MEMS Technologies Dresden - Product Development and Fabrication at IPMS Dresden
MEMS Technologies Dresden - Product Development and Fabrication at IPMS Dresden Michael Müller, Matthias List Outline FhG-IPMS at a glance R&D and foundry service @ IPMS Technology toolset and MEMS clean room @ IPMS Examples of MEMS production @ IPMS
1992 Foundation of the Dresden part of the Fraunhofer Institute for Microelectronic Circuits and Systems (IMS) 2003 Foundation of the Fraunhofer Institute for Photonic Microsystems (IPMS) 2007 Launch of a new clean room IPMS at a Glance 2010 Budget: Staff: 26 Mio (9 Mio from industrial projects) 250 employees & scientific assistants
R&D and Foundry Service @ IPMS Micro Scanner Devices Spatial Light Modulators Core competences @ IPMS Micro Scanner Devices MEMS scanner for: 1D & 2D-scanner Projection displays Grating spectrometer Optical path length modulator µmirror arrays for: Mask writing systems Phase shift for image correction Programmable illumination (microscope) Bulk MEMS technology Spatial Light Modulators Surface MEMS technology (thin film) & Monolithic integrated CMOS
Micro Scanner Devices MEMS scanner for: 1D & 2D-scanner Projection displays Grating spectrometer Optical path length modulator R&D and Foundry Service @ IPMS Spatial Light Modulators µmirror arrays for: Mask writing systems Phase shift for image correction Programmable illumination (microscope) Long-term gained expert knowledge Product & MEMS technology development Bulk MEMS Technology Surface MEMS Technology (thin film) R&D from idea to prototype Small & medium volume production Characterization & Test MEMS-Technology Competency
Micro Scanner Devices MEMS scanner for: 1D & 2D-scanner Projection displays Grating spectrometer Optical path length modulator R&D and Foundry Service @ IPMS Spatial Light Modulators µmirror arrays for: Mask writing systems Phase shift for image correction Programmable illumination (microscope) Long-term gained expert knowledge Product & MEMS technology development Bulk MEMS Technology Surface MEMS Technology (thin film) R&D from idea to prototype Small & medium volume production Characterization & Test MEMS-Technology Competency MEMS Foundry
R&D and Foundry Service @ IPMS Micro Scanner Devices MEMS scanner for: 1D & 2D-scanner Projection displays Grating spectrometer Optical path length modulator Spatial Light Modulators µmirror arrays for: Mask writing systems Phase shift for image correction Programmable illumination (microscope) Services from R&D to fabrication Single process steps Process modules Complete processes Customized devices in IPMS Technologies Processes on customers demand What markets are we targeting? R&D intensive services & products Niche markets & products Small & medium volume MEMS-Technology Competency MEMS Foundry
MEMS Clean Room 1500 m 2, class 10 6 Wafer line 0.5 µm structure size for MEMS 5 / 24 shift operations for R&D & pilot fabrication MEMS Technologies Dresden PPS based planning and operating ISO 9001:2008 certification
Technology Toolset @ IPMS MEMS/ MOEMS CMOS & active Silicon Bulk MEMS 3-dim. structures in silicon Applications: MEMS Scanner Pressure Sensor Surface MEMS Thin film surface MEMS MEMS on CMOS Applications: Spatial Light Modulator High Voltage CMOS Photodiodes ph- Sensor
Surface MEMS Technology Fabrication of MEMS structures on the wafer surface for monolithic integration of CMOS & MEMS Spatial light modulators @ IPMS Analogue deflection UV application (248nm) Planarity< 10nm @ 16µm Pitch row line n-1 row line n column lines m m+1 m+2 m+3
Surface MEMS Technology 3rd Generation Spatial Light Modulator @ IPMS 2- level architecture Actuator: Mirror: > amorphous materials > drift free operation > High deflection up 5 µm > 2- axis deflection > Al- Alloy, a-si, stacks > large & tunable reflection Hinge Mirror Mirror Hinge Mirror Hinge
Bulk MEMS Technology Fabrication of sensors & actors out of the wafer s material (bulk) itself MEMS scanning mirrors @ IPMS 1D & 2D deflection Rotational & translational deflection Resonant & quasi-static actuation MEMS-Scanner @ IPMS 2D- MEMS Scanner: rotational, resonant 1D- MEMS Scanner: translational, resonant
Examples of MEMS Production @ IPMS Micro mirror arrays as programmable mask Barcode reading systems based on micro scanning mirrors Piezo- resistive pressure sensors for automotive applications
IN A NUTSHELL IPMS is your partner for MEMS & MOEMS Technology Bulk & Surface MEMS technology From R&D to fabrication
THANK YOU FOR YOUR ATTENTION! Hall 1, Booth 1.071 or Michael Müller michael.mueller@ipms.fraunhofer.de Matthias List matthias.list@ipms.fraunhofer.de 0049 (0) 351 8823 130 or http://www.ipms.fraunhofer.de