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Approved by Principal Investigator Date: Approved by Super User: Date: Standard Operating Procedure BNC Dektak 3030 Stylus Profilometer Version 2011 May 16 I.

1 Approved by Principal Investigator Date: Approved by Super User: Date: Standard Operating Procedure BNC Dektak 3030 Stylus Profilometer Version 2011 May 16 I. Purpose This Standard Operating Procedure (SOP) outlines requirements to be considered by an authorized user of the Dektak 3030 Stylus Profilometer as well as describes the normal operation of the profilometer and any hazards that may be encountered during normal operation. Finally, the SOP explains how to minimize any hazards and how to respond in an emergency situation. This document is to be reviewed one year from the date of approval or as conditions warrant, whichever is the shorter time period. The Dektak 3030 Surface Profiler is an advanced surface profile measuring system, which accurately measures vertical features ranging in height from 131 micron to 50 angstroms on a wide variety of substrate surfaces. II. Personnel A. Authorized Personnel: The Dektak 3030 may be operated only by authorized personnel who are fully cognizant of all safety issues involved in the operation of such a device. These personnel are to ensure that the profilometer is only operated in the manner laid out in this document. To become an authorized user, one must: 1. Complete Environment, Health & Safety (EH&S) training class. 2. Take the baseline BNC Safety Orientation class 3. Read and fully understand the SOP 4. Receive training on the profilometer by an authorized Super User and User. 5. Sign the authorized user sheet to affirm that the above steps have been completed.

2 B. Unauthorized personnel: No unauthorized personnel may enter the BNC clean room facility unless accompanied by an authorized user. All visitors must be briefed on proper safety protocol and must wear appropriate protective eyewear located on the premises. III. Hazards A. Electrical Hazards: Use normal precautions with external house (110VAC) connections behind the chassis. B. Chemical: N/A. C. Pressure Hazards: N/A D. Other: N/A IV. Hazard Controls A. Electrical 1. Only qualified personnel may perform all internal maintenance to the profilometer and more than one user must be present when performing said maintenance. 2. Every portion of the electrical system, including the printed circuit cards, should be assumed to be at dangerous voltage level. C. Chemical and Pressure I. N/A D. Other 1. Proper eye protection must be worn at all times in the clean room. Standard Operating Procedure BNC DEKTAK 3030 (Stylus Profilometer 2) 2

3 V. Technical Specifications Stylus: 12.5 μm radius (Diamond) Scan Range: x: 50 μm 50 mm z: 100 Å 131 μm z Resolution: 1 Å/65 KÅ 10 Å/655 KÅ 0 Å/1310 KÅ Force: 1 40 mg Zoom: 35x 200x Scan Speed Ranges: Low, Med, High Leveling: Manual, two-point programmable or cursor leveling Stylus Tracking Force: Programmable, 1-40 mg ( milli Newtons) Maximum Sample Thickness: 45 mm (1.75 inches) Maximum Sample Weight: 0.5 Kg (1 lb) Sample Stage Diameter: 165 mm (6.5 inches) Sample Stage Translation: X Axis, ± 76 mm (± 3 inches) (from center) Y Axis, -76mm (3.0 inches) Sample Stage Rotation: Theta, 360º Power Requirements: 100/115/220Vac ± 10%, 50-60Hz, 200VA Warm-up Time: 15 minutes recommended for maximum stability Operating Temperature: 21º C ± 3º C (70º F ± 5º F) Specification Summary Scientific* Metric* English* VERTICAL DISPLAY RANGE 100 Å to 1310 KÅ 10 nm to 131 μm 0.4 μin to 5200 μin VERTICAL RESOLUTION In a Selected Range 1Å/65 KÅ 10 Å/655 KÅ 20 Å/1310 KÅ 0.1 nm/6.5 μm 1 nm/65.5 μm 2 nm/131 μm μin/255 μin μin/2574 μin μin/5148 μin DATA POINTS PER MICRON 0.04 to to to 40 SCAN LENGTH RANGE 50 μm to 50 mm 50 μm to 50 mm 2000 μin to mils Å = Angstroms μm = micrometer (micron) * Switch selectable on top panel of Main Electronics Unit. Standard Operating Procedure BNC DEKTAK 3030 (Stylus Profilometer 2) 3

VI. Operating the System 1. Switch ON red power switch on the back/top of Power and Control Box.

If the sample or the stage image appears in the background, Press VID until the sign-on message shows against an uniform gray background. 3.

Raise the optics tower until the stylus is approximately one inch off the stage surface. 5. Press PRGM. The Dektak 3030 Main Menu will appear.

4 VI. Operating the System 1. Switch ON red power switch on the back/top of Power and Control Box. If the system does not turn on, check the power cord to the system. 2. The Dektak 3030 Logo should appear on the screen display. If the sample or the stage image appears in the background, Press VID until the sign-on message shows against an uniform gray background. 3. Rotate brightness knob left/right to adjust screen brightness. 4. Raise the optics tower until the stylus is approximately one inch off the stage surface. 5. Press PRGM. The Dektak 3030 Main Menu will appear. The menu should be set at the Scan Program Menu. If not, use the Arrow keys to move the prompt. Press ENTR. 6. Now you are ready to set the scanning parameters. 7. The screen should look like the following. Standard Operating Procedure BNC DEKTAK 3030 (Stylus Profilometer 2) 4

8. Move the prompt to the Scan Program Menu using the arrow keys. Press ENTR key. The Scan Program Menu will appear on the CRT. 9. Using arrow keys move the prompt to the Scan Length parameter.

5 8. Move the prompt to the Scan Program Menu using the arrow keys. Press ENTR key. The Scan Program Menu will appear on the CRT. 9. Using arrow keys move the prompt to the Scan Length parameter. Determine the appropriate Scan Length. Type in the length using the numeric key pad, and press ENTR. 10. Enter No for the Auto Leveling and Smoothing parameters. 11. Enter Medium for the speed. 12. The Profile parameter should be (hills and valleys). 13. Select the appropriate vertical Measurement Range and press the ENTR key. i. 65KA Range will provide 1A Vertical Resolution ii. 655KA Range will provide 10A Vertical Resolution iii. 1,310KA Range will provide 20A Vertical Resolution 14. Enter Auto for the Display Range. 15. The rest of the parameters should not be of concern. However, the stylus force may need to be altered. 16. The Dektak 3030 is now ready for scanning. 17. Sample Positioning is achieve thru turning the thumbwheels located on the front of the sample stage. Warning: DO NOT FORCE ANYTHING IF IT DOES NOT MOVE. Please note that this is strictly a manual stage. The theta adjustment is accomplished by the stage rotation. The X-axis (side to side) is accomplished by the thumbwheel located slightly to the left of center. The Y-axis (front to back) is accomplished by the thumbwheel located slightly to the right of center. And the manual leveling of the stage is accomplished by the base (largest) thumbwheel. 18. Place the calibration standard or your sample near the center rear of the stage. 19. Use the X and Y thumbwheels to move the stage until the sample is below the stylus. 20. Press VID twice. This is the video/graphics overlay mode. Press FCTN, 5. The software reticle and the video image are displayed simultaneously. 21. Press AV (Arrow up and Arrow down symbol). The stylus will lower onto the sample. Adjust the optics until the stylus tip is positioned on the X-axis of the reticle. Adjust the Standard Operating Procedure BNC DEKTAK 3030 (Stylus Profilometer 2) 5

6 illumination to obtain the required contrast by using the small knob on the front of the instrument panel. 22. Orient the sample until the video display shows the cross hairs, sample, and the hourglass image of the stylus in alignment. Note: when scanning is performed, the sample moves from back to front. However, the screen will show the sample moving from right to left since the image is optically rotated 90 degrees. 23. Press AV (Arrow up and Arrow down symbol) again to raise the stylus. The instrument is now ready to make a scan. 24. You can now make a scan by pressing SCAN. 25. The stylus will lower and an initial plot will be plotted on the screen as the scan commences. When the scan has completed, the sample stage will automatically return to the home position. The DEKTAK 3030 will immediately replot the original scan using the autoranging feature programmed into the Scan Program Menu. 26. If the initial trace touches either the top or the bottom of the screen before the completion of the scan, the scan has been found to be more than 327KA out of level. The stage needs to be manually leveled. i. Manual leveling is achieved by adjusting the leveling thumbwheel, located on the scanning stage, while the stage is tracking in a horizontal line. ii. Press SCAN Key. As the stage is moving and a trace is being generated on the screen, turn the leveling thumbwheel until the trace is tracking in a horizontal line. Clockwise rotation raises the trace and counterclockwise rotation lowers the trace. iii. Press SCAN key again. The profile must appear totally within the graphic boundaries to achieve the minimum acceptable manual leveling. If not, repeat the manual leveling procedure. In a worst case, stop and get help. 27. Assuming that you were able to scan successfully. 28. If the plot was not leveled, you will need to CURSOR level the data by using the REF and MEAS cursors. Both cursors are positioned with the arrow keys on the horizontal trace. Then pressing LVL. The data and plot will be leveled with respect to the REF and MEAS vertical positions. The screen will plot with both R and M Cursor intercepts and positioned at the horizontal zero grid line with the trace leveled. Standard Operating Procedure BNC DEKTAK 3030 (Stylus Profilometer 2) 6

7 29. You are now ready to make a measurement. 30. Once the trace has been adequately leveled, an accurate measurement can be obtained. 31. Press MEAS. Using the left ARROW key, move the M Cursor to the middle of the top step of the trace. 32. Press REF. Using the right ARROW key, move the R Cursor to the base of the step of the trace. The difference between the R cursor and the M cursor intercepts is the step height. This height is automatically displayed in the upper right corner of the monitor labeled Vert. 33. You will need to ZERO the reference. Any point along the trace can be considered the zero point. Press REF. Using the right ARROW key, move the R Cursor to a position on the step and press ZERO. The screen will replot with the trace in the original position but the vertical scale will be rescaled in the negative direction. If you move the R cursor to the base of the step and press ZERO, the R cursor will be the base value or zero vertical position. This is considered the reference point of the measurement. 34. You can now magnify the trace. 35. In order to magnify an area of interest, press LEFT and use the right ARROW key to bring the left boundary near the leading edge of the step. Repeat the procedure using the RT, BOT, and TOP keys along with the appropriate ARROW keys until the annotated screen box looks smaller. You are declaring the boundaries for the areas of interest. 36. Press RPLT. This will replot the profile and rescale the profile of interest to allow an accurate measurement. VII. Shut Down Procedures 1. Rotate Illuminator knob [fully clockwise to turn off the light. 2. Rotate Zoom/Focus knob fully clockwise to lift stylus off the surface. 3. Remove sample. 4. Switch off RED power switch. VIII. Emergency Procedures A. DEKTEK profilometer accidents: Notify lab management and PI immediately. B. Power outage: If there is a power outage, turn off the profilometer per the shut down procedure (VII) to avoid a hazardous situation when power is restored. If there is an emergency, leave laboratory immediately and either return after emergency to shut down profilometer or contact lab management. Standard Operating Procedure BNC DEKTAK 3030 (Stylus Profilometer 2) 7

8 Authorized Users: I have read and understood the Standard Operating Procedures for DEKTAK 3030 Stylus Profilometer Name (print) Signature Date PI or Super User Initial Standard Operating Procedure BNC DEKTAK 3030 (Stylus Profilometer 2) 8

9 Appendix A In case of medical emergencies, consult lab safety protocol or lab safety plan. In the event of a profilometer accident, follow the procedure below: 1. Ensure that the profilometer is shut off per Section VII in Shut Down Procedures. 2. Provide for the safety of the personnel (first aid, evacuation, etc.) as needed. 3. Obtain medical assistance for anyone who may be injured. UC Optometry Clinic (Normal Hours) UC Optometry Clinic (24 Hour Emergencies) University Health Services (Emergency) Ambulance (urgent medical care) If there is a fire, pull the alarm, and contact the fire department by calling Do not fight the fire unless it is very small and you have been trained in fire fighting techniques. 5. Inform the Office of Environment Health, & Safety (EH&S) as soon as possible. 6. During normal working hours, call the following: EH&S Office BNC Safety Officer ( Paul Lum) EH&S Health & Safety Manager After normal working hours, call to contact the UC Police Department who can contact the above using their emergency call list. 7. Inform (PI NAME) and the BNC safety officer (BNC Management) as soon as possible. If there is an injury, (PI NAME) will need to submit a report of injury to the Worker s Compensation Office. 8 After the incident, do not resume use of the profilometer system until the BNC lab manager and EH&S has reviewed the incident and approved the resumption of research. Standard Operating Procedure BNC DEKTAK 3030 (Stylus Profilometer 2) 9

Dektak II SOP Revision 1 05/30/12 Page 1 of 5. NRF Dektak II SOP

Dektak II SOP Revision 1 05/30/12 Page 1 of 5. NRF Dektak II SOP Page 1 of 5 NRF Dektak II SOP The Dektak II-A is a sensitive stylus profilometer. A diamond-tipped stylus is moved laterally across the surface while in contact and measures deflections of the tip. It