-5 % Weight 0.2 kg 0.2 kg Materials in contact with media Tungsten, stainless steel Tungsten, stainless steel range max mbar 1000 mbar range min mbar mbar Sensor cable length max m 1000 m Method of measurement Pirani Pirani Measuring cycle 40 ms 40 ms Interface: Connection Digital RS-232 / RS-485, 9-pin, Sub-D-socket Digital RS-232 / RS-485, 9-pin, Sub-D-socket Protection category IP 40 / IP 54 IP 40 / IP 54 Temperature: Bakeout 70 C 70 C Temperature: Operating C C Temperature: Storage C C Supply: Voltage 24 V DC 24 V DC Supply: Power consumption max. 2 W 2 W Repeatability: % of measurement mbar: +/-1 % mbar: +/-1 % Order number Digital Pirani PPT 100 PT R PT R Mess- und Steuergeräte controll units Accessories TIC 251, Profibus converter for CPT 100, PPT 100, PT PT RPT 100 TIC 002, converter for DigiLine TM Transmitter PM T PM T Centering ring with poral filter, FPM/stainless steel, PF T DN 16 ISO-KF Centering ring, with fine filter, DN 16 ISO-KF PT T Page Page

15 Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Digital Pirani/Bayard-Alpert HPT 100 Pirani/Bayard-Alpert combination ( mbar) DigiLine TM range from mbar to 1000 mbar Extremely accurate For industrial applications with Profibus interface Highly reliable with 2 filaments Dimensions A A Ø B Ø B C C D D DN 40 ISO-KF DN 40 CF DN 40 ISO-KF DN 40 CF A 147 mm 156 mm B 55 mm 70 mm C 35 mm 35 mm D 85 mm 85 mm Page Page

16 Technical data Digital Pirani/ Bayard-Alpert HPT 100, DN 40 ISO-KF Digital Pirani/ Bayard-Alpert HPT 100, DN 40 CF Flange (in) DN 40 ISO-KF DN 40 CF Number of filaments 2 2 Seal Metal Metal Pressure max. 4 bar 4 bar Feedthrough Glass, Ceramic Glass, Ceramic Filament iridium yttriated, twice Iridium yttriated, twice Flange DN 40 ISO-KF DN 40 CF Accuracy: % of measurement mbar: +/- 10 % mbar: +/- 10 % Weight 0.4 kg 0.4 kg Materials in contact with media Tungsten, stainless steel, nickel Tungsten, stainless steel, nickel range max mbar 1000 mbar range min mbar mbar Sensor cable length max m 1000 m Method of measurement Pirani/Bayard- Alpert Pirani/Bayard- Alpert Measuring cycle 40 ms 40 ms Interface: Connection Digital RS-232 / RS-485, 9-pin, Sub-D-socket Digital RS-232 / RS-485, 9-pin, Sub-D-socket Protection category IP 40 / IP 54 IP 40 / IP 54 Temperature: Bakeout (electronics removed) 180 C 180 C Temperature: Operating C C Temperature: Storage C C Supply: Voltage 24 V DC 24 V DC Supply: Power consumption max. 7.5 W 7.5 W Repeatability: % of measurement mbar: +/- 5 % mbar: +/- 5 % Mess- und Steuergeräte controll units Order number Digital Pirani/Bayard-Alpert HPT 100 PT R PT R Accessories TIC 252, Profibus converter for HPT 100, MPT 100 PT PT TIC 002, converter for DigiLine TM Transmitter PM T PM T Page Page

17 Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Digital Pirani/cold cathode MPT 100 Pirani/cold cathode combination ( mbar) DigiLine TM Broad measurement range from to 1000 mbar Combination of a Pirani and cold cathode sensor Insensitive to gas ingress More rugged than hot cathodes Highly accurate Compatible with DigiLine controllers and accessories Dimensions Digital Pirani/cold cathode MPT 100 Page Page

18 Technical data Digital Pirani/ cold cathode MPT 100, DN 25 ISO-KF Digital Pirani/ cold cathode MPT 100, DN 40 ISO-KF Digital Pirani/ cold cathode MPT 100, DN 40 CF-R Anode Mo Mo Mo Flange (in) DN 25 ISO-KF DN 40 ISO-KF DN 40 CF-R Seal Metal Metal Metal Pressure max. 4 bar 4 bar 4 bar Feedthrough Glass, ceramic Glass, ceramic Glass, ceramic Accuracy: % of measurement mbar: +/- 25 %, mbar: +/-15 % mbar: +/- 25 %, mbar: +/-15 % mbar: +/- 25 %, mbar: +/-15 % Weight 0,580 kg 0,580 kg 0,580 kg Materials in contact with media Tungsten, stainless steel, nickel Tungsten, stainless steel, nickel Tungsten, stainless steel, nickel range max mbar 1000 mbar 1000 mbar range min mbar mbar mbar Sensor cable length max m 1000 m 1000 m Method of measurement Pirani / Cold Cathode Pirani / Cold Cathode Pirani / Cold Cathode Measuring cycle 40 ms 40 ms 40 ms Interface: Connection Digital RS-232 / RS-485, 9-pin, Sub-D-socket Digital RS-232 / RS-485, 9-pin, Sub-D-socket Digital RS-232 / RS-485, 9-pin, Sub-D-socket Protection category IP 40 IP 40 IP 40 Temperature: Bakeout (electronics removed) 180 C 180 C 180 C Temperature: Operating C C C Temperature: Storage C C C Supply: Voltage 24 V DC 24 V DC 24 V DC Supply: Power consumption max. 2.5 W 2.5 W 2.5 W Volume 9.5 cm³ 9.5 cm³ 9.5 cm³ Repeatability: % of measurement mbar: +/-5 % mbar: +/-5 % mbar: +/-5 % Ignition aid Stainless steel Stainless steel Stainless steel Mess- und Steuergeräte controll units Order number Digital Pirani/cold cathode MPT 100 PT R PT R PT R Accessories TIC 252, Profibus converter for HPT 100, MPT 100 PT PT PT Page Page

19 Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Controllers DPG 101, controller for 1 DPG 109, controller for 9 s DigiLine TM Controllers with 1 and 9 channels are suitable for operating the s. Their intuitive operation affords simple calibration. Dimensions DPG DPG DPG 101, controller DPG 109, controller Page Page

20 Technical data DPG 101, controller for 1 DPG 109, controller for 9 s Connections for 1 9 (max. 4 HPT 100) Display LCD-Display, backlit, four digit LCD-Display, backlit, four digit Weight 0.7 kg 1 kg range max mbar 2000 mbar range min mbar mbar rate 30 1/s 30 1/s Mains requirement: frequency (range) 50/60 Hz 50/60 Hz Mains requirement: power consumption 15 VA 48 VA Mains requirement: voltage (range) V AC V AC Set point: Voltage max. 260 V AC, 2 A; 50 V DC, 2 A 50 V AC, 3 A; 30 V DC, 3 A Set point: Changeover contact, potential-free 2 pieces 8 pieces Signal output: Measuring value, analog 0-10 V - Interface - RS-232-C Temperature: Operating ºC ºC Temperature: Storage ºC ºC Order number Controllers PT G PT G Mess- und Steuergeräte Accessories Transmitter connection cable, 10 m PT T PT T Transmitter connection cable, 6 m PT T PT T Transmitter connection cable, 3 m PT T PT T Power cord, US plug, 2.5 m P YX P YX Euro-style safety plug, 2.5 m P YU P YU Power cord, Swiss plug, 2.5 m P YR P YR Power cord, U.K. plug, 2.5 m P Y1 P Y1 DokuStar Plus software PT PC data cable, 3 m PT T controll units Page Page

21 Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Power supply units without display DPS 101, for 1 DPS 109, for 9 s DigiLine TM Power supply units with either 1 or 9 channels are provided for operating the s without an additional display. They can be connected with a PC or SPC via an RS-232 interface. Dimensions 66 DPS DPS 101, for 1, EU plug DPS 109, for 9 s Page Page

22 Technical data DPS 101, for 1, EU plug DPS 101, for 1, US plug DPS 101, for 1, UK plug DPS 109, for 9 s Weight 0.3 kg 0.3 kg 0.3 kg 0.7 kg range max mbar 2000 mbar 2000 mbar 2000 mbar range min mbar mbar mbar mbar Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz Mains requirement: power consumption 18 VA 18 VA 18 VA 48 VA Mains requirement: voltage (range) V V V V Interface RS-232-C RS-232-C RS-232-C RS-232 Software DokuStar Included Included Included - Temperature: Operating C ºC ºC ºC Temperature: Storage C ºC ºC ºC Order number Controllers PT G PT G PT G PT G Accessories DokuStar Plus software PT Transmitter connection cable, 10 m PT T Transmitter connection cable, 6 m PT T Transmitter connection cable, 3 m PT T Power cord, US plug, 2.5 m P YX Euro-style safety plug, 2.5 m P YU Power cord, Swiss plug, 2.5 m P YR Power cord, U.K. plug, 2.5 m P Y1 Mess- und Steuergeräte controll units Page Page

23 Vacuum analysis and measurement and control units DigiLine TM accessories DigiLine TM accessories TIC 251, Profibus converter TIC 252, Profibus converter DigiLine TM accessories TIC 251, Profibus converter for CPT 100, PPT 100, RPT 100 TIC 252, Profibus converter for HPT 100, MPT 100 Dimensions TIC 251 TIC 252 Page Page

24 Technical data TIC 251, Profibus converter for CPT 100, PPT 100, RPT 100 TIC 252, Profibus converter for HPT 100, MPT 100 Weight 0.1 kg 0.12 kg Power 3.5 W (without ) 3.5 W (without ) Interface: Type Profibus - DP Profibus - DP Voltage Connection V DC Connection V DC Temperature: Operating ºC ºC Order number Profibus converter PT PT controll units Mess- und Steuergeräte Page Page

25 Vacuum analysis and measurement and control units DigiLine TM accessories DigiLine TM accessories TIC 002, Konverter für DigiLine TM Transmitter DigiLine TM accessories For operating Pfeiffer Vacuum products via an RS Bus connection from pumps and DigiLine s for up to 32 devices For supplying the operating voltage for DigiLine s RS / RS interface converter for connection with a PC or SPC TIC 002 Page Page

26 Technical data TIC 002, converter for DigiLine TM Transmitter Power consumption ca. 1 W Voltage 24 V DC Order number TIC 002 PM T Accessories TPS 100, mains pack for wall/standard rail fitting PM T Mating plug for voltage supply P E Plug - in bus termination, for RS-485 PT T controll units Mess- und Steuergeräte Page Page

27 Vacuum analysis and measurement and control units DigiLine TM accessories DigiLine TM accessories DokuStar Plus software DigiLine TM accessories System requirements: PC min. Pentium 160 MHz - 64 MB RAM - 15 MB of free HD memory Interface: RS For DPG / DPS 109 Visualization and storage of readings from up to 15 s Technical data DokuStar Plus software PC min. Pentium 160 MHz RAM 64 MB Interface RS Memory 15 MB free HD memory Order number DokuStar Plus software PT Page Page

28 Notes controll units Mess- und Steuergeräte Page Page

29 Vacuum analysis and measurement Vacuum measurement and control units ActiveLine Innovative Vacuum! Capazitive Transmitters. What is ActiveLine? The ActiveLine family includes three control units and eight s. The six APR piezo models cover five measurement ranges from 55 bar to 0.1 mbar. The CMR capacitative diaphragm s are available both as temperature-compensated and temperature-regulated versions in four and five measurement ranges, respectively, from 1,100 to 10-5 mbar. Page 478

30 The ActiveLine comprises three controllers and eight s APR TPR PCR IKR Control units for connecting of one, two and six s Each can be operated with every controller Transmitter TPG 261 TPG 262 TPG 256 A No cable mix-up identical cables for connecting the s to the controllers Control units PKR CMR IMR PBR Transmitter / Control Units ActiveLine application concepts Advantages at a glance Large variety of s to cover the entire pressure range (10-11 to 55,000 mbar) Compact design Easy integration Cost effective Integrated measurement connections Compact independent Output signal 0 10 V with integrated error signal Any pressure unit possible Page 479

31 Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Piezo s APR 250/260 ( mbar) ActiveLine range from 0.1 mbar to 1100 mbar Pressure measurement independent of type of gas Corrosion-resistant Dimensions Active Piezo APR 250, DN 16 ISO-KF Active Piezo APR 260, DN 16 ISO-KF Active Piezo APR 260, DN 16 CF-F Page Page

32 Technical data Active Piezo APR 250, DN 16 ISO-KF Active Piezo APR 260, DN 16 ISO-KF Active Piezo APR 260, DN 16 CF-F Flange (in) DN 16 ISO-KF DN 16 ISO-KF DN 16 CF-F Output signal: Sensor error below 0.4 V 0.4 V 0.4 V Output signal: Pressure range V V V Output signal: Minimum load 10 kohm 10 kohm 10 kohm Bakeout temperature 80 C 80 C 80 C Pressure max. 3 bar 3 bar 3 bar Stability of sensitivity 0.5 %/year 0.2 %/year 0.2 %/year Accuracy 2 % F.S. 1 % F.S. 1 % F.S. Weight 120 g 120 g 150 g Linearity and hysteresis 0.5 % F.S. 0.2 % F.S. 0.2 % F.S. range max mbar 1100 mbar 1100 mbar range min mbar mbar mbar Sensor cable length 50 m 50 m 50 m Zero stability 0.5 % F.S./year 0.3 % F.S./year 0.3 % F.S./year Temperature: Operating ºC ºC ºC Temperature: Storage -40 ºC ºC º C ºC Thermal sensitivity drift 0.5 % 0.5 % 0.5 % Thermal zero drift 0.5 % F.S. 0.2 % F.S. 0.2 % F.S. Supply: Voltage V DC V DC V DC Supply: Power consumption max. 0.2 W 0.2 W 0.2 W Volume 2 cm 3 2 cm 3 6 cm 3 Material Stainless steel Stainless steel Stainless steel Mess- und Steuergeräte Order number ActiveLine s P TF P TF P TF Accessories Sensor cable, 3 m PT T PT T PT T Mating connector B MA B MA B MA controll units Page Page

33 Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Piezo s APR 262/265/266/267 ( mbar) ActiveLine range from 0.2 mbar to 2200 mbar Pressure measurement independent of type of gas Corrosion-resistant Dimensions Active Piezo APR 262 Active Piezo APR 265 Active Piezo APR 266 Active Piezo APR 267 Page Page

34 Technical data Active Piezo APR 262, G1/4 " Active Piezo APR 265, G 1/4" Active Piezo APR 266, G 1/4" Active Piezo APR 267, G 1/4" Flange (in) G 1/4" G 1/4" G 1/4" G 1/4" Output signal: Sensor error below 0.4 V 0.4 V 0.4 V 0.4 V Output signal: Pressure range V V V V Output signal: Minimum load 10 kohm 10 kohm 10 kohm 10 kohm Bakeout temperature 80 C 80 C 80 C 80 C Pressure max. 6 bar 15 bar 30 bar 150 bar Stability of sensitivity 0.2 %/year 0.2 %/year 0.2 %/year 0.2 %/year Accuracy 2 % F.S. 2 % F.S. 2 % F.S. 2 % F.S. Weight 120 g 120 g 120 g 120 g Linearity and hysteresis 0.5 % F.S. 0.5 % F.S. 0.5 % F.S. 0.5 % F.S. range max mbar 5500 mbar mbar mbar range min mbar 0.5 mbar 1 mbar 5 mbar Sensor cable length 50 m 50 m 50 m 50 m Zero stability 0.5 % F.S./year 0.5 % F.S./year 0.5 % F.S./year 0.5 % F.S./year Temperature: Operating ºC ºC ºC ºC Temperature: Storage ºC ºC ºC ºC Thermal sensitivity drift 0.5 % 0.5 % 0.5 % 0.5 % Thermal zero drift 0.5 % F.S. 0.5 % F.S. 0.5 % F.S. 0.5 % F.S. Supply: Voltage V DC V DC V DC V DC Supply: Power consumption max. 0.2 W 0.2 W 0.2 W 0.2 W Volume 0.5 cm cm cm cm 3 Material Stainless steel Stainless steel Stainless steel Stainless steel Mess- und Steuergeräte Order number ActiveLine s P TF P TF P TF P TF Accessories Sensor cable, 3 m PT T PT T PT T PT T Mating connector for compact gauge B MA B MA B MA B MA controll units Page Page

35 Vacuum analysis and measurement and control units ActiveLine ActiveLine Dimensions Active capacitive s ( mbar) Active capacitive CMR 361 Active capacitive CMR 362 Active capacitive CMR 363 Active capacitive CMR 364 Active capacitive CMR 365 ActiveLine range from mbar to 1100 mbar Capacitive diaphragm for ActiveLine Sensor in ceramic technology No memory effects Materials employed have identical temperature coefficients Excellent temperature compensation Resistant to corrosive gases Excellent zero stability Tube OD 1/2" DN 16 ISO-KF DN 16 CF-R DN 8 VCR Page Page

36 Technical data Active capacitive CMR 361 Active capacitive CMR 362 Active capacitive CMR 363 Active capacitive CMR 364 Active capacitive CMR 365 Resolution % F.S % F.S % F.S % F.S % F.S. Output signal: Sensor error above 9.8 V 9.8 V 9.8 V 9.8 V 9.8 V Output signal: Sensor error below 0.4 V 0.4 V 0.4 V 0.4 V 0.4 V Output signal: Pressure range V V V V V Output signal: Minimum load 10 kohm 10 kohm 10 kohm 10 kohm 10 kohm Bakeout temperature max. at the 110 C 110 C 110 C 110 C 110 C flange Pressure max. 3 bar 2 bar 2 bar 2 bar 1.3 bar Accuracy 0.2 % of reading 0.2 % of reading 0.2 % of reading 0.2 % of reading 0.5 % of reading Weight < 300 g < 300 g < 300 g < 300 g < 300 g Membrane and measuring chamber Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) range max mbar 110 mbar 11 mbar 1.1 mbar 0.11 mbar range min mbar mbar mbar mbar mbar Sensor cable length 120 m 120 m 120 m 120 m 120 m Pipe and flange Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel Temperature: Operating C C C C C Temperature: Storage C C C C C Temperature effect: on span 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.03 % of reading/ C Temperature effect: on zero % F.S./ C % F.S./ C % F.S./ C % F.S./ C 0.02 % F.S./ C Supply: Voltage VDC VDC VDC VDC VDC Supply: Power consumption max. 1 W 1 W 1 W 1 W 1 W Volume 6 cm 3 6 cm 3 6 cm 3 6 cm 3 6 cm 3 Mess- und Steuergeräte Active capacitive CMR 361 Active capacitive CMR 362 Active capacitive CMR 363 Active capacitive CMR 364 Active capacitive CMR 365 Flange (in) Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Order number PT R PT R PT R PT R PT R Flange (in) DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF Order number PT R PT R PT R PT R PT R Flange (in) DN 16 CF-R DN 16 CF-R DN 16 CF-R DN 16 CF-R DN 16 CF-R Order number PT R PT R PT R PT R PT R Flange (in) Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Order number PT R PT R PT R PT R PT R controll units Accessories Sensor cable, 3 m PT T PT T PT T PT T PT T Mating connector for compact gauge B MA B MA B MA B MA B MA Page Page

37 Vacuum analysis and measurement and control units ActiveLine ActiveLine Active capacitive s ( mbar) Active capacitive CMR 271 Active capacitive CMR 272 Active capacitive CMR 273 Active capacitive CMR 274 Active capacitive CMR 275 ActiveLine range from 0.2 mbar to 2200 mbar Pressure measurement independent of type of gas Corrosion-resistant Dimensions A B ø C E D A B ø C E D A B ø C E D DN DN Tube OD 1/2" DN 16 ISO-KF DN 16 CF-R DN 8 VCR Tube OD 1/2" DN 16 ISO-KF DN 16 CF-R Cajon 8 VCR A 126 mm 128 mm 128 mm mm B 23 mm 23 mm 23 mm 23 mm C 78 mm 78 mm 78 mm 78 mm D 80 mm 80 mm 80 mm 80 mm E 46 mm 48 mm 48 mm 74.5 mm F 12.7 mm Page Page

38 Technical data Active capacitive CMR 271 Active capacitive CMR 272 Active capacitive CMR 273 Active capacitive CMR 274 Active capacitive CMR 275 Resolution % F.S % F.S % F.S % F.S % F.S. Output signal: Sensor error below 0.4 V 0.4 V 0.4 V 0.4 V 0.4 V Output signal: Pressure range V V V V V Output signal: Minimum load 10 kohm 10 kohm 10 kohm 10 kohm 10 kohm Bakeout temperature max. at the 90 C 90 C 90 C 90 C 90 C flange Pressure max. 3 bar 2 bar 2 bar 2 bar 2 bar Accuracy 0.15 % of reading 0.15 % of reading 0.15 % of reading 0.15 % of reading 0.15 % of reading Membrane and measuring chamber Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 range max mbar 110 mbar 11 mbar 1.1 mbar 0.11 mbar range min mbar mbar mbar mbar mbar Sensor cable length 65 m 65 m 65 m 65 m 65 m Pipe and flange Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel Temperature: Operating ºC ºC ºC ºC ºC Temperature: Storage ºC ºC ºC ºC C Temperature effect: on span 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C Temperature effect: on zero % F.S./ C % F.S./ C % F.S./ C % F.S./ C % F.S./ C Temperature stabilization 45 ºC 45 ºC 45 ºC 45 ºC 45 ºC Supply: Voltage V DC V DC V DC V DC V DC Supply: Power consumption max. 7.5 W 7.5 W 7.5 W 7.5 W 7.5 W Active capacitive CMR 271 Active capacitive CMR 272 Active capacitive CMR 273 Active capacitive CMR 274 Active capacitive CMR 275 Flange (in) Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Weight 485 g 485 g 485 g 485 g 485 g Volume 7 cm 3 7 cm 3 7 cm 3 7 cm 3 7 cm 3 Order number PT R PT R PT R PT R PT R Flange (in) DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF Weight 495 g 495 g 495 g 495 g 495 g Volume 7,25 cm 3 7,25 cm 3 7,25 cm 3 7,25 cm 3 7,25 cm 3 Order number PT R PT R PT R PT R PT R Flange (in) DN 16 CF-R DN 16 CF-R DN 16 CF-R DN 16 CF-R DN 16 CF-R Weight 505 g 505 g 505 g 505 g 505 g Volume 7,25 cm 3 7,25 cm 3 7,25 cm 3 7,25 cm 3 7,25 cm 3 Order number PT R PT R PT R PT R PT R Flange (in) Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Weight 515 g 515 g 515 g 515 g 515 g Volume 9,25 cm 3 9,25 cm 3 9,25 cm 3 9,25 cm 3 9,25 cm 3 Order number PT R PT R PT R PT R PT R Mess- und Steuergeräte controll units Accessories Sensor cable, 3 m PT T PT T PT T PT T PT T Mating connector for compact gauge B MA B MA B MA B MA B MA Page Page

39 Vacuum analysis and measurement and control units ActiveLine ActiveLine Dimensions Active capacitive s CCR ( torr) Active capacitive CCR 361 Active capacitive CCR 361 Active capacitive CCR 363 Active capacitive CCR 364 Active capacitive CCR 365 ActiveLine range from to 1000 torr Capacitative diaphragm for measurement of pressure independently of type of gas Sensor in ceramic technology No memory effects Materials employed have identical temperature coefficients Excellent temperature compensation Resistant to corrosive gases Excellent zero stability Transmitter cannot be connected to controllers TPG 261, TPG 262 and TPG 256 A MKS-compatible OD1/2" DN 16 ISO-KF DN 16 CF-R 8 VCR female Tube OD 1/2" DN 16 ISO-KF DN 16 CF-R Cajon 8 VCR Page Page

40 Technical data Active capacitive CCR 361 Active capacitive CCR 362 Active capacitive CCR 363 Active capacitive CCR 364 Active capacitive CCR 365 Resolution % F.S % F.S % F.S % F.S % F.S. Output signal: Pressure range V V V V V Output signal: Minimum load 10 kohm 10 kohm 10 kohm 10 kohm 10 kohm Bakeout temperature max. at the 110 C 110 C 110 C 110 C 110 C flange Pressure max. 3 bar 2 bar 2 bar 2 bar 1,3 bar Accuracy 0.2 % of reading 0.2 % of reading 0.2 % of reading 0.2 % of reading 0.5 % of reading Weight < 300 g < 300 g < 300 g < 300 g < 300 g Membrane and measuring chamber Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) range max Torr 100 Torr 10 Torr 1 Torr Torr range min Torr Torr Torr Torr Torr Sensor cable length 100 m (0,14 mm² conductor) 100 m (0,14 mm² conductor) 100 m (0,14 mm² conductor) 100 m (0,14 mm² conductor) 100 m (0,14 mm² conductor) Pipe and flange Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel Temperature: Operating C C C C C Temperature: Storage C C C C C Temperature effect: on span 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.03 % of reading/ C Temperature effect: on zero % F.S./ C % F.S./ C % F.S./ C % F.S./ C 0.02 % F.S./ C Supply: Voltage VDC VDC VDC VDC VDC Supply: Power consumption max. 1 W 1 W 1 W 1 W 1 W Volume 6 cm 3 6 cm 3 6 cm 3 6 cm 3 6 cm 3 Mess- und Steuergeräte Active capacitive CCR 361 Active capacitive CCR 362 Active capacitive CCR 363 Active capacitive CCR 364 Active capacitive CCR 365 Flange (in) Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Order number PT R PT R PT R PT R PT R Flange (in) DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF Order number PT R PT R PT R PT R PT R Flange (in) - - DN 16 CF-R DN 16 CF-R DN 16 CF-R Order number - - PT R PT R PT R Flange (in) Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Order number PT R PT R PT R PT R PT R controll units Page Page

41 Vacuum analysis and measurement and control units ActiveLine ActiveLine Active capacitive s CCR ( torr) Active capacitive CCR 271 Active capacitive CCR 272 Active capacitive CCR 273 Active capacitive CCR 274 Active capacitive CCR 275 ActiveLine Dimensions range from to 1000 torr Pressure measurement independent of type of gas Outstanding long-term and temperature stability Only marginal zero drift Corrosion-resistant ceramic technology Transmitter cannot be connected to controllers TPG 261, TPG 262 and TPG 256 A MKS-compatible 15 pole D subminiature 80 ø DN 16 CF-R DN 16 ISO-KF CAJON 8 VCR ø" Page Page

42 Technical data Active capacitive CCR 271 Active capacitive CCR 272 Active capacitive CCR 273 Active capacitive CCR 274 Active capacitive CCR 275 Resolution % F.S % F.S % F.S % F.S % F.S. Output signal: Pressure range 0-10 V 0-10 V 0-10 V 0-10 V 0-10 V Output signal: Minimum load 10 kohm 10 kohm 10 kohm 10 kohm 10 kohm Bakeout temperature 65 C 65 C 65 C 65 C 65 C Pressure max Torr Torr Torr Torr Torr Accuracy 0.15 % of reading 0.15 % of reading 0.15 % of reading 0.15 % of reading 0.15 % of reading Membrane and measuring chamber Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 range max Torr Torr Torr Torr Torr range min Torr Torr Torr Torr Torr Sensor cable length 50 m 50 m 50 m 50 m 50 m Pipe and flange Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel Temperature: Operating ºC ºC ºC ºC ºC Temperature: Storage ºC ºC ºC ºC C Temperature effect: on span 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C Temperature effect: on zero % F.S./ C % F.S./ C % F.S./ C % F.S./ C % F.S./ C Temperature stabilization 45ºC 45 ºC 45 ºC 45 ºC 45 ºC Supply: Voltage 18-26,4 V DC or 15 V DC +-5 % 18-26,4 V DC or 15 V DC +-5 % 18-26,4 V DC or 15 V DC +-5 % 18-26,4 V DC or 15 V DC +-5 % 18-26,4 V DC or 15 V DC +-5 % Supply: Power consumption max. 19 W 19 W 19 W 19 W 19 W Volume 7 cm 3 7 cm 3 7 cm 3 7 cm 3 7 cm 3 Active capacitive CCR 271 Active capacitive CCR 272 Active capacitive CCR 273 Active capacitive CCR 274 Active capacitive CCR 275 Flange (in) Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Weight 485 g 485 g 485 g 485 g 485 g Order number PT R PT R PT R PT R PT R Flange (in) DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF Weight 495 g 495 g 495 g 495 g 495 g Order number PT R PT R PT R PT R PT R Flange (in) DN 16 CF-R DN 16 CF-R DN 16 CF-R DN 16 CF-R DN 16 CF-R Weight 505 g 505 g 505 g 505 g 505 g Order number PT R PT R PT R PT R PT R Flange (in) Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Weight 515 g 515 g 515 g 515 g 515 g Order number PT R PT R PT R PT R PT R Mess- und Steuergeräte controll units Page Page

43 Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Pirani/capacitive s PCR 260 ( mbar) ActiveLine range from mbar to 1500 mbar Highly accurate Especially suitable for load-lock applications Maximum pressure refers to inert gases Dimensions 20 (0.79") 28 (1.10") 20 (0.79") 28 (1.10") 65.3 (2.57") HV 22.5 (0.89") 65.3 (2.57") HV 43 (1.69") 26.3 (1.04") DN 16 ISO-KF 43 (1.69") 39 (1.054") DN 16 CF-F DN 16 ISO-KF DN 16 CF-F Page Page

44 Technical data Active Pirani/ capacitive PCR 260 Output signal: Pressure range V Output signal: Minimum load 10 kohm Bakeout temperature 80 C Seal Metal Pressure max. 5 bar Feedthrough Glass Feature Stainless steel, metal sealed Flange Stainless steel Accuracy mbar: +/- 15 % mbar: +/- 5 % mbar: +/- 2,5 % Filament Tungsten range max mbar range min mbar Sensor cable length 200 m Temperature: Operating ºC Temperature: Storage ºC Supply: Voltage V DC Supply: Power consumption max. 2.5 W Repeatability: mbar +/- 2 % Mess- und Steuergeräte Active Pirani/ capacitive PCR 260 Flange (in) DN 16 ISO-KF Weight 90 g Volume 6 cm 3 Order number PT R Flange (in) DN 16 CF-F Weight 120 g Volume 8 cm 3 Order number PT R controll units Accessories Centering ring with poral filter, FPM/stainless steel, PF T DN 16 ISO-KF Sensor cable, 3 m PT T Mating connector for compact gauge B MA Page Page

45 Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Pirani s TPR 280, ( mbar) ActiveLine range from to 1000 mbar Compact and rugged Fast, stable measurement For general vacuum applications Maximum pressure refers to inert gases Dimensions 16 (0.63") 20.5 (0.81") 16 (0.63") 20.5 (0.81") 69 (2.72") 22.5 (0.89") 69 (2.72") 33 (1.30") 15 (0.58") 14 (0.55") 33 (1.30") DN 16 ISO-KF DN 16 CF-R 116 (4.57") 115 (4.53") DN 16 ISO-KF DN 16 CF-R Active Pirani Transmitter TPR 280, 80 ºC Active Pirani TPR 280, 250 ºC Page Page

46 Technical data Active Pirani Transmitter TPR 280, 80 ºC Active Pirani TPR 280, 250 ºC Output signal: Sensor error below 0.5 V 0.5 V Output signal: Pressure range V V Output signal: Minimum load 10 kohm 10 kohm Bakeout temperature 80 C 250 C Seal Metal Metal Pressure max. 10 bar 10 bar Feedthrough Glass Glass Feature Stainless steel, metal sealed Stainless steel, metal sealed Flange Stainless steel Stainless steel Accuracy: mbar +/- 15 % +/- 15 % Filament Tungsten Tungsten range max mbar 1000 mbar range min mbar mbar Sensor cable length max. 200 m 200 m Temperature: Operating ºC ºC Temperature: Storage ºC ºC Supply: Voltage V DC V DC Supply: Power consumption max. 1 W 1 W Repeatability: mbar +/- 2 % +/- 2 % Active Pirani Transmitter TPR 280, 80 ºC Active Pirani TPR 280, 250 ºC Flange (in) DN 16 ISO-KF DN 16 ISO-KF Weight 80 g 130 g Volume 1.5 cm 3 10 cm 3 Order number PT R PT R Flange (in) DN 16 CF-R DN 16 CF-R Weight 100 g 140 g Volume 1.5 cm 3 10 cm 3 Order number PT R PT R Flange (in) 1/8" NPT Weight 70 g Volume 2 cm 3 Order number PT R Flange (in) 8 VCR Weight 130 g Volume 2 cm 3 Order number PT R Mess- und Steuergeräte controll units Accessories Centering ring with poral filter, FPM/stainless steel, PF T DN 16 ISO-KF Fine filter for TPR 265, pore size mm PT T Mating connector for compact gauge B MA B MA Sensor cable, 3 m PT T PT T Page Page

47 Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Pirani s TPR 281, ( mbar), for corrosive media ActiveLine range from to 1000 bar Compact and rugged Fast, stable measurement For corrosive media Maximum pressure refers to inert gases Dimensions 16 (0.63") 20.5 (0.81") 16 (0.63") 20.5 (0.81") 69 (2.72") 22.5 (0.89") 69 (2.72") 33 (1.30") 15 (0.58") 14 (0.55") 33 (1.30") DN 16 ISO-KF DN 16 CF-R 116 (4.57") 115 (4.53") DN 16 ISO-KF DN 16 CF-R Active Pirani TPR 281, 65 ºC Active Pirani Transmitter TPR 281, 250 ºC Page Page

48 Technical data Active Pirani TPR 281, 65 ºC Active Pirani Transmitter TPR 281, 250 ºC Output signal: Sensor error below 0.5 V 0.5 V Output signal: Pressure range V V Output signal: Minimum load 10 kohm 10 kohm Bakeout temperature 80 C 250 C Seal Metal Metal Pressure max. 10 bar 10 bar Feedthrough Glass Glass Feature for corrosive media for corrosive media Flange Stainless steel Stainless steel Accuracy: mbar +/- 15 % +/- 15 % Filament Nickel Nickel range max mbar 1000 mbar range min mbar mbar Sensor cable length max. 200 m 200 m Temperature: Operating ºC ºC Temperature: Storage ºC ºC Supply: Voltage V DC V DC Supply: Power consumption max. 1 W 1 W Repeatability: mbar +/- 2 % +/- 2 % Active Pirani TPR 281, 65 ºC Active Pirani Transmitter TPR 281, 250 ºC Flange (in) DN 16 ISO-KF DN 16 ISO-KF Weight 80 g 130 g Volume 1.3 cm 3 10 cm 3 Order number PT R PT R Flange (in) DN 16 CF-R DN 16 CF-R Weight 100 g 140 g Volume 1.5 cm 3 10 cm 3 Order number PT R PT R Mess- und Steuergeräte controll units Accessories Centering ring with poral filter, FPM/stainless steel, PF T DN 16 ISO-KF Fine filter for TPR 265, pore size mm PT T Mating connector for compact gauge B MA B MA Sensor cable, 3 m PT T PT T Page Page

49 Vacuum analysis and measurement and control units ActiveLine ActiveLine Active cold cathode s IKR 251/261 ( mbar) ActiveLine Flange size: DN 25 ISO-KF range from to 0.01 mbar Cold cathode (inverted magnetron) Rugged and dependable Insensitive to air ingress Corrosion-resistant Dimensions Active cold cathode IKR 251 Active cold cathode IKR 261 Active cold cathode IKR 261, DN 40 CF-F, extra-long case Page Page

50 Technical data Active cold cathode IKR 251 Active cold cathode IKR 261 Active cold cathode IKR 261, DN 40 CF-F, extra-long case Output signal: Sensor error below 0.5 V 0.5 V 0.5 V Output signal: Pressure range V V V Output signal: Minimum load 10 kohm 10 kohm 10 kohm Bakeout temperature 150 C, electronic 250 C, electronic 250 C removed removed Seal FPM Ag Ag Pressure max. 10 bar 10 bar 10 bar Feedthrough Al 2 O 3 Al 2 O 3 Al 2 O 3 Feature interior FPM metal sealed metal sealed sealed Flange Stainless steel Stainless steel Stainless steel Accuracy: mbar +/- 30 % +/- 30 % +/- 30 % Filament Molybdenum Molybdenum Molybdenum range max mbar 0.01 mbar 0.01 mbar range min mbar mbar mbar Sensor cable length 500 m 500 m 500 m Temperature: Operating ºC ºC ºC Temperature: Storage ºC ºC ºC Supply: Voltage V V V Supply: Power consumption max. 2 W 2 W 2 W Volume 20 cm 3 20 cm 3 20 cm 3 Repeatability: mbar +/- 5 % +/- 5 % +/- 5 % Mess- und Steuergeräte Active cold cathode IKR 251 Active cold cathode IKR 261 Active cold cathode IKR 261, DN 40 CF-F, extra-long case Flange (in) DN 25 ISO-KF Weight 700 g Order number PT R Flange (in) DN 40 ISO-KF DN 40 ISO-KF Weight 700 g 700 g Order number PT R PT R Flange (in) DN 40 CF-F DN 40 CF-F DN 40 CF-F Weight 950 g 950 g 1200 g Order number PT R PT R PT R controll units Accessories Sensor cable, 3 m PT T PT T PT T Mating connector for compact gauge B MA B MA B MA Page Page

51 Vacuum analysis and measurement and control units ActiveLine ActiveLine Active cold cathode s IKR 270 ( ,01 mbar) ActiveLine range from to 0.01 mbar Cold cathode (inverted magnetron) Rugged and dependable Insensitive to air ingress Corrosion-resistant Dimensions Active cold cathode IKR 270 Active cold cathode IKR 270, DN 40 CF-F, extra-long case Page Page

52 Technical data Active cold cathode IKR 270, DN 40 CF-F Active cold cathode IKR 270, DN 40 CF-F, extra-long case Flange (in) DN 40 CF-F DN 40 CF-F Output signal: Sensor error below 0.5 V 0.5 V Output signal: Pressure range V V Output signal: Minimum load 10 kohm 10 kohm Bakeout temperature 250 C electronic 250 C removed Seal Ag Ag Pressure max. 10 bar 10 bar Feedthrough Al 2 O 3 Al 2 O 3 Feature metal sealed metal sealed Flange Stainless steel Stainless steel Accuracy: mbar +/- 30 % +/- 30 % Weight 950 g 1200 g Cable length 500 m 500 m Filament Molybdenum Molybdenum range max mbar 0.01 mbar range min mbar mbar Temperature: Operating ºC ºC, in the bakeout range Temperature: Storage ºC ºC Supply: Voltage V V Supply: Power consumption max. 2 W 2 W Volume 20 cm 3 20 cm 3 Repeatability: mbar +/- 5 % +/- 5 % Order number ActiveLine s PT R PT R Mess- und Steuergeräte controll units Accessories Sensor cable, 3 m PT T PT T Mating connector for compact gauge B MA B MA Page Page

53 Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Pirani/cold cathode PKR 251/261 ( mbar) ActiveLine range from to 1000 mbar Two gauge heads (Pirani and cold cathode) in a single case (inverted magnetron) A single flange from atmospheric pressure to UHV Corrosion-resistant Dimensions DN 40 ISO-KF DN 40 ISO CF DN 25 ISO-KF Active Pirani/cold cathode PKR 251 Active Pirani/cold cathode PKR 261, DN 25 ISO-KF Active Pirani/cold cathode PKR 261, DN 40 ISO-KF Active Pirani/cold cathode PKR 261, DN 40 CF-F Page Page

54 Technical data Active Pirani/ cold cathode PKR 251 Active Pirani/ cold cathode PKR 261 Output signal: Sensor error above 9.5 V 9.5 V Output signal: Sensor error below 0.5 V 0.5 V Output signal: Pressure range V V Output signal: Minimum load 10 kohm 10 kohm Bakeout temperature 150 C, electronic removed 150 C, electronic removed Seal FPM Ag, Cu Pressure max. 10 bar 10 bar Feedthrough Al 2 O 3, Glass Al 2 O 3, Glas Feature interior FPM metal sealed sealed Flange Stainless steel Stainless steel Accuracy: mbar +/- 30 % +/- 30 % Filament Tungsten Tungsten Filament Molybdenum Molybdenum range max mbar 1000 mbar range min mbar mbar Sensor cable length 300 m 300 m Temperature: Operating ºC ºC, up to 150 ºC on flange (horizontal installation) Temperature: Storage ºC ºC Supply: Voltage V DC V DC Supply: Power consumption max. 2 W 2 W Volume 20 cm 3 20 cm 3 Repeatability: mbar +/- 5 % +/- 5 % Active Pirani/ cold cathode PKR 251 Active Pirani/ cold cathode PKR 261 Flange (in) DN 25 ISO-KF DN 25 ISO-KF Weight 700 g 700 g Order number PT R PT R Flange (in) DN 40 ISO-KF DN 40 ISO-KF Weight 700 g 750 g Order number PT R PT R Flange (in) DN 40 CF-F DN 40 CF-F Weight 950 g 995 g Order number PT R PT R Mess- und Steuergeräte controll units Accessories Sensor cable, 3 m PT T PT T Mating connector for compact gauge B MA B MA Page Page

55 Vacuum analysis and measurement and control units ActiveLine ActiveLine Active hot cathode s IMR 265, ( mbar) ActiveLine range from to 1000 mbar Two gauge heads (Pirani and hot cathode) in a single case Highly accurate Excellent reproducibility Automatic cathode protection A single flange from atmosphere to UHV Corrosion-resistant Dimensions Active hot cathode IMR 265, DN 16 ISO-KF Active hot cathode IMR 265, DN 16 CF-F Active hot cathode IMR 265, DN 25 ISO-KF Active hot cathode IMR 265, DN 40 ISO-KF Active hot cathode IMR 265, DN 40 CF-F Page Page

56 Technical data Active hot cathode IMR 265 Output signal: Sensor error 0.5 V Output signal: Pressure range Ioni 1,5-7,5 V Output signal: Pressure range Pirani 8,5-9,75 V Output signal: Minimum load 10 kohm Bakeout temperature 150 C, electronic removed Pressure max. 5 bar Electron collector Stainless steel Flange Stainless steel Filament holder Molybdenum, Platinum Ion collector Stainless steel Isolator Glass Filament iridium yttriated range max mbar range min mbar Sensor cable length 100 m Pirani measurement element Copper, Tungsten Temperature: Operating ºC Temperature: Storage C Supply: Voltage V DC Supply: Power consumption max. 16 W Volume 20 cm 3 Repeatability: mbar 30 % reading Repeatability: mbar 2 % reading Active hot cathode IMR 265 Flange (in) DN 16 ISO-KF Weight 270 g Order number PT R Flange (in) DN 25 ISO-KF Weight 285 g Order number PT R Flange (in) DN 40 ISO-KF Weight 315 g Order number PT R Flange (in) DN 16 CF-F Weight 400 g Order number PT R Flange (in) DN 40 CF-F Weight 550 g Order number PT R Mess- und Steuergeräte controll units Accessories Sensor cable, 3 m PT T Mating connector for compact gauge B MA Page Page

57 Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Pirani/Bayard-Alpert PBR 260, ( mbar) ActiveLine range from to 1000 mbar Two gauge heads (Pirani and BA hot cathode) in a single case Bayard-Alpert sensor ON/OFF automatically controlled by Pirani sensor Highly accurate A single flange from atmosphere to UHV Corrosion-resistant Dimensions Active Pirani/Bayard-Alpert PBR 260, DN 25 ISO-KF Active Pirani/Bayard-Alpert PBR 260, DN 40 ISO-KF Active Pirani/Bayard-Alpert PBR 260, DN 40 CF-R Page Page

58 Technical data Active Pirani/ Bayard-Alpert PBR 260, DN 25 ISO-KF Active Pirani/ Bayard-Alpert PBR 260, DN 40 ISO-KF Active Pirani/ Bayard-Alpert PBR 260, DN 40 CF-R Flange (in) DN 25 ISO-KF DN 40 ISO-KF DN 40 CF-R Output signal: Sensor error below 0.5 V 0.5 V 0.5 V Output signal: Pressure range V 0, V 0, V Output signal: Minimum load 10 kohm 10 kohm 10 kohm Bakeout temperature 150 C, electronic removed 150 C, electronic removed 150 C, electronic removed Pressure max. 2 bar 2 bar 2 bar Flange Stainless steel Stainless steel Stainless steel Accuracy: mbar 15 % reading 15 % reading 15 % reading Weight 285 g 315 g 550 g Filament Tungsten Tungsten Tungsten Filament iridium yttriated iridium yttriated iridium yttriated Materials in contact with media Cu, W, glass, NiFe, Mo, Stainless Steel, NiCr Cu, W, glass, NiFe, Mo, Stainless steel, NiCr Cu, W, glass, NiFe, Mo, Stainless steel, NiCr range max. 1,000 mbar 1000 mbar 1000 mbar range min mbar mbar mbar Sensor cable length 100 m 100 m 100 m Temperature: Operating ºC ºC ºC Temperature: Storage C C C Supply: Voltage V DC V DC V DC Supply: Power consumption max. 16 W 16 W 16 W Volume 24 cm 3 24 cm 3 25 cm 3 Repeatability: mbar 5 % reading 5 % reading 5 % reading Order number ActiveLine s PT R PT R PT R Mess- und Steuergeräte controll units Accessories Sensor cable, 3 m PT T PT T PT T Mating connector for compact gauge B MA B MA B MA Page Page

59 Vacuum analysis and measurement and control units ActiveLine ActiveLine TPG 201, Pirani manual measurement unit ActiveLine Battery-operated manual measurement unit range from to 1000 mbar Sensor and display in a single case Scope of delivery: Battery not included Dimensions B A F C E D TPG 201 A B C D E F TPG mm 60 mm 43.5 mm 30 mm 22 mm 25 mm Page Page

60 Technical data TPG 201, Pirani manual measurement unit Dimensions w x h x d 120 x 60 x 42 mm Connection: Vacuum side DN 16 KF Battery type 9 V Alkaline E bloc/6 LR61/6 AM 6 Litium E bloc Seal Metal Accuracy mbar: % of measurement ca. 30 Accuracy mbar: % of measurement ca. 10 Weight kg Materials in contact with media Nickel, stainless steel, tungsten, glassfeedthroughs range max mbar range min mbar Method of measurement Pirani Protection category IP 20 Temperature: Operating C Order number TPG 201, Pirani manual measurement unit PT G Mess- und Steuergeräte controll units Page Page

61 Vacuum analysis and measurement and control units ActiveLine ActiveLine TPG 261, controller for 1 ActiveLine For one Easy to operate Involatile parameter memory Auto-diagnostics For operation of all s Dimensions TPG 261, controller for 1 Page Page

62 Technical data TPG 261, controller for 1 Connections for 1 Display rate 10 1/s Error signal: Working contact, potential-free 1 piece Error singal: Switching voltage max. 60 V DC Filter time constant 1.2 / 0.4 / 0.02 s Weight 1.1 kg range max mbar range min mbar rate 50 1/s Mains requirement: frequency (range) 50/60 Hz Mains requirement: power consumption 45 VA Mains requirement: voltage (range) V Set point: Voltage max. 60 V DC Set point: Current max. 1 A Set point: Changeover contact, potential-free 2 pieces Interface RS-232-C Protection category IP 30 Safety EN / EN / EN / IEC1010 Signal output: Measuring value, analog 0-10 V Temperature: Operating ºC Temperature: Storage ºC Mess- und Steuergeräte Order number TPG 261, controller for 1 PT G Accessories Sensor cable, 3 m PT T Sensor cable, 5 m PT T Sensor cable, 10 m PT T Sensor cable, 15 m PT T Sensor cable, 20 m PT T Sensor cable, 25 m PT T Sensor cable, 30 m PT T Sensor cable, 35 m PT T Sensor cable, 40 m PT T Sensor cable, 45 m PT T Sensor cable, 50 m PT T controll units Page Page

63 Vacuum analysis and measurement and control units ActiveLine ActiveLine TPG 262, controller for 2 s ActiveLine For two s Easy to operate Involatile parameter memory Auto-diagnostics For operation of all s Dimensions TPG 262, controller for 2 s Page Page

64 Technical data TPG 262 DualGauge TM controller Connections for 2 Display rate 10 1/s Automatic changeover: Pirani-cold cathode mbar Error signal: Working contact, potential-free 1 piece Filter time constant 1,2 / 0,4 / 0,02 s Weight 1.1 kg range max mbar range min mbar rate 50 1/s Mains requirement: frequency (range) 50/60 Hz Mains requirement: power consumption 45 VA Mains requirement: voltage (range) V Set point: Voltage max. 60 V DC Set point: Current max. 1 A Set point: Changeover contact, potential-free 4 pieces Interface RS-232-C Protection category IP 30 Safety EN / EN / EN / IEC1010 Signal output: Measuring value, analog 0-10 V Temperature: Operating ºC Temperature: Storage ºC Mess- und Steuergeräte Order number TPG 262, controller for 2 s PT G Accessories Sensor cable, 3 m PT T Sensor cable, 5 m PT T Sensor cable, 10 m PT T Sensor cable, 15 m PT T Sensor cable, 20 m PT T Sensor cable, 25 m PT T Sensor cable, 30 m PT T Sensor cable, 35 m PT T Sensor cable, 40 m PT T Sensor cable, 45 m PT T Sensor cable, 50 m PT T controll units Page Page

65 Vacuum analysis and measurement and control units ActiveLine ActiveLine SingleGauge TM measurement equipment ActiveLine SingleGauge measurement unit TPG 261 Active Pirani TPR 280 Flange size: DN 16 ISO-KF SingleGauge measurement unit TPG 261 Active cold cathode IKR 251 Flange size: DN 25 ISO-KF Dimensions SingleGauge measurement unit TPG 261 Active Pirani/cold cathode PKR 251 Flange size: DN 25 ISO-KF SingleGauge TM measurement equipment SingleGauge measurement unit TPG 261 Active Pirani/Bayard-Alpert PBR 260 Flange size: DN 25 ISO-KF Page Page

66 Technical data SingleGauge TM measurement equipment TPG 261, 1 TPR 280, 3 m cable SingleGauge TM measurement equipment TPG 261, 1 IKR 251, 3 m cable SingleGauge TM measurement equipment TPG 261, 1 PKR 251, 3 m cable SingleGauge TM measurement equipment TPG 261, 1 PBR 260, 3 m cable Connections for range max. 1,000 mbar 0.01 mbar 1000 mbar 1,000 mbar range min mbar mbar mbar mbar Gauge head 1 TPR IKR PKR PBR 260 Mains requirement: voltage (range) V, 50/60 Hz V, 50/60 Hz V, 50/60 Hz V, 50/60 Hz Interface RS-232-C RS-232-C RS-232-C RS-232-C Order number SingleGauge TM measurement equipment PT T PT T PT T PT T Accessories Centering ring with poral filter, FPM/stainless steel, DN 16 ISO-KF PF T controll units Mess- und Steuergeräte Page Page

67 Vacuum analysis and measurement and control units ActiveLine ActiveLine DualGauge TM measurement equipment ActiveLine DualGauge measurement unit TPG 262 Active Pirani TPR 280 Flange size: DN 16 ISO-KF Dimensions DualGauge measurement unit TPG 262 Active Pirani TPR 280 Flange size: DN 16 ISO-KF Active cold cathode IKR 251 Flange size: DN 25 ISO-KF DualGauge measurement unit TPG 262 Active Pirani/cold cathode PKR 251 Flange size: DN 25 ISO-KF DualGauge TM measurement equipment DualGauge measurement unit TPG 262 Active Pirani TPR 280 Flange size: DN 16 ISO-KF Active Pirani/cold cathode PKR 251 Flange size: DN 25 ISO-KF Page Page

68 Technical data DualGauge TM measurement equipment TPG 262, 2 TPR 280, 3 m cable DualGauge TM measurement equipment TPG 262, 1 TPR 280, 1 IKR 251, 3 m cable DualGauge TM measurement equipment TPG 262, 2 PKR 251, 3 m cable DualGauge TM measurement equipment TPG 262, 1 TPR 280, 1 PKR 251, 3 m cable Connections for range max. 1,000 mbar 1,000 mbar 1,000 mbar 1,000 mbar range min mbar mbar mbar mbar Gauge head 2 TPR TPR 280, 1 IKR PKR TPR 280, 1 PKR 251 Mains requirement: voltage (range) V, 50/60 Hz V, 50/60 Hz V, 50/60 Hz V, 50/60 Hz Interface RS-232-C RS-232-C RS-232-C RS-232-C Order number DualGauge TM measurement equipment PT T PT T PT T PT T Accessories Centering ring with poral filter, FPM/stainless steel, DN 16 ISO-KF PF T PF T - PF T Mess- und Steuergeräte controll units Page Page

69 Vacuum analysis and measurement and control units ActiveLine ActiveLine Maxi Gauge TM TPG 256 A, controller for 6 s ActiveLine For operating 6 ActiveLine s With RS-232-C and RS-422 interfaces, uninsulated Dimensions Maxi Gauge TM TPG 256 A, controller for 6 s Page Page

70 Technical data TPG 256 A MaxiGauge TM measurement unit Connections for 6 (max. 3 IMR 265 / PBR 260 / CMR 27x) TPG 256 A MaxiGauge TM measurement unit 6 (max. 3 IMR 265 / PBR 260 / CMR 27x) Display rate 4 1/s 4,0 1/s Error signal: Working contact, potential-free 1 piece 1 piece Error singal: Switching voltage max. 60 V DC 60 V DC Error signal: Switching current max. 3 A 3 A Filter time constant 2.1/0.32/0.1 s 2.1/0.32/0.1 s Weight 2.1 kg 2.1 kg range max mbar 5,5E+04 mbar range min mbar 5,0E-11 mbar rate 100 1/s 100 1/s Mains requirement: frequency (range) Hz Hz Mains requirement: power consumption 60 VA 6,0E+01 VA Mains requirement: voltage (range) V V Set point: Voltage max. 60 V DC 60 V DC Set point: Current max. 3 A 3 A Set point: Changeover contact, potential-free 6 pieces 6,0 pieces Switching voltage 240 V with RI V with RI 256 Interface RS-232-C, RS-422 RS-232-C, RS-422, RS-422 isolated, RS-485 isolated Protection category IP30 IP30 Safety EN / IEC 1010, EN60950, EN / EN / IEC 1010, EN60950, EN &2 EN Signal output: Output resistance 660 Ohm 660 Ohm Signal output: Measuring value, analog 0-10 V DC 0-10 V DC Temperature: Operating ºC ºC Temperature: Storage ºC ºC Mess- und Steuergeräte controll units Order number Maxi Gauge TM TPG 256 A, controller for 6 s PT G PT G Accessories Sensor cable, 3 m PT T PT T Sensor cable, 5 m PT T PT T Sensor cable, 10 m PT T PT T Sensor cable, 15 m PT T PT T Sensor cable, 20 m PT T PT T Sensor cable, 25 m PT T PT T Sensor cable, 30 m PT T PT T Sensor cable, 35 m PT T PT T Sensor cable, 40 m PT T PT T Sensor cable, 45 m PT T PT T Sensor cable, 50 m PT T PT T Page Page

71 Vacuum analysis and measurement Vacuum measurement and control units ModulLine For applications in research & development! What is ModulLine? The ModulLine series includes three TPR Pirani gauge heads with a measurement range from 1,000 to mbar and three IKR cold cathode gauge heads with a measurement range of to mbar. Since the gauge heads do not contain any electronics, they are suitable for employment in high-radiation locations. Advantages at a glance Rugged and well proven design Basically uneffected by radioactivity and electromagnetic fields Is being used on all large accelerators Page 520

72 Four different interface options (Profibus) Metal-sealed versions of the sensors are available Automatic switchover from Pirani to cold cathode sensor Applications For use in critical areas like high radiation, for example For UHV Two measurement boards are possible Up to 4 gauge heads max. can be connected Basic unit TPG 300 Up to three plug-ins board Cable matching the respective gauge heads Messkarte board One interface and relay board Interfaces and a relay board Profibus is possible TPG 300 control unit for ModulLine vacuum gauges Control Units Complete measurement units Power supply cards Interface- and relay board Scheme measurement unit Page 521

73 Vacuum analysis and measurement Vacuum measurement and control units Complete measurement units containing basic unit and the follwing measurement and relay cards Pirani Pirani/Cold cathode combinded RS-232-C-Interface and relay RS-232-C-Interface and relay 1 = one card 2 = two cards PT G PT G PT G PI 300 D CP 300 C9 CP 300 C10 IF 300 A IF 300 B PT G PT G PT G PT G PT G PT G PT G PT G PT G PT G PT G PT G PT G PT G PT G PT G PT G PT G Page 522

74 Notes Control Units Page 523

75 Vacuum analysis and measurement and control units ModulLine ModulLine Pirani gauge heads ModulLine TPR 010 For general applications TPR 017 For corrosive media TPR 018 For UHV Dimensions TPR 010 TPR 017 TPR 018 TPR 018, UHV Page Page

76 Technical data TPR 010 TPR 017 TPR 018 Bakeout temperature 100 C 250 C 250 C Operating temperature, high temperature sensor ºC ºC cable Operating temperature, standard sensor cable 0-70 ºC 0-80 ºC 0-80 ºC Weight 0.14 kg 0.6 kg 0.6 kg Isolator FPM Al 2 O 3 Al 2 O 3 range max mbar 1000 mbar 1000 mbar range min mbar mbar mbar Filament/holder T/Ni Ni/Ni T/Ni Chamber wall, inside AlSiMg Stainless steel Stainless steel Protective filter Sintered bronze - - Radiation resistance Gy Gy TPR 010 TPR 017 TPR 018 Flange (in) DN 10 ISO-KF Order number PT R Flange (in) DN 16 ISO-KF DN 16 ISO-KF Order number PT R PT R Flange (in) DN 16 CF-F DN 16 CF-F Order number PT R PT R Flange (in) DN 40 CF-F Order number PT R Accessories Sensor cable, TPR 010, 3 m, 80 C PT T Sensor cable, TPR 010, 6 m, 80 C PT T Sensor cable, TPR 017/018, 3 m, 80 C PT T PT T Sensor cable, TPR 017/018, 6 m, 80 C PT T PT T Mess- und Steuergeräte controll units Page Page

77 Vacuum analysis and measurement and control units ModulLine ModulLine Cold cathode gauge heads ModulLine IKR 050 coaxial For general applications IKR 060 coaxial For UHV Radiation-resistant Dimensions IKR 070 coaxial For UHV Radiation-resistant IKR 050 coaxial IKR 050 coaxial IKR 060 coaxial IKR 070 coaxial Page Page

78 Technical data IKR 050 coaxial IKR 060 coaxial IKR 070 coaxial Bakeout temperature 150 C 250 C 250 C Operating temperature, high temperature sensor ºC ºC - cable Operating temperature, standard sensor cable 5-80 ºC 5-80 ºC 5-80 ºC Internal seal FPM Silver Silver Flange Stainless steel Stainless steel Stainless steel Weight 0.6 kg 0.85 kg 0.85 kg Isolator Al 2 O 3 Al 2 O 3 Al 2 O 3 range max mbar mbar mbar range min mbar mbar mbar Radiation resistance Gy Gy IKR 050 coaxial IKR 060 coaxial IKR 070 coaxial Flange (in) DN 25 ISO-KF Weight 0.6 kg Order number PT R Flange (in) DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF Weight 0.6 kg 0.6 kg 0.6 kg Order number PT R PT R PT R Flange (in) DN 40 CF-F DN 40 CF-F DN 40 CF-F Weight 0.85 kg 0.85 kg 0.85 kg Order number PT R PT R PT R Accessories Sensor cable, IKR 050/060, 3 m, 80 C PT T PT T Sensor cable, IKR 050/060, 6 m, 80 C PT T PT T Sensor cable, IKR 070, 3 m, 80 C PT T Sensor cable, IKR 070, 6 m, 80 C PT T Mess- und Steuergeräte controll units Page Page

79 Vacuum analysis and measurement and control units ModulLine ModulLine Accessories ModulLine Sensor cables Extension for sensor cables High-temperature sensor cables Sensor cables Order number Sensor cable, TPR 017/018, 3 m, 80 C PT T Sensor cable, TPR 017/018, 6 m, 80 C PT T Sensor cable, TPR 017/018, 10 m, 80 C PT T Sensor cable, TPR 017/018, 15 m, 80 C PT T Sensor cable, TPR 017/018, 20 m, 80 ºC PT T Sensor cable, TPR 017/018, 25 m, 80 C PT T Sensor cable, TPR 017/018, 30 m, 80 C PT T Sensor cable, TPR 017/018, 35 m, 80 C PT T Sensor cable, TPR 017/018, 40 m, 80 C PT T Sensor cable, TPR 017/018, 45 m, 80 C PT T Sensor cable, TPR 017/018, 50 m, 80 PT T Sensor cable, TPR 010, 2 m, 80 C PT T Sensor cable, TPR 010, 3 m, 80 C PT T Sensor cable, TPR 010, 6 m, 80 C PT T Sensor cable, TPR 010, 30 m, 80 C PT T Sensor cable, TPR 010, 40 m, 80 C PT T Sensor cable, TPR 010, 50 m, 80 C PT T Sensor cable, TPR 010, 10 m, 80 C PT T Sensor cable, TPR 010, 15 m, 80 C PT T Sensor cable, TPR 010, 20 m, 80 C PT T Sensor cable, TPR 010, 25 m, 80 C PT T Sensor cable, TPR 010, 35 m, 80 C PT T Sensor cable, TPR 010, 45 m, 80 C PT T Sensor cable, IKR 050/060, 3 m, 80 C PT T Sensor cable, IKR 050/060, 6 m, 80 C PT T Sensor cable, IKR 050/060, 10 m, 80 C PT T Sensor cable, IKR 050/060, 30 m, 80 C PT T Sensor cable, IKR 050/060, 15 m, 80 C PT T Sensor cable, IKR 050/060, 20 m, 80 C PT T Sensor cable, IKR 050/060, 25 m, 80 C PT T Sensor cable, IKR 050/060, 35 m, 80 C PT T Sensor cable, IKR 050/060, 40 m, 80 C PT T Sensor cable, IKR 050/060, 45 m, 80 C PT T Sensor cable, IKR 050/060, 50 m, 80 C PT T Sensor cable, IKR 070, 3 m, 80 C PT T Sensor cable, IKR 070, 6 m, 80 C PT T Sensor cable, IKR 070, 10 m, 80 C PT T Sensor cable, IKR 070, 15 m, 80 C PT T Sensor cable, IKR 070, 20 m, 80 C PT T Sensor cable, IKR 070, 30 m, 80 C PT T Sensor cable, IKR 070, 40 m, 80 C PT T Sensor cable, IKR 070, 45 m, 80 C PT T Sensor cable, IKR 070, 50 m, 80 C BP T Page Page

80 Extension for sensor cables Extension for sensor cable, TPR 010/017/018, 10 m, 80 ºC Extension for sensor cable, TPR 010/017/018, 20 m, 80 C Extension for sensor cable, TPR 010/017/018, 30 m, 80 C Extension for sensor cable, TPR 010/017/018, 40 m, 80 C Extension for sensor cable, TPR 010/17/018, 50 m, 80 C Order number PT T PT T PT T PT T PT T High-temperature sensor cables High-temperature sensor cable, TPR 017/018, 3 m, 250 C High-temperature sensor cable, TPR 017/018, 6 m, 250 C High-temperature sensor cable, TPR 017/018, 10 m, 250 C High-temperature sensor cable, TPR 017/018, 15 m, 250 C High-temperature sensor cable, TPR 017/018, 20 m, 250 C High-temperature sensor cable, IKR 050/060, 3 m, 250 C High-temperature sensor cable, IKR 050/060, 6 m, 250 C High-temperature sensor cable, IKR 050/060, 10 m, 250 C High-temperature sensor cable, IKR 050/060, 15 m, 250 C High-temperature sensor cable, IKR 050/060, 20 m, 250 C Order number PT T PT T PT T PT T PT T PT T PT T PT T PT T PT T Mess- und Steuergeräte controll units Page Page

81 Vacuum analysis and measurement and control units ModulLine ModulLine Pirani board ModulLine Pirani measurement board PI 300 D For 2 TPR 010/018 range from 1000 to mbar Pirani measurement board PI 300 DN For 2 TPR 017 range from 1000 to mbar Dimensions Pirani board Page Page

82 Technical data Pirani measurement board PI 300 D, for 2 TPR 010/018s Pirani measurement board PI 300 DN, for 2 TPR 017s Number of measuring circuits 2 2 For gauge TPR 010, TPR 018 TPR 017 Weight 0.14 kg 0.14 kg range max mbar 1000 mbar range min mbar mbar Sensor cable length 100 m 100 m board Pirani measurement board Pirani board Reaction time of the output signal: Decay 600 ms 600 ms Reaction time of the output signal: Rise 50 ms 50 ms Order number Pirani board PT T PT T controll units Mess- und Steuergeräte Page Page

83 Vacuum analysis and measurement and control units ModulLine ModulLine Cold cathode measurement board ModulLine Cold cathode measurement board PE 300 DC9 range from to mbar For 2 IKR 050 Dimensions Cold cathode measurement board Page Page

84 Technical data Cold cathode measurement board PE 300 DC9, for 2 IKR 050s Number of measuring circuits 2 For gauge IKR 050 Weight 0.26 kg range max mbar range min mbar Sensor cable length 100 m board Cold cathode measurement board Reaction time of the output signal: Rise 16 ms Order number Cold cathode measurement board PT T controll units Mess- und Steuergeräte Page Page

85 Vacuum analysis and measurement and control units ModulLine ModulLine Pirani/cold cathode measurement board ModulLine CP 300 T11L For 1 TPR 010/018 and 1 IKR 070 Max. sensor cable length: 500 m range from to 1000 mbar Dimensions CP 300 C9 For 1 TPR 010/018 and 1 IKR 050 range from 1000 to mbar CP 300 T11 For 1 TPR 010/018 and 1 IKR 070 range from 1000 to mbar CP 300 C10 For 1 TPR 010/018 and 1 IKR 060 range from 1000 to mbar Pirani/cold cathode measurement board Page Page

86 Technical data Pirani/cold cathode measurement board CP 300 T11L, for 1 TPR 010/018, 1 IKR 070 Pirani/cold cathode measurement board CP 300 C9, for 1 TPR 010/018, 1 IKR 050 Pirani/cold cathode measurement board CP 300 T11, for 1 TPR 010/018, 1 IKR 070 Pirani/cold cathode measurement board CP 300 C10, for 1 TPR 010/018, 1 IKR 060 Number of measuring circuits 2 1 each 1 each 1 each For gauge TPR 010, TPR 018, IKR 070 TPR 010, TPR 018, IKR 050 TPR 010, TPR 018, IKR 070 TPR 010, TPR 018, IKR 060 Weight 0.21 kg 0.21 kg 0.25 kg 0.23 kg range max mbar 1000 mbar 1000 mbar 1000 mbar range min mbar mbar mbar mbar Sensor cable length 500 m 100 m 100 m 100 m board - Pirani/cold cathode measurement board Pirani/cold cathode measurement board Pirani/Cold cathode measurement board Reaction time of the output signal: Rise 10 ms 10 ms 50 ms 50 ms Order number Pirani/cold cathode measurement board PT T PT T PT T PT T Mess- und Steuergeräte controll units Page Page

87 Vacuum analysis and measurement and control units ModulLine ModulLine Interface and relay board ModulLine Dimensions Interface and relay board Page Page

88 Technical data Interface and relay board IF 300 A, RS-232-C, 45 W, 75 VA Interface and relay board IF 300 B, RS-232-C, 120 W, 1,000 VA Interface and relay board IF 300 C, RS-422, 50 V AC / DC Interface and relay board IF 300 P, Profibus-DP, 45 W, 75 VA Weight 0.14 kg 0.15 kg 0.14 kg 0.16 kg Relay: Connector 15 pole (pins) D-Sub GdsA-H, DIN D-Sub D-Sub Relay: Number 5 pieces 5 pieces 5 pieces 5 pieces Relay: Switching capacity 45 W, 75 VA 120 W, 1000 VA 45 W, 75 VA 45 W, 75 VA Relay: Switching voltage 30 V DC / 50 V AC 30 V DC / 50 V AC / DC 50 V AC / DC 250 V AC Relay: Switching current 1.5 A 4 A 1.5 A 1.5 A Relay: Changeover contacts, potential-free, per relay 1 piece 1 piece 1 piece 1 piece Relay: Resistance (with connector) 125 mohm 70 mohm 125 mohm 125 mohm Interface RS-232-C RS-232-C RS-422 Profibus-DP Interface: Connection D-sub connector, 9-pole, pins Cable with D-sub connector, 9-pole, D-sub connector, 9-pole, sockets D-sub connector, 9-pole, pins pins Interface: Baud rates 300, 1200, 2400, 4800, , 1200, 2400, 4800, , 1200, 2400, 4800, Mbaud Interface: Data format ASCII, 1 start bit, 8 data bits, 1 stop bit, no parity bit ASCII, 1 start bit, 8 data bits, 1 stop bit, no parity bit ASCII, 1 start bit, 8 data bits, 1 stop bit, no parity bit Interface: Cable length max. 30 m 30 m 1200 m 1200 m Interface: Type RS-232-C RS-232-C RS-422 Profibus-DP asynchronus asynchronus asynchronus - Mess- und Steuergeräte Order number Interface and relay board PT T PT T PT T PT T Accessories D-Sub mating connector, female, 15-pin, PT T PT T for IF 300 A/C, relay output D-Sub mating connector, female, for IF 300 A, RS-232-C PT T Interface cable, for IF 300 B, RS-232-C, 0.4 m PT T Relay connector, complete, for IF 300 B PT T controll units Page Page

89 Vacuum analysis and measurement and control units ModulLine ModulLine TPG 300, basic unit ModulLine Basic unit with power supply and 3 free slots for measurement, interface and relay boards Dimensions TPG 300, basic unit Page Page

90 Technical data TPG 300, Basic unit Display rate 5 1/s Error display 1 LED, red Filter time constant 16 ms, 160 ms (standard), 1.6 s Weight: without boards 1.4 kg Limit frequency 10 Hz, 1 Hz (standard), 0.1 Hz Unit of measure mbar, Torr, Pa range max mbar range min mbar rate 100 1/s Measured value display 15 mm high numbers Mains requirement: frequency (range) Hz Mains requirement: power consumption 55 VA Mains requirement: voltage (range) V AC Safety IEC 384, class 1, VDE 0411, part 2.80 Temperature: Operating ºC Temperature: Storage ºC Order number TPG 300, basic unit PT T Mess- und Steuergeräte Accessories Blank panel for measurement board PT Blank panel, for IF 300 PT controll units Page Page

91 Vacuum analysis and measurement and control units ModulLine ModulLine TPG 300, complete units with measurement boards and power cords ModulLine Dimensions TPG 300, basic unit Technical data TPG 300, complete units with measurement boards and power cords Display rate 5 1/s Error display 1 LED, red Filter time constant 16 ms, 160 ms (standard), 1.6 s Weight: without boards 1.4 kg Limit frequency 10 Hz, 1 Hz (standard), 0.1 Hz Unit of measure mbar, Torr, Pa rate 100 1/s Measured value display 15 mm high numbers Mains requirement: frequency (range) Hz Mains requirement: power consumption 55 VA Mains requirement: voltage (range) V AC Safety IEC 384, class 1, VDE 0411, part 2.80 Temperature: Operating ºC Temperature: Storage ºC Page Page

92 Technical data TPG 300, complete measurement unit, incl. PI 300 D TPG 300, complete measurement unit incl. PI 300 D, IF 300 A TPG 300, complete measurement unit, incl. PI 300 D, IF 300 B range max mbar 1000 mbar 1000 mbar range min mbar mbar mbar board PI 300 D for 2 Pirani Gauge TPR 010/018 PI 300 D for 2 Pirani Gauge TPR 010/018 PI 300 D for 2 Pirani Gauge TPR 010/018 Relay: Switching voltage - 30 V DC / 50 V AC 30 V DC / 250 V AC Interfaces - RS-232-C, IF 300 A RS-232-C, IF 300 B Order number TPG 300, complete units with measurement boards and power cords PT G PT G PT G Technical data TPG 300, complete measurement unit, incl. 2 PI 300 D TPG 300, complete measurement unit incl. 2 PI 300 D, IF 300 A TPG 300, complete measurement unit, incl. 2 PI 300 D, IF 300 B range max mbar 1000 mbar 1000 mbar range min mbar mbar mbar board 2 PI 300 D for 4 Pirani Gauge TPR 010/018 2 PI 300 D for 4 Pirani Gauge TPR 010/018 2 PI 300 D for 4 Pirani Gauge TPR 010/018 Relay: Switching voltage - 30 V DC / 50 V AC 30 V DC / 250 V AC Interfaces - RS-232-C, IF 300 A RS-232-C, IF 300 B Mess- und Steuergeräte controll units Order number TPG 300, complete units with measurement boards and power cords PT G PT G PT G Technical data TPG 300, complete measurement unit, incl. CP 300 C10 TPG 300, complete measurement unit incl. CP 300 C10, IF 300 A TPG 300, complete measurement unit, incl. CP 300 C10, IF 300 B range max mbar 1000 mbar 1000 mbar range min mbar mbar mbar board CP 300 C10 for 1 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 060 CP 300 C10 for 1 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 060 CP 300 C10 for 1 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 060 Relay: Switching voltage - 30 V DC / 50 V AC 30 V DC / 250 V AC Interfaces - RS-232-C, IF 300 A RS-232-C, IF 300 B Order number TPG 300, complete units with measurement boards and power cords PT G PT G PT G Page Page

93 Vacuum analysis and measurement and control units ModulLine ModulLine TPG 300, complete units with measurement boards and power cords ModulLine Dimensions TPG 300, basic unit Technical data TPG 300, complete units with measurement boards and power cords Display rate 5 1/s Error display 1 LED, red Filter time constant 16 ms, 160 ms (standard), 1.6 s Weight: without boards 1.4 kg Limit frequency 10 Hz, 1 Hz (standard), 0.1 Hz Unit of measure mbar, Torr, Pa rate 100 1/s Measured value display 15 mm high numbers Mains requirement: frequency (range) Hz Mains requirement: power consumption 55 VA Mains requirement: voltage (range) V AC Safety IEC 384, class 1, VDE 0411, part 2.80 Temperature: Operating ºC Temperature: Storage ºC Page Page

94 Technical data TPG 300, complete measurement unit, incl. PI 300 D, CP 300 C10 TPG 300, complete measurement unit, incl. PI 300 D, CP 300 C10, IF 300 A TPG 300, complete measurement unit, incl. PI 300 D, CP 300 C10, IF 300 B range max mbar 1000 mbar 1000 mbar range min mbar mbar mbar board PI 300 D, CP 300 C10 for 3 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 060 PI 300 D, CP 300 C10 for 3 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 060 PI 300 D, CP 300 C10 for 3 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 060 Relay: Switching voltage - 30 V DC / 50 V AC 30 V DC / 250 V AC Interfaces - RS-232-C, IF 300 A RS-232-C, IF 300 B Order number TPG 300, complete units with measurement boards and power cords Technical data TPG 300, complete measurement unit incl. CP 300 C9 PT G PT G PT G TPG 300, complete measurement unit incl. CP 300 C9, IF 300 A TPG 300, complete measurement unit, incl. CP 300 C9, IF 300 B range max mbar 1000 mbar 1000 mbar range min mbar mbar mbar board CP 300 C9 for 1 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 050 CP 300 C9 for 1 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 050 CP 300 C9 for 1 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 050 Relay: Switching voltage - 30 V DC / 50 V AC 30 V DC / 250 V AC Interfaces - RS-232-C, IF 300 A RS-232-C, IF 300 B Mess- und Steuergeräte controll units Order number TPG 300, complete units with measurement boards and power cords PT G PT G PT G Page Page

95 Vacuum analysis and measurement and control units ModulLine ModulLine TPG 300, complete units with measurement boards and power cords ModulLine Dimensions TPG 300, basic unit Technical data TPG 300, complete units with measurement boards and power cords Display rate 5 1/s Error display 1 LED, red Filter time constant 16 ms, 160 ms (standard), 1.6 s Weight: without boards 1.4 kg Limit frequency 10 Hz, 1 Hz (standard), 0.1 Hz Unit of measure mbar, Torr, Pa rate 100 1/s Measured value display 15 mm high numbers Mains requirement: frequency (range) Hz Mains requirement: power consumption 55 VA Mains requirement: voltage (range) V AC Safety IEC 384, class 1, VDE 0411, part 2.80 Temperature: Operating ºC Temperature: Storage ºC Page Page

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