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RST INSTRUMENTS LTD. MEMS Tiltmeter Instruction Manual Copyright 2012 Ltd. All Rights Reserved. Ltd. 11545 Kingston St., Maple Ridge, B.C. Canada V2X 0Z5 Tel: (604) 540-1100 Fax: (604) 540-1005 Email: info@rstinstruments.com Website: www.rstinstruments.com

i MEMS Tiltmeter Instruction Manual Although all efforts have been made to ensure the accuracy and completeness of the information contained in this document, Inc. reserves the right to change the information at any time and assumes no liability for its accuracy. Product: MEMS Tiltmeter Instruction Manual Document number: ICM0061F MEMS Tiltmeter Instruction Manual Revision: F Date: November 22, 2016

ii Table of Contents 1 GENERAL DESCRIPTION... 1 2 INSTALLATION... 2 2.1 REQUIRED TOOLS/COMPONENTS... 2 2.2 MEMS TILT METER/BEAM INSTALLATION... 2 2.3 ELECTRICAL CONNECTIONS... 4 2.3.1 Analog Tiltmeter Electrical Connection... 4 2.3.2 Loop Powered 4-20mA Tiltmeter Electrical Connection... 5 2.3.3 Digital Bus Tiltmeter Electrical Connection... 7 2.4 ANALYZING THE DATA... 8 3 SPECIFICATIONS... 9 3.1 ENVIRONMENTAL... 9 3.2 ELECTRICAL... 9 4 CONTACT US... 13 Table of Figures Figure 1 - MEMS Tiltmeter... 1 Figure 2 - Tilt Beam/Meter General Arrangement... 3 Figure 3 - Analog Tiltmeter Electrical Connections... 4 Figure 4-4-20mA Tiltmeter Electrical Connections... 5 Figure 5-4-20mA Tiltmeter Electrical Schematic... 6 Figure 6 - Digital Bus Tiltmeter Electrical Connections... 7 Figure 7 - Tilt Data Interpretation... 8 Figure 8 - Analog Tiltmeter Calibration Certificate Sample... 10 Figure 9-4-20mA Tiltmeter Calibration Certificate Sample... 11 Figure 10 - Digital Bus Tiltmeter Calibration Certificate Sample... 12

1 1 GENERAL DESCRIPTION MEMS Sensor Tilt meters are mounted on vertical or horizontal surfaces and can measure differential angles in the X or Y directions. The Vertical MEMS Tiltmeter system consists of an angle mounting bracket, a cast aluminum water resistant NEMA 4 box, and a uniaxial or biaxial MEMS sensor. The Horizontal MEMS Tiltmeter system consists of a horizontal mounting plate, a cast aluminum water resistant NEMA 4 box, and a uniaxial or biaxial MEMS sensor. Because of the excellent zero and range stability, no sensor leveling is required- i.e. the enclosure should be mounted as close to level as possible, but no secondary level adjustment is required. Figure 1 - MEMS Tiltmeter

2 2 INSTALLATION 2.1 REQUIRED TOOLS/COMPONENTS Before beginning the installation of the MEMS Tilt meter/beam, ensure that all of the components and tools required for installation are present. See the list below for tools and equipment required for a typical installation: MEMS Tilt meter/beam CR1000/CR8X0Datalogger Current meter with 9-24V supply (For 4-20mA Tiltmeter) Level Phillips screw driver Anchor kit (consisting of (2) anchors, (4) washers, (4) 10mm SS nuts 16mm wrench 2.2 MEMS TILT METER/BEAM INSTALLATION Determine the MEMS Tilt meter/beam installation location. The location must allow for access inside the enclosure to connect the sensors after the unit has been mounted. The mounting plate should be securely attached with the supplied hardware to a rigid structure that is free of vibration. Care should be taken to avoid areas of rapid or extreme changes in temperature such as direct sunlight or near heating or cooling equipment. For exposed units, a sun shade and or external insulation is recommended. Install Anchors at a distance equal to the Tiltmeter bolt pattern (using a level, ensure the anchors are installed inline vertically). The outputs of the sensors are in Volts or milliamps, which can be read with RST Portable Readout Unit, a CR1000/CR8X0Datalogger, or Current meter (For 4-20mA Tiltmeter). The MEMS sensors have excellent zero and full scale stability. As a result, precision sensor zeroing is not necessary. This is in contrast to electrolytic sensors which have high coefficients of thermal sensitivity, necessitating precise leveling on the structure.

3 Figure 2 - Tilt Beam/Meter General Arrangement

4 2.3 ELECTRICAL CONNECTIONS 1. Under the Colour Code Table, look up the lead designations for the type of cable being used. 2. Under the Electrical Connections Table, make the appropriate lead connections, according to the type of system being used. Information regarding your sensor configuration and cable type is listed on your sensor calibration sheets. 2.3.1 Analog Tiltmeter Electrical Connection Figure 3 - Analog Tiltmeter Electrical Connections Tiltmeter Wire Color Datalogger 12V Red 12V Gnd Black Gnd A+ Green xh A- White xl B+ Orange yh B- Blue yl

5 2.3.2 Loop Powered 4-20mA Tiltmeter Electrical Connection Figure 4-4-20mA Tiltmeter Electrical Connections Tiltmeter Voltage Wire Color Datalogger Supply 1 A+ 9-24V Red SW12V Current 1 A- 4-20mA Black SE1 Supply 2 B+ 9-24V Green SW12V Current 2 B- 4-20mA White SE2 Note: Supply Minimum is 9 Volt dc + burden resistor drop (9V + 125ohm x 20mA = 11.5V)

6 Figure 5-4-20mA Tiltmeter Electrical Schematic

7 2.3.3 Digital Bus Tiltmeter Electrical Connection Figure 6 - Digital Bus Tiltmeter Electrical Connections Tiltmeter Wire Color V+ Red Gnd Black A+ Green B- White

8 2.4 ANALYZING THE DATA Each tilt meter is identified by a Serial Number, and has a corresponding Calibration Certificate. See Figure 5 for a sample calibration certificate. The sensing principle of the MEMS tiltmeter is that of an accelerometer with the sensitive axis is oriented horizontally. The measured phenomenon is then the component of gravity transverse to the sensitive axis, i.e. a = g sine (α) Commonly, tiltmeter data are interpreted as linear motion i.e. rotation about a presumed radius gives an equivalent motion. In many cases, where the ultimate variable of interest is lateral displacement at some presumed radius due to rotation, the accelerometer result can be simply rescaled, i.e. x = r sine (α) r a = ----- g In the case of a uniaxial MEMS tilt beam, r is the beam length. For tiltmeter on rigid bodies, the radius must be chosen with some care. x α r g a Figure 7 - Tilt Data Interpretation In cases where the actual angle is sought, the arcsine function or a polynomial equivalent may be used: α = arcsine (a/g)

9 It should be noted that measuring dynamic tilt may be a concept error: the lateral dynamic accelerations may exceed the tilt accelerations 3 Specifications 3.1 ENVIRONMENTAL Operating temperature 3.2 ELECTRICAL Sensor Range Resolution Null Repeatability Signal Cable Datalogger Portable Readout Unit -20 C to +50 C 0ne/Two MEMS Tilt Sensor +/- 15 ARC Deg Standard 1 ARC Second ±10 ARC Seconds 22 Gauge Shielded Twisted Campbell CR-1000/CR8X0 IC6800S or Current meter with 9-24V supply

10 MEMS Biaxial Tiltmeter Customer: Order Number: Model Number: Serial Number: Calibration Date: Cable Length: Cable Type: Ltd. Q012345 IC6080 EM1234 14-Apr-10 1 m EL380006 Wiring: Colour Function Red Voltage+ Black Ground Green A Axis + White A Axis - Orange B Axis + Blue B Axis - References: Inclinometer Frame RST-06 Digital Multimeter HP34401A s/n: US36053118 Referenced Annually To National Standards. A-Axis Applied Applied Tiltmeter Output Calculated Degrees θ Sin θ (Volts) Sin θ 15 0.2588 4.302 0.2587 Sin θ = m(v-b) 10 0.1736 2.944 0.1736 5 0.0872 1.566 0.0872 m = 0.062697 0 0.0000 0.177 0.0001 b = 0.17555-5 -0.0872-1.211-0.0869-10 -0.1736-2.592-0.1735-15 -0.2588-3.957-0.2591 B-Axis Applied Applied Tiltmeter Output Calculated Degrees θ Sin θ (Volts) Sin θ 15 0.2588 3.933 0.2591 Sin θ = m(v-b) 10 0.1736 2.569 0.1736 5 0.0872 1.185 0.0869 m = 0.062658 0 0.0000-0.205-0.0002 b = -0.20218-5 -0.0872-1.594-0.0872-10 -0.1736-2.972-0.1736-15 -0.2588-4.330-0.2587 Calibrated By: C. Guilbeault Figure 8 - Analog Tiltmeter Calibration Certificate Sample

11 Figure 9-4-20mA Tiltmeter Calibration Certificate Sample

12 Figure 10 - Digital Bus Tiltmeter Calibration Certificate Sample

4 Contact Us For sales information contact: sales@rstinstruments.com For technical support contact: rst_support@rstinstruments.com 13 Head Office: Office hours: Ltd. 11545 Kingston St., Maple Ridge, B.C. Canada V2X 0Z5 8:30am 5:00pm PST Monday Friday (excluding holidays) Telephone: 604-540-1100 Fax: 604-540-1005 Toll Free: 1-800-665-5599 Website: www.rstinstruments.com