Operating Manual Bacher FAPS 600 Automatic Exposure Unit 8780

Operating Manual Bacher FAPS 600 Automatic Exposure Unit 8780

Contents 1. 1. Technical Data and Safety Systems 4 1.1 Technical safety information 4 1.2 Technical data 5 1.3 Safety systems and function monitoring 6 1.4 Warning sign descriptions 8 2. Introduction 9 2.1 Component description 10 2.2 Operating controls / control components 11 3. Installation 12 3.1 Transportation and positioning 12 3.2 Transportation safety device 12 3.3 Lifting points for the hoisting equipment 13 3.4 Installation connection details and dimensions 14 4. Material Requirements 18 4.1 Film material 18 4.2 Exposure material 18 4.3 Masking material 18 4.4 Mask definitions 19 4.5 Registration example 20 4.6 Registration mark specifications (for boards and film) 21 5. Operating Sequence 22 5.1 Basic principles 22 5.1.1 FAPS 600 co-ordination system 22 5.2 General 23 5.2.1 Switching on the Machine 23 5.2.2 Setting the spindle frames 23 5.3 Setting-up mode 24 5.4 Alignment mode 24 5.5 Automatic mode 24 5.6 Stop mode 24 5.7 Switching off the machine 24 5.8 Operational flow chart 25 6. Operating panel functions and inputing exposing parameters 28 6.1 Operating panel 28 6.2 Key board cursors functions for inputing the exposure parameters 29 6.3 Individual Operating Panel LCD Segment Functions 30 11/99 BA-FAPS600-e 2

7. The Video System and its Parameters 31 7.1 Basic sequence 31 7.2 Calling-up the video parameters 31 7.3 The operating panel s video keypad 31 7.4 Exiting the video menus 31 7.5 Video parameter menu and sub-menus 32 7.6 Video Parameters 33 7.7 Entering the video system parameter menu during a job exposure 36 8. Video System Status Reports 36 8.1 Video system self-test status reports 36 8.2 Alignment report 36 9. Error Reports 37 9.1 Video system error reports 37 9.2 SPS error reports 38 10. Interfacing to the preceding and the succeeding inline machines 40 10.1 General 40 10.2 Interfacing to the previous inline machine 40 10.3 Interfacing to the succeeding inline machine 40 11. Service 41 11.1. Cleaning the glass plate 41 11.2. Lamp changes 41 11.2.1 POC lamp change 41 11.2.2 HI lamp change 41 11.3. Changing the exposure frame 42 11.4. Lubrication 42 11.5. Vacuum pump VCE 40 (contact vacuum) 42 11.6. Vacuum pump TLV 15 (film and contact vacuums) 43 11.7. Side channel compressor (SKP 35826.01 transport and SKP 30220-03 43 mask vacuums) 11.8. Air filter 43 11.9. Compressed-air filter 44 11.10. Toothed belt 44 12. Spare parts lists 45 13. Electrical circuit diagrams... 14. Pneumatic diagrams... 11/99 BA-FAPS600-e 3

1. Technical Data and Safety Systems 1.1. Technical safety information Important: Important: Long term UV-radiation can result in permanent damage to health. The relevant accident prevention regulations as well as any other acknowledged technical safety and working medical practices must be implemented. Only personnel who have been properly trained and informed about all the safety regulations are allowed to operate and maintain the exposure system. Observe the following when servicing and cleaning the system: - Exposure system must be switched off. - Exposure system has been switched off at the main switch and unauthorised switching-on has been prevented. - When working on the compressed-air system, the supply valve must be closed and the system made pressure free. Important: If settif IIf setting-up, sevicing and error clearing work has to be carried out with the exposure system switched on, then the following instructions must be carried out: - The exposure system must only be operated in manual mode. - The work must be undertaken only by qualified personnel. - Only one person is permitted to work on the exposure system. - The side panels may only be removed after the MH lamp has been switched off. When it is neccessary to work on the MH lamp with the panels removed, the person undertaking the work must protect his eyes and skin from direct and indirect UV-radiation. (Filter protection screens, safety glasses and protective clothing). Only qualified electricians are permitted to change the MH lamp and undertake work on the electrical system. The main switch must be switched off before opening the control cabinet. The lamp must be allowed to cool down before being changed. Only recommended specialised companies are permitted to connect up the exposure system. Operating the exposure system without the safety panels is forbidden. The accoustic level, measured i.a.w. DIN 45635, part 27, does not exceed 71 db (A). Ozone level will never build up into a hazardous quantity. However, we recommend that you ensure there is adequate room ventilation. 11/99 BA-FAPS600-e 4

1.2. Technical data Formats min. board thickness: 0.1 mm (0.004") max. board thickness: 6 mm (0.25") min. board format: 250 x 350 mm (10" x 14") max. board format: 610 x 610 mm (24" x 24") Standard layout film formats: 660 x 660 (26 x 26 ), 660 x 610 (26 x 24 ), 660 x 508 (26 x 20 ) Standard exposure formats: 610 x 610 (24 x24 ), 640 x 580 (25,2 x 22,8), 622 x 477 (24,5 x 18,72) Equipment data Cooling (indirect water cooling): Water inflow HI: Water inflow POC: Cooling power HI: Cooling power POC: with 8-12 C, 1"; 3.4 m³/h with 8-12 C, 3/4"; 1.6 m³/h 16KW 6.6KW Allignment tollerance: +/- 10 µm (0.0004") Vacuum technology: Setting-up time: Dimensions (L x W x H) Weight: Electrical connection HI: Options: Electrical connection POC: Options: according to client specifications <3 min 2763 x 2182 x 1402 mm (HI) 2763 x 2074 x 1402 mm (POC) 2000 Kg 400V, 50Hz, 24 KW, 3 phases, 63A 220V, 60Hz, 24 KW, 3 phases, 80A 400V, 50Hz, 20 KW, 3 phases, 50A 220V, 60Hz, 20 KW, 3 phases, 63A Compressed-air supply: 6 bar, ca. 6 m 3 /h Max. surface pressure: Average ground load: HI light source: POC light source: 18 N/cm² 5000 N/m² 8 KW (6 KW option) air-cooled metal halogen lamp 3.5 KW (5 KW option) air-cooled metal halogen lamp Illumination: +/- 10% HI intensity: (60-80) mw/cm² (measuring device IL 390) POC intensity: (15-20) mw/cm² (measuring device IL 390) Obtainable resolution (HI/POC): Depends on the materials and preceeding and following processes Layout film heating (HI/POC): max. 2 C 11/99 BA-FAPS600-e 5

1.3. Safety systems and function monitoring a) Safety systems Main Switch (1) The main switch (1) switches off all phases to all activated devices (excepting the power supply and power filter). N will be mechanically switched off first. The main switch is located in the middle of the panel on the operators side of the machine. Access to the lamp unit is possible only after the main switch has been switched off. This ensures that the operator will not be exposed to direct UV radiation. Emergency-Off unit (2) The Emergency-Off unit is designed according to VDE 0113 and IEC 204-1 and switches all phases (including N.) to the active devices off, excluding the Emergency-Off switching unit itself. All movement will be immediately stopped. The Emergency-Off switch is located on the control panel on the operators side (2). The Emergency-Off unit is reset by pulling the switch upwards. The Emergency-Off switch is a red push-button against a yellow background. Safety switches/ interlocks (3, 4) Both plexi-glass and metal covers protect the operator from the machines moving parts. They are fitted with safety interlocks (S34 and S35) and retainers (K20 and K21) and position monitoring. It is only possible to open the covers during setting-up and fault elimination. If one of the covers is open, the connection to the gearing motor FU drive is broken, the motor brake is activated and the transport rollers are switched off. This ensures that there is no movement of potentially dangerous parts when the covers are open. "COVER OPEN" is shown on the display. b) Function monitoring system Transport shuttle safety monitoring (5) Transport shuttle movement is only possible when the transport frames are closed. If the frames are open, all movement is prevented by both soft and hardware. Compressed-air monitoring (6) The machine can only be operated when air with a pressure of >6 bar (operating pressure is 6 bar) is available. Transport and removal shuttle safety valve(7) In case of a sudden pressure loss, the safety valve prevents the transport shuttle from dropping. Water inflow and outflow safety valve (8) Machine off = valve closed, machine on = valve open Machine too hot = valve open, machine too cold = valve closed Additional mechanical valves are also available. Overloading breakdowns (9-13) If one of the transport motors is overloaded, an over-voltage protection switch is activated (9-13). The equipment is then switched off. The over-voltage protection switch can be reset to its normal position after a cooling phase of about 1 min. The locations of the over-voltage protection switches are shown in the following drawing. Warning lamps (14) RED indicates a breakdown, see display error report YELLOW indicates a bad board, registration marks unknown or not within tolerance GREEN indicates equipment is ready for operation 11/99 BA-FAPS600-e 6

Figure 1: Safety and function monitoring systems 8 7 14 5 9 3 6 2 1 4 10-12 13 1 Main switch 2 Emergency-Off unit 3 Plexiglass cover safety switch 4 Metal cover safety switch 5 Transport shuttle safety monitor 6 Compressed-air monitor 7 Transport and removal shuttle safety valves 8 Water inflow and outflow safety valve 9 Warming-up over-voltage protection switch (or integrated in the CLEANER) 10 X-Axis pre-centering over-voltage protection switch 11 Y-Axis pre-centering over-voltage protection switch 12 Roller transport over-voltage protection switch 13 End of run over-voltage protection switch 14 Warning light 11/99 BA-FAPS600-e 7

1.4. Warning sign descriptions a) Beware! High Voltage! Even with the main switch off, the supply lines are still live. -Mains filter cover -Mains filter b) Beware! High Voltage! -all vacuum pump terminal boxes -monitor cover shields -right rear panel -exposure area paneling -main switch case Only qualified electricians are permitted to remove the covers. c) Beware! Danger of burns! -Lamp housing Lamp change can only be carried out after it has cooled down. d) Switching off the main switch -Lamp housing The main switch must be switched off before changing the lamp e) Switch off the main switch before opening the housing Switch the main switch off before opening the housing. 11/99 BA-FAPS600-e 8

2. Introduction The FAPS 600 exposure system is a fully automatic exposure system for the production of printed circuit boards, based on single side exposure. Please refer to the Technical Data (chapter 1) for information regarding the authorised materials. It is made for the exposure of common photosensitive photo resists and solder masks. The registration of the photographic layout to the exposing material is achieved by aligning suitable registration marks by means of one of the X-Y-ϕ-tables controlled by the image processing system. Photographic layout and exposing material are registered in succession and are taken first to the exposing level in the contacter by means of a suitable transport system. The equipment can be divided into three parts regarding the throughput direction. The alignment station is located on the left. The operator places the film here, the boards are fed in, in succession, and both film and board are aligned in the correct exposure position. Next comes the exposure station. Here a vacuum from a surrounding groove fixes the film to a glass plate. The boards are placed on top of the film with the side to be exposed facing downwards, and pressed firmly onto the film by means of the contact vacuum. The board is then exposed. To the right of the operator is the output station, where the boards are outputted from the machine. The film and board transportation is achieved by means of a vacuum transport system (Shuttle). This consists of a frame, that is driven by a motorised belt and two vacuum plates. One of these vacuum plates is responsible for transporting film and boards between the alignment and exposing stations and the other transports the exposed boards to the output station. Precise film and board registration is achieved by pilot pins, which are located in the alignment and exposure stations, and the vacuum plate responsible for transportation is lowered onto these pins. The machine is supplied with two different light technologies. POC light technology (Practice-Orientated Collimation) ensures minimal heating of the layout, a small collimation angle, a very high resolution and is especially suitable for exposure of photo resists. HI light technology (High Intensity) ensures short exposure times for the highest resolutions. If required, a special IR reflector may also be supplied with this light technology, made from specially coated glass that prevents most of the lights infra-red segment from reaching the exposure area. In case of further questions or urgent repairs please contact: B. Bacher, Graphische Geräte GmbH Eisenbahnstraße 84 Postfach 7 D-78573 Wurmlingen Tel: +49-7461-177-0 Fax: +49-7461-177-110 Internet: http://www.b-bacher.com Important: The exposure system must only be used as described above. Any other use is strictly prohibited. The manufacturer is not responsible for any damage resulting from wrong use. It is entirely at the customer s own risk. 11/99 BA-FAPS600-e 9

Diagram 2.1 Component description Input and pre-alignment CCD-camera for PCB registration Monitoring display Vacuum tranport system Board output Precision centering CCD-camera for PCB registration Video slide-in unit Control prealignment station HI POC Exposure unit Electro-cabinets Vacuum technology 11/99 BA-FAPS600-e 10

Diagram 2.2 Operating controls / control components 8 16 17 18 10 1112 13 14 1 2 3 4 5 6 7 1 Camera positioning 2 Camera system 3 Operating panel 4 On/Off switch 5 Emergency-Off 6 Temperature display 7 Monitor 8 Warning light 9 Main switch 10 Lamp power display 11 Operating-hours counter 12 Film-vacuum display 13 Removal-vacuum display 14 Contakt-vacuum display 15 Spindle frame selection switch 15 9 Rear side 16 Compressed-air display 17 Water inflow and outflow valve 18 Water inflow and outflow, pressure and temperature displays 11/99 BA-FAPS600-e 11

3. Installation Pre-conditions: The exposure system must be placed in a room protected against UV radiation. UV radiation would pre-expose the PC boards making them unusable for further processing. Ensure that this room has sufficient floor space for the machine and surrounding free space for operating and servicing. The installation site must have a solid foundation, (permitted surface pressure 18N/cm²; average ground load 5000N/m²) to ensure a perfect alignment. The machine consists of two components, the actual exposure unit and the the vacuum tower, which contains up to 4 side channel compressors for the transport vacuum as well as the pump for the contacter vacuum. Tower and machine are connected together with flexible vacuum tubes. Maximum length 10 m. 3.1 Transportation and positioning First the machine is transported to the selected site. Attention: Observe the lifting points for the hoisting equipment in the drawing overleaf. Ensure that there is sufficient space (minimum of 50 cm) between the rear of the machine and the wall to allow for service work. If the vacuum tower is to be placed behind the machine (behind the plexi-glass cover), it must be positioned at least 20 cm from the machine. 3.2 Transportation safety device Now remove the red transportation safety device fitted to the left of the shuttle, in order to do this open the cover. Attention: Prior to opening the machine, ensure that the compressed-air pressure meets the specifications. When the machine is in position at the site, it must be aligned by using a spirit-level. Firstly the load on the 4 feet that are not at the corners of the machine must be removed. By using the remaining corner feet the machine can be adjusted so that the transport gliding bars upon which the transport shuttle slides, are horizontal. Both gliding bars must be set to the same height. Check this with a suitable spirit-level. When this has been achieved, the four inner feet can be readjusted to take the load. As soon as the machine is horizontal, the cooling water connections (the inflow and outflow each have 1" connectors) as well as the mains power connection can be made. Attention: Only a qualified electrician is permitted to make the mains power connection. The electricity phase sequence can be checked against the side channel compressor phase sequence and be corrected if neccessary. 11/99 BA-FAPS600-e 12

3.3 Lifting points for the hoisting equipment 11/99 BA-FAPS600-e 13

3.4 Installation connection details and dimensions FAPS POC - Tower - HEPA projection from above A3 Vacuum tower A1/A2 Throughput direction Cleaning drawer Maximum distance between FAPS 600 / vacuum tower when using flexible tubes = 10m, if distance is more than 10m, fixed tubing is required. Recommende diameter = 100 mm. Hepa-Box Clean room class 1000 or 100 Machine operating area A1 = 400V, 50 Hz, 16 KW, 3 phases, 35A Options: A2 = 220V, 60 Hz, 6 KW, 3 phases, 50A A3 = 220V, 60 Hz, 14 KW, 3 phases, 80A for vacuum tower B = Compressed-air 6 bar, connection R1/4" C = Water inflow R1", Temp.= 8 C D = Water outflow R1", Temp.= 12 C E = Vacuum tube external diameter 33 mm, internal 25 mm F = Vacuum tube external diameter 60 mm, internal 50 mm 11/99 BA-FAPS600-e 14

3.4 Installation connection details and dimensions FAPS POC - Tower - HEPA side projection Air output 1000 m 3 /h 60-80 C A3 Vacuum tower Hepa-Box Clean room class 1000 or 100 A1/A2 A1 = 400V, 50 Hz, 16 KW, 3 phases, 35A Options: A2 = 220V, 60 Hz, 6 KW, 3 phases, 50A A3 = 220V, 60 Hz, 14 KW, 3 phases, 80A for vacuum tower C = Water inflow R1", Temp.= 8 C D = Water outflow R1", Temp.= 12 C 11/99 BA-FAPS600-e 15

3.4 Installation connection details and dimensions FAPS HI - Tower - HEPA projection from above A3 Vauumturm A1/A2 Throughput direction Cleaning drawer Maximum distance between FAPS 600 / vacuum tower when using flexible tubes = 10m, if distance is more than 10m, fixed tubing is required. Recommende diameter = 100 mm. Hepa-Box Clean room class 1000 or 100 Machine operating area A1 = 400V, 50 Hz, 19 KW, 3 phases, 50A Options: A2 = 220V, 60 Hz, 9 KW, 3 phases, 50A A3 = 220V, 60 Hz, 14 KW, 3 phases, 80A for vacuum tower B = Compressed-air 6 bar, connection R1/4" C = Water inflow R1", Temp.= 8 C D = Water outflow R1", Temp.= 12 C E = Vacuum tube external diameter 33 mm, internal 25 mm F = Vacuum tube external diameter 60 mm, internal 50 mm 11/99 BA-FAPS600-e 16

3.4 Installation connection details and dimensions FAPS HI - Tower - HEPA side projection Air output 1000 m 3 /h 60-80 C A3 Vacuum tower Hepa-Box Clean room class 1000 or 100 A1/A2 A1 = 400V, 50 Hz, 19 KW, 3 phases, 50A Options: A2 = 220V, 60 Hz, 9 KW, 3 phases, 50A A3 = 220V, 60 Hz, 14 KW, 3 phases, 50A for vacuum tower C = Water inflow R1", Temp.= 8 C D = Water outflow R1", Temp.= 12 C 11/99 BA-FAPS600-e 17

4. Material Requirements 4.1. Film material All well known black and diazo films may be used in the FAPS 600 exposure system. The exposure layout can be up to a maximum of 660 x 660 mm. This is neccessary, to ensure that the vacuum from the surrounding vacuum tracks fixes the layout film firmly onto the exposing area. If no film of this format is available, then clear mounting foil of the correct size may also be used. When using clear mounting foil, ensure that the original film is mounted so that it conforms to the registration mark specifications. 4.2. Exposure material Standard format rigid boards from 250 x 350 mm up to 610 x 610 mm can be exposed with this equipment. Permitted board thickness lies between 0.1 and 6 mm. The register marks must correspond with the film register marks and also the registration specifications. 4.3. Masking material The FAPS 600 exposure system s strong vacuum holds the boards very firmly down onto the layout film on the glass plate when exposing. In order to prevent any light undercutting due to warping of the glass plate, or even the glass breaking, the resulting pressure must be as evenly distributed as possible across the glass plate. In order to achieve this, the space around the exposure material is covered with masking material. This masking material must conform precisely to the exposure materials shape.(see 4.4) After aligning the first (master) board for exposure, the masks are laid on the alignment table and remain fixed to the film transport system until the next film change. The masks must correspond to the parameters, outlined on the following page. Important: Please observe the co-ordination system definitions. Mask Resist Basic material Shuttle Glass Exposing frame Mask thickness calculation: PCB single side lamination Film Resist PCB double side lamination PCB basic material thickness PCB basic material thickness + Resist thickness + 2 x Resist thickness + Resist protection foil thickness + 2 x Resist protection foil thickness + Film thickness & possible carrier + Film thickness & possible carrier + Addition = 0.20 mm + Addition = 0.20 mm = Mask thickness = Mask thickness 11/99 BA-FAPS600-e 18

4.4 Mask definitions Important: Please observe the co-ordination system definitions. Format L=200-440 x W=300-440 Format L=200-440 x W=440-510 Format L=440-510 x W=440-510 Throughput direction Throughput direction Throughput direction Format L=440-510 x W=510-560 Format L=510-560 x W=510-560 Format L=510-560 x W=560-610 Throughput direction Throughput direction Throughput direction No mask 11/99 BA-FAPS600-e 19

4.5 Registration mark examples Electroplated edge Throughput direction 20 mm free area (no drilled holes) Register mark : good Register mark : reduced option Register mark : with identification hole Register mark : poor Lamination edge Dirt 11/99 BA-FAPS600-e 20

4.6 Registration mark specifications (for exposure material and Film) Depending on the application, the following components can be used for register mark definition: 1. Hole recognition Around the actual hole in the PCB. Application: Internal layers, external layers and soldering masks. 2. Pad recognition Basic round, oval and rectangular copper track structures. Application: Soldering masks. 3. Structure recognition A section of the PCB layout is aligned to the to the exposure film Application: Soldering masks 4. Resit colour contrast recognition The alignment is made from the colour contrast in the "A" side exposure film. Application: Post-etching inner layers General guidelines and parameters: 1. The registration marks are located at the middle of the boards length, if not then they should be matched in the X plane to be the same distance from the outer edge of the blank board. 2. In order to achieve the highest possible registration accuracy, the register mark diameter should lay between 2 and 4 mms. 3. The registration marks surrounding areas should be free of any other drilled holes or similar register marks within a radius of 10mm. If this is impossible to achieve, then further tests must be carried out. a) ensure that there are the minimum obstructions within the image area, and b) if possible, any obstruction should be smaller than the register mark 4. The film registration marks may be either black or transparent. 5. It is advantageous to locate the registration marks inside the galvanised border. It is not recommended to have any copper around the registration holes as this will reduce the contrast. 6. By using reduction, it is possible to work with register marks that have been laminated. - The register marks should be as large (i.e. 4mm) as possible. - The processing depends on the type of resist being used (tenting, contrast etc.). - The space between the hole and the edge of the lamination should be as large as possible. - The register holes must never be part-laminated. - The board should be used as soon as possible after being laminated. - In any case tests should be carried out. 7. Boards that have soldering masks, must either be completely varnished or not at all. 8. Ensure that there is always sufficient contrast between the register marks and the surrounding areas. 11/99 BA-FAPS600-e 21

5. Operating sequence 5.1. Basic principles 5.1.1. FAPS 600 co-ordination system The FAPS 600 co-ordination system is as shown: Y FAPS 600 Durchlaufrichtung Bedienerseite X Correspondingly the film and exposure material co-ordinating system is also defined. Y Board Register marks Width Attention: Length Throughput direction X The board "length is always the X-axis dimension, i.e. in throughput direction. The board "width is always the Y-axis dimension, and lies parallel to the input width. 11/99 BA-FAPS600-e 22

5.2 General When operating the machine has 3 different operational modes. 5.2.1 Switching on the machine After switching on the main switch press the green " I switch. The display now shows "B. Bacher Graph... or "Operating station ready. Pressing the POWER (7) key activates the system checks. The mechanical and video self tests will now run. The lamp will be switched on. During the mechanical tests each tested component is displayed in the operating panels LCD. If a malfunction occurs the defective unit name is displayed. -Compressed-air monitoring -FU drive -Cover/transport plate opened -Pre-centering X-axis -Pre-centering Y-axis -Input belt below -Transport plate movement After the system checks (approx. 60 sec), the machine is now in the setting up mode. Setting the spindle frames The spindle frames are used for improving the contact pressure. Fitted to the front door is a selection switch with 4 different setting positions. Each switch position has been assigned a spindle position, which is interrogated via sensors [1-4].Position 1 indicates the cycle runs without using the spindles. Switch settings 2 4 differentiate between the 4 spindle settings at the highest level, whereas position 2 indicates the least space between the film and the board and position 4 signifies the largest space. The selection of the switch position depends on the thickness of the board and is set in accordance with the specific customer requirements. The selection of the switch position must be carried out before the alignment operation and a safe procedure is to reset the switch back 1 at the end of every production run. Attention: Glass can brake when spindle set-up too high. Setting up mode In setting-up mode a film is placed on the alignment table and then moved, under the control of the video system, into a position which will be used to align all the susequent boards in this job batch. This position is defined by the register marks described in section 3.4. The setting-up mode is terminated when the FAPS 600 transport system removes the film from the alignment table and places it onto the exposure area glass plate, where the film will be held securely in place by the vacuum from the surrounding vacuum channel. Automatic mode In automatic mode the boards are passed, when demanded, individually to the alignment table, where they are aligned and transported to the exposing area. There the board is laid on top of the film and held in place by the contact vacuum. The board is then exposed. After being exposed, the board is transported out of the exposure area. At the same time the next board to be exposed is moved into the exposure area. If a board can not be aligned (due to missing or dirty register marks), it will also be transported into the exposure area, however neither the vacuum or exposing systems will operate. When outputting such an unexposed board the exposure unit sends a signal which will be interpreted by one of the succeeding machines (turning/sorting machine). Stop mode The stop mode is used to terminate a job batch. When stop mode is selected, the mask, if present, is transported to the alignment table, the last board in the machine will be outputted and the film will be laid on the alignment table. Now the machine is ready for the next setting-up. 11/99 BA-FAPS600-e 23

Operating with 2 cameras above (standard model) for hole recognition. 5.3 Setting-up mode In order to start a new job, the film must first be aligned. Open the plexi-glass cover. Lay the film on the alignment table corresponding to the blue engraved markings. The film emulsion must be upwards. Press START (15) button to switch the video system on and the accompanying camera images will be seen on the monitor. The register marks must be brought into the middle of the video camera image. The upper cameras can be moved alopg the Y axis (loosen clamps). A final correction can be made by moving the film very slightly. Close the plexi-glass cover and confirm the film alignment with the ENTER (5) button. Thereupon the alignment process now begins, determining the position and size of the register marks etc. 5.4 Alignment mode When the alignment process is completed, the video parameter menu is displayed on the monitor, in which the operator can change the parameters as described in section 7.5. The selected parameters are confirmed by pressing the "Ready" function ENTER (5) button. Special feature: Pad/Structure recognition offers a suggestion for film alignment, which can be manually altered by the cursors in the video system key-pad. When the selected parameters have been confirmed with the ENTER (5) button, the film will be transported into the machine and fixed in place by the vacuum system. The system now switches into automatic mode and awaits the first board to be exposed. 5.5 Automatic mode During automatic mode the boards are moved into the machine consecutively, aligned on the alignment table, transported into the exposure area, exposed and transported out of the machine. An exception to this is the first board. Firstly this board is aligned. When the alignment has finished, the following report is shown on the display "Mask? Start. Wether a mask is required or not, is decided by the application. This report is the insert masking (see section 3.3.) demand. Open the plexi-glass cover and place the mask on the corresponding marks engraved in red. Close the cover, and the system will check the alignment. When this has finished, press the START (15) button and the first board together with the mask will be transported into the exposure station. The mask remains in the transport system for the duration of the job batch, and is only moved out when the stop mode is activated. 5.6 Stop mode When a job batch has been competed, press the STOP (17) button first and afterwards the STOP (17) and SHIFT (13) buttons simultaneously. The mask, last board and the film are then consecutively moved out by the machine. After having pressed the START (15) button, open the plexi-glass cover and remove the mask and film. Now the machine can either be prpared for the next job batch or switched off. 5.7 Switching off the machine To switch off the machine first press the POWER (7) button. This button switches of the lamp. The 90 second cooling down period, which must be adhered to, is shown on the display. After this cooling down period has expired, press the red " O switch and turn the main switch to the "O" position. 11/99 BA-FAPS600-e 24

5.8. Operational flow chart Button description page 28 POWER ON 3 Setting-up mode First make certain, that the machine is fully unloaded. Switch on the main switch, press button I (22), wait for Info B. Bacher etc. (approx. 5 sec), and after the report "Operating station ready" press POWER (7) button on the control panel. The automatic system test runs (60 sec.), then "Setting-up mode" is shown in the display. Select exposure program: Set-up new program (see 6.3) or change video parameters (see 7.1-7.3). Then press START (15) button.if no exposure value has been entered, the report "No exposure value!" will be displayed. Orientation option: Hole, structure, pad...? Has the orientation been selected? (see chapter 7) START Setting-up mode START (15) button switches the video system into the active setting-up mode. Open cover, place film onto the table corresponding to the blue format markings. The register marks should now be displayed on the monitor, if not, loosen the locks and readjust the cameras. Afterwards relock the cameras. It is possible to position (up / down) the cameras electromechanically. ENTER Acknowledge by using the video control panel left ENTER button (5) (Ready report) and the alignment process will start. Setting-up mode The film is aligned automatically (it is possible to change the alignment parameters, see 7.5). ENTER Move the cursor to the "Ready" position to acknowledge the selected parameters, after pressing the left ENTER (5) button the transport frame delivers the film to the exposing level. When the film vacuum is correct, the machine switches to the AUTOMATIC MODE 1 11/99 BA-FAPS600-e 25

5.8. Operational flow chart 1 Automatic-mode New board Board enters system Adjust tolerances? (Video 7.) 1st. board aligned? No 1st. board not aligned Remove board Yes Film output 2 Mask? No START Yes Position mask When a mask is required, lay this on the corresponding red markings (display: "Automatic 1st. PCB mask? = START") and after closing the cover the board will be newly aligned. Afterwards acknowledge by pressing the Start (15) button. Attention! If the cover was opened, although no mask was required, use ENTER (21) to de-select the mask vacuum. next board Board in order? No STOP Correct video parameters (7.5) Yes START last board Activate STOP-mode (last board still in machine) Stop-mode description see 6.2 point 7 2 11/99 BA-FAPS600-e 26

5.8. Operational flow chart 2 STOP Press STOP (17) button Stop process activated SHIFT + STOP Press SHIFT (13) and STOP (17) simultaneously Mask, film output Mask and film are transported to the alignment table, the last board is transported out of the system. Report: " PCB being transported / exposed PCB" START Remove film, remove mask Continue? Yes New job 3 No POWER The MH lamp switches off after a 10 sec. delay. Wait (90 sec.) for the cooling down period, then switch button 0 (24), then switch the main switch off. 11/99 BA-FAPS600-e 27

6. Operating panel functions and inputing exposing parameters 6.1. The Operating Panel 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 Video keypad for inputing video parameters Keypad for inputing exposure parameters Key assignments: "POWER (7) The POWER button switches the machine controls on and off. "UNASSIGNED BUTTON (8) The left unassigned button is used simultaneously with the ENTER (9) button in order to save the exposure program. When used simultaneously with the other unassigned button (18) this button acknowledges that reported errors have been manually cleared and the machine can continue its operation. "INTENSITY (11) Use this button to select whether semi or full exposure power should be used. The "INTENSITY button also resets to the default values when used simultaneously with the ENTER button (21). "SHIFT (13) The SHIFT button, when used in conjuction with another button, initiates a special function. When used in conjuction with the STOP button (17) the stop mode is activated. "START (15) This button is used to start a specific function i.e. restarting the automatic mode after an interruption (inputing new video parameters) or to start the setting-up mode. "STOP (17) This button is used to stop a specific function i.e. to interrupt the automatic mode to input new video parameters. "ENTER (21) The "Enter button is used to acknowledge error reports, saving programs as well as reloading the default settings (in conjuction with the INTENSITY button). 11/99 BA-FAPS600-e 28

Displays: "PROGRAM Shows the number of the selected exposure program (3 in total). An exposure program is comprised of the vacuum time parameters and illumination cycle power (energy required). "VACUUM The vacuum time is the time between starting the vacuum (contact vacuum) and start of exposure. The upper part of the LCD shows the time required, and the lower part shows the actual time taken so far. "COUNTER The counter shows the number of boards that have entered the machine. The upper part of the LCD shows the number of boards that have been inputed. The lower part shows the number of boards that have been exposed. "EXPOSURE The light details are shown here, (the illumination cycle duration depends on the intensity and time). The target value is shown in the upper part of the LCD and the actual value in the lower part. 6.2. Key board cursors functions for inputing the exposure parameters Additional cursors are to be found on the key board, these are marked with up and down arrows. There are two keys for each of the functions "FUNCTION, "PROGRAM, "VACUUM, or "EXPOSURE. The cursors are also used for increasing or decreasing required values, or selecting the required option. 0.1 must always be given as the minimum value. 11/99 BA-FAPS600-e 29

6.3. Individual Operating Panel LCD Segment Functions "FUNCTION The current program status is displayed here. The displays options are: 1. Setting-up mode This is displayed as long as the machine is in the setting-up mode. 2. Exposure program-saving Pressing the STOP button (17), interupts the current function. Then press one of the cursor buttons under "FUNCTION (6 or 9) until the report "SAVE PROGRAM is displayed. Now the corresponding parameters may be entered. Pressing the UNASSIGNED button (8) and ENTER (2) assigns the new exposure parameters to the selected exposure program and then saves them. Afterwards press one of the cursors again (6 or 9), until the previously activated mode is displayed again. Use the START (15) button to restart the normal operation. 3. Video parameters. Pressing the STOP button (17), interupts the current function. Then press one of the cursor buttons under "FUNCTION (6 or 9) until the report "VIDEO PARAMETERS" is displayed. The video parameters can now be altered (see section 7). Afterwards press one of the cursors again (6 or 9), until the previously activated mode is displayed again. Use the START (15) button to restart the normal operation. 4. Measurement function The measurment function is an alternative program to the machines automatic mode. Here you can compare the films and /or the boards to one another. The machine will be in the setting-up mode! Pressing the STOP button (17), interupts the current function. Then press one of the cursor buttons under "FUNCTION (6 or 9) until the report "MEASUREMENT FUNCTION" is displayed. Press the SHIFT (13) button and left unassigned (8) button to switch the video system on. The film or the board is laid against the corresponding marks, the cameras must be positioned on the register marks. If neccessary position the measurement window by means of the cursors (1-4). The cover will be closed. Attention! Press the unassigned button (18) to use the vacuum to fix the film or board in position. Now use the ENTER (5) button that corresponds to the display. After the video system has finished the scanning cycle, confirm the parameters by pressing the Ready function ENTER (5) button. Now the film/board can be removed and the comparison film placed in position. Press the START (15) button to begin the alignment. The comparison values will be displayed on the monitor. The cycle can be repeated. After pressing the STOP (17) button an alignment statistic will be displayed. Afterwards press on of the cursor (6 or 9) until the previously activated mode is displayed. Use the START (15) button to restart the normal operation. 5. Default settings Pressing the STOP button (17), interupts the current function. Press one of the cursor buttons under "FUNCTION (6 or 9) until the report "DEFAULT SETTINGS" is displayed. Simultaneously pressing the INTENSITY (11) and ENTER (21) buttons will now reload the default settings. This gives the basic settings to the exposure control which is dependent on the intensity. This is neccessary after a lamp change. After loading the defaults new tests to determine the exposure time must be made. Therefore resetting the defaults does not offer a concrete solution. Afterwards press one of the cursors (6 or 9) until the previously activated mode is displayed. Use the START (15) button to restart the normal operation. 6. Automatic mode Displayed as long as the machine remains in automatic mode. 7. STOP mode Press STOP and then SHIFT + STOP together. The machine will then load the mask first, the board second and thirdly the film. 11/99 BA-FAPS600-e 30

7. The Video System and its Parameters 7.1 Basic sequence The video system is controlled by a PC, that communicates with the machine SPS. The video system is responsible for aligning the register marks as well as controlling the X, Y, ϕ table, so that the film and board are perfectly registered one above the other. The corresponding board or film components are used for every register mark recognition application. The video system is controlled by a series of operator defined parameters. These parameters are found together in one menu displayed on the monitor. When this parameter menu is activated, help information is displayed on the monitor for the operator regarding the relevent options available for the selected parameter. The video system menu is displayed after the film is placed in the machine and can always be called up even during machine operations. 7.2 Calling-up the video parameters When in setting-up mode press button (6) until the function parameters are shown in the display. The parameter selection is displayed on the monitor. 7.3 The operating panel s video keypad The left (smaller) part of the operating panel s keyboard controls the video operations. The (2) and (3) buttons are used to move within the parameter menus. The (1) and (4) buttons are used to select the options. The "Enter button saves the new inputs. 1 2 3 4 5 7.4 Exiting the video menus After inputing the corresponding parameters and saving with ENTER after selecting "Ready", use the FUNCTION (9) button to return to the setting-up mode. 11/99 BA-FAPS600-e 31

7.5 Video parameter menu and sub-menus Select the parameters using cursor keys 1-4, and confirm with ENTER (5) Parameter setting options (depending on version) Alignment method: Holes off, holes, pad, structure Measuring standard: high low, normal, high, maximum Alignment trials: 3 0, 1, 2, 3, 1 to 2, 1 to 3, 2 to 3 Alignment tolerance: 20 µm 20 µm, 40 µm,..., 200 µm Spacing tolerance: 100 µm 50 µm, 100 µm,..., 5000 µm Positioning test: none none, Register 1, Register 2 Reset Save Ready Options Offsets Parameter 2 Options Measurement area: normal Alignment prediction:off Reference 1st. PCB: off setting options reduced, normal, enlarged off, on off, on Language English German, English, French, Italian Reset Ready Offset sub-menu setting options Total X: 0 µm -1000, -995... 995, 1000 Total Y: 0 µm -1000, -995... 995, 1000 Register 1 X: 0 µm + 0 µm -1000, -995... 995, 1000 Register 1 Y: 0 µm + 0 µm -1000, -995... 995, 1000 Register 2 X: 0 µm + 0 µm -1000, -995... 995, 1000 Register 2 Y: 0 µm + 0 µm -1000, -995... 995, 1000 Reset Ready Parameter 2 Measuring standard: high Alignment trials: 3 Alignment tolerance: 20 µm Spacing tolerance: 100 µm Positioning test: none Reset Ready 11/99 BA-FAPS600-e 32

7.6 Video Parameters The following contains a description of the video parameters. Each of these parameters occupies a position in the video parameter menu. Menu option Option Description Alignment mode off Drilled hole Structure Corresponds to the installed video components and the complete system requirement. You may select from various alignment options. An alignment option involves the video system in the following situations:- film placement and measurement area settings, - film centering, - measuring and aligning the 1st. board, - light settings, - aligning the following boards. The following basic option descriptions are shown as examples. Other function names might be used. The PCB will simply be mechanically aligned, an optical positioning correction option is not available. Circular register marks are to be found on both film and PCBs. The video system searches for and tries to align on the centre of the hole. Circular registration marks are located in the films and on the boards for the pre-alignment and freely located structures for the fine-alignment. After the pre-alignment the video system searches for layout film structures for the fine - alignment. Due to the reduced matching of the track layout structures with the layout film, the 1st. board is used as the reference. Additionally after the alignment of the first PCB the alignment record must be confirmed by the operator, or manually optimized by means of an offset adjustment. The pre-alignment settings are to be found in parameter menu 2.. Pad Simple registration marks are to be found on the film and on the boards, e.g. circular or square. The board registration marks are located on the upper side. The video system matches the PCB structure against the film structure in order to make the most accurate alignment possible. Measurement quality Low Normal High Maximum The measuring quality is the degree of matching between the register marks defined in the film and those found on the boards. The measurement requirements are minimal, so that fewer suitable register marks will be listed as unsuitable. This setting is only useful when used in conjunction with a coarse tolerance. The register mark requirements are higher than those of the "Low" option. Correspondingly, a higher accuracy is acheived. The register mark requirements are higher than those of the "Normal" option. Correspondingly, an even higher accuracy is acheived than before. The highest register mark requirements are set and because of the minimum tolerance settings, the highest accuracy is ensured. 11/99 BA-FAPS600-e 33

Menu option Option Description Alignment search Alignment tolerance The number of alignment searches that has been entered, tells the video system how often it must search, in order to improve on the present alignment. The setting controls the accuracy and the alignment time. If the required accuracy can not be acheived within the selected cycle count, neither the contact vacuum or the exposure will be allowed. 1, 2, 3 The completing of the selected number of alignment searches does not depend on the already achieved accuracy. 1-2, 1-3, 2-3 After the required minimum number of alignment cycles have been completed, it will be decided from the accuracy that has been achieved, if further alignments are necessary.. 20-200 µm in 20 µm increments Spacing tolerance 50-5000 in 50 µm increments Positioning check none Register 1, Register 2 The alignment tolerance sets the maximum allowed divergence between the PCB register mark positions and the register mark positions in the film. If the alignment tolerance can not be acheived, the board will not be exposed. The difference between the film and PCB register mark positions will be taken from this examination and entered in the menu option Spacing tolerance". The spacing tolerance sets the maximum difference between the film and PCB register marks. If the spacing remains exceeds the tolerance, then the board will not be exposed. The positioning check prevents the film or board from being rotated or being processed with the wrong side uppermost. Also after the alignment or film centering has been checked, it will see if a control mark can be located in the indicated registration. No positioning check will be undertaken. Alongside one of the registration marks, is located another, although smaller, mark, which prevents the film from being rotated when it is being positioned. After the board has been aligned, the corresponding cameras image area will check for the availability of the required mark. Options Offsets Parameter 2 Goes to option menu. Goes to offset menu. Goes to parameter menu 2 This menu option is only displayed when the selected alignment option works with 4 cameras. The settings in parameter menu 2 are simply for pre-centering. 11/99 BA-FAPS600-e 34

Sub-menu options Menu option Option Description Measuring area normal limited enhanced Measuring area marks a section of the camera image, where a search for register marks will take place. The complete camera image area will be used as the measuring area. The cameras image area is reduced. When placing the film you are required to set the measurement area. This option should be selected, when there are other similar registration structures close by the registration mark. The camera image area will be artificially enhanced. If the video system does not find a registration mark in the normal image area, the alignment table will be moved in the picture centre resolution direction, in order to locate a register mark in the surrounding areas. Alignment prediction Reference: 1st. board Language off, on off, on German, English, French, Italian When the alignment prediction is activated, the video system will pre-position the board. This position will be calculated from the average of the previous alignment positions and compensate for the resulting deviations. If there are strong conturing deviations requiring an enlarged measurement area, this option can reduce the alignment time, as it does not have to search the complete enhanced area first. With this option you can select, wether the spacing tolerance is relevant to the first board or the film. Alignment options (i.e. structures), that will use the first boards register marks as a reference, work automatically with "Reference: 1st. board" and do not need this setting. After selecting the language, all reports and menu entries will be in the selected language. Offset sub-menu Menu option Option Description Complete X/Y Register 1/2, X/Y If the exposure results are not optimum, there could be various reasons for this.a fine correction to the alignment position can be made by entering an offset, without unloading the machine. The following boards will be aligned to the entered values, relative to the film. This correction concerns both register marks and can not compensate for a rotation error. Rotation errors give different offsets to both register marks. This sort of error can be corrected by entering the corrections in this box. 11/99 BA-FAPS600-e 35