PROCEEDINGS OF SPIE. Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

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1 PROCEEDINGS OF SPIE SPIEDigitalLibrary.org/conference-proceedings-of-spie Front Matter: Volume 9576, "Front Matter: Volume 9576," Proc. SPIE 9576, Applied Advanced Optical Metrology Solutions, (10 September 2015); doi: / Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

2 PROCEEDINGS OF SPIE Applied Advanced Optical Metrology Solutions Erik Novak James D. Trolinger Editors August 2015 San Diego, California, United States Sponsored and Published by SPIE Volume 9576 Proceedings of SPIE X, V SPIE is an international society advancing an interdisciplinary approach to the science and application of light. Applied Advanced Optical Metrology Solutions, edited by Erik Novak, James D. Trolinger, Proc. of SPIE Vol. 9576, SPIE CCC code: X/15/$18 doi: / Proc. of SPIE Vol

3 The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. The papers published in these proceedings reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon. Please use the following format to cite material from this book: Author(s), "Title of Paper," in Applied Advanced Optical Metrology Solutions, edited by Erik Novak, James D. Trolinger, Proceedings of SPIE Vol (SPIE, Bellingham, WA, 2015) Article CID Number. ISSN: X ISBN: Published by SPIE P.O. Box 10, Bellingham, Washington USA Telephone (Pacific Time) Fax SPIE.org Copyright 2015, Society of Photo-Optical Instrumentation Engineers. Copying of material in this book for internal or personal use, or for the internal or personal use of specific clients, beyond the fair use provisions granted by the U.S. Copyright Law is authorized by SPIE subject to payment of copying fees. The Transactional Reporting Service base fee for this volume is $18.00 per article (or portion thereof), which should be paid directly to the Copyright Clearance Center (CCC), 222 Rosewood Drive, Danvers, MA Payment may also be made electronically through CCC Online at copyright.com. Other copying for republication, resale, advertising or promotion, or any form of systematic or multiple reproduction of any material in this book is prohibited except with permission in writing from the publisher. The CCC fee code is X/15/$ Printed in the United States of America. Publication of record for individual papers is online in the SPIE Digital Library. SPIEDigitalLibrary.org Paper Numbering: Proceedings of SPIE follow an e-first publication model, with papers published first online and then in print. Papers are published as they are submitted and meet publication criteria. A unique citation identifier (CID) number is assigned to each article at the time of the first publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online, print, and electronic versions of the publication. SPIE uses a six-digit CID article numbering system in which: The first four digits correspond to the SPIE volume number. The last two digits indicate publication order within the volume using a Base 36 numbering system employing both numerals and letters. These two-number sets start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B 0Z, followed by 10-1Z, 20-2Z, etc. The CID Number appears on each page of the manuscript. The complete citation is used on the first page, and an abbreviated version on subsequent pages. Proc. of SPIE Vol

4 Contents v vii ix Authors Conference Committee Introduction SESSION 1 SURFACE MEASUREMENTS A rugged stereoscopical device for surface inspection [9576-1] In-line roll-to-roll metrology for flexible electronics [9576-2] Three-dimensional speckle imaging employing a frequency locked tunable diode laser [9576-3] Aperiodic sinusoidal fringes in comparison to phase-shifted sinusoidal fringes for highspeed three-dimensional shape measurement [9576-4] Development of three-dimensional speckle deformation measurement method with same sensitivities in three directions [9576-5] D interferometric microscopy: color visualization of engineered surfaces for industrial applications [9576-6] SESSION 2 TECHNIQUES FOR PERFORMANCE CHARACTERIZATION AND ENHANCEMENT Binary pseudorandom test standard to determine the modulation transfer function of optical microscopes [9576-7] Performance analysis of a full-field and full-range swept-source OCT system [9576-8] SESSION 3 STRAIN, FLOW, AND GRADIENT MEASUREMENTS C Digital focusing schlieren imaging [ ] D Digital speckle based stereo microscope strain measurement system for sheet metal forming by hydraulic bulge tests [ ] E Background-oriented schlieren for the study of large flow fields [ ] F Interferometric strain measurements with a fiber-optic probe [ ] iii Proc. of SPIE Vol

5 9576 0G An iterative approach to measuring two-dimensional gradient-index profiles based on external measurements of laser beam deflection [ ] SESSION 4 VOLUMETRIC AND DISTANCE BASED METHODS H Three-dimensional digital holographic aperture synthesis for rapid and highly accurate large-volume metrology [ ] I Development of a non-contact center thickness optical metrology system [ ] L A novel extrinsic calibration method of ToF cameras based on a virtual multi-cubes shaped object [ ] M Fiber coupler end face wavefront surface metrology [ ] N Optical range finder using semiconductor laser frequency noise [ ] POSTER SESSION P Rapid three-dimensional chromoscan system of body surface based on digital fringe projection [ ] Q Two detector, active digital holographic camera for 3D imaging and digital holographic interferometry [ ] V Auto-elimination of fiber optical path length drift in a frequency-scanning interferometer for absolute distance measurements [ ] iv Proc. of SPIE Vol

6 Authors Numbers in the index correspond to the last two digits of the six-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first four digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B...0Z, followed by 10-1Z, 20-2Z, etc. Anderson, Erik H., 08 Ao, Lei, 0L Arai, H., 0N Arai, Y., 06 Artemiev, Nikolay A., 08 Babin, Sergey, 08 Barber, Zeb W., 0H Bernacki, Bruce E., 04 Boettcher, T., 09 Brasseur, Jason K., 0I Buckner, Benjamin D., 0C, 0E Bui, Son, 07 Burnham-Fay, E. D., 0F Cabrini, Stefano, 08 Calafiore, Guiseppe, 08 Cannon, Bret D., 04 Chan, Elaine R., 08 Compertore, David C., 0M Crouch, Stephen, 0H Dannenberg, Florian, 02 Doi, K., 0N Dong, Xin, 0L Ellis, J. D., 0F Froehly, L., 09 Gorecki, C., 09 Gronle, M., 09 Hahlweg, Cornelius, 02 Heist, Stefan, 05 Ignatovich, Filipp V., 0M Jacobs-Perkins, D. W., 0F Józwik, Michał, 0Q Kaylor, Brant M., 0H Kimbrough, Brad, 03 Kondo, K., 0N Körner, K., 09 Krauter, J., 09 Kühmstedt, Peter, 05 Kujawińska, Małgorzata, 0Q Lacey, Ian, 08 Leger, James R., 0G L'Esperance, Drew, 0C, 0E Li, Jie, 0P Liang, Jin, 0D, 0P Lin, Di, 0G Liu, Yongqi, 0L Liu, Zhigang, 0V Lutzke, Peter, 05 Maehara, S., 0N Marcus, Michael A., 0M McKinney, Wayne R., 08 Mendoza, Albert, 04 Notni, Gunther, 05 Novak, Erik, 03 Novak, Matt, 07 Ohdaira, Y., 0N Ohkawa, M., 0N Osten, W., 09 Passilly, N., 09 Peroz, Christophe, 08 Perrin, S., 09 Pescoller, Lukas, 02 Reibel, Randy R., 0H Ren, Maodong, 0D, 0P Roos, Peter A., 0I Saito, T., 0N Sakamoto, S., 0N Sato, T., 0N Schiffern, John T., 04 Schmit, Joanna, 07 Takacs, Peter Z., 08 Tao, Long, 0V Thorpe, Michael J., 0I Tokutake, Y., 0N Trolinger, James D., 0C, 0E Wang, Lizhong, 0D Wei, Bin, 0D, 0P Weiß, Jürgen, 02 Yashchuk, Valeriy V., 08 Żak, Jakub, 0Q Zhang, Weibo, 0V Zhang, Ze, 0L v Proc. of SPIE Vol

7 Proc. of SPIE Vol

8 Conference Committee Program Track Chair H. Philip Stahl, NASA Marshall Space Flight Center (United States) Conference Chairs Erik Novak, 4D Technology Corporation (United States) James D. Trolinger, MetroLaser, Inc. (United States) Conference Program Committee Anand Krishna Asundi, Nanyang Technological University (Singapore) Jan Burke, Bremer Institut für angewandte Strahltechnik GmbH (Germany) Claas Falldorf, Bremer Institut für angewandte Strahltechnik GmbH (Germany) Sen Han, University of Shanghai for Science and Technology (China) Kevin G. Harding, GE Global Research (United States) Kate Medicus, Optimax Systems, Inc. (United States) Matthew J. Novak, Bruker AXS, Inc. (United States) Wolfgang Osten, Institut für Technische Optik (Germany) Peter Roos, Bridger Photonics, Inc. (United States) Robert A. Smythe, R.A. Smythe Management Consultants (United States) Joe Wehrmeyer, Arnold Engineering Development Center (United States) Session Chairs 1 Surface Measurements Erik Novak, 4D Technology Corporation (United States) 2 Techniques for Performance Characterization and Enhancement Peter Roos, Bridger Photonics, Inc. (United States) 3 Strain, Flow, and Gradient Measurements Sen Han, University of Shanghai for Science and Technology (China) 4 Volumetric and Distance Based Methods James D. Trolinger, MetroLaser, Inc. (United States) vii Proc. of SPIE Vol

9 Proc. of SPIE Vol

10 Introduction The methods of optical metrology have advanced significantly since the times of the early interferometers of the late 19th century. Fast cameras and processing make a whole range of new methods available today for looking at everything from fine microstructures to large astronomical systems. This conference was designed to focus on optical methods beyond traditional white-light or monochromatic-laser interferometric methods to other means of making precision measurements as well as the many applications made possible by these advances. An emphasis was placed on discussions on how metrology helps solve critical problems and answer key questions in both science and industry. We had many excellent contributions to the 2015 conference, our inaugural year. Papers fit into four main application categories: surface measurements; techniques for system performance characterization and enhancement; strain, flow, and gradient measurements; and finally volumetric and distance-based methods. Many optical metrology techniques were discussed, including Schlieren imaging, superresolution methods, Moire and fringe projection, dynamic interferometry, spectroscopic methods, multiple-wavelength interferometry, speckle systems, high-precision LADAR, and color-based techniques. Each technique can help solve unique problems, and all are advancing rapidly as the demands for precision metrology steadily increase as cost, lifetime, and performance needs become ever more challenging. Erik Novak James D. Trolinger ix Proc. of SPIE Vol

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