Project TRIPLE-S Microscope: Contribution of AMG Technology Ltd. V. Stavrov, G. Stavreva EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 1
About AMG Technology Ltd. Company Technology background Project TRIPLE-S Microscope Partners Challenges Contribution of AMGT to the project Self-sensing AFM cantilevers Position sensors Summary & Conclusions EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 2
Main business of AMGT: development and prototyping of MEMS Why MEMS? EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 3
Specific advantages Synergetic development of original technologies & designs Self-sensing AFM CLs AMGT founded Rented clean room MEMS with sidewall embedded piezoresistors Own clean premises Clean room optimization New sensing technology? Year 2007 2008 2009 2010 2011 2012 2013 2014 2015 Successful project applications? Funding Status Completed Running EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 4
Piezoresistive self-sensing technologies available at AMGT State of the art approach Classic cantilevers with planar piezoresistors (PzR) sensitive in Z-direction, as known from the art. Z - sensitive Our original technology area of stress concentration X-Y sensitive Matured fabrication technologies and design expertise in MEMS are contributed to all joint projects EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 5
About Project Triple-S Microscope Project consortium AFSEM developer: coordinator & system integrator Fast scanning cantilevers, worldwide recognized top-expertise in fast AFM Top-expertise in SEM /DBS analyses, advanced applications developer Application specific MEMS: AFM cantilevers and position sensors EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 6
About Triple-S Project Both microscopes: Scanning Electron (SEM) and Atomic Force (AFM) are between most important instruments for measurement and analyses in advanced science and technologies. SEM possesses excellent resolution in XY but poor in Z - direction. AFM shows remarkable resolution in Z - direction, but suffers of low lateral (XY) resolution and slow imaging. Main objective of the project: seamless integration of AFM into Dual Beam (FEB and FIB) Microscope EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 7
Triple-S Project challenges Scanning Electron Microscope AFM SEM Objective Sample stage Dual-beam system (SEM+FIB) SEM Objective - Strongly reduced size - Increased scan speed: low Q-factor needed for fast scanning in vacuum - (Sub-)nm repeatable sample & tip positioning EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 8
The role of AMGT in Triple-S Microscope project Self-sensing AFM sensors Position sensors AFM sensors with passive Q - control AFM sensors with active Q - control Sensors for fast AFM scanner Sensors for coarse sample stage In progress EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 9
100/48µm self-sensing CLs with electro-thermal actuator for active Q-control SEM images of cantilevers with active Q-control EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 10
Technology for fabrication of cantilevers with foreground structures Tip-to-sample access rigid but thin second cantilever required l L D D t Tip-sharpening in progress EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 11
1D position MEMS with 1500µm travel range 220 200 180 160 140 U [mv] 120 100 80 S x = 120 µv/µm. @ 1V DC 60 40 20 0 200 400 600 800 1000 1200 1400 1600 D [um] Experimentally measured sensor characteristics @ 1V DC supply of 1D position sensor with differential springs: sensitivity of 120 µv/µm.v at operating range of > 1500 µm has been achieved EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 12
Strongly increased sensitivity @ 50µm travel range 300 250 200 U [mv] 150 100 S y = 4.8 mv/µm@1v DC (factor x40) 50 0 0 5 10 15 20 25 30 35 40 45 50 D[um] Experimentally measured sensor characteristics @ 1V DC supply voltage of 1D position sensor with modified reed mechanism: sensitivity has been increased > x40 EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 13
First 3D position sensor with 35µm 3D travel range 150 100 Uy [mv] 50 S x-y-z = 4.8 mv/µm@1v DC 0 0 5 10 15 20 25 30 Dxyz [um] Experimentally measured sensor characteristics at 1V DC supply voltage of 3D position sensor with modified reed mechanism: sensitivity is similar to the max achieved in 1D sensing EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 14
Summary The TRIPLE-S platform is designed for a seamless integration in SEMs and DBMs: No scanning stages which limit sample shapes AFM comes to sample No optical detection systems due to self-sensing cantilevers ease of use High scan rates approaching SEM image rates Compatible with further SEM expansions The height performance allows nm and sub-nm resolution in X,Y and Z Current development steps focus on integration in SEM / FIB (dual-beam microscopes) AFM scan head The adapted design will allow full processing capabilities (SEM, FIB, GIS, micromanipulation) By that, this concept leverages SEMs / FIBs to a complementary, in-situ characterization tool beyond current limitations SEM stage EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 15
Conclusions EUROSTARS program provides a great chance for meeting partners with complementary expertise we d like to share our experience Specific difficulties, like: - national rules seem too conservative in some aspects if optimized, they would fit better the specifics of innovations - some funding opportunities have been missed (Danube initiative) Encouraging news, like: - several projects with Bulgarian participants have been ranked positively; this will further promote opportunities provided by EUROSTARS programme - the support from BSMEA become more and more effective thanks for being our project partner! EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 16
Thanks for Your attention! www.amg-t.com EUROSTARS ROADSHOW - SOFIA, May 26 th, 2015 17