Thin Film Products
e-vap 3kW Evaporation Sources e-vap Miniature Source 0413-0004-1002 3kW electron beam evaporation source. Flange mounted on 2.75 diameter CF type flange with HV and Water feedthroughs included. Fits through standard 1.38 ID port. UHV compatible to 2x10E-11 Torr. e-vap Mighty Source 0413-0004-4002 4 pocket rotary 2cc electron beam evaporation source. Small footprint just 2.4 H x 4.1 L x 2.8 W. High Vacuum compatible to 2x10E-8 Torr. e-vap 3kW specifications Maximum power Operating Voltage Beam Current Water Flow XY sweep 3,000 Watts Approximate -5,000 VDC Zero to 600 ma.62 gpm @65 psi Mighty Source only. Up to 1 ampere 0-50 Hz
e-vap Fixed Pocket Sources e-vap Fixed Frame 10kW 0401-0004-1007 Single fixed pocket 7cc electron beam evaporation source. 0401-0004-1015 Single fixed pocket 15cc electron beam evaporation source. 0401-0004-1025 Single fixed pocket 25cc electron beam evaporation source. 0401-0004-1040 Single fixed pocket 40cc electron beam evaporation source. 0401-0004-1075 Single fixed pocket 75cc electron beam evaporation source. 0401-0004-1100 Single fixed pocket 100cc electron beam evaporation source. e-vap 10kW specifications Maximum power Operating Voltage Beam Current Water Flow XY sweep Size Vacuum 10,000 Watts -6kV to -10kV Zero to 1 A 3 gpm @65 psi 0-200 Hz 6.60 L x 4.90 W x 2.10 H 10 lbs to 2x10E-11 Torr
e-vap Rotary Pocket Sources e-vap Large Frame 10kW 0403-0004-4007 High Vacuum 4 pocket 7cc electron beam evaporation source. 0403-0004-4015 High Vacuum 4 pocket 15cc electron beam evaporation source. 0403-0004-4025 High Vacuum 4 pocket 25cc electron beam evaporation source. 0403-0004-4030 High Vacuum 4 pocket 30cc electron beam evaporation source. 0403-0004-6007 High Vacuum 6 pocket 7cc electron beam evaporation source. 0403-0004-6012 High Vacuum 6 pocket 12cc electron beam evaporation source. 0403-0004-1150 High Vacuum Carousel pocket 150cc electron beam evaporation source. 0403-5004-4015 UHV 4 pocket 15cc electron beam evaporation source. e-vap 10kW specifications Maximum power Operating Voltage Beam Current Water Flow XY sweep Size Vacuum 10,000 Watts -6kV to -10kV Zero to 1 A 3 gpm @65 psi 0-200 Hz 6.20 L x 5.62 W x 3.25 H 27 lbs High Vacuum version to: 2x10E-8 Torr UHV version: to 2x10E-11 Torr
e-vap Rotary Pocket Sources e-vap Extra Large Frame 15kW 0405-0004-4040 High Vacuum 4 pocket 40cc electron beam evaporation source. 0405-0004-4060 High Vacuum 4 pocket 60cc electron beam evaporation source. 0405-0004-4075 High Vacuum 4 pocket 75cc electron beam evaporation source. 0405-0004-6025 High Vacuum 6 pocket 25cc electron beam evaporation source. 0405-0004-6040 High Vacuum 6 pocket 40cc electron beam evaporation source. 0405-0004-3100 High Vacuum 3 pocket 100cc electron beam evaporation source. 0405-0004-1400 High Vacuum Carousel pocket 400cc electron beam evaporation source. e-vap 15kW specifications Maximum power Operating Voltage Beam Current Water Flow XY sweep Size Vacuum 15,000 Watts -6kV to -10kV Zero to 1.5 A 3 gpm @65 psi 0-200 Hz 8.50 L x 6.87 W x 3.50 H 40 lbs High Vacuum version to: 2x10E-8 Torr
e-vap Custom Mount Sources e-vap Flange Mounted Complete Source Packages 6 CF Type Mount Mighty Source packages 8 CF Type Mount Fixed Frame sources 10 CF Type Mount Large Rotary Frame sources Specials Contact us about your specific requirements
Re-Vap Resistive Evaporation Sources Re-Vap 900 Source 0413-5004-1000 900 Watt resistive evaporation source. Includes universal clamp holders that accept filament, boat and basket elements. Mounted on 2.75 CF type flange with shielding. Includes one tungsten filament coil (installed). Re-Vap 3,000 Source 0413-7500-1000 3,000 Watt (600 Ampere) resistive evaporation source kit. Includes high current feedthroughs, high current Z-Bar set, rigid clamp set and airside power connectors. Z-Bar system allows easy adjustment for all boat and filament types with various element lengths.
e-vap and Re-Vap Power Supplies Power Supplies designed specifically to maximize your vacuum thin film coating process 0413-2504-0 900 Watt resistive evaporation power supply 7007-3032-2 3 kw e-vap power supply. Includes built in source control and filament transformer. 220 VAC input - 1Ø 7007-6032-2 6 kw e-vap power supply. 220 VAC input - 3Ø 7007-1032-2 10 kw e-vap power supply. 220 VAC input - 3Ø 7007-1532-2 15 kw e-vap power supply. 220 VAC input - 3Ø 7007-6032-4 6 kw e-vap power supply. 400 VAC input - 3Ø 7007-1032-4 10 kw e-vap power supply. 400 VAC input - 3Ø 7007-1532-4 15 kw e-vap power supply. 400 VAC input - 3Ø e-vap and Re-Vap Power Supply Specifications 3kW e-vap power supply Input 220 VAC single phase 50/60 Hz, 18 Amperes Output 0 to -5,000 VDC Controls Front panel HV on/off, Filament on/off, emission adjust potentiometer Arc Suppression Includes fast-arc recovery system Metering Digital Voltage and Emission current Size 19 rack mount 7.5 H x 19 Deep 65 lbs 6, 10 and 15kW e-vap power supply Input 220 VAC 3-phase 50/60 Hz 30, 40, 60 Amp 400 VAC 3-phase 50/60 Hz 15, 20, 30 Amp Output 0 to -10,000 VDC 0 to 0.6 A (6kW) 0 to 1 A (10kW) 0 to 1.5 A (15kW) Arc suppression Includes fast-arc recovery system Metering Digital Voltage and Emission current Size 19 rack mount 10.5 H x 21 Deep 75, 90 and 100lbs 6kW, 10kW and 15kW
e-vap Controllers and Monitors 7020-0150-1 Source control module package. Includes remote mount filament transformer and complete cable kit. 7020-0200-0 Programmable Sweep Controller. 7020-0300-0 Crucible pocket indexer. Works with all MeiVac rotary sources. 7020-0400-0 Thin film deposition monitor. 7020-0500-0 Thin film deposition controller 7020-0450-0 Low profile crystal sensor package. 2.75 CF type flange. e-vap Controller Specifications e-vap Source control Module 7020-0150-1 Input 220 VAC single phase, 8A Output 12 VAC 0 to 70 Amp high frequency Meter Large face color graphic display. I/O Analog and Digital I/O Filament transformer Remote or direct mount. Includes cable kit Size ½ rack (8.5 ) x 5.25 H x 14 deep 20lbs Input Output Meter I/O Size e-vap Programmable Sweep Control 7020-0200-0 115 VAC / 220 VAC, 3A 5 Amp, 200 Hz Large face color graphic display. Rs-232 or Digital I/O ½ rack (8.5 ) x 5.25 H x 14 deep 11lbs
Re-Vap Accessories and Spare Parts 900 Watt Re-Vap Spares 0413-5042-0 Re-Vap Filament coil Tungsten 0413-0282-0 Re-Vap Basket Tungsten 0413-0272-1 Re-Vap Crucible Alumina Oxide 0413-0272-2 Re-Vap Crucible Boron Nitride 0413-0272-3 Re-Vap Crucible Quartz 3,000 Watt Re-Vap Spares e-vap Accessories and Spare Parts 3 kw e-vap Spares 0413-0222-0 3 kw HV Insulator 0413-0232-0 3 kw Beam Former Insulator 0495-0102-0 3 kw Filament Package of 5 each 6 to 15 kw emitter spare parts 0497-0004-0 HF Emitter Assembly. Fixed Frame and Large Frame. 0197-0004-1 HF Emitter Assembly. Extra Large frame 0497-0102-0 HF Emitter HV Ceramic 0497-0172-0 HF Filament Package (5 per package)
e-vap Crucible Liners Crucible Primary part numbers Dimensions 0495-0004- 2cc Crucible Liner Top diameter.74 x.37 h 0495-0014- 6cc Crucible Liner Top diameter.97 x.59 h 0495-0024- 7cc Crucible Liner Top diameter 1.13 x.53 h 0495-0034- 15cc Crucible Liner Top diameter 1.47 x.68 h 0495-0044- 25cc Crucible Liner Top diameter 1.72 x.83 h 0495-0054- 30cc Crucible Liner Top diameter 1.70 x 1.00 h 0495-0064- 40cc Crucible Liner Top diameter 2.00 x 1.00 h 0495-0074- 60cc Crucible Liner Top diameter 2.28 x 1.16 h 0495-0084- 75cc Crucible Liner Top diameter 2.47 x 1.25 h 0495-0094- 100cc Crucible Liner Top diameter 2.59 x 1.56 h Crucible Material part number Suffix Selection chart -1 Electrical Grade Graphite -2 Vitreous Coated Graphite -3 FabMate Coated Graphite -4 Molybdenum -5 Tungsten -6 Boron Nitride -7 Aluminum Oxide -8 Copper Part number Example 0495-0014-2 vitreous graphite 6cc liner 0495-0014- 2 MeiVac Part Crucible Size6cc Material Vitreous Graphite