Technical Procedure for Scanning Electron Microscope/ Energy Dispersive X-Ray System (SEM/EDX) for non-gsr Casework

Similar documents
University of Minnesota Nano Fabrication Center Standard Operating Procedure

Scanning Electron Microscopy (FEI Versa 3D Dual Beam)

Operation Procedure for Phillips XL30 ESEM

1.2 Universiti Teknologi Brunei (UTB) reserves the right to award the tender in part or in full.

INCA ENERGY EDS TRAINING. System Block Diagram. INCA Energy Software. Xiang Yang EM SMU. Navigators. Point & ID Navigator.

2.1. Log on to the TUMI system (you cannot proceed further until this is done).

Kratos AXIS Ultra DLD X-ray Photoelectron Spectrometer Instructions

FIB Operating Procedure. Effective Date: 08/14/2012 Author(s): Jiong Hua Phone:

PHI 5000 VersaProbe TM Operator s Guide

Standard Operating Procedure II: EDS (Bruker Flat-Quad)

SEM- EDS Instruction Manual

The PHI VersaProbe operates with two essential software programs: PHI Summitt and Vacuum Watcher. A third program, MultiPak, handles data reduction.

Standard Operating Procedure of nanoir2-s

Dektak Step by Step Instructions:

CHECKLIST FOR VERIOS OPERATION 1. GENERAL The SEM lab is used assuming "operating room" cleanliness, i.e., the SEM lab is a high visibility lab and

JEM 3010 Manual (2011 Edition)

FEI Strata Dual-beam FIB

Figure 1. MFP-3D software tray

Approved by: / / R. Battaglia 12/16/2016

University of Minnesota College of Science and Engineering Characterization Facility Ganesha SAXSLAB User manual

FEI FIB Focused Ion Beam

using the Scott A Speakman, Ph.D Center for Materials Science and Engineering at MIT

Vasudevan Agilent 1100 Series HPLC w/ DAD & FLD Detector (nonbuffer

Data Collection Using APEX3. March 30, Chemical Crystallography Laboratory

READ THIS FIRST. Morphologi G3. Quick Start Guide. MAN0412 Issue1.1

Quick Start Bruker Dimension Icon AFM

DektakXT Profilometer. Standard Operating Procedure

Using the Agilent for Single Crystal Work

AFM1 Imaging Operation Procedure (Tapping Mode or Contact Mode)

University of Minnesota Minnesota Nano Center Standard Operating Procedure

HRXRD Analysis of Epitaxial Thin Films

Liquid Chromatography- Mass Spectrometer Manual

Standard Operating Procedure for FEI Helios 660 NanoLab Part I: SEM Version

1. Check the accelerating voltage, must be at 200 kv (right screen), HT (µa) (left panel) at and Emission (left panel) at

CytoFLEX Flow Cytometer Quick Start Guide

BitWise (V2.1 and later) includes features for determining AP240 settings and measuring the Single Ion Area.

TL-2900 AMMONIA & NITRATE ANALYZER DUAL CHANNEL

set. Important Note: the system must be calibrated before meaningful quant results can be obtained!

OPERATION MANUAL. TECHNOS Co.,Ltd. Total Reflection X-ray Fluorescence Spectrometer

LUMIGEN INSTRUMENT CENTER X-RAY CRYSTALLOGRAPHIC LABORATORY: WAYNE STATE UNIVERSITY

Personal Protective Equipment Wear nitrile gloves, lab coat, and safety glasses as a minimum protection, unless otherwise indicated.

Florida State University Thayumanasamy Somasundaram

JEM 2100 Manual. Operation and Basic Alignment Instructions. Check the vacuum levels (power supply closet) Column (blue scale): < 2.

1.0 ThermoNicolet Nexus 670 FTIR Spectrometer Instructions

CHA EVAPORATOR. User guidelines. p.1. by Carlos Manzanedo. Last revised: 10/05/2000

Indiana Center for Biological Microscopy. Zeiss LSM-510. Confocal Microscope

Digital Video Recorder

STANDARD OPERATING PROCEDURE: ASYLUM MFP-3D AFM

E X P E R I M E N T 1

Waters GCT GCMS Training Manual (Nominal Mass GCMS version) 02/06/2012 S.V.

Nova NanoSEM Superior Imaging and Analytical Performance

Tender Notification for the procurement of a "Dual beam (FIB - FE SEM) system" at IISc (Last Date for submission of tenders: 31st March 2016)

680 System Operator s Guide

HV/PHA Adjustment (PB) Part

SPM Training Manual Veeco Bioscope II NIFTI-NUANCE Center Northwestern University

UNITY 2 TM. Version 1.0. February 2008

Manual placement system MPL3100. for BGA, CSP and Fine-Pitch components

Ultimate quality control. No compromise. PROCESS / QUALITY CONTROL

Quick Start ATOMIC FORCE MICROSCOPE West Campus Imaging Core

ORM0022 EHPC210 Universal Controller Operation Manual Revision 1. EHPC210 Universal Controller. Operation Manual

Analysis and sorting of cells with FACSAria II flow cytometer Tiina Pessa-Morikawa / Revised

MestReNova Manual for Chem 201/202. October, 2015.

Customer Responsibilities. Important Customer Information. Agilent InfinityLab LC Series Site Preparation Checklist

Differential Scanning Calorimetry (DSC) Of Powder Coating Materials

THE X-RAY ADVANTAGE Pros and cons X-ray and Gamma

Import and quantification of a micro titer plate image

ivw-fd122 Video Wall Controller MODEL: ivw-fd122 Video Wall Controller Supports 2 x 2 Video Wall Array User Manual Page i Rev. 1.

Capstone Experiment Setups & Procedures PHYS 1111L/2211L

FACSAria I Standard Operation Protocol Basic Operation

Mini Micro Pulse Lidar System

TECHNICAL SPECIFICATION Multi-beam S-band Klystron type BT267

1-Touch Vibratory Sieve Shaker SS-10

Software Operation Manual

AFM Standard Operating Procedure

Application Note 11 - Totalization

USB Mini Spectrum Analyzer User Manual PC program TSA For TSA5G35 TSA4G1 TSA6G1 TSA12G5

EVD-L04/100A1-960, EVD-L08/200A1-960 and. EVD-L16/400A1-960 DVRs. Quick Operation Guide

EndNote Web. Quick Reference Card THOMSON SCIENTIFIC

Yellow Frog. Manual Version 1.1

CHA EVAPORATOR Short Reference User guidelines

PHY221 Lab 1 Discovering Motion: Introduction to Logger Pro and the Motion Detector; Motion with Constant Velocity

Processing data with Mestrelab Mnova

NOTICE: This document is for use only at UNSW. No copies can be made of this document without the permission of the authors.

Variable Pressure or Environmental Thermal Field Emission Microscope Instrument Specification for University of Oregon Oct 27, 2005 (this

Physics Requirements for the CXI Ion Time-of-Flight

3B SCIENTIFIC PHYSICS

ivw-fd133 Video Wall Controller MODEL: ivw-fd133 Video Wall Controller Supports 3 x 3 and 2 x 2 Video Wall Array User Manual Page i Rev. 1.

AEROTRAK PORTABLE AIRBORNE PARTICLE COUNTER MODEL 9110 QUICK START GUIDE

The Great PQC Electron Microscope Handbook

USB Mini Spectrum Analyzer User Manual TSA Program for PC TSA4G1 TSA6G1 TSA8G1

The Quanta 200 3D Simplified Operation Manual

Cover Page for Lab Report Group Portion. Boundary Layer Measurements

Status of SOLARIS. Paweł Borowiec On behalf of Solaris Team

Universal Mode. Survey Settings. The Universal Toolbar. First Run - Initial Configuration via the Setup Button

Quick Start Guide. Multidimensional Imaging

Checking the fluids of the cart

Footnotes and Endnotes

Application Note AN-708 Vibration Measurements with the Vibration Synchronization Module

FB10000 Error Messages Troubleshooting

TR-SES-200 High Resolution VUV/UV Transmission and Reflection Evaluation System Manual

Transcription:

Technical Procedure for Scanning Electron Microscope/ Energy Dispersive X-Ray System (SEM/EDX) for non-gsr Casework 1.0 Purpose This technical procedure shall be followed for the operation of the Scanning Electron Microscope/Energy Dispersive X-Ray System (SEM/EDX), including ASPEX and the LEO/Oxford systems. This procedure shall be used for non-gsr casework. 2.0 Scope This procedure applies to the ASPEX and the LEO/Oxford systems. These instruments are used for high resolution and magnification imaging with enhanced depth of field for trace evidence and nondestructive elemental analysis paint, metals, powders, and other trace particulate material. 3.0 Definitions N/A 4.0 Equipment, Materials, and Reagents 4.1 Equipment ASPEX Variable Pressure Scanning Electron Microscope/Energy Dispersive X-Ray System LEO 1450 Variable Pressure Scanning Electron Microscope Oxford Energy Dispersive X-ray System (SDD Detector) 4.2 Materials Mounting tweezers for SEM lifts Kimwipes Gloves Adhesive lifts with carbon-backed tape Copper (Cu) Standard Stainless Steel 316 Standard Manganese (Mn)/Rhodium (Rh) 5492 Standard Nitrogen gas, compressed (Purity Grade 5.0) 4.3 Reagents N/A 5.0 Procedures 5.1 LEO/Oxford SEM/EDX System 5.1.1 LEO Microscope Startup 5.1.1.1 Turn instrument ON. The computer for the SEM starts automatically. Enter user name and password when prompted. 5.1.1.2 Open the SmartSEM icon. Enter user name and password. SEM control screen will appear. All commands for the SEM are accessed through this screen. Page 1 of 9

5.1.1.3 Open Fantasia Software. Open RemCon32 Software. 5.1.1.4 Click on the Vacuum option on the Status Toolbar and select VENT. Select YES at the prompt. Unlatch both chamber door latches and adjust nitrogen pressure to 3-4 psi. Turn off nitrogen supply after chamber is finished venting. 5.1.1.5 Pull out stage chamber door to access stage holder. Using gloves, remove the stage holder and place it on a clean surface. 5.1.1.6 Using mounting tweezers, place samples in the holder and note position of each sample. Tighten the screws on the holder for each mount position. Place the holder back on the stage, ensuring that the flat edge of the mount is against the flat area of the stage. 5.1.1.7 Roll the stage back into the chamber and securely latch the chamber door latches. 5.1.1.8 Click the Vacuum option on the Status Toolbar and select PUMP. Wait for system to pump down. 5.1.1.9 Turn on the Extra High Tension (EHT) and Filament by clicking on GUN in the right bottom corner of screen and select BEAM ON. The last saved working conditions shall be automatically brought up for the filament. In emission mode, check to determine if the filament is properly aligned and saturated. Adjust emission image and filament by going to User Toolbar, Beam, and Gun Alignment. Use the electronic positioning adjustments to center the fully saturated emission image. 5.1.1.10 Adjust saturation of the filament slightly below or at the second crossover. 5.1.1.11 Adjust the working parameters of the instrument as necessary by accessing Tools through the User Toolbar, and Go to Control Panel. 5.1.2 Oxford EDX Start-Up 5.1.2.1 Turn computer on by pressing the power button located on the HP computer in lower right area of the EDS table. 5.1.2.2 Login to INCA user by clicking on INCA. Enter password. 5.1.2.3 Double click on the INCA icon on the desktop. 5.1.2.4 Select Detector Control in the Options menu. In Thermal Tab, the Detector State shall say operate and COLD and in the Slide tab the Slide Position shall say in. Close window. 5.1.2.5 Select Microscope Control in the Options menu. Check the box for HV. Close window. Page 2 of 9

5.1.3 Performance Check for the LEO OXFORD System 5.1.3.1 A quantitative performance check is required whenever quantitative results are needed. 5.1.3.1.1 Using either a Copper or Manganese Standard, in INCA, select the Quant Optimization icon in the navigation pane. 5.1.3.1.2 Obtain an optimal image by adjusting the microscope settings. 5.1.3.1.3 Use a minimum Acquisition Rate of 4 for optimum resolution. 5.1.3.1.4 Select the element of choice. Once the element selection is made, this program runs automatically. The system will state the quantification was successful when finished. 5.1.3.2 Resolution vs. Process Time Check Performed monthly if in use. 5.1.3.2.1 User must exit INCA software to access the program for this check. 5.1.3.2.2 Click INCA Monitor icon in task bar in lower right corner. 5.1.3.2.3 Select Options, Monitor Options, and Engineer login. Enter the password. 5.1.3.2.4 In Test Details tab, Highlight Resolution vs. Process Time then click add. Select next. Follow prompts until it asks for user to adjust counts on a standard. 5.1.3.2.5 Load a standard such as Manganese, then adjust count rate between 4000 and 8000 counts using SEM spot size. (Do not follow the on screen suggestion of 1000 counts; that specific criterion is only for detectors cooled by liquid nitrogen and is not the criterion for the SDD detector.) 5.1.3.2.6 Follow the prompts. 5.1.3.2.7 Pass Criteria: The extrapolated strobe resolution at process time 5 or 6 shall be no greater than the detector resolution of 127 ev. If resolution requirement is not met, maintenance shall be performed or a service engineer called. Once maintenance is performed and this criterion is met, the instrument may be returned to service. 5.1.3.2.8 When test is complete, select REPORT icon in Navigator Pane and Print. Page 3 of 9

5.1.3.2.9 Load and analyze the Stainless steel 316 Standard. Print report. Pass Criteria - The following peaks should be present: Fe, Ni, Si, Mo, Cr, and Mn. If these peaks are not present, maintenance shall be performed or a service engineer called. Once maintenance is performed and this criterion is met, the instrument may be returned to service. 5.1.3.2.10 Fill out LEO/Oxford SEM-EDX Performance Check Log and place all printed reports in LEO/Oxford Notebook. 5.1.4 Performance Verification for New Instrument Set-Up 5.1.4.1 A new SEM with EDX detector shall be installed by a certified engineer according to the manufacturer s guidelines. 5.1.4.2 Spectra shall be obtained from a Manganese/Rhodium 5492 Standard, Copper Standard and a Stainless Steel 316 Standard. 5.1.5 Collection and Storage of Data (Non GSR) on LEO SEM 5.1.5.1 Set the parameters of the LEO SEM instrument (e.g., different accelerating voltage, current setting, signal collector, or display variable), based on training and experience, to enhance the image on the display monitor. 5.1.5.2 Perform sizing of particles if needed. 5.1.5.3 Label pertinent information on the monitor using Annotation drop down menu. 5.1.5.4 Save images and/or annotation to the hard drive. 5.1.5.5 Print image and import into Forensic Advantage (FA) Case Record. 5.1.6 Collection and Storage of Data (Non GSR) on OXFORD EDS 5.1.6.1 Use Acquisition Rate 3 for most analysis. If performing quantification, a higher process time of 4/5/6 may be needed, depending on sample type. 5.1.6.2 Analysis time will vary, with 100 seconds being an average time. 5.1.6.3 Click on Point and ID icon in the Navigator Pane. To set up analysis, follow the sequential steps in the navigator pane, starting with PROJECT. Save the project with a unique name before starting analysis. 5.1.6.4 During and after collection you may expand different regions of the spectra and identify spectral peaks either automatically or manually. 5.1.6.5 Once spectral peaks are identified and confirmed, save project to the hard drive. Page 4 of 9

5.1.6.6 Print spectra in.pdf format and save in FA Case Record. 5.1.7 Shut-Down Procedures 5.1.7.1 Turn off the filament by clicking ALL in the lower right corner of SmartSEM software. Close the SEM operating window and answer the dialog questions. 5.1.7.2 Close the SEM user software. Close the EMServer. Close the RemCon32 software. 5.1.7.3 Shut down the computer. 5.1.7.4 Once computer is shutdown, press the yellow STANDBY button on the front panel of the instrument to keep the electronics on, but in a standby mode. Pressing the red OFF button will remove all the voltage to the instrument and will lose stage settings. Therefore, never press the red OFF button except for major resetting of the instrument or for servicing of the system. 5.1.7.5 Close all windows in INCA software and shut down the computer. 5.1.8 Standards and Controls This instrument requires the use of Manganese/Rhodium 5492 standard for performance checks. In addition the Stainless Steel 316 Standard shall be used for performance verifications. These standards have no special storage requirements. 5.1.9 Instrument Maintenance Routine maintenance shall be performed such as changing pump oil, checking liquid chiller status, and replacing a filament. Any maintenance performed shall be documented in the maintenance logbook for that particular instrument. 5.2 ASPEX Variable Pressure SEM/EDX 5.2.1 Start-Up Procedure & Loading of Samples 5.2.1.1 Turn instrument ON. Enter user name and password when prompted. The ASPEX engine will start automatically. 5.2.1.2 After ASPEX engine loads, double click Perception icon. 5.2.1.3 Move black lever on the stage from the downward position towards the upward position. This will begin the process of venting the chamber. The black lever will automatically move to the full upward position once the chamber is at atmospheric pressure. Page 5 of 9

5.2.1.4 Pull the stage from the microscope column and load the sample(s) into the specimen holder using mounting tweezers. Insert specimen holder into stage and tighten the thumb screw on the right side of the stage. 5.2.1.5 Gently slide stage back inside the microscope column. Push black lever downward to begin the vacuum process. Choose Variable Pressure checkbox in the Perception software. Default variable pressure setting is 0.1 Torr. Click Power Button (turns bright green when power is ON and SEM/EDX is at proper vacuum). 5.2.1.6 Set stage point to copper standard. Saturate the beam and align filament at 20 kv by adjusting the filament drive up to around 68 % or until an image appears. Turn the filament drive up slowly until the image is at maximum brightness. Select Source Image Mode from the drop down menu to view the emission image. Adjust filament drive until the emission image is slightly under saturation. Select Line Scan option from the drop down menu. Adjust the X and Y axis controls to adjust the line scan to its maximum height. Close the Line Scan mode. 5.2.2 Performance Check Required once a month by the first person to use that instrument in the month while in use. 5.2.2.1 Load a Copper standard; saturate the beam and align the filament at 20 kv. Obtain an image of the standard and focus on it. 5.2.2.2 Select Control, Right Mouse click and click on Calibrate from the dropdown menu. 5.2.2.3 Collect X-Ray spectra of the Copper Standard. The zero offset and gain of the pulse processor are being extracted while the spectrum is being collected. When the pulse processor is calibrated, zero and gain will be displayed in Green. Record the date, value of the Gain (10.000 ±5 %), and initials on the Aspex Monthly Calibration Log. 5.2.2.4 Pass Criteria: The value of the Gain shall be 10.000 ±5 %. If this value is not obtained, maintenance shall be performed or a service engineer called. Once maintenance is performed and this criterion is met, the instrument may be returned to service. 5.2.2.5 Remove Copper Standard from stage and load the Stainless Steel 316 Standard. 5.2.2.6 Saturate the beam and align the filament at 20 kv. Obtain an image of the standard and focus on it. Identify the peaks and save the spectra. 5.2.2.7 Print out the spectra and place in the Aspex Monthly Performance Check Manual. Page 6 of 9

5.2.2.8 Pass Criteria - The following peaks should be present: Fe, Ni, Si, Mo, Cr, and Mn. If these peaks are not present, maintenance shall be performed or a service engineer called. Once maintenance is performed and this criterion is met, the instrument may be returned to service. 5.2.3 Performance Verification for New Instrument Set-Up 5.2.3.1 A new SEM with EDX detector shall be installed by a certified engineer according to the manufacturer s guidelines. 5.2.3.2 Spectra shall be obtained from a Copper standard and a Stainless Steel 316 standard. 5.2.3.3 If the spectra are acceptable and all major peaks identified, the instrument is approved for use in casework. 5.2.4 Collection and Storage of Data (Non GSR) on ASPEX 5.2.4.1 Set the parameters of the ASPEX instrument, based on training and experience, to enhance the image on the display monitor. 5.2.4.2 Perform sizing of particles if needed. 5.2.4.3 Label pertinent information on the monitor using Annotation. 5.2.4.4 Save images and/or annotation to the hard drive. 5.2.4.5 Collected x-ray data. User may have to adjust spot size and restart to achieve optimal dead time collection. Analysis time will vary, with 100 seconds being an average time. 5.2.4.6 During and after collection you may expand different regions of the spectra and identify spectral peaks either automatically or manually. 5.2.4.7 Once spectral peaks are identified and confirmed, save spectra to the hard drive. 5.2.4.8 Print image and spectra and save in FA Case Record. 5.2.5 Shut Down Procedure 5.2.5.1 The SEM vacuum always remains on. 5.2.5.2 Ensure that the X-Ray system is not actively collecting spectra. 5.2.5.3 Turn filament drive to 0 % and close Perception software. 5.2.5.4 Select Start icon then Shut Down. Page 7 of 9

5.2.6 Standards and Controls This instrument requires the use of a Copper Standard for performance check. In addition, the Stainless Steel 316 standard is used for performance verifications. These standards have no special storage requirements. 5.2.7 Instrument Maintenance Routine maintenance shall be performed such as changing pump oil, changing out a filament, etc. Any maintenance performed shall be documented in the maintenance logbook for that particular instrument. 5.3 Sampling and Sample Selection No sampling is performed. When sample selection occurs, it shall be based on the Forensic Scientist s training and experience. 5.4 Calculations - N/A 5.5 Uncertainty of measurement - N/A 6.0 Limitations N/A 7.0 Safety Concerns 7.1 The greatest safety concern is radiation from the X-ray tube. The x-ray system is monitored for leaks on a regular basis. 7.2 There is high voltage/current which can cause electrocution. Avoid contact with any live circuitry components. Potentially lethal voltages exist with the high voltage x-ray supply. 8.0 References ASPEX, LLC. Personal SEM Console User Manual: Perception Suite User Documentation. Version 1.37, 2002. Carl Zeiss SMT Nano Technology Division. SmartSEM Operating Software for Felid Emission Scanning Electron Microscopes Manual. V05.04, Printed 2009. Hearle, J.W., J.T. Sparrow and P.M. Cross. The Use of the Scanning Electron Microscope. Oxford: Pergamon Press Ltd, 1972. Oxford Instruments Analytical. INCA Energy Operator Manual Issue 1. Printed 2004. (Located on Desktop of X-ray computer). Oxford Instruments Analytical. INCA Feature Instruction Manual. (Located on Desktop of X-ray computer), 2007. 9.0 Records LEO-Oxford SEM/EDX Performance Check Log Maintenance Log ASPEX SEM/EDX Performance Check Log Request for Instrumental Examination of Evidence Page 8 of 9

10.0 Attachments N/A Revision History Effective Date Version Number Reason 09/17/2012 1 Original ISO Document 02/01/2013 2 09/30/2013 3 Request for Instrumental Examination of Evidence was added as a record. 5.1.3.2 - Removed from performance check that it shall be performed by first person to use the instrument 10/18/2013 4 Added issuing authority to header Page 9 of 9