ACP 15 / 28 / 40 SERIES 2 COMPACT DRY ROUGHING PUMPS

ACP 15 / 28 / 40 SERIES 2 COMPACT DRY ROUGHING PUMPS

COMPACT DRY ROUGHING PUMPS ACP SERIES 2 The Roots history The principle of the Roots pump was discovered by two brothers (Philander H. and Francis M. Roots ) in the mid 1800's. They were, owners of a woollen mill in Connersville Indiana. The Roots blower was exhibited in Paris during 1867 and was considered (at the time) as a potential solution to the difficult problems of deep mine ventilation. Roots pumps are positive displacement machines using two synchronized rotors rotating in opposite directions. The rotors feature profiles, usually shaped like the figure of 8. During the rotation, a quantity of molecules is isolated between the lobes and the stator and then led to exhaust side without variation of volume. The Multi-Roots technology Considering the compression ratio of each stage, several stages working in series are necessary to get a vacuum level in the range of mbar. This technology brings the unique advantage of not requiring friction seals inside the pumping module. The Alcatel experience in Multi-Roots technology From the early beginning of its vacuum activity, Technology has been involved in the design and manufacturing of vacuum Roots Blowers. Widely used in Industry, R&D as well as most demanding applications of the Semiconductor industry, the Multi-Roots technology is the leading one for many applications where dry vacuum is a key requirement. 2006 : ACP 15/28/40 series 2 2004 : ACP 15 series 1 2003 : ACP 40 series 1 2002 : A300 ACP 40 series 1 ACP 15/28/40 series 2 ACP 15 series 1 2001 : ACP 28 series 1 1999 : Series Two and A100 1998 : ACP 20 1993 : Series One A300 ACP 20 ACP 28 series 1 ADP/ADS series Two 1988 : First Alcatel Dry Pump 1970 : Conventional Roots A100 First Alcatel Dry Pump Conventionnal Roots Series One 02

Focus on reliability, cleanliness and performances No particulate contamination Thanks to the frictionless design, there is no wearing parts in the path of pumped gases and therefore no particulate generation. No hydrocarbon vapors backstreaming ACP series pumps are free of lubricant inside the pumping module; giving benefit of no hydrocarbon vapors backstreaming. The ACP series design incorporates the Alcatel multi-stage Roots type pumping concept, extensively field proven in the most difficult processes. The ACP series pumps feature a frictionless pumping module, optimized for operation without internal lubricant. The benefits of this new evolution are important for applications requiring high levels of cleanliness and reliability. Alcatel Clean Pumps from the ACP series will bring added value to each of these applications. Constant performances Thanks to constant internal clearances and constant rotational speed (frequency converter driven motor) the ACP series pumps will provide: - constant pumping speed - constant ultimate pressure High reliability Thanks to the Alcatel expertise in the design of dry multi-stage Roots pumps, used in the most demanding applications. Low maintenance costs Field serviceable, the ACP series pumps require a complete overhaul only every 22 000 hours for ACP 28/40 and 20 000 hours for ACP 15. 03

COMPACT DRY ROUGHING PUMPS ACP SERIES 2 Features and benefits of ACP pumps AIR COOLING Integrated frequency converter bringing benefit of: - constant rotational speed and vacuum performance - wide voltage supply 50/60 Hz with automatic voltage range selection - hour meter indicating total running time - choice of different rotational speeds (noise reduction, power savings, adaptation to application cycle) - remote operation mode (start/stop, speed status, speed setting), Through RS485 communication link Or Through dry contacts Air cooling: no water supply required COMPACT Compact design for easy integration GAS PURGE GAS BALLAST SPECIAL EXHAUST Gas purge for better protection against corrosive gases. G versions Gas ballast for improved condensable vapors pumping ACP 15/28/40 Bottom located exhaust for better evacuation of condensed vapors ACP 15 04

Typical applications of ACP pumps Instruments Electron microscopes Mass spectometers Surface analysers RGA Leak detectors R&D Particles accelerators High energy physics Laboratories Analytical instruments Industry Lamp manufacturing Plasma cleaning Vacuum coating Industrial applications 05

COMPACT DRY ROUGHING PUMPS ACP SERIES 2 Technical specifications DESCRIPTION Units ACP 15 ACP 15G ACP 28 ACP 28G ACP 40 ACP 40G Peak pumping speed m 3 / h CFM 14 8.2 27 16 37 22 Ultimate pressure w/o purge (*) mbar 5, 3, 3, Ultimate pressure with sccm purge (*) mbar sccm NA 3,10-1 5 000 NA 1,10-1 1 650 NA 1,10-1 1 650 Ultimate pressure with open gas ballast (*) mbar 3,10-1 NA 2,10-1 NA 2,10-1 NA Maximum continuous inlet pressure mbar 1 013 Input voltage (single phase) V 90 to 254 50/60 Hz Power consumption - at ultimate pressure - at atmosphere W W 520 600 700 1 200 Ambiant temperature C 12 to 40 12 to 40 Inlet port ISO-KF DN25 DN40 Exhaust port DN16 DN25 DN25 Tightness mbar.l / s 5,10-7 Port for N2 purge NA 1/4 G NA 1/4 G NA 1/4 G Weight kg 23 30 32 Overall dimensions : LxWxH mm 514 x 190 x 270 647 x 193 x 322 (*): typical values. Pumping curves Pumping speed (m 3 /h) - ACP 15 Pressure drop (volume = 1 m 3 ) ACP 15 10 3 15 10 2 Pumping speed (m 3 /h) 10 Pressure (mbar) 10 1 1 5 10-1 06 0 10-1 1 10 1 10 2 10 3 Inlet pressure (mbar) With purge Without purge 0 10 20 30 40 50 60 70 80 90 Time (mn) With purge Without purge

Pumping curves Pumping speed (m 3 /h) ACP 28 and ACP 28 G Pressure drop (volume = 1 m 3 ) ACP 28 and ACP 28 G 40 10 3 35 10 2 30 Pumping speed (m 3 /h) 25 20 15 10 Inlet pressure (mbar) 10 1 1 10-1 5 0 10-1 1 10 1 10 2 10 3 Inlet pressure (mbar) 0 10 20 30 40 50 60 70 80 90 With purge Without purge Time (mn) With purge Without purge Pumping speed (m 3 /h) ACP 40 and ACP 40 G 40 Pressure drop (volume = 1 m 3 ) ACP 40 and ACP 40 G 10 3 35 10 2 30 Pumping speed (m 3 /h) 25 20 15 10 Inlet pressure (mbar) 10 1 1 10-1 5 0 10-1 1 10 1 10 2 10 3 Inlet pressure (mbar) With purge Without purge 0 5 10 15 20 25 30 35 40 45 With purge Time (mn) Without purge 07

Electrical power supply 240 285 Hoisting ring 410 Gas ballast Inlet DN25 ISO-KF Hoisting rings Gas ballast Gas line supply RI/4 connector (ACP G) 10 270 203 322 11,5 228 250 (Inlet and exhaust) 272 475 499 514 40 Exhaust DN16 ISO-KF 20 627 86 300 185 150 190 93 197 COMPACT DRY ROUGHING PUMPS ACP SERIES 2 Dimensions (mm) ACP 15 ACP 28/40 Remote control connector 309 Inlet DN25 ISO-KF for ACP28 Inlet DN40 ISO-KF for ACP40 93 20 67 193 60 Ordering information ACP 15 pumps Electrical power supply Exhaust DN25 ISO-KF 278 66 96 Type Series Inlet port Exhaust port Gas ballast Power supply Power cord Ground interface V5 SA: standard T: DN25 S: DN16 M: manual F: through A: USA F: rubber feet version (open/closed) frequency (1 cable: LV only) B: blanked converter E: Continental Europe R: 1/4 G J: Japan (1 cable: GA: G version *port for LV only) N2 purge K: United Kingdom F: permanently S: Switzerland open with filter P/N V5 XX T S X F X F Examples: V5SATSMFEF - V5GATSRFAF *for GA version, R is the only choice. ACP 28/40 pumps Type Series Inlet/Exhaust Motor Power supply Frequency converter Power cord Gast ballast Ground interface V6 for SA: T: for ACP28 S: with F: with 1ph A: USA LV M: manual F: rubber feet ACP28 standard DN25/DN25 standard frequency E: Continental Europe (open/closed) version motor converter J: Japan (1 cable: B: for blanked* R: with wheels LV only) V8 for GA: C: for ACP40 K: United Kingdom F: permanently ACP40 G version DN40/DN25 S: Switzerland open with filter H: USA HV Z: Without P/N V6 GA T S F E B F Examples: V6SATSFAMF - V8GACSFEBR *for GA version, B is the only choice. 08

Accessories IPF 25 IPF 40 Dimensions in mm Sight glass Drain (G 1/8) Square 86 x 86 DN 25 32 11 57 200 DN 25 Ø 86 9 Square 95 x 95 Exhaust pump 338 Ø 140 DN 40 DN 40 Exhaust pump Inlet Particle Filters will prevent solid particles from entering the ACP pumps. For ACP 15 and ACP 28 suitable filter is IPF 25 - P/N 111649 - inlet/exhaust ports: DN25 ISO-KF - replacement cartridge P/N 111650 For ACP 40 suitable filter is IPF 40 - P/N 111647 - inlet/exhaust ports: DN40 ISO-KF - replacement cartridge P/N 111648 Filtration threshold : 25 µm ES 25S Dimensions in mm 50 DN 25 148 The use of External exhaust Silencer ES 25S will significantly reduce the noise level when operating ACP series pumps at high pressures. - P/N 109873 - inlet/exhaust ports: DN25 ISO-KF - replacement cartridge P/N 109797 ES 25S can be used at the exhaust of ACP 28, ACP 40 and ACP 15. It is delivered with all necessary transition fittings for connection at the DN16 exhaust port of ACP 15 pumps. DN 25 Carré 62 x 62 Refoulement pompe NRC 15 305 Dimensions in mm 633 NRC 28/40 350 Noise Reduction Covers make ACP pumps compatible with requirements of quiet environments. It will provide noise level reduction of 5 to 6 dba - NCR 15 - P/N 111968 for ACP 15 pumps - NCR 28/40 - P/N 112637 for ACP 28 and ACP 40 pumps - max ambiant temperature: 35 C SEK 15 250 770 250 399 / 499 to inlet flange Dimensions in mm 787 238 Sound Enclosure Kit is the appropriate solution for operating ACP15 pumps in the most quiet environments. It provides a noise reduction of 10 dba. - P/N : 112779 - Max ambiant temperature : 30 C - SEK15 inlcudes dedicated exhaust silencer and DN16 inlet pipe extension. 09

COMPACT DRY ROUGHING PUMPS ACP SERIES 2 Dry Roots Pumping Systems DRS 1 300 m 3 /h (177 cfm) For applications requiring higher pumping speed, ACP series pumps can be combined with conventional Roots blowers. Such dry pumping packages feature ACP 15, ACP 28 or ACP 40 pumps associated with RSV 301 roots pumps. Peak pumping speed 50/60 Hz Max. ultimate total pressure Max. continuous inlet pressure Leak rate Inlet flange Outlet flange Power requirement Voltage 50/60 Hz Oil capacity Oil type Dimensions L W H Weight Units m 3 /h cfm mbar mbar mbar.l/s ISO-DN ISO-DN KW Volt liter type mm (inch) mm (inch) mm (inch) kg/lb RSV 301B + ACP 15 RSV 301B + ACP 28 RSV 301B + ACP 40 190/205 235/260 250/285 112/120 138/153 147/168 5 x 10-3 3 x 10-3 3 x 10-3 1000 (RSV 301B) 1000 (RSV 301B) 1000 (RSV 301B) < 10-7 < 10-7 < 10-7 63 63 63 16 25 25 1.7 1.8 1.8 3 phase 180/250-360/480 for RSV 301B 0.7 0.7 0.7 A120 A120 A120 800 or 1100 if elec.box 800 or 1100 if elec.box 800 or 1100 if elec.box 400 400 400 990 990 990 149 (327)* 161 (354,2)* 166 (365,2)* * Add 40 kg (88 Ib) if option elec.box. Pumping curves 350 300 250 Pumping speed (m 3 /h) 200 150 100 50 RSV 301 B + ACP15 50 Hz RSV 301 B + ACP15 60 Hz RSV 301 B + ACP28 50 Hz RSV 301 B + ACP28 60 Hz RSV 301 B + ACP40 50 Hz RSV 301 B + ACP40 60 Hz 0 10-3 10-1 1 10 1 10 2 10 3 Inlet pressure (mbar) 10

Ordering information The suitable Part Number can be generated by choosing the appropriate options listed in the chart below: D D S N N N N E 2 Roots pump type 300 m3/h RSV301 with by-pass D 3 ACP pump type 15 m3/h 28 m3/h 40 m3/h ACP5 Std ACP15 G ACP28 Std ACP28 G 1 4 2 5 ACP40 Std 3 ACP40 G 6 4 Frame S 9 Remote control interface Without N With R 10 11 Electrical box without on the frame N C 200/208 V 60 Hz 460 V 60 Hz remote R Voltage configuration 230 V 60 Hz 380/400 V 50 Hz 1 2 3 480 V 60 Hz 200/208 V 50 Hz 5 6 7 415 V 50 Hz 4 230 V 50 Hz 8 11

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