DEUTERIUM LAMPS (D2 LAMPS)

Transcription

1 DEUTERIUM LMPS (D2 LMPS)

2 D2 LMPS FOR HIGH PERFORMNCE DEVICES Hamamatsu deuterium lamps key features and the reasons Long lifetime UV-transmitting glass Problems with prior lamps using quartz glass Premature deterioration in transmittance cause by UV light Quality variations due to production process and material inclusions Troublesome ozone generation We solved these problems by using UV-transmitting glass superior to quartz glass!! High resistance to UV light Hamamatsu deuterium lamps (D2 lamps) deliver a long lifetime, excellent stability, and high output to the highest levels to allow users to obtain the maximum performance characteristics from their equipment. Life characteristics RELTIVE IRRDINCE (%) TLS 2E 9 8 SYNTHETIC SILIC SYNTHETIC SILIC ± σ UV GLSS UV GLSS ± σ TIME (h) High quality with less variations No ozone generation High stability 2 Light output stability S ( -.U.) Stability at initial operation Maintains high stability until product lifetime end Stability after hours of operation S ( -.U.) TIME (s) - 8 TLSO9E 8 TIME (s) TLSO9E 2 Ceramic electrode Problems with prior lamps using (Metal electrode) Low stability due to being susceptible to ambient conditions Large variation in light output because electrode spacing is not uniform We solved these problems by using ceramic electrodes with excellent temperature characteristics!! Excellent temperature characteristics ensure high stability Uniform electrode spacing minimizes variations in characteristics Construction (L2D2) LIGHT OUTPUT CERMIC ELECTRODE (RER PIECE) NODE PERTURE UL CERMIC ELECTRODE (CENTER PIECE) CTHODE TLSOCE Problems with conventional directly-heated type Concentrated radiated heat damage applies a large load to the cathode Vibration and operating time directly affect cathode deterioration Lighting performance Capacitor Fails to light up due to electrode deterioration during long-term operation Fails to light up due to decrease of internal gas during long-term operation Fails to light up when the lamp is hot and in case of re-igniting right after turning off Cathode (Super quiet type) Problems with D2 lamp without auxiliary ignition We solved these problems of the directly-heated type by using a super quiet cathode!! Electron emission capability with minimal fluctuations We solved these problems with the conventional lighting method by using auxiliary lighting method!! Secured lighting even if the lamp is hot or at the end of lifetime

3 Deuterium lamps are light source lamps that utilize an arc discharge in deuterium (D2) gas. They emit an intense spectrum in the UV region and have feature of unrivaled stability compared to other UV light sources. PRODUCT LINE-UP / PPLICTION LIST W W W to W W X2D2 LMPS High brightness deuterium lamps High-end light sources that offer the world s highest luminance among the W class * (twice that of L2D2 lamps) L2D2 LMPS Long lifetime deuterium lamps est-selling light sources that deliver the high quality and high performance required by chemical analysis instruments while keeping costs low S2D2 LMPS Compact deuterium lamps Compact yet high-performance light sources that were impossible to create up till now with conventional deuterium lamps Peripheral devices that support high performance H2D2 LMPS Ultra-high luminance deuterium lamps Next-generation light sources that have achieved the highest luminance in the history of deuterium lamps P P P P *s of Feb. according to our research *s of Feb. according to our research pplications HPLC (High Performance Liquid Chromatography) UV-VIS Spectrophotometer CE (Capillary Electrophoresis) tomic bsorption Spectrophotometer Thin Layer Chromatography Water Quality, ir Pollution and Other Environmental nalyzer Film Thickness Gauge Semiconductor Testing Equipment UV Resistance Evaluation of Materials Photoionization Light Source Window material Static Electricity Removal by Vacuum UV Light UV glass : Optimum : Usable according to application : Not generally suitable Total support for extracting maximum lamp performance To enable lamps to exhibit their maximum performance, it is important to design an optimum housing and power supply. We do not only sell deuterium lamps but also provide power supplies and housings specifically designed for deuterium lamps. esides selling our own products, we provide technical support to help users design their own lamp housings and power supplies. We are also glad to offer advice on optimal electrical ratings and lamp shapes that meet user specifications. Please consult with us for specifications that are not listed in our product catalog. Custom products tailored to meet user needs Design support Synthetic silica Power supplies and housings specifically designed for lamps dvice for improving performance characteristics MgF2 fter-sales service based on long years of experience 2

4 X2D2 LMPS The X2D2 lamps (high brightness & long lifetime deuterium lamps) deliver unparalleled brightness twice that of L2D2 lamps (see page ) while still maintaining the high stability and long lifetime offered by the conventional deuterium lamps. These characteristics will enhance sensitivity and throughput in various photometric instruments. Features Characteristics Long life: h High stability:. %(p-p) typ. High brightness: 2 times higher than L2D2 lamps Spectral distribution TLSO2EF TLSO9EC rc distribution X2D2 lamp perture size:. mm IRRDINCE (µw cm -2 nm - at cm).. UV GLSS (L98, L8) SYNTHETIC SILIC (L99, L9) RELTIVE IRRDINCE (%) 8 MgF2 (L98) WVELENGTH (nm) WVELENGTH (nm) 2 times higher than conventional type L2D2 lamp perture size:. mm Directivity (Light distribution) UV glass L98, L8-2Synthetic silica L99, L9 - MgF2 L TLSOE TLSO2E TLSOE

5 Dimensional outline (Unit: mm) L98, L8 L99, L9 9 MX. -. ± 2 9 MX. UXILIRY IGNITION DEVICE Tolerance of emitting point (center) With respect to axial line : ±. With respect to plane : ± ±. 22± MX. -. ± UXILIRY IGNITION DEVICE 9 MX. Tolerance of emitting point (center) With respect to axial line : ±. With respect to plane : ± ±. 22± ± CONNECTOR (MOLEX) HOUSING: 9-- CONTCT: () ± LIGHT OUTPUT #: UXILIRY ELECTRODE #2: NODE #: FILMENT #: FILMENT (GND) TLSOEE CONNECTOR (MOLEX) HOUSING: 9-- CONTCT: () ± LIGHT OUTPUT #: UXILIRY ELECTRODE #2: NODE #: FILMENT #: FILMENT (GND) TLSOEE L ± 9 MX. Tolerance of emitting point (center) With respect to axial line : ±. With respect to plane : ± Example of optical system layout for visible light (X2D2 lamp) The see-through structure allows easy use in combination with a visible light source. TOP VIEW 9 MX. CONNECTOR (MOLEX) HOUSING: 9-- CONTCT: UXILIRY IGNITION DEVICE () ± 22±. 22±. LIGHT OUTPUT 2 ± #: UXILIRY ELECTRODE #2: NODE #: FILMENT #: FILMENT (GND) TLSOEE LIGHT OUTPUT L8, L9 NGLE OF INCIDENCE 9 LENS HLOGEN LMP (VISILE LIGHT) TLSOCED Specifications Type No. L98 L8 L99 L9 L98 Unit Type Standard See-through Standard See-through Standard Window material Spectral distribution perture diameter UVglass 8 to Synthetic silica to. MgF2 to E nm mm Output stability at 2 nm Drift (Max.) Fluctuation (p-p) Typ. ±.. %/h % Guaranteed life at 2 nm Discharge starting voltage (Max.) node current ± h V dc m dc Tube voltage (Typ.) 9 8 V dc Filament ratings Warm-up Voltage 2. ±.2 V dc Current (Typ.) dc Operating Voltage. ±.2 V dc Current (Typ.). dc Filament warm-up time (Min.) Power supply C ulb wall temperature D C99, M92 2 to 29 s C Lamp life end is defined as the point when light output at 2 nm falls to % of its initial value or when output fluctuations exceed. % (p-p). trigger voltage must be applied to the anode and auxiliary electrode. CThe power supply for the L2D2 cannot be used to operate X2D2 lamps. DRecommended temperature for operating a lamp in the lamp housing. Consult us on how to measure the temperature. EDoes not support vacuum evacuation and so should be used in nitrogen atmosphere. * Custom lamps not listed above will be available on request. Please feel free to contact us.

6 L2D2 LMPS The L2D2 lamps are UV light sources with a long service lifetime and high stability. These L2D2 lamps have characteristics essential for light sources used in chemical analysis instruments and provide high measurement accuracy. Example of custom-designed lamp Features Long life: h (L) High stability:. %(p-p) typ. Small intensity variations Low cost Error-free lighting perture diameter (.,.) Light-emitting point Flange shape Capacitor position Connector Cathode type Lead length Cathode ratings Preheating Operating 2 2. V 2. V. V V V 2 V V. V. V V V 2. V V V V Please consult us about custom designed lamp. Specifications Type No. L L L- L L2 L2- L L9 L29 L29- L2 L29 L29- L999 L999- L9 L9- Type Standard See-through Dimensional outline q i q e u w r y w t o q i r y Window material UV glass Synthetic silica UV glass MgF2 UV glass Synthetic silica Spectral distribution (nm) 8 to to 8 to to 8 to to perture diameter (mm).... Output stability at 2 nm Required Guaranteed discharge Fluctuation node Tube life starting Drift (p-p) current voltage at 2 nm voltage C Max. Typ. Max. Typ. (%/ h) (%) (h) (V dc) (m dc) (V dc) See pages and 8. Lamp life end is defined as the point when light output at 2 nm falls to % of its initial value or when output fluctuations exceed. % (p-p). C pulse voltage higher than this value must be supplied to start reliable lamp discharge. DOperating life may vary depending on operating environmental conditions (vacuum atmosphere). ±. ±... D ± 8

7 Characteristics Spectral distribution Deuterium lamps emit high intensity light in the UV range at wavelengths shorter than nm. Light intensity on the short wavelength side is determined by the window material used. UV glass, Synthetic silica. TLSO2EF MgF2 TLSO9EC IRRDINCE (µw cm -2 nm - at cm).. SYNTHETIC SILIC (PROJECTING TYPE, mm THICK) UV GLSS RELTIVE IRRDINCE (%) 8 MgF2 rc distribution WVELENGTH (nm) rc distribution of deuterium lamps is determined by the aperture (light exit) size. t the same input current and voltage, lamps with a. mm aperture provide. times higher intensity than lamps with a. mm diameter aperture. Directivity (Light distribution) UV glass 2Synthetic silica MgF2 8 WVELENGTH (nm) PERTURE:. mm PERTURE:. mm TLSO2EC TLSOEC TLSOEC Filament ratings pplicable power supply H Warm-up Operating Filament Voltage E warm-up time Current Voltage Current C input type DC input time Typ. Typ. Min. (V dc, ac) ( dc, ac) (V dc) ( dc) (s) 2. ±.2 ± 2 to 2. ± to.. ±.. ±.2 to 2. to. F. ±. G. ±..8. to.8. to. G.8 C998-2 C998-2 C998- C998- C998- C998- C998-2 M99-2 M99-2 M99- M99- M99- M99- M99-2 ulb wall temperature (Recommended) I 2 to 29 Type No. L L L- L L2 L2- L L9 L29 L29- L2 L29 L29- L999 L999- L9 L9- EIf the cable between the lamp and power supply is too long, a large filament voltage drop occurs in the cable that might make the lamp filament voltage too low. The filament power supply should be designed to supply the specified voltage at the lamp input terminal. FRecommended operating voltage is. V ±. V. GDuring lamp operation a discharge current flows into the filament so no external power supply is needed to maintain the filament temperature. HTo extract full performance from our deuterium lamps we recommend using our dedicated power supplies. IRecommended temperature for operating a lamp in the lamp housing. Consult us on how to measure the temperature. * Custom lamps not listed above will be available on request. Please feel free to contact us.

8 Dimensional outline (Unit: mm) See-through type q L, L, L, L999 w L, L9, L2 e L2 28 ± MX. ± MX. ± ± 2 ± 2 8 ± 2 2 ± 2 MX. 8 ± 2 ± ± 2 ± 2 ± 2 L FILMENT : LUE FILMENT GND : LCK NODE : RED FILMENT : LUE FILMENT. GND : LCK NODE : RED FILMENT FILMENT. : LUE GND: LUE NODE : RED L, L, L999 FILMENT : LUE FILMENT : LUE NODE : RED TLSOED TLSO8EF TLSO9EF See-through type r L29, L9 t L29 See-through type y L29-, L9- ± ± MX. ± ± 8 MX.. -. ± MX. ± 22. ±. 22. ±. RC 2 ± 2 8 ± 2 ± RC 2 ± 2 O-RING FIXED RNGE ±. 8 ± 2 ± RC 2 8 ± 2 ± LIGHT OUTPUT ± 2. L29 FILMENT : LUE FILMENT. GND : LCK NODE : RED L9 FILMENT : LUE FILMENT : LUE NODE : RED L29 FILMENT : LUE FILMENT : LUE NODE : RED L29- FILMENT : LUE FILMENT GND : LCK NODE : RED L9- FILMENT : LUE FILMENT : LUE NODE : RED Tolerance of emitting point (center) With respect to axial line : ±. With respect to plane : ±. TLSOEG TLSOEF TLSOEE

9 See-through type u L2 - i L-, L999- o L29- RC -. ± ± ± 2 MX ± 22 ±. 22 ±. RC LIGHT OUTPUT 2. RC ± ± 8 ± 2 MX ± 22. ±. 22. ±. 2. RC RC. -. ± 2 ± 8 ± 2 MX O-RING FIXED RNGE ±. ± 22. ±. 22. ± RC 8 2. ± LIGHT OUTPUT LIGHT OUTPUT FILMENT: LUE FILMENT: LUE NODE : RED FILMENT: LUE FILMENT: LUE NODE : RED FILMENT: LUE FILMENT: LUE NODE : RED Tolerance of emitting point (center) With respect to axial line : ±. With respect to plane : ±. Tolerance of emitting point (center) With respect to axial line : ±. With respect to plane : ±. Tolerance of emitting point (center) With respect to axial line : ±. With respect to plane : ±. TLSOE TLSOED TLSO88EC Mounting example on the vacuum system (L29, L29-) 2 See-through type The see-through type electrode structure enables straight-line arrangement of the halogen lamp, deuterium lamp, optical system and optical path. This simplifies optical design of UV-VIS spectrophotometer etc., and eliminates loss of light amount caused by the half mirror. n example for optics of See-through type TOP VIEW C VCUUM FLNGE 2TIGHTENING SCREW O-RING JIS 2 CLL No. V SPCER MgF2 WINDOW GRDED SEL CO-RING FIXED RNGE RC SCREW PORTION TLSO E LIGHT OUTPUT Type No. SEE-THROUGH L2D2 LMP L999, L999-, L9, L9- LENS HLOGEN LMP TLSOCEF 8

10 X2D2 LMPS L2D2 LMPS POWER SUPPLY FOR D2 LMPS LMP HOUSE pplications using deuterium lamps require very high stability of light output, so using a Hamamatsu dedicated power supply and lamp house is recommended to operate these lamps. When users are designing their own power supply and lamp housing, we provide technical support and follow-up to ensure an optimal optical design so please consult us when needed. Power supply for X2D2 lamps / Lamp housing Power supply Left: C99, Right: M92 Lamp housing Left: E922-, Right: E98- Power supply for L2D2 lamps / Lamp housing E922-: for L98 E98-: for L99 E922: for L- E98: for L29- * We welcome requests for custom products for see-through types (L8, L999-, L999- and L9-). Power supply Left: C998, Right: M99 Lamp housing Left: E922, Right: E98 Dimensional outline (Unit: mm) C99 E922- * P.C.D. (Pitch Circle Diameter) WEDGE PRESSURE PIN TOP VIEW M DEPTH (P.C.D.* ) LMP FLNGE MOUNTING SURFCE 22 2 M DEPTH C99-22 ±. 22 ± FRONT VIEW SIDE VIEW Supplied lamp output cable ± RER VIEW E98- R M (P.C.D.* 2) OPTICL SYSTEM MOUNTING SURFCE WEDGE PRESSURE PIN TLSOE TLSO2E M92 OPTICL SYSTEM MOUNTING SURFCE M DEPTH 2 9 LMP FLNGE MOUNTING SURFCE (P.C.D.* ) 29 ± 22 2 M DEPTH R2 -.2 MX. MX. FRONT VIEW SIDE VIEW TLSOE - M (P.C.D.* 2) 22 ±. 22 ±. 2.2 TLSOE Power supply for X2D2 lamp specifications 9 Input Output Parameter voltage Cooling method Operation ambient temperature Storage temperature Operating and storage humidity External control (Lamp ON/OFF, Lamp irradiation signal) Conformance standards Input voltage Input current (Max.) Output With load (Typ.) voltage (DC) Without load (Min.) Output current (DC) Current fluctuation (p-p) (Typ.) Current drift at 2 C (Typ.) Voltage Warm-up Filament Current (Typ.) ratings Voltage Operation Current (Typ.) Filament warm-up time Trigger node uxiliary electrode CE UL (File No. E29) C99 C V to C 2 V ( V/ V uto switching) Single phase Hz / Hz. 8 / 9 ±. ±.2 2. ±.2. ±.2. pprox. to + - to + elow 8 (No condensation) M92 DC 2 V ± 2. V Forced air cooling (. m /min) Unit V dc V dc m dc % %/h V dc dc V dc dc s V peak V peak C C %

11 Dimensional outline (Unit: mm) The power supply for the L2D2 cannot be used to operate X2D2 lamps. * P.C.D. (Pitch Circle Diameter) C998 E922 TOP VIEW M DEPTH (P.C.D.* ) WEDGE PRESSURE PIN LMP FLNGE MOUNTING SURFCE 22 ±. 2 M DEPTH 9 FRONT VIEW SIDE VIEW Supplied lamp output cable RER VIEW R2-8 M (P.C.D.* 2) OPTICL SYSTEM MOUNTING SURFCE 22 ±. 22 ±..2 TLSO8E 8 ± TLSOE E WEDGE PRESSURE PIN M99 8. M DEPTH (P.C.D.* ) OPTICL SYSTEM MOUNTING SURFCE R LMP FLNGE MOUNTING SURFCE 29 ± 22 2 M DEPTH 8 MX. MX. 2 FRONT VIEW SIDE VIEW TLSOE - M (P.C.D.* 2) 22 ±. 22 ±..2 TLSO9E Power supply for L2D2 lamp specifications Parameter Input voltage Input Input current (Max.) With load (Typ.) Output voltage (DC) Without load (Min.) Output current (DC) Output Current Fluctuation (p-p) (Typ.) Current drift at +2 C (Typ.) Warm-up time Trigger voltage Cooling method Operation ambient temperature Storage temperature Operating and storage humidity External control (Lamp ON/OFF, Lamp irradiation signal) Conformance standards EN (CE marking) UL (File No. E29) C998 M99 C V to C 2 V ( V/ V uto switching) DC 2 V ± 2. V Single phase Hz / Hz ±. ±.2 pprox. pprox. Forced air cooling (. m /min) to + - to + elow 8 (No condensation) Unit V V m % %/h s V peak C C % Filament ratings Type No. Voltage (V dc) Warm-up Current ( dc)(typ.) Voltage (V dc) Operation Current ( dc)(typ.) pplicable lamp C998/M99-2 C998/M99-2 C998/M99- C998/M99- C998/M99- C998/M99-2. ±.2 2. ±.2 ±.2 ±. ±.. ± ±.. ±.2. ±.2 ±..2 ± L, L29, L999, L999-, L29- L, L-, L9, L9- L L2 L L29, L9, L29- L2

12 S2D2 LMPS The S2D2 lamps are compact deuterium lamps with a drastically reduced size compared to ordinary deuterium lamps. Despite their compact body, the S2D2 lamps have the same high stability as conventional deuterium lamps and a unique electrode structure that delivers high brightness. Left: L Right: LD Features Characteristics Long life: h (LD) Compact High stability:. %(p-p) typ. High output UV continuous spectrum Low power consumption Easy to use LD LH LP IRRDINCE (µw cm -2 nm - ) at cm Spectral distribution TLSO9E LD WVELENGTH (nm) TLSO9J Directivity (Light distribution) LD L DETECTOR PRINT CIRCUIT ORD RELTIVE IRRDINCE (%) 8 MgF2 (L) TLS E TLSOE TLS CE 8 WVELENGTH (nm) 2 2 Specifications Parameter Type No. Window material Spectral distribution perture diameter Output stability Drift (Max.) at 2 nm Guaranteed life at 2 nm Output current Output voltage (Typ.) Warm-up Filament ratings Operating Filament warm-up time (Min.) ulb wall temperature (Max.) Storage temperature Storage humidity Fluctuation (p-p) (Typ.) Voltage Current (Typ.) Voltage Current (Typ.) LD UV glass 8 to Description / Value L MgF2 to. ±.2. pprox pprox. 2 D to + elow 8 % (No condensation) Unit nm mm %/h % h m V V dc V dc s C C Lamp life end is defined as the point when light output at 2 nm falls to % of its initial value or when output fluctuations exceed. % (p-p). Position a in dimensional outline COperating life may vary depending on operating environmental conditions (vacuum atmosphere).

13 Dimensional outline (Unit: mm) LD TEMPERTURE MESUREMENT a TEMPERTURE MESUREMENT a. MX. 8 MX. P.C.D.*.2 ± L TEMPERTURE MESUREMENT a O-RING FIXED RNGE. ±. 8 MX. TEMPERTURE MESUREMENT a. ± 2. 8 MX. * PCD (Pitch Circle Diameter) P.C.D.*.2 ± MX.. 9. EMISSION POSITION TOLERNCE (CENTER) With Respect To xis Line : ±. mm With Respect To xis Line : ±. mm : FILMENT (): NODE : UXILIRY ELECTRODE 9: GND 2,,, 8: N.C. TLSO9E EMISSION POSITION TOLERNCE (CENTER) With Respect To xis Line : ±. mm With Respect To xis Line : ±. mm TLSOE RELTED PRODUCTS Power supply LP (for L) Parameter Input voltage (DC) Description / Value 2 * Unit V Power consumption Max. S2D2 lamp ON /OFF CN output ON/OFF CN output ON/OFF V External control Status signal S2D2 lamp CN ( Main power ) Each time a signal for external control is input across terminals and, voltages + V and - V are alternately output at ms intervals. * Input voltage range is from 8. V dc to.2 V dc. C (for L) Parameter Description / Value Input voltage (DC) *.8 to.2 Power consumption Max. External control Lamp ON /OFF Lamp status signal * This power supply come with C/DC adapter. Unit V V 2. CN9: CONNECTOR FOR 2 V : + 2: CN2: EXTERNL CONTROL CONNECTOR OUTPUT CLE MIN POWER LED ± CN: JCK FOR DC INPUT VOLTGE 8 2. CN: CONNECTOR FOR S2D2 LMP OUTPUT : GND 2: FILMENT : N.C. : UXILIRY ELECTRODE : NODE (MOUNTING HOLE) DC JCK EXTERNL CONTROL CONNECTOR CN: CONNECTOR FOR V OUTPUT (Usage example: Tungsten Lamp) : + 2: CN: CONNECTOR FOR V OUTPUT (Usage example: Shutter Solenoid) : + 2: N.C. : TLS E Lamp housing Socket with cable E8 (for L) LH (for LD) Parameter Weight Optimum operating temperature Description / Value + to +8 Unit g C t position b in the LH dimensional outline. (When this lamp housing is installed in equipment, thermal design specs must be considered to ensure the operating temperature will be within this range.) TEMPERTURE MESUREMENT b. P.C.D.*.2 ±.2 2 M MX. 8 ± SOCKET * PCD (Pitch Circle Diameter) : NODE 2: UXILIRY ELECTRODE : FILMENT : GND 2 TOP VIEW SCREWS FOR LMP CHNGE LIGHT OUTPUT CONNECTOR FOR TO LP (CN) RC 28 FRONT VIEW 2 2. FOR M2. FLTHED SCREW SIDE VIEW M. (DEPTH.) * * mm dia. lens can be placed. : FILMENT (): NODE : UXILIRY ELECTRODE 9: GND 2,,, 8: N.C. 2. MX. 8 MX. 2. MX. 9.2 TOP VIEW SIDE VIEW 2 TOP VIEW (ottom oard Only) ORD =.2 mm OTTOM VIEW 2 M2. DEPTH 2 (Screw holes for mounting) TLS E * Please consult us on the housing and vacuum flange for the L. 2

14 RELTED PRODUCTS Fiber light source PPLICTIONS Spectrophotometry Environmental measurement bsorption spectrum measurement Microtiter plate reader Pharmaceutical testing High-performance liquid chromatography iological measurement Semiconductor inspection Optical component inspection Compact UV-VIS S2D2 fiber light source L2 The L2 is the world s smallest UV-visible fiber light source containing an S2D2 compact deuterium lamp. Despite its small size, the L2 delivers high output and high stability. Its compact, easy-to-carry size and low voltage operation make it useful for various types of portable devices. Features Compact: 2 mm mm 9 mm High stability: Fluctuation. % p-p (Typ.) (equivalent 2 -.U.) External control Shutter function L2 Light output stability at 2 nm SORNCE ( -.U.) at nm SORNCE ( -.U.) TIME ( s/div.) TIME ( s/div.) TLSOE Characteristics Spectral distribution (Typical data) nm to 2 nm (enlarged view of enhanced output region) RELTIVE IRRDINCE Times L2 L (conventional type) LIGHT GUIDE 99-8S Core diameter=.8 mm nm to nm RELTIVE IRRDINCE TLSZ2E. L2 L (conventional type) LIGHT GUIDE 99-8S CORE DIMETER=.8 mm. 8 9 WVELENGTH (nm) WVELENGTH (nm) High power UV-VIS fiber light source L29 The L29 is a high power UV-visible fiber light source that outputs nm to nm light through a light guide (sold separately). The L29 utilizes a high brightness deuterium lamp (X2D2 lamp) to provide radiant intensity that is about twice that of our conventional products. These features make it easier to use a UV-visible light source with high power and high stability. RELTIVE IRRDINCE Characteristics Spectral distribution (Typical data) TLSO99E Twice intensity (compared to conventional model) L29 WHEN TUNGSTEN-HLOGEN LMP WITH MX. VOLTGE L29 WHEN TUNGSTEN-HLOGEN LMP WITH MIN. VOLTGE CONVENTIONL MODEL LIGHT GUIDE 99-8S CORE DI.=.8 mm. 8 9 Features High output: Twice intensity (Compared to conventional model) High stability: Fluctuation. % p-p (Typ.) (equivalent to 2 -.U.) Long life lamp: hours External control Shutter function Filter holder (Sold separately) L29 WVELENGTH (nm)

15 VUV light source PPLICTIONS Electrostatic remover Film thickness measurement Spectrophotometry Semiconductor inspection Material resistance evalution Photoionization source Dechucking of electrostatic chucks LCD manufacturing equipment H2D2 light source unit L98/-, L99/- The H2D2 light source unit contains a high-brightness, high-end deuterium lamp (H2D2 lamp) that emits light at a brightness times higher than our current deuterium lamps (L2D2 lamps). Despite its high brightness, the H2D2 is highly stable, has a long service life, and allows air-cooled operation by a specially designed housing. This feature makes it much more convenient and easy to use than ordinary water-cooled lamps. The H2D2 can be used in various applications and enhances equipment sensitivity and throughput. Features High brightness: times (Compared to L2D2 lamp) High stability: Fluctuation. % p-p (Max.) Drift ±. %h (Max.) Long life: Warranty of hours ir cooling (needs no cooling water) External control Characteristics Spectral distribution TLSO9E Electrostatic remover VUV ionizer L22 RELTIVE IRRDINCE (%) 8 L98/- 8 WVELENGTH (nm) 2 2 L98, L99 Left: Light source, Right: Power supply rc distribution RELTIVE IRRDINCE (%) TLS E 2 High brightness H2D2 lamp Conventional model X2D2 lamp L2D2 lamp (. mm) DISTNCE FROM PERTURE CENTER (mm) Due to its wide irradiation angle about times larger than our current VUV light source, the L22 efficiently removes electrostatic charges over large areas in depressurized or vacuum environments. Up until now two or more VUV light sources were needed to neutralize electrostatic charges in large areas due to their limited irradiation angle. The L22 solves this problem and efficiently neutralizes large areas in a vacuum. L22 Left: Light source, Right: Power supply Characteristics Directivity (Light distribution) TLSZE S2D2 VUV light source unit L series The S2D2 VUV light source unit is a vacuum ultraviolet light source unit that incorporates a compact deuterium lamp with an MgF2 window. Equipped with a SUS flexible tube with a vacuum flange and a unique cooling mechanism, this light source unit allows irradiating objects or samples at a very close distance, and can be installed and operated under depressurized conditions. The compact lamp unit and SUS flexible tube offer greater flexibility in attaching the light source unit to various types of equipment. L Left: Light source, Right: Power supply SEM image Comparison of electrostatic change removal effect efore irradiance fter irradiance

16 HNDLING PRECUTION. Deuterium lamps emit ultraviolet rays which can be harmful to eyes and skin. Do not look directly at the emitted light or allow direct exposure to skin. lways wear protective glasses or goggles and clothing when operating the lamps. (Refer to JIS T 8 or equivalent safety standards). 2. Since the bulb wall temperature reaches a high temperature (over C) during lamp operation, do not touch it with bare hands or bring inflammable objects near it.. Do not apply vibrations or mechanical shocks to the lamp. These might cause light output stability to deteriorate.. Graded sealing of synthetic silica and MgF2 window: On bulbs using synthetic silica or MgF2 window, the window is formed by so-called "graded sealing" which connects different glasses with slightly different expansion rates. Since the mechanical strength of the seams of this graded sealing is low, use caution when securing the lamp so that no force is exerted on those seams during use.. efore turning on the lamp, wipe the bulb and window gently using alcohol or acetone. Do not handle the lamp with bare hands. Dirt or smears on the window will cause a significant drop in ultraviolet transmittance.. High voltage is used to operate these lamps. Use extreme caution to prevent electrical shock.. e sure to avoid to store the lamp under high humidity and high temperature. lso, in case the lamp is not used for a long time, it with package in the place where shock or vibration is not applied. 8. Handling MgF2 and synthetic quartz windows: UV light generates ozone when it irradiates an atmosphere containing oxygen. The amount of the generated ozone is low and so does not affect the human body but does produce an ozone smell. So ventilate the room from time to time when using a lamp with an MgF2 or synthetic quartz window in a closed room. WRRNTY Lamps are warranted for a period of one year from the date of shipment. If a lamp is found to be defective within this warranty period, Hamamatsu will replace the defective lamp without charge. (This warranty is limited to replacement of the defective lamp.) Even if within the warranty period (one year), the warranty shall not apply to cases where the lamp operation time has exceeded the guaranteed life, or the trouble was caused by incorrect operation or natural or man-made disasters. DISPOSL OF LMPS When disposing of the used lamp, take appropriate measures in compliance with applicable regulations regarding waste disposal and correctly dispose of it yourself, or entrust disposal to a licensed industrial waste disposal company. In any case, be sure to comply with the regulations in your country, state, region or province to ensure the used lamp is disposed of legally and correctly. Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. Information furnished by HMMTSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. Hamamatsu Photonics K.K. HMMTSU PHOTONICS K.K. HMMTSU PHOTONICS K.K., Electron Tube Division -, Shimokanzo, Iwata City, Shizuoka Pref., 8-9, Japan, Telephone: (8)9/2-28, Fax: (8)9/2-2 U.S..: Hamamatsu Corporation: Foothill Road, ridgewater, NJ 88, U.S.., Telephone: ()98-2-9, Fax: () usa@hamamatsu.com Germany: Hamamatsu Photonics Deutschland GmbH.: rzbergerstr., D-822 Herrsching am mmersee, Germany, Telephone: (9)82--, Fax: (9) info@hamamatsu.de France: Hamamatsu Photonics France S..R.L.: 9, Rue du Saule Trapu, Parc du Moulin de Massy, 9882 Massy Cedex, France, Telephone: () 9, Fax: () 9 infos@hamamatsu.fr United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, Tewin Road, Welwyn Garden City, Hertfordshire L W, UK, Telephone: ()-29888, Fax: ()-2 info@hamamatsu.co.uk North Europe: Hamamatsu Photonics Norden : Torshamnsgatan Kista, Sweden, Telephone: ()8-9, Fax: ()8-9 info@hamamatsu.se Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, int., rese (Milano), Italy, Telephone: (9)2-9 8, Fax: (9) info@hamamatsu.it China: Hamamatsu Photonics (China) Co., Ltd.: Tower, Jiaming Center, 2 Dongsanhuan eilu, Chaoyang District, eijing, China, Telephone: (8)-8-, Fax: (8) hpc@hamamatsu.com.cn Taiwan: Hamamatsu Photonics Taiwan Co., Ltd.: 8F-, No.8, Section2, Gongdao th Road, East District, Hsinchu,, Taiwan R.O.C. Telephone: (88)-9-8, Fax: (88) info@tw.hpk.co.jp TLS E2 NOV. IP