InGaAs linear image sensors

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Transcription:

G11620 series (non-cooled type) Single video line (128/256/512 pixels) near infrared image sensor (0.95 to 1.7 μm) The G11620 series is an InGaAs linear image sensor designed for near-infrared multichannel spectrophotometry. The CMOS chip includes a charge amplifier, a shift register, and a timing generator circuit. Unlike conventional InGaAs linear image sensors that incorporate two CMOS signal processing chips, the G11620 series uses only one CMOS chip by bump-connecting it to the InGaAs photodiode array. This structure reduces a difference in the video output that usually occurs between oddnumber pixels and even-number pixels. The charge amplifier array is made up of CMOS transistors connected to each pixel of the InGaAs photodiode array. Signals from each pixel are read out in charge integration mode to achieve high sensitivity and stable operation in the wide spectral range. The signal processing circuit on the CMOS chip offers two levels of conversion efficiency (CE) that can be selected by the external voltage to meet the application. Features Applications Low noise, low dark current Two selectable conversion efficiencies Anti-saturation circuit CDS circuit* 1 Built-in thermistor Simple operation (by built-in timing generator)* 2 High resolution: 25 μm pitch (G11620-256DF/-512DA) Near infrared multichannel spectrophotometry Radiation thermometry Non-destructive inspection *1: A major source of noise in charge amplifiers is the reset noise generated when the integration capacitance is reset. A CDS (correlated double sampling) circuit greatly reduces this reset noise by holding the signal immediately after reset to find the noise differential. *2: Different signal timings must be properly set in order to operate a shift register. In conventional image sensor operation, external PLDs (programmable logic device) are used to input the required timing signals. However, the image sensors internally generate all timing signals on the CMOS chip just by supplying and pulses. This makes it simple to set the timings. Selection guide Image size Number of effective Type no. Cooling Number of total pixels (mm) pixels G11620-128DA 128 128 6.4 0.5 G11620-256DF 256 256 Non-cooled G11620-256DA 256 256 12.8 0.5 G11620-512DA 512 512 Applicable driver circuit C11513 Structure Type no. Pixel size Pixel pitch [μm (H) μm ()] (μm) G11620-128DA 50 500 50 G11620-256DF 25 500 25 G11620-256DA 50 500 50 G11620-512DA 25 500 25 Package 22-pin ceramic (refer to the dimensional outline) Window material Borosilicate glass with anti-reflective coating www.hamamatsu.com 1

Details of photosensitive area (unit: μm) x H Type no. G11620-128DA G11620-256DA G11620-256DF G11620-512DA x H 30 50 25 500 500 KMIRC0086EA Block diagram (G11620-512DA) CMOS chip Shift register... Charge amplifier... CMOS readout circuit InGaAs chip... Timing generator... Shift register... AD_sp AD_trig KMIRC0048EA 2

Absolute maximum ratings Parameter Symbol Condition Min. Typ. Max. Unit Supply voltage dd, INP, Fvref inp, PDN Ta=25 C -0.3 - +6 Clock pulse voltage ϕ Ta=25 C -0.3 - +6 Reset pulse voltage (RES) Ta=25 C -0.3 - +6 Gain selection terminal voltage cfsel Ta=25 C -0.3 - +6 Operating temperature Topr No dew condensation* 3 - - +60 C Storage temperature Tstg No dew condensation* 3-20 - +70 C Soldering conditions - 260 C or less, within 5 s - power disspation Pd_th Ta=25 C - - 400 mw *3: When there is a temperature difference between a product and the surrounding area in high humidity environment, dew condensation may occur on the product surface. Dew condensation on the product may cause deterioration in characteristics and reliability. Note: Absolute maximum ratings are the values that must not be exceeded at any time. If even one of the absolute maximum ratings is exceeded even for a moment, the product quality may be impaired. Always be sure to use the product within the absolute maximum ratings. Recommended terminal voltage (Ta=25 C) Parameter Symbol Min. Typ. Max. Unit Supply voltage dd 4.7 5.0 5.3 Differential reference voltage Fvref 1.1 1.2 1.3 ideo line reset voltage inp 3.9 4.0 4.1 Input stage amplifier reference voltage INP 3.9 4.0 4.1 Photodiode cathode voltage PDN 3.9 4.0 4.1 Ground ss - 0 - Clock pulse voltage High 4.7 5.0 5.3 ϕ Low 0 0 0.4 Reset pulse voltage High 4.7 5.0 5.3 (RES) Low 0 0 0.3 Electrical characteristics (Ta=25 C) Parameter Symbol Min. Typ. Max. Unit G11620-128DA - 35 60 Consumption current G11620-256DF - 50 80 I(dd) G11620-256DA - 55 80 G11620-512DA - 80 0 Ifvref - - 1 ma Ivinp - - 1 Iinp - - 1 Ipdn - - 1 Clock frequency f 0.1 1 5 MHz ideo data rate DR 0.1 f 5 MHz ideo output voltage High H - 4.0 - Low L - 1.2 - Output offset voltage os - Fvref - Output impedance Zo - 5 - kω AD_trig, AD_sp pulse voltage High - dd - trig, sp Low - GND - resistance Rth 9.0.0 11.0 kω B constant* 4 B - 3950 - K *4: T1=25 C, T2=50 C 3

Electrical and optical characteristics (Ta=25 C, dd=5, INP=inp=PDN=4, Fvref=1.2, ϕ=5, f=1 MHz) Parameter Symbol Condition Min. Typ. Max. Unit Spectral response range λ - 0.95 to 1.7 - μm Peak sensitivity wavelength λp 1.45 1.55 1.65 μm Photo sensitivity S λ=λp 0.7 0.82 - A/W Conversion efficiency* 5 CE Cf= pf - 16 - Cf=1 pf - 160 - n/e- Photo response non-uniformity* 6 PRNU - ±5 ± % Saturation charge Qsat CE=16 n/e- 168 175 - CE=160 n/e- 16.8 17.5 - Me- Saturation voltage sat 2.7 2.8 - Dark output D CE=16 n/e- - ±0.05 ±0.5 /s Dark current ID CE=16 n/e- - ±0.5 ±5 pa Temperature coefficient of dark output (dark current) - CE=16 n/e- - 1.1 - times/ C Readout noise* 7 N CE=16 n/e- - 200 400 CE=160 n/e- - 300 500 μ rms Dynamic range D CE=16 n/e- 6750 14000 - - Defective pixels* 8 - CE=16 n/e- - - 1 % *5: Refer to pin connection when changing conversion efficiency. *6: 50% of saturation, integration time ms, after dark output subtraction, excluding first and last pixels *7: Integration time= ms (CE=16n/e-), 1 ms (CE=160 n/e-) *8: Pixels with photo response non-uniformity, readout noise, or dark current higher than the maximum value 4

Equivalent circuit G11620-128DA/256DA PDN Cf_select S/H INP Fvref Photodiode array Charge amplifier array CMOS readout circuit KMIRC0049EA G11620-256DF/512DA PDN Cf_select S/H Odd pixels Even pixels INP Odd pixels Fvref Cf_select S/H INP Even pixels Photodiode array Charge amplifier array CMOS readout circuit KMIRC0054EA 5

Timing chart Integration time (setting) 5 Blank AD_sp 5 Integration time (actual) AD_trig n 1 2 n-1 n tf(clk) tr(clk) tpw(clk) Note: n=number of channels tr(res) tf(res) tpw(res) KMIRC0055EB Parameter Symbol Min. Typ. Max. Unit Clock pulse frequency f 0.1 1 5 MHz Clock pulse width tpw(clk) 60 500 5000 ns Clock pulse rise/fall times tr(clk), tf(clk) 0 20 30 ns Reset pulse width High 6 - - tpw(res) Low Number of pixels + 28 - - clocks Reset pulse rise/fall times tr(res), tf(res) 0 20 30 ns 6

Connection example Pulse generator AD_sp AD_trig Buffer amp Buffer amp Controller Supply voltage Cf_select 1 Cf_select 2 INP PDN inp Fvref ADC dd GND Buffer amp KMIRC0056EB Spectral response (typical example) Spectral transmittance characteristic of window material (typical example) 1.0 (Ta=25 C) 0 (Ta=25 C) 0.8 95 Photo sensitivity (A/W) 0.6 0.4 Transmittance (%) 90 85 80 0.2 75 0 0.8 1.0 1.2 1.4 1.6 1.8 70 0.8 1.0 1.2 1.4 1.6 1.8 Wavelength (μm) Wavelength (μm) KMIRB0051EB KMIRB0090EA 7

Linearity error (Td=25 C, dd=5, INP=inp=PDN=4, Fvref=1.2, f=1 MHz, CE=16 n/eˉ) 20 15 Linearity error (%) 5 0-5 - -15-20 1 0 00 000 Output voltage (m) KMIRB0091EA Temperature characteristic of thermistor resistance (kω) 00 0 (Typ.) Temperature ( C) -40-35 -30-25 -20-15 - -5 0 5 15 resistance (kω) 281 208 155 117 88.8 68.4 53.0 41.2 32.1 25.1 19.8 15.7 Temperature ( C) 20 25 30 35 40 45 50 55 60 65 70 resistance (kω) 12.5.0 8.06 6.53 5.32 4.36 3.59 2.97 2.47 2.07 1.74 1-40 -30-20 - 0 20 30 40 50 60 70 Temperature ( C) KMIRB0061EA 8

Dimensional outlines (unit: mm) 31.8 ± 0.3 16.8 ± 0.3 G11620-128DA/256DF 3.0 ± 0.3 1.7 ± 0.2 22 21 13 12 Window 15.1 ± 0.3 1 2 11 3.0 ± 0.3 13.2 ± 0.3 15.5 ± 0.3 Photosensitive surface 15.24 ± 0.3 Index mark Photosensitive area (left side 1 ch) 0.25 ± 0.05 4 ± 1 Photosensitive surface 1.7 ± 0.2 2.54 ± 0.15 0.51 ± 0.05 25.4 ± 0.15 Pin no. 1 2 3 4 5 6 7 8 9 11 Function Cf_select 2 Cf_select 1 Fvref Pin no. 12 13 14 15 16 17 18 19 20 21 22 Function inp PDN* INP* GND dd AD_trig AD_sp Chip material: InGaAs Package material: ceramic Lead treatment: Ni/Au plating Lead material: FeNi alloy Reflective index of window material: nd=1.47 Window material thickness: 0.75 ± 0.05 AR-coated Window sealing method: resin adhesion Position accuracy of photosensitive area center: -0.3 X +0.3-0.3 Y +0.3 * PDN and INP should be at the same potential. When supplying voltage to PDN and INP, it is recommended to use the same power source and short between their pins. KMIRA0030EB 9

G11620-256DA/512DA 31.8 ± 0.3 23.2 ± 0.3 22 21 13 12 3.0 ± 0.3 1.7 ± 0.2 Window 15.1 ± 0.3 1 2 11 3.0 ± 0.3 Photosensitive surface 1.7 ± 0.2 13.2 ± 0.3 15.5 ± 0.3 Photosensitive surface 15.24 ± 0.3 Index mark Photosensitive area (left side 1 ch) 0.25 ± 0.05 4 ± 1 2.54 ± 0.15 25.4 ± 0.15 0.51 ± 0.05 Pin no. 1 2 3 4 5 6 7 8 9 11 Function Cf_select 2 Cf_select 1 Fvref Pin no. 12 13 14 15 16 17 18 19 20 21 22 Function inp PDN* INP* GND dd AD_trig AD_sp Chip material: InGaAs Package material: ceramic Lead treatment: Ni/Au plating Lead material: FeNi alloy Reflective index of window material: nd=1.47 Window material thickness: 0.75 ± 0.05 AR-coated Window sealing method: resin adhesion Position accuracy of photosensitive area center: -0.3 X +0.3-0.3 Y +0.3 * PDN and INP should be at the same potential. When supplying voltage to PDN and INP, it is recommended to use the same power source and short between their pins. KMIRA0023ED

Pin connections Terminal name Input/Output Function and recommended connection Remark PDN Input Cathode bias terminal for InGaAs photodiode. This should be at the same potential as INP. 4.0 AD_sp Output Digital start signal for A/D conversion 0 to 5 Cf_select1, 2 Input* 9 Signal for selecting feedback capacitance (integration capacitance) on CMOS chip 0 or 5 Output for monitoring temperature inside the package - AD_trig Output Sampling synchronous signal for A/D conversion 0 to 5 Input Reset pulse for initializing the feedback capacitance in the charge amplifier formed in the CMOS chip. Integration time is determined by the high period of this pulse. 0 to 5 Input Clock pulse for operating the CMOS shift register 0 to 5 INP Input Input stage amplifier reference voltage. Supply voltage for operating the signal processing circuit in the CMOS chip. This should be at the same potential as PDN. 4.0 inp Input ideo line reset voltage. Supply voltage for operating the signal processing circuit in the CMOS chip. 4.0 Fvref Input Differential amplifier reference voltage. Supply voltage for operating the signal processing circuit in the CMOS chip. 1.2 Output Differential amplifier output. Analog video signal. 1.2 to 4.0 dd Input Supply voltage for operating the signal processing circuit in the CMOS chip (+5 ) 5 GND Input Grand for the signal processing circuit in the CMOS chip (0 ) 0 *9: Conversion efficiency is determined by supply voltage to the Cf_select terminals as shown below. Conversion efficiency Cf_select1 Cf_select2 16 n/e- (Low gain) High High 160 n/e- (High gain) High Low Low: 0 (GND), High: 5 (dd) Electrostatic countermeasures This device has a built-in protection circuit against static electrical charges. However, to prevent destroying the device with electrostatic charges, take countermeasures such as grounding yourself, the workbench and tools to prevent static discharges. Also protect this device from surge voltages which might be caused by peripheral equipment. Related information www.hamamatsu.com/sp/ssd/doc_en.html Precautions Disclaimer Image sensors Information described in this material is current as of July, 2015. Product specifications are subject to change without prior notice due to improvements or other reasons. This document has been carefully prepared and the information contained is believed to be accurate. In rare cases, however, there may be inaccuracies such as text errors. Before using these products, always contact us for the delivery specification sheet to check the latest specifications. The product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovered and reported to us within that one year period. However, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product use. Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr., D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 8152-375-0, Fax: (49) 8152-265-8 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 16440 Kista, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39) 02-93581733, Fax: (39) 02-93581741 China: Hamamatsu Photonics (China) Co., Ltd.: B1201, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 0020, China, Telephone: (86) -6586-6006, Fax: (86) -6586-2866 Cat. No. KMIR19E06 Jul. 2015 DN 11