MPPC and MPPC module for precision measurement

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Mar.2016 MPPC and MPPC module for precision measurement Low-noise MPPC for precision measurement MPPCs and MPPC modules for precision measurement inherit the high photon detection efficiency of their predecessors and at the same time provide lower crosstalk, lower afterpulse, and lower dark count. What is MPPC? The MPPC (multi-pixel photon counter) is one of the devices called silicon photomultipliers (SiPM). It is a photon-counting device using multiple APD (avalanche photodiode) pixels opr erating in Geiger mode. Although the MPPC is essentially an opto-semiconductor device, it has excellent photon-counting capability and can be used in various applications for detecting extremely weak light at the photon counting level. The MPPC operates on low voltage and features high gain, high photon detection efficiency, high-speed response, excellent time resolution, and wide spectral response range. It achieves the performance that is required in photon-counting at a high level. The MPPC is also immune to magnetic fields, highly resistant to mechanical shocks and the like, which are advantages unique to solid-state devices.

Features of MPPC for precision measurement When an MPPC detects photons, the output may contain false signals, namely afterpulse and crosstalk, that are separate from the output pulses of the incident photons. The MPPC for precision measurement maintains the high photon detection efficiency while providing low afterpulse, low crosstalk, and low dark count. Feature 1 Low crosstalk The pixel that detects photons may affect other pixels, making them produce pulses separate from output pulses. This phenomenon is called crosstalk. The MPPC for precision measurement employs a structure that suppresses the occurrence of crosstalk. This has drastically reduced crosstalk in comparison with previous products (rate of occurrence reduced from 44% to 3%). Previous product (3 3 mm, 50 μm pitch) S13360-3050CS (3 3 mm, 50 μm pitch) 50 mv Crosstalk pulses 50 mv 10 ns Feature 2 Low afterpulses While an MPPC detects photons, delayed signals may be output separately from the output pulses. These signals are called afterpulses. The MPPC for precision measurement provides low afterpulses. Previous product (3 3 mm, 50 μm pitch) S13360-3050CS (3 3 mm, 50 μm pitch) 50 mv Afterpulses 50 mv 10 ns Feature 3 Low dark count Improvement in material and wafer process technology has reduced the dark count down to approximately half that of previous products. See P.3 [ Dark count vs. overvoltage]. (Typ. Ta=25 C, 3 3mm, Vov=3 V) Previous product S13360-3050CS 1 Mcps 0.5 Mcps 2

MPPC and MPPC module for precision measurement Feature 4 Widened operating voltage range The MPPC operation voltage Vop can be expressed as breakdown voltage (Vbr) + overvoltage (Vov). As the operating voltage is increased, the gain and photon detection efficiency improve, but at the same time, crosstalk and dark count, which are noise components, also increase. With previous products, the voltage dependency of noise components was high, and increasing the operating voltage caused a significant increase in noise components. On the other hand, with the MPPC for precision measurement, increase in noise components is suppressed even when the operating voltage is increased. Therefore, it can be used with high operating voltage (high gain and high photon detection efficiency). Gain vs. overvoltage Photon detection efficiency vs. overvoltage 3.5 10 6 (Typ. Ta=25 C) 60 (Typ. Ta=25 C) Gain 3.0 10 6 2.5 10 6 2.0 10 6 1.5 10 6 1.0 10 6 5.0 10 5 S13360-3050CS Previous product Photon detection efficiency (%) 50 40 30 20 10 Previous product S13360-3050CS 0 0 1 2 3 4 5 6 7 8 Overvoltage (V) 0 0 1 2 3 4 5 6 7 8 Overvoltage (V) KAPDB0307EB KAPDB0308EB Crosstalk probability vs. overvoltage Dark count vs. overvoltage 50 (Typ. Ta=25 C) 10000 (Typ. Ta=25 C) Crosstalk probability (%) 40 30 20 10 Previous product S13360-3050CS Dark count (kcps) 1000 100 Previous product S13360-3050CS 0 0 1 2 3 4 5 6 7 8 Overvoltage (V) 0 0 1 2 3 4 5 6 7 8 Overvoltage (V) Note: Dark pulse overlap (pile-up effect) is eliminated. KAPDB0309EB KAPDB0310EB 3

Lineup MPPC modules Analog output type Type no. Photo Built-in MPPC Photosensitive area Pixel pitch Photoelectric sensitivity Noise equivalent power control C13365-1350SA S13360-1350CS 1.3 mm 0.5 fw/hz 1/2 50 μm compensation C13365-3050SA S13360-3050CS 3.0 mm 1.2 fw/hz 1/2 (non-cooled) 1 10 9 C13366-1350GA TE-cooled type 1.3 mm 0.1 fw/hz 1/2 TE-cooled (MPPC for precision 50 μm (-20 C) C13366-3050GA measurement) 3.0 mm 0.15 fw/hz 1/2 Supply voltage See page ±5 V 8 ±5 V 9 Type no. Photo Built-in MPPC Photosensitive area C13366-1350GD TE-cooled type 1.3 mm (MPPC for precision measurement) Digital output type Pixel pitch Photo detection efficiency (%) Dark count 2.5 kcps C13366-3050GD 3.0 mm 50 μm 40 15 kcps Starter kit control TE-cooled (-20 C) Supply voltage See page ±5 V 10 Type no. Photo control Supply voltage Features See page C12332-01 compensation (non-cooled) ±5 V Evaluates any non-cooled MPPC (sold separately) Includes C11204-01 power supply for MPPC Measurable just by setting MPPC operating voltage from PC 21 MPPC S13360-1325CS Type no. Photo Photosensitive area Pixel pitch Package 25 μm See page S13360-1350CS 50 μm S13360-1375CS S13360-1325PE 1.3 mm 75 μm 25 μm S13360-1350PE S13360-1375PE S13360-3025CS S13360-3050CS 50 μm 75 μm 25 μm 50 μm S13360-3075CS S13360-3025PE 3.0 mm 75 μm 25 μm 12 S13360-3050PE S13360-3075PE S13360-6025CS S13360-6050CS 50 μm 75 μm 25 μm 50 μm S13360-6075CS S13360-6025PE 6.0 mm 75 μm 25 μm S13360-6050PE S13360-6075PE 50 μm 75 μm 4

MPPC and MPPC module for precision measurement MPPC module MPPC module for precision measurement Hamamatsu provides a full lineup of MPPC modules capable of measuring light over a wide range (10 orders of magnitude) from the photon counting region to nw (nanowatt) region. The modules contain an amplifier, a temperature-compensation circuit, a high-voltage power supply circuit, and other components needed for MPPC operation. You can use them simply by connecting them to a power supply (e.g., ±5 V). Hamamatsu offers a wide lineup of MPPC modules including cooled modules that give a low dark count and non-cooled modules with a temperature compensation function for stable measurement. We can also provide custom products that meet customers specifications. 5

Measurable light level range MPPC modules include two output types according to the incident light level (number of photons): analog output type and digital output type. C11209-110 Non-cooled type/10 μm pitch (λ=450 nm) Analog output type C13365 series Non-cooled type/50 μm pitch C13366-GA series TE-cooled type/50 μm pitch Digital output type C13366-GD series TE-cooled type/50 μm pitch C13001-01 TE-cooled type/single pixel (fiber coupling type) Number of incident photons (cps) Incident light level (W) 10 0 10 2 10 4 10 6 10 8 10 10 10 12 10-18 10-15 10-12 10-9 10-6 KACCC0678EF Selecting the digital output type or analog output type The output type (digital or analog) should be selected according to the light level incident on the MPPC module. The following output waveforms (a) (b) and (c) show MPPC output waveforms measured at different incident light levels and observed on an oscilloscope. The incident light level was increased in the order of (a), (b), and (c), starting from (a) at very low light levels. The output signal of (a) consists of discrete pulses. In this state, selecting the digital output type allows measuring at a higher S/N, where the signals are binarized and the number of pulses is digitally counted. Since the digital output type can easily subtract the dark count from the signal, the detection limit is determined by dark count fluctuations. As the light level increases, the output waveform consists of pulses overlapping each other [Figures (b) and (c)]. In this state, the number of pulses cannot be counted and the analog output type should be selected to measure the analog output and find the average value. The detection limit in the analog output type is determined by the dark current shot noise and the cutoff frequency of the readout circuit. Pulse waveform comparison (typical example) (a) Very low light level (b) Low light level (c) High light level 6

MPPC and MPPC module for precision measurement Block diagram Analog output type (C13365-1350SA) Amplifier Analog output MPPC sensor Power supply for MPPC C11204-01 ±5 V KACCC0675EA Digital output type (C13366-1350GD) TE-cooled type MPPC High-voltage controller controller High-voltage power supply circuit Microcontroller ±5 V Amplifier Comparator circuit Digital output KACCC0674EA Connection example (C13366-1350GA) Oscilloscope Analog signal cable Light source Photons MPPC module Power cable (accessory) Subject Power supply (±5 V) KACCC0770EA 7

MPPC module C13365 series Features Built-in MPPC for precision measurement High sensitivity in the short wavelength range Low noise equivalent power Built-in temperature compensation function Compact and lightweight Analog output Applications Flow cytometry Low-level light measurement Fluorescence measurement Absolute maximum ratings Parameter Symbol Condition Value Unit Supply voltage Vs ±6 V Operating temperature Topr No condensation -20 to +60 C Storage temperature Tstg No condensation -20 to +80 C Specifications (Typ. Ta=25 C, λ=λp, Vs=±5 V, unless otherwise noted) Parameter Symbol Condition C13365-1350SA C13365-3050SA Min. Typ. Max. Min. Typ. Max. Unit Spectral response range λ 270 to 900 270 to 900 nm Peak sensitivity wavelength λp 500 500 nm Effective photosensitive area - 1.3 1.3 3.0 3.0 mm Pixel pitch - 50 50 μm Number of pixels - 667 3600 - Output voltage stability depending on temperature - Ta=25 ± 10 C - - ±5 - - ±5 % Photoelectric conversion sensitivity - 0.7 1.0 1.3 0.7 1.0 1.3 10 9 V/W Cutoff High band 3.5 5-3.5 5 - MHz fc -3 db frequency Low band DC DC - Noise equivalent power NEP Dark state - 0.5 1.0-1.2 2.0 fw/hz 1/2 Minimum detection limit - Dark state - 1 2-2.7 4.5 pw.r.m.s. Maximum output voltage - 4.7 4.7 V Dimensions (W D H) - 36 22 12.9 mm Block diagram Analog output waveforms High-speed amplifier Analog output MPPC sensor Power supply for MPPC C11204-01 +5 V 100 mv GND KACCC0710EA 1 μs 8

MPPC and MPPC module for precision measurement MPPC module C13366-GA series Features Built-in TE-cooled MPPC (built-in MPPC for precision measurement) High sensitivity in the short wavelength range Low noise equivalent power Built-in temperature control function Analog output Applications Low-level light measurement Laser microscope Flow cytometry Fluorescence measurement Absolute maximum ratings Parameter Symbol Condition Value Unit Supply voltage Vs ±6 V Operating temperature Topr No condensation -10 to +40 C Storage temperature Tstg No condensation -20 to +70 C Specifications (Typ. Ta=25 C, λ=λp, Vs=±5 V, unless otherwise noted) Parameter Symbol Condition C13366-1350GA C13366-3050GA Min. Typ. Max. Min. Typ. Max. Unit Spectral response range λ 320 to 900 320 to 900 nm Peak sensitivity wavelength λp 500 500 nm Effective photosensitive area - 1.3 1.3 3.0 3.0 mm Pixel pitch - 50 50 μm Number of pixels - 667 3600 - Element temperature (setting temperature) Td -20-20 C Photoelectric conversion sensitivity - 0.7 1.0 1.3 0.7 1.0 1.3 10 9 V/W Cutoff High band 3 4-3 4 - MHz fc -3 db frequency Low band DC DC - Noise equivalent power NEP Dark state - 0.1 0.2-0.15 0.3 fw/hz 1/2 Minimum detection limit - Dark state - 0.25 0.4-0.35 0.7 pw.r.m.s. Maximum output voltage - 4.7 4.7 V Dimensions (W D H) - 98 60 35 mm Block diagram Analog output waveforms TE-cooled type MPPC High-voltage controller controller High-voltage power supply circuit Microcontroller ±5 V Amplifier Analog output GND KACCC0680EA 100 mv 1 μs 9

MPPC module C13366-GD series Features Built-in TE-cooled MPPC (built-in MPPC for precision measurement) High sensitivity in the short wavelength range Low crosstalk Low dark count Low afterpulses Digital output Applications Low-level light measurement Flow cytometry Fluorescence measurement Absolute maximum ratings Parameter Symbol Condition Value Unit Supply voltage Vs ±6 V Operating temperature Topr No condensation -10 to +40 C Storage temperature Tstg No condensation -20 to +70 C Specifications (Typ. Ta=25 C, λ=λp, Vs=±5 V, unless otherwise noted) Parameter Symbol Condition C13366-1350GD C13366-3050GD Min. Typ. Max. Min. Typ. Max. Unit Spectral response range λ 320 to 900 320 to 900 nm Peak sensitivity wavelength λp 450 450 nm Effective photosensitive area - 1.3 1.3 3.0 3.0 mm Pixel pitch - 50 50 μm Number of pixels - 667 3600 - Element temperature (setting temperature) Td -20-20 C Photon detection efficiency PDE Threshold level: 0.5 p.e. 40 40 % Dark count - Threshold level: 0.5 p.e. - 2.5 7-12 36 kcps Comparator output - TTL compatible - Afterpulse probability - 100 ns to 500 ns - 0.1 - - 0.1 - % Crosstalk probability - - 1 - - 3 - % Comparator threshold level - 0.5 to 8.5 (9 levels, adjustable) p.e. Dimensions (W D H) - 98 60 35 mm Block diagram Digital output waveform TE-cooled type MPPC High-voltage controller controller High-voltage power supply circuit Microcontroller ±5 V Amplifier Comparator circuit Digital output 1 V KACCC0674EA GND 10 ns 10

MPPC and MPPC module for precision measurement Application examples of MPPC module Fluorescence measurement Flow cytometry Reagent Semiconductor laser MPPC module MPPC module Fluorescence Fluorescence Sample Scattered light Photodiode Major characteristics High photon detection efficiency, low afterpulse Suitable MPPC modules C13366-1350GA, C13366-3050GA C13366-1350GD, C13366-3050GD Scintillation measurement KACCC0664EA Major characteristics Wide dynamic range, High photon detection efficiency Suitable MPPC modules C13365-1350SA, C13365-3050SA C13366-1350GA, C13366-3050GA Particle diameter measurement KACCC0668EB Cancer position information Pair annihilation gamma-rays Light source MPPC module Subject MPPC module (array type) KACCC0598EA KACCC0764EA Major characteristics Wide dynamic range Suitable MPPC modules C13365-1350SA, C13365-3050SA Major characteristics Low dark count, low afterpulse Suitable MPPC modules C13001-01 Surface inspection Distance measurement Semiconductor laser MPPC module MPPC module Semiconductor laser KACCC0665EB Major characteristics High-speed response, wide dynamic range Suitable MPPC modules C11209-110 KACCC0666EA Major characteristics High-speed response, wide dynamic range Suitable MPPC modules C11209-110 11

MPPC MPPC for precision measurement 12

MPPC and MPPC module for precision measurement MPPC for precision measurement S13360 series The S13360 series are MPPCs for precision measurement that inherit the high photon detection efficiency of their predecessors and at the same time provide lower crosstalk, lower afterpulse, and lower dark count. They are suitable for precision measurement, such as flow cytometry, DNA sequencer, laser microscope, and fluorescence measurement, that requires low noise characteristics. They are available in two types: ceramic package and surface mount. Selection guide Type no. S13360-1325CS S13360-1325PE S13360-3025CS S13360-3025PE S13360-6025CS S13360-6025PE S13360-1350CS S13360-1350PE S13360-3050CS S13360-3050PE S13360-6050CS S13360-6050PE S13360-1375CS S13360-1375PE S13360-3075CS S13360-3075PE S13360-6075CS S13360-6075PE Pixel pitch (μm) 25 50 75 Effective photosensitive area (mm) Number of pixels 1.3 1.3 2668 3.0 3.0 14400 6.0 6.0 57600 1.3 1.3 667 3.0 3.0 3600 6.0 6.0 14400 1.3 1.3 285 3.0 3.0 1600 6.0 6.0 6400 Package Fill factor (%) 47 74 82 Structure / Absolute maximum ratings Type no. (package) S13360-****CS (ceramic) S13360-****PE (surface mount type) Window material Refractive index of window material Operating* 1 temperature Topr ( C) Storage* 1 temperature Tstg ( C) Absolute maximum ratings Soldering conditions Silicone resin 1.41-20 to +60-20 to +80 Epoxy resin 1.55 - Reflow soldering conditions* 2 Tsol 350 C or less, once, within 3 seconds* 3 - Peak temperature: 240 C, twice *1: No condensation *2: JEDEC level 5a *3: Separate by at least 1 mm from the lead root Note) Exceeding the absolute maximum ratings even momentarilymay cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings. 13

Electrical and optical characteristics (Typ. Ta=25 C, unless otherwise noted) Type no. Measurement conditions Spectral response range λ (nm) S13360-1325CS 270 to 900 S13360-1325PE 320 to 900 S13360-3025CS Vover 270 to 900 S13360-3025PE =5 V 320 to 900 S13360-6025CS 270 to 900 S13360-6025PE 320 to 900 S13360-1350CS 270 to 900 S13360-1350PE 320 to 900 S13360-3050CS Vover 270 to 900 S13360-3050PE =3 V 320 to 900 S13360-6050CS 270 to 900 S13360-6050PE 320 to 900 S13360-1375CS 270 to 900 S13360-1375PE 320 to 900 S13360-3075CS Vover 270 to 900 S13360-3075PE =3 V 320 to 900 S13360-6075CS 270 to 900 S13360-6075PE 320 to 900 Peak sensitivity wavelength λp (nm) 450 Photon detection efficiency PDE* 1 λ=λp (%) 25 40 50 Dark count* 2 Typ. (kcps) Max. (kcps) Terminal capacitance Ct (pf) 70 210 60 400 1200 320 1600 5000 1280 90 270 60 500 1500 320 2000 6000 1280 90 270 60 500 1500 320 2000 6000 1280 Gain M 7.0 10 5 Breakdown voltage VBR (V) Crosstalk probability (%) Recommended operating voltage Vop (V) 1 VBR + 5 1.7 10 6 53 ± 5 3 VBR + 3 4.0 10 6 7 VBR + 3 coefficient at recommended operating voltage ΔTVop (mv/ C) *1: Photo detection efficiency does not include crosstalk or afterpulse. *2: Threshold=0.5 p.e. Note: The above characteristics were measured at the operating voltage that yields the listed gain. (See the data attached to each product.) 54 14

MPPC and MPPC module for precision measurement Dimensional outlines (unit: mm) S13360-1325CS/-1350CS/-1375CS Cathode indicator hole Photosensitive area 1.3 1.3 1.3 6.0 +0-0.25 1.3 5.0 ± 0.2 S13360-1325PE/-1350PE/-1375PE Photosensitive area 1.3 1.3 2.1 2.625 0.4 ± 0.15 0.26 ± 0.15 0.4 ± 0.15 1.3 Silicone resin Photosensitive surface 1.0 ϕ0.45 ± 0.05 Lead 3.0 ± 0.2 12 ± 1.0 1.5 0.85 ± 0.15 0.3 1.3 0.4 ± 0.15 Epoxy resin Photosensitive surface Lead material: Fe-Ni-Co alloy Lead processing: Au plating Tolerance unless otherwise noted: Chip position accuracy with respect to the package center: X, Y ±0.25 The resin coating may extend a m of 0.1 mm above the upper KAPDA0155EA surfac NC Cathode Anode NC Index mark 0.6 1.425 0.6 0.6 0.5 0.6 Tolerance unless otherwise note *Distance from chip center to pa KAPDA0158EA S13360-3025CS/-3050CS/-3075CS 5.9 ± 0.15 3.0 Photosensitive area 3.0 3.0 6.55 ± 0.15 3.0 0.33 S13360-3025PE/-3050PE/-3075PE 0.925 ± 0.15 Photosensitive area 3.0 3.0 3.85 0.425 ± 0.15 3.0 4.35 3.0 0.25 ± 0.15 0.45 Photosensitive surface ɸ0.46 ± 0.05 Silicone resin Epoxy resin Photosensitive surface 0.3 1.45 ± 0.15 4.25 Index mark 1.0 1.0 2.2 Tolerance unless otherwi *Distance from chip cente KAPDA0159EA Photosensitive area 6.0 6.0 7.35 0.25 ± 0.15 6.0 6.85 2.0 6.0 ± 0.5 2.0 2.54 ± 0.15 KAPDA0156EA S13360-6025CS/-6050CS/-6075CS S13360-6025PE/-6050PE/-6075PE Photosensitive area 6.0 6.0 10.1 ± 0.1 6.0 6.0 8.9 ± 0.1 0.425 ± 0.15 6.0 Silicone resin 0.8 Photosensitive surface 2.0 ± 0.1 0.425 ± 0.15 0.3 Epoxy resin Photosensitive surface 0.3 1.45 ± 0.2 ɸ0.5 Lead (10.5) 7.4 ± 0.2 Index mark: Cathode 7.35 4.6 Lead material: Fe-Ni-Co all Lead processing: Au platin Tolerance unless otherwise Chip position accuracy with package center: X, Y ±0 The resin coating may exte 0.1 mm above KAPDA0157EA the upper s NC Anode Cathode NC Index mark 4.2 6.85 Tolerance unless otherwise noted: ±0 *Distance from chip center to package KAPDA0153EA 15

MPPC for precision measurement (TSV type) S13360-2050VE/-3050VE/-6050VE The S13360-2050VE/-3050VE/-6050VE MPPCs employ through-hole electrodes called TSV (through-silicon via). Since no electrode space for wire bonding is needed, the gap (between the package edge and the MPPC photosensitive area) around the outer periphery is reduced to 0.2 mm on the four sides, allowing a four-side buttable arrangement. The S13360-2050VE/-3050VE/-6050VE are optimized for medical imaging and high-energy particle detection requiring photon counting measurement, as well as other applications involving low-light-level detection. Selection guide Type no. Effective photosensitive area Pixel pitch Number of pixels (per 1 channel) (mm) (μm) S13360-2050VE 2.0 2.0 1584 S13360-3050VE 3.0 3.0 50 3584 S13360-6050VE 6.0 6.0 14336 Package Fill factor (%) 74 Structure / Absolute maximum ratings Type no. S13360-2050VE S13360-3050VE S13360-6050VE Window material Refractive index of window material Operating* 1 temperature Topr ( C) Absolute maximum ratings Storage* 1 temperature Tstg ( C) Epoxy resin 1.55 0 to +40-20 to +60 Reflow soldering conditions* 2 Tsol Peak temperature: 240 C, twice *1: No condensation *2: JEDEC level 5a Note) Exceeding the absolute maximum ratings even momentarilymay cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings. Electrical and optical characteristics (Typ. Ta=25 C, unless otherwise noted) Type no. Measurement conditions Spectral response range λ Peak sensitivity wavelength λp Photon detection efficiency PDE* 3 λ=λp Dark count* 4 Terminal capacitance Ct (nm) (nm) (%) (kcps) (kcps) (pf) S13360-2050VE 220 660 140 Vover S13360-3050VE 320 to 900 450 40 500 1500 320 =5 V S13360-6050VE 2000 6000 1280 Typ. Max. Gain M Breakdown voltage VBR (V) Recommended operating voltage Vop (V) coefficient at recommended operating voltage ΔTVop (mv/ C) 1.7 10 6 53 ± 5 VBR + 3 54 *3: Photo detection efficiency does not include crosstalk or afterpulse. *4: Threshold=0.5 p.e. Note: The above characteristics were measured at the operating voltage that yields the listed gain. (See the data attached to each product.) 16

MPPC and MPPC module for precision measurement Dimensional outlines (unit: mm) S13360-2050VE S13360-3050VE S13360-3050VE 17

MPPC array for precision measurement S13361 series The S13361 series MPPC arrays employ through-hole electrodes called TSV (throughsilicon via). The pitch of each MPPC channel is 3.2 mm. The S13361 series is optimized for medical imaging and high-energy particle detection requiring photon counting measurement, as well as other applications involving low-lightlevel detection. Selection guide Type no. Effective photosensitive Number of Pixel pitch Number of pixels area channels (per 1 channel) Package (mm) (μm) S13361-2050NE-04 16 2.0 2.0 1584 S13361-2050AE-04 (4 4) Connector* 1 S13361-3050NE-04 16 S13361-3050AE-04 (4 4) Connector* 3.0 3.0 50 3584 S13361-3050NE-08 64 S13361-3050AE-08 (8 8) Connector* 1 S13361-6050NE-04 16 6.0 6.0 14336 S13361-6050AE-04 (4 4) Connector* 1 Fill factor *1: A connector made by SAMTEC is mounted on the back side of the board. ST4-10-1.00-L-D-P-TR (S13361-2050NE/AE-04) ST4-20-1.00-L-D-P-TR (S13361-3050NE/AE-04) ST4-40-1.00-L-D-P-TR (S13361-3050NE/AE-08, S13361-6050NE/AE-04) These connectors mate with a SAMTEC receptacle (SS4-10-3.00-L-D-K-TR, SS4-20-3.00-L-D-K-TR, or SS4-40-3.00-L-D-K-TR). See the following URL for detailed information. http://www.samtec.com/ftppub/pdf/ss4.pdf (%) 74 Structure / Absolute maximum ratings Type no. S13361-2050NE-04 S13361-2050AE-04 S13361-3050NE-04 S13361-3050AE-04 S13361-3050NE-08 S13361-3050AE-08 S13361-6050NE-04 S13361-6050AE-04 Window material Refractive index of window material Epoxy resin 1.55 Operating* 2 temperature Topr ( C) Absolute maximum ratings Storage* 2 temperature Tstg ( C) -20 to +60-20 to +80 0 to +40-20 to +60 Reflow soldering conditions* 3 Tsol Peak temperature: 240 C, twice *2: No condensation *3: JEDEC level 5a Note: Exceeding the absolute maximum ratings even momentarilymay cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings. 18

MPPC and MPPC module for precision measurement Electrical and optical characteristics (Typ. Ta=25 C, unless otherwise noted) Type no. S13361-2050NE-04 S13361-2050AE-04 S13361-3050NE-04 S13361-3050AE-04 S13361-3050NE-08 S13361-3050AE-08 S13361-6050NE-04 S13361-6050AE-04 Measurement conditions Vover =5 V Spectral response range λ (nm) Peak sensitivity wavelength λp (nm) Photon detection efficiency PDE* 4 λ=λp (%) Dark count* 5 Typ. (kcps) Max. (kcps) Terminal capacitance Ct (pf) Gain M Breakdown voltage VBR (V) Recommended operating voltage Vop (V) coefficient at recommended operating voltage ΔTVop (mv/ C) 320 to 900 450 40 500 1500 320 1.7 10 6 53 ± 5 VBR + 3 54 *4: Photo detection efficiency does not include crosstalk or afterpulse. *5: Threshold=0.5 p.e. Note: The above characteristics were measured at the operating voltage that yields the listed gain. (See the data attached to each product.) Dimensional outlines (unit: mm) [Top view] S13361-3050NE-04 [Side view] [Bottom view] 1.35 ± 0.20 13.0 0.2 3.0 0.2 3.0 0.2 3.0 0.2 3.0 0.2 A-1 B-1 C-1 D-1 A-2 B-2 C-2 D-2 A-3 B-3 C-3 D-3 3.0 3.0 3.0 0.2 0.2 0.2 0.2 0.1 Photosensitive surface Resin 1.9 1.3 1.9 1.3 1.9 1.3 A(D-1) K(D-1) A(D-2) K(D-2) A(D-3) K(D-3) A(D-4) A(C-1) K(C-1) A(C-2) K(C-2) A(C-3) K(C-3) A(C-4) K(B-1) A(B-1) K(B-2) A(B-2) K(B-3) A(B-3) K(B-4) K(A-1) A(A-1) K(A-2) A(A-2) K(A-3) A(A-3) K(A-4) Cathode (16 ) ϕ0.7 A-4 B-4 C-4 D-4 3.0 1.3 K(D-4) K(C-4) A(B-4) A(A-4) 13.0 0.2 Photosensitive area (16 ) 3.0 3.0 Index mark 1.3 1.9 1.3 1.9 1.3 1.9 1.3 Anode (16 ) ϕ0.7 Tolerance: ±0.1 unless otherwise noted * A (X-Y): Anode pad of (X-Y) channel. K (X-Y): Cathode pad of (X-Y) channel. KAPDA0168EA S13361-3050AE-04 [Top view] [Side view] [Bottom view] 1.35 ± 0.20 (3.08) 13.0 0.2 3.0 0.2 3.0 0.2 3.0 0.2 3.0 0.2 A-1 A-2 A-3 A-4 B-1 B-2 B-3 B-4 C-1 C-2 C-3 C-4 D-1 D-2 D-3 D-4 3.0 3.0 3.0 3.0 0.2 0.2 0.2 0.2 0.1 Photosensitive surface Resin 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 (9.4) (3 ) Index mark 13.0 0.2 Photosensitive area (16 ) 3.0 3.0 Connector (SAMTEC) ST4-20-1.00-L-D-P-TR (3.7) Tolerance: ±0.1 unless otherwise noted KAPDA0169EA 19

Other MPPC product Other MPPC and MPPC module The product lineup containing MPPCs for general measurement (low afterpulse) is provided below. MPPC modules Type no. Photo Effective photosensitive area Pixel pitch C11209-110 1.0 mm 10 μm control compensation (non-cooled) Output Analog C13001-01 Single pixel ɸ50 μm (fiber coupling type) TE-cooled (-20 C) Digital MPPC array modules Array modules are available in various types. Contact us for detailed information. MPPC for general measurement Type no. Photo Photosensitive area Pixel pitch Package S12571-010C S12571-015C S12571-010P S12571-015P 1.0 mm 10 μm 15 μm 10 μm 15 μm S12572-010C S12572-015C S12572-010P S12572-015P 3.0 mm 10 μm 15 μm 10 μm 15 μm 20

MPPC and MPPC module for precision measurement Related product This is a starter kit for evaluating the MPPC. It consists of a power supply circuit board and a sensor circuit board. The power supply circuit board is equipped with a C11204-01 power supply for MPPC. The sensor circuit board has an MPPC socket with leads, which allows various non-cooled MPPCs to be implemented. Features Starter kit for MPPC C12332-01 Enables the evaluation of non-cooled MPPCs (sold separately) Comes with a socket for an MPPC Connection possible MPPC with flexible cable Equipped with a high-accuracy, high-voltage C11204-01 power supply Adjustable operating voltage and temperature compensation coefficient Selectable amplifier usage Load resistance 50 Ω or 1 kω selectable Analog output C11204-01 power supply for MPPC This is a high voltage power supply that is optimized for driving MPPCs. Since it has a temperature compensation function, MP- PCs can be driven stably even in environments subject to temperature changes. Features Wide output voltage range: 50 V to 90 V Low ripple noise: 0.1 mvp-p typ. Superb temperature stability: ±10 ppm/ C typ. High resolution settings (1.8 mv resolution) Serial interface Customized MPPC module Hamamatsu Photonics can provide the most suitable module product by combining its vast MPPC lineup with optical technologies, circuit technologies, and software technologies. Contact us for detailed information. 21

Principle of operation Photon counting Light has the properties of both a particle and a wave. When the light level becomes extremely low, light behaves as discrete particles (photons) allowing us to count the number of photons. Photon counting is a technique for measuring the number of individual photons. The MPPC is suitable for photon counting since it offers an excellent time resolution and a multiplication function having a high gain and low noise. Compared to ordinary light measurement techniques that measure the output current as analog signals, photon counting delivers a higher S/N and higher stability even in measurements at very low light levels. Geiger mode and quenching resistor When an APD is operated at a reverse voltage higher than the breakdown voltage, a saturated output inherent to the APD device occurs (Geiger discharge) by input of light regardless of whether the light level is high or low. The condition where an APD operates at this voltage level is called Geiger mode. Geiger mode allows obtaining a large output by way of discharge even when detecting a single photon. Once Geiger discharge begins, it continues for as long as the electric field in the APD is maintained. To halt a Geiger discharge and detect the next photon, an external circuit outside the APD must lower the operating voltage. One specific example for halting the Geiger discharge is a technique using a so-called quenching resistor connected in series with the APD. This quickly stops avalanche multiplication in the APD because a drop in the operating voltage occurs when the output current caused by the Geiger discharge flows in the quenching resistor. The output current caused by Geiger discharge is a pulse waveform with a sharp rise time, while the output current when Geiger discharge is halted by the quenching resistor is a pulse waveform with a relatively slow fall time [Figure 5]. Image of MPPC s photon counting Basic operation KAPDC0049EA Each pixel in the MPPC outputs a pulse at the same amplitude when it detects a photon. Pulses generated by multiple pixels are output while superimposed onto each other. For example, if four photons are incident on different pixels and detected at the same time, then the MPPC outputs a signal whose amplitude equals the height of the four superimposed pulses. Each pixel outputs only one pulse and this does not vary with the number of incident photons. So the number of output pulses is always one regardless of whether one photon or two or more photons enter a pixel at the same time. This means that MPPC output linearity gets worse as more photons are incident on the MPPC such as when two or more photons enter one pixel. This makes it essential to select an MPPC having enough pixels to match the number of incident photons. Basic connection diagram +V 1 kω 0.1 μf Structure The MPPC structure is shown in the following figure. The basic element (pixel) of an MPPC is a combination of the Geiger mode APD and quenching resistor, and a large number of these pixels are electrically connected and arranged in two dimensions. MPPC Amplifier Signal KAPDC0024EB Geiger-mode APD pixel Quenching resistor For the MPPC readout circuit, a current-to-voltage amplifier can be used as with previous semiconductor devices. The MPPC outputs high-speed pulse signals, but because the gain of the MPPC itself is high, there is no need to greatly increase the gain on the circuit side. This has an advantage that there is more freedom in circuit design. KAPDC0029EA 22

MPPC and MPPC module for precision measurement MPPC is registered trademark of Hamamatsu Photonics K.K. (Japan, U.S.A, EU, Switzerland) Information described in this material is current as of March, 2016. Product specifications are subject to change without prior notice due to improvements or other reasons. This document has been carefully prepared and the information contained is believed to be accurate. In rare cases, however, there may be inaccuracies such as text errors. Before using these products, always contact us for the delivery specification sheet to check the latest specifications. The product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovered and reported to us within that one year period. However, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product use. Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 8152-375-0, Fax: (49) 8152-265-8 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Thorshamnsgatan 35 16440 Kista, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1 int. 6, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741 China: Hamamatsu Photonics (China) Co., Ltd.: 1201 Tower B, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86) 10-6586-6006, Fax: (86) 10-6586-2866 Cat. No. KAPD0004E04 Mar. 2016