An Ultra-low noise MEMS accelerometer for Seismology

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QuietSeis TM An Ultra-low noise MEMS accelerometer for Seismology aurelien.fougerat@sercel.com laurent.guerineau@sercel.com April 10 th, 2018

SERCEL Introduction French company founded in 1956, subsidiary of CGG More than 1500 employees in 8 countries and 14 sites Market leader in seismic instrumentation for O&G exploration in marine, land and transition zones Longstanding culture of technological innovation 2

Context Introduction Sensors for low frequency seismic applications (<2Hz): - Geophones (10Hz, ~5Hz) - Seismometers (1-2Hz) - Force Balance Accelerometers (FBA) bulky, costly, power consuming, not deemed industrial.. phase rotation at low frequency, manufacturing tolerances, aging, environmental conditions: amplitude & phase distortions detrimental to the fidelity of the signal Phase (degrees) 0-30 -60-90 -120-150 Phase response 2Hz seismometer (damping 0,7) -180 0,01 0,1 1 Frequency (Hz) 10 100 3

Introduction Context MEMS accelerometers often perceived as too noisy at low frequency because of 1/f noise - True for most of the seismic MEMS on the market Latest generation of digital closed-loop MEMS accelerometer, initially designed for seismic imaging, exhibits very good noise performances at low frequency. 4

MEMS accelerometer Some benefits of MEMS accelerometer No sensor leveling required, can be used in any orientation Measures its own tilt (DC response) Compact and very low power Digital closed-loop architecture: - Frequency response flat and highly stable in amplitude and phase (down to DC): Perfect time synchronization of events between sensors - Very low distortion - Very fast clip recovery time 5

MEMS Noise measurements Noise floor for seismic imaging (Lainé, 2014) Noise measured above 1Hz in LSBB (France) <15ng/sqrt(Hz) above 10Hz 1/f noise at low frequency not characterized 6

MEMS Noise measurements Low frequency noise measurement Basement of office building in periurban area Vibration isolation platform (f 0 ~2,7Hz) Soundproof acoustic chamber Data acquired at night over the course of several months Raw data processed using ANSS/USGS Matlab script: ANSS_noise_rms_rev4.m 7

MEMS Noise measurements Low frequency noise measurement 2 QS-DB boards: Vertical and horizontal QuietSeis MEMS accelerometer UART serial data transmission to external device 10 Hz and 5Hz geophone channels low noise 24 bits / ADC Velocity data converted in acceleration QS-DB 8

MEMS Noise measurements Low frequency noise measurement 5Hz 10Hz Noise limited by ambient vibrations above ~2Hz MEMS 1/f noise lower than : 10Hz-geophone noise below ~2Hz 5Hz-geophone noise below ~0,1Hz NHNM down to ~0,1Hz 9

MEMS Noise measurements Low frequency Dynamic Range Dyn. Range 133dB Full scale +/- 5 m/s² pk (3,5m/s² rms) Dyn. Range 126dB 0,02-2Hz Full scale @ +/-13m/s² pk : Vertical MEMS Dyn. Range ~131dB 10

MEMS Noise measurements Comparative testing vs. Trillium Compact broadband seismometer in a low noise test site is being scheduled with a French seismology institution. Test site Noise PPSD (vertical) Trillium Compact QS-DB 11

Earthquake detection IRAN-IRAK border M7.4 earthquake Nov 12th,2017 18:18:19 (UTC) 12

Earthquake detection Earthquake ground acceleration (Clinton, 2002) MEMS Full scale 5m/s² pk MEMS Noise floor (typ.) Vertical axis MEMS accelerometer (Power spectrum) Natural frequency of isolation platform 13

Earthquake detection t=180s 18:25:09 in NANTES P-wave @ 18:25:06 in CLF t=515s 18:30:24 in NANTES S-wave @ 18:30:35 in CLF Good correlation with CLF seismic station!

Conclusion A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for very weak signals and very low frequency measurements. A noise floor below NHNM down to 0.1 Hz has been demonstrated. New possibilities for low frequency, weak signal applications: Ambient seismic noise imaging and monitoring Seismology - Replacement of Force Balance Accelerometers, seismometers, Structural Health Monitoring of large structures - Operational Modal Analysis using ambient vibrations Active stabilization platforms in low noise or low-g environments 15

Bibliography References Clinton J.F., Heaton T.H., 2002, Potential Advantages of a Strong-motion Velocity Meter over a Strong-motion Accelerometer: Seismological Research Letters Volume 73, Number 3, 332-342. Lainé J., 2014, A high-sensitivity MEMS-based accelerometer: The Leading Edge 33/11, 1234-1242 Observatoire GEOSCOPE (doi: 10.18715/GEOSCOPE.G), Centre de Données de l'institut de Physique du Globe de Paris. http://geoscope.ipgp.fr/index.php/fr/catalogue/description-d-un-seisme?seis=us2000bmcg 16