More Precision. confocaldt // Confocal chromatic measuring system

Transcription

1 More Precision confocaldt // Confocal chromatic measuring system

2 Confocal chromatic sensors for displacement and thickness confocaldt IFS206 / IFS207 IFS206-/VAC(001) IFS206-/VAC(001) IFS206/90-/VAC(001) IFS206/90-/VAC(001) Sensors with axial or radial beam path One-sided thickness measurement Distance measurement Extremely small spot size approx. Numerical aperture Light spot diameter ±2 89 ± approx. approx IFS 206-2,5/VAC(00) Measuring range ø ø approx approx protective glass 2.0 thickglass protective 2.0 thick protective glass protective glass ø12.8 ø12.8 Sensor model 77.5 ± ±2 ø ø 7.8 Optional for vacuum applications Start of measuring range Submicrometer resolution IFS 206/90-2,5/VAC(001) mm mm 17.2 mm 12.6 mm 1) µm 10 µm Linearity (displacement and distance measurement) ± 0.75 µm ± 0.75 µm Linearity (thickness measurement) ± 1.5 µm ± 1.5 µm 2 nm 2 nm Resolution 2) Weight 105 g 10 g Max. tilt ) ± 16 ± 16 Protection class IP0, vacuum capable Operating temperature C Storage temperature C Connection Shock Vibration pluggable sensor cable via FC socket, standard length m; extension up to 50 m; bending radius: static 0 mm; dynamic 0 mm 15 g, 6 ms 2 g / 10 Hz Hz FSO = Full Scale Output All data at constant ambient temperature (25 ± 2 C) against optical flat; specifications can change when measuring different materials. 1) Start of measuring range measured from sensor axis 2) Average from 512 values at 1 khz, near to the center of the measuring range ) Maximum sensor tilt angle that produces a usable signal on a reflecting surface, near to the midrange IFS IFS2

3 15 IFS206-/VAC(001) IFS206/90-/VAC(001) IFS ø27 ø19.2 ø27 ø19.2 Ø Measuring range Start of measuring range. approx Numerical aperture Light spot diameter Linearity (displacement and distance measurement) Linearity (thickness measurement) Resolution 1) Weight Max. tilt 2) Protection class ø IFS207/90-0, mm 10 mm 0. mm 75 mm 27 mm 5. mm µm 15 µm 6 µm ± 1.5 µm ± µm ± 0.15 µm ± µm ± 5 µm ± 0. µm 50 nm 60 nm 10 nm 99 g 128 g 0 g ± 6.5 ± 1.5 ± 27 IP65, front operated C C Vibration 1 15 IFS Storage temperature Shock MR 5. IFS 206- Operating temperature Connection 10 approx ø21 Sensor model 2 2x M protective glass 2.0 thick ø approx protective glass ±2 ø approx ø 77.5 ±2 Ø.8 pluggable sensor cable via FC socket, standard length m; extension up to 50 m; bending radius: static 0 mm; dynamic 0 mm 15 g, 6 ms 2g / 10 Hz Hz FSO = Full Scale Output All data at constant ambient temperature (25 ± 2 C) against optical flat; specifications can change when measuring different materials. 1) Average from 512 values at 1 khz, near to the midrange 2) Maximum sensor tilt angle that produces a usable signal on a reflecting surface, near to the midrange pluggable C20 sensor cable, standard length 2 m; bending radius: static 0 mm; dynamic 0 mm

4 2 System design confocaldt System design The confocaldt system consists of: Sensor IFS20x Controller IFC2xx Fiber-optic cable IFS sensor Vacuum feed through (optional) EtherCAT, Ethernet RS Controller IFCx IFC251 IFC261 IFC271 HS Power supply Analog output (option) Digital I/O Encoder (option)

5 25 Customer-specific modifications Application examples are often found where the standard versions of the sensors and the controller are performing at their limits. To facilitate such special tasks it is possible to customize the sensor design and to adjust the controller accordingly. Common requests for modifications include changes in design, mounting options, customized cable lengths and modified measuring ranges. Possible modifications Sensors with connector Cable length Vacuum suitability until UHV Specific lengths Customer-specific mounting options Optical filter for ambient light compensation Housing material Measuring range / offset distance Vacuum setup C200-x / Vac C201-x IFS2xx / Vac Controller IFC2xx Vacuum feed through C / Vac (KF or CF flange) C / Vac (KF flange)

6 Accessories 26 confocaldt Accessories: mounting adapter MA ±0.1 ø. ø ø H M 5.5 Accessories: mounting adapter MA ± ø M5x0.8 M5x Accessories: mounting adapter MA200 IFS205/IFS206 (consisting of a mounting block and a mounting ring) Mounting block øx 1.5 MA 206- IFS206 ø2 0 6 ø ø MA IFS205-0, / -1 0 ø5 7 ø 0 ø7 2 MA 205- IFS205- MA IFS ø5 Mounting ring 8 ø7 ø MA IFS / IFS205-0

7 27 Accessories Software IFD2n1-Tool Free demo software tool included Optical fiber Temperature range : -50 C to 90 C Bending radius: 0/0 mm Accessories light source IFL2/LE Lamp module for IFC2 IFL2x1/LED Lamp module for IFC2x1 IFL251/LED(00) Lamp module for IFC251(00) Multimode core 50 µm / 26 µm Cladding 125 µm Cables for IFS202/IFS20 sensors CE202 cable with 2x E00/APC connectors CE202-x Extension for optical fiber ( m, 10 m,1 m, 0 m, 50 m) CE202-x/PT Optical fiber with protection tube for mechanical stress ( m, 10 m, customer-specific length up to 50 m) Vacuum feed through C202/Vac/KF16 Vacuum feed through with optical fiber, 1 channel, vacuum side FC/APC non-vacuum side E00/APC, clamping flange KF 16 C205/Vac/1/KF16 Vacuum feed through on both sides FC/APC socket, 1 channel, clamping flange type KF 16 C205/Vac/1/CF16 Vacuum feed through on both sides FC/APC socket, 1 channel, flange type CF 16 C205/Vac/6/CF6 Vacuum feed through FC/APC socket, 6 channels, flange type CF 6 Other accessories SC271-x/USB/IND SC271-x/IF08 PS EC271-/OE Connector cable IFC251/61/71, m, 10 m, m Connector cable IFC251/61/71-IF08, m, 10 m, m Power supply 2 V / A Encoder cable, m 8,8 Ø6 Ø2 E00/APC standard connector 6 25,5 FC/APC standard connector ø9,5 Cable for IFS207 sensors C20-x Optical fiber with DIN connector and E00/APC (2 m, 5 m) Strain relief PVDF: polyvinylidene fluoride ø2,5 C200 cable with 2x FC/APC connectors C200-x Optical fiber ( m, 5 m, 10 m, customer-specific length up to 50 m) C200/PT-x Optical fiber with protection tube for mechanical stress ( m, 5 m, 10 m, customer-specific length up to 50 m) C200/PT-x-Vac Optical fiber with protection tube suitable for use in vacuum ( m, 5 m, 10 m, customer-specific length up to 50 m) Coating/buffer PVC: polyvinyl chloride,5 DIN connector ø6,8 ø2,5 Cables for IFS205/IFS206 sensors C201 cable with FC/APC and E00/APC connectors C201-x Optical fiber ( m, 5 m, 10 m, customer-specific length up to 50 m) C201/PT-x Optical fiber with protection tube for mechanical stress ( m, 5 m, 10 m, customer-specific length up to 50 m) C201-x (01) Optical fiber core diameter 26 µm ( m, 5 m, 15 m) C201-x(10) Drag-chain suitable optical fiber ( m, 5 m, 10 m) Acrylate <250 µm

8 Modifications reserved / Y O01078GKE High performance sensors made by Micro-Epsilon Sensors and systems for displacement and position Sensors and measurement devices for non-contact temperature measurement 2D/D profile sensors (laser scanner) Optical micrometers, fiber optic sensors and fiber optics Color recognition sensors, LED analyzers and color inline spectrometer Measurement and inspection systems MICRO-EPSILON Headquarters Koenigbacher Str Ortenburg / Germany Tel. +9 (0) 852 / Fax +9 (0) 852 / info@micro-epsilon.com