MS series. Parameter Min. Typ. Max. Unit Driving voltage V Power consumption mw Video rate khz

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Transcription:

Mini-spectrometer MS series C10MA Ultra-compact Mini-spectrometer integrating MEMS and technologies The MS series C10MA is a thumb-sized (2. 13 1. mm) spectrometer head developed for installation into mobile measurement equipment by merging our MEMS and technologies. The MS series uses a CMOS integrated with a light receiving slit. The internal optical system is comprised of a convex lens on which a grating is formed by nanoimprint. The result is a remarkably small size less than one-third the volume of the RC series mini-spectrometers that have already been marketed. Features Thumb size: 2. 13 1. mm Weight: g Spectral response range: 340 to 50 nm Spectral resolution: 12 nm Installation into mobile measurement equipment Applications Installation into mobile measurement equipment Color monitoring, for printers and printing machines Installation into large size display (Color control device) Optical characteristics Parameter Min. Typ. Max. Unit Spectral response range 340 to 50 nm Spectral resolution (spectral response half width) * 1-12 14 nm Wavelength reproducibility * 2 - - ±0.5 nm Spectral stray light * 1, * 3 - - -25 db *1: Depends on the slit opening. Values were measured with the slit listed in the table General ratings / Absolute maximum ratings. *2: Measured under constant light input conditions *3: When monochromatic light of λ=550 nm is input, spectral stray light is defined as the ratio of the count measured at the input wavelength, to the count measured at a wavelength 40 nm longer or shorter than the input wavelength. Electrical characteristics Parameter Min. Typ. Max. Unit Driving voltage 4.5 5 5.25 V Power consumption - 30 - mw rate 0.25-200 khz General ratings / Absolute maximum ratings Parameter Value Unit Number of pixels 25 pixels Pixel size 12.5 (H) 1000 (V) μm Image sensor CMOS with slit - Slit * 4 5 (H) 50 (V) μm Optical N.A. 0.22 - Operating temperature * 5 +5 to +40 C Storage temperature * 5-20 to +0 C *4: Entrance slit aperture size *5: No condensation www.hamamatsu.com 1

Mini-spectrometer MS series C10MA Optical component layout Besides a CMOS chip integrated with an optical slit by etching, the C10MA employs a grating that is formed on a convex lens by nano-imprint. This has made the unit very compact. Image sensor Input light Through-hole slit Bump electrode Glass wiring board CMOS chip (back) Slit Diffracted light Lens Grating made by nano-imprint KACCC045EA CMOS chip Spectral response (measurement example) 100 (Ta=25 C) Spectral resolution vs. wavelength (measurement example) 14 (Ta=25 C) 13 Relative sensitivity (%) 0 0 40 20 Spectral resolution (nm) 12 11 10 0 300 350 400 450 500 550 00 50 00 50 5 300 350 400 450 500 550 00 50 00 50 Wavelength (nm) Wavelength (nm) KACCB020EA KACCB0211EA Measurable optical power C10MA 10-12 10-10 10-10 - Light intensity * (W) * Input spot diameter: 00 µm (λ=550 nm) KACCB0210EA 2

Mini-spectrometer MS series C10MA Dimensional outline (unit: mm) Window 3 1.0 Index mark Slit 0.05 0.5 5.0 2.54 1. 1.5 0.51 0.5 13 2. Slit position 1 1.0 2. 13 GND NC NC Gain NC Tolerance unless otherwise noted: ±0.2 0.2 2. KACCA025EA Electrical connections with an external circuit Make electrical connections to an external circuit using the lead pins. Pin No. Symbol Name of pin I/O Description 1 Clock pulse I Sensor scan sync signal 2 GND Ground GND 3 NC No connection 4 Start pulse I Start pulse 5 NC No connection Gain Gain I Image sensor: gain setting End of scan O (end of scan) signal NC No connection Supply voltage I Power supply of : 5 V 10 output O output signal Precation for use If external force is repeatedly applied to the lead pins, this may damage the lead pins. When installing this product in locations subject to vibration, secure it with resin or a holder, etc. (Recommended resin: made by Shin-Etsu Chemical Co., Ltd. KE34B etc.) 3

Mini-spectrometer MS series C10MA CMOS Recommended terminal voltage Supply voltage 4.5 5 5.25 V Gain selection terminal voltage High gain 0-0.4 V Gain Low gain - 0.25 + 0.25 V Clock pulse voltage High level - 0.25 + 0.25 V V() Low level 0-0.4 V Start pulse voltage High level - 0.25 + 0.25 V V() Low level 0-0.4 V Electrical characteristics Clock pulse frequency * f() 1-00 khz Power consumption P - 30 - mw *: Ta=25 C, =5 V, V()=V()=5 Electrical and optical characteristics Dark current High gain - 0.01 - ID Low gain - 0.01 - pa Output offset voltage Vo - 0.3 - V Feedback capacitance of High gain - 1.4 - charge amplifier * Cf Low gain - 4. - pf Saturation output voltage * High gain - 2. - Vsat Low gain - 1. - V Readout noise High gain - 0.3 - Nr Low gain - 0.2 - mv rms Photo response non-uniformity * PRNU - - ±3 % *: Gain=5 V (Low gain), Vg=0 V (High gain) *: Difference from Vo *: Photo response non-uniformity is defined as follows when the device is illuminated with uniform light which is 50% of the saturation exposure level. PRNU = ΔX/X 100 [%] X: average output of all pixels, ΔX: difference between X and maximum or minimum output 4

Mini-spectrometer MS series C10MA Timing chart thw (), Integration time TRIG tr() tf() tr() tf() tvd KACCC043EA Start pulse high period thw() 1030/f () - - s Start pulse rise and fall times tr(), tf() 0 20 30 ns Clock pulse duty ratio - 45 50 55 % Clock pulse rise and fall times tr(), tf() 0 20 30 ns delay time tvd - 20 - ns Note: The clock pulse should be set from high to low just once when the start pulse is low. The internal shift register starts operating at this timing. The integration time is determined by the start pulse intervals. However, since the charge integration of each pixel is carried out between the signal readout of that pixel and the next signal readout of the same pixel, the start time of charge integration differs depending on each pixel. In addition, the next start pulse cannot be input until signal readout from all pixels is completed. output is 1/4 of the clock pulse frequency. Recommended driver circuit example A/D converter Timing generator Analog arithmetic circuit * (subtraction, amplification, etc.) * Use as needed GAIN Digital buffer + - 2 C10MA GAIN 1 4 GND 10 KACCC0502EA 5

Mini-spectrometer MS series C10MA Evaluation circuit C11351 for mini-spectrometer MS series The C11351 is a circuit board designed to simply evaluate characteristics of minispectrometer C10MA. By using the C11351 with the C10MA (sold separately) and a USB cable A10 (AB type; sold separately), the C10MA characteristics can be evaluated with the dedicated software. Features Initial evaluation circuit for C10MA Wavelength conversion factors of C10MA can be input from PC* 1 High A/D resolution (1 bits) Powered only via USB port *1: A wavelength conversion factor for converting the pixel number into a wavelength is recorded in C11351. To measure a spectrum with higher wavelength accuracy, it is necessary to input the wavelength conversion factor listed in the final inspection sheet that comes with each C10MA. Electrical characteristics Parameter Specification Unit Interface USB 2.0 - A/D conversion 1 bits Clock pulse frequency 00 khz rate 200 khz Integration time 5 to 10000 ms General ratings / Absolute maximum ratings Parameter Specifications Unit Applicable mini-spectrometer C10MA - Dimensions Control board 0 0 mm Sensor board 30 44 mm Operation temperature* 2 +5 to +40 C Storage temperature* 2-20 to +0 C *2: No condensation Connection example Sample software PC USB cable A10 (sold separately) Measuring light C11351 Mini-spectrometer C10MA (sold separately) KACCC044EB

Mini-spectrometer MS series C10MA Mini-spectrometer lineup Type No. C1002CA C1002CAH C1002MD C1003CA C1003CAH C1003MD C404CA C404CAH C404MC C405CA C405MC C40GC C13GC C14GB C1111GA TM series TG series TG series Type TM-UV/VIS-CCD TM-UV/VIS-CCD High resolution TM-UV/VIS-MOS TM-VIS/NIR-CCD TM-VIS/NIR-CCD High resolution TM-VIS/NIR-MOS TG-UV-CCD TG-UV-CCD High resolution TG-UV-MOS TG-SWNIR-CCD TG-SWNIR-MOS TG-NIR Non-cooled type TG-cooled NIR-I Low noise (cooled type) TG-cooled NIR-II Low noise (cooled type) Spectral response range (nm) 200 400 00 00 1000 1200 1400 100 100 2000 2200 2400 200 200 to 400 200 to 00 320 to 1000 500 to 1100 00 to 100 1100 to 2200 TG-cooled NIR-III Low noise (cooled type) 00 to 2550 Spectral resolution Max. (nm) 1* Image sensor Back-thinned type CCD (λ=320 to 00 nm) Back-thinned type 1* CCD (λ=320 to 00 nm) Back-thinned type 3 CCD Back-thinned type 1* CCD 3 5 Back-thinned type (λ=550 to 00 nm) CCD 5 NMOS linear (λ=550 to 1100 nm) 20 InGaAs linear C1100MA C1100MA * Typ. For installation into measurement equipment Spectral response range (nm) Spectral resolution Type No. Type Max. Image sensor 200 400 00 00 1000 1200 1400 100 100 2000 2200 2400 200 (nm) C1100MA C11010MA RC series RC series RC-VIS-MOS Spectrometer module RC-SWNIR-MOS Spectrometer module RC-VIS-MOS Spectrometer head RC-SWNIR-MOS Spectrometer head 340 to 0 340 to 0 40 to 1050 40 to 1050 For installation into measurement equipment (ultra-compact type) Spectral response range (nm) Spectral resolution Type No. Type Max. Image sensor 200 400 00 00 1000 1200 1400 100 100 2000 2200 2400 200 (nm) MS-VIS-MOS C10MA MS Spectrometer head 14 series 340 to 50 Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. Type numbers of products listed in the specification sheets or supplied as samples may have a suffix (X) which means tentative specifications or a suffix (Z) which means developmental specifications. 2010 Hamamatsu Photonics K.K. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Solid State Division 112-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-55 Japan, Telephone: (1) 53-434-3311, Fax: (1) 53-434-514 U.S.A.: Hamamatsu Corporation: 30 Foothill Road, P.O.Box 10, Bridgewater, N.J. 00-010, U.S.A., Telephone: (1) 0-231-00, Fax: (1) 0-231-121 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-2211 Herrsching am Ammersee, Germany, Telephone: (4) 152-35-0, Fax: (4) 152-25- France: Hamamatsu Photonics France S.A.R.L.: 1, Rue du Saule Trapu, Parc du Moulin de Massy, 12 Massy Cedex, France, Telephone: 33-(1) 53 1 00, Fax: 33-(1) 53 1 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL 1BW, United Kingdom, Telephone: (44) 10-24, Fax: (44) 10-325 North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-11 41 Solna, Sweden, Telephone: (4) -50-031-00, Fax: (4) -50-031-01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (3) 02-35-1-33, Fax: (3) 02-35-1-41 Cat. No. KACC11E03 Mar. 2010 DN