UV Nanoimprint Tool and Process Technology. S.V. Sreenivasan December 13 th, 2007
|
|
- Abraham Jenkins
- 5 years ago
- Views:
Transcription
1 UV Nanoimprint Tool and Process Technology S.V. Sreenivasan December 13 th, 2007
2 Agenda Introduction Need tool and process technology that can address: Patterning and CD control Alignment and Overlay Defect Control Throughput Conclusions
3 Step & Flash Imprint Lithography (S-FIL) High resolution fused silica template, coated with release layer Template Step 1: Dispense drops Planarization layer Substrate Imprint fluid dispenser Low viscosity fluid (Si-containing for S-FIL, Organic for S-FIL/R) Step 2: Lower template and fill pattern Step 3: Polymerize imprint fluid with UV exposure Template very low imprint pressure < 1/20 atmosphere at room temp Planarization layer Substrate Same Process Used for Step & Repeat and Whole Substrate Patterning Planarization layer Substrate Step 4: Separate template from substrate Template Planarization layer Substrate Step & Repeat
4 Stepper Technology for Non-Volatile Memory Non-Volatile Memory is the fastest growing segment in the semiconductor industry Production insertion targeted at 22nm Imprint on the International Technology Roadmap for Semiconductors (ITRS) Toshiba using tool for device prototyping 18nm feature size <1nm CD uniformity <2nm LER, 3σ Sub-15nm overlay <10 defects/cm 2 IMPRIO 250 Fully automated 300mm Tight overlay capability Sub 20nm resolution IBM has used stepper to make a critical level in a 7 layer storage class memory device 30nm FinFET lithography demonstrated though etch with excellent CD control and line edge roughness (LER 2nm 3σ)
5 Whole Substrate Technology for HDD Hard Disk Drives Moving To Patterned Media 1000 Technology Driver: Greater Areal Density Areal Density (Gigabits/in 2 ) Longitudinal Perpendicular recording recording Patterned media Fully automated whole disk imprinter Sub 20nm resolution High throughput Multiple commercial tools installed HGST is using our tool
6 Patterning and CD Control Patterning Requirements Need to handle pattern density variations Need to achieve thin and uniform residual layer Typical aspect ratio is 2:1 to 2.5:1 to avoid feature collapse issues Typical mean residual layer is <1/4 th of the feature height More drops for denser patterns on disk Feature Height of 75nm for 30nm features RLT = 10nm mean
7 Uniform Residual Layer: Pattern Density Variations 15 nm residual layer, independent of pattern density
8 Transfer and Residual Layer Thickness Measurements 1 nm adhesion layer thickness measurement Ultra-thin adhesion layer Residual layer mean <20nm and thickness variation to < 6 nm TIR MII Metrosol Mean: 1.09nm Sigma: 0.05nm Max: 1.22nm Min: 0.94nm x, y (mm) Residual Layer Thickness (nm) Average Std Dev Min Max Range Residual layer thickness fully populated wafer Position # nm HP
9 Alignment and Overlay Alignment is achieved using matched Moiré fringe patterns on both template and substrate based on a technique originally developed for X-ray proximity printing at MIT Imprint fluid lubricates movement and dampens vibration Align mechanics Template Substrate <100nm Magnification mechanics Substrate Template d(phase) Target Acquisition Resolution Test dx(nm)-template Alignment resolution is better than 2nm
10 Imprint to Photo Overlay Budget Components J Other Process Distortions (CMP, Film Depositions, Etc.) G Template/Mask Pattern Generation Distortion E Thermal In-Plane Template Distortions A X- Y- Alignment Noise (Machine Noise) D B Full Mix-and-Match Process Overlay (FM&MPO) Mix-and-Match, Multi- Template/Mask Overlay (M&MMTO) Single Machine Overlay (SMO) Field Alignment Accuracy MagX, MagY, Ortho Noise (Mag Actuator Noise) H Distortion Due to Tool to Tool Template/Mask Chuck Shape Difference F Thermal In-Plane Wafer Distortions C i-mat Moiré Alignment Metrology Noise I Distortion Due to Imprio to Photo Tool Wafer Chuck Shape Difference Temperature Control Machine Precision K Photo Tool Lens & Scan Speed Matching Distortion
11 Representative Alignment Data (From Four Corners) Four corner alignment data over the wafer represents basic machine precision in X, Y, Theta, MagX, MagY and Ortho directions: 5nm 3sigma in X 6nm 3sigma in Y
12 Multi-Machine Mix-and-Match Overlay Results Mix and match overlay performance with two different 193nm scanners has been demonstrated Overlay metrology performed using an industry standard KT overlay tool. 32 fields per wafer, 81 positions per field Achieved sub 20nm, 3σ results Challenges to move to sub- 10nm overlay appear to be engineering related.
13 Progress in S-FIL Defect Reduction at MII Defect Density by Date(KT-2132) Defect Density cm Non-commercial templates Commercial templates Improved adhesion layer Improved wafer cleanliness and template dicing process 02/ / / / / /2005 Date 02/ / / /2007 How can we achieve <1 cm -2?
14 S-FIL Defectivity 1. Template Fab Defects Template 4. Bubbles 2. Material Contaminants 3. Front Side Particles Planarization layer Substrate 5. Back Side Particles Template Planarization layer Substrate Planarization layer Substrate 6. Improper Release Template Planarization layer Substrate 7. Post-Imprint Fall-On Particles
15 Imprint Defectivity Imprio 250 Template was not inspected during Fabrication Template has 3 defects defect density = 3.1 cm -2 Imprinted wafers 89 fields Inspected al fields Inspected area per field ~1 cm 2 Pareto at right shows total defect densities for random and repeating defects Defect sizes > 200 nm (KT- 2132) Total wafer defect density = 3.4 cm -2 Imprint defectivity = 0.2 cm Template Ion Contm. Defect Density by Type Fall on Particle Plug Random 0.04 Prior Particle 0.04
16 Template Defect Inspections (counts) Defect Total Template Defectivity Through Fabrication After Cr and quartz etch After Mesa etch After Cr strip 0 defects Inspections were performed with a KT-576 tool by mask vendor 90 nm pixel Reflected light mode Maximum sensitivity Inspection performed on 6025 plates only Template # Defects detected on the template were not always seen during wafer inspection No attempt was made to repair these defects
17 Comparison of KT es32 and KT-2132 inspections Edge-roughness defects: Found only on the bottom edge of horizontal lines False defects Particles defects did not contribute to repeating defectivity Three template pattern defects were found repeating imprint defects One contaminated contact was detected repeating plug Type Edge roughness Particle Template Plug KT es32 Density cm KT-2132 Density cm -2 Repeating Template Defects Found only by es No new imprint related defectivity was identified
18 Template Life Template damage limited by S-FIL process Very low uniform pressure, low viscosity materials No impact: In S-FIL, the drops (1-2um high) prevent high-speed impact of particles with template In S-FIL Imprinting, particles are shielded by droplets 1 μm tall droplet Particle Template damage is rare, small percentage of particles cause damage We have the potential for a reliable approach to detect particle events in the tool based on low resolution fullfield image capture and analysis Small Z height causes large XY hot-spot
19 Particles that Do Not Damage Template Imprint um Particle that did not cause template feature contamination, no change in repeating defect density Particle that caused limited repeating defect in 4 fields
20 Example of Rare Template Damage Even a 10 um particle leads to small damage LARGE Front-side particle (>10um) Next imprint has small defect Small Damage!
21 Multiple Wafer Run Defectivity: I250-3 I250 tool with improved ECU and template handling. Internally coated wafers -older generation tools Manually cleaned templates 3 Template defects Inspected 21 fields per wafer Defect Density cm Wafer Defect Density Total Defect Density with Template Defects Removed Pilot Total Defect Density Repeating Defect Density Imprint # Wafer #
22 Particles that May Cause Template Damage Organic (soft) particles and particles that are embedded underneath polymer films do not appear to cause damage Inorganic and metal particles that show up on the wafer just before the imprint step are most relevant to template damage We are undertaking a particle classification study to understand where these hard particles may be coming from
23 Throughput Risk: Fast Fluid Fill For HVM, need fluid fill of < 1 second/field for > fields per wafer Keys to Fast Fluid Fill Low viscosity imprint resist (monomer) Small drop volume: Pico liter sized drops Template contact geometry control GDS based volume targeting Inclined template geometry creates fluid wave-front to avoid air trapping between liquid drops 6pl drop Contact geometry control Fluid fill direction
24 GDS Based Volume and Contact Geometry Control No Contact Geometry Control Contact Geometry Control Drop Pattern Uniform Grid GDS Based Uniform Grid GDS Based MagAlign >40 secs 25 secs 30 secs 4 secs (High Pattern Density Variation) Contacts through Pitch 30 secs 15 secs 10 secs 3 secs (Low Pattern Density Variation) GDS based volume compensation and contact geometry control are both needed This data collected for 6 pl minimum drop volume and for 25nm mean residual layer
25 Fill Time Set to < What is Needed (2.5 rather than 4sec) Dominant non-fill defective feature (last features to fill) X and Y moiré Cross and L Highly repeatable Filling Defects Cross and L Y moiré UL Verniers BnB LR Verniers X moiré CD Bars
26 Throughput Summary & Next Steps Further improvement in filling speed in being sought using Smaller drops of liquid Better understanding of drop placement optimization Improved control over contact geometry
27 Conclusions Template Throughput Align Defects Photolithography Progression Multiple levels in volume manufacturing Mix-and-match for critical layers in memory Thin film heads Device prototyping, mix & match, small volume devices Defect/align tolerant apps (storage, optical devices, etc.) Litho Performance (Resolution, LER, CD Control) S-FIL Progression
28 Acknowledgements
Defect Reduction for Semiconductor Memory Applications Using Jet And Flash Imprint Lithography
Defect Reduction for Semiconductor Memory Applications Using Jet And Flash Imprint Lithography Zhengmao Ye, Kang Luo, Xiaoming Lu, Brian Fletcher, Weijun Liu, Frank Xu, Dwayne LaBrake, Douglas Resnick,
More informationFabrication of Step and Flash TM Imprint Lithography Templates Using Commercial Mask Processes
Fabrication of Step and Flash TM Imprint Lithography Templates Using Commercial Mask Processes Ecron Thompson, Peter Rhyins, Ron Voisin, S.V. Sreenivasan *, Patrick Martin Molecular Imprints, Inc., 1807C
More informationNano-Imprint Lithography Infrastructure: Imprint Templates
Nano-Imprint Lithography Infrastructure: Imprint Templates John Maltabes Photronics, Inc Austin, TX 1 Questions to keep in mind Imprint template manufacturability Resolution Can you get sub30nm images?
More informationThe Transition to Patterned Media in Hard Disk Drives
The Transition to Patterned Media in Hard Disk Drives The Evolution of Jet and Flash Imprint Lithography for Patterned Media DISKCON San Jose Sept 24 rd, 2009 Paul Hofemann, Vice President, HDD Future
More informationThe Challenges in Making NIL Master Templates
The Challenges in Making NIL Master Templates Naoya Hayashi Dai Nippon Printing Co., Ltd. A Member of the ebeam Initiative 2011 Dai Nippon Printing Co.,Ltd. All Rights Reserved. OUTLINE Recent Progress
More informationPROGRESS OF UV-NIL TEMPLATE MAKING
PROGRESS OF UV-NIL TEMPLATE MAKING Takaaki Hiraka, Jun Mizuochi, Yuko Nakanishi, Satoshi Yusa, Shiho Sasaki, Yasutaka Morikawa, Hiroshi Mohri, and Naoya Hayashi Electronic Device Laboratory, Dai Nippon
More informationReadiness and Challenges of EUV Mask
Panel Discussion: EUVL HVM Insertion and Scaling Readiness and Challenges of EUV Mask Takashi Kamo Toshiba Corporation Semiconductor & Storage Products Company Contents [1] Introduction [2] EUV Mask Defect
More informationAdvances in Roll-to-Roll Imprint Lithography for Display Applications Using Self Aligned Imprint Lithography. John G Maltabes HP Labs
Advances in Roll-to-Roll Imprint Lithography for Display Applications Using Self Aligned Imprint Lithography John G Maltabes HP Labs Outline Introduction Roll to Roll Challenges and Benefits HP Labs Roll
More informationSelf-Aligned Double Patterning for 3xnm Flash Production
Self-Aligned Double Patterning for 3xnm Flash Production Chris Ngai Dir of Process Engineering & Lithography Maydan Technology Center Group Applied Materials, Inc. July 16 th, 2008 Overview Double Patterning
More informationBTC and SMT Rework Challenges
BTC and SMT Rework Challenges Joerg Nolte Ersa GmbH Wertheim, Germany Abstract Rising customer demands in the field of PCB repair are a daily occurrence as the rapid electronic industry follows new trends
More informationInspection of 32nm imprinted patterns with an advanced e-beam inspection system
Inspection of 32nm imprinted patterns with an advanced e-beam inspection system Hong Xiao, Long (Eric) Ma, Fei Wang, Yan Zhao, and Jack Jau Hermes Microvision, Inc., 1762 Automation Parkway, San Jose,
More informationFlexible Electronics Production Deployment on FPD Standards: Plastic Displays & Integrated Circuits. Stanislav Loboda R&D engineer
Flexible Electronics Production Deployment on FPD Standards: Plastic Displays & Integrated Circuits Stanislav Loboda R&D engineer The world-first small-volume contract manufacturing for plastic TFT-arrays
More informationAdvanced Display Manufacturing Technology
Advanced Display Manufacturing Technology John Busch Vice President, New Business Development Display and Flexible Technology Group September 28, 2017 Safe Harbor This presentation contains forward-looking
More informationApplied Materials. 200mm Tools & Process Capabilities For Next Generation MEMS. Dr Michel (Mike) Rosa
Applied Materials 200mm Tools & Process Capabilities For Next Generation MEMS Dr Michel (Mike) Rosa 200mm MEMS Global Product / Marketing Manager, Components and Systems Group (CSG), Applied Global Services
More informationSEMICON Europe October Pushing Lithography to the Limits. Patrick Wong imec
SEMICON Europe October 2009 Pushing Lithography to the Limits imec 2009 1 Alternative double patterning processes : ready for (sub) 32nm hp? P. Wong, M. Maenhoudt, D. Vangoidsenhoven, V. Wiaux Outline
More informationDeveloping an AFM-based Automatic Tool for NanoAsperity Quantification
Developing an AFM-based Automatic Tool for NanoAsperity Quantification September 18, 2008 Sergey Belikov*, Lin Huang, Jian Shi, Ji Ma, Jianli He, Bob Tench, and Chanmin Su Veeco Instruments Inc., Santa
More informationNew Worlds for Polymers: Organic Transistors, Light Emitting Diodes, and Optical Waveguides Ed Chandross
New Worlds for Polymers: Organic Transistors, Light Emitting Diodes, and Optical Waveguides Ed Chandross Materials Chemistry, LLC 1 Polymers in the Electronic Industry Enabling Materials Active Materials?
More informationRecent results of Multi-beam mask writer MBM-1000
Recent results of Multi-beam mask writer MBM-1000 Hiroshi Matsumoto, Hiroshi Yamashita, Hideo Inoue, Kenji Ohtoshi, Hirokazu Yamada Member of the ebeam Initiative 1 NFT s mask writer roadmap 2016 Device
More informationSemiconductors Displays Semiconductor Manufacturing and Inspection Equipment Scientific Instruments
Semiconductors Displays Semiconductor Manufacturing and Inspection Equipment Scientific Instruments Electronics 110-nm CMOS ASIC HDL4P Series with High-speed I/O Interfaces Hitachi has released the high-performance
More informationWafer Thinning and Thru-Silicon Vias
Wafer Thinning and Thru-Silicon Vias The Path to Wafer Level Packaging jreche@trusi.com Summary A new dry etching technology Atmospheric Downstream Plasma (ADP) Etch Applications to Packaging Wafer Thinning
More informationPrinciples of Electrostatic Chucks 6 Rf Chuck Edge Design
Principles of Electrostatic Chucks 6 Rf Chuck Edge Design Overview This document addresses the following chuck edge design issues: Device yield through system uniformity and particle reduction; System
More informationOvercoming Challenges in 3D NAND Volume Manufacturing
Overcoming Challenges in 3D NAND Volume Manufacturing Thorsten Lill Vice President, Etch Emerging Technologies and Systems Flash Memory Summit 2017, Santa Clara 2017 Lam Research Corp. Flash Memory Summit
More informationIN-VISION All rights reserved. IN-VISION GmbH. B2B DLP Light Engine and Optical Solutions
IN-VISION 2017. All rights reserved. IN-VISION GmbH B2B DLP Light Engine and Optical Solutions Company Long-term experience in development and manufacturing of high-end optical projection lens assemblies
More informationStandard Operating Procedure of nanoir2-s
Standard Operating Procedure of nanoir2-s The Anasys nanoir2 system is the AFM-based nanoscale infrared (IR) spectrometer, which has a patented technique based on photothermal induced resonance (PTIR),
More informationABSTRACT. Keywords: 3D NAND, FLASH memory, Channel hole, Yield enhancement, Defect inspection, Defect reduction DISCUSSION
Yield enhancement of 3D flash devices through broadband brightfield inspection of the channel hole process module Jung-Youl Lee a, Il-Seok Seo a, Seong-Min Ma a, Hyeon-Soo Kim a, Jin-Woong Kim a DoOh Kim
More informationReduction of Device Damage During Dry Etching of Advanced MMIC Devices Using Optical Emission Spectroscopy
Reduction of Device Damage During Dry Etching of Advanced MMIC Devices Using Optical Emission Spectroscopy D. Johnson, R. Westerman, M. DeVre, Y. Lee, J. Sasserath Unaxis USA, Inc. 10050 16 th Street North
More informationLeveraging 300 mm Technology Solutions to Enable New MEMS Process Capabilities
Leveraging 300 mm Technology Solutions to Enable New MEMS Process Capabilities Evan Patton Semicon Europa November 2017 Lam Research Corp. 1 Presentation Outline The Internet of Things (IoT) as a market
More informationPre SiGe Wet Cleans Development for sub 1x nm Technology Node
Pre SiGe Wet Cleans Development for sub 1x nm Technology Node Akshey Sehgal, Anand Kadiyala, Michael DeVre and, Norberto Oliveria April 10 th, 2018 Background Due to higher aspect ratio features observed
More informationABSTRACT 1 INTRODUCTION
Novel lithography technique using an ASML Stepper/Scanner for the manufacture of display devices in MEMS world ASML US, Inc Special Applications, 6580 Via Del Oro San Jose, CA 95119 Keith Best, Pankaj
More informationBackside Circuit Edit on Full-Thickness Silicon Devices
Backside Circuit Edit on Full-Thickness Silicon Devices Presentation Title Line 1 Title Line Two Can I really skip the global thinning step?! Date Presenter Name Chad Rue FEI Company, Hillsboro, OR, USA
More information1. Publishable summary
1. Publishable summary 1.1. Project objectives. The target of the project is to develop a highly reliable high brightness conformable low cost scalable display for demanding applications such as their
More information1.5mm amplitude at 10 to 55Hz frequency in each X, Y, Z direction for 2 hours 500m/s² (approx. 50G) in each X, Y, Z direction for 3 times
Color Mark Color Mark Feature Outstanding color matching accuracy - RGB light emitting diodes and 12-bit resolution - 2 detection modes (color only / color + intensity) - -step sensitivity adjustment for
More information~ 50, ,000 ~ $500K
Mask Replication The lifetime of a mask is anticipated to be ~ 50,000 100,000 imprints An e-beam written master mask will cost ~ $500K If you wanted to print 1M wafers, you would spend ~ $500M on masks
More informationPolygon Scanners Capabilities, Applications and System integration. considerations
Workshop ALPS Swissphotonics - APPOLO Polygon Scanners Capabilities, Applications and System integration considerations Lars Penning CEO Next Scan Technology Innovating and leading polygon scanner technology
More informationprojectors, head mounted displays in virtual or augmented reality use, electronic viewfinders
Beatrice Beyer Figure 1. (OLED) microdisplay with a screen diagonal of 16 mm. Figure 2. CMOS cross section with OLED on top. Usually as small as fingernails, but of very high resolution Optical system
More informationApproaching Zero Etch Bias at Cr Etch Process
Approaching Zero Etch Bias at Cr Etch Process Pavel Nesladek a ; Norbert Falk b ; Andreas Wiswesser a ; Renee Koch b ; Björn Sass a a Advanced Mask Technology Center, Rähnitzer Allee 9; 01109 Dresden,
More information3M 8900 Single-mode SC Crimplok Connector
3M 8900 Single-mode SC Crimplok Connector Technical Report June 1999 80-6110-1441-8 1 1.0 Product Description & Requirements The 3M SC Single-mode Crimplok Connector is designed to provide the customer
More informationNext Generation of Poly-Si TFT Technology: Material Improvements and Novel Device Architectures for System-On-Panel (SOP)
Next Generation of Poly-Si TFT Technology: Material Improvements and Novel Device Architectures for System-On-Panel (SOP) Tolis Voutsas* Paul Schuele* Bert Crowder* Pooran Joshi* Robert Sposili* Hidayat
More informationOutline. Double Patterning 11/6/17. Motivation Techniques Future of Double Patterning. Rasha El-Jaroudi November 7 th
Double Patterning Rasha El-Jaroudi November 7 th 2017 reljaroudi@utexas.edu Outline Motivation Techniques Future of Double Patterning Rasha H. El-Jaroudi 2 1 Motivation Need to keep up with Moore s Law
More informationElectrical connection
Colour sensors Dimensioned drawing Part No. 50109619 12.5mm 60mm 10-30 V DC 6 khz Scanner for colour detection Very short response time 85µs for detection of fast or small objects and marks Direct indication
More informationB-AFM. v East 33rd St., Signal Hill, CA (888)
B-AFM The B-AFM is a basic AFM that provides routine scanning. Ideal for scientists and educators, the B-AFM is capable of creating high-resolution topography images of nanostructures in standard scanning
More informationElectrical connection
Colour sensors Dimensioned drawing en 02-2014/05 50109619-01 12.5mm 60mm 10-30 V DC 6 khz Scanner for colour detection Very short response time 85µs for detection of fast or small objects and marks Direct
More informationElectron Beam Technology
Electron Beam Technology Speed up! High Performance Electron Beam Lithography dedicated electron beam lithography To bridge cutting-edge research and nanofabrication, a dedicated nanolithography solution
More informationCharacterization and improvement of unpatterned wafer defect review on SEMs
Characterization and improvement of unpatterned wafer defect review on SEMs Alan S. Parkes *, Zane Marek ** JEOL USA, Inc. 11 Dearborn Road, Peabody, MA 01960 ABSTRACT Defect Scatter Analysis (DSA) provides
More informationIntroduction and recent results of Multi-beam mask writer MBM-1000
Introduction and recent results of Multi-beam mask writer MBM-1000 Hiroshi Matsumoto, Yasuo Kato, Munehiro Ogasawara, Hirokazu Yamada February 23 rd, 2016 Member of the ebeam Initiative NFT s mask writer
More informationMechanical aspects, FEA validation and geometry optimization
RF Fingers for the new ESRF-EBS EBS storage ring The ESRF-EBS storage ring features new vacuum chamber profiles with reduced aperture. RF fingers are a key component to ensure good vacuum conditions and
More informationAuto classification and simulation of mask defects using SEM and CAD images
Auto classification and simulation of mask defects using SEM and CAD images Tung Yaw Kang, Hsin Chang Lee Taiwan Semiconductor Manufacturing Company, Ltd. 25, Li Hsin Road, Hsinchu Science Park, Hsinchu
More informationNanotechnology Solutions Partner
Nanotechnology Solutions Partner Park Systems Corp. KANC 4F, Iui-Dong 6-10, Suwon, Korea 443-270 Tel. +82-31-546-6800 Fax. +82-31-546-6805 www.parkafm.co.kr Park Systems Inc. 3040 Olcott St. Santa Clara,
More informationNanotechnology Solutions Partner
Nanotechnology Solutions Partner Park Systems Corp. KANC F, Iui-Dong 96-1, Suwon, Korea 3-27 Tel. +82-31-56-68 Fax. +82-31-56-685 www.parkafm.co.kr Park Systems Inc. 3 Olcott St. Santa Clara, CA 955 Tel.
More informationPROCEEDINGS OF SPIE. Classification and printability of EUV mask defects from SEM images
PROCEEDINGS OF SPIE SPIEDigitalLibrary.org/conference-proceedings-of-spie Classification and printability of EUV mask defects from SEM images Wonil Cho, Daniel Price, Paul A. Morgan, Daniel Rost, Masaki
More informationRevolutionary AOI Technology, Unbelievable Speed World's Fastest and Most Accurate 3D SPI
Revolutionary AOI Technology, Unbelievable Speed World's Fastest and Most Accurate 3D SPI The Recognized Leader for Quality Inspection Solutions 1 WORLD'S FASTEST AND MOST ACCURATE 3D SPI 3 YEAR WARRANTY*
More informationAMOLED Manufacturing Process Report SAMPLE
AMOLED Manufacturing Process Report SAMPLE 2018 AMOLED Manufacturing Process Report The report analyzes the structure and manufacturing process by dividing AMOLED into small & medium-sized rigid OLED,
More informationPossible Paths for Cu CMP
Possible Paths for Cu CMP J.S. Drewery, V. Hardikar, S.T. Mayer, H. Meinhold, F. Juarez, and J. Svirchevski Presented by Julia Svirchevski Agenda Perceived Need for ECMP Technology Differentiation Profile
More informationBecause Innovation Matters
Because Innovation Matters Silicon Systems Group Toru Watanabe President, Applied Materials, Japan Semicon Japan November 30, 2010 Safe Harbor This presentation contains forward-looking statements, including
More informationWafer defects can t hide from
WAFER DEFECTS Article published in Issue 3 2016 Wafer defects can t hide from Park Systems Atomic Force Microscopy (AFM) leader Park Systems has simplified 300mm silicon wafer defect review by automating
More informationTape scales or glass scales for a wide range of applications. Linear or rotary. Resolutions from 5µm to 1.2nm.
High Performance Encoders MicroE Systems HIHER PERORMANCE SMALLER ASTER EASIER SMARTER MORE VERSATILE CUSTOMIZATION LEXIBLE DELIVERY RESPONSIVE TECH SUPPORT Innovative Encoder Systems that Deliver Performance
More informationAchieving 10 Terabytes/Cartridge by 2011
Achieving 10 Terabytes/Cartridge by 2011 John Woelbern Sony Electronics Inc. 3300 Zanker Road, San Jose, CA, 95134-1940 Phone: 408-955-5496 FAX: 408-955-5533 E-mail: john.woelbern@am.sony.com Presented
More informationDefense Technical Information Center Compilation Part Notice
UNCLASSIFIED Defense Technical Information Center Compilation Part Notice ADPO1 1322 TITLE: Amorphous- Silicon Thin-Film Transistor With Two-Step Exposure Process DISTRIBUTION: Approved for public release,
More informationAutomation in Semiconductor Manufacturing IEDM, San Francisco, 1982 Keynote Speech
Automation in Semiconductor Manufacturing IEDM, San Francisco, 1982 Keynote Speech Commentary Alongside ISSCC, IEDM is the most traditional academic conference in the semiconductor field, and it is held
More informationAdvancements in Acoustic Micro-Imaging Tuesday October 11th, 2016
Central Texas Electronics Association Advancements in Acoustic Micro-Imaging Tuesday October 11th, 2016 A review of the latest advancements in Acoustic Micro-Imaging for the non-destructive inspection
More informationENC - LKE51 - L I B
ENC-LKE51 Linear Magnetic Encoder FEATURES DESCRIPTION LKE51 ORDERING INFORMATION Resolutions: 5, 10, 25, and 50μm Linear Travel Speed: Up to 16m/s Standard Sensor for Linear and Rotary Axis Gap Clearance
More informationTransforming Electronic Interconnect Breaking through historical boundaries Tim Olson Founder & CTO
Transforming Electronic Interconnect Breaking through historical boundaries Tim Olson Founder & CTO Remember when? There were three distinct industries Wafer Foundries SATS EMS Semiconductor Devices Nanometers
More informationDefect Analysis of Roll-to-Roll SAIL Manufactured Flexible Display Backplanes
Defect Analysis of Roll-to-Roll SAIL Manufactured Flexible Display Backplanes Carl Taussig, Richard E. Elder, Warren B. Jackson, Albert Jeans, Mehrban Jam, Ed Holland, Hao Luo, John Maltabes, Craig Perlov,
More informationCOMPARISON OF EUV SINGLE EXPOSURE VS. 193i MULTIPLE PATTERING FOR N10 BEOL CHRISTOPHER J. WILSON
COMPARISON OF EUV SINGLE EXPOSURE VS. 193i MULTIPLE PATTERING FOR N10 BEOL CHRISTOPHER J. WILSON - CONTRIBUTORS FORM ADVANCED LITHO AND CU-LOW-K IIAP PROGRAMS - ASML VELDHOVEN DEMO LAB FOR EXPOSURES EUV
More informationADA-4789 Data Sheet Description Features Specifications Package Marking and Pin Connections 4GX Applications
ADA-789 Silicon Bipolar Darlington Amplifier Data Sheet Description Avago Technologies ADA-789 is an economical, easyto-use, general purpose silicon bipolar RFIC gain block amplifiers housed in SOT-89
More informationMicro-machining of transparent materials with. nano, pico and femtosecond lasers
Micro-machining of transparent materials with nano, pico and femtosecond lasers - a review M.R.H. Knowles Oxford Lasers Ltd., Unit 8, Moorbrook Park, Didcot, Oxon OX11 7HP. 1. Motivation Applications &
More informationP I SCALE Creating an Open Access Flexible O L E D P ilo t L in e S e r vic e
P I SCALE Creating an Open Access Flexible O L E D P ilo t L in e S e r vic e Pavel Kudlacek pavel.kudlacek@tno.nl P I - SCALE for 2017Flex 1 Lighting c h a lle n g e L ig h t in g c h a lle n g e At least
More informationInspection of Imprint Lithography Patterns for Semiconductor and Patterned Media
Inspection of Imprint Lithography Patterns for Semiconductor and Patterned Media Douglas J. Resnick, Gaddi Haase, Lovejeet Singh, David Curran, Gerard M. Schmid, Kang Luo, Cindy Brooks, Kosta Selinidis,
More informationsemi-automated scanning
semi-automated scanning The X-Rite EasyTrax semi-automated scanning solution is a great tool for our short and long run book cover manufacturing process. We are excited that it quickly targets color and
More informationAdvanced WLP Platform for High-Performance MEMS. Presented by Dean Spicer, Director of Engineering
Advanced WLP Platform for High-Performance MEMS Presented by Dean Spicer, Director of Engineering 1 May 11 th, 2016 1 Outline 1. Application Drivers for High Performance MEMS Sensors 2. Approaches to Achieving
More informationHigh aspect ratio deep RIE for novel 3D radiation sensors in high energy physics applications
High aspect ratio deep RIE for novel 3D radiation sensors in high energy physics applications Angela Kok, Thor-Erik Hansen, Trond Hansen, Geir Uri Jensen, Nicolas Lietaer, Michal Mielnik, Preben Storås
More informationLossless Compression Algorithms for Direct- Write Lithography Systems
Lossless Compression Algorithms for Direct- Write Lithography Systems Hsin-I Liu Video and Image Processing Lab Department of Electrical Engineering and Computer Science University of California at Berkeley
More informationEUV Mask and Wafer Defectivity: Strategy and Evaluation for Full Die Defect Inspection
EUV Mask and Wafer Defectivity: Strategy and Evaluation for Full Die Defect Inspection Ravi Bonam 1, Hung-Yu Tien 2, Acer Chou 2, Luciana Meli 1, Scott Halle 1, Ivy Wu 2, Xiaoxia Huang 2, Chris Lei 2,
More information2.1. Log on to the TUMI system (you cannot proceed further until this is done).
FEI DB235 ex-situ lift out TEM sample preparation procedure Nicholas G Rudawski ngr@ufledu (805) 252-4916 Last updated: 06/19/15 DISCLAIMER: this procedure describes one specific method for preparing ex-situ
More informationHigh Density Optical Connector with Unibody Lensed Resin Ferrule
High Density Optical Connector with Unibody Lensed Resin Ferrule Akihiro Nakama, 1 Shigeo Takahashi, 1 and Kazuhiro Takizawa 1 The team has developed an unibody lensed resin ferrule, which is able to resolve
More informationScreen investigations for low energetic electron beams at PITZ
1 Screen investigations for low energetic electron beams at PITZ S. Rimjaem, J. Bähr, H.J. Grabosch, M. Groß Contents Review of PITZ setup Screens and beam profile monitors at PITZ Test results Summary
More informationMEMS Technologies Dresden - Product Development and Fabrication at IPMS Dresden
MEMS Technologies Dresden - Product Development and Fabrication at IPMS Dresden MEMS Technologies Dresden - Product Development and Fabrication at IPMS Dresden Michael Müller, Matthias List Outline FhG-IPMS
More information2006 Taiwan FPD International Conference May 25-26, 2006 Taipei International Convention Center Brightness Enhancement Films
1 2006 Taiwan FPD International Conference May 25-26, 2006 Taipei International Convention Center Brightness Enhancement Films Bill Smyth Senior Manager, Marketing & Business Development 3M Optical Systems
More informationApril Figure 1. SEM image of tape using MP particles. Figure 2. SEM image of tape using BaFe particles
April 2013 ABSTRACT The latest and sixth generation of Linear Tape Open (LTOTM) technology introduces two magnetic pigment particle options for users of tape. The two particle options include Metal Particulates
More informationAutomatic Defect Recognition in Industrial Applications
Automatic Defect Recognition in Industrial Applications Klaus Bavendiek, Frank Herold, Uwe Heike YXLON International, Hamburg, Germany INDE 2007 YXLON. The reason why 1 Different Fields for Usage of ADR
More informationThe Silicon Pixel Detector (SPD) for the ALICE Experiment
The Silicon Pixel Detector (SPD) for the ALICE Experiment V. Manzari/INFN Bari, Italy for the SPD Project in the ALICE Experiment INFN and Università Bari, Comenius University Bratislava, INFN and Università
More informationNew appraoch for X-ray weld inspection of pipeline segments
New appraoch for X-ray weld inspection of pipeline segments Lennart Schulenburg VisiConsult X-ray Systems & Solutions GmbH 1 Overview Weld inspection in heavy industries ( Pipe and Tank ) Analogue Film
More informationCONTENTS. Table of Figures
Application Note SXGA Microdisplay Handling Guide (Low Volume) Customer support information: CRL Opto Limited, Dawley Road, Hayes, Middlesex, UB3 1HH. United Kingdom. Tel: +44 (0) 20 8848 6400 Fax: +44
More informationResults on 0.7% X0 thick Pixel Modules for the ATLAS Detector.
Results on 0.7% X0 thick Pixel Modules for the ATLAS Detector. INFN Genova: R.Beccherle, G.Darbo, G.Gagliardi, C.Gemme, P.Netchaeva, P.Oppizzi, L.Rossi, E.Ruscino, F.Vernocchi Lawrence Berkeley National
More informationNanotechnology Solutions Partner
Nanotechnology Solutions Partner Park Systems Corp. KANC 4F, Iui-Dong 6-10, Suwon, Korea 443-270 Tel. +82-31-546-6800 Fax. +82-31-546-6805 www.parkafm.co.kr Park Systems Inc. 3040 Olcott St. Santa Clara,
More informationAdvanced Test Equipment Rentals ATEC (2832)
Established 1981 Advanced Test Equipment Rentals www.atecorp.com 800-404-ATEC (2832) Uncompromising Accuracy Z-Mike non-contact gauges deliver precise, dimensional measurements for improved product quality
More informationAn Overview of the Performance Envelope of Digital Micromirror Device (DMD) Based Projection Display Systems
An Overview of the Performance Envelope of Digital Micromirror Device (DMD) Based Projection Display Systems Dr. Jeffrey B. Sampsell Texas Instruments Digital projection display systems based on the DMD
More informationThe Effect of Plate Deformable Mirror Actuator Grid Misalignment on the Compensation of Kolmogorov Turbulence
The Effect of Plate Deformable Mirror Actuator Grid Misalignment on the Compensation of Kolmogorov Turbulence AN027 Author: Justin Mansell Revision: 4/18/11 Abstract Plate-type deformable mirrors (DMs)
More informationHigh ResolutionCross Strip Anodes for Photon Counting detectors
High ResolutionCross Strip Anodes for Photon Counting detectors Oswald H.W. Siegmund, Anton S. Tremsin, Robert Abiad, J. Hull and John V. Vallerga Space Sciences Laboratory University of California Berkeley,
More informationElectrical connection
Color sensors Dimensioned drawing en 02-2013/01 50121262 068-14515 12mm 32mm 10-30 V DC 500 Hz Scanner for color detection Simultaneous selection of up to 3 colors Detection independent of distance Teach-in
More informationIndoor LED display-2.5mm and below
Indoor LED display-2.5mm and below Features &Advantages Super fine 1.56~2.5mm pixel pitch Sharp and clear picture without flicker and distortion >1200cd/m² brightness 1200 to 2000Hz refresh rate 16-bit
More informationDevelopment of OLED Lighting Applications Using Phosphorescent Emission System
Development of OLED Lighting Applications Using Phosphorescent Emission System Kazuhiro Oikawa R&D Department OLED Lighting Business Center KONICA MINOLTA ADVANCED LAYERS, INC. October 10, 2012 Outline
More informationLUT Luminescence scanners: Seeing what no-one else can
LUT Luminescence scanners Luminescence scanners LUT Luminescence scanners: Seeing what no-one else can Special features: A semi-conductor light source is used in the LUT series no lamp change required.
More informationDisplay Technologies. Corning: The Technology Behind the Glass
Display Technologies Corning: The Technology Behind the Glass Dr. David Chen Director, Application Engineering and Asia Commercial Technology Taiwan Corning Display Technologies Taiwan June 13, 2008 Forward
More informationOrganic light emitting diode (OLED) displays
Ultra-Short Pulse Lasers Enable Precision Flexible OLED Cutting FLORENT THIBAULT, PRODUCT LINE MANAGER, HATIM HALOUI, APPLICATION MANAGER, JORIS VAN NUNEN, PRODUCT MARKETING MANAGER, INDUSTRIAL PICOSECOND
More informationIn-process inspection: Inspector technology and concept
Inspector In-process inspection: Inspector technology and concept Need to inspect a part during production or the final result? The Inspector system provides a quick and efficient method to interface a
More informationHigh performance optical blending solutions
High performance optical blending solutions WHY OPTICAL BLENDING? Essentially it is all about preservation of display dynamic range. Where projected images overlap in a multi-projector display, common
More informationParts of dicing machines for scribing or scoring semiconductor wafers , , , , ,
US-Rev3 26 March 1997 With respect to any product described in or for Attachment B to the Annex to the Ministerial Declaration on Trade in Information Technology Products (WT/MIN(96)/16), to the extent
More informationHC9000D. Color : Midnight Black
HOME CINEMA HC9000D NUEVO HC9000D 2 HC9000D - Videoproyector 0,61" 3-SXRD (16:9 Panorámico) - Resolución Full HD 1920x1080 con visión 3D - Luminosidad 1100 ANSI Lumens - Contraste 150.000:1 - Ratio de
More informationThe Most Accurate Atomic Force Microscope. Park NX-PTR Fully Automated AFM for Accurate Inline Metrology of Hard Disk Head Sliders.
The Most Accurate Atomic Force Microscope Park NX-PTR Fully Automated AFM for Accurate Inline Metrology of Hard Disk Head Sliders www.parkafm.com Park Systems The Most Accurate Atomic Force Microscope
More information