Air Particle Sensor Smallest Air Particle Sensor in the Industry for In-line Measurement Suitable for continuous measurement. With Realtime Clean Air Monitor. Be sure to read Safety Precautions on page 1260. Features Cleaning / Smallest in the Industry! Air Particle Sensor for In-line Measurement A high-performance fan for external air suction enables constant measuring over long periods. Semiconductor laser and highsensitivity optical design in the sensing section enable measurement of 0.-µm particles. Laser beam Airflow Measurement Principle A semiconductor laser beam is targeted on to the air intake and the light is scattered when particles pass through that beam. The scattered light is received by the light receiving element and converted to an electrical signal. Particle Trend Indicator The sensing section has a particle trend display for quick visual confirmation of the degree of cleanliness. The Amplifier provides numeric indication of the number of 0.-, 0.5-, and 1.0- Particle Numeric Display Particle Trend Display µm particles. A signal can be output at any level of particles if a threshold has been set. 1256
On-screen Indication and Data Logging of Particle Amount Measurement values can be easily logged on a personal computer by using the Interface Unit and special software (sold separately). Data from sequential sensing of particles can be used to improve quality. Realtime Clean Air Monitor A variety of displays (including color graphs for visual confirmation by color of particle densities, indication of the number of particles, and trend graphs) can be set. Particle Sensors and Interface Units can also be set from the personal computer. Measurement data is logged in real time and can be manipulated in CSV-format files using spreadsheet software. Quality Control with Multi-point Measurement Patent Pending Up to 10 Particle Sensors and up to 9 Air Clean Units can be controlled through one Interface Unit and Realtime Clean Air Monitor. There are no time-consuming restrictions, such as the order that power is turned ON. The level of cleanliness can be controlled for each process and constant monitoring is possible in relation to quality data. Cleaning / Electrostatic Sensor Air Clean Unit air volume settings, operation, and errors can be checked on the Amplifier or Interface Unit. Multi-point data output No. of connectable Sensors: 10 max. For In-line Applications Installation is simple with DIN Track mounting. The In-line Air Particle Sensor was developed for in-line applications, with a 24- VDC power supply. External outputs can be at two levels: warning and alarms. Suitable for in-line trend management applications. 1257
Ordering Information Air Particle Sensors Sensor Head Appearance Measured particle diameter Model 0. µm/ 0.5 µm/ 1.0 µm 0 Amplifier Units Appearance Power supply Connection method Model 24 VDC Cable connection A11 Supplied from the Air Clean Unit Connector connection (Air Clean Unit feedback connection) A12 Calculating Unit Appearance Model Cleaning / ZX-CAL2 Clean Monitoring Appearance Contents Connection method Model Set Including Communications Interface Unit and Realtime Clean Air Monitor For RS-22C connection with personal computer only For RS-22C connection with personal computer or Air Clean Unit feedback connection ZN-SFW11 ZN-SFW12 Double-sided Connector Cables (for extension between Sensor Head and Amplifier) Cable length Model Quantity 1 m ZX-XC1A 1 4 m ZX-XC4A 1 8 m ZX-XC8A 1 Type Model Quantity Sensor Head Replacement Filter Set ZN9-PF1 1 Cleaning Filter ZN9-PC1 1 Head Attachment Tool ZN9-PB1 1 1258
Ratings and Specifications Air Particle Sensors Sensor Head Item Model 0 Applicable Amplifier Measurement method Light source Applicable particle size Applicable cleanliness class Indicator Connection tube Ambient temperature Ambient humidity Dielectric strength Vibration resistance Shock resistance A11/A12 90 sideways light-scattering method Semiconductor laser 0., 0.5, or 1.0 µm min. Equivalent to Class 100 to 100,000 (FED-STD-209D) Level indicator for Class 100 to 100,000 (FED-STD-209D) Inner diameter: 4, Length: 1 m max. Operating: 0 to 40 C, Storage: -15 to 50 C (with no icing or condensation) Operating and storage: 5% to 85% (with no condensation) 1,000 VAC 50/60Hz for 1 min 10 to 55 Hz, 0.7-mm double amplitude 80 min each in X, Y, and Z directions 150 m/s² times each in six directions (up/down, left/right, forward/backward) Connection method Cable (standard cable length: 0.5 m) Materials ABS Weight (packed state) Approx. 00 g (Packed state: Approx. 0 g) Amplifier Units Instruction sheet, connection tube Item Model A11 A12 Sampling time 1 to 599 s (selectable) Average count setting 1, 2, 4, 8, 16, 2, or 64 Indicators Status outputs (2 outputs: OUT1/OUT2) * Reset input * Functions Communications with Air Clean Unit Power supply voltage Current consumption Operation indicators: OUT1 (orange), OUT2 (yellow), 7-segment main display (red), 7-segment sub-display (yellow), power (green), wide range display (green), unit selection display (green) NPN open-collector outputs, 0 VDC, 0 ma max., Residual voltage: 1.2 V max. ON: Short-circuited with 0-V terminal or 1.5 V or less, OFF: Open Measurement result display, Setting value display, Unit selection, Scaling, Peak hold, Hysteresis setting, Threshold level selection, Wide range display, Key lock, ECO mode, Display reverse, Display digit change, Initialize 24 VDC ±10%, Ripple (p-p): 10% max. 00 ma max. 7-segment main display (red), 7-segment sub-display (yellow), power (green), wide range display (green), unit selection display (green) Measurement result display, Communications condition display, Unit selection,scaling, Air Clean Unit automatic control, Air Clean Unit air level change,threshold level selection, Wide range display, Key lock, ECO mode, Display reverse, Display digit change, Initialize Unique communications specifications (RJ- connector and straight LAN cable) 24 VDC ±10%, Ripple (p-p): 10% max. (Supplied from Air Clean Unit) Cleaning / Ambient temperature Ambient humidity Insulation resistance Dielectric strength Vibration resistance Shock resistance Operating: 0 to 40 C, Storage: -15 to 50 C (with no icing or condensation) Operating and storage: 5% to 85% (with no condensation) 20 MΩ min. at 500 VDC 1,000 VAC, 50/60 Hz for 1 min 10 to 150 Hz, 0.7-mm double amplitude 80 min each in X, Y, and Z directions 00 m/s² times each in six directions (up/down, left/right, forward/backward) Connection method Cable (standard cable length: 2 m) Connector Cable (standard cable length: 2 m) Materials Case: PBT (polybutylene terephthalate), Cover: Polycarbonate Weight (packed state) Approx. 180 g (Packed state: Approx. 50 g) Instruction sheet * OUT2 and the reset input are switched by using the DIP switch on the bottom of the Amplifier. 1259
Clean Monitoring Item Model ZN-SFW11 ZN-SFW12 Power supply voltage Current consumption Applicable Amplifiers Applicable Amplifier Unit software version Supplied from the A ma max. with 24-VDC power supply voltage (excluding current consumption and current output of the Amplifier) ZX Series, ZJ-SD Series, Series ZX-LDA@@-N V1.000 or higher, ZX-EDA@@ V1.00 or higher, ZX-TDA@@ V1.100 or higher, ZJ-SDA@@ V1.000 or higher, or A@@ V1.000 or higher No. of connectable Amplifiers 10 max. (For A) Indicators Power: Green, Sensor communications: Green, Sensor communications error: Red, External terminal communications: Green, External terminal communications error: Red Power (POWER: Green), Serial communications (STA1: Green) Not clean (OPE1: Orange), Clean (OPE2: Green) Functions Automatic control for Air Clean Units (multi-unit system control), Air level change for Air Clean Units Communications port RS-22C (9-pin, D-Sub connector) Protocol CompoWay/F Cleaning / Communications Baud rate Data configuration For external device 2 8,400 bps Data bits: 8, Parity: None, Start bits: 1, Stop bits: 1, Flow control: None Unique communications specifications (RJ- connector and straight LAN cable) Ambient temperature Operating: 0 to 40 C, Storage: -15 to 50 C (with no icing or condensation) Ambient humidity Operating and storage: 5% to 85% (with no condensation) Insulation resistance 20 MΩ min. at 500 VDC Dielectric strength 1,000 VAC, 50/60 Hz for 1 min Vibration resistance 10 to 150 Hz, 0.7-mm double amplitude 80 min each in X, Y, and Z directions Shock resistance 00 m/s² times each in six directions (up/down, left/right, forward/backward) Connection method Connector cable (standard cable length: 2 m) Materials Case: PBT (polybutylene terephthalate), Cover: Polycarbonate Weight Approx. 100 g (Packed state: Approx. 480 g) Approx. 200 g (Packed state: Approx. 550 g) CD-ROM (Realtime Clean Air Monitor), Instruction Sheet, Two clamps System Connection Diagram Please refer to System Connection Diagram on page 1249 for details. Safety Precautions Refer to Warranty and Limitations of Liability on page F-2. WARNING This product is not designed or rated for ensuring safety of person. Do not use it for such purpose. Precautions for Correct Use Do not use the product in atmospheres or environments that exceed product ratings. 1260
Dimensions (Unit: mm) Air Particle Sensors 0 Sensor Head Mounting Tool When ZN9-PB1 is used (Sold separately) 46 14. 76 120 Air inlet 21.5 70 14.4 9.4 22.4 15.85 6.8 5 25 70±0.1 70 5.2-dia. vinyl-insulated round cable with 10 conductors, standard length: 0.5 m 44 22 Exhaust outlet Two, -dia. holes Mounting hole cutout dimensions Mounting screw holes Two, M4 holes, depth: 6 42 2.6 Mounting plate Two, M4 6 mounting screws (90) 4 82 4 82±0.1 5 Six, M Mounting hole cutout dimensions 5 Oblong holes for mounting Six,.2 6.2 holes A11 Range indicator Unit indicator A12 Range indicator Unit indicator Modular jack 0 15.5 dia. 1.2 OUT1 indicator OUT2 indicator (1) 44 5.1-dia. vinyl-insulated round cable, standard length: 100 mm 1 64. 6.8 Main digital indicator Sub-digital indicator 15.8 Status output 6 16.8 1.5 5.2-dia. vinyl-insulated round cable, standard length: 2 m Status output OUT2/reset input switch (default setting: status output) 0 15.5 dia. 1.2 OUT1 indicator OUT2 indicator (1) 44 5.1-dia. vinyl-insulated round cable, standard length: 100 mm 1 64. 6.8 Main digital indicator Sub-digital indicator 21.46 6.6 16.8 1.5 6 5.1-dia. vinyl-insulated round cable with 10 conductors (conductor cross-section: 0.08 mm², insulator diameter: 0.7 mm), standard length: 2 m 15.8 Cleaning / Interface Units ZN-SF11 ZN-SF12 Sensor communications indicator (communicating) Sensor communications indicator (communications error) Link connector Status indicator Modular jack 0 15 1.2 (.1) Connector (46) (6) 5.2-dia. vinyl-insulated round cable, standard length: 00 mm 64. 1 6.8 External terminal communications indicator (communicating) External terminal communications indicator (communications error) 1.5 4. 6.55 5 0 15 (.1) 1.2 Operation indicators (6) (46) 5.2-dia. vinyl-insulated round cable, standard length: 00 mm Connector 1 64. 6.8 4. Main digital indicator Sub-digital indicator 6.55 5 21.46 6.6 15.8 1.5 5.1-dia. vinyl-insulated round cable with 10 conductors (conductor cross-section: 0.08 mm², insulator diameter: 0.7 mm), standard length: 2 m Cat. No. E872-E1-01 In the interest of product improvement, specifications are subject to change without notice. 1261