Nova Px SPM Control Program

Transcription

1 Nova Px SPM Program Reference Manual 2014 Copyright "NT-MDT" Web Page: General Information: Technical Support: NT-MDT Co., building 100, Zelenograd, , Moscow, Russia Tel.: Fax:

2 Nova Px. SPM Programm Nova Px. SPM Program Contents 1. Nova Px... Program 5 2. Getting Started... with Nova Px 6 3. Nova Px Interface Main Menu Menu View Menu Tools Adjusting... List of Processed Signals Monitoring... and Adjusting Displacement Sensors Scanner... Calibration Coefficients Parameters... of Stepper Motors Menu Help Main Parameters Data Types D Data One-dimensional... Data Toolbar Adjusting... Interface of the One-dimensional Data Viewer D Data Two-dimensional... Data Toolbar Adjusting... Interface of 2D Data Viewer Software oscilloscope Time Dependencies... Displaying Parameters Basic operations Initialization Adjusting the... Cantilever Deflection Detection System Window... for adjusting the detection system 63 2

3 Contents Adjusting... Detection System through Laser-Diode Scanning Window Taking Resonance... Curve Approaching... Sample to Probe Scanning Scanning... parameters Quick access... panel Displaying... 1D Data in Scanning Window Selecting... Scan Area Spectroscopy Spectroscopy... Parameters Additional... Spectroscopy Parameters Lithography Vector Lithography Raster lithography Built-in programmed... configuring Displaying... Videoimage Positioning... Instrument Units ling... Measuring Heads MultiScan Function panel Data Viewer Data table Scan Area... Parameters panel Measurements... in Magnetic Field Heating ElectroChemistry... Window Panel Bi Potentiostat... Calibration Dialog Box 147 3

4 Nova Px. SPM Programm Cycling... Tab Program... Tab Graph Tab Keyword Index

5 Chapter 1. Nova Px Program 1. Nova Px Program Introduction This manual will provide you with a reference on the interface of the program that controls scanning probe microscopes Nova Px. The manual contains a detailed explanation of all components, functions and elements of the control program interface. Functionality adjustment of the optical cantilever deflections detection system; acquisition and processing of frequency responses; control over the approach mechanism; scanning of the sample surface; performing of spectroscopy measurements; scratching and indenting; sample surface modification at nanoscale (nanolithography); processing and analysis of the acquired data; operation of the sample heater; acquiring signal relations; adjustment of scanner displacement sensors. System Requirements For Nova Px to operate correctly, the computer configuration should be following: CPU Pentium II or better; Operating system Windows XP or later; At least 256 Mb RAM; CD drive available; At least 100 Mb free space on the hard drive; Display resolution or better. 5

6 Nova Px. SPM Programm 2. Getting Started with Nova Px Installing Softvare Nova Px program doesn't need special installation procedure. Just insert the software CD/DVDROM in the computer CD/DVD-drive and copy the content of Nova Px folder to the desired location of your hard drive, for example C:\NTMDT\. With the program installed, install drivers of the scanning probe microscope controller. Installing controller's drivers 1. Connect the SPM controller to the computer. This will make the operating system to detect a new hardware U S B <-> Serial and to open the Found New Hardware Wizard dialog box. Fig. 1. Found New Hardware Wizard dialog box To install the software driver for the U S B <-> Serial hardware, perform the following steps: a) Skip the Windows Update option in the Found New Hardware Wizard dialog by selecting the N o, not this time option and click the Next button. b) The installation wizard will ask how to find location of drivers on your computer. Select the Install from a list or specific location option that allows for manual defining the path of drivers location. Click the Next button. 6

7 Chapter 2. Getting Started with Nova Px Fig. 2 c) For defining the desired path, select the options Search for the best driver in these location and Include this location in the search and then click the Browse button. Fig. 3 d) The Browse For Folder dialog box will open. Select the Drivers subfolder in the Nova Px program folder and click the О К button. This will start installing the controller's driver. 7

8 Nova Px. SPM Programm Fig. 4. Installing the controller's driver e) When installing the drivers of the U S B <-> Serial hardware completes, click the Finish button. The installation wizard will close. Fig With the drivers of the U S B <-> Serial hardware installed, the operating system will find another hardware, U S B Serial Port, and open the Found New Hardware Wizard dialog box again. 8

9 Chapter 2. Getting Started with Nova Px Fig. 6. Found New Hardware Wizard dialog box To install the software driver of the U S B Serial Port hardware, perform the following steps: a) Skip the Windows Update option in the Found New Hardware Wizard dialog by selecting the N o, not this time option and click the Next button. b) The installation wizard will ask how to find location of drivers on your computer. Select the Install from a list or specific location option that allows for manual defining the path of drivers location. Click the Next button. Fig. 7 c) For defining the desired path, select the options Search for the best driver in these location and Include this location in the search and then click the Browse button. 9

10 Nova Px. SPM Programm Fig. 8 d) The Browse For Folder dialog box will open. Select the Drivers subfolder in the Nova Px program folder and click the О К button. This will start installing the controller's driver. e) The Hardware Installation (see Figure below) window will open to inform that the tested hardware is incompatible with the operating system. Click the Continue Anyway button. This will start installing the driver of the controller's USB port. Fig. 9. Hardware Installation window 10

11 Chapter 2. Getting Started with Nova Px Fig. 10. Installing the driver of the controller's USB port f) When installing the drivers of the U S B Serial Port hardware completes, click the Finish button. The installation wizard will close. Fig. 11 Installing Drivers of Video camera Drivers of the video camera are supplied on a separate CD-ROM named IMAGINGCONTROL. 1. Insert the CD-ROM into a CD/DVD drive of your computer. 2. The software installer will start automatically and its window will appear on the screen. In this window, select Software Installation. 11

12 Nova Px. SPM Programm Fig A menu of software available for installation will be displayed. For drivers of the video camera, select Driver. Fig In the newly opened list of devices, select FireWire(1394) Cameras. 12

13 Chapter 2. Getting Started with Nova Px Fig In the list of manufacturers, select The Imaging Source. Fig In the list of device models, select the standard one. 13

14 Nova Px. SPM Programm Fig A request on connecting the video camera to the computer will appear. Connect the camera to the FireWire 1394 port with a cable supplied with the delivery set of the video camera. Fig When the camera has been connected, a message informing that new equipment was found and successfully connected is displayed at the right bottom of the screen. Then the Driver Installation Wizard window will appear. 14

15 Chapter 2. Getting Started with Nova Px Fig Click the Next button to install the driver of the video camera. In the Hardware Installation window, click the Continue Anyway button. Fig. 19 This will start installing drivers of the video camera. 15

16 Nova Px. SPM Programm Fig When installation completes, a message window informing on success of software installation will appear. Click the Finish button. Fig. 21 This completes installing drivers of video camera. 16

17 Chapter 2. Getting Started with Nova Px For viewing the image from the video camera in the Camera window of the program, this device should be activated. To this purpose, perform the following steps: 1. Launch the Nova Px program (see below). 2. Open the Camera window by clicking the button. 3. Click the button in the panel of the Camera window. This will open the Video Settings dialog. 4. From the Camera drop-down list of the Video Settings dialog, select a specific camera signal of which will be displayed in the Camera window. 5. Start viewing the videoimage by clicking the window. button in the panel of the Camera Starting Nova Px Nova Px can start with either of two ways: by clicking the Nova Px shortcut on the computer desktop; by running the Nova Px.exe file in the program folder. When Nova Px has started, the instrument should be initialized. To this purpose, click the SPM Init button in the Initialization panel (see p. 62 ). If the controller is on when the program is being started, skip this step because the initialization will start automatically. During initialization the indicator in the Initialization panel (see p. 62 ) appears as. The device is ready for operation, if initialization completes with the instrument status indicator displaying. When Nova Px is starting, a file of SPM data (extension *.mdt ) is created in the Data subfolder of the installation folder of the program.a file of SPM data contains one or several frames. A frame is a basic block of data that represents a separate SPM image (1D, 2D, or 3D) or text data. This file will be used for automatic saving of measurement data. Quitting Nova Px To complete operation with Nova Px, click the button at the right top corner of the Main Program window. This will open a dialog box (see Figure below) where the user should click the button OK to confirm quitting. Data collected during measurements are saved automatically in the Data subfolder of the program installation folder as a file of extension *.mdt. 17

18 Nova Px. SPM Programm Fig. 22. Dialog box 18

19 Chapter 3. Nova Px Interface 3. Nova Px Interface This section reviews controls of the Nova Px program interface. Nova Px Main Window The Main Program window opens right after starting Nova Px (see Figure below). Fig. 23. Nova Px Main Window This window provides a number of control panels specific content of which depends on the hardware configuration. For viewing the list of available panels, select the View ToolBars Main Menu command. This will open the submenu displaying the list of corresponding panels. For displaying/hiding a particular panel, select/unselect the corresponding line in that list. The main components of the Nova Px interface include: Main Menu (see p. Main Parameters Panel (see p. General Operations Panel; Additional Operations Panel; Initialization Panel (see p. 21 ); ); ). 19

20 Nova Px. SPM Programm Input Fields and Sliders The program Nova Px multiple input fields, that allow you to enter numerical values of various parameters (see Figure below). Fig. 24. Input fields. Example of the Litho window is shown The value of each parameter can be specified using one of the following ways: entering from the keyboard. To activate the entered values, press the <Enter> key or click with the mouse somewhere in the active window of the program; if the input field is equipped with the scrolling bar (for example be increased or decreased by pressing a corresponding button; using a slider that appears after double-clicking the input field. The slider moves under control from the mouse or from the arrow keys (see Figure below). ), the value can Fig. 25. Slider The slider can be resized by dragging its end. Besides, the slider range can be adjusted. To this purpose, hold the <Alt> key and select the range of units with the mouse (see Figure below). Fig. 26. Narrowing the slider scale As a result, the specified range will be extended to the whole slider width (see Figure below). To restore the most recent slider range, click the secondary mouse button. 20

21 Chapter 3. Nova Px Interface Fig. 27. New appearance of the slider 3.1. Main Menu Main Menu (see Figure below) is located in the Main window of the Nova Px program. It contains the following drop-down menus: View (see p. 21 ); Tools (see p. 21 ); Help (see p. 21 ). Fig. 28. Main Menu of Nova Px program Menu View Fig. 29. Menu View Menu View contains the following items: ToolBars opens a submenu with the list of panels available in Nova Px. Panels currently visible in the Main window are checked in this list. For showing/hiding a panel, select/unselect its title in the list; Dock Manager opens the BaseOptionsForm window (see p. display mode of Nova Px windows. 22 ) that serves for selecting the 21

22 Nova Px. SPM Programm ToolBars menu commands Fig. 30. Menu ToolBars NOTE. The panels list in the ToolBars menu depends on configuration of the instrument. Table 1. Panels list of ToolBars menu Panel Main Menu Shows/hides Main Menu (see p. Hardware Parameters Shows/hides Main Parameters Panel (see p. Initialization Shows/hides Initialization Panel (see p. Operation Modes Shows/hides General Operations Panel (see p. Tools Shows/hides Additional Operations Panel (see p. 21 ) ). ). 19 ). 19 ). BaseOptionForm window Nova Px provides an option of adjusting the display mode of its basic windows. A window can be displayed either separately or inside the Main window. The display mode of a window is adjusted in the BaseOptionForm window (see Figure below). This window opens by selecting the View Dock Manager menu command. 22

23 Chapter 3. Nova Px Interface Fig. 31. BaseOptionForm window The Main Program window is divided to four areas for convinience of operation (see Figure below). Using controls of the BaseOptionForm window (see Figure above) you can select the windows to be dislayed inside the Main window. The Main window can contain up to four child windows simultaneously. Fig. 32. Areas of the Main Program window The BaseOptionForm window (see Figure above) contains the following two parameters groups: contains titles of child windows accessible through buttons located either in the General Operations Panel (see p. 19 ) or in the Additional Operations Panel (see p. 19 ). A particular window is attributed with its display mode that can take one of the following values: Forms Dock Mode Float the window will be independent of the Main window; 23

24 Nova Px. SPM Programm Base Panel, Bottom Panel, Right Top Panel, Right Bottom Panel the window will occupy a predefined area of the Main Program window (see Figure above), serves for selecting areas of the Main Program window which will display a software oscilloscope after clicking a button in the Main Parameters Panel (see p. 34 ). For displaying an area in the oscilloscope mode, select the Oscill option corresponding to the area title. Background Docked Forms NOTE. The software oscilloscope can appear inside the Main window with the button being pressed only if the area allocated for it is not reserved in the Forms Dock Mode group as an area for displaying a child window of the program Menu Tools Fig. 33. Menu Tools Table 2. Tools menu commands Menu command Heads Opens a dialog to select a particular measuring head. The selection will be followed by reconfiguring the program to operate with the selected head and only methods relevant for that head will be available in the Menu. Signals Opens the Signal Select window (see p. 26 ) that provides selection of signals for observing and processing in windows of Nova Px. Params Opens the Device Parameters window for adjusting switches and units of the controller. NOTE. Do not change settings in the Device Parameters window if you are not completely sure. 24

25 Chapter 3. Nova Px Interface Menu command Motors Opens a submenu with functions of calibrating stepper motors of the instrument and of adjusting the cantilever deflection detection system. The content of the menu depends on the equipment configuration. Video Calibration opens the Video Calibration window that serves for calibrating the video monitoring system and for adjusting parameters of the detection system with the video image. Laser -Diode Scanning opens the Laser-Diode Scanning window that serves for adjusting the detection system. Motor Calibration opens the Motor Calibration window that serves for calibrating stepper motors of the instrument; Motor Params opens the Motor Params window that serves for editing values of parameters of stepper motors. Multi Scan opens the Multi Scan window to organize scanning over large areas dimensions of which exceeds limits of the maximum scan area of the scanner. Sensors Opens the Sensors Adjuster window(see p. 27 ), that serves for monitoring capacitance displacement sensors and for adjusting these sensors. Calibration Opens the Calibration window(see p. calibrations of the scanner. Palette Opens the color palette submenu. The submenu provides the following item: Default Palette 29 ) that serves for defining opens a dialog box for loading a color palette to be applied to the current frame. Color palettes are stored in files of extension *.pal. Nova PowerScript Opens the scripts submenu. This submenu provides the following commands: Scripts opens the script selection list; Nova PowerScript Editor opens the built-in script editor. 25

26 Nova Px. SPM Programm Adjusting List of Processed Signals A number of child windows of Nova Px (software oscilloscope, Scanning etc.) provides an option to study various signals. For covenience of operation, the set of signals to be processed can be restricted. The list of the processed signals is defined in the Signal Select window (see Figure below) that opens through the Main Menu (see p. 21 ) with the command Tools Signals. Fig. 34. Signal Select window Table 3. s of Signal Select Technic Serves for selecting a measurement mode for which the list of the processed signals will be defined. This selection list is duplicated in the Main Parameters Panel (see p. 34 ). Available Signals List of all available signals. Signals List List of signals available in the measurement mode selected in the Technic list. Add Adds signals from the Available Signals list to the Signals List. Add All Adds all signals from the Available Signals list to the Signals List. Delete Removes marked signals from the Signals List. Delete All Removes all signals from the Signals List. Close Closes the Signal Select window and saves modifications. 26

27 Chapter 3. Nova Px Interface Monitoring and Adjusting Displacement Sensors Monitoring and adjusting the displacement sensors is performed with controls of the Sensors Adjuster window (see Figure below). This window opens through the Main Menu (see p. 21 ) with the command Tools Sensors. Fig. 35. Sensors Adjuster window ATTENTION! In the process of adjusting the displacement sensors, the probe tip should be remote from the sample surface and the feedback on X, Y, and Z displacement sensors should be disabled. 27

28 Nova Px. SPM Programm Table. 4. s of Sensors Adjustment Scanner Serves for selecting the scanner sensors which will be adjusted. Move Rate Serves to adjust scan rate of the scanner. Scanner panel Tools for controlling the X-, Y-, and Z-sections of the scanner. Saw-tooth applying saw-tooth voltage to the X-, Y-, or Z-section of the scanner. For applying voltage, press a button corresponding to the desired section; ATTENTION! Before applying voltage to the X-, Y-, or Z section of the scanner open the feedback loop (see p. 36 ). Move Sensor Auto Adjustment panel Sensor Parameters panel controlling the scanner sections. Position of the scanner in X-,Y-, or Z direction can be adjusted with a slider that appears after clicking a corresponding button (,, or ). Auto adjustment panel of the displacement sensors. Checking of boxes X, Y, Z prescribes the scanner sections which sensors are to be auto adjusted. To start adjusting the displacement sensors, click the Run button. The button will change its caption to Stop. On completing the adjusting procedure, the caption will return to Run. To stop the adjusting procedure, click the Stop button. Panel of displacement parameters panel. Values of the parameters are loaded from a scanner parameters file at the start of the program (automatically) or at a special loading of a par-file. These values can change in the process of automatic adjusting the sensors. The adjustment serves for fitting the parameters so as signals from the sensors vary in predefined limits. 28 Band defines bandwidth of the sensor signal. Acts as a low-pass filter of the first order; Offset shifts the range of the sensor signal in positive or negative direction; Phase values are preset by the manufacturer according to factory tests of the instrument. Never modify these values if you are not completely sure that modification is necessary and safe; Scale defines the range of the sensor signal variation at the given limits of variation of the gap between the capacitor plates; ExFreq values are preset by the manufacturer according to factory tests of the instrument. Never modify these values if you are not completely sure that modification is necessary and safe.

29 Chapter 3. Nova Px Interface ClоseLoop Params panel P proportional coefficient of the feedback loop; I integral coefficient of the feedback loop; D differential coefficient of the feedback loop. XY CL closes/opens the feedback loop on X and Y; Z CL closes/opens the feedback loop on Z Scanner Calibration Coefficients Scanner calibration coefficients are adjusted in the Calibrations window (see Figure below). To open this window, select the Tools Calibrations command in the Main Menu (see p. 21 ). Fig. 36. Calibrations window The scanner calibration coefficients are stored in par-files located in the ParFiles subfolder of the 29

30 Nova Px. SPM Programm Nova Px installation folder. A par-file provides calibration coefficients for the following two modes of scanner operation: High ("high voltage" mode) and Low ("low voltage" mode). The Calibrations window displays calibration coefficients for the scanner operation mode selected in the Range drop-down list (see Figure above). Table. 5. s of Calibrations window Opens a dialog window for loading scanner calibration coefficients from a par-file. Opens a dialog window for saving scanner calibration coefficients in a parfile. ScanDriver Serves for selecting the scanner type to be used. Configurations Serves for selecting a par-file to load scanner calibrations. Range XY Serves for selecting the scanner operation mode for which the Calibration window will display calibrations: «high voltage» mode provides the maximum scan area of about 100 x 100 µm. The scanning procedure will use the XY feedback; Low "low voltage" mode the maximum scan area will be decreased by a factor of 30. To reduce noise in the process of scanning, the feedback with the XY capacitance sensors should be turned off. High Range Z Active High "high voltage" mode the scanner will be extended to its maximum length (the extension range depends on the type of the scanner); Low "low voltage" mode the scanner extension will be decreased by a factor of 2. After the scanner operation mode has been reselected from the Range list, the Calibration window displays calibrations for that mode while the scanner is not necessarily adjusted to those calibrations. If the Active field is displayed in green, the scanner is already adjusted to the mode indicated in the Calibration window. If the Active field is displayed in red, the scanner was not adjusted to the mode indicated in the Calibration window. To adjust the scanner to the selected operation mode, click the button at the bottom of the Calibrations window. The Active field will change its color to green when readjustment finishes. Sensors Rewrite Parameters of the displacement sensors employed by the Nova Px program are displayed in the groups XSensor Adjustments, YSensor Adjustments, ZSensor Adjustments of the Calibrations window. For convenience, access to the sensors parameters is duplicated through the Sensor Adjuster window (see p. 27 ). So, the user can adjust these parameters both in the Calibration window and in the Sensor Adjuster window(see p. 27 ). The Sensors Change list at the 30

31 Chapter 3. Nova Px Interface bottom of the Calibration window provides the following options for saving the sensors parameters: Ask if parameters of the displacement sensors were edited in the Calibrations window, click the button at the bottom of the Calibrations window to save your modifications. This will open a message box (see Figure below) where the desired method to save the data should be defined. Yes the parameters values will be saved and content of the Sensor Adjuster window(see p. 27 ) will be synchronized with that of the Calibrations window. No the parameters values will be saved but content of the Sensor Adjuster window(see p. 27 ) wil be kept unchanged. Apply if parameters of the displacement sensors were edited in the Calibrations window, press the button at the bottom of the Calibrations window. This will automatically synchronize content of the Sensor Adjuster window(see p. 27 ) to that of the Calibrations window. Hold after the, button at the bottom of the Calibrations window has been pressed, values of the sensors parameters in the Calibrations window will be copied from their mates in the Sensor Adjuster window (see p. 27 ). Apply Saves content of the Calibrations window. OK Closes the Calibrations window and saves all modifications. The Calibrations window contains the OpenLoopCalibrations group of calibrations of the scanner without sensors and the CloseLoopCalibrations group of calibrations of the scanner with sensors. Table. 6. Parameters of Calibrations window Parameter XScale X direction calibration of the scanner. YScale Y direction calibration of the scanner. ZScale Z direction calibration of the scanner. XRange Scanning range of the scanner along X direction. YRange Scanning range of the scanner along Y direction. ZRange Scanning range of the scanner along Z direction. 31

32 Nova Px. SPM Programm NOTE. The calibration coefficient and the scanning range of the scanner are interrelated through the formula: D=D1*k, where D is the actual scanning range of the scanner, D1 is the measured value of the scanning range of the scanner, and k is the calibration of the scanner. Therefore, modification of a calibration will change the deleted value of the scanning range for the corresponding direction Parameters of Stepper Motors The list of available stepper motors of the instrument with their parameters is accessible in a table of the Motor Params window (see Figure below). Values of stepper motors parameters can be edited in this window if desired. The Motor Params window opens through the Main Menu (see p. with the Tools Motors Motor Params command. 21 ) of the program NOTE. The list of stepper motors in the Motor Params window depends on configuration of the hardware. Fig. 37. Motor Params window 32

33 Chapter 3. Nova Px Interface Menu Help Fig. 38. Menu Help Table 7. Help menu commands Menu command Content Opens an electronic version of the Nova Px program description. NT-MDT Home page Ask online Opens the web-page of NT-MDT Co. Opens the help dedicated page of NT-MDT Co. where the user can ask the support group a question online. 33

34 Nova Px. SPM Programm 3.2. Main Parameters For convenience of operation, the Main window of Nova Px is equipped with the Main Parameters Panel that contains a number of mostly used controls (see Figure below). The Main Parameters panel provides alternative access to various controls of child windows of Nova Px. Fig. 39. Main Parameters Panel Table 8. s of Main Parameters Panel Serves for selecting a controller configuration for a group of measurement modes: SemiContact configuration for semicontact AFM group of modes; Contact configuration for contact AFM group of modes; STM configuration for STM group of modes; Indentation configuration for measurements with of piezo resonant probes of the tuning-fork type; Custom configuration will be defined by the user; Reset To serves for resetting the main parameters to their default values. Selecting the Reset To item opens a submenu with the list of available controller configurations. Selection of a particular configuration results in corresponding commutation of electronic circuits of the controller and automatic adjustment of the main parameters to their default values. When you select SemiContact, Contact, S T M, Custom or Indentation menu commands the instrument electronic circuitry is automatically configured and the main parameters are set according to the chosen configuration. If the Custom menu is selected, the main operation parameters are adjusted manually. 34

35 Chapter 3. Nova Px Interface If operation with the selected configuration involves modification of the block scheme of the instrument (see p. 115 ), the modification will be saved automatically. Later selection of the controller configuration, commutation of electronic circuits, or adjusting the parameters will account for such change in the block scheme of the instrument (see p. 115 ). / Turns on/off the laser of the detection system. Serves for defining the input of the feedback loop. Serves for defining the operating point (parameter SetPoint). During operation, the feedback loop will maintain its input to be equal to this level. Difference between the SetPoint level and the input of the feedback loop in open state provides level of interaction between the probe tip and the sample surface. Closes/opens the feedback loop on Z: Off opens the feedback loop. This will shrink the Zscanner completely; On closes the feedback loop. This will extend the scanner so that the input of the feedback loop is equal to the predefined level of Set Point; Save disables the feedback with the scanner being fixed on Z at the last position. Serves for defining gain of the input of the feedback loop. The scanner extension indicator. Degree of the scanner extension is proportional to length and color of the colored bar. Serves for defining the number of the pass parameters of which will be displayed in the Main Parameters panel: NOTE. Number of the pass is used only with multi-pass techniques. 35

36 Nova Px. SPM Programm Turns on/off the feedback loop over X, Y capacitance displacement sensors of the scanner. Level of the constant bias applied to the probe or to the sample depending on the measurement mode. Enables displaying software oscilloscopes in the Main window of the program. Parameters of the display mode of the software oscilloscopes are defined in the Background Docked Forms parameters group of the Base OptionsForm window(see p. 22 ). 36

37 Chapter 3. Nova Px Interface 3.3. Data Types The Nova Px program works with data of the following types: one-dimensional data (see p. sections, etc); two-dimensional data (see p. etc); text data (notes to the experiments and other records) ) (results of spectroscopy measurements, 2D-data cross- ) (scan images, lithography templates, 3D-data cross-sections, D Data The Nova Px program displays 1D data using 1D Data Viewers (see Figure below). The top of a 1D Data Viewer is equipped with a Toolbar (see p. 38 ) that assists processing the data. Fig D Data Viewer The 1D Data Viewer provides limiting ranges and rescaling of the viewing area as well as adjusting the interface of the viewing area (see p. 41 ). To move a plot along X or Y direction, aim the mouse pointer at the respective axis. Aiming will highlight the axis in blue. Then, drag the plot along the axis with the left mouse button being pressed. To change the X or Y range of the plot, aim the mouse pointer at the respective axis. Aiming will highlight the axis in blue. Press and hold the <Ctrl> key and the left mouse button; move the mouse pointer to redefine the range in the plot to be displayed. To rescale the plot in X or Y direction, press and hold the <Shift> key and the left mouse button; then move the mouse pointer until the desired scale is achieved. To resize the 1D Data Viewer, press and hold the left mouse button inside the Viewer area with the <Ctrl> key being pressed; move the mouse pointer until the desired size is achieved. 37

38 Nova Px. SPM Programm One-dimensional Data Toolbar Fig. 41. One-dimensional Data Toolbar A specific set of buttons in a 1D Data Toolbar depends on the window that contains the 1D Data Viewer. Table below provides description for all available buttons of 1D Data Toolbars. Table 9. s of the One-dimensional Data Toolbar Saves the current frame as a separate text file. Save Attaches the current frame as a new one to the initial file. Store 1D Data Save 1D Image Saves the current frame as a separate graphic file of extension *.bmp or *.jpg. Prints the 1D-Plot or content of the frame. Print 1D Image Enables moving the visible region with the mouse. Move Visible Area Zoom In Enables zooming the selected region in the plot. After enabling the tool, select the desired rectangle either by clicking at a corresponding location or by marking the rectangle with the mouse. For disabling, click the tool again. Contracts the selected area of the plot. If a region is magnified in the Zoom Out Markers plot, clicking the button will result in zooming out of that region. Single marker. Serves for displaying properties of the point it is linked to. To place a marker, click at the desired location. For placing a next marker, click with the <Ctrl> key pressed. For moving a marker, use keys < > or < > or drag it with the mouse. To remove a marker, click on it with the keys <Ctrl> and <Shift> pressed or press on it with the mouse and press the <Del> key (this needs the tool be activated). Next to the marker name, coordinates X and Y of the associated point are displayed (see Figure below). 38

39 Chapter 3. Nova Px Interface Pair Markers Pair marker. Serves to display distance between two markers. A straight-line segment with markers on its ends is constructed with the mouse. Click at the first location and draw the segment holding the primary button pressed. A next marker can be added by clicking with the <Ctrl> key pressed. The markers can be moved with the keys < > and < > or by dragging with the mouse. To remove a pair marker, click on it with the keys <Ctrl> and <Shift> pressed or press on it with the mouse and press the <Del> key (this needs the tool be activated). Next to the marker name, the following characteristics are displayed (see Figure below): Fit Active Graph Width to Visible Area Fit Active Graph Height to Visible Area DX difference between X coordinates of the pair marker ends; DY difference between Y coordinates of the pair marker ends. Redefines the X scale so as the plot of the active signal takes the whole width of the 1D Data Viewer. Redefines the Y scale so as the plot of the active signal takes the whole height of the 1D Data Viewer. 39

40 Nova Px. SPM Programm Fit Active Graph to Visible Area Redefines both the X and, Y scales so as the plot of the active signal takes the whole width and height of the 1D Data Viewer. Fits the X scale to cover the whole X range of all displayed curves. Fit All Graphs Width to Visible Area Fits the Y scale to cover the whole Y range of all displayed curves. Fit All Graphs Height to Visible Area Fit All Graphs to Visible Area Fit Active Graph Y Zero Redefines both scales so as all curves were visible entirely in the 1D Data Viewer. Redefines the Y scale so as the zero and the maximum levels (Y) of the active signal were captured in the 1D Data Viewer. level to Visible Area Restarts acquiring the measured relations. Enables automatic scaling the curves displayed in the 1D Data Viewer. If pressed, scales of the plot are adjusted in real time using the scaling parameters. The scaling parameters are accessible through the following buttons: Settings /,,,,,,. Opens the window (see p. 41 ) to adjust interface parameters of the 1D Plot (scales, fonts, headers, lines etc.). Starts/stops run-time plotting. Start/Stop Oscillograph Defines period of run-time plotting. Defines the mode of run-time plotting. 40 Overwrite after the period of plotting is exhausted, newly acquired data appear starting from the left of the plot and erase images of the data acquired at the previous period; Shift after the period of plotting is exhausted, the plot moves to the left as a whole with the newly acquired data being appended to the right; Rewrite after the period of plotting is exhausted, the curve is erased and plotting starts from the left;

41 Chapter 3. Nova Px Interface Additional the curve represents data collected for the entire measurement. Adjusting Interface of the One-dimensional Data Viewer Interface of the 1D Data Viewer is adjusted in the Settings Dialog window (see Figure below). Settings Dialog window opens by clicking the tool in the 1D Data Toolbar (see p. 38 ). Fig. 42. Settings Dialog window Table 10. s of the panel of the Settings Dialog window Load settings Save Settings Black and White Default color settings Loads adjustments from a file of extension *.cfg. Saves current adjustments as a separate file of extension *.cfg. Sets black-and-white interface mode. Defines the color palette to be the default one. Saves the current adjustments as the default set and closes the Settings Dialog. Closes the Settings Dialog ignoring modifications. 41

42 Nova Px. SPM Programm Parameters defined in the Settings Dialog window are organized to the following groups: Fonts & Colors (see p. Axes (see p. 43 ); ); Markers (see p. 45 Advanced (see p. Graphs (see p ); 46 ); ). The Fonts & Colors group The Fonts & Colors group serves for adjusting fonts and colors of displaying various controls. Fig. 43. The Fonts & Colors group Table 11. Parameters of the Fonts & Colors group Parameter Title Font Font of the plot title. Defines name, size, color, and typeface of the font. Axes Name Font Font of the axes titles. Defines name, size, color, and typeface of the font. Axes Values Font Font of the tick labels. Defines name, size, color, and typeface of the font. Markers Font Font of the marker message. Defines name, size, color, and typeface of the font. Axes Border Color Color of the axes. Field Color Background color of the plot area. 42

43 Chapter 3. Nova Px Interface Parameter Background Color Background color of the axes areas. Grid Color Color of the plot grid. Grid Style Style of the grid lines. The Axes group Fig. 44. The Axes group Table 12. Parameters of the Axes group Parameter X Relative Coordinates Switches between relative and absolute data representation along the X-axis. The relative representation uses the minimum X value as origin of the X range. Y Relative Coordinates Switches between relative and absolute data representation along the Y-axis. The relative representation uses the minimum Y value as origin of the Y range. X Values Orientation Defines the rotation of the values on the X-axis. The options are 0, 90, 180 and 270 degrees. 43

44 Nova Px. SPM Programm Parameter Y Values Orientation Defines the rotation of the values on the Y-axis. The options are 0, 90, 180 and 270 degrees. X Values Formatted Formats of the X axis title and of X tick labels. Y Values Formatted Formats of the Y axis title and of Y tick labels. X Unit Selects measurement units for the X axis. Available choices: Auto - automatic, Original acquisition related, Angstrom, nm, µm, mm, m. Y Unit Selects measurement units for the Y axis. Available choices: Auto - automatic, Original acquisition related, Angstrom, nm, µm, mm, m. Put X Name on axis line Selects position of the X axis title. With the option selected, the title replaces the last tick label. Otherwise, the title is displayed parallel to the X axis with centering in the middle of the X range. Put Y Name on axis line Selects position of the Y axis title. With the option selected, the title replaces the last tick label. Otherwise, the title is displayed parallel to the Y axis with centering in the middle of the Y range. Hide X Name Turns on/off displaying the X axis title. Hide Y Name Turns on/off displaying the Y axis title. Hide X Axis Turns on/off displaying the X axis. Hide Y Axis Turns on/off displaying the Y axis. Hide Title Shows/hides the title. 44

45 Chapter 3. Nova Px Interface The Markers group Fig. 45. The Markers group Table. 13. Parameters of the Markers group Parameter Snap Markers to data Constraints the marker to link to data points in the plot. If selected, the marker can move only on the data points. Otherwise, the marker moves along the segments connecting the data points. Markers View Parameters Parameters to be viewed with the single marker: Pair Markers View Parameters X X coordinate of the marker; Y Y coordinate of the marker. Parameters to be viewed with the pair marker: DX difference between X coordinates of the markers; DY difference between Y coordinates of the markers; Angle arctg(dy/dx); DX/DY DX/DY; DY/DX DY/DX; Lenght distance between the markers. 45

46 Nova Px. SPM Programm Parameter Flagstaff Pen Style Defines style of the line connecting the marker and its caption. Marker Image Defines an image to display the marker (square, circle, triangle etc.) The Advanced group The Advanced group contains the plot grid parameters and the histogram parameters. NOTE. For displaying the data as a histogram, the Plot Type item of the Graphs parameters group should be valued as Histogram. Fig. 46. The Advanced group Table. 14. Parameters of the Advanced group 46 Parameter Show Grid Shows/hides lines of the main grid. Show Small Grid Shows/hides lines of the secondary grid. Max width of chart bars Maximum width of a chart bar (in pixels). Min width of separate bars Minimum width of a chart bar (in pixels). Gap between chart bars Ratio of the distance between chart bars to their width (supported only for the bar width in the range of [Min width, Max width]).

47 Chapter 3. Nova Px Interface The Graphs group Fig. 47. The Graphs group The Graphs group serves for adjusting the following parameters of a plot displayed in the 1D Data Viewer. Table. 15. Parameters of the Graphs group Parameter Color Color of the plot curve. Width Width of the plot curve. Plot Type Plot type. Available types: Line (smoothed curve without markers), Point (scattergram), Histogram (histogram). X-Axis Name Title of the X axis. X Bias (sec) Offset of the X data. X Scale Scaling of the X axis. X Unit Measurement units of the X axis. Y-Axis Name Title of the Y axis. Y Bias (V) Offset of the Y data. Y Scale Scaling of the Y axis. Y Unit Measurement units of the Y axis. 47

48 Nova Px. SPM Programm D Data The Nova Px program displays 2D data using 2D Data Viewers (see Figure below). The top of a 2D Data Viewer is equipped with a Toolbar (see p. 48 ) that assists processing the data. Fig D Data Viewer A 2D Data Viewer provides an option of adjusting the interface of the viewing area (see p ). Two-dimensional Data Toolbar Fig. 49. Two-dimensional Data Toolbar A specific set of buttons in a 2D Data Toolbar depends on the window that contains the 1D Data Viewer. Table below provides description for all available buttons of 2D Data Toolbars. Table. 16. s of the 2D Data Toolbar Opens a list of scanned images received during the current session. Store 2D Data Attaches highlighted scanned image as a separate frame to the current data file with all made modifications taken into consideration. Save 2D Image Saves the current frame as separate graphic file of extension *.bmp or *.jpg. 48

49 Chapter 3. Nova Px Interface Prints the current frame. Print 2D Image Move Probe Select Scan Area Enables moving the probe along the sample surface. The probe moves in regard to the sample in real time mode during marker movement within maximum scanning area. Serves for selecting the scan area. With this button being pressed, the scan area size and position can be modified in the 2D Data Viewer using the mouse. Select Rotation Scan Area Serves for selecting the scan area. With this button being pressed, the scan area size, position, and orientation can be modified in the 2D Data Viewer using the mouse. Move Visible Area Enables moving the visible area within the maximum scan area with the mouse. Zoom In Enables zooming the selected region in the plot. After enabling the tool, select the desired rectangle either by clicking at a corresponding location or by marking the rectangle with the mouse. For disabling, click the tool again. Cancels zooming the selected area in the plot. Zoom Out Scales the viewing area to be occupied by the current frame. Fit Visible Area to Current Scan Scales the viewing area to be occupied by the maximum scan area. Fit Visible Area to Maximal Scan Area "Point" Instrument "Length" Instrument Enables measuring point coordinates in the plot. With this tool selected, click at the desired point in the plot. Coordinates (x, y, z) of this point will be shown in side the plot area. A series of points can attributed with coordinates by clicking at their locations with the <Ctrl> key pressed. Enables measuring distances between points in the plot. With this tool selected, click and hold the primary mouse button at the first end of the 49

50 Nova Px. SPM Programm segment length of which is to be measured. Move the mouse pointer to the second end of the segment. Length of the segment will be shown in the plot area. A series of segments can be attributed with their lengths by performing this manipulation with the <Ctrl> key pressed. "Angle" Instrument X Cross Section Y Cross Section Arbitrary Cross Section Enables measuring angles between rays in the plot. With this tool selected, click at the location of the angle vertex. Next, define the first ray of the two by clicking at any point lying on it. This will result in displaying angle between the first ray and the ray starting at the vertex and ending at the current position of the mouse pointer. This display will be fixed after clicking at any point of the desired second ray. A series of angles can be attributed with their values by performing this manipulation with the <Ctrl> key pressed. Enables taking X cross-sections in the 2D profile displayed in the Viewer. A segment for sectioning is defined by clicking at a point lying in the desired segment. The corresponding section will be displayed in the 1D Data Viewer. Several sections can be selected at a time by clcikcking with the key <Ctrl> being pressed. Enables taking Y cross-sections in the 2D profile displayed in the Viewer. A segment for sectioning is defined by clicking at a point lying in the desired segment. The corresponding section will be displayed in the 1D Data Viewer. Several sections can be selected at a time by clcikcking with the key <Ctrl> being pressed. Enables taking cross-sections along arbitrary directions in the 2D profile displayed in the Viewer. The corresponding section will be displayed in the 1D Data Viewer. Several sections can be selected at a time by clcikcking with the key <Ctrl> being pressed. Enables adjusting contrast af the image in manual mode. Z Coloration The following tools are provided for adjusting the contrast: input fields (see Figure below) that appear after pressing the button: 50

51 Chapter 3. Nova Px Interface sliders of the color scale. The sliders can be moved either independently or using the "middle line" lying between them. The "middle line" is active only when all sliders are away from their extreme positions. Enables automatic adjustment of the image coloring. Change Palette Opens a dialog for loading a new color palette from a file of extension *.pal. Enables/disables smoothing the image. Smooth Switcher Opens Settings Dialog (see p. 52 ) to adjust 2D Data View interface. 2D/3D Properties 3D/2D Image Representation Toggles between 2D- and 3D-data Views. When pressed, additional controls appear in the toolbar: List of available viewing modes for 3D data: Fast the scan image is displayed as a 3D-surface with the original color retained; Wire as grid of splines; Light as an illuminated surface with texture in 3D space. Parameters of texture and illumination are defined in the 3D Mode group of the Settings Dialog (see p. 52 ). 51

52 Nova Px. SPM Programm Enables changing the viewing point of a 3D image with the mouse. If pressed, repositioning the light source is enabled. This option is available only for the Light item of the 3D View Modes list. NOTE. Repositioning the light source is available only whn the Light item of the 3D View Modes list is selected. Enables viewing the scan image as a surface with its interior filled to zero level. Resizing the 2D plot area is performed with the mouse with the <Ctrl> key pressed Adjusting Interface of 2D Data Viewer Interface of the 2D Data Viewer is adjusted in the Settings Dialog window (see Figure below). The Settings Dialog window opens by clicking the p. 48 button in the Toolbar of 2D Data Viewer (see ). Fig. 50. Settings Dialog window Table 17. s of the panel of the Settings Dialog window Load settings 52 Loads adjustments from a file of extension *.cfg.

53 Chapter 3. Nova Px Interface Save Settings Saves current adjustments as a separate file of extension *.cfg. Black and White Sets black-and-white interface mode. Default color settings Defines the color palette to be the default one. Saves the current adjustments as the default set and closes the Settings Dialog. Closes the Settings Dialog ignoring modifications. Parameters defined in the Settings Dialog window are organized to the following groups: Fonts & Colors (see p. Axes (see p. Active Frame (see p. Z-slider (see p. 3D Mode (see p ); ); ); ); 57 ). The Fonts & Colors group Fig. 51. The Fonts & Colors group Table 18. Parameters of the Fonts & Colors group Parameter Title Font Font of the plot title. Defines name, size, color, and typeface of the font. Axes Name Font Font of the axes titles. Defines name, size, color, and typeface of the font. 53

54 Nova Px. SPM Programm Parameter Axes Values Font Font of the tick labels. Defines name, size, color, and typeface of the font. Max Scan Area Color Color of the maximum plot area. Axes Border Color Background color of the plot area. Background Color Background color of the axes areas. The Axes group Fig. 52. The Axes group Table. 19. Parameters of the Axes group Parameter XY Relative Coordinates Switches between relative and absolute data representation along the X, Y-axes. The relative representation uses the minimum X, Y value as origin of the X, Y range. Z Relative Coordinates Switches between relative and absolute data representation along the Z-axis. The relative representation uses the minimum X value as origin of the Z range. X Values Orientation Defines the rotation of the values on the X axis. The options are 0, 90, 180 and 270 degrees. Y Values Orientation Defines the rotation of the values on the Y axis. The options are 0, 90, 180 and 270 degrees. Z Values Orientation Defines the rotation of the values on the Z axis. The options are 0, 90, 180 and 270 degrees. 54

55 Chapter 3. Nova Px Interface Parameter XY Values Formatted Format of tick labels for the X and Y axes. Labels are transformed to values in the range [1, ] 10n. Z Values Formatted Format of tick labels for the Z axis. Labels are transformed to values in the range [1, ] 10n. XY Unit Selects measurement units for the X, Y axes. Available choices: Auto - automatic, Original acquisition related, Angstrom, nm, µm, mm, m. Z Unit Selects measurement units for the Z axis. Available choices: Auto - automatic, Original acquisition related, Angstrom, nm, µm, mm, m. Put XY Name on axis line Selects position of the X, Y axes title. With the option selected, the title replaces the last tick label. Otherwise, the title is displayed parallel to the X, Y axis with centering in the middle of the X, Y range. Put Z Name on axis line Selects position of the Z axis title. With the option selected, the title replaces the last tick label. Otherwise, the title is displayed parallel to the Z axis with centering in the middle of the Z axis. Hide XY Names Shows/hides measurement units for the X and Y axes. Hide Z Name Shows/hides measurement units for the Z axis. Hide XY Axis Turns on/off displaying the X, Y axes. Hide Z Axis Turns on/off displaying the Z axis. Hide Title Shows/hides the title. Hide Palette Bar Shows/hides the palette bar. Palette Bar Width Adjusts width of the palette bar. Palette Bar Gap Adjusts offset of the palette bar. Palette Bar Alignment Enables selecting the alignment mode of the palette bar from the list of Left, Center, and Right. 55

56 Nova Px. SPM Programm The Active Frame group Fig. 53. The Active Frame group Table. 20. Parameters of the Active Frame group Parameter X Bias (nm) The X offset of the data. Y Bias (nm) The Y offset of the data. X Scale The scale factor for the X-axis. Y Scale The scale factor for the Y-axis. XY Unit Measurement units of the X, Y axes. Z Unit Measurement units of the Z axis. The Z-Slider group The Z-Slider group serves for adjusting the contrast control tool (button ). Fig. 54. The Z-Slider group 56

57 Chapter 3. Nova Px Interface Table. 21. Parameters of the Z-Slider group Parameter Z-Slider visible Shows/hides the sliders. Min Z-Slider Back color Enables selecting the background of the bottom slider. Min Z-Slider Line color Enables selecting the color of the bottom slider image. Min Z-Slider Text color Enables selecting the color of the bottom slider text. Max Z-Slider Back color Enables selecting the background of the top slider. Max Z-Slider Line color Enables selecting the color of the top slider image. Max Z-Slider Text color Enables selecting the color of the top slider text. The 3D Mode group Fig. 55. The 3D Mode group Table. 22. Parameters of the 3D Mode group Parameter Light power Enables adjusting brightness of the illumination source. Glossiness Enables adjusting glossiness of the surface material. Soften Enables adjusting blurriness of the surface material Software oscilloscope The Software oscilloscope serves for viewing time dependencies of signals (see Figure below). The software oscilloscope opens by clicking the (see p. 19 ). button in the Additional Operations panel The Software oscilloscope provides simultaneous viewing of up to four time dependencies (see Figure below). To open one more oscilloscope, select Tools Add Ocsill in the panel of the Software oscilloscope. 57

58 Nova Px. SPM Programm Fig. 56. Software oscilloscope Above the viewing area of the Software oscilloscope, the panel (see p. processed signals is located. 59 ) to control the Besides, the oscilloscope is equipped with the Toolbar to the left from the viewing area (see p. with controls to define displaying options of signals in the viewing area. 37 ) The program provides options of rescaling and limiting ranges of the plot axes as well as of adjusting the interface (see p. 41 ) of the viewing area. To move a plot along X or Y direction, first select the desired direction by aiming at it with mouse (the selected axis will be highlighted). Then, drag the plot along the axis with the left mouse button being pressed. To rescale a plot in X or Y direction, first select the desired direction by aiming at it with mouse (the selected axis will be highlighted). Press and hold the <Ctrl> key and the left mouse button; move the mouse pointer to redefine the range in the plot to be displayed. To rescale the plot in X or Y direction, press and hold the <Shift> key and the left mouse button; then move the mouse pointer until the desired scale is achieved. To resize the viewing area, press and hold the <Ctrl> key and the left mouse button anywhere inside the viewing area; then move the mouse pointer until the desired size of the viewing area is achieved. 58

59 Chapter 3. Nova Px Interface Table 23. s of panel of the Software oscilloscope Appends a signal to the list of the processed signals (maximum value is 4). Removes the last entry from the list of the processed signals. Serves for selecting a signal to display in the viewing area of the oscilloscope. The signal will be viewed, if this button is pressed in. A color bar to the left from the signal label shows the color which will be used for plotting the curve for the signal. Serves for displaying all the processed signals in the viewing area. Active Number of the signal currently active (The active signal determines scales of the plot in the viewing area). If several signals are displayed, the latest appended signal will be the active one by default. Tools Opens the list of options to manipulate with signals: Clear Current Graph restarts collecting the active signal from the beginning; Options opens the Signal Options window (see p. where displaying parameters are defined. Signals opens the Signal Select window (see p. 26 ) where the list of signals to view with the Software oscilloscope is defined. Besides, the Signal Select window (see p. 26 ) is accessible through Main Menu (see p. 21 ) of Nova Px (command Menu Tools Signals). Export To File opens the Save As dialog for exporting collected data to a text file. Import From File opens the Open dialog for importing data from a text file. Add Oscill opens an additional oscilloscope. Delete Oscill closes an additional oscilloscope. 60 ) 59

60 Nova Px. SPM Programm Meas. trigger If selected, the viewing area will display signals from other windows of the program (for example, data collected in processes of approaching, scanning etc.). Displaying time dependencies stops after finishing a measurement procedure. RMS Root-mean square deviation of the active signal around its average level. AVR Average level of the active signal Time Dependencies Displaying Parameters Parameters of displaying time dependencies in the viewing area of the Software oscilloscope (see p. 57 ) are defined in the Signal Options window (see Figure below). For viewing Signal Options in the panel of the Software oscilloscope (see p. 57 ), select the Tools Options menu command. Fig. 57. Signal Options window 60

61 Chapter 3. Nova Px Interface Table 24. s of Signal Options window Plot Type Serves for selecting a display mode of a signal: CyclicOverwrite when the plotting period of the signal passes, data of the next period will be displayed starting from zero abscissa; they will subsequently overwrite the plot of the previous period; CyclicShift when the plotting period of the signal passes, the plot will move to the left to provide space for plotting new data; CyclicRewrite when the plotting period of the signal passes, the plot will be erased and the plot of the next period will be collected in the clear area; Additional the curve represents data collected for the entire measurement. Show Period [sec] Serves for defining the plotting period (in seconds). Graph Width Serves for defining width of the plotted curve. X Axis Names Visible Turns on/off displaying the title of X axis. Y Axis Names Visible Turns on/off displaying the title of Y axis. Graph Select Selects the number of the signal to be adjusted. Sample Rate [Hz] Defines frequency of sampling the signal. Pause [sec] Defines delay before taking the next plotting period (in seconds). Repeat If selected, displaying the signal will stop after the current plotting period finishes. Change Color Opens the Color dialog to select color of displaying the curve for the selected signal. OK Saves modifications and closes the Signal Options window. Closes the Signal Options ignoring modifications. 61

62 Nova Px. SPM Programm 4. Basic operations 4.1. Initialization Initialization of the instrument is performed after the Nova Px program starts. For this initialization, the Initialization Panel (see Figure below) in the Main window (see p. 19 ) of Nova Px is used. NOTE. If the SPM controller is on when the Nova Px is launched, the instrument initialization starts automatically. Fig. 58. Initialization Panel The initialization starts by clicking the button. During the initialization the instrument status indicator (located to the right from the SPM Init button) displays. When initialization completes, the indicator takes one of the following states: the instrument is ready for operation; the controller is off; slots addresses in the Interface.ini file are invalid; initialization of the instrument is needed. Start initialization by clicking the button Adjusting the Cantilever Deflection Detection System The Optical Cantilever Deflection Detection System (hereafter, detection system) is adjusted with the Aiming Movers window (see below). NOTE. The title of the window for adjustments of the cantilever deflection detection system depends on the instrument configuration. It can be Aiming Movers or Laser Aiming. Below, the Aiming Movers title will be used. Depending on the instrument configuration, the following techniques can be used for adjusting the detection system: manual using the image of the laser spot on the photodiode; semiautomatic through the Laser-Diode Scanning window; automatic using the videoimage. 62

63 Chapter 4. Basic operations Window for adjusting the detection system In the course of adjusting the detection system position of the laser beam relative to the photodiode sections can be monitored on the indicator in the Aiming Movers window (see Figure below). The Aiming Movers window panel (see p. 19 opens by clicking the button in the General Operations ). Fig. 59. Aiming Movers window Appearance of the Aiming Movers window depends on configuration of the hardware. If the SPM provides automatic positioning of the laser and the photodiode, the Aiming Movers window displays control panels of stepper motors along with the Detection system adjustment panel at its top. Operations on adjusting the detection system and on controlling positions of the laser and the photodiode are controlled through the panel at the top of the Aiming Movers window. The Laser beam position indicator serves for monitoring position of the laser beam relative to photodiode sections. The indicator is accompanied with meters of current levels of signals from the photodiode (DFL and LF) to its left and with a meter of laser beam intensity collected by the photodiode (Laser) from below. Besides, the indicator is equipped with the following Stepper motors panels (see p. Diode X moves the photodiode along X direction; Diode Y moves the photodiode along Y direction; Laser X moves the laser along X direction; Laser Y moves the laser along Y direction. 126 ): 63

64 Nova Px. SPM Programm NOTE. Number of Stepper motor panels in the Aiming Movers window depends on configuration of the hardware. Table 25. s of Aiming Movers window Starts automatic adjusting the photodiode position. Opens the Laser-Diode Scanning window (see p. adjusting the detection system. Opens the MoverAxisSettingsForm window (see p. parameters of stepper motors of the instrument. / 64 ) that serves for 126 ) than contains Turns on/off the laser of the detection system. This button is duplicated in the Main Parameters panel (see p. 34 ). If the button is pressed in, the signals DFL, LF, Laser will be displayed as a histogram; otherwise, numerical values of these signals will be shown. / Displays values of D F L, LF and Laser signals with the accuracy of up to one (the key is not pressed) or two (the key is pressed) decimal points. DFL Difference signal between the upper and the lower parts of photodiode. D F L signal is proportional to the cantilever bent along the normal line. LF Difference signal between the left and the right parts of photodiode. LF signal is proportional to the torsional cantilever bent. Laser Sum signal that comes from all four photodiode sections. Laser signal is proportional to intensity of laser emission coming to photodiode and reflected from cantilever Adjusting Detection System through Laser-Diode Scanning Window The procedure on adjusting the detection system with the Laser-Diode Scanning window can be required, for example, when scanning is performed with a probe with two or more cantilevers or when higher accuracy of position of the laser spot on the cantilever is necessary. The procedure on adjusting the detection system is performed through the Laser-Diode Scanning window (see Figure below). This window opens by clicking the panel of the Aiming Movers window (see p. 63 ). button in the The program keeps parameters of the latest area of searching for the cantilever. If measurements are to perform with the same probe, these parameters can be used without modification. If the probe was exchanged, scanning of the whole area is recommended to find position of the cantilever. 64

65 Chapter 4. Basic operations Fig. 60. Laser-Diode Scanning window Algorithm of adjusting the detection system The algorithm of adjusting the detection system includes the following steps: 1. Select environment where the detection system will be adjusted (liquid or air). This will automatically define limits of the area to search for the cantilever. Environment is defined in the Working environment panel. 2. If necessary, redefine size and position of the search are in the viewer of the laser signal (this needs the button to be pressed). 3. Define the threshold (Threshold parameter) exceeding of which will be interpreted as capturing the laser beam reflected by the cantilever. Define number of lines at which the laser signal will be measured (Resolution Line). These parameters are accessible through the Auxiliary Parameters panel. 4. Start measurements of the laser beam intensity by clicking the button. In the course of measurements, the laser beam will move line-by-line in the search area. When measurements finish, the Laser-Diode Scanning window will display distribution of the laser beam intensity reflected by the cantilever (1) and by the chip of the probe (see Figure below). 65

66 Nova Px. SPM Programm Fig. 61. View of reflected laser beam. 1 part reflected by the cantilever; 2 part reflected by the chip 5. Start aligning the detection system by clicking the button. This will start line-by-line measurements of the laser beam intensity followed by the point at which the reflected intensity detected by the photodiode is highest. The laser beam will be aimed at that point. The photodiode will be repositioned for the laser beam to fall to the center of the photodiode. When the procedure on adjusting the detection system finishes, a message box with the message "Scan process finished" will appear in the Laser-Diode Scanning window. The top of the Laser-Diode Scanning window (see Figure above) is equipped with the panel for adjusting the detection system. Below the panel the Laser signal viewing area is located. In the course of adjusting the detection system, the Laser signal viewing area displays the measured laser intensity taken line-byline. The top of the viewing area is equipped with the standard 2D Data Toolbar. Table 26. s of panel Starts measurements of intensity reflected by the probe with the photodiode. Starts/stops automatic adjusting the photodiode position so as the laser beam comes to the center of the photodiode. This function is also available through the windows Aiming Movers (see p. 63 ) and Camera (see p. 124 ). Starts automatic adjusting the detection system. This function is also available through the Camera window (see p. 124 ). Working environment panel 66 Displays name of environment where the procedure on adjusting detection system will be performed (air or liquid).

67 Chapter 4. Basic operations The button at the right of this panel opens the Configure window (see p. 95 ) where environment can be redefined. Opens the Auxiliary Parameters panel (see p. detection system 68 ) for adjusting the Selects a medium in which the detection system will be adjusted Environment for adjusting the detection system is defined in the Configure window. This window opens by clicking the button in the panel of the Laser-Diode Scanning window. Fig. 62. Configure window Table 27. s of Configure window Environment panel Selects a medium in which the detection system will be adjusted (air or liquid). Designations of the switch positions: Air for adjusting the detection system in air; Liquid for adjusting the detection system in liquid.select the desired environment and click the button. This will automatically define the area of searching for the cantilever that depends on the environment. Position panel Displays the current coordinates of the photodiode. Tolerance panel Defines size of the area around the cantilever. When distribution of the reflected intensity is collected, the point of the highest intensity will be determined. 67

68 Nova Px. SPM Programm Save Photodiode Position Saves the current coordinates of the photodiode. If the Save Scanning Area option is selected, position and size of the cantilever search area will be saved as well. Close Closes the Configure window. Auxiliary Parameters panel The Auxiliary Parameters panel provides definitions of additional parameters of the procedure on adjusting the detection system. This panel appears at the right of the Laser-Diode Scanning window (see p. ) after pressing the Diode Scanning window. 33 button in the panel of the Laser- Fig. 63. Auxiliary Parameters panel Table 28. Parameters of Auxiliary Parameters panel Parameter Scan Settings parameters group Measured Signal Selects the detected signal. For the procedure on adjusting the cantilever deflection detection system, the Laser signal is used. Resolution Lines Defines number of lines allocated for the area where search for the cantilever will be performed. NOTE. To reduce the search time, do not use the number of lines greater than

69 Chapter 4. Basic operations Parameter Resolution Points Defines number of points in the search area of the cantilever. Laser Adjust Settings parameters group Threshold Defines the bottom threshold for the detected laser signal exceeding of which will be interpreted as reflecting the laser beam by the cantilever. NOTE. We recommend to apply the threshold value = 1. Maximum Tolerance Used for optimizing optical sensitivity of the cantilever deflection detection system. Aiming the laser beam at the cantilever includes searching for the point close to the edge of the cantilever where the reflected intensity is highest. When this point is detected, the target range of the reflected intensity is automatically calculated from max (highest reflected intensity) to max - N*max/100% (N is value of the Maximum tolerance parameter in %). Then the laser beam moves to the point of the cantilever that meets the following conditions: it is located as far from the base of the cantilever as possible; level of the reflected intensity at that position of the laser beam is in the target range. NOTE. For the Maximum tolerance parameter, values from 5 to 10 % are recommended. Microscan Steps X, Microscan Steps Y Define sizes of the area where intensity of the laser beam reflected by the cantilever will be measured at the stage of fine aligning the laser. The stage of fine aligning the laser starts automatically when the procedure on adjusting the detection system finishes. At this stage, the reflected intensity is collected around the predefined area and the laser beam is positioned so as the reflected intensity is highest. Microscan Lines Define number of lines for the area where intensity of the laser beam reflected by the cantilever will be measured at the stage of fine aligning the laser. Diode Aiming Settings parameters group Step Coefficient Defines coefficient that increases/decreases step of the photodiode stepper motor at moving the photodiode away from/to the center of coordinates. Zero DFL In the course of adjusting the detection system, the photodiode will be positioned so as value of DFL is equal to that of the Zero DFL field. Aiming Accuracy Defines accuracy of the DFL signal for measurements during the process of adjusting the detection system. 69

70 Nova Px. SPM Programm Parameter Threshold LF Defines accuracy to which the photodiode will be adjusted (final LF value, at which the adjustment procedure stops). Threshold DFL Defines accuracy to which the photodiode will be adjusted (final DFL value, at which the adjustment procedure stops). Table 29. s of Toolbar Button Name 70 Set palette Selecting a palette for imaging. Screen Shot Opens a dialog for saving the current image as a separate graphics file. Zoom In Zooming tool. With this tool activated, click at the desired position or outline a desired area with the mouse. Zoom Out Zooming out tool. When this button is clicked, magnification of the previously selected region decreases. Set max visible area Displays a region on the sample surface with sizes of the maximum scan area. Set visible area = scan area Visualizes the area selected for further scan. Mini Map Displays a reduced image of the whole sample surface at the right bottom. Palette rect Turns on/off automatic adjustment of the palette. Palette edit Quick palette editor. Line tool Activates selection of a scan line. With this tool active, draw a straight segment along which separate scan areas will be located. Set anti aliasing Turns on/off smoothing of the image. Scan Select Activates selection of a scan rectangle. With this tool active, define with the mouse position and size of a scan area. Point motor tool Displays the cursor tracking position of the laser spot. Settings Opens the Settings dialog that provides interface parameters of the Data Viewer.

71 Chapter 4. Basic operations 4.3. Taking Resonance Curve Voltage of the generator output is applied to the piezodrive that controls oscillations of the tip. Characteristics of the tip oscillations in the process of scanning are defined with parameters of the generator output (frequency, amplitude, phase shift) in modulation modes. The piezodrive parameters are defined in the Resonance window (see Figure below). This window opens by clicking the button in the General Operations panel (see p. 19 ). Fig. 64. Resonance window The top of the Resonance window (see Figure above) is equipped with the panel (see p. 72 ). Below the panel the 1D Data Viewer is located to plot time dependencies of the detected signals. In the course of adjusting the piezodrive parameters, the 1D Data Viewer displays one or two curves depending on the number of the detected signals. The detected signals are defined in the Frequency response parameters panel (see p. 73 ). 71

72 Nova Px. SPM Programm Panel Table 30. Content of Panel Starts adjusting the piezodrive parameters in the automatic mode. This procedure includes measuring frequency responses of magnitude (Mag) and phase shift (Phase) of the cantilever oscillations and adjusting amplitude and phase shift of the output signal to levels defined in the Frequency responses parameters panel of the Resonance window (see p. 73 ). Probes Serves for selecting type of the probe to be used. Depending on the type of the probe parameters of searching for the resonance frequency of the cantilever will be adjusted. Displays current level of the detected signal. Displays current level of the phase shift. Quality Q-factor of the cantilever. The Q-factor is calculated using the frequency response after finding the resonance frequency. Displays/hides the Frequency response parameters panel (see p. Displays/hides the Additional settings panel (see p ). ). Additional settings panel The Additional settings panel serves for adjusting the piezodrive parameters in the manual mode. This panel opens by clicking 72 button.

73 Chapter 4. Basic operations Table 31. s of Additional settings panel Starts plotting the frequency response. Starts adjusting the cantilever oscillation magnitude (Mag) to the level defined in the Frequency responses parameters panel (see p. 73 ). This procedure will fit gain of the lock-in detector (Lock Gain) so as the Mag signal takes to the predefined level (Amp Target). The field to the right from the Amp, button displays the current amplitude of the output. Starts adjusting the phase shift to the level defined in the Frequency response parameters panel (see p. 73 ). This will result in adjusting the phase of the generator oscillations (Phase) so as the phase shift of the tip oscillations is equal to the predefined value (Phase Target). The field to the right from the Phase button displays the current value of the phase shift. Attaches the current frequency response plot as a separate frame to the current data file. Frequency responses parameters panel The Frequency response parameters panel (see Figure below) serves for adjusting the plotting parameters of the frequency responses. The panel is viewed at the left part of the Resonance window with the button in the panel of the Resonance window being pressed. Fig. 65. Frequency responses parameters panel 73

74 Nova Px. SPM Programm The Frequency response parameters panel (see Figure above) contains the following parameters groups: Common plotting parameters of frequency responses; Manuals Hardware Auto Auto Initials limits of searching the cantilever resonance frequency in the manual mode; parameters of quick access to the block scheme of the instrument for the procedure on adjusting the piezodrive parameters in the manual mode. Modification of these parameters changes the block scheme of the instrument (see p. 115 ); limits of searching the cantilever resonance frequency in the automatic mode; parameters of quick access to the block scheme of the instrument for the procedure on adjusting the piezodrive parameters in the automatic mode. Modification of these parameters changes the block scheme of the instrument (see p. 115 ). Table 32. s of Frequency response parameters panel Parameter Common parameter groups Param Displays the label of the generator output of which will be used for exciting oscillations of the cantilever. Signal1, Signal 2 Defines the signal for plotting frequency response; Amp Target Cantilever oscillations amplitude to be achieved with the adjusting procedure. Phase Target Phase shift between the cantilever oscillation and the reference signal to be achieved with the adjusting procedure. Average Defines number of intermediate measurements to be performed at each of N points in the frequency range of the detected signal. Manuals parameter groups From, KHz Upper limit of the frequency band to be used for the frequency response. To, KHz Lower limit of the frequency band to be used for the frequency response. Points Number of points (N) in the curve of frequency response. Hardware parameter groups Gen1Freq, KHz Generator output amplitude. Gen1Amp Generator output amplitude. Gen1Phase, Generator output amplitude. Gen1 x 10 If used, the generator output is multiplied by 10. LockGain Gain of the lock-in detector. LockInput Input signal of the lock-in detector. 74

75 Chapter 4. Basic operations Parameter LockPhase Phase of the lock-in detector. Auto parameter groups From, KHz Upper limit of the frequency band to be used for the frequency response. To, KHz Lower limit of the frequency band to be used for the frequency response. Points Number of points (N) in the curve of frequency response. Phase Adjust Phase shift between the generator output and the reference signal. Amplitude Adjust Enables/disables automatic adjusting the cantilever oscillations amplitude to the level defined in Amp Target parameters groups Common. Reset Manual Range If selected, the Nova Px program will restore the cantilever resonance search parameters at its subsequent start. Auto Initials parameter groups LockGain Gain of the lock-in detector. Gen1Amp Cantilever oscillations amplitude. Gen1 x 10 Gain of cantilever oscillations amplitude. If used, the generator output voltage is multiplied by 10. LockInGain Max Upper limit of gain of the lock-in detector for adjusting in the automatic mode. 75

76 Nova Px. SPM Programm 4.4. Approaching Sample to Probe Depending on the instrument configuration, either the sample or the probe moves in the course of the approaching procedure. The approaching procedure is controlled with the Approach window (see Figure below). This window opens by clicking a button of the panel (see p. 19 ). General Operations Fig. 66. Approach window At the top of the Approach window the panel of approaching procedure is located. Below the panel the Software oscilloscope is available (see p. 57 ) to display time dependencies of signals. During the approaching process, the software oscilloscope displays time dependency of the Height signal (proportional to extension of the scanner piezotube). 76

77 Chapter 4. Basic operations Table 33. Content of Panel Starts/stops approaching the sample to the probe (or the probe to the sample). Stops approach or retraction. Retracts the sample (probe) from the probe (sample) to distance defined in the BackDelta field of the Approach Settings window (opens by clicking ). Height in the panel of the Approach window Displays distance that the stepper motor moves in vertical direction from its original position. Opens the Approach Settings window where other approaching parameters can be adjusted. Opens the Auxiliary panel of the Approach window. Message log. The log collects messages on the course of the approaching process. 77

78 Nova Px. SPM Programm Table 34.s of the Auxiliary panel of the Approach window Remove Approach retracts the sample (probe) from the probe (sample) by one step of the stepper motor. approaches the sample to the probe by one step of the stepper motor. approaches the sample (probe) to the probe (sample) to distance defined in the ForwDelta field of the Approach Settings window (opens by clicking in the panel of the Approach window). ATTENTION! Define distances with care! If the ForwDelta distance exceeds the probe-sample distance, the probe tip can be damaged by the sample surface. 78

79 Chapter 4. Basic operations The Approach Settings window (opens with the parameters. button) provides additional approach Table 35. Additional approach parameters Parameter Parameters group Common CoordUnits Length units for all distances indicated in the table. Available values: nm nanometers; mm millimeters; steps steps of the stepper motor. RateUnits Rate units for all approach rates indicated in the table. Available values: nm/sec nanometers per second; mm/sec millimeters per second; CU (Conventional Units) analog of rates used in the Nova P8 program; steps/sec steps of the stepper motor per second. Coordinate Current position of the approach motor. OneStepDelta Value of one approach step for the step-by-step approach with the button (can be different from one step of the stepper motor). Parameters group Move Parameters ForwDelta Distance of approach with one click of the Auxiliary panel of the Approach window). button (located in the BackDelta Distance of retraction with one click of the panel of the Approach window). ForwRate (located in the Rate of approach started with the panel of the Approach window). button (located in the Auxiliary Rate of retraction started with the of the Approach window). (located in the panel BackRate Parameters group Landing Forward ZLevelLand, % Level defining the scanner extension at which the approach rate will change its value from StartRate to LandRate. 79

80 Nova Px. SPM Programm Parameter ZLevelBack, % Level defining the scanner extension at which the approaching process will stop and several back steps will be taken to jack the scanner. NOTE. The point of scanner jacking is achieved using the scanner motor that retracts several steps back to prevent contact with the scanner moving by its mechanical inertia. At the jacking point the scanner is stationary due to frictional forces. StartRate Initial rate for approach started with the button. LandRate Approach rate from the moment when the scanner extension reaches ZLevelLand, %. Zaverage Number of scanner position measurements. Data of these measurements will be averaged and sent to the resulting data set. FBReScale Increases / decreases the integral feedback gain IScale used in the approach process. Parameters group Landing Backward ZLevelStop, % Level defining the scanner extension at which the retraction process will stop. ZLiftRate Retraction rate from the moment when the scanner extension reaches ZLevelBack, %. ZDeltaStop, % Level defining the scanner extension at which the retraction process will stop. DZEnabled Enables/disables usage of the ZDeltaStop parameter in control of the retraction process. BackSteps Defines number of steps to jack the scanner after the contact with the sample and with further retraction to its operating position (middle of the extension range). Parameters group Fine Landing FineEnabled Turns on/off regulation of the approach speed according to how close is the feedback signal to the predefined value of SetPoint. FBRateFall Selects how the approach rate will be changed from its initial value StartRate to the LandRate. On linear decrease as the feedback signal approaches to SetPoint. Off intermittent change when the FBDeflGate condition is met. 80

81 Chapter 4. Basic operations Parameter FBDeflGate, % Deviation of the feedback signal from the initial value (FBMoveAverage = 0) or from the floating average (FBMoveAverage = 1), which is considered as probe entering contact with the sample; the approach algorithm will decrease the approach rate for the contact to take place in a safe and smooth manner. FBAverage Number of measurements of cantilever oscillation amplitude. Data of these measurements will be averaged and sent to the resulting data set. FBMoveAverage Activates measurements of the feedback signal floating average by values of FBAverage. Abrupt deviation (> FBDeflGate) of the current feedback signal is used to detect the contact with the sample. Parameters group Touch Landing TouchEnabled Turns on/off the algorithm of touch landing. TouchStartBy Defines when the algorithm of touch landing will start: OnStart the algorithm of touch landing will start by clicking the button. OnFineSense the algorithm of touch landing will start when the probe enters the zone of its contact with the sample (condition FineLanding FBDeflGate). OnZsense the algorithm of touch landing will start when the feedback system begins to retract the scanner (condition Landing Forward ZLevelLand) TouchSteps Distance, to which the scanner approaches between cycles of piezotube extension (it defines distance to the sample) when the probe is far from the sample. TouchStepsFine Distance, to which the scanner approaches between cycles of piezotube extension (it defines distance to the sample) when the probe enters the contact zone (condition FineLanding FBDeflGate). TouchStepsZr Distance, to which the scanner approaches between cycles of piezotube extension (it defines distance to the sample) after reaching contact with the sample (condition Landing Forward ZLevelLand) before the scanner is retracted to the middle of the extension range (condition Landing Forward ZLevelBack). TouchZTune, msec Waiting time before extension of the Z-scanner to the TouchDZGate value. TouchZWait, msec Time for moving the Z-scanner to the TouchDZGate value. TouchDZGate, % Minimal change in the position of the Z-scanner during the TouchZWait time. Defines when extension of the Z-scanner is completed. 81

82 Nova Px. SPM Programm Parameter Parameters group Mag SetPoint Adjust. Approach in a semicontact mode with tuning the SetPoint parameter to minimize interaction with the sample. AdjustMode Turns on/off the SetPoint adjustment mode. The following methods are available to adjust the parameter: dz Only SetPoint is adjusted by the condition of stability of the Z scanner position against variation of SetPoint. When the contact with the sample is stable, the Z scanner position is fixed under variation of the SetPoint value. dphase Only SetPoint is adjusted when abrupt deviation of the phase is observed (this corresponds to reaching the contact with the sample). dz & dphase SetPoint is adjusted when either condition of the methods (dz Only and dphase Only) is met. dsetpoint, na Value of one step for adjustment of SetPoint. Stop dphase, Limiting level of the phase jump at one step of SetPoint adjustment that is considered as reaching the stationary contact with the sample. PullOutZ, % Maximum scanner extension at which further change of SetPoint stops because the scanner leaves its operation range (near the center of the extension range). The algorithm switches to the next cycle of approach to the surface and SetPoint adjustment Scanning Adjusting the scanning parameters and controlling the scanning process are performed with the ScanForm window (see Figure below). This window opens by clicking the the General Operations panel (see p. 19 ). 82 button in

83 Chapter 4. Basic operations Fig. 67. ScanForm window The top of the ScanForm window (see Figure above) provides the panel of scanning procedure. The Quick and Sections buttons in the Auxiliary panel of the ScanForm window and the Params button of the panel serve to open additional panels that provide control of the measurement process in the ScanForm window. Below the panel a 2D Data Viewer is located. The Viewer displays the collected image line-by-line in the course of scanning. Each of the detected signals is supplied with a separate 2D Data Viewer for displaying its profile. Contrast of the collected image can be regulated during the scanning process either with mouse manipulations inside the frame area or with sliders of the color scale. The top of the 2D Data Viewer is equipped with the standard 2D Data Toolbar (see p. 48 ). The bottom of the ScanForm window (see Figure above) locates Additional settings panel (see p. 82 ). Scanning Scanning is made as follows. Scanner makes bitmapped movement of the probe in relation to the sample. Measured signals are digitalized in raster centers. Direction of lines along which scanner is moving is called quick scanning direction. The direction perpendicular to the above mentioned direction is called slow scanning direction (see Figure below). Quick scanning direction data acquired during both direct and back pass are recorded in received image. 83

84 Nova Px. SPM Programm Fig. 68. Probe movement during data collection Table 36. Contents of Panel Runs/stops scanning. / Resumes scanning from the first line. Cyclic Cyclic scanning. If this button is pressed in, the selected region will be repeatedly scanned until the user stops this process. Second pressing the Cyclic button will stop scanning after the current scan completes. Pause Pause in scanning. If the key is pressed, scanning along the slow scanning aces will stop, the probe will continue to scan the current line. To continue scanning press Pause key once more. Mode Selects a measurement mode. Rate Serves for defining the scanning rate (speed of movement of the probe along the fast scanning direction). Units of the scanning rate are defined through the selection list to the right from this field. 84

85 Chapter 4. Basic operations Defines the scan measurement units. Indicates time required for taking an SPM image at the given set of operation parameters. Opens the ScanSettings window (see p. parameters are defined. 87 ) where additional scanning Opens the Scan area selection window (see p. 95 ). Opens the Auxiliary Scanning Parameters panel. Modification of parameters in this panel needs experience in SPM measurements. Opens the Auxiliary panel of the ScanForm window. Table 37. Contents of Auxiliary panel of the ScanForm window Элемент панели Описание Defines the starting point and the scanning direction. Driver Serves for selecting a scanner to be used in scanning. NOTE. The option on selecting the scanner is available only for instruments equipped with several scanners. Opens the Quick access panel (see p. 89 ) that provides access to other windows for the following operations: adjusting the detection system; adjusting the piezodrive parameters; approaching the probe to the sample. Operations attached to buttons of the Quick access panel uses definitions of parameters in the related windows. Opens the 1D Data panel (see p. 93 ). If the scanning process involves detecting several signals, each of the signals is supplied with a 85

86 Nova Px. SPM Programm separate 2D Data Viewer for displaying its profile. Below those Viewers, Additional settings panel are located. Table 38. s of Additional settings panel Displays/hides the area of line-by-line imaging of the detected signal (see Figure below). In the course of the scanning process, the area of lineby-line imaging displays the profile of the latest completely scanned line. Fig. 69. Area of line-by-line imaging of the detected signal Displays label of the detected signal. If pressed in, the corresponding 2D Data Viewer is active. Selects a procedure of correcting the sample inclination: None subtraction switched off; 1 Order line-by-line subtraction of the first order approximating curve; 2 Order line-by-line subtraction of the second order approximating curve; 3 Order line-by-line subtraction of the third order approximating curve; 4 Order line-by-line subtraction of the fourth order approximating curve; Plane subtraction of plane from scanned image; Surf 2 subtraction of the second order surface from scanned image. Displays number of the current scan in the data file. 86

87 Chapter 4. Basic operations Scanning parameters The scanning parameters are defined in the Scan Settings window (see Figure below). By default, this window displays signals which are standard for the selected measurement mode. The Scan Settings window opens by clicking the window (see p. 82 ). button in the panel of the ScanForm Fig. 70. Scan Settings window Table 39. s of Scan Settings window Driver Serves for selecting a scanner to be used in scanning. This parameter is also accessible through the panel of the ScanForm window (see p. 82 ). Mode Serves for selecting a measurement mode. This parameter is also accessible through the panel of thescanform window (see p. 82 ). Opens the Execution panel and additional parameters of the Scan Settings window. Measurements panel Serves for selecting signals to detect during the scanning process (column Signals). A detected signal is attributed with the following parameters: 87

88 Nova Px. SPM Programm Directions Direction of fast scanning at which the signal will be detected (Forward the signal is detected at forward stroke, Backward the signal is detected at backward stroke). Pass Number of the pass at which the signal will be detected. NOTE. Number of the pass is used only with multi-pass techniques. Draw Enables/disables showing the signal profile in a separate 2D Data Viewer of the ScanForm window (see p. 82 ). Average Number of measurements at a point of scanning. Results of these measurements are averaged to provide the detected value. Execution panel Vertex Delay Time interval taken before scanning the next line starts. Scan Count Number of scans of the selected region. The scanning procedure completes when this number of scans is collected. Cyclic Save If selected, every scan of cyclic scanning will be saved as a separate frame. Otherwise, only the last scan of cyclic scanning will be saved. Clear Frames If selected, in the course of cyclic scanning every time when a scan has been acquired the 2D Data Viewer is cleared and then filled line-by-line with newly detected data. Otherwise, in the course of cyclic scanning the 2D Data Viewer is not cleared and the newly detected data overwrite the previous scan. Enables/disables the programmed correction for non-linearity of scanner displacement. For scanners without sensors, non-linearity of the scanner piezoceramics is corrected. For scanners with sensors, non-linearity of the sensors is corrected. PassLines Defines delay of imaging the scan under collecting. Imaging of the sample surface in the 2D Data Viewer will start when this number of scan lines is collected. Sample Height In measurement modes with scanning-by-sample, raw data processing should account for the sample height. The Sample Height field defines the sample height in mm. OK Applies modifications and closes the Scan Settings window. 88

89 Chapter 4. Basic operations Quick access panel The Quick access panel (see Figure below) serves for facilitating the following operations from the ScanForm window (see p. 82 ):. adjusting the detection system; adjusting the piezodrive parameters; approaching the sample to the probe. Operations attached to buttons of the Quick access panel uses definitions of parameters in the related windows. The Quick access panel needs some experience in using AFM hardware. The Quick access panel opens by clicking window ScanForm window (see p. 82 ). button in the Auxiliary panel of the ScanForm Fig. 71. Quick access panel The Quick access panel contains the following rollouts: Aiming (see p. Resonance (see. Approach (see. p. FB Adjust (see p. 90 ); p ); ); ). 89

90 Nova Px. SPM Programm Aiming rollout The Aiming rollout serves for adjusting the detection system through the ScanForm window (see p. 82 ). The detection system adjusting procedure with the Aiming tab uses definitions of parameters in the Laser-Diode Scanning window (see p. 64 ). Fig. 72. Aiming rollout Table 40. s of Aiming rollout Laser Displays the total of signals detected by four sections of the photodiode. Level of the Laser signal is proportional to intensity of laser radiation reflected by the cantilever and detected by the photodiode. DFL Displays difference between signals detected by the upper and by the lower halves of the photodiode. Level of the DFL signal is proportional to normal bending of the cantilever. LF Displays difference between signals detected by the left and by the right halves of the photodiode. Level of the LF signal is proportional to torsional bending of the cantilever. Serves for adjusting the detection system: Laser starts the procedure on automatic aiming the laser beam at the cantilever. Functionally similar to the buttons in the panel of the Laser-Diode Scanning window (see p. 64 ) and the buttons in the panel of the Aiming Movers window (see p. 63 ); Diod starts automatic adjusting the photodiode position. Functionally similar to the buttons in the panel of the LaserDiode Scanning window (see p. 64 ) and the buttons in the panel of the Aiming Movers window (see p. 63 ); Laser-Diode starts automatic adjusting the detection system. This procedure includes aiming the laser beam at the cantilever and adjusting the photodiode position. 90

91 Chapter 4. Basic operations Resonance Rollout Fig. 73. Resonance rollout The Resonance rollout serves for searching for the resonance frequency of the cantilever (see p. 71 ) through the ScanForm window (see p. 82 ). Searching for the resonance frequency of the cantilever with the Resonance rollout uses definitions of parameters in the Resonance window (see p. 71 ). Table 41. s of Resonance rollout Mag Displays current magnitude of oscillations of the cantilever. Phase Displays current phase shift between the generator output and the reference signal. Quality Q-factor of the cantilever. The Q-factor is calculated using the frequency response after finding the resonance frequency. Serves for searching for the resonance frequency of the cantilever: Range starts detecting frequency responses of the magnitude (Mag) and the phase shift (Phase) of the cantilever oscillations. When the search finishes, acquired relations are displayed in the Resonance tab of the 1D Data panel of the ScanForm window (see p. 82 ); Amplitude starts adjusting the cantilever oscillation magnitude (Mag) to the level defined in the Frequency responses parameters panel of the Resonance window (see p. 73 ). Functionally similar to the button in the Additional adjustments panel of theresonance window; Phase starts adjusting the phase shift to the level defined in the Additional adjustments panel of the Resonance window (see p. 73 ). Functionally similar to the Resonance window; button in the Additional adjustments panel of the 91

92 Nova Px. SPM Programm Auto starts adjusting the piezodrive parameters. This procedure includes measuring frequency responses of magnitude (Mag) and phase shift (Phase) of the cantilever oscillations and adjusting amplitude and phase shift of the output signal to levels defined in the Frequency responses parameters panel of the Resonance window (see p. 73 ). Functionally similar to the button in the Additional adjustments panel of the Resonance window. Approach Rollout The Approach rollout serves for approaching the sample to the probe (see p. 76 ) through the ScanForm window (see p. 82 ). Approaching the sample to the probe with the Approach rollout uses definitions of parameters in the Approach window (see p. 76 ). Fig. 74. Approach rollout Table 42. s of Approach rollout Height Displays distance that the stepper motor moves in vertical direction from its original position. Starts approaching the sample to the probe. Stops approaching the sample to the probe. Retracts the sample from the probe to the distance defined in the BackDelta field of the Approach Settings window (opens by clicking the panel of the Approach window). 92 button in the

93 Chapter 4. Basic operations FB Adjust rollout The FB Adjust rollout serves for adjusting the feedback gain after the probe approaches the sample. Clicking the Run button invokes the procedure on tuning the gain to eliminate oscillations of the signal. The Settings button opens a dialog of adjusting the feedback parameters. Fig. 75. FB Adjust rollout Displaying 1D Data in Scanning Window The 1D Data panel (see Figure below) in the ScanForm window (see p. 82 ) serves for displaying signals as a function of a single variable. The panel opens by clicking the button in the in the Auxiliary panel of the ScanForm window ScanForm window (see p. 82 ). Fig D Data panel The 1D Data panel (see Figure above) contains the following three tabs: The Resonance tab serves for displaying plots of frequency responses in the process of adjusting parameters of the piezodrive. The Resonance tab can display one or two curves depending on the number of the processed signals. This tab is similar to the 1D Data Viewer of the Resonance window (see p. 71 ); 93

94 Nova Px. SPM Programm Fig. 77. Resonance tab The Approach tab serves for displaying time dependencies of signals. If approaching is carried out with the Quick access panel (see p. 89 ), the Approach tab shows time dependence of the Height (signal that corresponds to extension of the scanner piezo tube). This tab is similar to the Software oscilloscope (see p. 57 ); Fig. 78. Approach tab The Scan tab serves for displaying time dependencies of signals detected in the scanning process. The right part of the Scan tab contains an oscilloscope with the standard Toolbar for 1D Data (see p. 38 ). The Signals list at the left of the Scan tab provides buttons with labels of the detected signals. For displaying a particular signal in the software oscilloscope, press the corresponding button in the Signals list. A color bar to the left from the signal label shows the color which will be used for plotting the curve for the signal. The Sub list to the right from the Signals list serves for selecting the subtraction procedure that will be used for eliminating tilt of the sample surface for every signal. 94

95 Chapter 4. Basic operations Fig. 79. Scan tab Selecting Scan Area The actual scan area is limited by the maximum scan area. The program provides an option to rotate the rectangle of the scan area to an arbitrary angle. Note that if the displacement sensors are not used, scanning in directions tilted to the coordinate axes of the scanner is not recommended because in this case accuracy of scanning is not guaranteed due to non-linearity of piezoceramic material of the scanner. Location and sizes of the scan area can be adjusted with the mouse with its button being pressed. Besides, the scan area parameters can be defined explicitly using the panel accessible through clicking the button. The bottom of the Scan Area Parameters provides additional adjustment controls which can be displayed by clicking the button. Fig. 80. Scan Area Parameters panel 95

96 Nova Px. SPM Programm Table 43. s of Scan Area Parameters panel Opens the Scan area selection window. Switch that selects a pair of three interrelated parameters Size, Step, Points to be redefined. Center Coordinates of the center of the scan area (in mm). Origin of the coordinate system is located at the left bottom corner of the maximum scan area. Size Size of the scan area in a particular direction (in mm). By default, dimensions of the scan area are 10x10 µm. Step Distance between scan points in a particular direction (in mm). Points Number of scan points in a particular direction. Angle Defines the angle the scan area will be rotated relative to the XY coordinate frame. This field is available only with the button being pressed. SizeOv Increases the actual scan area relative to the defined one. It is valued in percentage of size of the scan area. This option eliminates creep of the scanner along the Z direction that is possible when the scan direction reverses. Opens the Auxiliary panel. Opens the Angle field to define the angle the scan area will be rotated relative to the XY coordinate frame. If pressed, the probe tip will be "locked" to location of the scan area. The following constraints (displayed in the column titles) are applied to sizes of the scan area: X, Y X and Y sizes of the scan area are independent; X~Y, Y~X size in one direction varies proportionally to the size in the another direction; X=Y, Y=X square scan area. The parameters Size, Step, and Points are interrelated as: Size = Step Points. 96 (1)

97 Chapter 4. Basic operations 4.6. Spectroscopy Spectroscopy measurements are performed through the Spectroscopy window. This window opens by clicking the button in the General Operations panel (see p. 19 ). The measurement procedure involves collecting 1D data which are displayed in a plot. Most frequently, the data are presented as functions of the piezoscanner extension (Z) or of the bias (BV). Fig. 81. Spectroscopy window The Spectroscopy window (see Figure above) contains the following panels: panel (see p. 2D Data Viewer (see p. Plot panel (see p ); 98 ); ). panel Fig. 82. panel 97

98 Nova Px. SPM Programm Table 44. s of panel Starts/stops the measurement procedure. Mode Serves for selecting a measurement mode. From, To Define range of the argument of the collected functional relation. When the measurement mode has been selected, the spectroscopy parameters are set at their default values. If desired, those values can be modified through the Spectroscopy parameters panel (see p. 102 ). This panel opens in the Spectroscopy window by clicking the button. Opens the Spectro Settings dialog box (see p. spectroscopy parameters. 103 ) to define additional 2D Data Viewer The Measurement points layout panel (see Figure below) serves for selecting points where measurements will be performed. The points can be arranged arbitrarily, along a straight line, or on a rectangular grid inside the scan area. Fig. 83. Measurement points layout panel Table 45. s of Measurement points layout panel View Points Table If selected, the Measurement parameters table window (see p. 101 ) for viewing and editing parameters of all measurement points independently. Active Point Number of the point measurement parameters of which are displayed in the Spectroscopy parameters panel (see p. 102 ). The plot (see p. 100 ) will display results of measurements at that point. 98

99 Chapter 4. Basic operations XY Point Set Serves for selecting a layout of distributing the measurement points. Points measurement points will be assigned at arbitrary locations. A point is selected by clicking at a desired location with the <Ctrl> key being pressed. Line measurement points will be assigned at locations lying on a predefined straight segment. First, define the segment by drawing it with the left mouse button being pressed. Then, enter a desired number of the measurement points in the field to the right from this button (see Figure below). The points will be distributed along the segment uniformly. For viewing the points, switch to the Points mode. Grid measurement points will be assigned at locations lying at vertices of a predefined grid. First, define limits of the grid by drawing it with the left mouse button being pressed. Then, enter dimensions of the grid in the fields to the right from this button (see Figure below). Vertices of the grid will be taken for measurements. For viewing the assigned points, switch to the Points mode. Clear Removes all assigned measurement points ignoring the active one. Driver Serves for selecting a scanner to be used for measurements. NOTE. This option is available only for instruments equipped with several scanners. 99

100 Nova Px. SPM Programm Plots panel Fig. 84. Plot panel The Plot panel serves for displaying 1D data resulted from measurements. The Plot panel provides a standard 1D Data Toolbar (see p. 38 ). Table 46. s of Plot panel Serves for selecting the signal to view in the Plot panel. Direction Serves for selecting which data will be displayed: All both of the forward and backward traces; Forw of the forward trace; Back of the backward traces. Curve The measurement procedure can produce several relations at a point. The Curve field defines the number of the curve to view in the Plot panel for the active point (defined in the Active Point field of the 2D Data Viewer. If Curve = 0, all collected relations for the active point will be displayed. X-Axis Defines scale of the abscissa axis: Absolute 100 absolute units. The axis origin is placed at zero of the argument of the plotted relation;

101 Chapter 4. Basic operations Relative relative units. Offset will be defined by initial value of the argument.the predefined argument range will be shifted by that value too. Measurement parameters table The Measurement parameters table appears at the bottom of the Spectroscopy window if the option View Points Table is selected. The Table contains a list of assigned measurements points with their measurement parameters. Fig. 85. Measurement parameters table When a new point has been selected, the Table is appended with a record containing a label of the point and its measurement parameters (coordinates, argument range, detected signal range, rate of change of the argument). By default, parameters of all points are assigned values defined in the panel of the window Spectroscopy (see p. 97 ). The measurements parameters can be modified independently by editing corresponding cells in the Table. The Fill Tools panel provides a table that assists modifying one or two measurement parameters of a given number of points. The table contains two bars, Fast and Slow. For modifying the first parameter, perform the following steps: in the Column drop-down list of the Fast bar select the parameter to modify; in the Count input field, define number of points parameters of which will be modified. Changes will be applied to the range of points from 1st to Nth; in the Fill Type drop-down list select an algorithm of distributing new values: when this option has been selected, the From input field is enabled. Enter a desired value to this field. Then, click the Fill button. The value will be assigned to all points in the selected range; Const 101

102 Nova Px. SPM Programm when this option has been selected, the input fields From and To are enabled. Enter limits of the selected parameters to these fields. Then, click the Fill button. Parameters of points of the selected range in the Table will be assigned to consecutive values calculated by dividing the parameter range to equal intervals. Line The Slow bar serves for modification of another parameter in parallel with that of the bar Fast. The Fill by Active button applies parameters of the active point to all selected measurement points Spectroscopy Parameters When a measurement mode has been selected, the spectroscopy parameters are assigned to values defined for the mode by default. These parameters can be redefined through the Spectroscopy parameters panel if desired. This panel opens by clicking the Spectroscopy window (see p. 97 ). button in the panel of the Fig. 86. Spectroscopy parameters panel Table 47. s of Spectroscopy parameters panel Move Depending on measurement units in use, defines either rate of change of the argument or time the argument will vary (Forward forward trace, Backward backward trace). Measurement units are selected from the list below the input fields. Measure Number of measurement points (Forward forward trace, Backward backward trace). Measurement units are selected from the list below the input fields. Signals Defines the detected signals. Up to three signals can be detected in parallel. NOTE. When a measurement mode has been selected, the set of signals standard for the mode is created automatically. Average Defines number of intermediate measurements at a point. The collected data will result from averaging over this number of measurements. Ena Used for constraining the signal range. This option is useful to eliminate possibility of damaging the probe or the sample due to strong contact between them. If this option is selected, the signal variation will be restricted by the range defined in the fields Limits Range. Otherwise, the signal variation will be defined by the argument range. Limits Range 102 Defines feasible range of the detected signal.

103 Chapter 4. Basic operations Additional Spectroscopy Parameters Additional spectroscopy parameters are defined in the Spectro Settings window (see Figure below). This window opens by clicking the (see p. 97 ) window. button in the panel of the Spectroscopy Fig. 87. Spectro Settings window Figure below demonstrate how the argument of the signal changes in the course of measurements. The measurement procedure involves detecting signals at forward (Forw) and backward (Back) traces. Forward trace signals are measured when their arguments vary from From to To. Backward trace signals are measured when their arguments vary from To to From. After launching the measurement procedure the signal argument achieves the level defined in the From field in a time InitTime and then remains constant during the DelayInit time. Then the signal is measured at forward trace with rate of Speed Forw defined in the Move field of the Spectroscopy parameters panel (see p. 102 ). When the argument reaches the level defined in the To field, detection stops. During the period Delay Forw the argument remains unchanged. Then the signal is measured at backward trace with rate of Speed Back defined in the Move field of the Spectroscopy 103

104 Nova Px. SPM Programm parameters panel. When the argument reaches the level defined in the From field, detection stops. During the period DelayBack the argument remains unchanged. In a time FinitTime the argument returns to its original level. Fig. 88. Process of spectroscopy measurements Table 48. Parameters groups of Spectro Settings window Parameter Points Manager Params XYMoveMode parameters group Defines the algorithm of moving the probe tip between the measurement points: MoveDefault the argument is set to its original level when the tip moves to the next point; when measurements at the current point complete, the feedback loop opens and the probe retracts from the sample surface. Then, the probe tip moves to the next point and approaches to the sample surface, the feedback loop closes, and detecting the signal starts. Lift Z CustomMode Serves for customizing the Measurement parameters table (see p. Scheme Mode Appends the hvvaluebv, column to the Measurement parameters table (see p. 101 ) to define constant probe-sample bias. Backward Limits Enabled Turns on/off limitation of the recorded signal at the backward motion within the range defined in the Limits Range fields of the Spectroscopy Parameters panel. If selected, the recorded signal will not be limited at the backward motion. Limits Gate Defines accuracy at which the signal value should come to the Limits Range to apply limitations ).

105 Chapter 4. Basic operations Parameter Point Execution Params parameters group BackwardEna Displays/hides results of backward traces in the Plot panel. FinitEna On when measurements at a point complete, the argument returns to its original level in a time FinitTime. This option is recommended for measurements with disabled feedback; Off when measurements at a point complete, the feedback loop sets the argument to its original level. CurveCount Defines number of intermediate measurements at a point. DelayInit Defines the time during which the argument remains constant at the level defined in the From field when measurements at forward trace are taken. DelayForw Defines the time during which the argument remains constant at the level defined in the To field when measurements at forward trace are taken. DelayBack Defines the time during which the argument remains constant at the level defined in the From field when measurements at backward trace are taken. InitTime Defines the time during which the argument achieves the level defined in the From field when measurements at forward trace are taken. FinitTime Defines the time during which the argument achieves the level defined in the From field when measurements at backward trace are taken. Point Argument Params parameters group Argument Defines the argument label in the Plot panel (see p. Coordinates Defines the display mode of abscissa values in the Plot panel (see p. 100 ). 100 ): Absolute absolute units. The axis origin is placed at zero of the argument of the plotted relation; Relative relative units. offset will be defined by initial value of the argument.the predefined argument range will be shifted by that value too. FromRangeNeg, Constrains the range of scanner positions (in percent of the permitted range) FromRangePos defined in the From field of the panel of the window Spectroscopy (see p. 97 ). ToRangeNeg, ToRangePos Constrains the range of scanner positions (in percent of the permitted range) defined in the To field of the panel of the window Spectroscopy (see p. 97 ). 105

106 Nova Px. SPM Programm 4.7. Lithography The lithography procedure is controlled through the Litho window (see Figure below). This window opens by clicking the button in the General Operations panel. Fig. 89. Litho window The Nova Px program provides two lithography modes: vector (see p. raster (see p ); ). Content of the Litho window depends on the lithography mode. 106

107 Chapter 4. Basic operations Vector Lithography Vector lithography is the process of influence on the sample surface during the probe movement along the predefined vector template. Fig. 90. Litho window The program provides four modes of vector lithography: simple vector lithography; gradient lithography; pulse lithography; pulse-gradient lithography. NOTE. Appearance of the panel of the Lithography window depends on the selected mode of vector lithography. The top of the Litho window is equipped with the panel (see p. 108 ) that provides controls for defining parameters of lithography and for controlling the lithography process. Below the panel the Lithography template viewing area is located where boundaries, sizes, and position of the lithography template along with primitive features of the template can be defined and the lithography process can be monitored. If the lithography procedure is preceded by scanning the sample, the acquired image will be displayed in the Lithography template viewing area. This facilitates selecting the lithography area and placing graphics primitives immediately on the exposed sample. 107

108 Nova Px. SPM Programm Vector Lithography panel Fig. 91. Vector Lithography panel Table 49. s of Vector Lithography panel Runs lithography process. In the course of lithography, appearance of this button will change to. Below the Stop button, an indicator bar will be displayed. Progress of lithography (in percentage) will be indicated with blue. Mode Method Action 108 Selects the lithography mode. Simple vector simple vector lithography. Applied force will be constant during the lithography cycle. Gradient gradient lithography. Applied force will be changed linearly in a preselected range. Pulse pulse lithography. The sample will be exposed to pulses of constant force. Pulse gradient pulse-gradient lithography. Combines two of the above modes, gradient and pulse. The sample will be exposed to pulses of linearly changing force. Selects the lithography method. Bias V charge lithography. The probe-sample voltage is maintained constant during the lithography process; Set point force lithography. The force applied to the sample is maintained constant during the lithography process; Current current lithography. The current through the sample is maintained constant during the lithography process. Defines the force applied to the sample when the probe moves along the template lines or acts at the template points.

109 Chapter 4. Basic operations Action1, Action2 Define the range of linear change of the applied force. The Action 1 input field provides initial level of the force applied to the sample while the field Action 2 is used for the final one. Step Defines step size in the pulse and the pulse-gradient modes. Rate Defines the speed the probe will move along the sample surface during lithography. Defines the speed the probe will move along the sample surface during lithography. BV Defines exposure to the sample when the probe moves to the origin of the template at the start, between the template objects during the lithography, and to the center of the sample on completing the lithography. Used only for charge lithography. BV_SP Defines exposure to the sample when the probe moves to the origin of the template at the start, between the template objects during the lithography, and to the center of the sample on completing the lithography. Used only for current lithography. SetPoint Defines exposure to the sample when the probe moves to the origin of the template at the start, between the template objects during the lithography, and to the center of the sample on completing the lithography. Used only for force lithography. Pulse Defines the pulse width. Defines the pulse shape. Primitives list If selected, the Lithography template parameters table will be available at the right part of the Litho window to view and modify lithography parameters for every template. Lithography template parameters table The Lithography template parameters table opens in the Litho window (see p. 106 ) if the Primitives list option is selected (see Figure below). The table contains the template objects with their related lithography parameters. 109

110 Nova Px. SPM Programm Fig. 92. Lithography template parameters table A new template object is appended to the table as a line containing the object name and the lithography parameters. By default, the parameters will be initiated with values taken from the panel (see p. 107 ) of the Litho window. The template objects can be associated with their individual lithography parameters. For a particular object, enter the desired values in corresponding cells of the table. For propagating the lithography values in a group of objects, select the group by clicking names of the objects in the group with the <Ctrl> key pressed. Then a new value entered in any cell of the group will be duplicated in all respective cells of the group. ATTENTION! Values of the lithography parameters given in the parameters table will be used only if the table is open. Otherwise, the lithography procedure will run with values defined in the panel. Below the Lithography template parameters table the following controls are located: Save opens a dialog for saving parameters of the lithography template in a file of extention *.litx; Load opens a dialog for loading existing parameters of the lithography template; Reset to defaults forces the lithography parameters in the table to take values from the panel of the Litho window. 110

111 Chapter 4. Basic operations Lithography template At the center of the Litho window, an area for defining graphics objects of lithography templates is provided. The top of this area is equipped with the standard 2D Data Toolbar (see p. 48 ). To the left of the area, the Lithography template Toolbar is located where types of lithography objects and modes of their drawing are defined. Fig. 93. Lithography template viewing area Table 50. Content of Lithography template panel Creates a new lithography template. New Open Loads an existing template from a file of extension *.dxf (AutoCAD data format). Opens a dialog for saving the template. Save Cut Copy Deletes selected objects from the template and puts them on the clipboard. The tool is accessible only if even single object of template is selected. Copies the selected object to the clipboard. The tool is accessible only if a single object of template is selected. Inserts clipboard contents into template field. Paste 111

112 Nova Px. SPM Programm Delete Deletes selected object without recovery. The tool is accessible only if single object of template is selected. Point. Point location is defined with mouse click in template field. Point Line segment. The segment beginning and end are defined with mouse clicks. Line PolyLine Rect Circle Arc Ellipse Select Rotate Move All Polyline. Polyline segments are defined with mouse clicks. When polyline is defined final point is fixed with right click. Rectangle. From now forward, if it is allowed to edit this object ( key is not pressed), its sizes and form may be changed at random pulling the required angle or side. Circle. From now forward, if it is allowed to edit this object ( key is not pressed), its sizes and form may be changed at random pulling the required angle or side. Arc. To draw an arc make a segment, then extend an arc behind any point between segment points. From now forward, if it is allowed to edit this object ( key is not pressed), its sizes and form may be changed at random pulling the required angle or side. Ellipse. From now forward, if it is allowed to edit this object ( key is not pressed), its sizes and form may be changed at random pulling the required angle or side. Selects an object. Selected object will be white colored. Press <Ctrl> key to select several objects. Left click and move cursor to move objects. Rotates selected objects. Press <Ctrl> key to select several objects. Left click and move cursor to rotate selected objects. Enables moving the template as a unified whole. To move the template, press and hold the primary mouse button. Prevents editing the highlighted objects. Lock Transform 112

113 Chapter 4. Basic operations Displays/hides the grid in the Lithography template Viewer. Show Grid Snap to Grid Enables snapping to the grid. If enabled, objects of the template can move only by steps defined by the grid Raster lithography Raster lithography performs mechanical exposure of the sample surface by the probe tip at every point of the template, when the probe moves along lines of the lithography template. As the template for raster lithography, a graphics file of any of most popular raster formats can be used. Strength of pressing the sample surface by the tip depends on brightness (gray scale) prescribed to a particular point in the template. Fig. 94. Litho window The top of the Litho window is equipped with the panel (see Figure above) that provides controls for defining parameters of lithography and for controlling the lithography process. Below the panel the Lithography template viewing area is located where boundaries, sizes, and position of the lithography template can be defined and the lithography process can be monitored. 113

114 Nova Px. SPM Programm Table 51. s of panel of raster lithography Runs lithography process. In the course of lithography, appearance of this button will change to. Below the Stop button, an indicator bar will be displayed. Progress of lithography (in percentage) will be indicated with blue. Mode Selects the lithography mode. For raster lithography, the Raster or PulseRaster item should be selected. Method Selects the lithography method. Bias V charge lithography. The probe-sample voltage is maintained constant during the lithography process; Set point force lithography. The force applied to the sample is maintained constant during the lithography process; Current current lithography. The current through the sample is maintained constant during the lithography process. For pulse lithography, the field to the right from the lithography method field defines the level the probe impacts the sample during motion to the beginning of the template and between the pulses. Selects the direction for lithography and the origin to start the lithography process. Action 1 Defines the SetPoint level for points of color that is the lowest in the color scale (usually, black). Action 2 Defines the SetPoint level for points of color that is the highest in the color scale (usually, white). Step Defines the step between lines where the sample is exposed. Rate Defines the speed the probe will move along the sample surface during lithography. Rate units are defined through the list to the right from this button. Pulse Defines duration of a pulse and the pulse shape. Select litho image Opens a dialog for selecting a lithography template. NOTE. An image of practically any raster format may be used as a template for raster lithography. 114

115 Chapter 4. Basic operations 4.8. Built-in programmed configuring Reconfiguring of the instrument circuits with software tools is performed using controls of the window (see Figure below). The Scheme window opens by clicking the button in the Additional Operations Panel (see p. 19 ). Schemes Fig. 95. Schemes window The Schemes window contains 4 tabs: Scheme tab; Signal Commutator tab; Filters tab; FeedBacks tab. 115

116 Nova Px. SPM Programm Scheme tab The Scheme tab provides a block scheme of the instrument for program-controlled reconfiguring. NOTE. When configuring is performed for a standard measurement mode of the Nova Px program, the controller will be commuted automatically after the mode is selected. Switches of the block scheme of the instrument Switches of the block scheme of the instrument are shown in Figures below. NOTE. Appearance of the block scheme of the instrument depends on the type of hardware in use. Switch 1 selects the voltage source; Switch 2 controls voltage supply to the sample; Switch 3 controls voltage supply to the probe (appears in the block scheme of when the option of measuring the probe-sample current is enabled (the button is pressed)). Fig. 96. Switches of the block scheme of the instrument Fig. 97. Switches of the block scheme of the instrument. The option of measuring the probesample current is enabled Switch 1 (selects the voltage source) Depending on states of the switches 2 and 3, the voltage can be supplied to the probe, to the sample, or both to the sample and to the probe. When the switch is in the upper position, the bias voltage is applied from the internal voltage supply selected in the Bias Voltage panel. The options to apply either DC, or AC, or combined DC + AC voltage are available. When the switch is in middle position, the voltage is supplied from an external source (Ext5). When the switch is in lower position, the probe and/or the sample is grounded. 116

117 Chapter 4. Basic operations Switch 2 (controls voltage supply to the sample) Appearance of the Switch 2 depends on the hardware configuration. If the switch is controlled programmatically through the block scheme of the instrument, it will appear as shown in Figure a). If biasing or grounding uses direct connection of corresponding sockets in the base unit with wires, the block scheme will appear as shown in Figure b). a) Switch is controlled programmatically b) Biasing the sample through connecting corresponding sockets in the base unit Fig. 98. Appearance of the switch controlling voltage supply to the sample Switch is controlled programmatically Upper position of the switch 2 the sample is grounded. Lower position of the switch 2 the sample is biased or grounded depending on position of the switch 1. A desired bias is provided by connecting required connectors of the base unit 2a «Earth» connector of the base unit. 2b lead wire of the sample. 2c BV connector of the base unit. Switch 3 (controls voltage supply to the probe) Upper position of the switch 3 the probe is supplied with voltage from the generator selected in the panel Bias Voltage. Upper position of the switch 3 the probe is grounded. 117

118 Nova Px. SPM Programm Table 52. s of block scheme of the instrument Show State Number of the pass which parameters are shown. States Copy Copies settings of the current pass to settings of another pass. Lock-In panel Input Input signal of the lock-in detector. Gain Gain of the lock-in detector. Harmonic Number of the harmonic to be used for detecting the signal. Most of the measurement techniques use the first harmonic for detection. Only in capacitance modes the second or the third harmonic is used. Phase Current phase shift of the detected signal. Bias Voltage panel AC Selects a generator output of which is applied to the sample or to the probe depending on the instrument configuration. DC Serves for defining the value of the constant probe-sample bias. This bias is in the range from 10 to +10 V. Probe Oscillator panel Input Serves for selecting a voltage source for the piezodrive of the probe holder. AC voltage applied to the piezodrive excites the cantilever oscillations in the modulation modes. The cantilever oscillations frequency is defined in the Freq input field of the Modulators panel for the selected generator. Block scheme of the instrument Turns on/off the laser. This function is accessible also through the Main Parameters Panel (see. p. 34 ). / / Turns on/off the option of measuring the probe-sample current. Modulators panel The Modulators panel is equipped with the built-in generators (Gen 1 and Gen 2). 118 Table that defines the following parameters of the

119 Chapter 4. Basic operations Freq Generator output frequency. Amp Generator output amplitude. The amplitude is in the range from 0 to 1 V. Phase Phase shift between the generator output and the reference signal. If used, the generator output amplitude is multiplied by 10. / / Sets frequency of the second oscillator to be equal to that of the first oscillator. Synchronizes phases of the first and the second oscillators. Ext6 panel Input Serves for selecting a generator output of which is applied to the EXTENSION socket. The EXTENSION socket connects external devices voltage supplied to the probe or to the sample. Panels FeedBack Z, FeedBack BV The FeedBack Z panel serves for defining parameters of the feedback loop on Z regulating distance from probe to sample. The FeedBack U panel serves for defining parameter of the feedback loop regulating. Input Output of the feedback loop. Value of the feedback output is displayed below the Input list. SetPoint Working point. In the course of operation, the feedback maintains the Input signal to be equal to SetPoint by varying the probe-sample distance. IScale Integral coefficient of the feedback loop. PScale Proportional coefficient of the feedback loop. DScale Differential coefficient of the feedback loop. Closes/opens the feedback loop on Z. 119

120 Nova Px. SPM Programm Signal Commutator tab The Signal Commutator (see Fig. below) serves for controlling the signals. For transmitting internal signals of the controller to an external oscilloscope or another device, the AFM card provides the following connectors: AFM9.0 card OUT_DC and OUT_AC (2 BNC connectors). AFM9.5 card OUT_AC, OA1 and OA2 (one BNC connector and two MMCX connectors). The OUT_AC connector serves to deliver alternating components of the signals (including generator outputs and DFL). The connectors OUT_DC, OA1, and OA2 serve to deliver constant components of the signals (including DFL, HV-X, sensy, etc.). Fig. 99. Signal Commutator tab Table 53. s of Signal Commutator External Outputs panel The External Outputs panel serves to deliver internal signals through the connectors of the AFM card. 120

121 Chapter 4. Basic operations OUT_DC Output for slowly varying signals (DFL, HV_X, SensY, etc.). If the Storage folder in the program installation folder contains the file named BNCOutputs.ini, the list of output signals coming to the OUT_DC connector along with their calibration parameters will be taken from this file. If this file does not exist, the program will generate it automatically for signals indicated in the file Brdsignals.ini (path...\nova Px\Devices\(instrument name)\config). The file Brdsignals.ini can be edited, if necessary. For a multi-lock-in card, a DC signal can be connected to the connector OA1 or to the connector OA2. OUT_AC Output for alternating signals. To connect a particular signal to the OUT_AC connector, select the signal in the corresponding signal list. Attention! The OUT_AC connector transmits only the alternating component of a signal! Applies the signal to the OUT_DC connector. Opens the External Outputs Settings window to adjust output parameters of the signals. External Outputs Settings window Frequency of signal sampling. For a card, a DC signal can be connected to the connector OA1 or to the connector OA2. If the AutoStartEnabled option is selected, the signal will be applied automatically to the OUT_DC connector after starting the program (the button is pressed in by default). Scale Bias Calibrations of the output signals. They are defined automatically. Filters panel The Filters panel provides digital signal filtering. Input Selects a signal to filter. Freq, Hz Limiting frequency of the filter. Commutations panel The Commutations panel provides transformation of a signal to another signal. 121

122 Nova Px. SPM Programm Input Selects a signal to transform. Soft Signal Selects a target signal of the transformation. Вкладка Filters The Filters tab (see Fig. below) provides digital filtering of all signals coming to DAC. Filtering is defined by the limiting frequency (or bandwidth) of the filter. Noise contributions of the signals decrease with lower bandwidth of the filter. However, at a certain low bandwidth parasitic oscillations can occur. Fig Filters tab To define the limiting frequency of the filter, enter a desired value in the field next to the name of the signal. If the limiting frequencies are the same for all the signals, enter a corresponding value in the To All field and click the button. FeedBacks tab The FeedBacks tab contains controls for adjusting parameters of the feedback system. The tab provides the following panels: 122

123 Chapter 4. Basic operations FeedBack_X1 panel serves to adjust parameters of the scanner X-section feedback loop. These are used for hardware-based linearization of scanner displacement along the X direction. FeedBack_Y1 panel serves to adjust parameters of the scanner Y-section feedback loop. These are used for hardware-based linearization of scanner displacement along the Y direction. FeedBack_Z1 panel serves for defining parameters of the feedback loop on Z regulating distance from probe to sample. FeedBack_U panel serves for defining parameter of the feedback loop regulating voltage supplied to the probe or to the sample. FeedBack_Freq panel serves to adjust parameters of the feedback loop that controls the oscillator output frequency. This option is used in the Atomic-Force Acoustic Microscopy. FeedBack_Amp panel serves to adjust parameters of the feedback loop that controls the oscillator output amplitude. Fig FeedBacks tab Appearance of the FeedBacks tab depends on the configuration of the instrument. 123

124 Nova Px. SPM Programm Table 54. s of FeedBacks Panels FeedBack_X1, FeedBack_Amp FeedBack_Y1, FeedBack_Z1, FeedBack_U, FeedBack_Freq, Input Output of the feedback loop. Value of the feedback output is displayed below the Input list. SetPoint Working point. In the course of operation, the feedback maintains the Input signal to be equal to SetPoint by varying the probe-sample distance. IScale Integral coefficient of the feedback loop. PScale Proportional coefficient of the feedback loop. DScale Differential coefficient of the feedback loop. Closes/opens the feedback loop on Z Displaying Videoimage The videoimage is displayed in the Camera window (see Figure below). This window opens by clicking the button in the Additional Operations panel (see p. 19 ). The videoimage is used for monitoring positions of the sample and of the probe, for visual selecting the scan area, and for adjusting the detection system. NOTE. Appearance of the Camera window depends on configuration of the hardware. Fig Camera window 124

125 Chapter 4. Basic operations The Viewing area is accompanied at its top by the panel that serves for defining displaying parameters of the image from the videomicroscope. Around the perimeter of the Viewing area, the Stepper motors panel (see p. control positioning of units equipped with stepper motors: Stage X Sample X Position panel; Stage Y Sample Y Position panel; Camera X Videomicroscope X Position panel; Camera Y Videomicroscope Y Position panel; Focus Videomicroscope Focusing panel; Zoom Videoimage Scale panel. 126 ) are located to Number of Stepper motor panels in the Camera window depends on configuration of the hardware. If this configuration allows for the procedure on adjusting the detection system in automatic mode, the top of the Camera window will be equipped with the Additional settings panel that serves for adjusting detection system by videoimage and for defining parameters of stepper motors of the instrument. Table 55. s of Additional settings panel When pressed, the sample moves to a short distance along X direction; this option facilitates focusing the videomicroscope on the sample. Stops movement of the sample started with the button. Serves for adjusting detection system by videoimage. Starts/stops automatic adjusting the photodiode position. Serves for moving the laser of the detection system. Moving the laser of the detection system 1. In the videoimage (see Figure above) select a point where the laser beam will be relocated. 2. Click on that point with the <Shift> key being pressed. This will display a cross-hair at the position of the mouse pointer. 3. Click the selected point. button.this will move the laser beam to the 125

126 Nova Px. SPM Programm Opens the MoverAxisSettingsForm window (see p. of stepper motors are defined. 128 ) where parameters Table 56. Content of panel Starts recording the image in a file of *.avi extension socket. By default, the file will be saved in the D a t a subfolder of the program folder. Stops recording the image. Displays the image from the selected video camera. Captures a video frame and saves it with additional elements in a file of EXTENSION socket *.bmp. By default, the file will be saved in the Data sub folder of the program folder. Overlaps a ready AFM image over the current videoimage. Ruler Tool. Provides length measurements between objects in the image. Displays/hides a marker on the image. If the focusing procedure is automated, runs automatic focusing on the cantilever. Turns on viewing grid lines. Opens the Filters window to adjust filters of he inverted images. Saves the current image displayed in the Image Analysis window. Opens the Settings window to adjust parameters of saving images. Turns on/off the LED that illuminates the sample surface. In some instrument configurations, this button is disabled Positioning Instrument Units For positioning units of the instrument, Stepper motors panels are provided (see Figure below). Stepper motors panel (see Figure below) are constituents of windows Aiming Movers (see p. and Camera (see p. 124 ) )

127 Chapter 4. Basic operations Fig Camera window with panels of stepper motors NOTE. Number of Stepper motors panels depends on the hardware configuration. Fig Panel of a stepper motor A panel of stepper motors is named by the unit that is positioned with those motors. Clicking the button starts movement of the unit either to the predefined distance (Move Size) or with the predefined speed (Rate). If a button with multiplier xn is pressed in, the actual distance (or the speed) will increase N times in value. Parameters of stepper motors are defined in the Mover Axis Settings Form window (see Figure below). The Mover Axis Settings Form window opens by clicking the window. button in the Camera 127

128 Nova Px. SPM Programm Fig Mover Axis Settings Form window The top of the Mover Axis Settings Form window is equipped with the General Parameters Motor group: 128 Motor serves for selecting an algorithm to move a unit of the instrument: Steps following clicking the button in the Stepper motors panel, the unit will move to the distance defined in the Move Size field of the Step Mode Parameters group; Rate While Pressed if the. button is pressed and hold, the unit will move with the defined in the Rate field of the Rate Mode Parameters group. following clicking the button in the Stepper motors panel, the unit will start moving with the speed defined in the Rate field of the Rate Mode Parameters group. Movement will stop after the button is clicked one more time. Enable Joystick speed if selected, a joystick can be used for repositioning units of the instrument.

129 Chapter 4. Basic operations Below the General Parameters Motor group, several tabs defining parameters of stepper motors are located. These tabs are labeled with titles that correspond to units movable with stepper motors. Layout of the tabs depends on number of stepper motors in the instrument. Table 57. Parameters of Stepper Motors Parameter Parameters group Common Parameters Name Label of stepper motor. InvertDir If selected, the unit will move in the reverse direction. IgnoreLimits If selected, the unit will continue to move ignoring signal from its limit stop. Disable Joystick If selected, the option of controlling units with a joystick is disabled. Parameters group Step Mode Parameters Move Size, steps Defines the distance (in steps of a stepper motor) to move the unit when the button is clicked. One step of a stepper motor is 0.3 µm. Move Rate, Hz Defines speed of moving the unit (in steps of a stepper motor per second) to the distance defined in the Move Size field. Scale 0, Scale 1, Scale 2, Scale 3, Scale 4 Define coefficients that will be applied to the predefined distance when a button in the Stepper motors panelis pressed (see p. 126 ). Values of the coefficients are displayed on captions of corresponding buttons (,,,, ). Parameters group Rate Mode Parameters Rate, Hz Defines speed of moving the unit (in steps of a stepper motor per second) when the button in the Stepper motors panel (see p. 126 ) is pressed. Scale 0, Scale 1, Scale 2, Scale 3, Scale 4 Define coefficients that will be applied to the predefined speeds when the button in the Stepper motors panel (see p. 126 ) is pressed. Values of the coefficients are displayed on captions of corresponding buttons (,,,, ). The bottom of the Mover Axis Settings Form window (see Figure above) provides the following buttons: Copy to All copies values of the stepper motor parameters from the currently open tab to all other tabs; Apply applies modifications; Close closes the Mover Axis Settings Form window ignoring modifications. 129

130 Nova Px. SPM Programm ling Measuring Heads NOTE. The Measuring Heads panel is available in the Nova Px program only for operation with SPM SOLVER NEXT. ling measuring heads of SPM SOLVER NEXT is performed with buttons in the Measuring Heads panel of the Main window (see p. 19 ) Nova Px. This panel provides buttons to move the measuring heads to operating and housing positions and to move the protective shield up and down (see Figure below). Fig Measuring Heads panel Table 58. s of the Measuring Heads panel / / Moves the protective shield up and down. Turns on and off illumination of the measuring head. NOTE. This button is available only when the protective shield is down. Sets the in-built STM measuring head to operating position. Moves the built-in measuring head to standby positions. Moves the built-in AFM measuring head to operating position. 130

131 Chapter 4. Basic operations MultiScan Function The MultiScan function provides taking scans of sizes greater than size of the maximum scan area of the piezoscanner. The selected scan area is divided to regions of sizes not exceeding those of the maximum scan area of the piezoscanner. The elementary regions are scanned in sequence. Scan parameters of larger areas and controls of the scanning procedure are defined in the Multi Scan window (see figure below). This window opens by clicking the Main Program window. button of the Fig Multi Scan window The Multi Scan window contains: panel; Data Viewer; Scan Area Parameters panel; Data table. The array of scan areas can be defined in one of the two following ways: Using the tool. Outline the boundary of the desired array with the mouse. Click the to smaller regions sizes of which are defined in the Scanning window. If number of the regions appears non-integer, the outlined area will be enlarged properly. Add Points button. This will divide the outlined area 131

132 Nova Px. SPM Programm Using the tool. Click at the center of the desired array with the mouse. The tool allows selection of several scan regions with the maximum scan area. Size of a particular scan region is defined in the Scanning window. Division of the selected scan area to elementary scan regions is followed by displaying the Data table at the right of the window (see figure above). The Data table provides parameters of the scan regions. Every region is represented with a separate line in the Table. For repositioning a scan range, first highlight its line In the Data table by clicking on it with the mouse. This will activate that scan region in the Data Viewer and outline it in yellow. Then point the mouse to a center (marked with a cross-hair) of the active region and drag the scan region to a desired position. For repositioning the scan area as a whole, highlight all regions by clicking on the cell of the Data table. Then point the mouse to a center (marked with a cross-hair) of any of active regions and drag the scan area to a desired position panel The panel is located at the top of the window. s of the panel are described in Table below. Table 59. s of panel / Starts/stops the measurement process. Copies acquired scan data to the Image Analysis program for further processing and analysis. Removes all frames from the Data Viewer. Copies the current image of the sample surface from the Camera window to the Data Viewer of the Multi Scan window. if selected, the copied image will be stretched to cover the whole display area. Fit if selected, all the images will be saved; otherwise, the current image will be replaced with the image copied next. Add 132

133 Chapter 4. Basic operations Data Viewer Before scanning, the Data Viewer shows a copy of the sample surface image provided by the optical viewing system. In the course of scanning, images of elementary regions are replaced by acquired scans in sequence. The displaying parameters of the collected frames can be redefined in the course of scanning using controls of the Additional Adjustments panel at the bottom of the window. Fig Data Viewer The top of the Data Viewer contains the Toolbar. The bottom of the Data Viewer contains Additional Adjustment panel. Table 60. s of Toolbar Button Name Screen Shot Opens a dialog for saving the current image as a separate graphics file. Zoom In Zooming tool. With this tool activated, click at the desired position or outline a desired area with the mouse. Zoom Out Zooming out tool. When this button is clicked, magnification of the previously selected region decreases. Set max visible Area Displays an area of the sample surface with sizes equal to those of the maximum scan region defined in the function Multi Scan. Set visible Area = scan Area Sets to display the current scan region. 133

134 Nova Px. SPM Programm Button Name Mini Map Turns on viewing of the survey map. The survey map is a reduced copy of the maximum scan area that duplicates all of its marked elements. Point tool Activates selection of a separate scan area. With this tool active, hold the <Ctrl> key and click at the location of the desired separate area. Number of separate areas is not limited. Line tool Activates selection of a scan line. With this tool active, draw a straight segment along which separate scan areas will be located. SelectRect tool Activates selection of a scan rectangle. With this tool active, define with the mouse position and size of a scan area. Set anti aliasing Turns on/off smoothing of the image. Point motor tool Moves the sample. With this tool active, click at the point where the laser beam should come to. Settings Opens the Settings dialog that provides interface parameters of the Data Viewer. Table 61. s of Additional Adjustment panel Activates adjustment of transparency of collected frames. For changing transparency, enter a desired value in the text field or double-click in the field and move the slider which pops up. Activates selection of a signal from the list defined in the ScanSettings window. Activates selection of surface subtraction type in the course of scanning: None no subtraction applied; 1 Order line-by-line subtraction of an approximating curve of the first order; 2 Order line-by-line subtraction of an approximating curve of the second order; 3 Order line-by-line subtraction of an approximating curve of the third order; 4 Order line-by-line subtraction of an approximating curve of the fourth order; 134 Plane subtraction of a plane from the acquired image; Surf 2 subtraction of a surface of the second order from the acquired image.

135 Chapter 4. Basic operations Data table The Data table provides parameters of the scan regions. Every region is represented with a separate line in the Table. Table 62. s of Data table Column Ordinal number of a scan region. This number applies also to central points of the regions. X(um) X coordinate of the scan region central point. Value is given in µm. Y(um) Y coordinate of the scan region central point. Value is given in µm. PreScript Name of a script to execute before moving the XY positioning system to the active scan region. PostScript Name of a script to execute after completing displacement of the XY positioning system to the active scan region. On Selecting scan regions. Regions marked in checkboxes will be scanned in sequence after starting the scanning procedure by clicking the Run button. The Data Viewer outlines active scan regions in blue. Inactive (not checked) regions will be skipped in the scanning procedure. They are outlined in gray in the Data Viewer. By default, all regions are activated after division of the scan area by the button Add Points). To exclude a region from the scanning procedure, deselect a corresponding option Scan Area Parameters panel The right-hand side of the window contains the Scan Area Parameters panel that provides five tabs: Coord, Custom, Params, Settings, Data. Coord tab s of the Coord tab serve to adjust parameters of scan areas. Table. 63. s of Coord tab Range Sizes of the selected scan area in X and Y directions. Values are given in µm. Scan Sizes of the scan region in X and Y directions. Values are given in µm. Size of the scan region is equals the scan area in the ScanForm window. 135

136 Nova Px. SPM Programm Overlay Defines overlays of neighboring scan regions in X and Y directions. Values are given in µm. Distance Defines distances between centers of neighboring scan regions in X and Y directions. Values are given in µm. Panorama If selected, scanning will be performed using the videocamera. The selected area will be divided to regions of sizes matching the current viewing field of the videocamera. Divides the selected scan area to elementary scan regions with predefined parameters. Clicking this button will result in the following: in the data viewing area, the scan area will be covered with a grid of elementary scan regions; in the right hand side of the window, a table with parameters of every scan region will appear. Custom tab s of the Custom tab serves to adjust parameters of measurements in individual points of the sample surface. Table 64. s of Custom tab Points Defines number of separate scan regions uniformly distributed along X direction. This parameter is available for the scan line selection tool selection tool and the scan area. Before defining the number of regions, a proper tool should be activated and a scan line or scan area is defined. Then the desired number of regions can be defined. Lines Defines number of separate scan regions uniformly distributed along Y direction. This parameter is available for the scan area selection tool. Before defining the number of regions, the scan area selection tool should be activated and a scan area is defined. Then the desired number of regions can be defined. Appends separate scan regions to the list according to defined parameters Points and Lines. Clicking this button will result in the following: in the data viewing area, the scan area will be covered with separate regions; in the right hand side of the window, a table with parameters of every scan region will appear. 136

137 Chapter 4. Basic operations Params tab s of the Params tab serve to control scripts applied for operation with the Multi Scan function. Table 65. s of Params tab Contro Script Scrip selection panel. line of a script to execute before moving the XY positioning system to the active scan region. Pre Post line of a script to execute after completing displacement of the XY positioning system to the active scan region. opens a dialog to selects a script from the list of available scripts. removes a previously selected script. Aiming If selected, the detection system will be readjusted every time before scanning of the next region starts. This option is available for SOLVER NEXT only. Resonance If selected, the resonance frequency will be readjusted every time before scanning of the next region starts. This option is available for SOLVER NEXT only. Apply Applies selected scripts. For later restarts of the program, the selected scripts will be executed automatically. Settings tab This tab provides parameters which are used to compensate for backslash of stepper motors moving the probe to the selected point and, thus, to improve accuracy of positioning the probe relative to the sample surface. The selected point is always approached from the same side starting from the distance (in terms of steps of the stepper motor) defined in the fields X and Y. If the Remove Backlash option is selected, the backslash compensation is in effect. Data tab This tab provides a table with the list of scans of all regions and the list of all collected optical images. Every image is represented as a separate frame in the Data tab. 137

138 Nova Px. SPM Programm Table 109. s of Frames Table Column Title Ordinal number. Name Name of the frame. Type Type of the frame. Priority Ordering of imaging layers (frames). This order can be redefined. ON Switches on/off displaying of the frame. If unselected, the frame will be hidden. 138

139 Chapter 4. Basic operations Measurements in Magnetic Field MagnetForm window is designed for operation with the magnetic field generator. MagnetForm window opens with the button. Fig MagnetForm window The toolbar of the oscilloscope contains the standard collection of buttons. The description of the collection is given in Item One-dimensional Data View on page 38. Table 66. s of the MagnetForm window control panel Activates components of controlling of the magnetic field generator. NOTE: The button generator is off. is inactive if the power supply of the magnetic field The text box is entered the required value either of the magnetic field or of current in the electromagnet coils. Double mouse click in the text box calls a slider that facilitates adjustment of the field magnitude. Closes the feedback loop that maintains the assigned magnitude of magnetic field. 139

140 Nova Px. SPM Programm Range List of the electromagnet operation modes. the assigned magnitude of magnetic field is obtained with the use of the feedback that maintains the electromagnet current to be of the program prescribed level, with readings from the built-in Hall sensor being employed. Cl-loop operation without the feedback being employed. In this case, the electromagnet current is assigned while the magnetic field magnitude is monitored with the oscilloscope. Op-loop is used for calibration purposes. Dependence of the magnetic field magnitude on the electromagnet current is viewed with the oscilloscope. Test mode Opens Magnet Settings dialog box where settings of the magnet are assigned. Magnet Settings dialog box Fig Magnet Settings dialog box Variety of active controls as well as values text boxes of Magnet Settings dialog box is determined by the operation mode selected in Range list. Bias(Gauss) Calibration coefficient defining bias of the calibration curve relative to zero. Scale (Gauss/A) Calibration coefficient defining slope of the calibration curve. Feed back sign Sign of the feedback. Sweep current (A) Sweep range by current. signal List of the controllable signals. When operating with the feedback open (value of the Range is op-loop), signal field provides an option to select a signal level of which is varied to obtain the desired magnitude of the magnetic field. As the controllable signal one may choose the magnetic field magnitude (Field) or current in the electromagnet coils (Current). View signal Signal viewed on the oscilloscope. Hall correction Correction coefficient of the Hall sensor. OK Saves modifications and closes the dialog box. Cancel Closes the dialog box with all modifications being ignored. 140

141 Chapter 4. Basic operations Heating Thermo window serves to control heating the sample when the heating stage is used (see Figure below). The Thermo window opens by clicking the button. Fig Thermo window The Thermo window contains the following panels: - panel (see p. 142 ); - Adjusting parameters panel (see p. - Temperature Viewer (see p ); ). Temperature Viewer serves for displaying temperature of the sample as a function of time. The Viewer is equipped with a standard Toolbar of the 1D Data Viewer (see p. 37 ). Appearance of the panel depends on the thermal device being selected. The name of the thermal device is displayed at the left top of the panel. 141

142 Nova Px. SPM Programm Table. 67. Content of control panel Setpoint Defines the working temperature of the sample. This figure is the target for the feedback system. Runs heating the sample. T1 Current value of temperature of the sample. Power Current level of power of the thermo device. Auto Align If selected, scale of the Y axis is automatically adjusted to match the temperature plot to the oscilloscope area. View Selects appearance of the Thermo: Compact show the panel only; Standard show the panel and the software oscilloscope; Details show the panel, the software oscilloscope, and the Adjusting parameters panel. ATTENTION! The coefficients P, I, D are not recommended to change by those who are not sure of their expertise. Table. 68. Content of Adjusting parameters panel Device Selects a model of the heating stage. Algorithm Selects a rule to reach the prescribed sample temperature: P 142 Linear - by a linear law; Parabolic - by a quadratic law; PID only - by coefficients of the feedback loop. Proportional coefficient of the feedback loop.

143 Chapter 4. Basic operations I Integral coefficient of the feedback loop. D Differential coefficient of the feedback loop. Time Time (in seconds) for heating the sample to the prescribed temperature. The heating stage is assumed to provide sufficient power. Setpoint The working temperature. Trap Defines power supplied to water vapor traps. This option is available for the MP6LCNTF liquid cell only. Enabled Starts/stops heating the sample (duplicates the button). 143

144 Nova Px. SPM Programm ElectroChemistry Window ElectroChemistry window is employed in operations with electrochemical cells. The window with the button opens. Fig ElectroChemistry window Panel Switching of the bipotentiostat on/off. Off the bipotentiostat is off; On the bipotentiostat is on. Turning the bipotentiostat on is followed by loading of the bipotentiostat calibration parameters from BiPot.cfc file. Potentiostat / Galvanostat 144 Switches modes of the bipotentiostat operation. Two states are available: Potentiostat / Galvanostat.

145 Chapter 4. Basic operations Options of the bipotentiostat operation: Cell with a real cell; 0.5 ko, 20 ko, 1 MO with one of three equivalent resistors. Equivalent resistors are used at calibration of the bipotentiostat or at operation with an equivalent of solution. Smpl OFF / Smpl ON Applying potential to the sample: Smpl ON the sample can be applied to potential; Smpl OFF applying potential to the sample is impossible. Measurement range of the working current. Tip ON / Tip OFF Applying potential to the probe: Tip ON the probe can be applied to potential; Tip OFF applying potential to the probe is impossible. Frequency of potentials digitizing. FB save If checked, the feedback gets broken but Z position of the scanner remains the same. The scanner stays at the position it was before transition to the mode FB save. Load of bipotentiostat calibration parameters. Clicking the button opens the dialog box for locating and loading of a required file. Opens Bi Potentiostat Calibration dialog box that assists to calibrate the bipotentiostat. Prg. Handing panel of programmable operations. Start the program loaded to the bipotentiostat. Run Loaded Program Stop Program Stop running the program Increment the total of executed steps in the cycle by one Increase Cycling Step Decrement the total of executed steps in the cycle by one Decrease Cycling Step 145

146 Nova Px. SPM Programm Stop Cycling Stop the cycle Next Program Step Go to the next step of the program. Steady State Potentials assignment panel. Smpl E Potential applied to the sample. Tip E Potential applied to the probe. Sets potential values assigned in the fields Smpl E and Tip E as working. by click If checked, newly assigned values of the potentials Smpl E and Tip E are employed only after pressing the button. Predefined values Adjustment panel of the potentials alteration step. The text boxes are assigned to the alteration step of the potentials being set on Steady state panel. Apply value By pressing the button, value to the left from it is assigned to a corresponding potential in Steady State panel. Increase value Decrease value By pressing buttons, value of Smpl E (or Tip E) in Steady State panel changes (incremented with or decremented with ) by amount given in a corresponding text box. Cell E / Tip E Selection of an object, potential of which is to be changed with pressing buttons,. Cell E change the sample potential. Tip E change the probe potential. Measured values Measured quantities view panel Smpl E The sample potential. Smpl I Current running through the sample. Tip E The probe potential. Tip I Current running through the probe. 146

147 Chapter 4. Basic operations Bi Potentiostat Calibration Dialog Box Bi Potentiostat Calibration dialog opens with the button box is designed for bipotentiostat calibration. The dialog box. Fig Bi Potentiostat Calibration dialog box In the course of calibration, the calibrated parameters are selected from the opening list at the top of the dialog box. Calibration of each of the parameters is supported with viewing of commutation of the preamplifier and the voltmeter required for calibration. Actual values of the calibrated parameters are typed in the text box. Table 69. s of Bi Potentiostat Calibration dialog box List of the calibrated parameters. Text box of viewing of the potential level to be applied from the bipotentiostat to a particular object, e.g. to the sample. In the calibration mode, this field is entered with an actual potential value taken with the voltmeter instead of the viewed value. NOTE: Voltmeter readings can be typed regardless of their sign. START Go to the next step of calibration. Break Interrupt the command of the current calibration step. Save Saving the bipotentiostat calibration parameters as a particular file of extension *.cfc. Clicking this button calls a dialog box to specify the path and the name of the file. Load Loading the bipotentiostat calibration parameters from a file of extension *.cfc. Clicking the button calls a dialog box to specify the required file. NOTE: When operating with the bipotentiostat, the file Bipot.cfc is loaded by default. 147

148 Nova Px. SPM Programm Cycling Tab Cycling tab is designed for setting of parameters of cycling of the potential applied to the probe or to the sample. Fig Cycling tab In cycling mode, the sample/probe is applied to voltage cyclically altering first in the range from Cycle From to Cycle To, and then in the range from Cycle To to Cycle From. Table 70. s of Cycling tab Cycle From Initial value of the cycled potential in mv. Cycle To Limiting value of the cycled potential in mv. Cycle Rate Rate of potential cycling in mv/sec. List of objects for cycling potential: No Cycling no cycling applied; Cycling on Smpl Cycling on Tip cycling is applied to the sample potential; cycling is applied to the probe potential. Starts cycling. Stops cycling. 148

149 Chapter 4. Basic operations Program Tab Program tab is designed for programming of series of alterations of the current or the potential. Fig Program tab A program consists of units called "steps". Each step is a sequence of two substeps. Programming means definition of the total of distinct steps and of parameters of particular substeps. There is an option for one or several consequent steps to get cycled. Table 71. s of Program tab Dascription Step Number Ordinal of a program step. Maximum total of steps is 10. Each step consists of two substeps with parameters being defined in the Step Parameters panel. Preview Program On Graph Preview of the programmed alterations. Clicking the button results in viewing the graph of current/potential alteration in the Graph tab Load Program To Bipotentiostat Step Parameters Load the program to the bipotentiostat. Panel of program steps parameters. Each step as assigned with a particular set of parameters. Val 1 Value of the current/voltage on completion of the first substep of a particular step. dval 1 Increment of the Val 1 parameter for one period if the total of periods Repeat Count is greater than one. Speed1 Initial speed. Val 2 Value of the current/voltage on completion of the second substep of a particular step. dval 2 Increment of the parameter Val 2 for one period if the total of periods Repeat Count is greater than one. 149

150 Nova Px. SPM Programm Dascription Speed2 Final speed. T1 Execution time of the first substep of a particular step. dt 1 Increment of the parameter T1 for one period if the total of periods Repeat Count is greater than one. T2 Execution time of the second substep of a particular step. dt 2 Increment of the parameter T2 for one period if the total of periods Repeat Count is greater than one. Repeat Count Total of consecutive repetitions (periods) of a particular step of the program. Smpl On/Off Suppress/release application of potential to the sample: Smpl ON the sample can be applied to potential Smpl OFF application of potential Sweep / Steady to the voltage is impossible. List of modes of current/potential alteration: current/potential is maintained constant at its initial level for the execution time of a particular step of the program. On completion of this step, the level of current potential is stepwise set to a value assigned for the next step of the program; Steady Sweep current/potential alters linearly from its initial to the final value for the execution time of a particular step of the program Potentiostat / Galvanostat Mode of the bipotentiostat operation: Potentiostat measuring potential; Galvanostat measuring current. Band Frequency of potentials digitizing. NRI Maximum level of current through the sample/probe (in absolute value). Program Parameters Program execution parameters panel. Start Value Initial value of current/potential. Steps Count Total of program steps to execute. Repeat Count Repetition count of a particular cycle. Smpl On/Off After End Suppress/release application of potential to the sample on completion of the program: the sample can be applied to potential on completion of the program; Smpl Off After End application of potential to the voltage is impossible on completion of the program. Smpl On After End Cycling Params 150 Cycling parameters panel of steps in the program.

151 Chapter 4. Basic operations Dascription First Step Ordinal of the first step in the cycle. Last Step Ordinal of the last step in the cycle. Repeat Count Repetitions count. Example Let s consider an example of a program of cycling alteration of the sample potential on the following rule: the sample potential grows from 110 mv to +110 mv for 7 sec and then lowers down to 110 mv for 3 sec. The cycle is repeated three times. This sequence can be programmed by one step. 1. First define parameters of the potential alteration for one cycle. Assign the following values: Step Number = 1; Start Value = -110; Val 1 = 110; Val 2 = -110; T 1 = 7; T 2 = 3; Mode of the potential alteration Sweep. Fig Clicking the button results in displaying the graph of the potential alteration in Graph. 151

152 Nova Px. SPM Programm Fig Define the count of the cycle repetitions: Repeat Count = 3. The potential changes to the shape shown in Figure below: Fig Consider the previous example suggesting that potential peaks decrease by 30 mv at every subsequent cycle. dval 1 = 30. Fig

153 Chapter 4. Basic operations Fig Graph Tab Fig Graph tab The toolbar of the oscilloscope contains the standard collection of buttons of one-dimensional data view panel. 153

154 Nova Px. SPM Programm Table 72. s of oscilloscope List of relations to view: Smpl E(T) relation of the sample potential to time; Smpl I(T) relation of current through the sample to time; Tip E(T) relation of the probe potential to time; Tip I(T) relation of current through the probe to time; Smpl I(E) relation of current through the sample to the sample potential; Tip I(E) relation of current through the probe to the probe potential. Opens Graph Settings dialog box. Graph Settings box provides selection of a file for recording of the measurement history or of a data file for loading. As well, parameters of viewing of the measurement history in a loaded data file are defined in this box. Starts the oscilloscope. Stops the oscilloscope. File Position Initial point of viewing of the measurement history. Show Show the measurement history starting at the point defined in File Position field. Graph Settings dialog box Graph Settings dialog box is designed for setting of parameters for recording and viewing of the data obtained. Fig Graph Settings dialog box 154