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Installation guide M-9562-9063-02-A RGH25F RSLM high RGS20 accuracy linear encoder system

Contents Product compliance 1 Storage and handling 2 RGH25F readhead installation drawing 3 REF interface installation drawing 4 RGS20 scale installation drawing 5 Scale application 6 End clamps 6 Reference mark and limit switch actuator installation 6 Readhead mounting and alignment 7 System calibration 7 Reference mark setup 8 Limit switch 8 Output signals 9 Speed 9 Electrical connections 10 Output specifications 11 General specifications 13 Scale specifications 13

Product compliance C Renishaw plc declares that RGH25F complies with the applicable standards and regulations. A copy of the EC Declaration of Conformity is available on request. FCC compliance This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: (1) This device may not cause harmful interference, and (2) this device must accept any interference received, including interference that may cause undesired operation. The user is cautioned that any changes or modifications not expressly approved by Renishaw plc or authorised representative could void the user s authority to operate the equipment. This equipment has been tested and found to comply with the limits for a Class A digital device, pursuant to part 15 of the FCC Rules. These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment. This equipment generates, uses, and can radiate radio frequency energy and, if not installed and used in accordance with the instruction manual, may cause harmful interference to radio communications. Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense. NOTE: This unit was tested with shielded cables on the peripheral devices. Shielded cables must be used with the unit to ensure compliance. The packaging of our products contains the following materials and can be recycled. Packaging Component Material ISO 11469 Recycling Guidance Outer box Cardboard Not applicable Recyclable Polypropylene PP Recyclable Inserts Low Density Polyethylene Foam LDPE Recyclable Cardboard Not applicable Recyclable Bags High Density Polyethylene Bag HDPE Recyclable Metalised Polyethylene PE Recyclable RoHS compliance Compliant with EC directive 2011/65/EU (RoHS) Further information Further information relating to the RGH25F encoder range can be found in the RGH25F system Data sheet (L-9517-9762). This can be downloaded from our website www.renishaw.com/encoder and is also available from your local representative. This document may not be copied or reproduced in whole or in part, or transferred to any other media or language, by any means without the written prior permission of Renishaw. The publication of material within this document does not imply freedom from the patent rights of Renishaw plc. The use of this symbol on Renishaw products and/or accompanying documentation indicates that the product should not be mixed with general household waste upon disposal. It is the responsibility of the end user to dispose of this product at a designated collection point for waste electrical and electronic equipment (WEEE) to enable reuse or recycling. Correct disposal of this product will help to save valuable resources and prevent potential negative effects on the environment. For more information, please contact your local waste disposal service or Renishaw distributor. Disclaimer RENISHAW HAS MADE CONSIDERABLE EFFORTS TO ENSURE THE CONTENT OF THIS DOCUMENT IS CORRECT AT THE DATE OF PUBLICATION BUT MAKES NO WARRANTIES OR REPRESENTATIONS REGARDING THE CONTENT. RENISHAW EXCLUDES LIABILITY, HOWSOEVER ARISING, FOR ANY INACCURACIES IN THIS DOCUMENT. 1

Storage and handling Readhead UHV version only N-heptane Propan-2-ol Acetone CH 3 (CH 2 ) 5 CH 3 CH 3 CHOHCH 3 CH 3 COCH 3 Chlorinated Solvents Methylated Spirits Minimum bend radius RGS20 100 mm NOTE: Ensure self-adhesive tape is on outside of bend. System Storage Operating Humidity System +70 C -20 C System +55 C 0 C 95% relative humidity (non-condensing) to EN 60068-2-78 2

RGH25F readhead installation drawing Dimensions and tolerances in mm 9.5 6.2 3 27 21 Fixing screws M3 x 0.5 x 8 Arrow indicates forward direction of readhead relative to scale 0.8-0.1 ( +0.2 ) See note 11.5* Alternative mounting face 8 6 (RGS20-S) 6.3 (RGS20-P) 13.5 (Yaw tol. ± 0.5 ) Mounting face 3.8 0.3 4.8 > 4 (Extent of mounting faces) Reference mark actuator (A-9541-0037) 2 mounting holes M3 x 0.5 through 4 8.5 36 26 21.1 R>20 dynamic bend radius R>10 static bend radius Ø4.4 max (Pitch tol. ± 1 ) A 0.6 (Roll tol. ± 1 ) 0.09 Detail A Scale surface Scale thickness 0.2 (RGS20-S) 0.3 (RGS20-P) 8.5* Optical centreline Reference mark sensor position 4* 8* Readhead to scale clearance 0.8 ± 0.1 Rideheight *Dimensions measured from substrate. Required nominal 0.8 gap can be set using blue readhead spacer (supplied) positioned between readhead and actuator when positioning/fixing the actuator. The recommended thread engagement is 5 mm. The recommended tightening torque is between 0.5 and 0.7 Nm. 3

REF interface installation drawing Dimensions and tolerances in mm Optional mounting brackets (A-9539-2018) NOTE: Remove washers when installing brackets 127 Max. screw size M4 100 19.2 41 33.3 20 12 Input 15 way D type socket Calibrate button Set up LED CAL /AGC LED Output 15 way D type plug 114 0.35 Nm torque 16.2 142 4

RGS20 scale installation drawing (with reference mark actuator) Dimensions and tolerances in mm Bolted reference mark actuator shown (A-9541-0037) Measuring length (ML) >5 Reference mark actuator position range >5 Optional epoxy mounted reference mark actuator (A-9531-0250) 30 >15 0.5 0.2/100 F F = axis of motion <10 2.2 14 8.7 13 6 (RGS20-S) 6.3 (RGS20-P) Scale length (ML + 40) Overall length (ML + 70) RGS20 scale installation drawing (with limit switch actuator) Dimensions and tolerances in mm Bolted limit switch actuator shown (A-9541-0040) >5 Measuring length (ML) Limit switch actuator position range >5 Optional epoxy mounted limit switch actuator (A-9531-0251) 30 >15 0.5 0.2/100 F F = axis of motion <10 10 2 8.5 13 6 (RGS20-S) 6.3 (RGS20-P) Scale length (ML + 40) Overall length (ML + 70) NOTE: The surface roughness of the scale mounting surface must be 3.2 Ra. The parallelism of the scale surface to the axis of motion (readhead rideheight variation) must be within 0.05 mm. 5

Scale application The scale applicator A-9541-0124 is designed specifically for use with the RGH25F readheads and RGS20-S scale. Use applicator A-9541-0305 when installing RGS20-P scale. 1 Allow scale to acclimatize to installation environment prior to installation. 2 Thoroughly clean and degrease the substrate using recommended solvents (see 'Storage and handling'). Allow substrate to dry before applying scale. 3 Mark out START and FINISH points for the scale on the axis substrate. Ensure that there is room for the end clamps (see RGS20 scale installation drawing ). 4 Mount the appropriate scale applicator to the readhead mounting bracket using M2.5 screws. Place the shim supplied with the readhead between the applicator and substrate to set the nominal height. NOTE: Scale applicator can be mounted either way round to enable easiest orientation for scale installation. 5 Move axis close to scale start position, leaving enough room for the scale to be inserted through the applicator as shown below. 6 Begin to remove the backing paper from the scale and insert scale into the applicator up to the START point (as shown). Ensure backing tape is routed under the splitter screw. 7 Apply finger pressure to the scale at the START point, using a clean lint-free cloth, to ensure scale end adheres well to substrate. START point End clamps A-9523-4015 is an end clamp kit designed to be used with Renishaw RGS scale. IMPORTANT: End clamps should be used to ensure positional stability of the scale and reference mark repeatability. NOTE: End clamps can be mounted before or after readhead installation. 1 Remove the lacquer coating from the last 15 mm of each end of the scale with a knife and clean with one of the recommended solvents (see Storage and handling ). 15 mm Thoroughly mix up a sachet of glue (A-9531-0342) and apply a small amount to the underside of the end clamp. M2.5 mounting holes 3 The end clamp features two small regions of contact adhesive. These will temporarily hold the end clamp in position while the glue cures. Remove the backing tape from either side. 4 Immediately position end clamp over the end of the scale. Allow 24 hours at 20 C for full cure. 8 Slowly and smoothly move the applicator through the entire axis of travel, ensuring the backing paper is pulled manually from the scale and does not catch under the applicator. Direction of scale application Scale Splitter screw Backing paper 9 Remove applicator and, if necessary, adhere remaining scale manually. Apply firm finger pressure via a clean lint-free cloth along the length of the scale after application to ensure complete adhesion. 10 Clean the scale using Renishaw scale wipes (A-9523-4040) or a clean, dry, lint-free cloth. 11 Fit end clamps (see End clamps section). START 12 Allow 24 hours for complete adhesion of scale before fitting the reference mark or limit magnet. Ensure that excess glue is wiped away from scale as it may affect the readhead signal level. Reference mark and limit switch actuator installation Screw mounted or adhesive mounted reference mark and limit switch actuators are available. Refer to RGH25F readhead installation drawing and RGS20 scale installation drawing for actuator positioning. 6

Readhead mounting and alignment System description The RGH25F encoder system consists of a common readhead in standard or UHV compatible form, coupled to the interface, which gives accurate, industry standard outputs. There are 10 versions of the REF interface, offering digital resolutions of 5 μm to 5 nm, and an analogue version giving 1 Vpp output. The digital REF interfaces are available with a variety of different clocked outputs, each interface option having a different maximum speed and minimum customer counter clock frequency, ranging from 1 to 50 MHz. Mounting brackets The bracket must have a flat mounting surface, enable conformance to the installation tolerances, allow adjustment to the rideheight of the readhead, and be sufficiently stiff to prevent deflection or vibration of the readhead during operation. For easier installation, adjust the roll and yaw of the bracket with respect to the axis of readhead travel before the RGH25F is attached. This can be done with a clock gauge and a precision square. Readhead set-up To set nominal rideheight, position readhead spacer with L shaped aperture under the optical centre of the readhead to allow normal LED function during set-up procedure. Ensure that the scale, readhead optical window and mounting face are clean and free from obstructions. NOTE: Ensure readhead fixing screws are tightened to 0.5 Nm-0.7 Nm. Green Orange Red Blue Purple SET UP LED colour, except at reference mark position. Pitch 0 ± 1 For reliable operation, the SET UP LED should be at least Green, ideally blue or purple when readhead is moved along the full axis travel. Yaw 0 ± 0.5 Roll 0 ± 1 0.8 ± 0.1 mm Rideheight System calibration REF interface features Self-tuning active correction The REF interface actively corrects for input signal imperfections to optimise system accuracy. Corrections are made for the following: Automatic Offset Control (AOC) adjusts offset independently for the sine and cosine signals Automatic Gain Control (AGC) ensures consistent 1 Vpp signal amplitude Automatic Balance Control (ABC) adjusts the gain to equalise the sine and cosine signals These correction mechanisms operate over the full working speed range of the readhead. The user can disable/enable the AGC by depressing the CALIBRATE button for greater than 3 seconds. REF Interface LED diagnostics The REF interface SETUP LED provides visual feedback of signal strength, error condition and reference mark phasing, for setup and diagnostic use. SET-UP LED Indication Status Incremental Reference mark (when traversing the reference mark <100 mm/s only) Flashing purple Purple Blue Green Orange Red Flashing Red High signal alarm condition; Signal level >135% Normal set-up; Signal level 110% to 135% Optimum set-up; Signal level 90% to 110% Normal set-up; Signal level 70% to 90% Low signal; Signal level >50% and <70% Low signal; Signal level >20% and <50% Low signal alarm condition; Signal level <20%; System in error Alarm output* Yes No No No No No Yes Flashing Blue Over speed; system in error Yes Red flash Well phased reference mark No Orange flash Poorly phased reference mark No Blank flash Reference mark not phased No CAL/AGC Operating Yellow AGC is active No Calibration Blank AGC inactive No Slow Yellow flashing Fast Yellow flashing Calibration routine underway Calibration failure * Alarm output will take the form of 3-state or line driven differential E signal depending on interface configuration. Also some configurations do not output overspeed alarm. See Interface part numbers in the RGH25F encoder system data sheet for details. No No 7

Alarm output The REF interface asserts the alarm output (E) for the following conditions:- Incremental signal level below 20% Incremental signal level above 135% Readhead speed in excess of specification Signal offset compensation of sine and cosine excessive Signal balance compensation excessive System installation/calibration The calibration procedure is required to optimise the gain, balance and offset of the analogue input signals in the REF interface. These settings are then stored and recalled for initial use at startup. To calibrate the system, the following sequence should be carried out: u Prior to calibration, AGC should be off. To switch AGC on or off, the CALIBRATE button should be pressed for more than 3 seconds. When AGC is on, the CAL/AGC LED will be on and when AGC is off, the CAL/AGC LED will be off. u Install the readhead according to the instructions in the Readhead mounting and alignment section. u Enter the calibration routine by pressing the CALIBRATE button momentarily. The calibration routine is indicated by slow flashing of the CAL/AGC LED. u Traverse the readhead slowly past the scale until the CAL/AGC LED stops flashing. The calibration cycle is now complete. If calibration fails, the CAL/AGC LED will flash quickly instead of switching off. If this happens the CALIBRATE button should be pressed momentarily to exit the calibration routine. The calibration procedure should then be re-tried. If the unit continues to fail calibration, factory default settings should be restored by powering down, then pressing the CALIBRATE button as power is re-applied. The calibration procedure should then be repeated. NOTE: To exit the calibration routine at any time, the CALIBRATE button should be pressed momentarily. If fitted, the reference mark should be phased (see reference mark set-up) Reference mark set-up To ensure unidirectional repeatability, the reference mark requires phasing with the scale in the direction of normal datuming operation. A reference pulse is output in both directions, but repeatabilty is guaranteed only in the phased direction. Ensure readhead is set up correctly with a green LED indication over the full length of travel and that the reference mark actuator is fitted correctly. NOTE: It is recommended that a datum procedure is performed as part of any power-up sequence to ensure the correct datum position is recorded. NOTE: Reference mark output is synchronised with the incremental channels, giving unit of resolution pulse width. Phasing procedure The readhead must be moved over the reference mark in the direction to be used for the datuming operation. The reference mark is phased correctly when the set-up LED flashes red for 0.25 seconds. If it flashes orange or goes blank, the reference mark adjuster screw should be turned anti-clockwise by 1 / 8 turn and the procedure repeated until a red flash is obtained. Red Orange Blank 1 /8 turn SET UP LED colour at reference mark position only. NOTE: Reference mark flashes only occur up to 100 mm/s traverse speed. Limit switch A limit switch signal is output when the readhead sensor passes over the magnetic actuator. NOTE: RGH25F readheads are available with reference mark or limit switch detection. Select output at order. 8

Output signals Function Power Incremental signals Reference mark / limit Wire colours from readhead 8 15 Input 1 9 1 9 Output 15 way D type socket 15 way D type plug Analogue input Digital output Analogue output Signal Pin Signal Pin Signal Pin Red 5V 8 5V 7, 8 5V 4, 5 White 0V 9 0V 2, 9 0V 12,13 Green A 6 A+ 14 V 1 + 9 Yellow B 5 A- 6 V 1-1 Blue C 4 B+ 13 V 2 + 10 B- 5 V 2-2 Pink Hall 1 Alarm Z+ / Q+ 12 V 0 + / V q + 3 Z- / Q- 4 V 0 - / V q - 11 E+ 11 E- 3 Ired servo Brown Servo 3 External set-up V x 13 X 1 V MID V MID 7 Sin monitor* Interface Sin outputs only monitor 11 Cos monitor* Shield Cos monitor 10 Inner 15 Outer Case Outer Case Outer Case Do not connect 14 10 8 Not connected 2, 12 15 6, 14, 15 8 15 Speed Digital systems, maximum speed (m/s) Resolution (µm) Recommended minimum clock frequency (MHz) 5 1 0.5 0.2 0.1 0.05 0.02 0.01 0.005 50 5.000 5.000 5.000 5.000 3.240 1.620 0.648 0.324 0.162 36 40 5.000 5.000 5.000 5.000 2.700 1.350 0.540 0.270 0.135 30 25 5.000 5.000 5.000 3.240 1.620 0.810 0.324 0.162 0.081 18 20 5.000 5.000 5.000 2.700 1.350 0.675 0.270 0.135 0.068 15 12 5.000 5.000 4.500 1.800 0.900 0.450 0.180 0.090 0.045 10 10 5.000 5.000 4.050 1.620 0.810 0.405 0.162 0.081 0.041 9 8 5.000 5.000 3.240 1.296 0.648 0.324 0.130 0.065 0.032 7.2 6 5.000 4.500 2.250 0.900 0.450 0.225 0.090 0.045 0.023 5 5 5.000 4.050 2.025 0.810 0.405 0.203 0.081 0.041 0.020 4.5 3 5.000 2.250 1.125 0.450 0.225 0.113 0.045 0.023 0.011 2.5 1 4.219 0.844 0.422 0.169 0.084 0.042 0.017 0.008 0.004 0.9 4 20 40 100 200 400 1000 2000 4000 Interpolation factor (period to resolution) Analogue system - RGH25F + REF0000 100 Signal strength (%) Internal clock frequency (MHz) *2.25 Vpp @ 100% signal amplitude centred on 1.65 V 10 10 100 Frequency (khz) AGC Off AGC On 1 2 4 8 Speed (m/s) 9

Electrical connections Grounding and shielding RGH25F Inner shield (except UHV) REF interface Extension cable Customer electronics 5 V Output signals 0 V power Outer shield 0 V Pin 15 IMPORTANT: The outer shield should be connected to the machine earth (Field Ground). The inner shield should be connected to 0 V at customer electronics only. Care should be taken to ensure that the inner and outer shields are insulated from each other. If the inner and outer shields are connected together, this will cause a short between 0 V and earth, which could cause electrical noise issues. NOTE: Maximum cable length of 5 m between RGH25F and REF interface NOTE: Maximum extension cable length: - analogue output (REF0000) - 100 m - digital outputs, see table below Recommended clock frequency (MHz) Maximum cable length (m) 25 20 20 50 Recommended signal termination REF interface digital outputs REF interface analogue outputs - REF0000 only 0 V 5 V V q V 0 V 1 V 2 + Interface A B Z Q E+ 220 pf 1k # Customer electronics 120 Ω V q V 0 V 1 V 2 - Cable Z 0 = 120 Ω 120 Ω A B Z Q E- 220 pf 1k # 0 V 0 V Standard RS422A line receiver circuitry. Capacitors recommended for improved noise immunity. #Only required on alarm channel E for fail safe operation. 10

Output specifications Digital output signals - type REF digital output interfaces Form - Square wave differential line driver to EIA RS422A Incremental 2 channels A and B in quadrature (90 phase shifted) Alarm A B Signal period Resolution Model P (µm) S (µm) REF0004 20 5 REF0020 4 1 REF0040 2 0.5 REF0100 0.8 0.2 REF0200 0.4 0.1 REF0400 0.2 0.05 REF1000 0.08 0.02 REF2000 0.04 0.01 E 20 ms minimum Asynchronous pulse E Alarm asserted when: - <20% signal amplitude - >135% signal amplitude - Readhead exceeds specified maximum speed - Signal offset excessive NOTE: 3-state alarm option also available REF4000 0.02 0.005 Reference Set-up Z Wide reference (option C) Synchronised pulse Z, duration as resolution 1 Voltage at X Z Repeatability of position (uni-directional) maintained within ±10 C from installation temperature and for speed <250 mm/s Actuation device A-9541-0037/A-9559-0650 Synchronised pulse Z, duration as signal period NOTE: Wide reference mark option useful when using long cable lengths and/or high speed operation to overcome effects of skew 0 0 Signal level Setup signal voltage proportional to signal amplitude Inverse signals not shown for clarity 100% Limit Repeatability <0.1 mm typical Q Asynchronous pulse Q Length of actuating magnet NOTE: RGH25F readheads and REF interfaces are available with reference mark or limit switch detection. Actuation device A-9541-0040/A-9531-0251 11

Output specifications (continued) Analogue output signals - type REF0000 Form - 1 Vpp differential Incremental 2 channels V 1 and V 2 differential sinusoids in quadrature (90 phase shifted) Set-up 20 µm 1 (V 1 +) -(V 1 -) 1 Vpp (nominal) with AGC active Voltage at V X (V 2 +) - (V 2 -) 90 0 0 Signal level 100% Setup signal voltage proportional to signal amplitude Reference 1 V Differential pulse I 0-18 to 108 Duration 126 (electrical) (V 0 +) - (V 0 -) -18 108 Repeatability of position (uni-directional) maintained within ±10 C from installation temperature and for speed <250 mm/s 0 Actuation device A-9541-0037/A-9559-0650 Limit Repeatability <0.1 mm typical 1 V (V q +) - (V q -) Length of actuating magnet Asynchronous pulse V q NOTE: RGH25F readheads and REF interfaces are available with reference mark or limit switch detection Actuation device A-9541-0040/A-9531-0251 12

General specifications Power supply 5 V ± 5% 120 ma NOTE: Current consumption figures refer to unterminated readheads. For digital outputs a further 25 ma per channel pair (e.g. A+, A-) will be drawn when terminated with 120 Ω. For analogue outputs a further 20 ma will be drawn when terminated with 120 Ω Power from a 5 V dc supply complying with the requirements for SELV of standard IEC BS EN 60950-1. Ripple 200 mvpp @frequency up to 500 khz maximum. Temperature Storage -20 C to +70 C Operating 0 C to +55 C Humidity 95% relative humidity (non condensing) to EN 60068-2-78 Sealing IP40 Acceleration Operating 500 m/s 2, 3 axes Shock Non-operating 1000 m/s 2, 6 ms, ½ sine, 3 axes Vibration Operating 100 m/s 2 max @ 55 Hz to 2000 Hz, 3 axes Mass Readhead 11 g Cable 34 g/m Cable 8 core, double shield, maximum diameter 4.4 mm Flex life >20 x 10 6 cycles at 20 mm bend radius Renishaw encoder systems have been designed to the relevant EMC standards, but must be correctly integrated to achieve EMC compliance. In particular, attention to shielding arrangements is essential. Scale specifications Scale type RGS20-S Reflective gold plated steel tape with protective lacquer coating. Adhesive backing tape allows direct mounting to the machine substrate. RGS20-P Scale period 20 µm Linearity RGS20-S ±3 µm/m Scale length RGS20-P Reflective gold plated steel tape with tough polyester coating for applications using harsh solvents. Adhesive backing tape allows direct mounting to the machine substrate. ±5 µm/m Up to 50 m (>50 m by special order) Form (H x W) RGS20-S 0.2 mm x 6 mm (includes adhesive) RGS20-P 0.3 mm x 6.3 mm (includes adhesive) Substrate materials Expansion coefficient End fixing Temperature Operating -10 C to +120 C. Minimum installation 10 C Storage -20 C to +70 C. Metals, ceramics and composites with expansion coefficients between 0 and 22 µm/m/ C (steel, aluminium, Invar, granite, ceramic etc.) Matches that of substrate material when scale ends are fixed by epoxy mounted end clamps Epoxy mounted end clamps (A-9523-4015) using 2 part epoxy adhesive (A-9531-0342) Scale end movement <1 µm over temperature range -20 C to +50 C Humidity 95% relative humidity (non-condensing) to EN 60068-2-78 13

Renishaw plc New Mills, Wotton-under-Edge, Gloucestershire GL12 8JR United Kingdom T +44 (0)1453 524524 F +44 (0)1453 524901 E uk@renishaw.com www.renishaw.com RSLM high accuracy linear encoder For worldwide contact details, please visit our main website at www.renishaw.com/contact RENISHAW and the probe symbol used in the RENISHAW logo are registered trade marks of Renishaw plc in the United Kingdom and other countries. apply innovation and names and designations of other Renishaw products and technologies are trade marks of Renishaw plc or its subsidiaries. 2003-2018 Renishaw plc All rights reserved Issued 0718 *M-9562-9063-02*