How to Order. Flow rate (l/min) Applicable models PFA710, PFA750. Nil

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1 Integrated Display Type Flow rate range Symbol Specifications ow Order PFA l/min 5 l/min 0 00l/min l/min 0l/min Port size /8 / 3/8 /2 Model Measured fluid Detection type Flow rate measurement range Minimum setting unit Note ) Real-time flow rate Display units Accumulated flow Operating pressure range Proof pressure Pressure loss Accumulated flow range Operating temperature range Linearity Repeatability Temperature characteristics Note 2) Output specifications Switch output Analog output Indicar lights Response time ysteresis Power supply voltage Current consumption Withstand voltage Insulation resistance Noise resistance Vibration resistance Impact resistance Weight Enclosure Port size (Rc, NPT, G) 0 For Air Digital Flow Switch Series PFA Thread type Nil Rc N NPT F G Port size Flow rate (l/min) Applicable ls PFA7, PFA72 PFA75 Wiring specification Nil N 3m lead wire with connecr Without lead wire Unit specification Nil With unit switching function M Fixed SI unit Note) Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Output specification Nil Output specification NPN open collecr 2 outputs NPN open collecr output Analog output ( 5V) PNP open collecr 2 outputs PNP open collecr output Analog output ( 5V) Applicable ls PFA70 PFA7 PFA7 PFA72 PFA75 Dry air, N₂ eater type 0l/min 5 l/min 0 00l/min l/min 0l/min % of maximum flow rate l/min, CFM x 0 - ² l/min, CFM x 0 - ¹ l, ft³ x 0 - ¹ 0 0.5MPa.0MPa 3kPa (at l/min) 3kPa (at 00l/min) 0kPa (at 200l/min) 30kPa (at 0l/min) l 0 C (with no condensation) ±5% F.S. or less ±% F.S. or less ±2% F.S. or less ±3% F.S. or less (5 35 C), ±5% F.S. or less (0 C) NPN open collecr Maximum load current: 80mA; Internal voltage drop: V or less (with load current of 80mA) Maximum applied voltage: 30V PNP open collecr Maximum load current: 80mA Internal voltage drop:.5v or less (with load current of 80mA) Output voltage: 5V impedance: 00kΩ or more 27, 67: Lights up when output is : Green; : Red sec. or less ysteresis : Variable (can be set from 0), Window comparar : 3-digit fixed Note 3) 2VDC (ripple ±0% or less) ma or less 000VAC for min. between external terminal and case MΩ (0VDC) between external terminal and case 000Vp-p, Pulse width µs, Rise time ns 0 0z at whichever is smaller:.5mm amplitude or 98m/s² acceleration, in X, Y, Z directions for 2 hrs. each 90m/s² in X, Y, Z directions 3 times each 2g (without lead wire) /8, / 27, 67: Lights up when output is : Green; : Red 28, 68: Lights up when output is : Green; : None Note ) For digital flow switch with unit switching function. (Fixed SI unit [l/min or l] will be set for switch types without the unit switching function.) Note 2) The output functions operate only for the real-time flow rate display, and do not operate for the accumulated flow display. Note 3) Window comparar Since hysteresis will reach 3 digits, keep P and P2 apart by 7 digits or more. The minimum setting unit is digit. (Refer the table above.) Flow rate units measured under the following conditions: 0 C and 0.3kPa. IP65 60mA or less 290g (without lead wire) 70mA or less 3/8 /2

2 Series PFA Sensor Unit Construction PFA, PFA5 PFA5, PFA52, PFA55 Parts list No Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel Operating Unit Descriptions Parts list No. Description Attachment 2 Seal 3 Spacer Mesh 5 Body 6 Sensor Material ADC NBR Stainless steel RE Butns Press the and butns simultaneously activate the RE function. This clears the unit when an abnormality occurs and resets the accumulated flow display "0". Output () Indicar: Green Lights up when is. Blinks when an overcurrent error occurs on. Output () Indicar: Red U P DOWN LED Display Displays the real-time flow rate, accumulated flow, and set value. The mark blinks when the accumulated flow is being measured. UP Butn ( Butn) Use this butn increase a set value. Butn ( Butn) Use this butn change a set value or any of the s. Lights up when is. Blinks when an overcurrent error occurs on. Error Correction DOWN Butn ( Butn) Use this butn decrease a set value. Take the following corrective solutions when errors occur. LED display Contents Solution A current of more than 80mA is flowing. Check the load and wiring for. A current of more than 80mA is flowing. Check the load and wiring for. The setting data has changed for whatever reasons. The flow rate is over the flow rate measurement range (for air only). Perform the RE operation, and reset all data again. Reduce the flow rate until it is within the flow rate measurement range, using an adjustment valve.

3 For Air Digital Flow Switch Series PFA Flow Rate Setting Setting procedure Manual flow rate setting Key lock Initial setting Set the flow rate that performs switch output. Even if butn is pressed during operation, will not be switched. Initial setting: Sets the display (real-time flow rate/accumulated flow), unit, and output (non-inverted/inverted). Au preset Set the flow rate aumatically. Manual flow rate setting Data that is aumatically set with the au preset can be calibrated. Normal operation Displays the flow rate and performs switch operation. Initial setting Note) Operation is the same for the integrated display type and the remote type (display unit).. Initial Setting Mode 2. Selection of the Display Mode 3. Selection of Display Units Press the butn. Press the butn. Press the butn and hold for second or longer. Release the butn once the display changes from or. Set the display. Use the butn switch. : Display for real-time flow rate : Display for accumulated flow For -M (fixed SI unit) Set the display unit. Note ) Use the and butns switch. Unit number (Refer Table.). Selection of Output Mode 5. Selection of Output Mode Press the butn. Press the butn complete the setting. Set the output for. Use the butn switch the output for. : Non-inverted output : Inverted output (Refer Table 2.) Set the output for. Use the butn switch the output for. : Non-inverted output : Inverted output Note ) Table Table 2 For air Display CFM = ft³/min Real-time flow rate l/min CFM x 0 - ², CFM x 0 - ¹ For water Display Real-time flow rate l/min GPM Accumulated flow l ft³ x 0 - ¹ Accumulated flow l gal (US) GPM = gal (US)/min Note ) For digital flow switch with unit switching function (Fixed SI unit [l/min or l] will be set for the type without the unit switching function.) Note 2) Output is set inverted output at the facry before shipment. is the same. "P" Output "n" Note 2) Output type YES NO YES NO P_2 P_ P_ P_2 n_2 n_ n_ n_2 ysteresis (fixed hysteresis) = 3 digits Window comparar ysteresis (fixed hysteresis) = 3 digits Window comparar 5

4 Series PFA Flow Rate Setting Flow rate setting (manual) Set Value Input. Mode (Manual) Manual Mode 2. Setting Setting the first () 3. Value for OUT Press the butn. Press the butn. (Refer Table 2 for the relationship between each value and the switch output.) Press the butn when displayed. is Set the first () value for. butn: Increases the set value. butn: Decreases the set value. Setting the second (2). Value for OUT Setting the first () 5. Value for Setting the second (2) 6. Value for OUT 2 Press the butn. Press the butn. Press the butn complete the setting. Set the second (2) value for. butn: Increases the set value. butn: Decreases the set value. Set the first () value for. butn: Increases the set value. butn: Decreases the set value. Set the second (2) value for. butn: Increases the set value. butn: Decreases the set value. Flow rate setting (au preset) Set value Input. Mode Setting in the Au 2. Preset Mode Au Preset 3. Preparations Press the butn. Press the butn, and release it as soon as is displayed.. Au Preset Press the butn switch the display. Au Preset 5. Preparations This prepares equipment for the setting. Flow for switch output will start. When the setting is not required, press the and butns simultaneously in this. 6. Au Preset Press the butn. Press the butn complete the setting. When the butn is pressed at this point, the optimum value will calculated and input set aumatically. and the input value will be alternately displayed. Prepares equipment for the OUT 2 setting. When the setting is not required, press the and butns simultaneously in this. When the butn is pressed at this point, the optimum value will be calculated and input aumatically. and the input value will be alternately displayed. point (C, C) point ysteresis (3 digits) 6 point = C, C point = C 3 digits, C 3 digits, ( digit is the minimum setting unit.)

5 For Air Digital Flow Switch Series PFA Other functions Accumulated flow function Start of Accumulation Key lock Start of Key Lock Function Prevents incorrect operations of the butn control. Start accumulation. Press the butn while pressing the butn at the same time. The mark blinks and accumulation begins. Up (l) of flow can be accumulated, but normally only the lower 3 digits are displayed. Press the butn verify the upper 3 digits. Spping Accumulation Press the butn and hold it for 3 seconds or longer. Release the butn when the display changes from and displays. Release of Key Lock Function Use the butn display. Press the butn complete the setting. Press the butn verify the real-time flow rate during accumulation. Press the butn while pressing the butn at the same time. The display fixes upon the current accumulated value and sps. To start further accumulation from this point, press the butn while pressing the butn at the same time. Press the and butns simultaneously and hold for 2 seconds or longer clear the display. Press the butn and hold it for 3 seconds or longer. Release the butn when is displayed. Use the butn display. Press the butn complete the setting. Switching the flow rate range of the remote type (for air) Switching Flow Rate Range Press the butn and hold it for seconds or longer. the values shown in Table 3 will be displayed. Use the butn select the desired flow rate range. Press the butn complete the setting. Table 3 Display Flow rate range 0l/min 5 l/min 0 00l/min l/min 0l/min Applicable l For PFA30 For PFA3 7

6 Series PFA Dimensions: Integrated Display Type for Air Internal circuits and wiring examples 5 -ø.5 FLOW SWITC FOR AIR UP DOWN (.5) 3 2-Port size Main circuit Main circuit LED Red PFA7--27(-M) LED Red PFA7--67(-M) 2VDC 2VDC 2 2-ø3. 3 Main circuit Main circuit Connecr pin numbers 3 FLOW SWITC U P 5 3 FOR AIR DOWN 2 -ø.5 0 (.5) 2-Port size 30 Pin no. 2 3 Pin description DC() /Analog output DC() 73 Analog output PFA7--28(-M) Analog output 2VDC 2VDC PFA7--68(-M) 8

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