A PASSION FOR PERFECTION. OktaLine. The Power Pump Portfolio. Roots Pumps for Every Low and Medium Vacuum Application.

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A PASSION FOR PERFECTION OktaLine The Power Pump Portfolio. Roots Pumps for Every Low and Medium Vacuum Application.

OktaLine The Power Pump Portfolio. Roots Pumps for Every Low and Medium Vacuum Application. A complete line of powerful pumps Our Roots pumps offer pumping speeds ranging from 250 to 25,000 m 3 /h. They can be safely employed for low and medium vacuum applications in the coating or semiconductor industry, in research & development, metallurgy or in chemistry and process technology. The gear box and bearing area in our Roots pumps are separated from the gas pumping chamber. Because the rotors operate contactfree, dry operation is assured. A further advantage: Thanks to air cooling, operating costs are significantly lower than with water cooling. The pumps can be universally utilized. The design principle of our proven Roots pumps has also been expanded to include magnetic couplings. Thanks to these hermetically sealed pumps we achieve very low leak rates. We have also developed ATEX certified pumps for processes that take place in explosive environments or for evacuating explosive gases. With our CombiLine, we design and manufacture standard pumping stations for you, as well as custom solutions for your specific application. Our specialists would be pleased to assist you in designing your vacuum system. Pfeiffer Vacuum Roots pumps Just right for your application! With our reliable products, our decades of experience and our know-how, we stand ready to provide you with the optimum solution for your low and medium vacuum needs. Metallurgy Air recovery Glass coating 2

Advantages at a glance Complete line of Roots pumps offers optimum flexibility and maximium process suitability Broad range of pumping speeds: 250 to 25,000 m 3 /h Rugged, compact design Fast evacuation thanks to high compression ratio and overflow valve Maintenance free, maximum reliability and highest uptime thanks to magnetic coupling Low operating costs thanks to air cooling and magnetic coupling No thermal overload thanks to integral overflow valve Long service intervals and simple on-site maintenance On-site service worldwide Over 50 years of experience and competence 3

OktaLine The Power Pump Portfolio. Roots Pumps for Every Low and Medium Vacuum Application. Applications Metallurgy Simulation chambers Packaging industry Freeze/vacuum-drying Thin-film technology Electron beam welding Load-locks Chemistry and process technology Industrial leak detection systems Steel degassing Overview of series A Series: Standard pumps (1 bar) Pumping speeds of 250 to 25,000 m 3 /h Shaft seals Gray cast iron (GG) AD Series: Pressure-surge resistant (16 bar) Pumping speeds of 500 to 6,000 m 3 /h Shaft seals Nodular graphite cast iron (GGG 40.3) AM Series: Standard pumps (1 bar) Pumping speeds of 250 to 6,000 m 3 /h Hermetically sealed thanks to magnetic coupling Gray cast iron (GG) ADM Series: Pressure-surge resistant (16 bar) Pumping speeds of 500 to 6,000 m 3 /h Hermetically sealed thanks to magnetic coupling Nodular graphite cast iron (GGG 40.3) ADx Series: Explosion hazard protected: Zone 2, outside (European Union Directive 94/9/EC ( (i) / II 3G IIB T3 (o))) Pumping speeds of 500 to 4,000 m 3 /h With and without ATEX-certified motor Nodular graphite cast iron (GGG 40.3) ATEX-certified coupling ADEx Series: Explosion hazard protected: Zone 1, inside and outside (European Union Directive 94/9/EC (II 2G IIB T3 (i) (o))) Pumping speeds of 500 to 4,000 m 3 /h With and without ATEX-certified motor PTFE-sealed Integrated ATEX-certified temperature sensor Nodular graphite cast iron (GGG 40.3) ATEX-certified coupling Can be switched on at 800 mbar without bypass no need for additional valves Integral magnetic coupling O-ring Inner magnet Vacuum Rotor shaft Motor shaft Atmosphere Vacuum Can Outer magnet 4

Wide variety of applications Roots pumps, sealed with shaft sealing ring Roots pumps, hermetically sealed Roots pumps, ATEX series A Series Standard pump (1 bar), gray cast iron (GG), ISO-F flange AD Series Pressure-surge resistant pump (16 bar), nodular graphite cast iron (GGG 40.3), DIN PN 16 flange AM Series Standard pump (1 bar), gray cast iron (GG), ISO-F flange ADM Series Pressure-surge resistant pump (16 bar), nodular graphite cast iron (GGG 40.3),DIN PN 16 flange ADx Series Pressure-surge resistant pump (16 bar), nodular graphite cast iron (GGG 40.3), DIN PN 16 flange ADEx Series Pump without otor, PTFE-sealed, Explosion-hazard protected Semiconductor EUV lithography CVD PVD Ion implantation Load-locks / transfer chambers Flat-panel displays Research & development Fusion reactors Space simulation chambers Accelerators High-purity gas applications Coating Ophthalmics Wear protection Large-surface coating Decorative coating Photovoltaics Industry/chemistry Processes involving toxic gases Processes involving aggressive gases Processes in explosive environments involving explosive gases Electron beam welding Packaging industry Central vacuum supply systems Bottling industry/bottling systems Metallurgy Leak detection systems Lamp/ tube manufacturing Freeze-drying systems Metal degassing Transformer drying Oil regeneration Recommended Possible Upon request 5

OktaLine The Power Pump Portfolio. Roots Pumps for Every Low and Medium Vacuum Application. Dimensions DN 1 M SG SG C D I A DN 2 K G E M H B F ø DN 3 SG = Sealing gas connection 3/8 Dimensions in mm Pumping speed Okta 250 (Dual-stage backing pump 65 m 3 /h) Okta 500 (Dual-stage backing pump 120 m 3 /h) Okta 1000 (Dual-stage backing pump 250 m 3 /h) Okta 2000 (Single-stage backing pump 630 m 3 /h) Okta 4000 (Backing pump 1.100 m 3 /h) Okta 6000 (Backing pump 1.100 m 3 /h) Okta 8000 (Backing pump 1.600 m 3 /h) Pumpentyp Okta 250 1) Okta 500 Okta 1000 Okta 2000 Okta 4000 Okta 4000 Okta 6000 50 Hz 60 Hz A (A/AD),770,920 1,126 1,310 1,570 1,630 1,860 A (AM/ADM),800,950 1,140 1,330 1,630 1,710 1,960 B,323,323,446,502,655,655,655 C,280,280,360,420,510,510,510 D,,,270,325,390,390,390 E,220,275,337,373,453,453,578 F,,,266,292,400,400,400 G,170,170,230,250,400,400,400 H,220,220,280,360,450,450,450 I,285,285,385,440,542,542,542 K (A/AD),517,627,784,886 1,069 1,069 1,319 K (AM/ADM),547,657,798,906 1,131 1,156 1,406 Ø, 12, 12, 11, 18,18,18,18 DN 1 DN 63 ISO-F DN 100 ISO-F DN 160 ISO-F DN 160 ISO-F DN 250 ISO-F DN 250 ISO-F DN 250 ISO-F DN 2 DN 63 ISO-F DN 100 ISO-F DN 100 ISO-F DN 100 ISO-F DN 160 ISO-F DN 160 ISO-F DN 160 ISO-F DN 3 DN 100 ISO-F DN 100 ISO-F DN 160 ISO-F DN 160 ISO-F DN 160 ISO-F 1) Okta 250 not available in AD or ADM version 3 P umping speed [m /h ] 10,000 1,000 100 10 0.001 0.01 0.1 1 Pumping speeds measured in combination with backing pumps: Okta 250 A 1000 A in combination with two-stage backing pumps Okta 2000 A 8000 in combination with single-stage backing pumps 10 100 1,000 Pressure [mbar] 6

Accessories The scope of delivery of our Roots pumps includes the bolts, nuts and seals for the connection flanges. If the pumps are supplied without a motor, the motor lantern, coupling and connection kit for mounting the motor will be included. An initial charge of P3 or D1 operating fluid will be included for standard applications in the scope of delivery. Operating fluid/lubricant For lubricating the gears and bearings. Sealing gas supply kit To protect the operating fluid and components in the oil chambers. Gear chamber evacuation kit To save time in connection with high-speed evacuation in less than one minute. Flushing kit Suitable for processes that tend to form deposits in the pump chambers. The design and composition of this kit will be customized for your specific application. In our standard pumps, flushing necessitates the employment of a sealing gas to prevent fluids from reaching the oil chambers. PTFE sealing material Especially resistant to aggressive media. Accessories Order number Splinter shield, for Okta 250 A/AM PK 300 010-X Splinter shield, for Okta 500 A/AM PP 030 149 AX Splinter shield, for Okta 500 AD/ADM PP 042 350-X Splinter shield, for Okta 1000/2000 A/AM PP 031 114-X Splinter shield, for Okta 1000 AD/2000 AD/ADM PP 031 115-X Splinter shield, for Okta 4000/6000 A/AM PP 031 136-X Splinter shield, for Okta 4000 AD/6000 AD/ADM PP 031 137-X Splinter shield, for Okta 8000/12000 PP 030 152-X Splinter shield, for Okta 18000/25000 PP 030 336-T Operating fluid Order number 0.5 l P3 Mineral oil PK 001 136-T 1 l P3 Mineral oil PK 001 106-T 5 l P3 Mineral oil PK 001 107-T 20 l P3 Mineral oil PK 001 108-T 50 l P3 Mineral oil PK 001 109-T 200 l P3 Mineral oil PK 001 110-T 0.5 l F5 Perfluorpolyether 1) PK 001 851-T 1 l F5 Perfluorpolyether 1) PK 001 852-T 5 l F5 Perfluorpolyether 1) PK 001 853-T 20 l F5 Perfluorpolyether 1) PK 001 854-T 50 l F5 Perfluorpolyether 1) PK 001 855-T 0.5 l D1 Oil 1) PK 005 881-T 1 l D1 Oil 1) PK 005 875-T 5 l D1 Oil 1) PK 005 876-T 20 l D1 Oil 1) PK 005 877-T 50 l D1 Oil 1) PK 005 878-T 200 l D1 Oil 1) PK 005 879-T More accessories on request; 1) for AM/ADM versions only 7

OktaLine The Power Pump Portfolio. Roots Pumps for Every Low and Medium Vacuum Application. Technical data and order numbers Pump type Okta 250 A Okta 500 A Motor with 50 Hz Motor with 60 Hz without motor Motor with 50 Hz Motor with 60 Hz Connection flange* inlet DN 63 ISO-F DN 63 ISO-F DN 63 ISO-F DN 100 ISO-F DN 100 ISO-F outlet DN 63 ISO-F DN 63 ISO-F DN 63 ISO-F DN 100 ISO-F DN 100 ISO-F outlet, on the side DN 100 ISO-F DN 100 ISO-F Nominal pumping speed 270 m 3 /h 324 m 3 /h 490 m 3 /h 588 m 3 /h Differential pressure at the overflow valve 75 mbar 75 mbar 75 mbar 75 mbar 75 mbar at the overflow valve ADEx 53 mbar Emission sound pressure level (EN ISO 2151) at intake pressure 1 mbar 70 db(a) 70 db(a) 70 db(a) 70 db(a) 70 db(a) at intake pressure 10 mbar 75 db(a) 75 db(a) 75 db(a) 75 db(a) 75 db(a) Leak rate Pumps with shaft sealing 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s Magnetic coupled pumps 1 10-5 mbar l/s 1 10-5 mbar l/s 1 10-5 mbar l/s 1 10-5 mbar l/s 1 10-5 mbar l/s Pump fluid filling 1.5 l 1.5 l 1.5 l 1.5 l 1.5 l Motor rating 0.75 kw 1.1 kw 1.5 kw 2.2 kw Rotational speed 3,000 1/min 3,600 1/min 3,000 1/min 3,600 1/min Power supply: Voltage** 230/400 V, 50 Hz 230/400 V, 60 Hz 230/400 V, 50 Hz 230/400 V, 60 Hz Weight 95 kg 95 kg 85 kg 125 kg 125 kg Order numbers A Series PP W21 000 PP W21 002 PP W21 001 PP W31 000 PP W31 002 AD Series PP W31 700 PP W31 702 AM Series PP W22 000 PP W22 002 PP W22 001 PP W32 000 PP W32 002 ADM Series PP W32 700 PP W32 702 ADx Series PP W33 200 PP W33 202 ADEx Series PP W33 000 * Connection flanges of series AD, ADM, ADx and ADEx according to EN1092-1/DIN2633, PN 16; raised face according to DIN2526, Form A ** Range: ± 10% 8

Okta 1000 A Okta 2000 A without motor Motor with 50 Hz Motor with 60 Hz without motor Motor with 50 Hz Motor with 60 Hz without motor DN 100 ISO-F DN 160 ISO-F DN 160 ISO-F DN 160 ISO-F DN 160 ISO-F DN 160 ISO-F DN 160 ISO-F DN 100 ISO-F DN 100 ISO-F DN 100 ISO-F DN 100 ISO-F DN 100 ISO-F DN 100 ISO-F DN 100 ISO-F DN 100 ISO-F DN 100 ISO-F DN 100 ISO-F DN 100 ISO-F DN 100 ISO-F DN 100 ISO-F DN 100 ISO-F 1,070 m 3 /h 1,284 m 3 /h 2,065 m 3 /h 2,478 m 3 /h 75 mbar 45 mbar 45 mbar 45 mbar 35 mbar 35 mbar 35 mbar 53 mbar 30 mbar 30 mbar 20 mbar 20 mbar 70 db(a) 72 db(a) 72 db(a) 72 db(a) 72 db(a) 72 db(a) 72 db(a) 75 db(a) 75 db(a) 75 db(a) 75 db(a) 75 db(a) 75 db(a) 75 db(a) 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-5 mbar l/s 1 10-5 mbar l/s 1 10-5 mbar l/s 1 10-5 mbar l/s 1 10-5 mbar l/s 1 10-5 mbar l/s 1 10-5 mbar l/s 1.5 l 2.9 l 2.9 l 2.9 l 5 l 5 l 5 l 3 kw 4 kw 5.5 kw 5.8 kw 3,000 1/min 3,600 1/min 3,000 1/min 3,600 1/min 230/400 V, 50 Hz 230/400 V, 60 Hz 230/400 V, 50 Hz 230/400 V, 60 Hz 100 kg 250 kg 250 kg 220 kg 370 kg 370 kg 310 kg PP W31 001 PP W41 000 PP W41 002 PP W41 001 PP W61 000 PP W61 002 PP W61 001 PP W31 701 PP W41 700 PP W41 702 PP W41 701 PP W61 700 PP W61 702 PP W61 701 PP W32 001 PP W42 000 PP W42 002 PP W42 001 PP W62 000 PP W62 002 PP W62 001 PP W32 701 PP W42 700 PP W42 702 PP W42 701 PP W62 700 PP W62 702 PP W62 701 PP W33 201 PP W43 200 PP W43 202 PP W43 201 PP W63 200 PP W63 202 PP W63 201 PP W31 840 PP W43 000 PP W41 950 PP W63 000 PP W61 800 9

OktaLine The Power Pump Portfolio. Roots Pumps for Every Low and Medium Vacuum Application. Technical data and order numbers Pump type Okta 4000 A Okta 6000 A Motor with 50 Hz Motor with 60 Hz without motor Motor with 50 Hz Motor with 60 Hz Connection flange* inlet DN 250 ISO-F DN 250 ISO-F DN 250 ISO-F DN 250 ISO-F DN 250 ISO-F outlet DN 160 ISO-F DN 160 ISO-F DN 160 ISO-F DN 160 ISO-F DN 160 ISO-F outlet, on the side DN 160 ISO-F DN 160 ISO-F DN 160 ISO-F DN 160 ISO-F DN 160 ISO-F Nominal pumping speed 4,050 m 3 /h 4,860 m 3 /h 6,075 m 3 /h 7,290 m 3 /h Differential pressure at the overflow valve 25 mbar 25 mbar 25 mbar 20 mbar 20 mbar at the overflow valve ADEx 20 mbar 20 mbar Emission sound pressure level (EN ISO 2151) at intake pressure 1 mbar 74 db(a) 74 db(a) 74 db(a) 74 db(a) 74 db(a) at intake pressure 10 mbar 79 db(a) 79 db(a) 79 db(a) 79 db(a) 79 db(a) Leak rate Pumps with shaft sealing 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s Magnetic coupled pumps 1 10-5 mbar l/s 1 10-5 mbar l/s 1 10-5 mbar l/s 1 10-5 mbar l/s 1 10-5 mbar l/s Pump fluid filling 6.8 l 6.8 l 6.8 l 6.8 l 6.8 l Motor rating 11 kw 15 kw 15 kw 18.5 kw Rotational speed 3,000 1/min 3,600 1/min 3,000 1/min 3,600 1/min Power supply: Voltage** 400 V, 50 Hz 400 V, 60 Hz 400 V, 50 Hz 400 V, 60 Hz Weight 600 kg 600 kg 520 kg 850 kg 850 kg Order numbers A Series PP W71 000 PP W71 004 PP W71 001 PP W76 000 PP W76 004 AD Series PP W71 700 PP W71 704 PP W71 701 PP W76 700 PP W76 704 AM Series PP W72 000 PP W72 002 PP W72 001 PP W77 000 PP W77 002 ADM Series PP W72 700 PP W72 702 PP W72 701 PP W77 700 PP W77 702 ADx Series PP W73 200 PP W73 202 PP W73 201 ADEx Series PP W73 000 PP W71 990 * Connection flanges of series AD, ADM, ADx and ADEx according to EN1092-1/DIN2633, PN 16; raised face according to DIN2526, Form A ** Range: ± 10% 10

Okta 8000 Okta 18000 without motor Motor with 50 Hz Motor with 60 Hz without motor Motor with 50 Hz Motor with 60 Hz without motor DN 250 ISO-F DN 320 ISO-F DN 320 ISO-F DN 320 ISO-F DN 400 PN 10 DN 400 PN 10 DN 400 PN 10 DN 160 ISO-F DN 320 ISO-F DN 320 ISO-F DN 320 ISO-F DN 400 PN 10 DN 400 PN 10 DN 400 PN 10 DN 160 ISO-F DN 250 ISO-F DN 250 ISO-F DN 250 ISO-F DN 320 ISO-F DN 320 ISO-F DN 320 ISO-F 8,000 m 3 /h 9,600 m 3 /h 17,850 m 3 /h 21,420 m 3 /h 20 mbar 27 mbar 27 mbar 27 mbar 10 mbar 10 mbar 10 mbar 74 db(a) 74 db(a) 74 db(a) 74 db(a) 75 db(a) 75 db(a) 75 db(a) 79 db(a) 78 db(a) 78 db(a) 78 db(a) 79 db(a) 79 db(a) 79 db(a) 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-2 mbar l/s 1 10-5 mbar l/s 6.8 l 21 l 21 l 21 l 68 l 68 l 68 l 22 kw 30 kw 45 kw 55 kw 1,500 1/min 1,800 1/min 1,500 1/min 1,800 1/min 400 V, 50 Hz 400 V, 60 Hz 400 V, 50 Hz 400 V, 60 Hz 750 kg 1,550 kg 1,600 kg 1,400 kg 3,300 kg 3,300 kg 2,800 kg PP W76 001 PP W80 000 PP W80 060 PP W80 001 PP W90 000 PP W90 060 PP W90 001 PP W76 701 PP W77 001 PP W77 701 11

A PASSION FOR PERFECTION Leading. Dependable. Customer Friendly. Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, for German engineering art, competent advice and reliable service. Ever since the invention of the turbopump, we have been setting standards in our industry and this claim to leadership will continue to drive us in the future. Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Headquarters Germany T +49 6441 802-0 info@pfeiffer-vacuum.de www.pfeiffer-vacuum.com All data subject to change without prior notice. PW 0029 PEN (September 2011/15)