PHOENIX Finds every leak. Now with an even fi ner nose.

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180.86.02 PHOENIX Finds every leak. Now with an even fi ner nose.

PHOENIX Leak Detector The new generation of leak detectors. Where precision meets speed, with your convenience in mind. Often the success of any business depends on quality, and having the right tools and equipment is critical to ensuring top performance and output across R&D departments, as well as in fast-paced production and manufactur- ing facilities. We also see applications becoming more specialized, processes being more demanding, yet time for analysis and testing becoming less. However, when it comes to vacuum system leak detection you can rely on Leybold and the newest generation of PHOENIX leak detectors, where precision meets speed, with your convenience in mind. A new degree of precision Whether you are in a research lab, or production of high-class goods, quality depends on how accurately you detect deviations. Now, help is at hand: the new PHOENIX generation delivers the highest helium sensitivity for unbeatable reliability and stability. A new level of speed If you are looking to accelerate the leak test of your system or speed up quality control in manufacturing, time is of the essence. The new PHOENIX leak detectors feature an improved measurement system with faster response times than ever before. A new dimension of comfort and choice The new PHOENIX offers a choice of three models, so you are sure to fi nd the right leak detector for your needs, with simple operation, integrated touchscreen and Wi-Fi options. New software functions let you add an external display to monitor and run measurements from anywhere for added fl exibility. And thanks to internal and external data logging, no measured value is ever lost.

The new PHOENIX leak detector really wins you over with its outstanding accuracy, great performance and ease of use. It s a leak detector that you enjoy working with because it s intuitive and gets you every leak. A touch easier Say goodbye to complicated menus on illegible displays. The new PHOENIX has state-of-the-art multicolored touchscreens with an intuitive menu structure. Hello, ease of use! Dr Sina Forster, Product Manager Leybold No fuss: easy login The new PHOENIX models are the only portable detectors on the market featuring easy login via Wi-Fi. Simply use your smartphone or tablet no software or app to download. Extremely sensitive All PHOENIX leak detectors feature an improved measurement system, with a new ULTRA mode for excellent helium sensitivity. Even the smallest leaks can be detected rapidly. The result: faster response times than ever before.

PHOENIX Leak Detector Dozens of applications. Three strong solutions. Whoever works with vacuum needs a leak detector. Ideally one that delivers precise results, time after time. One that offers easy data logging as well as remote operation. One that stands out by fi tting in, seamlessly, to your system. Whatever your application, our new PHOENIX series has you covered. Discover all the advantages of the latest generation! Research & Development Universities and institutes Research centers Labs R&D equipment manufacturing Compact systems enable optimum use of available space High mobility and fl exibility Easy and intuitive operation Intelligent reminders and convenient data logging options Change easily between different users: Set up user profi les and log in quickly Change easily between different experiments: Create the test set-up and save up to 10 parameter sets Easy data analysis and documentation using a variety of interfaces Your best bet: PHOENIX Quadro or Vario on a mobile cart UHV Applications Particle accelerators UHV components and systems Space simulation Smallest detectable leak rate of 5x10-12 mbar l/s for all models Highest accuracy and reliability of measurements Very low background and intelligent zero function for quick measurements of low leak rates High pumping speed for fast measurements when it comes to large volumes Dry versions meet the need for oil-free systems and processes PHOENIX Vario or Magno dry are excellent choices

The PHOENIX offers all the necessary connections for accessories including the sniffer line or the partial fl ow system. Furthermore, it has easily accessible USB ports and additional controlling interfaces. We offer a range of interface modules that offer suitable communication standards for different needs. Chose between an I/O module, Profi bus, Profi net, Devicenet or Ethernet/IP. The PHOENIX line has an improved service and maintenance concept. The fi lter can be changed from the outside, without removing the cover. This lets you save time and focus on your measurements! Industrial Applications Industrial systems and machinery Metallurgy Industrial furnaces Electrical industry Highest pumping speed is perfectly suited for large volumes Harsh processes make robustness relevant: Proven industrial design with rugged components stands up to heavy use Big systems require remote control options: Use the RC 310 or the Wi-Fi function and log in with a smartphone or tablet Fast operation: Quick run-up and ready to start within seconds Your perfect fit: PHOENIX Vario Industrial production Analytical instruments Medical devices Food and packaging Automotive and aviation Meet high quality expectations: Reliable measurements for consistent and highly accurate test results Ensure the highest level of safety: Reliable pass-or-fail decisions Greater effi ciency: Save parameter sets for different test parts and upload them quickly and easy Convenient communication options and various interfaces Highest helium pumping speed for fast cycling PHOENIX Quadro dry is the ideal nose here Semiconductor Semiconductor fabrication Flat panel display Time-saving measurements: Quick to start up, ready to go within seconds Small systems offer highest mobility in large facilities Outstanding accuracy and repeatability for reliable leak rate measurements Choose PHOENIX Quadro dry or PHOENIX Vario

PHOENIX Leak Detector Find your perfect PHOENIX To become a top dog, you have to beat the rest of the pack. Meet our noses and their unbeatable features. Then decide which one suits your application best. The new PHOENIX Quadro and Quadro dry Available with oil-sealed or dry backing pump Detection sensitivity improved by turbo pump s optimized helium pumping speed Pumping speed during evacuation from 2.5 m³/h up to 3 m³/h More data flexibility: USB and bus interface options Technical data PHOENIX Quadro PHOENIX Quadro dry Smallest detectable helium leak rate Vacuum operation mbar l s -1 5 10-12 Sniffer mode mbar l s -1-9 1) < 1 10 Smallest detectable hydrogen leak rate Vacuum operation mbar l s -1 1 10-8 Sniffer mode mbar l s -1 < 1 10-7 Units of measurement (selectable) Pressure Leak rate mbar, Pa, atm, Torr mbar l s -1, Pa m3 s -1, Torr l s -1, atm cc sec -1, sft 3 /yr Sniffer mode ppm, g/a eq, oz/yr eq Leak rate display area mbar l s -1 1 10-12 to 1 10-1 Max. inlet pressure mbar 15 with partial flow pump set mbar 1000 Pumping speed during evacuation process 50 Hz m 3 h -1 2.5 3.0 60 Hz m 3 h -1 3.0 3.0 Helium pumping speed in vacuum mode GROSS Modus l/s 0.4 0.04 FINE Modus l/s 1.2 1.2 ULTRA Modus l/s > 3.1 > 3.1 Time constant of the leak signal (blank flanged, 63% of the final value) s < 1 Run-up time (after switching on) s 110 Mass spectrometer 180 magnetic sector field Ion source 2 yttrium/iridium long-term cathodes Detectable masses amu 2, 3 and 4 Test port Inlet flange DN 25 ISO-KF Dimensions (W x H x D) mm 495 x 475 x 318 Weight kg 41 35 Available languages English, German, Chinese, Japanese (Katakana), Korean, Russian, French, Italian, Spanish and Polish Order data PHOENIX Quadro PHOENIX Quadro dry Part no. Part no. PHOENIX Quadro EU 230 V, 50/60 Hz 250000V02 PHOENIX Quadro US 115 V, 60 Hz 251000V02 PHOENIX Quadro JP 100 V, 60 Hz 251100V02 PHOENIX Quadro 100 240 V, 50/60 Hz 250001V02 PHOENIX Magno EU 200 230 V, 50/60 Hz PHOENIX Magno JP/US 100 115 V, 50/60 Hz PHOENIX Vario 1) Depending on the used sniffer line and ambient conditions. Leak rate display after zero: 1 10-8 mbar l/s when using the SL 300 or SL 301 Sniffer line.

The new PHOENIX Magno and Magno dry Two brand-new additions to the series Our powerhouses with a higher backing pump speed Perfectly suited for larger test volumes Can be moved on a cart or used for fixed operations The new PHOENIX Vario The modular version with a much smaller housing Space-saving and portable, very light in weight Ideal for systems integration or mobile operations (on a cart) Direct electrical connection to the external backing pump possible PHOENIX Magno PHOENIX Magno dry PHOENIX Vario 5 10-12 5 10-12 < 1 10-9 1) -9 1) < 1 10 1 10-8 < 1 10-7 1 10-8 < 1 10-7 mbar, Pa, atm, Torr mbar l s -1, Pa m 3 s -1, Torr l s -1, atm cc sec -1, sft 3 /yr 15 17 mbar, Pa, atm, Torr mbar l s -1, Pa m 3 s -1, Torr l s -1, atm cc sec -1, sft 3 /yr ppm, g/a eq, oz/yr eq ppm, g/a eq, oz/yr eq 1 10-12 to 1 10-1 1 10-12 to 1 10-1 15 15 1000 1000 5 6 Depending on chosen backing pump < 8 < 7 > 3.1 < 3.5 < 2 > 3.1 > 3,1 < 1 < 1 110 110 180 magnetic sector field 180 magnetic sector field 2 yttrium/iridium long-term cathodes 2 yttrium/iridium long-term cathodes 2, 3 and 4 2, 3 and 4 2 x DN 25 ISO-KF 25 ISO-KF 25 ISO-KF 521 x 679 x 371 486 x 380 x 313 67 57 25 English, German, Chinese, Japanese (Katakana), Korean, Russian, French, Italian, Spanish and Polish English, German, Chinese, Japanese (Katakana), Korean, Russian, French, Italian, Spanish and Polish PHOENIX Magno PHOENIX Magno dry PHOENIX Vario Part no. Part no. Part no. 350000V02 352200V02 350001V02 351101V02 250002V02

Meet the all-new PHOENIX series. Your benefits at a glance: Highest accuracy and reliability thanks to proven measurement system Fastest helium pumping speed allows most effi cient measurements Consistency and convenience: Save all parameters and copy them to other PHOENIX leak detectors Innovative touchscreen with intuitive menu structure Handy and portable: very small dimensions and low weight Leybold GmbH Bonner Str. 498 50968 Cologne, Germany T +49 (0) 221-347-0 F +49 (0) 221-347-1250 info@leybold.com www.leybold.com www.phoenix-series.com Log in using Wi-Fi on your smartphone or tablet. No app or software needed! Easy internal and external data logging: no measured values are ever lost HDMI interface lets you check leaks from anywhere by adding external displays Find the perfect fi t: three different models to better suit your needs Territory CTR 180.86.02 Printed in Germany on chlorine-free bleached paper Technical alterations reserved