Entwicklungen der Mikrosystemtechnik Gliederung: in Chemnitz Fraunhofer Institut für f r Zuverlässigkeit und Mikrointegration IZM Institutsteil Multi Device Integration, Chemnitz, Thomas Gessner jan.mehner@che.izm.fhg.de Mikromechanische Komponenten für Sensor- Aktorsysteme Modellierung and Simulation von Mikrostrukturen Zukünftige Arbeiten am Zentrum für Mikrotechnologien
Bulk-Si Micromachined Accelerometer Digital balanced accelerometer:
Damping Analyses for Design Optimization Schematic view: Kinetic element: Fluid pressure: Goal: Large bandwidth Optimized design Initial design Initial design Optimized design
Tuning fork design: Angular Rate Sensor (Gyroscope( Gyroscope) F C = 2 m v Ω
Behavioral Modeling of a Gyroscope DRS-MM2 Bosch GmbH
Behavioral Modeling of a Gyroscope Mechanical system Given angular rate Structural motion Electrostatic actuation Stimulating voltage Electrostatic detection Measured angular rate
Micromirror Cells for Laser Display Systems Future goal: Laser TV systems
Micromirror Cells for Laser Display Systems 1. Eigenmode: 4600 Hz 4. Eigenmode: 24.2 khz
Behavioral Modeling of Micromirror Cells Material stress: Fluid pressure: Vertical bending:
Micro Mirrors for Head Up Displays in Automobiles Image projection by laser display technology: Optical Engine Scanning Unit (2-axis) Laser red rot Laser IR Laser blau blue RGB Video- Controller NLO Column Line Scancontroller Projection image
A 24 khz Resonant Scanner for Head Up Displays Analysis of mechanical system
Vibration Sensors for Wear State Monitoring Advantages: Direct mechanical filtering of vibration signals No data sampling and FFT necessary Improved signal to noise ratio due to resonance Wide-band sensor Resonant sensor
Novel Concepts for Vibration Monitoring Idea: Make use of spectral filtering in the mechanical domain!
Resonant Vibration Measurement Unit
Smart System Integration of Safety Applications Vibration Sensor Technology GPS - Location Power supply by environmental sources (e.g. vibrations) Vibration monitoring of wheel sets Critical wear state situations are automatically detected by the sensor system and routed to the central checkpoint Wear state monitoring (Identification, Time, Location) Intelligent and energyself-sufficient sensor system
Microelectromechanical Step Gear System
Challenges of Microsystems Design
Lumped Parameter Modeling of MEMS Transversal shift 1. Approach: Represent the system by simplified black-box models
Numerical Simulation of Coupled Systems 2. Approach: Simulator Coupling of FE-Solver and Circuit Simulators
Macromodeling The Ultimate Goal of MEMS Design Structural V 1 Rotation Electrostatic V 2 V 3 Translation Warp Fluidic = Black-box model with peripheral terminals; Required size: x 10 DOF x 10000 DOF!!!? How to compress DOF and formulate a low-size macromodel, retaining FEA typical accuracy in its dynamic behavior?
Reduced Order Modeling of Flexible Systems - Electrostatic Structural Interactions -
System Simulation of MEMS in Matlab/Simulink
Circuit Design Using Macromodels in PSPICE
Future Goal: Development of Parametric Models Variational Finite Element Techniques: