MEMS vibration sensor NVA 65 with analogue and CANopen interface

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with analogue and CANopen interface Document No.: NVA 12634 FE Date: 21.07.2016 Contactless, wear-free sensor system in MEMS technology Number of measurement axes: 2 Frequency range: 0.1... 60 Hz Option: 0.1... 100 Hz Measuring range: ± 2 g Interfaces: analogue, CANopen, relays Resolution: 4096 digits / g Output: Momentary value RMS value Peak value Operating temperature range: - 40 C to + 85 C Parameterisable via CANopen Design The sensor system is intended as a component for use e.g. in wind power plants to measure and evaluate vibrations in the mast head. Registration of dynamic accelerations by means of MEMS sensors (Micro-Electro-Mechanical System) with subsequent digitisation by a controller. The device consists of an acceleration sensors, a controller unit and three types of output interface. Data output is carried out via two analogue interfaces with 4... 20 ma plus CANopen and via 4 relay contacts (currently 1 error relay contact). The NVA is parameterised via the CANopen interface. This is not galvanically separated. The sensor is equipped with a filter circuit to protect against fast transients and surge voltages of up to 2 kv in the supply. The protection types are IP 69K (housing) and IP 67 (connector/socket). With its good vibration and shock values, the sensor is suitable for use in areas with rough environmental conditions. The vibration sensor is equipped with a stable aluminium housing (optionally stainless steel). Elongated holes are available for mechanical alignment (up to approx. ± 7.5 ). Electrical connection is carried out using two connectors or two cables. Function MEMS sensors are integrated circuits which are manufactured in silicon bulk micromechanics technology. Double capacities are formed with the aid of these micromechanical structures. If these structures are deflected in the case of accelerations, this leads to capacity changes which are registered using measuring technology and further processed. The sensors measure precisely, have a long service life and are very robust. After determining the steady component and scaling, the measured values supplied by the acceleration sensor are made available to the six filter units. The steady component arises as a result of installation which is not precisely horizontal, with the result that part of the earth's gravitational field would also be measured. The offset which occurs in the measured vibration value curve (zero point shift) due to the steady component is determined by means of calculation (distribution of the positive and negative measured values around the zero point) and is subtracted. The pure alternating component is output within a matter of seconds. This calculation takes place continually. The filter units can be individually programmed by the customer as regards their sampling, whilst their filter characteristics can be programmed in the factory. Each filter unit additionally has two outputs (flags) for alarm and warning. If the amount of a filter output's measured value exceeds the set limit value the output is activated. The limit values for triggering the outputs can also be programmed by the customer. The warning and alarm outputs can be connected to the four relay outputs via a matrix which can be programmed by the customer. Several filter outputs may additionally be connected to the relay outputs by means of an OR link. The analogue outputs are firmly connected to filters 1 and 2. The outputs output the filtered signed signal supplied by the acceleration sensor. The quiescent level of the 4... 20 ma interface is 12 ma with an acceleration of 0 m/s² or 0 g. Amplifier setting is individually possible for each channel via the CANopen interface. The CANopen interface can be used to set the parameters and call up the 6 filters' outputs. With the exception of the filter characteristics, all parameters are programmable. TWK-ELEKTRONIK GmbH D-40041 Düsseldorf Tel. +49 211 96117-0 info@twk.de Heinrichstrasse 85 Postbox 10 50 63 Fax +49 211 637705 www.twk.de

Description General information The vibration sensor measures on two axes in a spectrum from 0.1 to 60 Hz (Option: 0.1 to 100 Hz). This spectrum can be subdivided into a maximum of 6 ranges. The ranges are set in the factory. They can also be subsequently shifted by the customer by means of CANopen objects. All acceleration values acting within the relevant window are registered and are output firstly as an analogue value (4... 20 ma, max. two outputs possible) and secondly as a digital value via CANopen. The acceleration values which are present are additionally compared with limit values (maximum values). If these limit values are exceeded, relevant relays switch (normally closed contacts, a maximum of four is possible). There is a warning stage and a stop stage. The limit value for 'warning' is lower than the limit value for 'stop'. The limit values for these stages can be set in the factory or by the customer. The measuring axis is x, y or the vector sum (x²+y²). The acceleration value (instantaneous value) can be used directly or a mean value of the acceleration which occurs (RMS) may be used as the output value and the further processing value for the relay circuit. The time over which averaging is carried out can be set. Filter characteristics Digital pre-filtering is initially carried out in the MEMS sensor to extensively suppress higher- interference vibrations (> 100 Hz), as they reveal comparatively high amplitudes due to the higher frequencies (1st-order FIR filter). The individual bands are then realised in the downstream controller via digital 8th to 11th-order Chebichev filters (11th order in the lower range, 8th order in the upper range). The 6 filter units are of the same design; their characteristics can be set in the factory as desired by the customer. In the standard version, these filters (low-pass, band-pass and high-pass) are implemented as Chebichev filters. Chebichev filters are continuous filters which are designed for the sharpest possible kinking of the response at the limit fg. To achieve this, amplification in the pass range or in the stop range is not monotonous but possesses a waviness which has to be defined. The higher the permissible waviness, the sharper the drop within an order. A distinction is made between type I and type II Chebichev filters. In the pass range, type I Chebichev filters possess an oscillating response curve. Type II Chebichev filters have this response waviness in the stop range and are also referred to as inverse Chebichev filters in the specialist literature. The case here involves type II. The maximum upper limit of the vibrations to be measured is 60 Hz (Option: 100 Hz). The steady component - generally caused by axis inclination on inclined installation - is calculated out by means of averaging which is performed prior to filtering. As a result of this, the lower limit - irrespective of filter - is around 0.1 Hz. Figures 1 and 2 show examples of a possible curve. The filter's output values are signed. The output of each filter 1-6 is further processed for the analogue outputs (filters 1 + 2 only), for output via CANopen and for the limit value relays which respond to the exceeding of acceleration limit values. The filters' relevant output signal can be set via the CANopen interface as follows: - Output of the momentary value of the measured acceleration - Output of a mean value over time for the measured acceleration (RMS averaging time adjustable via CAN) - Output of the peak value (peak) of the measured acceleration (Note: this value is retained until the peak value is next exceeded, or it is reduced again over a parameterisable time if this value is no longer reached during the subsequent period of time: Adjustable via CAN). outputs The switching outputs react to the amount of the filter's output value (folding up of the negative half-waves of the measured vibration curve). The warning output is activated after exceeding the corresponding limit, i.e. the relay contact opens. The relevant relay drops off. It is reset when the limit is no longer reached for 10 s. Otherwise the time is extended. The alarm output is activated after exceeding the corresponding limit, i.e. the relay contact opens. The relay drops off and remains constantly triggered. It can only be deleted by resetting the system. The reference value is the amount of the currently measured vibration's momentary value. If a positive deviation event occurs 1 x, the corresponding relay is triggered. During normal operation, the relays are picked up. They drop off in the event of triggering or when the NVA is voltage-free. Date: 21.07.2016 Page 2 of 12 Document No. NVA 12634 FE

Examples for fiter output Fig. 1: Example band pass filter f gu = 0.8Hz, f go = 2.5 Hz Fig. 2: Example of a low pass filter f go = 23 Hz Diagram for analogue output I 0 (a) I [ma] 20 ma I [ma] 20 ma 12 ma 4 ma 4 ma - 0 g + Output: signed x, momentary value y, momentary value a [g] 0 g + Output: absolute value x, RMS value y, RMS value x, Peak value y, Peak value (x²+y²), RMS value (x²+y²), Peak value (x²+y²), momentary value Date: 21.07.2016 Page 3 of 12 Document No. NVA 12634 FE

Technical data Parameters programmable via CANopen interface Measuring (x²+y²) separately for each filter 1-6 Sampling (120... 800 Hz). Can be set separately for each band. Filter range (by changing the sampling )* Signal type at filter output 1-6: momentary value, RMS mean value, peak value or degressive peak value Averaging time for signal type 'RMS' Decrease time for signal type 'Peak' Amplification for analogue outputs 4... 20 ma Acceleration limit values (limit) for relay warning function Acceleration limit values (limit) for relay stop function Frequency band relay assignment *Note: The ranges ( windows) are pre-set in the factory in accordance with the customer's wishes. Factory-set sampling : 240 Hz. If the sampling is increased e.g. by 10%, all of the individual windows' lower and upper limits are shifted upwards 10% (example: before: sampling 240 Hz, lower limit 1 Hz, upper limit 15 Hz. After: sampling 264 Hz lower limit = 1.1 Hz and upper limit = 16.5 Hz Electrical data Sensor system: MEMS acceleration sensor Resolution: 4096 digits / g (9.81 m/s² = 1 g) Operating voltage range: + 18 to + 30 VDC Power consumption: 2 W Environmental data Operating temperature range: - 40 C to + 85 C Storage temperature range: - 45 C to + 85 C Resistance to shock: 500 m/s² / 5 ms, according to DIN EN Resistance to vibration: 10 Hz... 2000 Hz / 100 m/s², according to DIN EN 60068-2-6 Protection type (DIN 40 050): IP 67 plug connection IP 69K housing EMC: EN 61000-6-4 interference emission EN 61000-6-2 interference immunity EN 61000-4-2 (ESD) EN 61000-4-4 (burst) EN 61000-6-3 (emission) Weight: 0.3 kg Signal acquisition Number of axes: maximum of 2 Value output on analogue output: x and y as separate components or vector sum () Number of bands: maximum of 6 Measuring range: ± 2 g for each axis Sampling : Accuracy of the measured acceleration value: Maximum inclination vs. horizon: 10 : 0.1 Hz : 60 Hz (Option: 100 Hz) 240 Hz (cycled down to 120 Hz in the lower range) 1. : MEMS sensor: ± 20 mg over the entire range 2. : Signal processing error: 0 to 20 Hz: ± 1%, with reference to 1 g 20 to 60 Hz: - 5%, with reference to 1 g Signal output 1 CANopen interface with 4096 digits / g 2 analogue outputs 4... 20 ma (12-bit resolution) 4 relays for warning and/or stop function on exceeding limit values 1 relay for error display Date: 21.07.2016 Page 4 of 12 Document No. NVA 12634 FE

Optional functions (subject to consultation with TWK) System calibration for higher accuracy Programmable steady component in the output signal (measured vibration value curve zero point shift) Up to 8 relays Transistors instead of relays Further filters Evaluation procedures (Datalogging, log functions with programmable triggering, statistics, protocol functions) Safety design for safety applications Other customer variants CANopen technical data CANopen communication profile Full CAN part A (11-bit) CANopen 301 V 4.1 (no galvanic bus separation) CANopen output code: signed 16-bit Output level according to ISO/DIS 11898 Buspegel / V 1) 5 4 3 2 1 0 2,5 rezessiv 3,5 CAN_H CAN_L 1,5 dominant t rezessiv 1) bei Common-Mode-Spannung = 0V Bus activation according to ISO / DIS 11898 TWK-CANopen Subscriber Further TWK-CANopen Subscriber CAN + CAN + * CAN-Bus * CAN - CAN - * Terminating resistor (120 ) CANopen features NMT master: no NMT-slave: yes Maximum boot-up: no Minimum boot-up: yes COB ID distribution: default, SDO Node ID distribution: via Index 2000 or LSS No. of PDOs: 2 Tx PDO modes: sync, async, cyclic, acyclic Variable PDO mapping: no Emergency message: yes Heartbeat: yes No. of SDOs: 1 Rx / 1 Tx Device profile: CiA DSP 410 version 1.2 The details of the profile are exhaustively describedin the NVA 12657 specifications. Date: 21.07.2016 Page 5 of 12 Document No. NVA 12634 FE

Data format CANopen - PDO Data Byte 0 Data Byte 1 0 1 2 3 4 5 6 7 8 9 10 11 12131415 LSB MSB Filter 3 Data Byte 2 Data Byte 3 0 1 2 3 4 5 6 7 8 9 10 11 12131415 LSB MSB Filter 4 Data Byte 4 Data Byte 5 0 1 2 3 4 5 6 7 8 9 10 11 12131415 LSB MSB Filter 5 Data Byte 6 Data Byte 7 0 1 2 3 4 5 6 7 8 9 10 11 12131415 LSB MSB Filter 6 The momentary values of filters 1 and 2 are output via the analogue outputs. With CANopen, they can be read out via relevant objects, not via the PDO (e.g. for cyclical output), as it has a maximum size of 8 bytes. See NVA 12657 specifications. Analogue technical data Output circuits Output A 12 Bit Io Output B 12 Bit Io Io = 0-20 ma R L = 0-0.5 k D A 0-20 ma RL Io = 4-20 ma R = 0-0.5 k L D A 4-20 ma R L Output data Current output A: 0 to 20 ma B: 4 to 20 ma Accuracy: ± 10 µa at room temperature, ± 50 µa over the entire temperature range Load resistance: 0... 500 Ω Limit value relay technical data Maximum switching current: 1.0 A at 30 VDC / VAC Maximum switching voltage: 60 VDC / VAC Note: The effective maximum voltage is dependent on the connector into which the switching contacts are integrated: M12, 12-pin: max. 30 VDC, M12, 8-pin: max. 60 VDC. Maximum contact resistance: 100 mω Response time: 3 ms (ON and OFF) Relay service life: 20 FIT ** with 10 5 switching cycles / year : 10 digits (~1 ) ** FIT = Failure In Time, 1 FIT = 1 failure in 10 9 years Date: 21.07.2016 Page 6 of 12 Document No. NVA 12634 FE

Signal processing NVA principle circuit diagram with signal flow Acceleration sensor Data format: 16 bit steady component 16 Bit alternating component Calibration Averaging Global resolution Programming parameters Filter module Warning limit Alarm limit Sampling Factory setting CAN SDO objects Factory setting CAN SDO objects Factory setting CAN SDO objects Factory setting CAN SDO objects Factory setting CAN SDO objects Factory setting CAN SDOobjects Filter coefficients Input Programming parameters Filter module 1 Out Alarm Warnung Filter coefficients Input Programming parameters Filter module 2 Out Alarm Warnung Filter coefficients Input Programming parameters Filte rmodule 3 Out Alarm Warnung Filter coefficients Input Programming parameters Filter module 4 Out Alarm Warnung Filter coefficients Input Programming parameters Filter module 5 Out Alarm Warnung Filter coefficients Input Programming parameters Filter module 6 Out Alarm Warnung Analogue output Analogue output 1 amplification 2 amplification CAN controller Calibration Calibration Relay matrix Error delection 12 Bit 12 Bit D D A A 4-20 ma 4-20 ma CAN GND CAN - CAN + IO + (Analogue output 1) IO + (Analogue output 2) VS + VS - Relay 1 Relay 2 Relay 3 Relay 4 Error relais Date: 21.07.2016 Page 7 of 12 Document No. NVA 12634 FE

Order number NVA 65 - A 5 5 2 S 1-1 - B 01 NVA A S S K Cable length in metres: 1 (complete in the case of a cable only) Electrical connections: Device connector M12 - connector / socket Cable 2 1 or 2 Number of relays: 5 0 to a maximum of 4 warning- / alarmrelays plus 1 error relay (obligatory): 1 to max 5 Number of ranges: 5 1 to a maximum of 6 Housing material: Aluminium AlMgSi1 Stainless steel 1.4305 or 1.4404 Design form: 1 65 Design form 65 mm NVA vibration sensor with analogue interface and CANopen interface A B 01 Electrical and / or mechanical variants* Standard Analogue output signal: 0-20 ma 4-20 ma Installation position: Top: 1, 2, 3, 4, 5 or 6 (see below), preferably 1 Number of analogue outputs: 3 The sensor installation position desired by the customer must be specified using an ID digit in the order number: the digit belonging to the surface which is to point upwards is specified. Example : if the side with the connectors is to point upwards: 4. Recumbent: 1, etc. * The basic versions according to the data sheet bear the number 01. Deviations are identified with a variant number and are documented in the factory. The special version in accordance with the table on page 9 is reflected in the variant number. Date: 21.07.2016 Page 8 of 12 Document No. NVA 12634 FE

Accessories Straight mating connector STK8GS54 (socket, female) STK8GP99 (connector, male) Documentation, EDS file, etc. The following documents can be found in the Internet under www.twk.de in the documentation area NBN model (letter "N") EDS file Bit map image file Data sheet No. NVA 12634 Specification No. NVA 12657 Description of the filter and programming settings (individually for each pre-set device, therefore on request only) Optionally, a CD-ROM can be supplied. (Article No. TWK-CD-01; please specify when ordering.) Supply source for the listed CANopen specifications: CAN in Automation (CiA), Kontumazgarten 3, D-90429 Nuremberg (Email: headquarters@can-cia.org, www.can-cia.org) Date: 21.07.2016 Page 9 of 12 Document No. NVA 12634 FE

Table for factory programming according to customer specifications Here, please specify your wishes for the required properties of the vibration sensor concerning the output signal and switching relays. Delivery from the factory is then carried out with this programming. Whether the acceleration values are further processed without changes (momentary values) (enter M), whether RMS mean value determination over time (R) is to take place or whether the peak value is to be output (P) is entered here. The related time-constant (Peak decrease / RMS averaging) can be entered in row -. (In part, the programming can be changed using CANopen objects. See remark on page 11) Frequency band 1 - customer designation: Analogue signal measuring range [±.. g] limit stop relay [g] Frequency band 2 - customer designation: Analogue signal measuring range [±.. g] limit stop Frequency band 3 - customer designation: limit stop Frequency band 4 - customer designation: limit stop Frequency band 5 - customer designation: limit stop Frequency band 6 - customer designation: limit stop Example: Frequency band 1 - customer designation: low- mast vibration Analogue signal measuring range [±.. g] 0.1 15 R M 10 1-1 g to + 1 g = 4 to 20 ma 0.7 At 0,7 g: Warning limit stop 1 At 1 g: Stop Note: 'Output signal measuring range' can only be assigned in the case of filters 1 + 2 The 'warning relays' and 'stop relays' can be assigned a maximum of 4 times, as there are a maximum of four relays Date: 21.07.2016 Page 10 of 12 Document No. NVA 12634 FE

Remarks on the table on page 10 Analogue signal measuring range means the analogue output signal 4... 20 ma (max. 2). The analogue output signal is possible only for filter 1 and 2. The amplification factor can be added in this field (for example: ±0.5 g = 4... 20mA). All instantaneous values of the individual bands are communicated through CANopen. Please consider that the sampling f a influences the upper and lower threshold f gu and f go of a band. For the lower threshold the following relationship is established: f gu f. a 0.005. Example: sampling f a = 240 Hz (factory setting): The following applies in this case: f gu 240 Hz. 0.005 = 1.2 Hz, i.e. f gu must be selected higher than 1.2 Hz. f a can be set separately from 120 Hz to 800 Hz for each band. This results in the fact that the lower limit fgu cannot/must not fall below certain values, i.e. it must not lie or cannot be selected in the 0.1 Hz < f gu < 0.6 Hz range. f go is not critical. In case a low pass filter is selected instead of a band pass filter, the lower limit of 0.1 Hz is valid. Electrical connection Via connector - socket combination M12, 8-pin or using 2 x cables. The connector / socket cannot be exchanged. Connector S1 (connection M12, 8-pin, connector, A-coded. Viewed looking at the contacts) 5 4 3 6 8 2 7 1 PIN Function 1 + U B supply voltage 2 Analogue output 1: 4... 20 ma 3 Analogue output 2: 4... 20 ma 4 - UB supply voltage and reference potential for analogue outputs plus CAN GND 5 CAN + 6 CAN 7 'System error' relay - normally open contact 1 8 'System error' relay - normally open contact 2 Connector S2 (connection M12, 8-pin, socket, A-coded. Viewed looking at the contacts) 5 6 7 4 8 1 3 2 PIN Function 1 Limit value relay 1 - normally open contact 1 2 Limit value relay 1 - normally open contact 2 3 Limit value relay 2 - normally open contact 1 4 Limit value relay 2 - normally open contact 2 5 Limit value relay 3 - normally open contact 1 6 Limit value relay 3 - normally open contact 2 7 Limit value relay 4 - normally open contact 1 8 Limit value relay 4 - normally open contact 2 Each switching contact is galvanically separated. Important note: Refer to the connection assignment enclosed with each device for the contact assignment. Especially in case of special variants of the NVA. Date: 21.07.2016 Page 11 of 12 Document No. NVA 12634 FE

Installation drawing Dimensions in mm Via round and elongated fastening holes for M5 bolts. The vibration sensor can be mechanically adjusted up to approx. ± 7.5 via the elongated holes. Fasteners are not included in the scope of delivery. Sensor connector M12 8-pin, pins Sensor connector M12 8-pin, socket q 65 max.13 24 ±0.1 66 +0.5 100 ±0.5 Connectors are not aligned! 5 52 ±0.1 42 +0.5 7 20 65 +0.5 2 10 10 5.3 5.3 52 ±0.1 15 5.3 Materials used Aluminium housing: AlMgSi1 Stainless steel housing: 1.4305 or 1.4404 Connector: Nickel-plated brass Threaded cable connection: Nickel-plated brass or stainless steel 1.4404 Sealing rings: NBR Date: 21.07.2016 Page 12 of 12 Document No. NVA 12634 FE