FRAUNHOFER RESEARCH INSTITUTION FOR ORGANICS, MATERIALS AND ELECTRONIC DEVICES COMEDD

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1 FRAUNHOFER RESEARCH INSTITUTION FOR ORGANICS, MATERIALS AND ELECTRONIC DEVICES COMEDD

MILESTONES 1999 Start of research and development operation at the Dresden part of Fraunhofer IMS We thank all of our industrial partners, the Federal German

2002 Installation of the worldwide first vertical OLED InLine deposition system Prof. Dr.

backplane 2008 Opening of COMEDD Installation of a OLED roll-to-roll process line First monochrome bi-directional QVGA OLED microdisplay 2009 First OLED panel from Gen2

2 MILESTONES 1999 Start of research and development operation at the Dresden part of Fraunhofer IMS We thank all of our industrial partners, the Federal German Government, the European Community and the free State of Saxony for the continued strong support Installation of the worldwide first vertical OLED InLine deposition system Prof. Dr. Karl Leo, Director 2003 Foundation of Fraunhofer IPMS 2004 Start of first OLED lighting project OLLA 2007 First monochrome bi-directional OLED microdisplay on CMOS backplane 2008 Opening of COMEDD Installation of a OLED roll-to-roll process line First monochrome bi-directional QVGA OLED microdisplay 2009 First OLED panel from Gen2 line First VGA full colour OLED microdisplays 2011 COMEDD is an independent branch of Fraunhofer IPMS First lighting devices from the roll-to-roll process line First full colour XGA OLED microdisplays First full colour bi-directional VGA OLED microdisplay 2012 Foundation of Fraunhofer COMEDD as an independent research institution 1

FRAUNHOFER RESEARCH INSTITUTION FOR ORGANICS, MATERIALS AND ELECTRONIC DEVICES COMEDD Fraunhofer COMEDD combines research and development activities for the technology, integration and production of

The mission of Fraunhofer COMEDD is research geared specifically toward customer applications, the development and pilot production of unique device concepts, as well as production methods for vacuum

3 FRAUNHOFER RESEARCH INSTITUTION FOR ORGANICS, MATERIALS AND ELECTRONIC DEVICES COMEDD Fraunhofer COMEDD combines research and development activities for the technology, integration and production of organic electronic devices. The mission of Fraunhofer COMEDD is research geared specifically toward customer applications, the development and pilot production of unique device concepts, as well as production methods for vacuum deposited organic materials. The goal of the center is, specifically, the creation of a production-oriented and pan-european leading research and development center for organic semiconductors, focusing on organic light-emitting diodes and vacuum technology. These activities are supported by the Fraunhofer-Gesellschaft, the Free-State of Saxony, the Federal Government of Germany, as well as by the EU, with additional investments of 25 million Euros for its infrastructure. SERVICES AT A GLANCE Consulting services Market studies Trainings Feasibility tests Simulations Device and system development Material tests Complete process development Prototypes and demonstrators Characterization & Test Pilot-Fabrication The Fraunhofer COMEDD clean room facilities consist of the following equipment: a pilot line for the fabrication of OLEDs on 370 x 470 mm² substrates, two pilot lines for 200 mm wafer for the OLED integration on CMOS substrates as well as a research line for the roll-to-roll fabrication on flexible substrates. Fraunhofer COMEDD offers a wide range of research, development and pilot production possibilities, especially for OLED lighting, organic solar cells and OLED microdisplays. 2

4 COMEDD IN FIGURES 8 Budget in mln euros 80 Employees

5 FACTS AND FIGURES MEMBERSHIP / NETWORKING Plastic Electronics Foundation European Technology Platform Photonics for the 21st Century SPIN-OFF ISO 9001 CERTIFICATION 4

OLED LIGHTING AND ORGANIC PHOTOVOLTAICS OLED ON RIGID AND FLEXIBLE SUBSTRATES Technology Process development Litho-free substrate patterning Material

Pilot line Gen2 (370 x 470 mm²) Roll-to-Roll line (300 mm width) System design Components TABOLA OLED light tablets Large area lighting panels (up to

6 OLED LIGHTING AND ORGANIC PHOTOVOLTAICS OLED ON RIGID AND FLEXIBLE SUBSTRATES Technology Process development Litho-free substrate patterning Material evaluation, stack integration OLED/OSC processing (including OVPD) Encapsulation Characterization R2R technology for SM-OLED and OSC Fabrication lines Pilot line Gen2 (370 x 470 mm²) Roll-to-Roll line (300 mm width) System design Components TABOLA OLED light tablets Large area lighting panels (up to 33 x 33 cm²) Transparent OLED and organic solar cells (OSC) and modules Flexible OLED and OSC Applications Area lighting solutions Signage Customized OLED 5

OLED MICRO- DISPLAYS AND SENSORS OLED-ON-CMOS Technology Process development (small molecules and polymers) CMOS/OLED interface definition Encapsulation including wafer-level color filter

patterned light source and CMOS photodetectors CMOS backplane IC design (CMOS processes (0.

7 OLED MICRO- DISPLAYS AND SENSORS OLED-ON-CMOS Technology Process development (small molecules and polymers) CMOS/OLED interface definition Encapsulation including wafer-level color filter integration Pilot line OLED-on-CMOS (8 Si wafer) Pilot line PLED-on-CMOS (8 Si wafer) Components OLED microdisplays (QVGA, VGA, XGA) Bi-directional OLED microdisplays OLED as CMOS-embedded patterned light source and CMOS photodetectors CMOS backplane IC design (CMOS processes ( um) System design (electronics, optics) Device characterization Applications See-through head-mounted displays (ST-HMD) Interactive ST-HMD (embedded eye-tracking/gaze-control) Electronic view-finder (EVF) Optical inspection Optical sensors (fluorescence, flowmetry, color) Autostereoscopic 3D displays 6

TEST AND CHARACTERIZATION Photometric characterization 1m-integrating sphere measurements (luminous flux, spectra and related parameters) Near field goniometer

characterization Transmission and reflection spectroscopy Ellipsometry Photoluminescence spectroscopy Thin film modelling for analysis of spectroscopic data General

8 TEST AND CHARACTERIZATION Photometric characterization 1m-integrating sphere measurements (luminous flux, spectra and related parameters) Near field goniometer measurements (angular dependent luminance, spectra and related parameters) Calibrated CCD camera measurements (spacial luminance distribution) Spectroscopic thin film characterization Transmission and reflection spectroscopy Ellipsometry Photoluminescence spectroscopy Thin film modelling for analysis of spectroscopic data General device characterization Lifetime and reliability testing of OLED modules IR imaging for thermal characterization and failure analysis Climatic chamber testing Solar cell test system 7

9 EQUIPMENT Pilot line OLED on rigid substrates substrates 370 x 470 mm² Laser ablation Ultrasonic pre-clean system Double-sided single-panel cleaning processor Automatic screen and stencil printer Thermal treatment Deposition by thermal evaporation Deposition by OVPD Encapsulation system Pretest Scriber Glass encapsulation (Inline) Scriber OLSB 4 - Structuring (Screen cleaner) Lamination Pilot line OLED on CMOS wafer 150 mm and 200 mm Structuring Cleaning / Etching Clean oven Deposition by thermal evaporation Semi-automated wafer bonding system Glass encapsulation Vacuum drying oven PLED Production Line OLED on CMOS wafer 200 mm Etching / Sputtering Spin coating Nitrogen oven Etching, deposition by thermal evaporation and Barix thinfilm encapsulation Full-automated wafer bonding system Wafer prober Microscopes Ellipsometer Research line Roll-to-Roll metal strips and polymer webs 300 mm Prototype line / Further systems Measurement / Characterization Deposition by thermal evaporation and sputter magnetron Rewinding unit with integrated R2R inspection system Coating and lamination unit under inert atmosphere Material test deposition system Vertical inline deposition system Auto drive stencil printer Modular vacuum sublimation unit Climatic chamber Various gloveboxes Integrating sphere (d = 1 m) with spectrometer Near-field goniometer with spectrometer Luminance camera Spectrophotometer (transmission, reflection) Spectrofluorometer Ellipsometer IR camera OLED life time test system Solar cell test system Profilometer Optical microscopes 3D Micromac UCM-4 UCM SSEC MODEL 3402 SSEC X4 Prof EKRA Carbolite Sunicel 400 plus Sunic System Aixtron Vision Technology MRB Automation AI PO LI GLT MP500A Scriber MDI Schott Kolb SDL 50 Fetzel Mechatronic Wet bench Arias, Semitool Digestorium Köttermann Washing Machine Miele CLO2AH Koyo Thermo Systems Sunicel 200 plus Sunic System EVG510 and IQ-ALIGNER 200 TN EVG Sunic / GLT Binder Clustex 200 Leybold Optics EVG120 EVG MB-OV MBraun Helisys ANS Korea Hercules EVG Pegasus PA200 Wentworth Eclipse L200 Nikon M-2000U J. A. Woollam RC300MB vacuum coater Von Ardenne Spanntec and ISRA Vision Coatema and GS Glovebox BESTEC VES400/13 Applied Materials S70 Mechatronic Engineering DSU-1.0 CreaPhys Vötsch MBraun CAS 140B Instrument Systems DMS 401 Autronic Melchers PR 905 Photo Research SolidSpec 3700 Shimadzu FluoroMax 4 Horiba Yobin Yvon M-2000U J. A. Woollam Variotherm Head II Infratest Botest Aescusoft Alphastep IQ KLA Tencor Eclipse L200 & L300 Nikon

range (sensors) New applications Lighting and OPV White Flexible OLED on polymer foils in roll-to-roll Cavity free

10 OUTLOOK OLED on CMOS Smart microdisplays (e.g., embedded eye-tracking) Cost-efficient manufacturing techniques Novel color generation approaches Extended temperature range (sensors) New applications Lighting and OPV White Flexible OLED on polymer foils in roll-to-roll Cavity free encapsulation Seamless tiling, back side contact Novel outcoupling concepts Multi color/color variable OLED Hybrid Processing (wet/vacuum) Next generation transparent conducting layer (ITO replacement) 9

11 CONTACT INES SCHEDWILL Tel. +49 (0) 3 51 / Fax +49 (0) 3 51 / info@comedd.fraunhofer.de Berlin Bautzen Dreieck Dresden-Nord Airport Dr.-Grenzstr. Hoyerswerda Grenzstr. Exit Dr.-Flughafen Flughafen Hermann-Reichelt-Str. 80 H H 80 Dörnichtweg Maria-Reiche-Str. H 7 Radeberg Boltenhagener Str. Chemnitz Leipzig Moritzburger Weg Karl-Marx-Str. Königsbrücker Landstr. 80 H Dr.-Klotzsche Exit Dr.-Hellerau 10

12 Fraunhofer Research Institution for Organics, Materials and Electronic Devices COMEDD, Dresden 2012 COPYRIGHTS All rights reserved. Reproduction requires the permission of the Director of the Institute. LAYOUT Fraunhofer COMEDD PRINT Lößnitz-Druck GmbH Radebeul Printed on recycled paper PHOTOS Fraunhofer-Gesellschaft; Photographie Jürgen Lösel; René Gaens Fotografie

center for organic materials and electronic devices dresden

F R A U N H O F E R I N S T I T U T e F o R P h o t o n i c M i c r o S y s t e m s I P M S center for organic materials and electronic devices dresden p r e f a c e Dr. Christian May Head of Business