InGaAs linear image sensors

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InGaAs linear image sensors

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Near infrared image sensor (0.9 to 1.7 μm) with 1024 pixels and high-speed line rate The is a 1024-channel, high-speed infrared image sensor designed for applications such as foreign object screening and medical diagnostic equipment where a multichannel high-speed line rate is required. The signal processing circuit uses CTIA (capacitive transimpedance amplifiers) that allow signal readout while simultaneously integrating signals in all pixels via sample-and-hold circuits. A high-speed line rate is achieved through 8 output ports. Features 1024 pixels [pixel size: 25 100 μm (G10768-1024D) 25 25 μm (G10768-1024DB)] High-speed line rate: 39000 lines/s max. High-speed data rate: 5 MHz typ. (6.67 MHz max.) Choice of 4 conversion efficiency levels Timing generator incorporated Low dark current Room temperature operation Applications Foreign object screening OCT (optical coherence tomography) Near infrared spectroscopy Related products (sold separately) InGaAs multichannel detector head C10854 General ratings (Typ. Ta=25 C) Parameter G10768-1024D G10768-1024DB Unit Cooling Non-cooled - Number of pixels 1024 pixels Pixel pitch 25 μm Pixel size (H V) 25 100 25 25 μm Spectral response range 0.9 to 1.7 μm Defective pixel Less than 1% - Absolute maximum ratings Parameter Symbol Value Unit Supply voltage Vdd -0.3 to +6.0 V Clock pulse voltage Vφ -0.3 to +6.0 V Reset pulse voltage V(RES) -0.3 to +6.0 V Gain selection terminal voltage Vcfsel -0.3 to +6.0 V Operating temperature Topr -10 to +70 C Storage temperature Tstg -20 to +70 C Note: Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings. www.hamamatsu.com 1

Electrical characteristics (Ta=25 C) Parameter Symbol Min. Typ. Max. Unit Supply voltage Vdd 4.7 5.0 5.3 V Supply current Ivdd - 100 150 ma Sample and hold voltage 1 Vref1-2.5 - V Sample and hold current 1 Iref1 - - 1 ma Sample and hold voltage 2 Vref2-2.5 - V Sample and hold current 2 Iref2 - - 1 ma Output reset voltage Vref3-2.5 - V Output reset current Iref3 - - 1 ma Element bias Supply voltage INP 3.3 3.5 3.6 V Supply current - - - 1 ma Ground Vss - 0 - V Clock frequency - 0.5 5.0 6.67 MHz Clock pulse voltage High 4.7 5 5.3 V Vφ Low - 0 0.4 V Reset pulse voltage High 4.7 5 5.3 V V(RES) Low - 0 0.4 V Vout+ High Vout+(high) - 4 - V Low Vout+(low) - 2.5 - Video output voltage High Vout-(high) - 2.5 - Vout- V Low Vout-(low) - 1 - Video data rate fv - f - Hz Specification (Ta=25 C, fv=5mhz, Vdd=5 V, INP=3.5 V, Vref1=Vref2=Vref3=2.5 V, CE=1400 nv/e-, per 1 element) Parameter Symbol Condition Min. Typ. Max. Unit Peak sensitivity wavelength λp - 1.55 - μm Saturation charge Qsat Vφ=5 V - 0.25 - pc Dark current ID -5 ±1 +5 pa RMS noise voltage (readout noise) N Standard deviation Sample number 1000-2 6 mv rms Integration time 30 μs Saturation voltage amplitude Vsat - 2.5 - V Defective pixel * 1 - CE * 2 =1400 nv/e- (worst-case condition) - - 1 % *1: Pixels with dark current or RMS noise voltage higher than the maximum value. *2: Conversion efficiency Selection logic of conversion efficiency Parameter Symbol Typ. Cfa Cfb Cfc 1400 nv/e- H L L Conversion efficiency CE 280 nv/e- H H L 70 nv/e- H L H 14 nv/e- H H H Note: L=0 V (Vss), H=5 V (Vdd) 2

Equivalent circuit Vout+1 Vout-1 Vout+7 Vout-7 AD_ST_ODD Vout- Vout+ Timing generator CLK RESET Vdd Vss S/H (reset) S/H (signal) INP Vref1 to 3 Cfa to c 1 pixel Timing generator Vout+2 Vout-2 Vout+8 Vout-8 AD_ST_EVEN INP KMIRC0029EB Connection example Digital buffer InGaAs linear image sensor Pulse generator CLK RESET AD_ST Vout+1 Digital buffer ADC Controller Cfa Cfb Cfc Vout-1 Full differential buffer amp Voltage reference INP Vref1 Vref2 Vref3 Vout+2 Vout-2 Full differential buffer amp ADC Vdd Vout+8 ADC Vss Vout-8 Full differential buffer amp ADC array KMIRC0031EA Notes: Sensor video output is fully differential, so use fully differential buffers to receive the sensor output. To obtain the fastest line rate, the odd and even pixels should be operated simultaneously so that the 8-port output is read out in parallel. 3

Timing chart tr (clk) tf (clk) CLK tr (RES) tf (RES) tpw (RES): Integration time (Min.) > 134 clocks Low period > 5 µs RESET Integration time (Actual) AD_ST 128 ch (clocks) Vout- Vout+ KMIRC0032EC Parameter Symbol Min. Typ. Max. Unit Clock pulse width tpwφ 80 100 - ns Clock pulse rise/fall times tr(clk), tf(clk) 0 20 30 ns Reset pulse width High 134 - - tpw(res) Low 8 * 2 - - clocks Reset pulse rise/fall times tr(res), tr(res) 0 20 30 ns *2: 5 μs Min. Spectral response (photo sensitivity) Spectral response (quantum efficiency) 1.2 1.0 (Typ.) 50 C 100 90 80 (Typ.) 50 C Photo sensitivity (A/W) 0.8 0.6 0.4 0 C 25 C Quantum efficiency (%) 70 60 50 40 30 0 C 25 C 0.2 20 10 0 0.9 1.0 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 Wavelength (µm) KMIRB0042EB 0 0.9 1.0 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 Wavelength (µm) KMIRB0043EB 4

Dark current vs. temperature 100 pa (Typ.) 10 pa Dark current 1 pa 100 fa 10 fa -20-10 0 10 20 30 40 50 60 70 Temperature ( C) KMIRB0045EA Dimensional outline (unit: mm) 44 Index mark Photosensitive area (left side 1 ch) CMOS chip 23 Window surface (without AR coat) 4 ± 1 23.12 ± 0.25 22.62 ± 0.25 21.88 ± 0.1 22.87 ± 0.25 1 35.78 ± 0.1 22 1.40 ± 0.15 62.23 ± 0.62 2.25 ± 0.25 3.35 ± 0.35 0.51 ± 0.05 2.54 ± 0.15 53.34 ± 0.3 KMIRA0017ED 5

Pin connections Pin no. Pin connection Input/output Function and recommended connection 1 NC - No connection 2 Cfa 3 Cfb Input Signal for selecting the conversion efficiency in the CMOS chip 4 Cfc 5 RESET_EVEN Input Reset pulse for initializing the whole amplifier in CMOS chip. (CMOS logic) Integration time is determined by the high pulse period. 6 CLK_EVEN Input (CMOS logic) Clock pulse for operating timing generator in CMOS chip. 7 AD_ST_EVEN Output Digital start signal for A/D convertion 8 Vout-2 Output Analog video signal (-) 9 Vout+2 Output Analog video signal (+) 10 Vout-4 Output Analog video signal (-) 11 Vout+4 Output Analog video signal (+) 12 Vout-6 Output Analog video signal (-) 13 Vout+6 Output Analog video signal (+) 14 Vout-8 Output Analog video signal (-) 15 Vout+8 Output Analog video signal (+) 16 Vss Input Ground for the whole sensor 17 NC - No connection 18 NC - No connection 19 Vref3 20 Vref2 Input Supply voltage for operating the signal processing circuit in the CMOS chip 21 Vref1 22 NC - No connection 23 INP Input Reset voltage for the charge amplifier array in the CMOS chip 24 NC - No connection 25 NC - No connection 26 NC - No connection 27 NC - No connection 28 NC - No connection 29 Vss Input Ground for the whole sensor 30 Vout+7 Output Analog video signal (+) 31 Vout-7 Output Analog video signal (-) 32 Vout+5 Output Analog video signal (+) 33 Vout-5 Output Analog video signal (-) 34 Vout+3 Output Analog video signal (+) 35 Vout-3 Output Analog video signal (-) 36 Vout+1 Output Analog video signal (+) 37 Vout-1 Output Analog video signal (-) 38 AD_ST_ODD Output Digital start signal for A/D conversion 39 CLK_ODD Input (CMOS logic) Clock pulse for operating timing generator in CMOS chip. 40 RESET_ODD Input Reset pulse for initializing the whole amplifier in CMOS chip. (CMOS logic) Integration time is determined by the high pulse period. 41 Vss Input Ground for the whole sensor 42 Vdd Input Supply voltage for operating the whole sensor circuit 43 NC - No connection 44 NC - No connection 6

Multichannel detector head C10854 (sold separately) The C10854 is a multichannel detector head suitable for applications where high-speed infrared imaging is required, such as sorting machines and SD-OCT (spectral domain-optical coherence tomography). The Hamamatsu InGaAs near-infrared linear image sensor (sold separately) can be easily installed in the C10854. This C10854 comes with application software (Dcam-CL) that runs on Windows 7 (32-bit, 64-bit). It can be used to control the C10854 from the PC. The application software also includes a function library exclusively for the C10854, allowing you to develop your own software more efficiently. Features High-speed operation: 5 MHz Line rate: 31.25 khz 1024 pixels (128 pixels 8 ports) CameraLink Electrostatic countermeasures This device has a built-in protection circuit against static electrical charges. However, to prevent destroying the device with electrostatic charges, take countermeasures such as grounding yourself, the workbench and tools to prevent static discharges. Also protect this device from surge voltages which might be caused by peripheral equipment. Related information www.hamamatsu.com/sp/ssd/doc_en.html Precautions Disclaimer Image sensors Information described in this material is current as of July, 2015. Product specifications are subject to change without prior notice due to improvements or other reasons. This document has been carefully prepared and the information contained is believed to be accurate. In rare cases, however, there may be inaccuracies such as text errors. Before using these products, always contact us for the delivery specification sheet to check the latest specifications. The product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovered and reported to us within that one year period. However, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product use. Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 8152-375-0, Fax: (49) 8152-265-8 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 16440 Kista, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39) 02-93581733, Fax: (39) 02-93581741 China: Hamamatsu Photonics (China) Co., Ltd.: B1201, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86) 10-6586-6006, Fax: (86) 10-6586-2866 Cat. No. KMIR1015E09 Jul. 2015 DN 7