Vacuum measurement and control units

Vacuum analysis and measurement Vacuum measurement and control units Vacuum measurement and control units Page 450 www.pfeiffer-vacuum.net

Page Vacuum measurement and control units Selection aid and analysis equipment DigiLine Digital Piezo CPT Digital Piezo / Pirani RPT Digital Pirani PPT Digital Pirani / Bayard-Alpert HPT Digital Pirani / Cold cathode MPT Controllers DPG Power supply units without display DPS Accessoires DigiLine AvtiveLine Active Piezo s APR Active capacitive s CMR Active capacitive s CMR Active capacitive s CCR Active capacitive s CCR Active Pirani / capacitive s PCR Active Pirani s TPR Active cold cathode s IKR Active Pirani / cold cathode PKR Active hot cathode s IMR Active Pirani / Bayard-Alpert PBR Pirani manual measurement unit TPG Controller TPG SingleGauge measurement equipment DualGauge measurement equipment MaxiGauge TPG Controller ModulLine Pirani gauge heads TPR Cold cathode gauge heads IKR Accessoires board Interface and relay board Basic unit TPG 300 Complete units TPG 300 452 453 454 458 460 462 464 466 468 470 472 478 480 484 486 488 490 492 494 498 502 504 506 508 510 514 516 518 520 524 526 528 530 536 538 540 Control Units www.pfeiffer-vacuum.net Page 451

Vacuum analysis and measurement Vacuum measurement and control units Selection aid range Application Recommended Possible max. (mbar) min. (mbar) Vacuum furnaces Sputterring Evaporation Chambers Reactive Processes Loadlock Acceleratorr Transmitter/Gauges DigiLine Digital Piezo Transmitter Digital Pirani Transmitter Digital Piezo/Pirani Transmitter Digital Pirani/Kaltkathode Transmitter Digital Pirani/Bayard-Alpert Transmitter ActiveLine Active Piezo Transmitter Active Capacitance Transmitter Temperature compensated Temperature regulated Active Pirani Transmitter Active Pirani / Capacitance Transmitter Active Cold Cathode Transmitter Active Cold Cathode Transmitter Active Hot Cathode Transmitter Active Pirani Bayard-Alpert Transmitter ModulLine Pirani pressure gauge Cold Cathode pressure gauge CPT 100 PPT 100 RPT 100 MPT 100 HPT 100 APR 250 APR 260 APR 262 APR 265 APR 266 APR 267 CMR 361 CMR 362 CMR 363 CMR 364 CMR 365 CMR 271 CMR 272 CMR 273 CMR 274 CMR 275 TPR 280 TPR 281 PCR 260 IKR 251 IKR 261 IKR 270 PKR 251 PKR 261 IMR 265 PBR 260 TPR 010 TPR 017 TPR 018 IKR 050 IKR 060 IKR 070 2,000 1,000 1,200 1,000 1,000 1,100 1,100 2,200 5,500 11,000 55,000 1.100 110 11 1.1 0.11 1,100 110 11 1.1 0.11 1,000 1,000 1,500 0.01 0.01 0.01 1,000 1,000 1,000 1,000 1,000 1,000 1,000 5. 10-3 5. 10-3 5. 10-3 1 1. 10-4 1. 10-4 5. 10-9 1. 10-9 1. 10-1 1. 10-1 2. 10-1 0,5 1 5 1. 10-1 1. 10-2 1. 10-3 1. 10-4 1. 10-5 1. 10-1 1. 10-2 1. 10-3 1. 10-4 1. 10-5 5. 10-4 5. 10-4 5. 10-4 2. 10-9 2. 10-9 5. 10-11 5. 10-9 5. 10-9 2. 10-6 5. 10-10 8. 10-4 8. 10-4 8. 10-4 2. 10-9 1. 10-10 1. 10-11 Page 452 www.pfeiffer-vacuum.net

and analysis equipment Many vacuum applications operate only in a given pressure range. Analog and digital vacuum and total pressure measurement equipment is used to determine and regulate the total pressure in a vacuum system. Pfeiffer Vacuum offers three different series of equipment for total pressure measurement. The criteria used in selecting the sensor will depend upon the differing conditions: Pressure range to be detected Gas composition (inert or corrosive) Required accuracy and repeatability Ambient conditions, radioactivity Each series, in its own right, covers the entire pressure range. This means that Pfeiffer Vacuum supplies you with the best solution for your total pressure measurement task, matched to the pump technology in question. Series at a glance DigiLine Total pressure measurement with digital signal output ActiveLine Total pressure measurement with analog signal output ModulLine Total pressure measurement in radioactive environments Control Units Total pressure measurement with an HPT 100 on a coating system Employment of an HPT 100 on a calibration pumping station Integration of an HPT 100 into a plant control system via Profibus www.pfeiffer-vacuum.net Page 453

Vacuum analysis and measurement Vacuum measurement and control units DigiLine Innovative Vacuum! Digital Transmitters. What is DigiLine? The sensors in the DigiLine series are supplied with a 24 V direct current. The measured values are output via a digital RS-232 or RS-485 interface. The DPG 101 power supply can be used to operate individual s (combinations of sensor and electronics) and display their measured values. The DPG 109 can supply up to nine s. Transmitter signals can also be presented and processed directly on a PC or PLC with the aid of DokuStar Plus software. Converters can be used to convert the RS-485 signal to a fieldbus signal (Profibus-DP or DeviceNet), enabling it to be utilized in plant control systems with fieldbus control, which affords simple and cost-effective cabling. Page 454 www.pfeiffer-vacuum.net

Profibus-DP Fieldbus solution Bus system for a uniform system control concept. Transmitter with attached Profibus converter. For up to 126 units. Further actuators, e.g. turbopump, valves Programmable logic control (PLC) RS-485 Customer-specific solution Data is input directly into a PLC or a PC (software DokuStar Plus). Up to 32 units (up to 15 s can be addressed). 24 V PLC or PC Combination solution Operation of up to 9 s with display unit DPG 109. Very simple calibration through the DPG 109. Data can be input directly to the PLC or a PC. RS-485 RS-232 PLC or PC Control Units Alternative: Power supply without a display through the power supply DPS 109. Single solution Operation of one with the display unit DPG 101. Very simple calibration through the DPG 101. Alternatively, the data can be input directly to a PC using the power supply DPS 101. RS-232 PC with DPS 101 power supply and DokuStar software DigiLine application concepts www.pfeiffer-vacuum.net Page 455

Vacuum analysis and measurement Vacuum measurement and control units Advantages at a glance Perfect for the industry Reliable data transfer through digital signals Serial interface RS-232/485 selectable Components freely combinable Data can be directly input to a PC With Profibus converter for integration in system controllers Suited for heavy duty industrial applications Directly transferable values, i. e., no complex characteristics are necessary Very easy to calibrate Connecting up all components without problems Low wiring complexity Applications Coating systems Vacuum furnaces Accelerators Mass spectrometers Semiconductor production Leak detection systems HPT 100 (Pirani / Bayard-Alpert) and CPT 100 (Piezo) on a vacuum furnace for producing sintered metals RPT 100 (Piezo / Pirani) replaces in a helium leak detection unit two conventionalgauge heads. Data transfer through Profibus module Page 456 www.pfeiffer-vacuum.net

Notes Control Units www.pfeiffer-vacuum.net Page 457

Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Digital Piezo CPT 100 Piezo (1-2000 mbar) DigiLine TM Accurate Rugged For industrial applications G = Cylindrical pipe thread Dimensions A A Ø B Ø B C C D D DN 16 ISO-KF G 1/4" DN 16 ISO-KF G 1/4" A 120 mm 120 mm B 30 mm G 1/4" C 35 mm 35 mm D 60 mm 60 mm Page Page 458 458 www.pfeiffer-vacuum.net

Technical data Digital Piezo CPT 100, DN 16 ISO-KF Digital Piezo CPT 100, G1/4" Flange (in) DN 16 ISO-KF G 1/4" Seal FPM FPM Pressure max. 4 bar 4 bar Feedthrough Glass Glass Flange DN 16 ISO-KF G 1/4" Accuracy: % of measurement 1-1200 mbar: +/- 0.5 % F.S. >1200 mbar: +/-2 % F.S. 1-1200 mbar: +/- 0.5 % F.S. >1200 mbar: +/-2 % F.S. Weight 0.2 kg 0.2 kg Materials in contact with media Ceramic, Stainless steel, FPM Ceramic, Stainless steel, FPM range max. 2000 mbar 2000 mbar range min. 1 mbar 1 mbar Sensor cable length max. 1000 m 1000 m Method of measurement Piezo Piezo Measuring cycle 40 ms 40 ms Interface: Connection Digital RS-232 / RS-485, 9-pin, Sub-D-socket Digital RS-232 / RS-485, 9-pin, Sub-D-socket Protection category IP 40 / IP 54 IP 40 / IP 54 Temperature: Bakeout 70 C 70 C Temperature: Operating +5 - +50 C +5 - +50 C Temperature: Storage -40 - +60 C -40 - +60 C Supply: Voltage 24 V DC 24 V DC Supply: Power consumption max. 0.5 W 0.5 W Order number Digital Piezo CPT 100 PT R31 130 PT R31 230 Mess- und Steuergeräte controll units Accessories TIC 251, Profibus converter for CPT 100, PPT 100, PT 348 110 PT 348 110 RPT 100 TIC 002, converter for DigiLine TM Transmitter PM 051 519-T PM 051 519-T Centering ring with poral filter, FPM/stainless steel, PF 117 216-T DN 16 ISO-KF Fine filter for TPR 265, pore size 0.0004 mm PT 120 132-T Centering ring, with fine filter, DN 16 ISO-KF PT 120 132-T www.pfeiffer-vacuum.net Page Page 459 459

Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Digital Piezo/Pirani RPT 100 Piezo/Pirani combination (1 10-4 - 1200 mbar) DigiLine TM range from 1 10-4 mbar to 1200 mbar For industrial applications with Profibus interface Highly accurate throughout the entire measurement range Dimensions A A Ø B Ø B C C D D DN 16 ISO-KF DN 16 CF DN 16 ISO-KF DN 16 CF A 120 mm 132 mm B 30 mm 34 mm C 35 mm 35 mm D 60 mm 60 mm Page Page 460 460 www.pfeiffer-vacuum.net

Technical data Digital Piezo/ Pirani RPT 100, DN 16 ISO-KF Digital Piezo/ Pirani RPT 100, DN 16 CF Flange (in) DN 16 ISO-KF DN 16 CF Seal Metal Metal Pressure max. 4 bar 4 bar Feedthrough Glass Glass Flange DN 16 ISO-KF DN 16 CF Accuracy: % of measurement 5-1200 mbar: +/- 0.5 % F.S. 1 10-3 - 1 mbar: +/-5 % 5-1200 mbar: +/- 0.5 % F.S. 1 10-3 - 1 mbar: +/-5 % Weight 0.2 kg 0.2 kg Materials in contact with media Tungsten, Gold, Silicon Tungsten, Gold, Silicon range max. 1200 mbar 1200 mbar range min. 1 10-4 mbar 1 10-4 mbar Sensor cable length max. 1000 m 1000 m Method of measurement Piezo / Pirani Piezo / Pirani Measuring cycle 40 ms 40 ms Interface: Connection Digital RS-232 / RS-485, 9-pin, Sub-D-socket Digital RS-232 / RS-485, 9-pin, Sub-D-socket Protection category IP 40 / IP 54 IP 40 / IP 54 Temperature: Bakeout 70 C 70 C Temperature: Operating +5 - + 50 C +5 - + 50 C Temperature: Storage -40 - +60 C -40 - +60 C Supply: Voltage 24 V DC 24 V DC Supply: Power consumption max. 2 W 2 W Repeatability: % of measurement 5-1200 mbar: +/- 0.5 % F.S. 1 10-3 - 1 mbar: +/- 1 % 5-1200 mbar: +/- 0.5 % F.S. 1 10-3 - 1 mbar: +/- 1 % Mess- und Steuergeräte controll units Order number Digital Piezo/Pirani RPT 100 PT R32 130 PT R32 330 Accessories TIC 251, Profibus converter for CPT 100, PPT 100, PT 348 110 PT 348 110 RPT 100 TIC 002, converter for DigiLine TM Transmitter PM 051 519-T PM 051 519-T Centering ring with poral filter, FPM/stainless steel, PF 117 216-T DN 16 ISO-KF Centering ring, with fine filter, DN 16 ISO-KF PT 120 132-T www.pfeiffer-vacuum.net Page Page 461 461

Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Digital Pirani PPT 100 Pirani (1 10-4 - 1000 mbar) DigiLine TM range from 1 10-4 mbar to 1000 mbar Extremely accurate For industrial applications with Profibus interface Dimensions A A Ø B Ø B C C D D DN 16 ISO-KF DN 16 CF DN 16 ISO-KF DN 16 CF A 120 mm 132 mm B 30 mm 34 mm C 35 mm 35 mm D 60 mm 60 mm Page Page 462 462 www.pfeiffer-vacuum.net

Technical data Digital Pirani PPT 100, DN 16 ISO-KF Digital Pirani PPT 100, DN 16 CF Flange (in) DN 16 ISO-KF DN 16 CF Seal Metal Metal Pressure max. 4 bar 4 bar Feedthrough Glass Glass Flange DN 16 ISO-KF DN 16 CF Accuracy: % of measurement 1 10-3 - 1mbar: +/-5 % 1 10-3 - 1mbar: +/-5 % Weight 0.2 kg 0.2 kg Materials in contact with media Tungsten, stainless steel Tungsten, stainless steel range max. 1000 mbar 1000 mbar range min. 1 10-4 mbar 1 10-4 mbar Sensor cable length max. 1000 m 1000 m Method of measurement Pirani Pirani Measuring cycle 40 ms 40 ms Interface: Connection Digital RS-232 / RS-485, 9-pin, Sub-D-socket Digital RS-232 / RS-485, 9-pin, Sub-D-socket Protection category IP 40 / IP 54 IP 40 / IP 54 Temperature: Bakeout 70 C 70 C Temperature: Operating +5 - +50 C +5 - +50 C Temperature: Storage -40 - +60 C -40 - +60 C Supply: Voltage 24 V DC 24 V DC Supply: Power consumption max. 2 W 2 W Repeatability: % of measurement 1 10-3 - 1mbar: +/-1 % 1 10-3 - 1mbar: +/-1 % Order number Digital Pirani PPT 100 PT R33 130 PT R33 330 Mess- und Steuergeräte controll units Accessories TIC 251, Profibus converter for CPT 100, PPT 100, PT 348 110 PT 348 110 RPT 100 TIC 002, converter for DigiLine TM Transmitter PM 051 519-T PM 051 519-T Centering ring with poral filter, FPM/stainless steel, PF 117 216-T DN 16 ISO-KF Centering ring, with fine filter, DN 16 ISO-KF PT 120 132-T www.pfeiffer-vacuum.net Page Page 463 463

Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Digital Pirani/Bayard-Alpert HPT 100 Pirani/Bayard-Alpert combination (1 10-9 - 1000 mbar) DigiLine TM range from 1 10-9 mbar to 1000 mbar Extremely accurate For industrial applications with Profibus interface Highly reliable with 2 filaments Dimensions A A Ø B Ø B C C D D DN 40 ISO-KF DN 40 CF DN 40 ISO-KF DN 40 CF A 147 mm 156 mm B 55 mm 70 mm C 35 mm 35 mm D 85 mm 85 mm Page Page 464 464 www.pfeiffer-vacuum.net

Technical data Digital Pirani/ Bayard-Alpert HPT 100, DN 40 ISO-KF Digital Pirani/ Bayard-Alpert HPT 100, DN 40 CF Flange (in) DN 40 ISO-KF DN 40 CF Number of filaments 2 2 Seal Metal Metal Pressure max. 4 bar 4 bar Feedthrough Glass, Ceramic Glass, Ceramic Filament iridium yttriated, twice Iridium yttriated, twice Flange DN 40 ISO-KF DN 40 CF Accuracy: % of measurement 1 10-7 - 1 mbar: +/- 10 % 1 10-7 - 1 mbar: +/- 10 % Weight 0.4 kg 0.4 kg Materials in contact with media Tungsten, stainless steel, nickel Tungsten, stainless steel, nickel range max. 1000 mbar 1000 mbar range min. 1 10-9 mbar 1 10-9 mbar Sensor cable length max. 1000 m 1000 m Method of measurement Pirani/Bayard- Alpert Pirani/Bayard- Alpert Measuring cycle 40 ms 40 ms Interface: Connection Digital RS-232 / RS-485, 9-pin, Sub-D-socket Digital RS-232 / RS-485, 9-pin, Sub-D-socket Protection category IP 40 / IP 54 IP 40 / IP 54 Temperature: Bakeout (electronics removed) 180 C 180 C Temperature: Operating +5 - +50 C +5 - +50 C Temperature: Storage -40 - +60 C -40 - +60 C Supply: Voltage 24 V DC 24 V DC Supply: Power consumption max. 7.5 W 7.5 W Repeatability: % of measurement 1 10-7 - 1 mbar: +/- 5 % 1 10-7 - 1 mbar: +/- 5 % Mess- und Steuergeräte controll units Order number Digital Pirani/Bayard-Alpert HPT 100 PT R34 130 PT R34 330 Accessories TIC 252, Profibus converter for HPT 100, MPT 100 PT 348 111 PT 348 111 TIC 002, converter for DigiLine TM Transmitter PM 051 519-T PM 051 519-T www.pfeiffer-vacuum.net Page Page 465 465

Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Digital Pirani/cold cathode MPT 100 Pirani/cold cathode combination (5 10-9 - 1000 mbar) DigiLine TM Broad measurement range from 5 10-9 to 1000 mbar Combination of a Pirani and cold cathode sensor Insensitive to gas ingress More rugged than hot cathodes Highly accurate Compatible with DigiLine controllers and accessories Dimensions 85 35 144 102 53 Digital Pirani/cold cathode MPT 100 Page Page 466 466 www.pfeiffer-vacuum.net

Technical data Digital Pirani/ cold cathode MPT 100, DN 25 ISO-KF Digital Pirani/ cold cathode MPT 100, DN 40 ISO-KF Digital Pirani/ cold cathode MPT 100, DN 40 CF-R Anode Mo Mo Mo Flange (in) DN 25 ISO-KF DN 40 ISO-KF DN 40 CF-R Seal Metal Metal Metal Pressure max. 4 bar 4 bar 4 bar Feedthrough Glass, ceramic Glass, ceramic Glass, ceramic Accuracy: % of measurement 1 10-7 - 1 10-2 mbar: +/- 25 %, 1 10-2 - 100 mbar: +/-15 % 1 10-7 - 1 10-2 mbar: +/- 25 %, 1 10-2 - 100 mbar: +/-15 % 1 10-7 - 1 10-2 mbar: +/- 25 %, 1 10-2 - 100 mbar: +/-15 % Weight 0,580 kg 0,580 kg 0,580 kg Materials in contact with media Tungsten, stainless steel, nickel Tungsten, stainless steel, nickel Tungsten, stainless steel, nickel range max. 1000 mbar 1000 mbar 1000 mbar range min. 5 10-9 mbar 5 10-9 mbar 5 10-9 mbar Sensor cable length max. 1000 m 1000 m 1000 m Method of measurement Pirani / Cold Cathode Pirani / Cold Cathode Pirani / Cold Cathode Measuring cycle 40 ms 40 ms 40 ms Interface: Connection Digital RS-232 / RS-485, 9-pin, Sub-D-socket Digital RS-232 / RS-485, 9-pin, Sub-D-socket Digital RS-232 / RS-485, 9-pin, Sub-D-socket Protection category IP 40 IP 40 IP 40 Temperature: Bakeout (electronics removed) 180 C 180 C 180 C Temperature: Operating +5 - +50 C +5 - +50 C +5 - +50 C Temperature: Storage -40 - +60 C -40 - +60 C -40 - +60 C Supply: Voltage 24 V DC 24 V DC 24 V DC Supply: Power consumption max. 2.5 W 2.5 W 2.5 W Volume 9.5 cm³ 9.5 cm³ 9.5 cm³ Repeatability: % of measurement 1 10-7 - 100 mbar: +/-5 % 1 10-7 - 100 mbar: +/-5 % 1 10-7 - 100 mbar: +/-5 % Ignition aid Stainless steel Stainless steel Stainless steel Mess- und Steuergeräte controll units Order number Digital Pirani/cold cathode MPT 100 PT R35 120 PT R35 130 PT R35 330 Accessories TIC 252, Profibus converter for HPT 100, MPT 100 PT 348 111 PT 348 111 PT 348 111 www.pfeiffer-vacuum.net Page Page 467 467

Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Controllers DPG 101, controller for 1 DPG 109, controller for 9 s DigiLine TM Controllers with 1 and 9 channels are suitable for operating the s. Their intuitive operation affords simple calibration. Dimensions 66 102 DPG 101 128 106 DPG 109 128 106 172 172 71 107 DPG 101, controller DPG 109, controller Page Page 468 468 www.pfeiffer-vacuum.net

Technical data DPG 101, controller for 1 DPG 109, controller for 9 s Connections for 1 9 (max. 4 HPT 100) Display LCD-Display, backlit, four digit LCD-Display, backlit, four digit Weight 0.7 kg 1 kg range max. 2000 mbar 2000 mbar range min. 1 10-10 mbar 1 10-10 mbar rate 30 1/s 30 1/s Mains requirement: frequency (range) 50/60 Hz 50/60 Hz Mains requirement: power consumption 15 VA 48 VA Mains requirement: voltage (range) 90-260 V AC 90-260 V AC Set point: Voltage max. 260 V AC, 2 A; 50 V DC, 2 A 50 V AC, 3 A; 30 V DC, 3 A Set point: Changeover contact, potential-free 2 pieces 8 pieces Signal output: Measuring value, analog 0-10 V - Interface - RS-232-C Temperature: Operating +5 - +50 ºC +5 - +50 ºC Temperature: Storage -20 - +60 ºC -20 - +50 ºC Order number Controllers PT G10 010 PT G15 010 Mess- und Steuergeräte Accessories Transmitter connection cable, 10 m PT 348 210-T PT 348 410-T Transmitter connection cable, 6 m PT 348 206-T PT 348 406-T Transmitter connection cable, 3 m PT 348 203-T PT 348 403-T Power cord, US plug, 2.5 m P4 564 309 YX P4 564 309 YX Euro-style safety plug, 2.5 m P4 564 309 YU P4 564 309 YU Power cord, Swiss plug, 2.5 m P4 564 309 YR P4 564 309 YR Power cord, U.K. plug, 2.5 m P4 564 309 Y1 P4 564 309 Y1 DokuStar Plus software PT 882 501 PC data cable, 3 m PT 348 130-T controll units www.pfeiffer-vacuum.net Page Page 469 469

Vacuum analysis and measurement and control units DigiLine TM DigiLine TM Power supply units without display DPS 101, for 1 DPS 109, for 9 s DigiLine TM Power supply units with either 1 or 9 channels are provided for operating the s without an additional display. They can be connected with a PC or SPC via an RS-232 interface. Dimensions 66 DPS 109 128 106 178 71 DPS 101, for 1, EU plug DPS 109, for 9 s Page Page 470 470 www.pfeiffer-vacuum.net

Technical data DPS 101, for 1, EU plug DPS 101, for 1, US plug DPS 101, for 1, UK plug DPS 109, for 9 s Weight 0.3 kg 0.3 kg 0.3 kg 0.7 kg range max. 2000 mbar 2000 mbar 2000 mbar 2000 mbar range min. 1 10-10 mbar 1 10-10 mbar 1 10-10 mbar 1 10-10 mbar Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz Mains requirement: power consumption 18 VA 18 VA 18 VA 48 VA Mains requirement: voltage (range) 100-240 V 100-240 V 100-240 V 90-260 V Interface RS-232-C RS-232-C RS-232-C RS-232 Software DokuStar Included Included Included - Temperature: Operating +5 - +50 C +5 - +50 ºC +5 - +50 ºC +5 - +50 ºC Temperature: Storage -30 - +50 C -30 +50 ºC -30 - +50 ºC -20 - +60 ºC Order number Controllers PT G20 010 PT G20 011 PT G20 012 PT G25 010 Accessories DokuStar Plus software PT 882 501 Transmitter connection cable, 10 m PT 348 410-T Transmitter connection cable, 6 m PT 348 406-T Transmitter connection cable, 3 m PT 348 403-T Power cord, US plug, 2.5 m P4 564 309 YX Euro-style safety plug, 2.5 m P4 564 309 YU Power cord, Swiss plug, 2.5 m P4 564 309 YR Power cord, U.K. plug, 2.5 m P4 564 309 Y1 Mess- und Steuergeräte controll units www.pfeiffer-vacuum.net Page Page 471 471

Vacuum analysis and measurement and control units DigiLine TM accessories DigiLine TM accessories TIC 251, Profibus converter TIC 252, Profibus converter DigiLine TM accessories TIC 251, Profibus converter for CPT 100, PPT 100, RPT 100 TIC 252, Profibus converter for HPT 100, MPT 100 Dimensions 35 35 52 60 52 85 TIC 251 TIC 252 Page Page 472 472 www.pfeiffer-vacuum.net

Technical data TIC 251, Profibus converter for CPT 100, PPT 100, RPT 100 TIC 252, Profibus converter for HPT 100, MPT 100 Weight 0.1 kg 0.12 kg Power 3.5 W (without ) 3.5 W (without ) Interface: Type Profibus - DP Profibus - DP Voltage Connection 21-30 V DC Connection 21-30 V DC Temperature: Operating +5 - +40 ºC +5 - +40 ºC Order number Profibus converter PT 348 110 PT 348 111 controll units Mess- und Steuergeräte www.pfeiffer-vacuum.net Page Page 473 473

Vacuum analysis and measurement and control units DigiLine TM accessories DigiLine TM accessories TIC 002, Konverter für DigiLine TM Transmitter DigiLine TM accessories For operating Pfeiffer Vacuum products via an RS - 485 Bus connection from pumps and DigiLine s for up to 32 devices For supplying the operating voltage for DigiLine s RS - 485 / RS - 232 interface converter for connection with a PC or SPC TIC 002 Page Page 474 474 www.pfeiffer-vacuum.net

Technical data TIC 002, converter for DigiLine TM Transmitter Power consumption ca. 1 W Voltage 24 V DC Order number TIC 002 PM 051 519-T Accessories TPS 100, mains pack for wall/standard rail fitting PM 041 827-T Mating plug for voltage supply P0 920 635 E Plug - in bus termination, for RS-485 PT 348 100-T controll units Mess- und Steuergeräte www.pfeiffer-vacuum.net Page Page 475 475

Vacuum analysis and measurement and control units DigiLine TM accessories DigiLine TM accessories DokuStar Plus software DigiLine TM accessories System requirements: PC min. Pentium 160 MHz - 64 MB RAM - 15 MB of free HD memory Interface: RS - 232 For DPG / DPS 109 Visualization and storage of readings from up to 15 s Technical data DokuStar Plus software PC min. Pentium 160 MHz RAM 64 MB Interface RS - 232 Memory 15 MB free HD memory Order number DokuStar Plus software PT 882 501 Page Page 476 476 www.pfeiffer-vacuum.net

Notes controll units Mess- und Steuergeräte www.pfeiffer-vacuum.net Page Page 477 477

Vacuum analysis and measurement Vacuum measurement and control units ActiveLine Innovative Vacuum! Capazitive Transmitters. What is ActiveLine? The ActiveLine family includes three control units and eight s. The six APR piezo models cover five measurement ranges from 55 bar to 0.1 mbar. The CMR capacitative diaphragm s are available both as temperature-compensated and temperature-regulated versions in four and five measurement ranges, respectively, from 1,100 to 10-5 mbar. Page 478 www.pfeiffer-vacuum.net

The ActiveLine comprises three controllers and eight s APR TPR PCR IKR Control units for connecting of one, two and six s Each can be operated with every controller Transmitter TPG 261 TPG 262 TPG 256 A No cable mix-up identical cables for connecting the s to the controllers Control units PKR CMR IMR PBR Transmitter / Control Units ActiveLine application concepts Advantages at a glance Large variety of s to cover the entire pressure range (10-11 to 55,000 mbar) Compact design Easy integration Cost effective Integrated measurement connections Compact independent Output signal 0 10 V with integrated error signal Any pressure unit possible www.pfeiffer-vacuum.net Page 479

Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Piezo s APR 250/260 (1 10-1 - 1100 mbar) ActiveLine range from 0.1 mbar to 1100 mbar Pressure measurement independent of type of gas Corrosion-resistant Dimensions Active Piezo APR 250, DN 16 ISO-KF Active Piezo APR 260, DN 16 ISO-KF Active Piezo APR 260, DN 16 CF-F Page Page 480 480 www.pfeiffer-vacuum.net

Technical data Active Piezo APR 250, DN 16 ISO-KF Active Piezo APR 260, DN 16 ISO-KF Active Piezo APR 260, DN 16 CF-F Flange (in) DN 16 ISO-KF DN 16 ISO-KF DN 16 CF-F Output signal: Sensor error below 0.4 V 0.4 V 0.4 V Output signal: Pressure range 1.0-9.8 V 1.0-9.8 V 1.0-9.8 V Output signal: Minimum load 10 kohm 10 kohm 10 kohm Bakeout temperature 80 C 80 C 80 C Pressure max. 3 bar 3 bar 3 bar Stability of sensitivity 0.5 %/year 0.2 %/year 0.2 %/year Accuracy 2 % F.S. 1 % F.S. 1 % F.S. Weight 120 g 120 g 150 g Linearity and hysteresis 0.5 % F.S. 0.2 % F.S. 0.2 % F.S. range max. 1100 mbar 1100 mbar 1100 mbar range min. 1 10-1 mbar 1 10-1 mbar 1 10-1 mbar Sensor cable length 50 m 50 m 50 m Zero stability 0.5 % F.S./year 0.3 % F.S./year 0.3 % F.S./year Temperature: Operating +10 - +60 ºC +10 - +60 ºC +10 - +60 ºC Temperature: Storage -40 ºC - +70 ºC -40 - +70º C -40 - +70 ºC Thermal sensitivity drift 0.5 % 0.5 % 0.5 % Thermal zero drift 0.5 % F.S. 0.2 % F.S. 0.2 % F.S. Supply: Voltage 13-30 V DC 13-30 V DC 13-30 V DC Supply: Power consumption max. 0.2 W 0.2 W 0.2 W Volume 2 cm 3 2 cm 3 6 cm 3 Material Stainless steel Stainless steel Stainless steel Mess- und Steuergeräte Order number ActiveLine s P 5215 102 TF P 5215 112 TF P 5215 114 TF Accessories Sensor cable, 3 m PT 448 250-T PT 448 250-T PT 448 250-T Mating connector B 4707 283 MA B 4707 283 MA B 4707 283 MA controll units www.pfeiffer-vacuum.net Page Page 481 481

Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Piezo s APR 262/265/266/267 (2 10-1 - 55000 mbar) ActiveLine range from 0.2 mbar to 2200 mbar Pressure measurement independent of type of gas Corrosion-resistant Dimensions Active Piezo APR 262 Active Piezo APR 265 Active Piezo APR 266 Active Piezo APR 267 Page Page 482 482 www.pfeiffer-vacuum.net

Technical data Active Piezo APR 262, G1/4 " Active Piezo APR 265, G 1/4" Active Piezo APR 266, G 1/4" Active Piezo APR 267, G 1/4" Flange (in) G 1/4" G 1/4" G 1/4" G 1/4" Output signal: Sensor error below 0.4 V 0.4 V 0.4 V 0.4 V Output signal: Pressure range 1.0-9.8 V 1.0-9.8 V 1.0-9.8 V 1.0-9.8 V Output signal: Minimum load 10 kohm 10 kohm 10 kohm 10 kohm Bakeout temperature 80 C 80 C 80 C 80 C Pressure max. 6 bar 15 bar 30 bar 150 bar Stability of sensitivity 0.2 %/year 0.2 %/year 0.2 %/year 0.2 %/year Accuracy 2 % F.S. 2 % F.S. 2 % F.S. 2 % F.S. Weight 120 g 120 g 120 g 120 g Linearity and hysteresis 0.5 % F.S. 0.5 % F.S. 0.5 % F.S. 0.5 % F.S. range max. 2200 mbar 5500 mbar 11000 mbar 55000 mbar range min. 2 10-1 mbar 0.5 mbar 1 mbar 5 mbar Sensor cable length 50 m 50 m 50 m 50 m Zero stability 0.5 % F.S./year 0.5 % F.S./year 0.5 % F.S./year 0.5 % F.S./year Temperature: Operating +10 - +60 ºC +10 - +60 ºC +10 - +60 ºC +10 - +60 ºC Temperature: Storage -40 - +70 ºC -40 - +70 ºC -40 - +70 ºC -40 - +70 ºC Thermal sensitivity drift 0.5 % 0.5 % 0.5 % 0.5 % Thermal zero drift 0.5 % F.S. 0.5 % F.S. 0.5 % F.S. 0.5 % F.S. Supply: Voltage 13-30 V DC 13-30 V DC 13-30 V DC 13-30 V DC Supply: Power consumption max. 0.2 W 0.2 W 0.2 W 0.2 W Volume 0.5 cm 3 0.5 cm 3 0.5 cm 3 0.5 cm 3 Material Stainless steel Stainless steel Stainless steel Stainless steel Mess- und Steuergeräte Order number ActiveLine s P 5215 120 TF P 5215 126 TF P 5215 132 TF P5 215 138 TF Accessories Sensor cable, 3 m PT 448 250-T PT 448 250-T PT 448 250-T PT 448 250-T Mating connector for compact gauge B 4707 283 MA B 4707 283 MA B 4707 283 MA B 4707 283 MA controll units www.pfeiffer-vacuum.net Page Page 483 483

Vacuum analysis and measurement and control units ActiveLine ActiveLine Dimensions Active capacitive s (1 10-5 - 1100 mbar) Active capacitive CMR 361 Active capacitive CMR 362 Active capacitive CMR 363 Active capacitive CMR 364 Active capacitive CMR 365 ActiveLine range from 1 10-1 mbar to 1100 mbar Capacitive diaphragm for ActiveLine Sensor in ceramic technology No memory effects Materials employed have identical temperature coefficients Excellent temperature compensation Resistant to corrosive gases Excellent zero stability 69 23 55 44 69 23 55 44 69 23 55 44 69 23 55 44 Tube OD 1/2" DN 16 ISO-KF DN 16 CF-R DN 8 VCR Page Page 484 484 www.pfeiffer-vacuum.net

Technical data Active capacitive CMR 361 Active capacitive CMR 362 Active capacitive CMR 363 Active capacitive CMR 364 Active capacitive CMR 365 Resolution 0.003 % F.S. 0.003 % F.S. 0.003 % F.S. 0.003 % F.S. 0.003 % F.S. Output signal: Sensor error above 9.8 V 9.8 V 9.8 V 9.8 V 9.8 V Output signal: Sensor error below 0.4 V 0.4 V 0.4 V 0.4 V 0.4 V Output signal: Pressure range 1...9.8 V 1...9.8 V 1...9.8 V 1...9.8 V 1...9.8 V Output signal: Minimum load 10 kohm 10 kohm 10 kohm 10 kohm 10 kohm Bakeout temperature max. at the 110 C 110 C 110 C 110 C 110 C flange Pressure max. 3 bar 2 bar 2 bar 2 bar 1.3 bar Accuracy 0.2 % of reading 0.2 % of reading 0.2 % of reading 0.2 % of reading 0.5 % of reading Weight < 300 g < 300 g < 300 g < 300 g < 300 g Membrane and measuring chamber Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) range max. 1100 mbar 110 mbar 11 mbar 1.1 mbar 0.11 mbar range min. 1 10-1 mbar 1 10-2 mbar 1 10-3 mbar 1 10-4 mbar 1 10-5 mbar Sensor cable length 120 m 120 m 120 m 120 m 120 m Pipe and flange Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel Temperature: Operating +5... +50 C +5... +50 C +5... +50 C +5... +50 C +5... +50 C Temperature: Storage -40... +65 C -40... +65 C -40... +65 C -40... +65 C -40... +65 C Temperature effect: on span 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.03 % of reading/ C Temperature effect: on zero 0.005 % F.S./ C 0.005 % F.S./ C 0.005 % F.S./ C 0.015 % F.S./ C 0.02 % F.S./ C Supply: Voltage 14... 30 VDC 14... 30 VDC 14... 30 VDC 14... 30 VDC 14... 30 VDC Supply: Power consumption max. 1 W 1 W 1 W 1 W 1 W Volume 6 cm 3 6 cm 3 6 cm 3 6 cm 3 6 cm 3 Mess- und Steuergeräte Active capacitive CMR 361 Active capacitive CMR 362 Active capacitive CMR 363 Active capacitive CMR 364 Active capacitive CMR 365 Flange (in) Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Order number PT R24 600 PT R24 610 PT R24 620 PT R24 630 PT R24 640 Flange (in) DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF Order number PT R24 601 PT R24 611 PT R24 621 PT R24 631 PT R24 641 Flange (in) DN 16 CF-R DN 16 CF-R DN 16 CF-R DN 16 CF-R DN 16 CF-R Order number PT R24 602 PT R24 612 PT R24 622 PT R24 632 PT R24 642 Flange (in) Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Order number PT R24 603 PT R24 613 PT R24 623 PT R24 633 PT R24 643 controll units Accessories Sensor cable, 3 m PT 448 250-T PT 448 250-T PT 448 250-T PT 448 250-T PT 448 250-T Mating connector for compact gauge B 4707 283 MA B 4707 283 MA B 4707 283 MA B 4707 283 MA B 4707 283 MA www.pfeiffer-vacuum.net Page Page 485 485

Vacuum analysis and measurement and control units ActiveLine ActiveLine Active capacitive s (1 10-5 - 1100 mbar) Active capacitive CMR 271 Active capacitive CMR 272 Active capacitive CMR 273 Active capacitive CMR 274 Active capacitive CMR 275 ActiveLine range from 0.2 mbar to 2200 mbar Pressure measurement independent of type of gas Corrosion-resistant Dimensions A B ø C E D A B ø C E D A B ø C E D DN DN Tube OD 1/2" DN 16 ISO-KF DN 16 CF-R DN 8 VCR Tube OD 1/2" DN 16 ISO-KF DN 16 CF-R Cajon 8 VCR A 126 mm 128 mm 128 mm 154.5 mm B 23 mm 23 mm 23 mm 23 mm C 78 mm 78 mm 78 mm 78 mm D 80 mm 80 mm 80 mm 80 mm E 46 mm 48 mm 48 mm 74.5 mm F 12.7 mm - - - Page Page 486 486 www.pfeiffer-vacuum.net

Technical data Active capacitive CMR 271 Active capacitive CMR 272 Active capacitive CMR 273 Active capacitive CMR 274 Active capacitive CMR 275 Resolution 0.0015 % F.S. 0.0015 % F.S. 0.0015 % F.S. 0.0025 % F.S. 0.0025 % F.S. Output signal: Sensor error below 0.4 V 0.4 V 0.4 V 0.4 V 0.4 V Output signal: Pressure range 1.0-9.8 V 1.0-9.8 V 1.0-9.8 V 1.0-9.8 V 1.0-9.8 V Output signal: Minimum load 10 kohm 10 kohm 10 kohm 10 kohm 10 kohm Bakeout temperature max. at the 90 C 90 C 90 C 90 C 90 C flange Pressure max. 3 bar 2 bar 2 bar 2 bar 2 bar Accuracy 0.15 % of reading 0.15 % of reading 0.15 % of reading 0.15 % of reading 0.15 % of reading Membrane and measuring chamber Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 range max. 1100 mbar 110 mbar 11 mbar 1.1 mbar 0.11 mbar range min. 1 10-1 mbar 1 10-2 mbar 1 10-3 mbar 1 10-4 mbar 1 10-5 mbar Sensor cable length 65 m 65 m 65 m 65 m 65 m Pipe and flange Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel Temperature: Operating +15 - +40 ºC +15 - +40 ºC +15 - +40 ºC +15 - +40 ºC +15 - +40 ºC Temperature: Storage -40 - +65 ºC -40 - +65 ºC -40 - +65 ºC -40 - +65 ºC -40 - +65 C Temperature effect: on span 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C Temperature effect: on zero 0.0025 % F.S./ C 0.0025 % F.S./ C 0.0025 % F.S./ C 0.0025 % F.S./ C 0.0065 % F.S./ C Temperature stabilization 45 ºC 45 ºC 45 ºC 45 ºC 45 ºC Supply: Voltage 18-30 V DC 18-30 V DC 18-30 V DC 18-30 V DC 18-30 V DC Supply: Power consumption max. 7.5 W 7.5 W 7.5 W 7.5 W 7.5 W Active capacitive CMR 271 Active capacitive CMR 272 Active capacitive CMR 273 Active capacitive CMR 274 Active capacitive CMR 275 Flange (in) Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Weight 485 g 485 g 485 g 485 g 485 g Volume 7 cm 3 7 cm 3 7 cm 3 7 cm 3 7 cm 3 Order number PT R25 000 PT R25 010 PT R25 020 PT R25 030 PT R25 040 Flange (in) DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF Weight 495 g 495 g 495 g 495 g 495 g Volume 7,25 cm 3 7,25 cm 3 7,25 cm 3 7,25 cm 3 7,25 cm 3 Order number PT R25 001 PT R25 011 PT R25 021 PT R25 031 PT R25 041 Flange (in) DN 16 CF-R DN 16 CF-R DN 16 CF-R DN 16 CF-R DN 16 CF-R Weight 505 g 505 g 505 g 505 g 505 g Volume 7,25 cm 3 7,25 cm 3 7,25 cm 3 7,25 cm 3 7,25 cm 3 Order number PT R25 002 PT R25 012 PT R25 022 PT R25 032 PT R25 042 Flange (in) Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Weight 515 g 515 g 515 g 515 g 515 g Volume 9,25 cm 3 9,25 cm 3 9,25 cm 3 9,25 cm 3 9,25 cm 3 Order number PT R25 003 PT R25 013 PT R25 023 PT R25 033 PT R25 043 Mess- und Steuergeräte controll units Accessories Sensor cable, 3 m PT 448 250-T PT 448 250-T PT 448 250-T PT 448 250-T PT 448 250-T Mating connector for compact gauge B 4707 283 MA B 4707 283 MA B 4707 283 MA B 4707 283 MA B 4707 283 MA www.pfeiffer-vacuum.net Page Page 487 487

Vacuum analysis and measurement and control units ActiveLine ActiveLine Dimensions Active capacitive s CCR (1 10-5 - 1000 torr) Active capacitive CCR 361 Active capacitive CCR 361 Active capacitive CCR 363 Active capacitive CCR 364 Active capacitive CCR 365 ActiveLine range from 1 10-1 to 1000 torr Capacitative diaphragm for measurement of pressure independently of type of gas Sensor in ceramic technology No memory effects Materials employed have identical temperature coefficients Excellent temperature compensation Resistant to corrosive gases Excellent zero stability Transmitter cannot be connected to controllers TPG 261, TPG 262 and TPG 256 A MKS-compatible 55 55 55 55 44 44 44 44 69 69 69 69 OD1/2" DN 16 ISO-KF DN 16 CF-R 8 VCR female Tube OD 1/2" DN 16 ISO-KF DN 16 CF-R Cajon 8 VCR Page Page 488 488 www.pfeiffer-vacuum.net

Technical data Active capacitive CCR 361 Active capacitive CCR 362 Active capacitive CCR 363 Active capacitive CCR 364 Active capacitive CCR 365 Resolution 0.003 % F.S. 0.003 % F.S. 0.003 % F.S. 0.003 % F.S. 0.003 % F.S. Output signal: Pressure range 0...10 V 0...10 V 0...10 V 0...10 V 0...10 V Output signal: Minimum load 10 kohm 10 kohm 10 kohm 10 kohm 10 kohm Bakeout temperature max. at the 110 C 110 C 110 C 110 C 110 C flange Pressure max. 3 bar 2 bar 2 bar 2 bar 1,3 bar Accuracy 0.2 % of reading 0.2 % of reading 0.2 % of reading 0.2 % of reading 0.5 % of reading Weight < 300 g < 300 g < 300 g < 300 g < 300 g Membrane and measuring chamber Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) Ceramics (Al 2 O 3 >99,5%) range max. 1000 Torr 100 Torr 10 Torr 1 Torr 1 10-1 Torr range min. 1 10-1 Torr 1 10-2 Torr 1 10-3 Torr 1 10-4 Torr 1 10-5 Torr Sensor cable length 100 m (0,14 mm² conductor) 100 m (0,14 mm² conductor) 100 m (0,14 mm² conductor) 100 m (0,14 mm² conductor) 100 m (0,14 mm² conductor) Pipe and flange Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel Temperature: Operating +5... +50 C +5... +50 C +5... +50 C +5... +50 C +5... +50 C Temperature: Storage -40... +65 C -40... +65 C -40... +65 C -40... +65 C -40... +65 C Temperature effect: on span 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.03 % of reading/ C Temperature effect: on zero 0.005 % F.S./ C 0.005 % F.S./ C 0.005 % F.S./ C 0.015 % F.S./ C 0.02 % F.S./ C Supply: Voltage 14... 30 VDC 14... 30 VDC 14... 30 VDC 14... 30 VDC 14... 30 VDC Supply: Power consumption max. 1 W 1 W 1 W 1 W 1 W Volume 6 cm 3 6 cm 3 6 cm 3 6 cm 3 6 cm 3 Mess- und Steuergeräte Active capacitive CCR 361 Active capacitive CCR 362 Active capacitive CCR 363 Active capacitive CCR 364 Active capacitive CCR 365 Flange (in) Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Order number PT R27 600 PT R27 610 PT R27 620 PT R27 630 PT R27 640 Flange (in) DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF Order number PT R27 601 PT R27 611 PT R27 621 PT R27 631 PT R27 641 Flange (in) - - DN 16 CF-R DN 16 CF-R DN 16 CF-R Order number - - PT R27 622 PT R27 632 PT R27 642 Flange (in) Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Order number PT R27 603 PT R27 613 PT R27 623 PT R27 633 PT R27 643 controll units www.pfeiffer-vacuum.net Page Page 489 489

Vacuum analysis and measurement and control units ActiveLine ActiveLine Active capacitive s CCR (1 10-5 - 1000 torr) Active capacitive CCR 271 Active capacitive CCR 272 Active capacitive CCR 273 Active capacitive CCR 274 Active capacitive CCR 275 ActiveLine Dimensions range from 1 10-1 to 1000 torr Pressure measurement independent of type of gas Outstanding long-term and temperature stability Only marginal zero drift Corrosion-resistant ceramic technology Transmitter cannot be connected to controllers TPG 261, TPG 262 and TPG 256 A MKS-compatible 15 pole D subminiature 80 ø78.5 49 47 154.5 DN 16 CF-R DN 16 ISO-KF CAJON 8 VCR ø" Page Page 490 490 www.pfeiffer-vacuum.net

Technical data Active capacitive CCR 271 Active capacitive CCR 272 Active capacitive CCR 273 Active capacitive CCR 274 Active capacitive CCR 275 Resolution 0.0015 % F.S. 0.0015 % F.S. 0.0015 % F.S. 0.0025 % F.S. 0.0025 % F.S. Output signal: Pressure range 0-10 V 0-10 V 0-10 V 0-10 V 0-10 V Output signal: Minimum load 10 kohm 10 kohm 10 kohm 10 kohm 10 kohm Bakeout temperature 65 C 65 C 65 C 65 C 65 C Pressure max. 3 10 3 Torr 2 10 3 Torr 2 10 3 Torr 2 10 3 Torr 1 10 3 Torr Accuracy 0.15 % of reading 0.15 % of reading 0.15 % of reading 0.15 % of reading 0.15 % of reading Membrane and measuring chamber Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 Al 2 O 3, Vacon 70 range max. 1 10 3 Torr 1 10 2 Torr 1 10 1 Torr 1 10 0 Torr 1 10-1 Torr range min. 1 10-1 Torr 1 10-2 Torr 1 10-3 Torr 1 10-4 Torr 1 10-5 Torr Sensor cable length 50 m 50 m 50 m 50 m 50 m Pipe and flange Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel Temperature: Operating +15 - +40 ºC +15 - +40 ºC +15 - +40 ºC +15 - +40 ºC +15 - +40 ºC Temperature: Storage -40 - +65 ºC -40 - +65 ºC -40 - +65 ºC -40 - +65 ºC -40 - +65 C Temperature effect: on span 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C 0.01 % of reading/ C Temperature effect: on zero 0.0025 % F.S./ C 0.0025 % F.S./ C 0.0025 % F.S./ C 0.0025 % F.S./ C 0.005 % F.S./ C Temperature stabilization 45ºC 45 ºC 45 ºC 45 ºC 45 ºC Supply: Voltage 18-26,4 V DC or 15 V DC +-5 % 18-26,4 V DC or 15 V DC +-5 % 18-26,4 V DC or 15 V DC +-5 % 18-26,4 V DC or 15 V DC +-5 % 18-26,4 V DC or 15 V DC +-5 % Supply: Power consumption max. 19 W 19 W 19 W 19 W 19 W Volume 7 cm 3 7 cm 3 7 cm 3 7 cm 3 7 cm 3 Active capacitive CCR 271 Active capacitive CCR 272 Active capacitive CCR 273 Active capacitive CCR 274 Active capacitive CCR 275 Flange (in) Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Tube OD 1/2" Weight 485 g 485 g 485 g 485 g 485 g Order number PT R28 000 PT R28 010 PT R28 020 PT R28 030 PT R28 040 Flange (in) DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF Weight 495 g 495 g 495 g 495 g 495 g Order number PT R28 001 PT R28 011 PT R28 021 PT R28 031 PT R28 041 Flange (in) DN 16 CF-R DN 16 CF-R DN 16 CF-R DN 16 CF-R DN 16 CF-R Weight 505 g 505 g 505 g 505 g 505 g Order number PT R28 002 PT R28 012 PT R28 022 PT R28 032 PT R28 042 Flange (in) Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Cajon 8 VCR Weight 515 g 515 g 515 g 515 g 515 g Order number PT R28 003 PT R28 013 PT R28 023 PT R28 033 PT R28 043 Mess- und Steuergeräte controll units www.pfeiffer-vacuum.net Page Page 491 491

Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Pirani/capacitive s PCR 260 (5 10-4 - 1500 mbar) ActiveLine range from 5 10-4 mbar to 1500 mbar Highly accurate Especially suitable for load-lock applications Maximum pressure refers to inert gases Dimensions 20 (0.79") 28 (1.10") 20 (0.79") 28 (1.10") 65.3 (2.57") HV 22.5 (0.89") 65.3 (2.57") HV 43 (1.69") 26.3 (1.04") DN 16 ISO-KF 43 (1.69") 39 (1.054") DN 16 CF-F DN 16 ISO-KF DN 16 CF-F Page Page 492 492 www.pfeiffer-vacuum.net

Technical data Active Pirani/ capacitive PCR 260 Output signal: Pressure range 2.2-8.68 V Output signal: Minimum load 10 kohm Bakeout temperature 80 C Seal Metal Pressure max. 5 bar Feedthrough Glass Feature Stainless steel, metal sealed Flange Stainless steel Accuracy 10-3 - 50 mbar: +/- 15 % 50-950 mbar: +/- 5 % 950-1050 mbar: +/- 2,5 % Filament Tungsten range max. 1500 mbar range min. 5 10-4 mbar Sensor cable length 200 m Temperature: Operating +10 - +50 ºC Temperature: Storage -20 - +65 ºC Supply: Voltage 15-30 V DC Supply: Power consumption max. 2.5 W Repeatability: 10-3 - 1100 mbar +/- 2 % Mess- und Steuergeräte Active Pirani/ capacitive PCR 260 Flange (in) DN 16 ISO-KF Weight 90 g Volume 6 cm 3 Order number PT R26 850 Flange (in) DN 16 CF-F Weight 120 g Volume 8 cm 3 Order number PT R26 851 controll units Accessories Centering ring with poral filter, FPM/stainless steel, PF 117 216-T DN 16 ISO-KF Sensor cable, 3 m PT 448 250-T Mating connector for compact gauge B 4707 283 MA www.pfeiffer-vacuum.net Page Page 493 493

Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Pirani s TPR 280, (5 10-4 - 1000 mbar) ActiveLine range from 5 10-4 to 1000 mbar Compact and rugged Fast, stable measurement For general vacuum applications Maximum pressure refers to inert gases Dimensions 16 (0.63") 20.5 (0.81") 16 (0.63") 20.5 (0.81") 69 (2.72") 22.5 (0.89") 69 (2.72") 33 (1.30") 15 (0.58") 14 (0.55") 33 (1.30") DN 16 ISO-KF DN 16 CF-R 116 (4.57") 115 (4.53") DN 16 ISO-KF DN 16 CF-R Active Pirani Transmitter TPR 280, 80 ºC Active Pirani TPR 280, 250 ºC Page Page 494 494 www.pfeiffer-vacuum.net

Technical data Active Pirani Transmitter TPR 280, 80 ºC Active Pirani TPR 280, 250 ºC Output signal: Sensor error below 0.5 V 0.5 V Output signal: Pressure range 2.2-8.5 V 2.2-8.5 V Output signal: Minimum load 10 kohm 10 kohm Bakeout temperature 80 C 250 C Seal Metal Metal Pressure max. 10 bar 10 bar Feedthrough Glass Glass Feature Stainless steel, metal sealed Stainless steel, metal sealed Flange Stainless steel Stainless steel Accuracy: 10-3 - 10 2 mbar +/- 15 % +/- 15 % Filament Tungsten Tungsten range max. 1000 mbar 1000 mbar range min. 5 10-4 mbar 5 10-4 mbar Sensor cable length max. 200 m 200 m Temperature: Operating +5 - +60 ºC +5 - +60 ºC Temperature: Storage -20 - +65 ºC -20 - +65 ºC Supply: Voltage 14-30 V DC 14-30 V DC Supply: Power consumption max. 1 W 1 W Repeatability: 10-3 - 10 2 mbar +/- 2 % +/- 2 % Active Pirani Transmitter TPR 280, 80 ºC Active Pirani TPR 280, 250 ºC Flange (in) DN 16 ISO-KF DN 16 ISO-KF Weight 80 g 130 g Volume 1.5 cm 3 10 cm 3 Order number PT R26 950 PT R26 960 Flange (in) DN 16 CF-R DN 16 CF-R Weight 100 g 140 g Volume 1.5 cm 3 10 cm 3 Order number PT R26 951 PT R26 961 Flange (in) 1/8" NPT Weight 70 g Volume 2 cm 3 Order number PT R26 952 Flange (in) 8 VCR Weight 130 g Volume 2 cm 3 Order number PT R26 953 Mess- und Steuergeräte controll units Accessories Centering ring with poral filter, FPM/stainless steel, PF 117 216-T DN 16 ISO-KF Fine filter for TPR 265, pore size 0.0004 mm PT 120 132-T Mating connector for compact gauge B 4707 283 MA B 4707 283 MA Sensor cable, 3 m PT 448 250-T PT 448 250-T www.pfeiffer-vacuum.net Page Page 495 495

Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Pirani s TPR 281, (5 10-4 - 1000 mbar), for corrosive media ActiveLine range from 5 10-4 to 1000 bar Compact and rugged Fast, stable measurement For corrosive media Maximum pressure refers to inert gases Dimensions 16 (0.63") 20.5 (0.81") 16 (0.63") 20.5 (0.81") 69 (2.72") 22.5 (0.89") 69 (2.72") 33 (1.30") 15 (0.58") 14 (0.55") 33 (1.30") DN 16 ISO-KF DN 16 CF-R 116 (4.57") 115 (4.53") DN 16 ISO-KF DN 16 CF-R Active Pirani TPR 281, 65 ºC Active Pirani Transmitter TPR 281, 250 ºC Page Page 496 496 www.pfeiffer-vacuum.net

Technical data Active Pirani TPR 281, 65 ºC Active Pirani Transmitter TPR 281, 250 ºC Output signal: Sensor error below 0.5 V 0.5 V Output signal: Pressure range 2.2-8.5 V 2.2-8.5 V Output signal: Minimum load 10 kohm 10 kohm Bakeout temperature 80 C 250 C Seal Metal Metal Pressure max. 10 bar 10 bar Feedthrough Glass Glass Feature for corrosive media for corrosive media Flange Stainless steel Stainless steel Accuracy: 10-3 - 10 2 mbar +/- 15 % +/- 15 % Filament Nickel Nickel range max. 1000 mbar 1000 mbar range min. 5 10-4 mbar 5 10-4 mbar Sensor cable length max. 200 m 200 m Temperature: Operating +5 - +60 ºC +5 - +60 ºC Temperature: Storage -20 - +65 ºC -20 - +65 ºC Supply: Voltage 14-30 V DC 14-30 V DC Supply: Power consumption max. 1 W 1 W Repeatability: 10-3 - 10 2 mbar +/- 2 % +/- 2 % Active Pirani TPR 281, 65 ºC Active Pirani Transmitter TPR 281, 250 ºC Flange (in) DN 16 ISO-KF DN 16 ISO-KF Weight 80 g 130 g Volume 1.3 cm 3 10 cm 3 Order number PT R21 950 PT R21 960 Flange (in) DN 16 CF-R DN 16 CF-R Weight 100 g 140 g Volume 1.5 cm 3 10 cm 3 Order number PT R21 951 PT R21 961 Mess- und Steuergeräte controll units Accessories Centering ring with poral filter, FPM/stainless steel, PF 117 216-T DN 16 ISO-KF Fine filter for TPR 265, pore size 0.0004 mm PT 120 132-T Mating connector for compact gauge B 4707 283 MA B 4707 283 MA Sensor cable, 3 m PT 448 250-T PT 448 250-T www.pfeiffer-vacuum.net Page Page 497 497

Vacuum analysis and measurement and control units ActiveLine ActiveLine Active cold cathode s IKR 251/261 (2 10-9 - 0.01 mbar) ActiveLine Flange size: DN 25 ISO-KF range from 2 10-9 to 0.01 mbar Cold cathode (inverted magnetron) Rugged and dependable Insensitive to air ingress Corrosion-resistant Dimensions Active cold cathode IKR 251 Active cold cathode IKR 261 Active cold cathode IKR 261, DN 40 CF-F, extra-long case Page Page 498 498 www.pfeiffer-vacuum.net

Technical data Active cold cathode IKR 251 Active cold cathode IKR 261 Active cold cathode IKR 261, DN 40 CF-F, extra-long case Output signal: Sensor error below 0.5 V 0.5 V 0.5 V Output signal: Pressure range 1.8-8.5 V 1.8-8.5 V 1.8-8.5 V Output signal: Minimum load 10 kohm 10 kohm 10 kohm Bakeout temperature 150 C, electronic 250 C, electronic 250 C removed removed Seal FPM Ag Ag Pressure max. 10 bar 10 bar 10 bar Feedthrough Al 2 O 3 Al 2 O 3 Al 2 O 3 Feature interior FPM metal sealed metal sealed sealed Flange Stainless steel Stainless steel Stainless steel Accuracy: 10-8 - 10-3 mbar +/- 30 % +/- 30 % +/- 30 % Filament Molybdenum Molybdenum Molybdenum range max. 0.01 mbar 0.01 mbar 0.01 mbar range min. 2 10-9 mbar 2 10-9 mbar 2 10-9 mbar Sensor cable length 500 m 500 m 500 m Temperature: Operating +5 - +55 ºC +5 - +55 ºC +5 - +55 ºC Temperature: Storage -40 - +65 ºC -40 - +65 ºC -40 - +65 ºC Supply: Voltage 15-30 V 15-30 V 15-30 V Supply: Power consumption max. 2 W 2 W 2 W Volume 20 cm 3 20 cm 3 20 cm 3 Repeatability: 10-8 - 10-3 mbar +/- 5 % +/- 5 % +/- 5 % Mess- und Steuergeräte Active cold cathode IKR 251 Active cold cathode IKR 261 Active cold cathode IKR 261, DN 40 CF-F, extra-long case Flange (in) DN 25 ISO-KF Weight 700 g Order number PT R25 500 Flange (in) DN 40 ISO-KF DN 40 ISO-KF Weight 700 g 700 g Order number PT R25 501 PT R25 750 Flange (in) DN 40 CF-F DN 40 CF-F DN 40 CF-F Weight 950 g 950 g 1200 g Order number PT R25 502 PT R25 751 PT R25 761 controll units Accessories Sensor cable, 3 m PT 448 250-T PT 448 250-T PT 448 250-T Mating connector for compact gauge B 4707 283 MA B 4707 283 MA B 4707 283 MA www.pfeiffer-vacuum.net Page Page 499 499

Vacuum analysis and measurement and control units ActiveLine ActiveLine Active cold cathode s IKR 270 (5 10-11 - 0,01 mbar) ActiveLine range from 5 10-11 to 0.01 mbar Cold cathode (inverted magnetron) Rugged and dependable Insensitive to air ingress Corrosion-resistant Dimensions Active cold cathode IKR 270 Active cold cathode IKR 270, DN 40 CF-F, extra-long case Page Page 500 500 www.pfeiffer-vacuum.net

Technical data Active cold cathode IKR 270, DN 40 CF-F Active cold cathode IKR 270, DN 40 CF-F, extra-long case Flange (in) DN 40 CF-F DN 40 CF-F Output signal: Sensor error below 0.5 V 0.5 V Output signal: Pressure range 1.8-8.5 V 1.8-8.5 V Output signal: Minimum load 10 kohm 10 kohm Bakeout temperature 250 C electronic 250 C removed Seal Ag Ag Pressure max. 10 bar 10 bar Feedthrough Al 2 O 3 Al 2 O 3 Feature metal sealed metal sealed Flange Stainless steel Stainless steel Accuracy: 10-9 - 10-3 mbar +/- 30 % +/- 30 % Weight 950 g 1200 g Cable length 500 m 500 m Filament Molybdenum Molybdenum range max. 0.01 mbar 0.01 mbar range min. 5 10-11 mbar 5 10-11 mbar Temperature: Operating +5 - +55 ºC +5 - +55 ºC, in the bakeout range Temperature: Storage -40 - +65 ºC -40 - +65 ºC Supply: Voltage 15-30 V 15-30 V Supply: Power consumption max. 2 W 2 W Volume 20 cm 3 20 cm 3 Repeatability: 10-9 - 10-3 mbar +/- 5 % +/- 5 % Order number ActiveLine s PT R21 251 PT R21 261 Mess- und Steuergeräte controll units Accessories Sensor cable, 3 m PT 448 250-T PT 448 250-T Mating connector for compact gauge B 4707 283 MA B 4707 283 MA www.pfeiffer-vacuum.net Page Page 501 501

Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Pirani/cold cathode PKR 251/261 (5 10-9 - 1000 mbar) ActiveLine range from 5 10-9 to 1000 mbar Two gauge heads (Pirani and cold cathode) in a single case (inverted magnetron) A single flange from atmospheric pressure to UHV Corrosion-resistant Dimensions 122.5 32 15.5 57 20 63.5 123 18.5 32 15.5 57 18 63.5 24 128.5 20 DN 40 ISO-KF DN 40 ISO CF DN 25 ISO-KF Active Pirani/cold cathode PKR 251 Active Pirani/cold cathode PKR 261, DN 25 ISO-KF Active Pirani/cold cathode PKR 261, DN 40 ISO-KF Active Pirani/cold cathode PKR 261, DN 40 CF-F Page Page 502 502 www.pfeiffer-vacuum.net

Technical data Active Pirani/ cold cathode PKR 251 Active Pirani/ cold cathode PKR 261 Output signal: Sensor error above 9.5 V 9.5 V Output signal: Sensor error below 0.5 V 0.5 V Output signal: Pressure range 1.8-8.6 V 1.8-8.6 V Output signal: Minimum load 10 kohm 10 kohm Bakeout temperature 150 C, electronic removed 150 C, electronic removed Seal FPM Ag, Cu Pressure max. 10 bar 10 bar Feedthrough Al 2 O 3, Glass Al 2 O 3, Glas Feature interior FPM metal sealed sealed Flange Stainless steel Stainless steel Accuracy: 10-8 - 10 2 mbar +/- 30 % +/- 30 % Filament Tungsten Tungsten Filament Molybdenum Molybdenum range max. 1000 mbar 1000 mbar range min. 5 10-9 mbar 5 10-9 mbar Sensor cable length 300 m 300 m Temperature: Operating +5 - +55 ºC +5 - +55 ºC, up to 150 ºC on flange (horizontal installation) Temperature: Storage -40 - +65 ºC -40 - +65 ºC Supply: Voltage 15-30 V DC 15-30 V DC Supply: Power consumption max. 2 W 2 W Volume 20 cm 3 20 cm 3 Repeatability: 10-8 - 10 2 mbar +/- 5 % +/- 5 % Active Pirani/ cold cathode PKR 251 Active Pirani/ cold cathode PKR 261 Flange (in) DN 25 ISO-KF DN 25 ISO-KF Weight 700 g 700 g Order number PT R26 000 PT R26 250 Flange (in) DN 40 ISO-KF DN 40 ISO-KF Weight 700 g 750 g Order number PT R26 001 PT R26 251 Flange (in) DN 40 CF-F DN 40 CF-F Weight 950 g 995 g Order number PT R26 002 PT R26 252 Mess- und Steuergeräte controll units Accessories Sensor cable, 3 m PT 448 250-T PT 448 250-T Mating connector for compact gauge B 4707 283 MA B 4707 283 MA www.pfeiffer-vacuum.net Page Page 503 503

Vacuum analysis and measurement and control units ActiveLine ActiveLine Active hot cathode s IMR 265, (2 10-6 - 1000 mbar) ActiveLine range from 2 10-6 to 1000 mbar Two gauge heads (Pirani and hot cathode) in a single case Highly accurate Excellent reproducibility Automatic cathode protection A single flange from atmosphere to UHV Corrosion-resistant Dimensions Active hot cathode IMR 265, DN 16 ISO-KF Active hot cathode IMR 265, DN 16 CF-F Active hot cathode IMR 265, DN 25 ISO-KF Active hot cathode IMR 265, DN 40 ISO-KF Active hot cathode IMR 265, DN 40 CF-F Page Page 504 504 www.pfeiffer-vacuum.net

Technical data Active hot cathode IMR 265 Output signal: Sensor error 0.5 V Output signal: Pressure range Ioni 1,5-7,5 V Output signal: Pressure range Pirani 8,5-9,75 V Output signal: Minimum load 10 kohm Bakeout temperature 150 C, electronic removed Pressure max. 5 bar Electron collector Stainless steel Flange Stainless steel Filament holder Molybdenum, Platinum Ion collector Stainless steel Isolator Glass Filament iridium yttriated range max. 1000 mbar range min. 2 10-6 mbar Sensor cable length 100 m Pirani measurement element Copper, Tungsten Temperature: Operating 0 - +50 ºC Temperature: Storage -20 - +70 C Supply: Voltage 20-30 V DC Supply: Power consumption max. 16 W Volume 20 cm 3 Repeatability: 10-1 - 10 2 mbar 30 % reading Repeatability: 10-5 - 10-1 mbar 2 % reading Active hot cathode IMR 265 Flange (in) DN 16 ISO-KF Weight 270 g Order number PT R26 504 Flange (in) DN 25 ISO-KF Weight 285 g Order number PT R26 500 Flange (in) DN 40 ISO-KF Weight 315 g Order number PT R26 501 Flange (in) DN 16 CF-F Weight 400 g Order number PT R26 502 Flange (in) DN 40 CF-F Weight 550 g Order number PT R26 503 Mess- und Steuergeräte controll units Accessories Sensor cable, 3 m PT 448 250-T Mating connector for compact gauge B 4707 283 MA www.pfeiffer-vacuum.net Page Page 505 505

Vacuum analysis and measurement and control units ActiveLine ActiveLine Active Pirani/Bayard-Alpert PBR 260, (5 10-10 - 1000 mbar) ActiveLine range from 5 10-10 to 1000 mbar Two gauge heads (Pirani and BA hot cathode) in a single case Bayard-Alpert sensor ON/OFF automatically controlled by Pirani sensor Highly accurate A single flange from atmosphere to UHV Corrosion-resistant Dimensions Active Pirani/Bayard-Alpert PBR 260, DN 25 ISO-KF Active Pirani/Bayard-Alpert PBR 260, DN 40 ISO-KF Active Pirani/Bayard-Alpert PBR 260, DN 40 CF-R Page Page 506 506 www.pfeiffer-vacuum.net

Technical data Active Pirani/ Bayard-Alpert PBR 260, DN 25 ISO-KF Active Pirani/ Bayard-Alpert PBR 260, DN 40 ISO-KF Active Pirani/ Bayard-Alpert PBR 260, DN 40 CF-R Flange (in) DN 25 ISO-KF DN 40 ISO-KF DN 40 CF-R Output signal: Sensor error below 0.5 V 0.5 V 0.5 V Output signal: Pressure range 0.774-10 V 0,774-10 V 0,774-10 V Output signal: Minimum load 10 kohm 10 kohm 10 kohm Bakeout temperature 150 C, electronic removed 150 C, electronic removed 150 C, electronic removed Pressure max. 2 bar 2 bar 2 bar Flange Stainless steel Stainless steel Stainless steel Accuracy: 10-8 - 10-2 mbar 15 % reading 15 % reading 15 % reading Weight 285 g 315 g 550 g Filament Tungsten Tungsten Tungsten Filament iridium yttriated iridium yttriated iridium yttriated Materials in contact with media Cu, W, glass, NiFe, Mo, Stainless Steel, NiCr Cu, W, glass, NiFe, Mo, Stainless steel, NiCr Cu, W, glass, NiFe, Mo, Stainless steel, NiCr range max. 1,000 mbar 1000 mbar 1000 mbar range min. 5 10-10 mbar 5 10-10 mbar 5 10-10 mbar Sensor cable length 100 m 100 m 100 m Temperature: Operating 0 - +50 ºC 0 - +50 ºC 0 - +50 ºC Temperature: Storage -20 - +70 C -20 - +70 C -20 - +70 C Supply: Voltage 20-28 V DC 20-28 V DC 20-28 V DC Supply: Power consumption max. 16 W 16 W 16 W Volume 24 cm 3 24 cm 3 25 cm 3 Repeatability: 10-8 - 10-2 mbar 5 % reading 5 % reading 5 % reading Order number ActiveLine s PT R27 000 PT R27 001 PT R27 002 Mess- und Steuergeräte controll units Accessories Sensor cable, 3 m PT 448 250-T PT 448 250-T PT 448 250-T Mating connector for compact gauge B 4707 283 MA B 4707 283 MA B 4707 283 MA www.pfeiffer-vacuum.net Page Page 507 507

Vacuum analysis and measurement and control units ActiveLine ActiveLine TPG 201, Pirani manual measurement unit ActiveLine Battery-operated manual measurement unit range from 5 10-4 to 1000 mbar Sensor and display in a single case Scope of delivery: Battery not included Dimensions B A F C E D TPG 201 A B C D E F TPG 201 120 mm 60 mm 43.5 mm 30 mm 22 mm 25 mm Page Page 508 508 www.pfeiffer-vacuum.net

Technical data TPG 201, Pirani manual measurement unit Dimensions w x h x d 120 x 60 x 42 mm Connection: Vacuum side DN 16 KF Battery type 9 V Alkaline E bloc/6 LR61/6 AM 6 Litium E bloc Seal Metal Accuracy 10-100 mbar: % of measurement ca. 30 Accuracy 10-2 - 10 mbar: % of measurement ca. 10 Weight 0.195 kg Materials in contact with media Nickel, stainless steel, tungsten, glassfeedthroughs range max. 1000 mbar range min. 5 10-4 mbar Method of measurement Pirani Protection category IP 20 Temperature: Operating +5 - +40 C Order number TPG 201, Pirani manual measurement unit PT G28 201 Mess- und Steuergeräte controll units www.pfeiffer-vacuum.net Page Page 509 509

Vacuum analysis and measurement and control units ActiveLine ActiveLine TPG 261, controller for 1 ActiveLine For one Easy to operate Involatile parameter memory Auto-diagnostics For operation of all s Dimensions TPG 261, controller for 1 Page Page 510 510 www.pfeiffer-vacuum.net

Technical data TPG 261, controller for 1 Connections for 1 Display rate 10 1/s Error signal: Working contact, potential-free 1 piece Error singal: Switching voltage max. 60 V DC Filter time constant 1.2 / 0.4 / 0.02 s Weight 1.1 kg range max. 55000 mbar range min. 5 10-11 mbar rate 50 1/s Mains requirement: frequency (range) 50/60 Hz Mains requirement: power consumption 45 VA Mains requirement: voltage (range) 90-250 V Set point: Voltage max. 60 V DC Set point: Current max. 1 A Set point: Changeover contact, potential-free 2 pieces Interface RS-232-C Protection category IP 30 Safety EN61010-1 / EN 50081-1 / EN50082-2 / IEC1010 Signal output: Measuring value, analog 0-10 V Temperature: Operating +5 - +50 ºC Temperature: Storage -20 - +65 ºC Mess- und Steuergeräte Order number TPG 261, controller for 1 PT G28 030 Accessories Sensor cable, 3 m PT 448 250-T Sensor cable, 5 m PT 448 251-T Sensor cable, 10 m PT 448 252-T Sensor cable, 15 m PT 448 253-T Sensor cable, 20 m PT 448 254-T Sensor cable, 25 m PT 448 255-T Sensor cable, 30 m PT 448 256-T Sensor cable, 35 m PT 448 257-T Sensor cable, 40 m PT 448 258-T Sensor cable, 45 m PT 448 259-T Sensor cable, 50 m PT 448 260-T controll units www.pfeiffer-vacuum.net Page Page 511 511

Vacuum analysis and measurement and control units ActiveLine ActiveLine TPG 262, controller for 2 s ActiveLine For two s Easy to operate Involatile parameter memory Auto-diagnostics For operation of all s Dimensions TPG 262, controller for 2 s Page Page 512 512 www.pfeiffer-vacuum.net

Technical data TPG 262 DualGauge TM controller Connections for 2 Display rate 10 1/s Automatic changeover: Pirani-cold cathode 6 10-3 mbar Error signal: Working contact, potential-free 1 piece Filter time constant 1,2 / 0,4 / 0,02 s Weight 1.1 kg range max. 55000 mbar range min. 5 10-11 mbar rate 50 1/s Mains requirement: frequency (range) 50/60 Hz Mains requirement: power consumption 45 VA Mains requirement: voltage (range) 90-250 V Set point: Voltage max. 60 V DC Set point: Current max. 1 A Set point: Changeover contact, potential-free 4 pieces Interface RS-232-C Protection category IP 30 Safety EN61010-1 / EN 50081-1 / EN50082-2 / IEC1010 Signal output: Measuring value, analog 0-10 V Temperature: Operating +5 - +50 ºC Temperature: Storage -20 - +65 ºC Mess- und Steuergeräte Order number TPG 262, controller for 2 s PT G28 280 Accessories Sensor cable, 3 m PT 448 250-T Sensor cable, 5 m PT 448 251-T Sensor cable, 10 m PT 448 252-T Sensor cable, 15 m PT 448 253-T Sensor cable, 20 m PT 448 254-T Sensor cable, 25 m PT 448 255-T Sensor cable, 30 m PT 448 256-T Sensor cable, 35 m PT 448 257-T Sensor cable, 40 m PT 448 258-T Sensor cable, 45 m PT 448 259-T Sensor cable, 50 m PT 448 260-T controll units www.pfeiffer-vacuum.net Page Page 513 513

Vacuum analysis and measurement and control units ActiveLine ActiveLine SingleGauge TM measurement equipment ActiveLine SingleGauge measurement unit TPG 261 Active Pirani TPR 280 Flange size: DN 16 ISO-KF SingleGauge measurement unit TPG 261 Active cold cathode IKR 251 Flange size: DN 25 ISO-KF Dimensions SingleGauge measurement unit TPG 261 Active Pirani/cold cathode PKR 251 Flange size: DN 25 ISO-KF SingleGauge TM measurement equipment SingleGauge measurement unit TPG 261 Active Pirani/Bayard-Alpert PBR 260 Flange size: DN 25 ISO-KF Page Page 514 514 www.pfeiffer-vacuum.net

Technical data SingleGauge TM measurement equipment TPG 261, 1 TPR 280, 3 m cable SingleGauge TM measurement equipment TPG 261, 1 IKR 251, 3 m cable SingleGauge TM measurement equipment TPG 261, 1 PKR 251, 3 m cable SingleGauge TM measurement equipment TPG 261, 1 PBR 260, 3 m cable Connections for 1 1 1 1 range max. 1,000 mbar 0.01 mbar 1000 mbar 1,000 mbar range min. 5 10-4 mbar 2 10-9 mbar 5 10-9 mbar 5 10-10 mbar Gauge head 1 TPR 265 1 IKR 251 1 PKR 251 1 PBR 260 Mains requirement: voltage (range) 90-250 V, 50/60 Hz 90-250 V, 50/60 Hz 90-250 V, 50/60 Hz 90-250 V, 50/60 Hz Interface RS-232-C RS-232-C RS-232-C RS-232-C Order number SingleGauge TM measurement equipment PT 441 930-T PT 441 933-T PT 441 935-T PT 441 938-T Accessories Centering ring with poral filter, FPM/stainless steel, DN 16 ISO-KF PF 117 216-T - - - controll units Mess- und Steuergeräte www.pfeiffer-vacuum.net Page Page 515 515

Vacuum analysis and measurement and control units ActiveLine ActiveLine DualGauge TM measurement equipment ActiveLine DualGauge measurement unit TPG 262 Active Pirani TPR 280 Flange size: DN 16 ISO-KF Dimensions DualGauge measurement unit TPG 262 Active Pirani TPR 280 Flange size: DN 16 ISO-KF Active cold cathode IKR 251 Flange size: DN 25 ISO-KF DualGauge measurement unit TPG 262 Active Pirani/cold cathode PKR 251 Flange size: DN 25 ISO-KF DualGauge TM measurement equipment DualGauge measurement unit TPG 262 Active Pirani TPR 280 Flange size: DN 16 ISO-KF Active Pirani/cold cathode PKR 251 Flange size: DN 25 ISO-KF Page Page 516 516 www.pfeiffer-vacuum.net

Technical data DualGauge TM measurement equipment TPG 262, 2 TPR 280, 3 m cable DualGauge TM measurement equipment TPG 262, 1 TPR 280, 1 IKR 251, 3 m cable DualGauge TM measurement equipment TPG 262, 2 PKR 251, 3 m cable DualGauge TM measurement equipment TPG 262, 1 TPR 280, 1 PKR 251, 3 m cable Connections for 2 2 2 2 range max. 1,000 mbar 1,000 mbar 1,000 mbar 1,000 mbar range min. 5 10-4 mbar 2 10-9 mbar 5 10-9 mbar 5 10-9 mbar Gauge head 2 TPR 265 1 TPR 280, 1 IKR 251 2 PKR 251 1 TPR 280, 1 PKR 251 Mains requirement: voltage (range) 90-250 V, 50/60 Hz 90-250 V, 50/60 Hz 90-250 V, 50/60 Hz 90-250 V, 50/60 Hz Interface RS-232-C RS-232-C RS-232-C RS-232-C Order number DualGauge TM measurement equipment PT 441 940-T PT 441 943-T PT 441 945-T PT 441 948-T Accessories Centering ring with poral filter, FPM/stainless steel, DN 16 ISO-KF PF 117 216-T PF 117 216-T - PF 117 216-T Mess- und Steuergeräte controll units www.pfeiffer-vacuum.net Page Page 517 517

Vacuum analysis and measurement and control units ActiveLine ActiveLine Maxi Gauge TM TPG 256 A, controller for 6 s ActiveLine For operating 6 ActiveLine s With RS-232-C and RS-422 interfaces, uninsulated Dimensions Maxi Gauge TM TPG 256 A, controller for 6 s Page Page 518 518 www.pfeiffer-vacuum.net

Technical data TPG 256 A MaxiGauge TM measurement unit Connections for 6 (max. 3 IMR 265 / PBR 260 / CMR 27x) TPG 256 A MaxiGauge TM measurement unit 6 (max. 3 IMR 265 / PBR 260 / CMR 27x) Display rate 4 1/s 4,0 1/s Error signal: Working contact, potential-free 1 piece 1 piece Error singal: Switching voltage max. 60 V DC 60 V DC Error signal: Switching current max. 3 A 3 A Filter time constant 2.1/0.32/0.1 s 2.1/0.32/0.1 s Weight 2.1 kg 2.1 kg range max. 55000 mbar 5,5E+04 mbar range min. 5 10-11 mbar 5,0E-11 mbar rate 100 1/s 100 1/s Mains requirement: frequency (range) 50-60 Hz 50-60 Hz Mains requirement: power consumption 60 VA 6,0E+01 VA Mains requirement: voltage (range) 90-250 V 90-250 V Set point: Voltage max. 60 V DC 60 V DC Set point: Current max. 3 A 3 A Set point: Changeover contact, potential-free 6 pieces 6,0 pieces Switching voltage 240 V with RI 256 240 V with RI 256 Interface RS-232-C, RS-422 RS-232-C, RS-422, RS-422 isolated, RS-485 isolated Protection category IP30 IP30 Safety EN61010-1 / IEC 1010, EN60950, EN 50081-1 / EN61010-1 / IEC 1010, EN60950, EN 50081-1&2 EN50082-1 Signal output: Output resistance 660 Ohm 660 Ohm Signal output: Measuring value, analog 0-10 V DC 0-10 V DC Temperature: Operating +5 - +40 ºC +5 - +40 ºC Temperature: Storage -20 - +60 ºC -20 - +60 ºC Mess- und Steuergeräte controll units Order number Maxi Gauge TM TPG 256 A, controller for 6 s PT G28 760 PT G28 761 Accessories Sensor cable, 3 m PT 448 250-T PT 448 250-T Sensor cable, 5 m PT 448 251-T PT 448 251-T Sensor cable, 10 m PT 448 252-T PT 448 252-T Sensor cable, 15 m PT 448 253-T PT 448 253-T Sensor cable, 20 m PT 448 254-T PT 448 254-T Sensor cable, 25 m PT 448 255-T PT 448 255-T Sensor cable, 30 m PT 448 256-T PT 448 256-T Sensor cable, 35 m PT 448 257-T PT 448 257-T Sensor cable, 40 m PT 448 258-T PT 448 258-T Sensor cable, 45 m PT 448 259-T PT 448 259-T Sensor cable, 50 m PT 448 260-T PT 448 260-T www.pfeiffer-vacuum.net Page Page 519 519

Vacuum analysis and measurement Vacuum measurement and control units ModulLine For applications in research & development! What is ModulLine? The ModulLine series includes three TPR Pirani gauge heads with a measurement range from 1,000 to 8 10-4 mbar and three IKR cold cathode gauge heads with a measurement range of 5 10-3 to 10-11 mbar. Since the gauge heads do not contain any electronics, they are suitable for employment in high-radiation locations. Advantages at a glance Rugged and well proven design Basically uneffected by radioactivity and electromagnetic fields Is being used on all large accelerators Page 520 www.pfeiffer-vacuum.net

Four different interface options (Profibus) Metal-sealed versions of the sensors are available Automatic switchover from Pirani to cold cathode sensor Applications For use in critical areas like high radiation, for example For UHV Two measurement boards are possible Up to 4 gauge heads max. can be connected Basic unit TPG 300 Up to three plug-ins board Cable matching the respective gauge heads Messkarte board One interface and relay board Interfaces and a relay board Profibus is possible TPG 300 control unit for ModulLine vacuum gauges Control Units Complete measurement units Power supply cards Interface- and relay board Scheme measurement unit www.pfeiffer-vacuum.net Page 521

Vacuum analysis and measurement Vacuum measurement and control units Complete measurement units containing basic unit and the follwing measurement and relay cards Pirani Pirani/Cold cathode combinded RS-232-C-Interface and relay RS-232-C-Interface and relay 1 = one card 2 = two cards PT G25 250 PT G25 306 PT G25 251 PI 300 D CP 300 C9 CP 300 C10 IF 300 A IF 300 B 1 1 1 1 1 PT G25 290 PT G25 307 PT G25 291 1 1 1 1 1 PT G25 256 PT G25 312 PT G25 257 1 1 1 1 1 PT G25 252 PT G25 310 PT G25 253 2 2 2 1 1 PT G25 294 PT G25 311 PT G25 295 2 2 2 1 1 PT G25 292 PT G25 302 PT G25 293 1 1 1 1 1 1 1 1 PT G25 262 PT G25 313 PT G25 263 1 1 1 1 1 1 1 1 Page 522 www.pfeiffer-vacuum.net

Notes Control Units www.pfeiffer-vacuum.net Page 523

Vacuum analysis and measurement and control units ModulLine ModulLine Pirani gauge heads ModulLine TPR 010 For general applications TPR 017 For corrosive media TPR 018 For UHV Dimensions TPR 010 TPR 017 TPR 018 TPR 018, UHV Page Page 524 524 www.pfeiffer-vacuum.net

Technical data TPR 010 TPR 017 TPR 018 Bakeout temperature 100 C 250 C 250 C Operating temperature, high temperature sensor - 0-120 ºC 0-120 ºC cable Operating temperature, standard sensor cable 0-70 ºC 0-80 ºC 0-80 ºC Weight 0.14 kg 0.6 kg 0.6 kg Isolator FPM Al 2 O 3 Al 2 O 3 range max. 1000 mbar 1000 mbar 1000 mbar range min. 8 10-4 mbar 8 10-4 mbar 8 10-4 mbar Filament/holder T/Ni Ni/Ni T/Ni Chamber wall, inside AlSiMg Stainless steel Stainless steel Protective filter Sintered bronze - - Radiation resistance - 1 10 4 Gy 1 10 4 Gy TPR 010 TPR 017 TPR 018 Flange (in) DN 10 ISO-KF Order number PT R02 270 Flange (in) DN 16 ISO-KF DN 16 ISO-KF Order number PT R13 270 PT R15 010 Flange (in) DN 16 CF-F DN 16 CF-F Order number PT R13 271 PT R15 011 Flange (in) DN 40 CF-F Order number PT R15 014 Accessories Sensor cable, TPR 010, 3 m, 80 C PT 548 402-T Sensor cable, TPR 010, 6 m, 80 C PT 548 403-T Sensor cable, TPR 017/018, 3 m, 80 C PT 548 308-T PT 548 308-T Sensor cable, TPR 017/018, 6 m, 80 C PT 548 309-T PT 548 309-T Mess- und Steuergeräte controll units www.pfeiffer-vacuum.net Page Page 525 525

Vacuum analysis and measurement and control units ModulLine ModulLine Cold cathode gauge heads ModulLine IKR 050 coaxial For general applications IKR 060 coaxial For UHV Radiation-resistant Dimensions IKR 070 coaxial For UHV Radiation-resistant IKR 050 coaxial IKR 050 coaxial IKR 060 coaxial IKR 070 coaxial Page Page 526 526 www.pfeiffer-vacuum.net

Technical data IKR 050 coaxial IKR 060 coaxial IKR 070 coaxial Bakeout temperature 150 C 250 C 250 C Operating temperature, high temperature sensor 5-150 ºC 5-250 ºC - cable Operating temperature, standard sensor cable 5-80 ºC 5-80 ºC 5-80 ºC Internal seal FPM Silver Silver Flange Stainless steel Stainless steel Stainless steel Weight 0.6 kg 0.85 kg 0.85 kg Isolator Al 2 O 3 Al 2 O 3 Al 2 O 3 range max. 5 10-3 mbar 5 10-3 mbar 5 10-3 mbar range min. 2 10-9 mbar 1 10-10 mbar 1 10-11 mbar Radiation resistance - 1 10 7 Gy 1 10 7 Gy IKR 050 coaxial IKR 060 coaxial IKR 070 coaxial Flange (in) DN 25 ISO-KF Weight 0.6 kg Order number PT R18 500 Flange (in) DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF Weight 0.6 kg 0.6 kg 0.6 kg Order number PT R18 501 PT R18 753 PT R20 501 Flange (in) DN 40 CF-F DN 40 CF-F DN 40 CF-F Weight 0.85 kg 0.85 kg 0.85 kg Order number PT R18 502 PT R18 751 PT R20 502 Accessories Sensor cable, IKR 050/060, 3 m, 80 C PT 548 406-T PT 548 406-T Sensor cable, IKR 050/060, 6 m, 80 C PT 548 407-T PT 548 407-T Sensor cable, IKR 070, 3 m, 80 C PT 548 306-T Sensor cable, IKR 070, 6 m, 80 C PT 548 317-T Mess- und Steuergeräte controll units www.pfeiffer-vacuum.net Page Page 527 527

Vacuum analysis and measurement and control units ModulLine ModulLine Accessories ModulLine Sensor cables Extension for sensor cables High-temperature sensor cables Sensor cables Order number Sensor cable, TPR 017/018, 3 m, 80 C PT 548 308-T Sensor cable, TPR 017/018, 6 m, 80 C PT 548 309-T Sensor cable, TPR 017/018, 10 m, 80 C PT 548 456-T Sensor cable, TPR 017/018, 15 m, 80 C PT 548 457-T Sensor cable, TPR 017/018, 20 m, 80 ºC PT 548 458-T Sensor cable, TPR 017/018, 25 m, 80 C PT 548 459-T Sensor cable, TPR 017/018, 30 m, 80 C PT 548 460-T Sensor cable, TPR 017/018, 35 m, 80 C PT 548 461-T Sensor cable, TPR 017/018, 40 m, 80 C PT 548 462-T Sensor cable, TPR 017/018, 45 m, 80 C PT 548 463-T Sensor cable, TPR 017/018, 50 m, 80 PT 548 464-T Sensor cable, TPR 010, 2 m, 80 C PT 548 401-T Sensor cable, TPR 010, 3 m, 80 C PT 548 402-T Sensor cable, TPR 010, 6 m, 80 C PT 548 403-T Sensor cable, TPR 010, 30 m, 80 C PT 548 415-T Sensor cable, TPR 010, 40 m, 80 C PT 548 416-T Sensor cable, TPR 010, 50 m, 80 C PT 548 417-T Sensor cable, TPR 010, 10 m, 80 C PT 548 450-T Sensor cable, TPR 010, 15 m, 80 C PT 548 451-T Sensor cable, TPR 010, 20 m, 80 C PT 548 452-T Sensor cable, TPR 010, 25 m, 80 C PT 548 453-T Sensor cable, TPR 010, 35 m, 80 C PT 548 454-T Sensor cable, TPR 010, 45 m, 80 C PT 548 455-T Sensor cable, IKR 050/060, 3 m, 80 C PT 548 406-T Sensor cable, IKR 050/060, 6 m, 80 C PT 548 407-T Sensor cable, IKR 050/060, 10 m, 80 C PT 548 419-T Sensor cable, IKR 050/060, 30 m, 80 C PT 548 422-T Sensor cable, IKR 050/060, 15 m, 80 C PT 548 483-T Sensor cable, IKR 050/060, 20 m, 80 C PT 548 484-T Sensor cable, IKR 050/060, 25 m, 80 C PT 548 485-T Sensor cable, IKR 050/060, 35 m, 80 C PT 548 486-T Sensor cable, IKR 050/060, 40 m, 80 C PT 548 487-T Sensor cable, IKR 050/060, 45 m, 80 C PT 548 488-T Sensor cable, IKR 050/060, 50 m, 80 C PT 548 489-T Sensor cable, IKR 070, 3 m, 80 C PT 548 306-T Sensor cable, IKR 070, 6 m, 80 C PT 548 317-T Sensor cable, IKR 070, 10 m, 80 C PT 548 490-T Sensor cable, IKR 070, 15 m, 80 C PT 548 491-T Sensor cable, IKR 070, 20 m, 80 C PT 548 492-T Sensor cable, IKR 070, 30 m, 80 C PT 548 493-T Sensor cable, IKR 070, 40 m, 80 C PT 548 494-T Sensor cable, IKR 070, 45 m, 80 C PT 548 495-T Sensor cable, IKR 070, 50 m, 80 C BP 229 748-T Page Page 528 528 www.pfeiffer-vacuum.net

Extension for sensor cables Extension for sensor cable, TPR 010/017/018, 10 m, 80 ºC Extension for sensor cable, TPR 010/017/018, 20 m, 80 C Extension for sensor cable, TPR 010/017/018, 30 m, 80 C Extension for sensor cable, TPR 010/017/018, 40 m, 80 C Extension for sensor cable, TPR 010/17/018, 50 m, 80 C Order number PT 548 466-T PT 548 468-T PT 548 470-T PT 548 472-T PT 548 474-T High-temperature sensor cables High-temperature sensor cable, TPR 017/018, 3 m, 250 C High-temperature sensor cable, TPR 017/018, 6 m, 250 C High-temperature sensor cable, TPR 017/018, 10 m, 250 C High-temperature sensor cable, TPR 017/018, 15 m, 250 C High-temperature sensor cable, TPR 017/018, 20 m, 250 C High-temperature sensor cable, IKR 050/060, 3 m, 250 C High-temperature sensor cable, IKR 050/060, 6 m, 250 C High-temperature sensor cable, IKR 050/060, 10 m, 250 C High-temperature sensor cable, IKR 050/060, 15 m, 250 C High-temperature sensor cable, IKR 050/060, 20 m, 250 C Order number PT 548 414-T PT 548 465-T PT 448 047-T PT 448 043-T PT 448 044-T PT 548 542-T PT 548 543-T PT 448 045-T PT 548 989-T PT 448 046-T Mess- und Steuergeräte controll units www.pfeiffer-vacuum.net Page Page 529 529

Vacuum analysis and measurement and control units ModulLine ModulLine Pirani board ModulLine Pirani measurement board PI 300 D For 2 TPR 010/018 range from 1000 to 8 10-4 mbar Pirani measurement board PI 300 DN For 2 TPR 017 range from 1000 to 8 10-4 mbar Dimensions Pirani board Page Page 530 530 www.pfeiffer-vacuum.net

Technical data Pirani measurement board PI 300 D, for 2 TPR 010/018s Pirani measurement board PI 300 DN, for 2 TPR 017s Number of measuring circuits 2 2 For gauge TPR 010, TPR 018 TPR 017 Weight 0.14 kg 0.14 kg range max. 1000 mbar 1000 mbar range min. 8 10-4 mbar 8 10-4 mbar Sensor cable length 100 m 100 m board Pirani measurement board Pirani board Reaction time of the output signal: Decay 600 ms 600 ms Reaction time of the output signal: Rise 50 ms 50 ms Order number Pirani board PT 546 920-T PT 549 214-T controll units Mess- und Steuergeräte www.pfeiffer-vacuum.net Page Page 531 531

Vacuum analysis and measurement and control units ModulLine ModulLine Cold cathode measurement board ModulLine Cold cathode measurement board PE 300 DC9 range from 1 10-9 to 5 10-3 mbar For 2 IKR 050 Dimensions Cold cathode measurement board Page Page 532 532 www.pfeiffer-vacuum.net

Technical data Cold cathode measurement board PE 300 DC9, for 2 IKR 050s Number of measuring circuits 2 For gauge IKR 050 Weight 0.26 kg range max. 5 10-3 mbar range min. 1 10-9 mbar Sensor cable length 100 m board Cold cathode measurement board Reaction time of the output signal: Rise 16 ms Order number Cold cathode measurement board PT 441 375-T controll units Mess- und Steuergeräte www.pfeiffer-vacuum.net Page Page 533 533

Vacuum analysis and measurement and control units ModulLine ModulLine Pirani/cold cathode measurement board ModulLine CP 300 T11L For 1 TPR 010/018 and 1 IKR 070 Max. sensor cable length: 500 m range from 1 10-11 to 1000 mbar Dimensions CP 300 C9 For 1 TPR 010/018 and 1 IKR 050 range from 1000 to 5 10-9 mbar CP 300 T11 For 1 TPR 010/018 and 1 IKR 070 range from 1000 to 1 10-11 mbar CP 300 C10 For 1 TPR 010/018 and 1 IKR 060 range from 1000 to 1 10-10 mbar Pirani/cold cathode measurement board Page Page 534 534 www.pfeiffer-vacuum.net

Technical data Pirani/cold cathode measurement board CP 300 T11L, for 1 TPR 010/018, 1 IKR 070 Pirani/cold cathode measurement board CP 300 C9, for 1 TPR 010/018, 1 IKR 050 Pirani/cold cathode measurement board CP 300 T11, for 1 TPR 010/018, 1 IKR 070 Pirani/cold cathode measurement board CP 300 C10, for 1 TPR 010/018, 1 IKR 060 Number of measuring circuits 2 1 each 1 each 1 each For gauge TPR 010, TPR 018, IKR 070 TPR 010, TPR 018, IKR 050 TPR 010, TPR 018, IKR 070 TPR 010, TPR 018, IKR 060 Weight 0.21 kg 0.21 kg 0.25 kg 0.23 kg range max. 1000 mbar 1000 mbar 1000 mbar 1000 mbar range min. 1 10-11 mbar 5 10-9 mbar 1 10-11 mbar 1 10-10 mbar Sensor cable length 500 m 100 m 100 m 100 m board - Pirani/cold cathode measurement board Pirani/cold cathode measurement board Pirani/Cold cathode measurement board Reaction time of the output signal: Rise 10 ms 10 ms 50 ms 50 ms Order number Pirani/cold cathode measurement board PT 441 122-T PT 441 000-T PT 441 080-T PT 441 114-T Mess- und Steuergeräte controll units www.pfeiffer-vacuum.net Page Page 535 535

Vacuum analysis and measurement and control units ModulLine ModulLine Interface and relay board ModulLine Dimensions Interface and relay board Page Page 536 536 www.pfeiffer-vacuum.net

Technical data Interface and relay board IF 300 A, RS-232-C, 45 W, 75 VA Interface and relay board IF 300 B, RS-232-C, 120 W, 1,000 VA Interface and relay board IF 300 C, RS-422, 50 V AC / DC Interface and relay board IF 300 P, Profibus-DP, 45 W, 75 VA Weight 0.14 kg 0.15 kg 0.14 kg 0.16 kg Relay: Connector 15 pole (pins) D-Sub GdsA-H, DIN D-Sub D-Sub 41612 Relay: Number 5 pieces 5 pieces 5 pieces 5 pieces Relay: Switching capacity 45 W, 75 VA 120 W, 1000 VA 45 W, 75 VA 45 W, 75 VA Relay: Switching voltage 30 V DC / 50 V AC 30 V DC / 50 V AC / DC 50 V AC / DC 250 V AC Relay: Switching current 1.5 A 4 A 1.5 A 1.5 A Relay: Changeover contacts, potential-free, per relay 1 piece 1 piece 1 piece 1 piece Relay: Resistance (with connector) 125 mohm 70 mohm 125 mohm 125 mohm Interface RS-232-C RS-232-C RS-422 Profibus-DP Interface: Connection D-sub connector, 9-pole, pins Cable with D-sub connector, 9-pole, D-sub connector, 9-pole, sockets D-sub connector, 9-pole, pins pins Interface: Baud rates 300, 1200, 2400, 4800, 9600 300, 1200, 2400, 4800, 9600 300, 1200, 2400, 4800, 9600 12 Mbaud Interface: Data format ASCII, 1 start bit, 8 data bits, 1 stop bit, no parity bit ASCII, 1 start bit, 8 data bits, 1 stop bit, no parity bit ASCII, 1 start bit, 8 data bits, 1 stop bit, no parity bit Interface: Cable length max. 30 m 30 m 1200 m 1200 m Interface: Type RS-232-C RS-232-C RS-422 Profibus-DP asynchronus asynchronus asynchronus - Mess- und Steuergeräte Order number Interface and relay board PT 441 130-T PT 441 250-T PT 441 390-T PT 441 395-T Accessories D-Sub mating connector, female, 15-pin, PT 441 129-T PT 441 129-T for IF 300 A/C, relay output D-Sub mating connector, female, for IF 300 A, RS-232-C PT 441 128-T Interface cable, for IF 300 B, RS-232-C, 0.4 m PT 548 932-T Relay connector, complete, for IF 300 B PT 546 999-T controll units www.pfeiffer-vacuum.net Page Page 537 537

Vacuum analysis and measurement and control units ModulLine ModulLine TPG 300, basic unit ModulLine Basic unit with power supply and 3 free slots for measurement, interface and relay boards Dimensions TPG 300, basic unit Page Page 538 538 www.pfeiffer-vacuum.net

Technical data TPG 300, Basic unit Display rate 5 1/s Error display 1 LED, red Filter time constant 16 ms, 160 ms (standard), 1.6 s Weight: without boards 1.4 kg Limit frequency 10 Hz, 1 Hz (standard), 0.1 Hz Unit of measure mbar, Torr, Pa range max. 1000 mbar range min. 1 10-11 mbar rate 100 1/s Measured value display 15 mm high numbers Mains requirement: frequency (range) 50-60 Hz Mains requirement: power consumption 55 VA Mains requirement: voltage (range) 90-264 V AC Safety IEC 384, class 1, VDE 0411, part 2.80 Temperature: Operating +5 - +50 ºC Temperature: Storage -40 - +65 ºC Order number TPG 300, basic unit PT 546 900-T Mess- und Steuergeräte Accessories Blank panel for measurement board PT 441 259 Blank panel, for IF 300 PT 441 017 controll units www.pfeiffer-vacuum.net Page Page 539 539

Vacuum analysis and measurement and control units ModulLine ModulLine TPG 300, complete units with measurement boards and power cords ModulLine Dimensions TPG 300, basic unit Technical data TPG 300, complete units with measurement boards and power cords Display rate 5 1/s Error display 1 LED, red Filter time constant 16 ms, 160 ms (standard), 1.6 s Weight: without boards 1.4 kg Limit frequency 10 Hz, 1 Hz (standard), 0.1 Hz Unit of measure mbar, Torr, Pa rate 100 1/s Measured value display 15 mm high numbers Mains requirement: frequency (range) 50-60 Hz Mains requirement: power consumption 55 VA Mains requirement: voltage (range) 90-264 V AC Safety IEC 384, class 1, VDE 0411, part 2.80 Temperature: Operating +5 - +50 ºC Temperature: Storage -40 - +65 ºC Page Page 540 540 www.pfeiffer-vacuum.net

Technical data TPG 300, complete measurement unit, incl. PI 300 D TPG 300, complete measurement unit incl. PI 300 D, IF 300 A TPG 300, complete measurement unit, incl. PI 300 D, IF 300 B range max. 1000 mbar 1000 mbar 1000 mbar range min. 8 10-4 mbar 8 10-4 mbar 8 10-4 mbar board PI 300 D for 2 Pirani Gauge TPR 010/018 PI 300 D for 2 Pirani Gauge TPR 010/018 PI 300 D for 2 Pirani Gauge TPR 010/018 Relay: Switching voltage - 30 V DC / 50 V AC 30 V DC / 250 V AC Interfaces - RS-232-C, IF 300 A RS-232-C, IF 300 B Order number TPG 300, complete units with measurement boards and power cords PT G25 250 PT G25 306 PT G25 251 Technical data TPG 300, complete measurement unit, incl. 2 PI 300 D TPG 300, complete measurement unit incl. 2 PI 300 D, IF 300 A TPG 300, complete measurement unit, incl. 2 PI 300 D, IF 300 B range max. 1000 mbar 1000 mbar 1000 mbar range min. 8 10-4 mbar 8 10-4 mbar 8 10-4 mbar board 2 PI 300 D for 4 Pirani Gauge TPR 010/018 2 PI 300 D for 4 Pirani Gauge TPR 010/018 2 PI 300 D for 4 Pirani Gauge TPR 010/018 Relay: Switching voltage - 30 V DC / 50 V AC 30 V DC / 250 V AC Interfaces - RS-232-C, IF 300 A RS-232-C, IF 300 B Mess- und Steuergeräte controll units Order number TPG 300, complete units with measurement boards and power cords PT G25 252 PT G25 310 PT G25 253 Technical data TPG 300, complete measurement unit, incl. CP 300 C10 TPG 300, complete measurement unit incl. CP 300 C10, IF 300 A TPG 300, complete measurement unit, incl. CP 300 C10, IF 300 B range max. 1000 mbar 1000 mbar 1000 mbar range min. 1 10-10 mbar 1 10-10 mbar 1 10-10 mbar board CP 300 C10 for 1 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 060 CP 300 C10 for 1 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 060 CP 300 C10 for 1 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 060 Relay: Switching voltage - 30 V DC / 50 V AC 30 V DC / 250 V AC Interfaces - RS-232-C, IF 300 A RS-232-C, IF 300 B Order number TPG 300, complete units with measurement boards and power cords PT G25 256 PT G25 312 PT G25 257 www.pfeiffer-vacuum.net Page Page 541 541

Vacuum analysis and measurement and control units ModulLine ModulLine TPG 300, complete units with measurement boards and power cords ModulLine Dimensions TPG 300, basic unit Technical data TPG 300, complete units with measurement boards and power cords Display rate 5 1/s Error display 1 LED, red Filter time constant 16 ms, 160 ms (standard), 1.6 s Weight: without boards 1.4 kg Limit frequency 10 Hz, 1 Hz (standard), 0.1 Hz Unit of measure mbar, Torr, Pa rate 100 1/s Measured value display 15 mm high numbers Mains requirement: frequency (range) 50-60 Hz Mains requirement: power consumption 55 VA Mains requirement: voltage (range) 90-264 V AC Safety IEC 384, class 1, VDE 0411, part 2.80 Temperature: Operating +5 - +50 ºC Temperature: Storage -40 - +65 ºC Page Page 542 542 www.pfeiffer-vacuum.net

Technical data TPG 300, complete measurement unit, incl. PI 300 D, CP 300 C10 TPG 300, complete measurement unit, incl. PI 300 D, CP 300 C10, IF 300 A TPG 300, complete measurement unit, incl. PI 300 D, CP 300 C10, IF 300 B range max. 1000 mbar 1000 mbar 1000 mbar range min. 1 10-10 mbar 1 10-10 mbar 1 10-10 mbar board PI 300 D, CP 300 C10 for 3 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 060 PI 300 D, CP 300 C10 for 3 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 060 PI 300 D, CP 300 C10 for 3 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 060 Relay: Switching voltage - 30 V DC / 50 V AC 30 V DC / 250 V AC Interfaces - RS-232-C, IF 300 A RS-232-C, IF 300 B Order number TPG 300, complete units with measurement boards and power cords Technical data TPG 300, complete measurement unit incl. CP 300 C9 PT G25 262 PT G25 313 PT G25 263 TPG 300, complete measurement unit incl. CP 300 C9, IF 300 A TPG 300, complete measurement unit, incl. CP 300 C9, IF 300 B range max. 1000 mbar 1000 mbar 1000 mbar range min. 5 10-9 mbar 5 10-9 mbar 5 10-9 mbar board CP 300 C9 for 1 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 050 CP 300 C9 for 1 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 050 CP 300 C9 for 1 Pirani- and 1 Cold Cathode Gauge TPR 010/ 018, IKR 050 Relay: Switching voltage - 30 V DC / 50 V AC 30 V DC / 250 V AC Interfaces - RS-232-C, IF 300 A RS-232-C, IF 300 B Mess- und Steuergeräte controll units Order number TPG 300, complete units with measurement boards and power cords PT G25 290 PT G25 307 PT G25 291 www.pfeiffer-vacuum.net Page Page 543 543

Vacuum analysis and measurement and control units ModulLine ModulLine TPG 300, complete units with measurement boards and power cords ModulLine Dimensions TPG 300, basic unit Technical data TPG 300, complete units with measurement boards and power cords Display rate 5 1/s Error display 1 LED, red Filter time constant 16 ms, 160 ms (standard), 1.6 s Weight: without boards 1.4 kg Limit frequency 10 Hz, 1 Hz (standard), 0.1 Hz Unit of measure mbar, Torr, Pa rate 100 1/s Measured value display 15 mm high numbers Mains requirement: frequency (range) 50-60 Hz Mains requirement: power consumption 55 VA Mains requirement: voltage (range) 90-264 V AC Safety IEC 384, class 1, VDE 0411, part 2.80 Temperature: Operating +5 - +50 ºC Temperature: Storage -40 - +65 ºC Page Page 544 544 www.pfeiffer-vacuum.net