Tape scales or glass scales for a wide range of applications. Linear or rotary. Resolutions from 5µm to 1.2nm.

High Performance Encoders MicroE Systems HIHER PERORMANCE SMALLER ASTER EASIER SMARTER MORE VERSATILE CUSTOMIZATION LEXIBLE DELIVERY RESPONSIVE TECH SUPPORT

Innovative Encoder Systems that Deliver Performance and Value Superior performance. World-class reliability. Responsive support and delivery. ocusing on what customers want most is why MicroE Systems is growing so quickly and introducing new products faster than any other encoder company. With a growing product line of over 30 models to match your specific application requirements, and direct sales and distributor offices in 13 countries, we give you a world of encoder solutions. Product Range Pages 4-14 Pages 12-14 Incremental Encoders for All Applications Tape scales or glass scales for a wide range of applications. Linear or rotary. Resolutions from 5µm to 1.2nm. Incremental Encoders for Compact Motion Systems Mercury and ChipEncoder Screw mount or PC board mount. Linear or rotary. Resolutions from 10µm to 5nm. Atmospheric or vacuum. Data Storage Ultra-high performance encoders, positioners, and servo control for Data Storage applications. MicroE Systems Technology: Creating the Best Encoders It takes a powerful combination of an advanced optical system, signal processing technology, and state of the art optoelectronic integration to make industry-leading encoders. And that s just what MicroE Systems has done, achieving many industry firsts: irst 1.2nm resolution encoder with all electronics in the sensor irst 20µm encoder with cyclical error of only ±20nm irst PC Board-mount encoder with 78nm resolution irst sub-micron encoder with ±2 setup tolerance irst encoder with one sensor for tape or glass, linear or rotary irst encoder with user-programmable settings and software irst stick-on index and limits PurePrecision Optics ives Mercury the Sensor Size Advantage MicroE Systems patented sensor creates a high-fidelity signal with very compact optics. The result is a miniature, high-performance sensor that s just 8.4mm tall, weighing only 5 grams. Page 15 Page 15 Packaged Encoders DRC Housed rotary encoders with bearings. Rugged and reliable. Resolutions from 400 to 360,000 CPR. PurePrecision Optics aster Setup, Better Accuracy Our PurePrecision optical layout gives our sensors the widest alignment tolerances in the industry: ±150µm in the Z axis and ±2 for theta Z. That s 300% better than competing encoders, and that means faster setup and better long-term motion system reliability. High signal quality means better accuracy cyclical error as low as ±20nm and interpolation that provides up to 1.2nm of resolution. 2

About MicroE Systems Encoder Innovation Starts Here MicroE Systems, a division of SI roup, was founded in 1994 to advance encoder technology. Seizing the trend toward smaller motion systems, our patented optical designs have led to over 30 different encoder models today. These innovations make encoders that achieve higher accuracy and speed while also being smaller, easier to install, and use less power. That s why so many OEM s are putting our encoders in their designs. Due to robust sales growth, we have made extensive investments in our manufacturing operations: a new, larger facility in 2008; use of lean manufacturing and six-sigma principles to achieve rapid response to customer orders while achieving superior quality; tight controls on cleanliness and ESD on the shop floor; and the training and quality systems to be ISO9001:2008 certified. ocus on Technology and New Products MicroE Systems builds encoders and servotrack writing subsystems for one of the world s most leading edge industries: Data Storage. In fact, most hard disk drives manufactured throughout the world today are made using MicroE Systems technology. Plus, we build the most widely used encoders for sub-micron compact motion systems - Mercury encoders. Add to that our growing range of encoders and tape scale solutions. These successes stem from our ongoing R&D commitment to create more accurate, faster, smaller encoders. Best Performance and Value MicroE Systems encoders are renowned for their small size, ease of setup and features. But more customers are also discovering their worldclass performance lower cyclical error for better velocity control, accuracy to ±1µm, and resolution that s stable up to 1.2nm. All of this performance comes from a 20µm-pitch encoder system that s a fraction of the cost of 4µm and 2µm pitch encoders now that s value. Customization and Technical Support At MicroE Systems, we recognize the importance of customization. Many applications require a specific cable length, connector or pinout. Our manufacturing processes make your customized part just like a standard assembly. You get encoders that exactly match your application, and the reliability, quality and responsive lead times you would expect with standard products. Motion system customers require fast, effective support and that s where our Odyssey program comes in. Engineered to support Our new, larger facility in Massachusetts is ISO 9001:2008 certified. customers during each of four critical product development phases, we support you from over 30 direct sales and sales partner locations. Headquarters Direct Sales Offices Sales Channel Partners Technology Center lobal locations provide technical support in your language and time zone. lexible Delivery Modern OEM customers must have their orders filled in 1-2 weeks with little forecast visibility. MicroE Systems has professional supply chain management, world-class quality systems and a linear manufacturing process specifically designed to fill new OEM orders rapidly. Product designs that are modular and configurable complete the story, making MicroE Systems one of the most responsive suppliers you can specify. Quality and Reliability Engineered in from the Start Encoder applications require the highest levels of reliability. That s why we perform so many tests during product development design validation testing, environmental robustness, EMI immunity, mechanical shock, and a host of further tests. We manufacture in the USA to the highest quality standards in compliance with ISO9001:2008, and our encoders are CE and RoHS compliant. 3

TM amily of Encoders: The Next eneration Superior Performance. World-Class Reliability. MicroE Systems revolutionized encoder technology with the original Mercury encoder family. Smaller, faster, and smarter than anything before, it set the standard for innovation. Now, the growing line of encoders takes another giant step forward by giving you all this, plus more performance, tape scales, dual limits and more. Comprehensive testing and manufacturing to ISO9001:2008 quality standards makes for worldclass robustness and reliability. PERORMANCE WITHOUT COMPROMISE s encoder technology achieves the highest resolution and accuracy in its class, with low cyclical error, low jitter and low power consumption. Model Resolution Output Maximum Speed Scales MII 6000 5µm - 1.2nm Digital 10m/s Tape or lass; Linear & Rotary MII 5000 5µm - 1.2nm Digital 10m/s Tape or lass; Linear & Rotary MII 1900 5µm - 1.2nm Analog 7.2m/s Tape or lass; Linear MII 1600 5µm - 0.5µm Digital 20m/s Tape; Linear Accuracy Cyclical Error* Long Travel With Tape Scale ±30nm typical ±5µm** (Linear) With lass Scales ±20nm typical High accuracy grade: (Linear) up to ±1µm Standard accuracy grade: ±1.5µm * MII 6000/5000 accuracy within a 20µm signal period See data sheets for full specifications **Over any one meter of travel after slope correction in the customer s controller s low cyclical error surpasses every other 20µm encoder. The result: smoother velocity control for linear motors and wire bonders, better linear positioning, and more. Cyclical Error with lass Scales UNSURPASSED EASE O USE Broadest Alignment Tolerances Setup LEDs Built-in or Stick-on Optical Index and Limits* Cut-to-Length Tape Scale Broadest Alignment Tolerances for Easy Installation and Setup has the broadest alignment tolerances in the industry, a full ±2 degrees. That makes it the easiest and the fastest sensor to align and setup; you can align the sensor in under 30 seconds. ±2 o Built-in or Stick-on Optical Index and Limits* Order tape or linear glass scales with built-in markers for fastest installation, or install stick-on index and limit markers anywhere on cutto-length tape scales. s optical index is bi-directional and repeatable at full speed. *Limits available on MII 6000 & MII 5000 models PurePrecision TM Tape Scale in Continuous Lengths up to 30 Meters The Tape Scale s cut-to-length capability reduces inventory costs and lead times. The unique dispenser makes handling and storage easy. You can also order pre-cut lengths. 4

Innovative TM Technology Integrated Sensor Design for Less Power Consumption, Smaller Sensors LOWEST POWER CONSUMPTION IN THE INDUSTRY s patented optical system and integrated sensor design dramatically cuts power consumption - and sensor size ROBUSTNESS WITHOUT COMPROMISE Advanced Optical Design Contamination Resistant Automatic ain Control Separate Left and Right Limits (MII 6000 & MII 5000 Models) VERSATILITY WITHOUT COMPROMISE Low Z-Height Sensor: as low as 8.2mm Low Mass Sensor: as low as 3g Cut-to-Length Tape Scale up to 30 Meters Long SmartPrecision II Software MII 6000 MII 5000 MII 1900 MII 1600 Power 0.90W* 0.90W 0.24W 0.24W Consumption *0.25 for sensor Sensor 8.2mm 11.0mm 8.7mm 8.7mm Height High Noise Immunity Double-Shielded Cable Differential Outputs RoHS Compliant CE Compliant Small Sensor for aster, More Compact Motion Systems With, you get the smallest 1.2nm capable sensor for compact system designs; plus, you can select the best scale for your application: tape or glass, linear or rotary. Encoder Models MERCURY II 6000 Smallest Sensor, Ultra-High Resolution and Accuracy, Tape or lass Scales Programmable Resolution: 5µm 1.22nm Linear, to 268M CPR Rotary Output: Digital A-quad-B or High Speed Serial Scales: 20µm Tape or lass, Linear or Rotary Vacuum models for up to 10-8 torr MERCURY II 5000 Ultra-High Performance, Digital Output from the Sensor, Tape or lass Scales Programmable Resolution: 5µm 1.2nm Linear, to 268M CPR Rotary Output: Digital A-quad-B or High Speed Serial Scales: 20µm Tape or lass, Linear or Rotary MERCURY II 1900 High Performance, Analog Output from the Sensor, Tape or lass Scales Resolution: 5µm 1.2nm Linear Output: Analog Sin/Cos 1Vpp Scales: 20µm Tape or lass SmartPrecision II Software for Unmatched Monitoring and Diagnostics Our encoder software enables setup, real time monitoring, and a variety of data plots; programmable resolution, output frequency and output filtering can be set with MII 6000 and MII 5000 models. MERCURY II 1600 Up to 0.5µm Resolution, Digital Output from the Sensor, Tape Scales Resolution: 5µm - 0.5µm Linear Output: Digital A-quad-B Scales: 20µm Tape 5

6000 I H Smallest Sensor, Ultra-High Resolution and Accuracy Digital Output Encoder Uses Metal Tape, Linear lass, or Rotary lass Scales 6000 s programmable resolutions range from 5µm to 1.2nm, with accuracy up to ±1µm; the same sensor works with tape or glass scales, either linear or rotary. Excellent cyclical error (short-range accuracy) means smooth velocity control. Performance, small sensor size, robustness, versatility and ease of use make MII 6000 the high performance choice. System Performance A 6 Resolution Linear Rotary MII 6000 IS THE ONLY DIITAL-OUTPUT ENCODER WITH ALL THESE EATURES: 8.2mm sensor Z-height Stick-on index and limits Programmable resolution and settings MII 6000 APPLICATIONS Nanometer-Scale Motion Piezo-Motor Stages Wafer Inspection & Processing Automated Optical Inspection Compact Z Height Design MII 6000 s sensor is only 8.2mm high, enabling more compact motion systems. ±2 o 5µm to 1.2nm 20k CPR to 268M CPR Accuracy Cyclical Error* Long travel With Tape Scale ±30nm typical ±5µm** (Linear) With lass Scales ±20nm typical High accuracy grade: (Linear) up to ±1µm Std. accuracy grade: up to ±1.5µm *Accuracy within a 20µm signal period See data sheet for full specifications **Over any one meter of travel after slope correction in the customer s controller Integral dual limits Up to 1.2nm resolution A-quad-B or high speed serial word outputs Metrology XY Stages Tunable Optic Systems Microscope Stages B Broadest Alignment Tolerances in the Industry Mercury encoders have the widest Z and theta-z tolerances for fast setup. C D E H I E C B A Next-eneration Sensor for Resistance to Contamination s sensor has an improved optical design and Automatic ain Control for contamination resistance: fingerprints, oil, dust, etc. One Sensor: Tape or lass, Linear or Rotary Scales With MII 6000, the same sensor works with tape and glass scales, saving design time and reducing the number of unique parts. PurePrecision TM Tape or High Accuracy Linear lass Scales PurePrecision tape scale is the easiest tape to install and use. Cut it to any length you need; adhesive backing and our unique application tool make installation fast and accurate. Use linear glass scales for the highest accuracy and precise thermal management. Built-In or Stick-On Optical Index and Limits Choose from built-in index and limit markers for fastest installation, or stick-on markers for placeanywhere flexibility with cut-to-length tape scale applications. s space-saving index and limit markers fit within the 6mm width of the tape scale. The bi-directional optical index provides 1 LSB repeatability at all speeds, while left and right optical limits enhance safety and reduce cabling. Programmable eatures for System lexibility MII 6000 provides user programmable or factory-set resolution, output bandwidth, and low-pass filtering. No other encoder offers this capability to accelerate motion system prototyping or greater flexibility for complex motion systems. Status LEDs Show System Status at a lance Status LEDs show signal strength and index/limits conditions at all times. SmartPrecision TM II Software Adds Unique unctionality MII 6000 s optional software allows setup, monitoring, diagnostics and data plots. Ethernet connectivity enables secure, remote viewing of parameters. D

5000 I Miniature, Ultra-High Resolution and Accuracy Digital Output Encoder Ideal for High Performance 0.1µm Digital rom-the-sensor Applications Uses Metal Tape, Linear lass, or Rotary lass Scales 5000 s programmable resolutions range from 5µm to 1.2nm, with accuracy up to ±1µm; the same sensor works with tape or glass scales, either linear or rotary. Excellent cyclical error (short-range accuracy) means smooth velocity control. Performance, robustness, versatility and ease of use make MII 5000 the high performance choice. C B A D E H System Performance Resolution Linear Rotary MII 5000 IS THE ONLY DIITAL-OUTPUT ENCODER WITH ALL THESE EATURES: 11mm sensor Z-height Stick-on index and limits Programmable resolution and settings MII 5000 APPLICATIONS Linear Motors PD Manufacturing Wafer Inspection & Processing Automated Optical Inspection 5µm to 1.2nm 20k CPR to 268M CPR Accuracy Cyclical Error* Long travel With Tape Scale ±30nm typical ±5µm** (Linear) With lass Scales ±20nm typical High accuracy grade: (Linear) up to ±1µm Std. accuracy grade: up to ±1.5µm *Accuracy within a 20µm signal period See data sheet for full specifications **Over any one meter of travel after slope correction in the customer s controller Integral dual limits Up to 1.2nm resolution A-quad-B or high speed serial word outputs Metrology XY Stages and antries Tunable Optic Systems Microscope Stages C D E Digital Output Right rom the Sensor All electronics are in the sensor, including programmable features and interpolation up to x16384. You get the highest system reliability, the smallest footprint, and a variety of connector options - even your own connector. Next-eneration Sensor for Resistance to Contamination s sensor has an improved optical design and Automatic ain Control for contamination resistance: fingerprints, oil, dust, etc. One Sensor: Tape or lass, Linear or Rotary Scales With MII 5000, the same sensor works with tape and glass scales, saving design time and reducing the number of unique parts. PurePrecision TM Tape or High Accuracy Linear lass Scales PurePrecision tape scale is the easiest tape to install and use. Cut it to any length you need; adhesive backing and our unique application tool make installation fast and accurate. Use linear glass scales for the highest accuracy and precise thermal management. Built-In or Stick-On Optical Index and Limits Choose from built-in index and limit markers for fastest installation, or stick-on markers for placeanywhere flexibility with cut-to-length tape scale applications. s space-saving index and limit markers fit within the 6mm width of the tape scale. The bi-directional optical index provides 1 LSB repeatability at all speeds, while left and right optical limits enhance safety and reduce cabling. A Compact Z Height Design MII 5000 s sensor is only 11mm high, enabling more compact motion systems. H Programmable eatures for System lexibility MII 5000 provides user programmable or factory-set resolution, output bandwidth, and low-pass filtering. No other encoder offers this capability to accelerate motion system prototyping or greater flexibility for complex motion systems. ±2 o B Broadest Alignment Tolerances in the Industry Mercury encoders have the widest Z and theta-z tolerances for fast setup. I SmartPrecision TM II Software Adds Unique unctionality MII 5000 s optional software allows setup, monitoring, diagnostics and data plots. Ethernet connectivity enables secure, remote viewing of parameters. 7

1900 Miniature, High Performance Analog Output Encoder All Electronics in the Sensor Uses 20µm Metal Tape or Linear lass Scales to Achieve the Highest Resolution with Your Interpolation Electronics or high performance with linear tape or glass scales, the 1900 analog encoder delivers. It fits compact designs and provides high accuracy, speed, and high-fidelity signals for resolutions from 5µm to 1.2nm, depending on your controller. Cut-to-length tape scale applies quickly; linear glass scales provide high accuracy up to ±1µm. The stick-on index and broad sensor alignment tolerances mean setup in seconds. System Performance 1Vpp sin/cos output Speeds up to 7.2m/s Bi-directional optical index with repeatability at full system speed High EMI noise immunity and tolerance to contamination XY Stages and antries PD Manufacturing Wire & Die Bonders Pick and Place Systems A 8 MII 1900 APPLICATIONS Compact Z Height Design MII 1900 s sensor is only 8.7mm high, enabling more compact motion system designs. ±2 o Resolution Accuracy B Linear Motors Wafer Processing Metrology Linear 5µm to 1.2nm, depending on customer interpolation Long travel With Tape Scale (Linear) ±5µm* With lass Scales (Linear) High accuracy grade: up to ±1µm Standard accuracy grade: up to ±1.5µm *Over any one meter of travel after slope correction in the customer s controller See data sheet for full specifications Wafer Inspection Broadest Alignment Tolerances in the Industry Our next-generation sensor design has the widest Z and theta-z tolerances for fast setup. C D E H A B D C Analog Output Right from the Sensor All electronics are in the sensor. You get the highest system reliability, the smallest footprint, and a variety of connector options - even your own connector. Next-eneration Sensor for Resistance to Contamination s sensor has an improved optical design and Automatic ain Control for contamination resistance: fingerprints, oil, dust, etc. PurePrecision TM Tape or High Accuracy Linear lass Scales PurePrecision tape scale is the easiest tape to install and use. Cut it to any length you need; adhesive backing and our unique application tool make installation fast and accurate. Use linear glass scales for the highest accuracy and precise thermal management. With MII 1900, the same sensor works with both types of scales, saving design time and reducing the number of unique parts in your system design. Built-In or Stick-On Optical Index Choose from a built-in index mark for fastest installation, or a stick-on marker for place-anywhere flexibility with cut-to-length tape scale applications. s space-saving index marker fits within the 6mm width of the tape scale. The bi-directional optical index provides 1 LSB repeatability at all speeds. Choice of Connector Styles Choose from a fully-shielded 15-pin D-sub connector or customer-specified connector. SmartPrecision TM II Software Optional software adds capability to perform setup, monitoring, diagnostics and data plots. E H

1600 Up to 0.5µm Resolution Digital Output Encoder All Electronics in the Sensor H Uses Metal Tape Scales for Economical Motion Control Designs The 1600 digital output sensor, combined with the cut-to-length tape scale, provides repeatability and resolution of 5µm to 0.5µm. The stick-on index and broad sensor alignment tolerances mean that setup takes seconds, high EMI immunity and tolerance to contamination translate to reliable operation, and high bandwidth provides speeds up to 20m/s. MII 1600 is the best choice for applications requiring 5µm to 0.5µm of resolution. E C D B A System Performance Resolution and repeatability: 5µm to 0.5µm Accuracy: ±5µm (over any one meter of travel after slope correction in the customer s controller) Speeds up to 20m/s Bi-directional optical index with repeatability at full speed High EMI noise immunity and tolerance to contamination MII 1600 APPLICATIONS Linear Motors and Stages Lab Automation Metrology and Inspection Medical Equipment XY Positioning Tables Assembly Automation Pick and Place Systems Printing Equipment C D E Digital Output Right from the Sensor All electronics are in the sensor, including up to x40 interpolation. You get the highest system reliability, the smallest footprint, and a variety of connector options - even your own connector. Next-eneration Sensor for Resistance to Contamination s sensor has an improved optical design and Automatic ain Control for contamination resistance: fingerprints, oil, dust, etc. PurePrecision TM Tape, the Next eneration Tape Scale PurePrecision tape scale is the easiest tape to install and use. Cut it to any length you need; adhesive backing and our unique application tool make installation fast and accurate. A B Compact Z Height Design MII 1600 s sensor is only 8.7mm high, enabling more compact system designs. Broadest Alignment Tolerances in the Industry Built-In or Stick-On Optical Index Choose from a built-in index mark for fastest installation, or a stick-on marker for place-anywhere flexibility with cut-to-length tape scale applications. s space-saving index marker fits within the 6mm width of the tape scale. The bi-directional optical index provides 1 LSB repeatability at all speeds. Mercury encoders have the widest Z and theta-z tolerances for fast setup. ±2 o Choice of Connector Styles Choose from a fully-shielded 15-pin D-sub connector or customer-specified connector. H SmartPrecision TM II Software Optional software adds capability to perform setup, monitoring, diagnostics and data plots. 9

PurePrecision TM Tape and lass Scales or TM Encoders or Easy Installation and Superior Performance Tape Scales PurePrecision tape is the easiest tape scale to install and use. Cut it to any length you need from a coil, or order pre-cut lengths with built-in index and limits to make installation even faster. Its adhesive backing makes application easy and accurate. Cut to any length at the time of installation, or order pre-cut Measuring length up to 30m Only 6mm wide, including index and limits; low profile Choose from built-in or stick-on optical index and limit markers Resists effects of scale contamination dust, dirt, fingerprints, oil spots, etc. lass Scales Use linear glass scales for the highest accuracy and precise thermal management. Rotary glass scales are available with or without hubs, and in arc segments. Highest accuracy up to ±1µm Only 6mm wide, including index and limits (applications 130mm) Custom options special widths, thicknesses, near-zero CTE materials, diameters, or rotary arc segments Note: Contact MicroE Systems for tape-on-a-radius rotary and MII 1900/1600 rotary applications 10 SPECIICATIONS OR MERCURY II SCALES SCALES & INDEX / LIMIT MARKERS OR MERCURY II MODELS Model Tape Linear lass Rotary Stick-On Stick-On Scale Scales Scales Index Limits MII 6000 MII 5000 MII 1900 MII 1600 Linear Tape Linear lass Rotary lass Scales Scales Scales Length 50mm - 30m 18mm - 1m 44mm - 121mm dia. Cut to any length from a dispenser Order pre-cut to a a specified length Accuracy ±5µm* up to ±1µm up to ±2.1 arc-sec. CTE 13ppm/ C** 8ppm/ C 8ppm/ C Built-in index and limits Stick-on index and limits * Over any one meter of travel after slope correction in the customer s controller ** Thermal expansion of the tape scale is matched to the substrate by fixing the ends of the scale with epoxy Accuracy: ±1µm with High-Accuracy rade Scales

PurePrecision Tape Scales CUT TO LENTH OR PRE-CUT TAPE SCALES The Best Tape Scale Solution Available PurePrecision Marker Tape and Laser Tape scales set the standard for flexibility and ease of use. Order tape with built-in index and limit* markers, or cut any length needed from a coil and apply stick-on markers. There are no index magnets to install and adjust. Adhesive-mount PurePrecision tape scale has a 20µm pitch and is available in lengths up to 30 meters. * Limits available on MII 6000 and MII 5000 models Easy Tape Installation Simply feed the tape scale into the installation tool and roll it out along a benching edge to perform adhesive mounting. The tape can then be epoxied at its ends, matching it to the thermal response of the substrate. Mounting is that simple. PurePrecision tape scale is made of nickel alloy for corrosion resistance, immunity to cleaning solvents and long-term reliable performance. CHOOSE ROM BUILT-IN OR STICK-ON INDEX AND LIMITS Built-In Markers PurePrecision Marker Tape has built-in index and limit marks to speed installation. Manufactured into the tape scale to your specifications using a laser etch process, installation of the tape scale is reduced to one simple step: just apply the adhesive-mount tape scale to your system s mounting surface and you are done. There is no need to mount index or limit markers Enlargement showing built-in index or magnets. The laser-written marks are placed in the exact locations you specify index location, number of index marks and limit mark lengths can all be specified at the time of ordering. PurePrecision Marker Tape may be ordered in pre-cut lengths for the fastest installation, or in continuous form for cutting at your site. tape scale and then stick on the markers. The stick-on markers even work on linear glass scales. s stick-on optical index SMALLEST TAPE SCALE SYSTEM AVAILABLE USE LASS SCALES WHEN YOU NEED: Highest accuracy to ±1µm Uniform thermal behavior Ultra-smooth velocity control Index magnet used by other encoders Unlike other encoders, s optical index and limits require no additional space. They mount directly on the 6mm wide tape scale - no unwanted magnets or mounting hardware taking up space. Brand X 22mm Brand Y 13.5mm 6.0mm PurePrecision lass Scales Short travel lengths Custom configurations Rotary scales Stick-On Markers PurePrecision Laser Tape works with s stick-on index and limit markers when the flexibility and inventory savings of cut-tolength capability is required. Stick-on index and limit markers can be placed anywhere in seconds: there is no need to mix epoxy or drill holes to mount bulky magnets or limit switches. Just apply the s 20µm pitch glass scales are available in lengths from 10mm to 1m and rotary diameters up to 121mm. Custom scales are also available for OEM orders special thicknesses, widths, rotary arc segments, and specialized materials such as near-zero CTE glass. Linear glass scales can have built-in or stick-on index and limit markers. 11

Mercury TM: The Original Miniature Encoders Mercury Incredible Performance from Such a Small Package MicroE Systems introduced Mercury encoders to help equipment designers achieve smaller and faster systems. Originally three models, the Mercury series of encoders has grown to 11 models due to an expanding range of applications requiring more resolution, speed and even smaller sensors. Motion system engineers around the world specify Mercury encoders when their linear or rotary applications demand high performance from the smallest possible sensor. Comprehensive testing and manufacturing to ISO9001:2008 quality standards ensure long-term reliability. HIH PERORMANCE ROM ULTRA-SMALL SENSORS Mercury s encoder technology achieves high resolution and low power consumption with the smallest possible sensors. Model Resolution Output eatures Scales M 3500 5µm - 5nm Digital Programmable lass; Linear & Rotary M 1500 5µm - 0.5µm Digital Digital from lass; the Sensor Linear & Rotary M 1000 5µm - 78nm Analog 1Vpp Output lass; Linear & Rotary M 1200 5µm - 78nm Analog PCB Mount lass; Linear & Rotary M 1500P 5µm - 0.5µm Digital PCB Mount lass; Linear & Rotary ChipEncoder 10µm - 1µm Digital PCB Mount lass; Linear & Rotary SMALLER SENSORS OR SMALLER, LIHTER MOTION SYSTEMS Mercury s patented optical system results in the most compact sensors in their class. Achieve low mass motion systems with more rapid accelerations and higher system throughputs using Mercury s 6mm wide linear scales, rotary scales as small as 12mm in diameter, lowmass rotary arc segments, and sensors as small as 5.6mm high weighing only 2.6 grams. Plus, the same sensor models work in both linear and rotary applications. Low power consumption as low as 0.17 Watts provides further advantages in thermal stability and for portable equipment. Model Height Weight Power Consumption M 1200 5.6mm 2.6g 0.17W M 1500P 5.6mm 2.6g 0.17W ChipEncoder 3.1mm 0.6g 0.18W Accuracy UNSURPASSED EASE O USE Broadest Alignment Tolerances for Easy Installation and Setup Mercury has the broadest alignment tolerances in the industry, a full ±2 degrees. That makes it the easiest and the fastest sensor to align and setup. No instrumentation is needed; you can align the Mercury sensor in under 30 seconds. Long Travel With lass Scales (Linear) High accuracy grade: up to ±1µm Standard accuracy grade: ±3µm See data sheets for full specifications ±2 o DUAL-AXIS MODELS Mercury 3000 Dual Axis Averager models combine feedback from two sensors and average them in real time. The result is higher accuracy in rotary applications than can be achieved with one sensor scale eccentricity errors are virtually eliminated. Outputs can be A-quad-B or high speed serial. 12

Innovative Mercury TM Technology Less Power Consumption, Smaller Sensors PC BOARD MOUNT Mercury 1200, Mercury 1500P and ChipEncoder models mount directly on your PC board providing significant space and cost savings through design integration. Mercury 1200 s analog outputs can be interpolated by your electronics or a chipset available from MicroE Systems for use on your PC board for resolution up to 78nm (linear). Mercury 1500P and ChipEncoder have built-in interpolation that produces digital outputs with up to 0.5µm resolution (linear). All models work with rotary scales as small as 12mm diameter. And all this comes in the smallest packages. Mercury & ChipEncoder Models MERCURY 3500, 3000, 2000 Small Sensor, High Resolution and Accuracy Programmable Resolution: 5µm 5nm Linear Up to 67M CPR Rotary Output: Digital A-quad-B or High Speed Serial Scales: 20µm lass, Linear or Rotary Multi Axis Models MERCURY 1500 Digital Output from the Sensor Resolution: 5µm 0.5µm Linear Up to 665k CPR Rotary Output: Digital A-quad-B Scales: 20µm lass, Linear or Rotary Mercury WIDE RANE O SCALES Linear and rotary 20µm pitch glass scales are available in lengths from 13mm to 2m, and diameters up to 121mm. Accuracy of ±1µm is available using high accuracy grade linear scales. Widths as low as 6mm compliment Mercury s space-efficient sensors for the smallest possible motion systems. Built in index marks complete your application. Custom widths, thicknesses, diameters, arc segments, index configurations, and near-zero CTE materials are available for OEM orders. Linear Standard Lengths 13mm 25mm 50mm 75mm 100mm 125mm 150mm. 2020mm Rotary Standard Outer Dia. 12.00mm 19.05mm 31.75mm 57.15mm 107.95mm 139.7mm Rotary Hub Available Rotary Segments Arc Segment Radius: 6mm or greater MERCURY 1000 1Vpp Analog Output Resolution: 5µm 78nm Linear Up to 4.2M CPR Rotary Output: Analog Sin/Cos 1Vpp Scales: 20µm lass, Linear or Rotary MERCURY 1200 & 1500P PCB Mount, Analog or Digital Output from the Sensor Resolution: 5µm-78nm Linear (M 1200) 5µm 0.5µm Linear (M 1500P) Up to 4.2M CPR Rotary Scales: 20µm lass, Linear or Rotary CHIPENCODER PCB Mount, Digital Output from the Sensor Resolution: 10µm 1µm Linear Up to 300k CPR Rotary Scales: 40µm lass, Linear or Rotary 13

The Smallest Vacuum Encoders High Performance at High Vacuum with the Smallest Encoders Mercury and vacuum encoders are specified in a wide range of applications due to their combination of performance, small size, and high vacuum rating. Choose from models with programmable digital output, analog output, or digital output right from the sensor, all constructed using vacuum-compatible materials rated up to 10-8 torr. All sensors can be used with linear, rotary and arc segment scales. Mercury Vacuum Models HIH PERORMANCE IN THE SMALLEST PACKAE With sensors only 8.2mm tall, capable of resolutions up to 1.2nm and cyclical error of ±20nm, unsurpassed motion system performance is achieved in the most compact vacuum applications. Plus, thermal effects are minimized due to the low power consumption of Mercury encoder sensors only 0.25W for most models. All models perform at 10-8 torr with negligible outgassing. Bake out is rated at 150 C for 48 hours. And Mercury and vacuum encoders perform in high magnetic field environments. MERCURY II 6800V Small Sensor, Ultra-High Resolution and Accuracy, lass Scales Programmable Resolution: 5µm 1.2nm Linear Up to 268M CPR Rotary Output: Digital A-quad-B or High Speed Serial; dual limits Vacuum up to 10-8 torr; 150 C bakeout at 48 hours Vacuum Encoders WIDE RANE O SCALES Vacuum-compatible linear and rotary 20µm pitch glass scales are available in lengths from 13mm to 2m, and diameters up to 121mm. Accuracy of ±1µm is available using high accuracy grade linear scales. Widths as low as 6mm compliment Mercury s space-efficient sensors for the smallest possible motion systems. Built in index and limit marks* complete your application. Custom widths, thicknesses, diameters, arc segments, index / limit configurations, and near-zero CTE materials are available for OEM orders. * Limits available on MII6800V models Linear Standard Lengths 13mm 25mm 50mm 75mm 100mm 125mm 150mm. 2020mm Rotary Standard Outer Dia. 12.00mm 19.05mm 31.75mm 57.15mm 107.95mm 139.7mm Rotary Hub Available Rotary Segments Arc Segment Radius: 6mm or greater MERCURY 3500V, 2000V Small Sensor, High Resolution and Accuracy, lass Scales Programmable Resolution: 5µm 5nm Linear Up to 67M CPR Rotary Output: Digital A-quad-B or High Speed Serial Vacuum up to 10-8 torr; 150 C bakeout at 48 hours MERCURY 1000V High Performance Analog Output, lass Scales Resolution: 5µm 78nm Linear Up to 4.2M CPR Rotary Output: Analog Sin/Cos 1Vpp Vacuum up to 10-8 torr; 150 C bakeout at 48 hours MERCURY 1500V Up to 0.5µm Resolution, Digital Output from the Sensor, lass Scales Resolution: 5µm - 0.5µm Linear Up to 665k CPR Rotary Output: Digital A-quad-B Vacuum up to 10-8 torr; 150 C bakeout at 48 hours 14

Data Storage Products MicroE Systems has more than a decade of experience designing and manufacturing critical components and ultra-precision positioning systems for the data storage industry. Today we supply these components to the majority of hard disk drive (HDD) manufacturers around the world, enabling cost-effective manufacturing of HDD s with capacities exceeding 1TB. PRODUCTS 1400 and 1600 High Accuracy Rotary Encoders PE100 High Speed Rotary Encoders PA200 and PA2046 Rotary Positioners MP7000 Positioner for Media Writers MCB2 and SA200a Motion Control Subsystems DRC TM Encoders Based on decades of field-proven reliability and performance, DRC incremental encoders are well known for fast and easy installation using industry-standard mechanical and electrical interfaces. Choose from sealed or kit-style rotary encoders, kit-style linear encoders, or sealed linear length gages featuring: Optical encoder technology with LED light source for long life and highest performance Differential digital outputs with available zero reference Custom versions available for OEM applications Sealed Rotary Shaft and Hollow Shaft Encoders Rugged, reliable incremental rotary motor encoders Resolutions from 400 to 360,000 Counts per Rev., with a wide range of shaft / coupling sizes, mounting options, connector styles and cable lengths High accuracy, high temperature, high shaft load and extra high vibration-resistant models Data Storage and DRC PRODUCTS 25D, 25B, S15, H15 and 15 Shaft and Hollow-Shaft Sealed Rotary Encoders; Resolutions up to 200,000 CPR HT30, T23B, and TK91 Kit-style Rotary Encoders for Motors; Resolutions up to 100,000 CPR LDK Kit-style Linear Encoders; Resolutions up to 0.5µm SST Sealed Linear Length ages; Resolutions up to 1µm 15

Encoder Selector Chart Model eatures Specifications MERCURY II ENCODERS Digital or analog output from the sensor Tape or glass scales with index & limits 6000 Series Encoders page 6 5000 Series Encoders page 7 Smallest sensor, programmable resolution and filtering, stick-on index and limits, easy alignment, setup software, vacuum models for up to 10-8 torr Programmable resolution and filtering, small sensor, stick-on index and limits, easy alignment, setup software Linear Resolution: 5µm 0.0012µm* Rotary Resolution: 20k CPR 268M CPR* Output: A-quad-B, Index, Dual Limits and Alarm; High Speed Serial Interface Tape, Linear lass or Rotary lass Scales Linear Resolution: 5µm 0.0012µm* Rotary Resolution: 20k CPR 268M CPR* Output: A-quad-B, Index, Dual Limits and Alarm; High Speed Serial Interface Tape, Linear lass or Rotary lass Scales 1900 Encoders page 8 Analog output encoder, resolution set by customer controller; small sensor; stick-on index; easy alignment; setup software Digital output with up to 0.5µm resolution, small sensor, stick-on index, easy alignment, setup software Linear Resolution: 5µm 0.0012µm Output: Analog Sin/Cos with Index Linear Tape or lass Scales 1600 Encoders page 9 Linear Resolution: 5µm 0.5µm Output: A-quad-B with Index Tape Scales MERCURY ENCODERS Smallest sensors lass scales Screw mount or PC board mount Mercury Programmable Encoders page 12 Programmable resolution, output frequency & alarms; small sensor; easy alignment; setup software Linear Resolution: 5µm 0.005µm* Rotary Resolution: 6.6k CPR 67.1M CPR* Output: A-quad-B with Index; Serial Interface Linear or Rotary lass Scales Mercury Digital Output Encoders page 12 Digital output with fixed resolution, small sensor, easy alignment, setup software Linear Resolution : 5µm 0.5µm Rotary Resolution: 6.6k CPR - 655k CPR Output: A-quad-B with Index Linear or Rotary lass Scales Mercury Analog Output Encoders page 12 Analog output encoder, resolution set by customer controller; small sensor; easy alignment; setup software Linear Resolution: 5µm 0.078µm Rotary Resolution: 6.6k CPR - 4.2M CPR Output: Sin/Cos with Index Linear or Rotary lass Scales MERCURY VACUUM ENCODERS Smallest vacuum sensors lass scales Mercury Vacuum Encoders page 14 Small sensor; programmable resolution, output frequency & alarms; easy alignment; setup software; rated to 10-8 torr Linear Resolution: 5µm 0.0012µm* Rotary Resolution: 6.6k CPR 268M CPR* Output: A-quad-B with Index; Serial Interface; Analog Sin/Cos with Index Linear or Rotary lass Scales CHIPENCODER Smallest PC board mount sensor ChipEncoder page 12 Digital output with up to 1µm resolution, small PC board mount sensor Linear Resolution : 10µm 1µm Rotary Resolution: 3k CPR - 327k CPR Output: A-quad-B with Index Linear or Rotary lass Scales See data sheets and interface drawings on web site for detailed specifications. MicroE Systems *Resolution, output and scale options vary by model. 125 Middlesex Turnpike Bedford, MA 01730 USA Tel: 781-266-5700 ax: 781-266-5112 Catalog Rev. A3 www.microesys.com Email: info@microesys.com 2011 MicroE Systems