A3H series. Energy and cost efficient solutions for the most demanding applications. Multi-stage. Roots pumps
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1 A3H series Energy and cost efficient solutions for the most demanding applications Page 200 / Part 3.
2 3. Vacuum generation / / Harsh duty applications / A3H series A3H series Harsh duty processes in semiconductor production always provide new challenges for vacuum pumps. Based on the proven multi-stage Roots technology, Pfeiffer Vacuum offers pump solutions with the A3H series with different pumping speeds for 300 mm wafer semiconductor fabs with 45 nm technology nodes and less. Through the use of corrosion-resistant materials and a high gas throughput, this pump series is ideal for use in demanding VD processes. A high particle tolerance and condensation resistance distinguishes the pumps of the A3H series. Their compact and modular construction allows for space-saving integration in existing systems. ong maintenance intervals and low energy consumption provide for low operating costs. ustomer benefits Reduced operating costs through low energy consumption Reduced space needed through compact construction Proven durability High process-safety onger maintenance intervals through improved particle tolerance and condensation resistance Typical applications Metal etching VD processes (PEVD, AVD, PVD) AD Diffusion processes Epitaxy emiconductors Part 3. / Page 20
3 3. Vacuum generation / / Harsh duty applications / A3H series A3H series onger maintenance intervals through improved particle tolerance and condensation resistance. Optimal efficiency for demanding VD processes through the use of corrosion-resistant materials and high gas throughput Reduced operating costs through low energy consumption Reduced space needed through compact design ow noise emission and low vibration level ompliant with E and EMI 2 standards Dimensions Inlet DN Inlet DN Outlet DN Inlet DN 00 or DN Outlet DN A 803 H 98 28, Outlet DN A 503 H Page 202 / Part 3.
4 3. Vacuum generation / / Harsh duty applications / A3H series Technical data (general) A 803 H A 503 H A 803 H Flange (out) DN 40 IO-KF DN 40 IO-KF DN 40 IO-KF DN 40 IO-KF Flange (in) DN 50 IO-K DN 00 IO-K DN 00 IO-K DN 00 IO-K Dimensions ( x W x H) 907 x 390 x 585 mm 894 x 390 x 880 mm,058 x 390 x 986 mm,058 x 390 x 986 mm ooling Water Water Water Water Noise level, max. 65 db (A) 68 db (A) 69 db (A) 69 db (A) ontinuous inlet flow, max. 50 slm 00 slm 00 slm 70 slm ooling water flow, min. 2 l/mn 2.5 l/mn 2.5 l/mn 2.5 l/mn N 2 purge gas flow, max. 20 slm 20 slm 20 slm 20 slm N 2 purge gas flow, min. 20 slm 20 slm 20 slm 20 slm Power supply voltage, 3 phase V; V; 45 V; V; V; 45 V; V; V; 45 V; V; V; 45 V; Ambient temperature 5 to 40 5 to 40 5 to 40 5 to 40 Full load current 0 A; 20 A 20 A; 27 A 0 A; 32 A 0 A; 32 A (for V) (for V) (for V) (for V) Water connector steel; /4 inch, steel; /4 inch, steel; /4 inch, steel; /4 inch, Technical data tandard version A 803 H tandard version A 503 H tandard version A 503 H tandard version Frequency 50 Hz 60 Hz 60 Hz 60 Hz Weight 265 kg 385 kg 545 kg 545 kg Power consumption at ultimate pressure, 50 Hz.8 kw 2.2 kw Power consumption at ultimate pressure, 60 Hz 2.4 kw 3.4 kw 2.8 kw Pumping speed at 50 Hz 30 m 3 /h 600 m 3 /h Pumping speed at 60 Hz 60 m 3 /h 700 m 3 /h 200 m 3 /h 700 m 3 /h Typical base pressure, 50 Hz hpa 0-3 hpa Typical base pressure, 60 Hz hpa hpa hpa hpa Typical base pressure with N 2 purge, 50 Hz hpa 0-2 hpa Typical base pressure with N 2 purge, 60 Hz 0 - hpa hpa hpa hpa Volume size, max. m 3 m 3 m 3 m 3 Accessories Isolation valve, manual 30503M 30503M 30503M Isolation valve, 24 V D 30503E 30503E 30503E able for isolation valve, 24 V D, 3.5 m Hand held remote display,.5 m cable Hand Held Remote control able for hand held remote display,5 m eismic brackets kit A A A A Technical data arge volume version A 803 H arge volume version Frequency 60 Hz 60 Hz Power consumption at ultimate pressure, 60 Hz 2 kw 2.6 kw Noise level, max. 65 db (A) 69 db (A) ontinuous inlet flow. max. 50 slm 00 slm Pumping speed at 60 Hz 60 m 3 /h 200 m 3 /h Typical ultimate pressure, 60 Hz hpa hpa Typical ultimate pressure with N 2 purge, 60 Hz 0 - hpa hpa Volume size, max. 50 m 3 50 m 3 Accessories Hand held remote display,.5 m cable Hand Held Remote control able for hand held remote display,5 m eismic brackets kit A A Part 3. / Page 203
5 3. Vacuum generation / / Harsh duty applications / A3H series Order number guide A3H series A3H a b c d e f g h i j O Product A 308 H A 503 H A 803 H Pump model A B D Application ustomer specific Temperature ontrol Power supply Water & N2 Quick connects Exhaust or H H or H or H or H or or H HHR D (Hand-held Remote Data Record) included ET versions includes frequency converter on Roots (all models) & intermediate heat exchanger (A 503 H & A 803 H only) / No Exhaust Heater EHT version includes Hot roots kit (A 503 H & A 803 H) Inlet flange Roots By-pass 2 2 Purge line ADK specific Reserved or 2 0 or 0 Appendix: Ordering guide A3H Notes on Digits b Applications : tandard 3: tandard cold 4: arge volumes 5: High flows 7: tandard 60 Hz c Temperature ontrol : tandard version (TD) Exhaust heater : Extended low temperature version (ET) Roots/FB heat exchanger (A 503 H & A 803 H) No exhaust heater H: Extended high temperature version: Hot Roots Kit (A 503 H & A 803 H) Exhaust heater e Water & N 2 Quick connects Material: applies to both Water & N 2 Quick onnect Brass or tainless teel ize: /4 NPT or 3/8 NPT f Exhaust 0: Without check-valve : With heck-valve (standard configuration) h Roots By-Pass : tandard by-pass For most of the applications 2: Blocked by-pass For specific powdery applications or high H 2 flows applications j ADK specific : With for 2 nd interface cable Page 204 / Part 3.
6 3. Vacuum generation / / Harsh duty applications / A3H series Order number matrix A3H series Order number A3H a b c d e f g h i j 0 Pump model A 308 H A 503 H A 803 H a A B D Application b tandard tandard cold 3 arge volume 4 High flows 5 tandard 60 Hz 7 Temperature control tandard version (TD) Extended low temperature (ET) Extended high temperature (EHT) c H Power supply d V 60 Hz V 50 Hz 3 45 V 50 Hz V 60 Hz V 60 Hz V 50 Hz 7 Water & N2 / Quick connects e Brass /4 NPT tainless steel /4 NPT 2 Brass 3/8 NPT 3 tainless steel 3/8 NPT 4 Exhaust f Without check valve 0 With check valve Inlet flange g DN 50 0 DN 00 DN 60 2 Roots By-pass h NA 0 tandard Blocked 2 Purge line i tandard ADK specific j Without 0 With Part 3. / Page 205
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