Entwicklungen der Mikrosystemtechnik. in Chemnitz

Transcription

1 Entwicklungen der Mikrosystemtechnik Gliederung: in Chemnitz Fraunhofer Institut für f r Zuverlässigkeit und Mikrointegration IZM Institutsteil Multi Device Integration, Chemnitz, Thomas Gessner jan.mehner@che.izm.fhg.de Mikromechanische Komponenten für Sensor- Aktorsysteme Modellierung and Simulation von Mikrostrukturen Zukünftige Arbeiten am Zentrum für Mikrotechnologien

2 Bulk-Si Micromachined Accelerometer Digital balanced accelerometer:

3 Damping Analyses for Design Optimization Schematic view: Kinetic element: Fluid pressure: Goal: Large bandwidth Optimized design Initial design Initial design Optimized design

4 Tuning fork design: Angular Rate Sensor (Gyroscope( Gyroscope) F C = 2 m v Ω

5 Behavioral Modeling of a Gyroscope DRS-MM2 Bosch GmbH

6 Behavioral Modeling of a Gyroscope Mechanical system Given angular rate Structural motion Electrostatic actuation Stimulating voltage Electrostatic detection Measured angular rate

7 Micromirror Cells for Laser Display Systems Future goal: Laser TV systems

8 Micromirror Cells for Laser Display Systems 1. Eigenmode: 4600 Hz 4. Eigenmode: 24.2 khz

9 Behavioral Modeling of Micromirror Cells Material stress: Fluid pressure: Vertical bending:

10 Micro Mirrors for Head Up Displays in Automobiles Image projection by laser display technology: Optical Engine Scanning Unit (2-axis) Laser red rot Laser IR Laser blau blue RGB Video- Controller NLO Column Line Scancontroller Projection image

11 A 24 khz Resonant Scanner for Head Up Displays Analysis of mechanical system

12 Vibration Sensors for Wear State Monitoring Advantages: Direct mechanical filtering of vibration signals No data sampling and FFT necessary Improved signal to noise ratio due to resonance Wide-band sensor Resonant sensor

13 Novel Concepts for Vibration Monitoring Idea: Make use of spectral filtering in the mechanical domain!

14 Resonant Vibration Measurement Unit

15 Smart System Integration of Safety Applications Vibration Sensor Technology GPS - Location Power supply by environmental sources (e.g. vibrations) Vibration monitoring of wheel sets Critical wear state situations are automatically detected by the sensor system and routed to the central checkpoint Wear state monitoring (Identification, Time, Location) Intelligent and energyself-sufficient sensor system

16 Microelectromechanical Step Gear System

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18 Challenges of Microsystems Design

19 Lumped Parameter Modeling of MEMS Transversal shift 1. Approach: Represent the system by simplified black-box models

20 Numerical Simulation of Coupled Systems 2. Approach: Simulator Coupling of FE-Solver and Circuit Simulators

21 Macromodeling The Ultimate Goal of MEMS Design Structural V 1 Rotation Electrostatic V 2 V 3 Translation Warp Fluidic = Black-box model with peripheral terminals; Required size: x 10 DOF x DOF!!!? How to compress DOF and formulate a low-size macromodel, retaining FEA typical accuracy in its dynamic behavior?

22 Reduced Order Modeling of Flexible Systems - Electrostatic Structural Interactions -

23 System Simulation of MEMS in Matlab/Simulink

24 Circuit Design Using Macromodels in PSPICE

25 Future Goal: Development of Parametric Models Variational Finite Element Techniques: