International Standards Benefiting a Global Industry: The SEMI Approach Kwang-Woo Park Operation Manager, SEMI Korea kpark@semi.org 1
Introduction Brief introduction to SEMI SEMI Standards Program Development of a SEMI standard Publication of SEMI Standards Regional SEMI FPD Standards organization and Issued FPD Standards 2
SEMI SEMI is a 33-year old international trade association representing suppliers of equipment, materials and services to the worldwide semiconductor and related industries SEMI 's mission is to help its members achieve their common corporate objectives by providing a means for addressing industry issues collectively At present, SEMI has about 2450 corporate members SEMI has a global presence with offices where the semiconductor, FPD, MEMS and other related industries are active 3
SEMI Services to the Industry International and regional exhibitions SEMICON and FPD Expo trade shows Business, technical and educational seminars, various symposia and workshops, newsletters, periodic trade missions, etc Promotion of government policies to meet the needs of its members including free and open market access Member supported market statistics Industry initiatives e.g., PCS, EH&S International standards 30 th Anniversary (1973-2003)! 4
SEMI International Standards Program Framework to bring experts from SEMI members and their customers together to facilitate the timely creation of commercially useful standards for the global semiconductor, FPD, MEMS and related industries SEMI is a supplier organization, but the standards program has also included users and related organizations since its inception in 1973 Since 1987, SEMI standards have been developed, published and used internationally SEMI does not charge a fee for participation in its standards program 5
What are Consensus Standards? Consensus: general or widespread agreement among all the members of a group All SEMI Standards are developed on the basis of consensus among all participating volunteers in all regions of the world Consensus-based Standards ensure wide applicability and common understanding of best practice 6
What are Voluntary Standards? In the U.S. and many other countries, there is a mixture of government-enforced and voluntary standards All SEMI Standards are international and voluntary they are not enforced by the government but rather exist to improve the dialogue between companies worldwide and to enable cost-effective manufacture and distribution of products and services 7
Program Characteristics - I Program is guided by formal Regulations approved on an international basis More than 20 SEMI staff members provide administrative support for the Program worldwide Meetings for document development are conducted in North America, Japan, and Europe as of 2001 also in Korea and Taiwan Moving to electronic communications and document development to reduce need for travel 8
Program Characteristics - II Language assistance is frequently provided at task force and committee meetings and with documents Worldwide distribution of document drafts and ballots to seek global consensus Working relationships with regional consortia and standards developing organizations Standards can be obtained from the SEMI Web Site or on CD-ROM (print editions phasing out) Editions of SEMI Standards are available in English, Japanese, and Chinese 9
Volunteer Structure Oversight SEMI Board of Directors Management International Standards Committee Regional Standards Committees (FPD Committees) Europe Japan North America Members in Korea (W / FPD WG) P R China R O W Singapore Taiwan (W / FPD WG) Global Technical Committees Automated Test Equipment Assembly & Packaging FPD Equipment FPD Material Handling FPD Materials & Components E H & S Facilities Gases (and Gas Distribution) Liquid Chemical Distribution Systems Process Chemicals Information & Physical Control Metrics Micropatterning Interfaces & Traceability Carriers Compound Semiconductor Materials Silicon Wafer 10
Worldwide Membership 1181 40.4% 13 0.4% 1302 44.5% Japan Asia Pacific Europe North America ROW Notes: Asia Pacific includes China, Korea, Singapore, Taiwan 10.9% 319 3.8% 110 Total Membership: 2925 (Korea: 47 including 26 FPD membership) 11
Types of SEMI Standards and Guidelines Standard (full international consensus): Specification Test method Practice Guide Terminology Classification Special cases: formats, charts, reference photographs, etc. Provisional standard (full international consensus, but not complete in one or more respects) Proposed standard (technical committee approval; two-year life only) Safety guidelines (full international consensus advisory in nature; special conditions for approval; cannot be proposed ) 12
Development of a SEMI Standard INDUSTRY NEEDS Use Technology Trends Suppliers Users Idea to Committee Draft (Task Force) Global Technical Committee Consensus Procedural Review (RSC) 13
SEMI Global Standardization Process Participation open to all qualified individuals worldwide Documents are developed and balloted worldwide The SEMI global standardization process is based on one vote per company on an international basis in contrast to ISO/IEC, which achieve international consensus based on reconciling national positions by negotiation, allowing one vote per country SEMI Regulations have the following requirements for approval: 60% return requirement (official voting members) Committee must consider all valid comments 80% or more of valid votes must be favorable or abstaining with at least 20% favorable Procedural review by regional standards committee Appeals process in place to review perceived procedural issues and inequities 14
Where SEMI Standards Apply From I300I-J300 Global Joint Guidance Document, July 15, 1997 15
Published Results CD-ROM (Individual and enterprise-wide license) Annual subscription Updated three times per year Each standard is posted on the SEMI Web Site in.pdf format as soon as it has been prepared for publication Various download packages are available Translations 16
Industry Awareness of New and Revised Standards Lists of new and revised standards are posted to the SEMI web site three times per year http://www.semi.org/standards SEMI organizes standards technical education programs (STEPs) at major international events to let industry know about implementation of newly approved standards or critical work under development Interested parties can organize in-house seminars with assistance from SEMI 17
Japan FPD Organization Chart FPD Technology Division Yasuhisa Oana /IDTech Yoshitada Nogami /SK Electronics Equipment Committee Mike Takeda / Tokyo Electron Materials & Components Committee Hisashi Aluga /Seiko Epson Yoshitada Nogami / SK Electronics Taketsugu Itoh / Corning Material Handling Committee Haruo Maetani / Daihen Takashi Mitomi / Toshiba Matsushita Display Technology Polarizing Film TF Kentaro Tasaka / Nitto Takehiko Iwasaki / Nitto Ryoichi Watanabe / Toshiba Matsushita Display Technology Panel Defect Inspection TF Satoshi Tsuji / IDTech Equipment Docs Rev TF Mike Takeda /Tokyo Electron Equipment Safety TF Mike Takeda /Tokyo Electron Masato Nagura /Canon Mask SC Katsuyuki Hasunuma / ULCOAT Atsushi Okazaki / SK Electronics Large Size Mask TF Katsuyuki Hasunuma / ULCOAT Atsushi Okazaki / SK Electronics Substrate SC Taketsugu Itoh / Corning Tomoyuki Shimizu / AGC Katsuo Iwasaki / Toshiba Matsushita Display Techology Glass Substrate Specification TF Taketsugu Itoh / Corning Tomoyuki Shimizu / AGC Yoshitaka Oya / NH Techno Glass Color Filter SC Hisashi Aluga /Seiko Epson Takashi Hatano/ACTI Takao Taguchi /Toppan Printing Tadahiro Hurukawa/Kyodo Printing Color Characteristics TF Yukio Fujii /New STI Technology Resin BM Resistivity TF Masahiro Yoshioka /Toray Chromaticity TF Takao Taguchi /Toppan Printing Backlight TF Ken Takaku / Stanley Hiroyuki Takeuchi / Stanley Masami Takagi /Harison Toshiba Lighting Kazuyoshi Yamaguchi / West Electric Future Generation AMHS TF Haruo Maetani / Daihen Makoto Yamamoto / Muratech Kenji Hoshino / Muratech 18
Information & Control SC (Software) C: TBD NA FPD Organization Chart FPD Committee C: Bill Colbran MTM Engineering C: Ben Garbowski Corning VC: Norbert Hildebrand - Schott Technical Advisors TE: Win Baylies Baytech LA: Curt Layman Applied Komatsu Tech America Materials & Components SC C: Lori Hamilton Substrate Dimensions TF L: Win Baylies Baytech Physical Material Handling SC (Interbay & Intrabay) C: Jim Costa NEA C: George Horn - Middlesex Shipping Cassette TF L: George Zuments Web Systems Mechanical Interfaces TF Transport-to-Transport L: George Horn Middlesex Facilities & Safety SC C: Rich Kaplan Consultant C: Sunny Rai GS3 FPD Safety TF L: Sunny Rai GS3 L: Curt Ward - Glimmerglass Equipment SC C: TBD Thin Film TF L: Austin Blew LEI L: Vicky Milanopoulou Leybold 19
Korea FPD WG Organization Chart Korea FPD WG Il-Ho(William) Kim / LG Philips LCD Sung-Chul Kang /Samsung Electronics Equipment WG Hyo-Hyung LEE / LG Production Tech Institute Materials & Components WG Sung-Chul Kang / Samsung Electronics Glass Substrate WG Sung-Taik Suh /Samsung Corning Precision Glass BackLight WG Sung-Chul Kang /Samsung Cha-Yeon Kim / Taesan LCD Color Filter WG TBD Panel Defect Inspection TF Seong-Won Lee / ENC Tech. Min-Joon Jang / J&C Tech Back Light Terminology TF Cha-Yeon Kim / Taesan LCD Back Light Measurement TF Don-Gyu Lee / LG.Philips LCD 20
Taiwan FPD WG Organization Chart FPD WG Dr. David Chen, Corning EHS WG Dr. Shuh-Woei Yu, ITRI EHS Material WG Dr. Jeff Nien, Picvue Dr. Fang-Chuan Ho, ITRI OES Equipment WG Dr. Sam Churng, ITRI MIRL Substrate Task Force Dr. David Chen, Corning Color-Filter Task Force Mr. Dan-Ching Yan, Toppoly Mr. Chin-Tai Chen, ITRI OES 21
Issued FPD Standards - 1 D3 Quality Area Specification for FPD Substrates D5 Standard Size for FPD Substrates D6 Standard Edge Length and Thickness for LCD Mask Substrates D7 FPD Glass Substrates Surface Roughness Measurement Method D9 Definitions for FPD Substrates Originated by; D10 Test Method for Chemical Durability of FPD Glass Substrates NA/Japan/NA- D11 Specification for FPD Glass Substrate Cassettes JA Joint/Korea D12 Specification for Edge Condition of FPD Substrates Committee D13 Terms and Definitions for FPD Color Filter Assemblies D15 FPD Glass Substrate Surface Waviness Measurement Method D16 Specification for Mechanical Interface between FPD Material Handling System and Tool Port D17 Mechanical Specification Used to Ship FPD Glass Substrates D18 Specification for Cassettes Used for horizontal Transport and Storage of FPD Substrates D19 Test Method for Determination of Chemical Resistance of FPD Color Filters D20 Defect Terminology for FPD Masks 22
Issued FPD Standards - 2 D21 Definitions for FPD Masks D22 Test Method for The Determination of Colors, Transmittance of FPD Color Filter Assemblies D23 Guide for Cost of Equipment Ownership (CEO) Calculation for FPD Equipment D24 Specification for Glass Substrate Dimensions D25 Specification for FPD Glass Substrate Shipping Case D26 Provisional Specification for FPD Large Area Masks (North America Regional) D27 Guide for FPD Equipment Communication Interfaces D28 Specification for Mechanical Interface between FPD Material Handling System and Tool Port, Using AGV, MGV, and RGV D29 Test Method for Heat Resistance in FPD Color Filters D30 Test Method for Light Resistance in FPD Color Filters D31 Definition of Measurement Index (Semu) for Luminance Mura in FPD Image Quality Inspection D32 Specification for Improved Information Management for Glass FPD Substrates Through Orientation Corner Unification D33 Measuring Method of Optical Characteristics for Backlight Unit D34 Test Method for Measurement of FPD Polarizing Films 23
Korea FPD Standards WG Activity Kwang-Woo Park Operation manager, SEMI Korea kpark@semi.org 24
History of FPD Korea Standards WG Jun. 5, 2000 SEMI FPD Standards Workshop in Seoul Sep. 5, 2000 Kick-off of Korea FPD WG 3 sub WGs Equipment WG Glass Substrate WG Backend WG Dec 7, 2000 1 st FPD Global Standards Leadership Meeting Meeting between co-chairs of Japan. North America, Taiwan & Korea Sep. 2001 Realigned FPD WG Equipment WG, Materials& Components WG Nov. 2001 Initiated 3 New Task Force Teams Panel Defect Inspection, Backlight Measurement & Backlight Terminology Started to develop 3 new FPD documents for backlight and panel defect (Mura) inspection Feb. 2003 LCD Panel Defect Inspection Seminar Jun. 2003 2 New Standards Documents in publication Backlight Terminology Backlight Measurement 25
Korea FPD WG Organization Chart Korea FPD WG As of June 03 Il-Ho(William) Kim / LG Philips LCD Sung-Chul Kang /Samsung Electronics Staff :Kwang-Woo Park / SEMI Korea Equipment WG Hyo-Hyung LEE / LG -PRC Materials & Components WG Sung-Chul Kang / Samsung Electronics Glass Substrate sub-wg Sung-Taik Suh /Samsung Corning Precision Glass BackLight sub-wg Sung-Chul Kang /Samsung Cha-Yeon Kim / Taesan LCD Color Filter sub-wg TBD Panel Defect Inspection TF Seong-Won Lee / ENC Tech. Min-Joon Jang / J&C Tech Back Light Terminology TF Cha-Yeon Kim / Taesan LCD Back Light Measurement TF Don-Gyou Lee / LG.Philips LCD 26
Korea FPD Standards WG Who are Korea WG Members Industry volunteers from FPD field - Equipment and Materials companies - Panel makers What are they doing Develop new SEMI FPD Standards on the basis of consensus Open discussion for new Standard balloted by other regions Technical information sharing Initiate Standards technical education seminar to disseminate or gather technical information on Standards 27
New Standards Proposal New Standards documents 3 new documents are in publication or draft Equipment WG Doc. 3475 (Measurement Method for SEMI Mura in FPD Image Quality Inspection) - To submit blue (informational) ballot in August 2003 Materials and Components WG Doc. 3476A (Terminology for LCD Backlight Unit) - Accepted at international ballot and to be published D33-0703 (Measuring Method of Optical Characteristics for BLU) - To be published in July 2003 28
Future Plan Korea FPD Standards Technical Committee (tentative plan) Propose new Technical Committee in Korea to SEMI ISC Seek leadership volunteers from industry Target date: SEMICON Korea 04 in February 2004 New Item for Standards Specification of backlight unit Reliability test method of backlight unit Color filter related issues Standards Technical Education Program of Backlight Unit Conduct STEP in conjunction with SEMICON Korea 2004 in Feb. 2004 29
Roadmap of FPD Korea WG Participate and Contribute to FPD Global Standards Road Map 2001 2002 2003 2004 Approved PDI TF New Items Equipment Review Doc.3324 Voting Materials & Components Approved 2 TFs Review Materials Panel Defect Inspection Doc.3475 B/L Terminology Doc.3476 B/L Test Method Doc.3477 Update with Japan TF, Taiwan F-back Update with Japan TF, Taiwan F-back Blue Ballot Blue Ballot Seminar Yellow Ballot Yellow Ballot Blue Ballot New : BLU Spec. Draft Doc. Yellow Ballot Technical Committee BLU Reliability Test D33 Publish B/L STEP Color Filter Sub-WG New Items 30