InGaAs linear image sensors

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InGaAs linear image sensors

InGaAs linear image sensors

InGaAs linear image sensors

InGaAs linear image sensors

InGaAs linear image sensors

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Transcription:

Near infrared image sensors for portable analytical instruments The compact low-cost near infrared linear image sensors are designed for portable analytical instruments. They consume less current than the previous product (DIP package products: G11620 series). They are suitable for integration into compact thin devices because they employ a compact LCC package with a flexible board. Features Compact (with flexible board) 3.3 drive Low current consumption: 15 ma (G13913-128FB) Low cost 128 pixels (50 250 µm/pixel): G13913-128FB 256 pixels (25 250 µm/pixel): G13913-256FG Selectable from two conversion efficiency levels Built-in anti-saturation circuit Easy operation (built-in timing generator* 1 ) High resolution: 25 μm pitch (G13913-256FG) Applications Portable analytical instruments *1: Previously, multiple timing signals were applied using external PLD (programmable logic device) or the like to run the shift register. This image sensor has a built-in CMOS circuit for timing generation. All timing signals are generated inside the image sensor by simply applying CLK and RESET signals. Selection guide Image size Type no. Cooling Total number of pixels Number of effective pixels (mm) G13913-128FB 128 128 Non-cooled 6.4 0.25 G13913-256FG 256 256 Structure Type no. Pixel size [µm (H) µm ()] Pixel pitch (µm) Package Window material G13913-128FB 50 250 50 Ceramic with flexible board Borosilicate glass* 2 G13913-256FG 25 250 25 (refer to dimensional outline) (no anti-reflective coating) *2: Windowless types are also available. www.hamamatsu.com 1

Enlarged view of photosensitive area (unit: µm) x H Type no. G13913-128FB G13913-256FG x H 30 50 10 25 250 250 KMIRC0106EA Block diagram CMOS chip Shift register... CLK ideo CMOS readout circuit Charge amplifier...... InGaAs chip Timing circuit Reset AD_sp AD_trig KMIRC0107EA Absolute maximum ratings Parameter Symbol Condition Min. Typ. Max. Unit Supply voltage dd, INP, Fvref hold, PDN Ta=25 C -0.3 - +4.2 Clock pulse voltage clk Ta=25 C -0.3 - +4.2 Reset pulse voltage (RES) Ta=25 C -0.3 - +4.2 Gain selection terminal voltage cfsel Ta=25 C -0.3 - +4.2 Operating temperature Topr No dew condensation* 3-10 - +60 C Storage temperature Tstg No dew condensation* 3-20 - +70 C *3: When there is a temperature difference between a product and the surrounding area in high humidity environment, dew condensation may occur on the product surface. Dew condensation on the product may cause deterioration in characteristics and reliability. Note: Absolute maximum ratings indicate values that must not be exceeded. Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings. 2

Recommended terminal voltage (Ta=25 C) Parameter Symbol Min. Typ. Max. Unit Supply voltage dd 3.0 3.3 3.6 Differential reference voltage Fvref 2.4 2.5 2.6 Sample hold voltage hold 2.4 2.5 2.6 Input stage amplifier reference voltage INP 2.4 2.5 2.6 Photodiode cathode voltage PDN 2.4 2.5 2.6 Ground GND - 0 - Clock pulse voltage High dd - 0.25 dd dd + 0.25 clk Low - 0 +0.25 Reset pulse voltage High dd - 0.25 dd dd + 0.25 (RES) Low - 0 +0.25 Electrical characteristics (Ta=25 C) Parameter Symbol Min. Typ. Max. Unit G13913-128FB - 15 25 I(dd) G13913-256FG - 20 30 Current consumption Ifvref - - 1 Ivhold - - 1 ma Iinp - - 1 Ipdn - - 1 Clock frequency fop 0.1 1 2 MHz Data rate DR - fop - MHz ideo output voltage Dark dark - 2.5 2.9 Saturation sat 0.2 0.3 - Output offset voltage os - Fvref - Output impedance Zo - 6 - kω AD_trig, AD_sp High - dd - trig, sp Pulse voltage Low - GND - Electrical and optical characteristics (Ta=25 C, dd=5, INP=Fvref=hold=PDN=2.5, clk=3.3, fop=1 MHz) Parameter Symbol Condition Min. Typ. Max. Unit Spectral response range λ - 0.95 to 1.7 - µm Peak sensitivity wavelength λp - 1.55 - µm Photosensitivity S λ=λp 0.7 0.82 - A/W Conversion efficiency* 4 CE Cf=10 pf - 16 - Cf=1 pf - 160 - n/e- Photoresponse nonuniformity* 5 PRNU CE=16 n/e- - ±5 ±10 % Saturation charge Csat CE=16 n/e- 125 137.5 - CE=160 n/e- 12.5 13.75 - Me- Saturation output voltage sat t=20 ms 2.0 2.2 - Dark output D CE=16 n/e- - ±0.1 ±1 /s Dark current ID CE=16 n/e- - ±5 ±10 pa Temperature coefficient of dark output (dark current) - - 1.1 - times/ C Readout noise* 6 Nread CE=16 n/e- - 150 400 CE=160 n/e- - 300 500 µ rms Dynamic range Drange CE=16 n/e- 5000 14667 - - Defect pixels* 7 - CE=16 n/e- - - 1 % *4: For switching the conversion efficiency, see the pin connections. *5: Measured at 50% saturation and 10 ms integration time after subtracting the dark output, excluding the first and last pixels *6: Integration time when CE=16n/e- is 10 ms. Integration time when CE=160 n/e- is 1 ms. *7: Pixels whose photoresponse nonuniformity, readout noise, or dark current is outside the specifications 3

Equivalent circuit PDN Cf_select S/H ideo INP hold Fvref Photodiode array Charge amp array CMOS Readout circuit KMIRC0108EA Timing chart CLK Reset Integration time (setting) 1 CLK Blank AD_sp 1 CLK Integration time (actual) AD_trig ideo n CLK 1 2 n-1 n tf(clk) tr(clk) Note: n=number of channels CLK tpw(clk) tr(res) tf(res) RESET tpw(res) KMIRC0109EA Parameter Symbol Min. Typ. Max. Unit Clock pulse frequency fop 0.1 1 2 MHz Clock pulse width tpw(clk) 150-5000 ns Clock pulse rise/fall times tr(clk), tf(clk) 0 20 30 ns Reset pulse width High 2 - - tpw(res) Low Number of pixels + 16 - - clocks Reset pulse rise/fall times tr(res), tf(res) 0 20 30 ns 4

Connection example Pulse generator CLK Reset AD_sp AD_trig Buffer amplifier Buffer amplifier Controller Supply voltage Cf_select INP PDN hold Fvref ADC dd GND ideo Buffer amplifier KMIRC0110EA Spectral response (typical example) 1.0 (Ta=25 C) Spectral transmittance of window material (typical example) 100 (Ta=25 C) 90 0.8 80 Photosensitivity (A/W) 0.6 0.4 Transmittance (%) 70 60 50 40 30 0.2 20 10 0 0.8 1.0 1.2 1.4 1.6 1.8 0 0.5 0.7 0.9 1.1 1.3 1.5 1.7 Wavelength (µm) Wavelength (µm) KMIRB0051EB KMIRB0058EA 5

Linearity error (Ta=25 C, dd=3.3, INP=PDN=Fvref=hold=2.5, fop=1 MHz, CE=16 n/eˉ) 20 15 10 Linearity error (%) 5 0-5 -10-15 -20 1 10 100 1000 10000 Output voltage (m) KMIRB0107EA 6

Dimensional outline (unit: mm) 13.50 0.55 ± 0.05 1.50 ± 0.15 20.00 5.20 Index mark 7.50 0.50 4.80 ± 0.30 Reinforcing plate Window Photosensitive surface Wire bonding 0.30 ± 0.05 CMOS chip Bump bonding Flexible board 1 AD_trig 2 GND 3 AD_sp 4 hold 5 CLK 6 Reset 7 Fvref 8 ideo 9 PDN* 10 INP* 11 dd 12 Cf_select Tolerance unless otherwise noted: ±0.25 Window refractive index: 1.47 Window thickness: 0.55 ± 0.05 Window sealing method: Resin adhesion Center position accuracy of photosensitive area -0.3 X +0.3-0.3 Y +0.3-2 θ +2 * Set PDN and INP to the same potential. We recommend applying voltage from the same voltage source and shorting the terminals. KMIRA0036EB 7

Pin connections Terminal name Input/ output Function and recommended connection Note PDN Input InGaAs photodiode s cathode bias terminal. Set to the same potential as INP. 2.5 AD_sp Output Digital start signal for A/D conversion 0 to 3.3 Cf_select Input* 8 Signal for selecting the feedback capacitance (integration capacitance) on the CMOS chip 0 to 3.3 AD_trig Output Sampling sync signal for A/D conversion 0 to 3.3 Reset Input Reset pulse for initializing the feedback capacitance in the charge amplifier formed on the CMOS chip. Integration time is determined by the high level period of this pulse. 0 to 3.3 CLK Input Clock pulse for operating the CMOS shift register 0 to 3.3 INP Input Input stage amplifier reference voltage. This is the supply voltage for operating the signal processing circuit on the CMOS chip. Set to the same potential as PDN. 2.5 hold Input Reference voltage for sample-and-hold circuit. This is the supply voltage for operating the signal processing circuit on the CMOS chip. 2.5 Fvref Input Differential amplifier reference voltage. This is the supply voltage for operating the signal processing circuit on the CMOS chip. 2.5 ideo Output Differential amplifier output. This is an analog video signal. Nagative polarity. 0.3 to 2.5 dd Input Supply voltage for operating the signal processing circuit on the CMOS chip (+3.3 ) 3.3 GND Input Ground for the signal processing circuit on the CMOS chip (0 ) 0 *8: The conversion efficiency is determined by the supply voltage to the Cf_select terminal as follows. Conversion efficiency Cf_select 16 n/e- (low gain) Low 160 n/e- (high gain) High Low: 0 (GND), High: 3.3 (dd) Electrostatic countermeasures This device has a built-in protection circuit against static electrical charges. However, to prevent destroying the device with electrostatic charges, take countermeasures such as grounding yourself, the workbench and tools. Also protect this device from surge voltages which might be caused by peripheral equipment. Related information www.hamamatsu.com/sp/ssd/doc_en.html Precautions Disclaimer Safety precautions Image sensors Information described in this material is current as of September 2018. Product specifications are subject to change without prior notice due to improvements or other reasons. This document has been carefully prepared and the information contained is believed to be accurate. In rare cases, however, there may be inaccuracies such as text errors. Before using these products, always contact us for the delivery specification sheet to check the latest specifications. The product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovered and reported to us within that one year period. However, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product use. Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218, E-mail: usa@hamamatsu.com Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 8152-375-0, Fax: (49) 8152-265-8, E-mail: info@hamamatsu.de France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10, E-mail: infos@hamamatsu.fr United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777, E-mail: info@hamamatsu.co.uk North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 16440 Kista, Sweden, Telephone: (46)8-509 031 00, Fax: (46)8-509 031 01, E-mail: info@hamamatsu.se Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39)02-93 58 17 33, Fax: (39)02-93 58 17 41, E-mail: info@hamamatsu.it China: Hamamatsu Photonics (China) Co., Ltd.: B1201, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86) 10-6586-6006, Fax: (86) 10-6586-2866, E-mail: hpc@hamamatsu.com.cn Taiwan: Hamamatsu Photonics Taiwan Co., Ltd.: 8F-3, No. 158, Section2, Gongdao 5th Road, East District, Hsinchu, 300, Taiwan R.O.C. Telephone: (886)03-659-0080, Fax: (886)03-659-0081, E-mail: info@hamamatsu.com.tw Cat. No. KMIR1033E01 Sep. 2018 DN 8