GENCOA Key Company Facts. GENCOA is a private limited company (Ltd) Founded 1995 by Dr Dermot Monaghan. Located in Liverpool, UK

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2 GENCOA Key Company Facts GENCOA is a private limited company (Ltd) Founded 1995 by Dr Dermot Monaghan Located in Liverpool, UK Employs 34 people 6 design (Pro E 3D CAD) 4 process development & simulation 14 assembly & test 4 sales & tech support (2 Asia based) 3 administration & accounts 3 hardware & software (Speedflo) > 3000 magnetrons supported in the field > 600 speedflo systems supported in the field

3 GENCOA products cover 3 sputtering related areas Magnetron Sputter Cathodes planar & rotatable Reactive gas controller & endpoint detector Linear ion sources Other activities include on-site process implementation, training and tuning

4 GENCOA Key Company Advantages GENCOA provide process solutions by supplying components and know-how that exceeds your expectations: 8 types of magnetic systems for rotatable magnetrons 10 types of planar magnetic designs On-site process implementation Unique PDF+ algorithm for reactive gas process control In-situ and ex-situ* PEM, lambda sensor, target voltage Key IPR covering dual rotatable magnetrons and magnetic anode assisted rotatable processes.

5 GENCOA worldwide company presence Sales agents / distributors located around the world and 95% of output is exported from the UK Main markets are USA, EU, Japan, Taiwan, Korea & China Local Gencoa based staff for technical support in USA, EU & Asia

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7 GENCOA have developed an inverted magnetron type linear ion source to provide the best process solution combined with highly robust components: Key Advantages Optimized magnetic fields to produce a collimated plasma beam at standard sputtering pressures. Graphite anode and cathode to protect the substrate from contamination and provide long-life components. RF standard electrical insulation on all ion sources. In-direct cooling of anode and cathode quick switching of parts. Easy switching of cathode parts to provide multiple magnetic traps for lower voltage operation, or a focused beam. Voltage regulated power supply with gas adjustment feedback to maintain same current at all times.

8 Concept of operation based upon space plasma thruster devices A plasma jet is generated by the combined closed magnetic trap, high voltage between anode and cathode, and correct pressure gas flow through the magnetic trap. Vacuum side (P~10-4 Torr) Cathode B Cathode + V Anode Gas injected (P~ 10-2 Torr)

9 Energy of the ions are an average of the discharge voltage / 2 Ion Gun No. of ions ~ e.(v A /2) Energy, ev e.v A (V A =Anode Voltage)

10 Various power modes are possible, but DC is standard Power Modes Anode Voltage, V Time, a.u. DC DC-Pulsed semi-ac

11 Typically the sources operate at upt0 1 Amp per meter length and at upto 100 sccm per meter length Operation range for the IM source kv Normal operation area Extended operation area Low energy area Gas consumption: ~ 100 sccm argon per metre length ma/metre

12 External mounting im300 with carbon cathode

13 Internal mounting im400 with metal cathode and cantilever mounting

14 Internal mounting im600 with carbon cathode and end support mounting

15 Internal mounting im800 with metal cathode and end support mounting

16 Internal mounting im800 with carbon cathode and rear support mounting

17 Internal mounting im950 with metal cathode and end support mounting

18 Internal mounting im1000 with carbon cathode and end support mounting

19 External mounting im1500 with carbon cathode

20 Adaptors available to convert to existing port designs MRC / KDF shown

21 Standard straight beam arrangement

22 Standard straight beam arrangement im1500 External

23 External mounting im500 with optional focused beam arrangement

24 Typical operating parameters im800 Anode Voltage, kv IM800 - Ion Source - Anode Voltage vs Current # graphite on Ar: 13.4 sccm Ar: 27.8 sccm Ar: 41.4 sccm Ar: 48.4 sccm Ar: 55.6 sccm Ion Source current, ma

25 Typical operating parameters im400 IM400 V vs I plot for Ar flow rate (%) Anode Voltage, kv sccm 21 sccm 28 sccm 34.7 sccm 41 sccm 48.5 sccm Ion Source current, ma

26 Typical etch rates for different materials Polymer etch rates: Gas: O2 IM400: 200 ma +1.5 kv Substrate in rotation at equivalent 600mm/min linear speed (80 passes) Example of polymer: silicone Etching rate ~ 20 A/pass Example of polymer: acrylic Etching rate ~ 38 A/pass Example of metal Ti: Etching rates: A/pass ( kv) Oxide etch rates: Gas Ar IM600, 300 ma +1.6 kv Example of oxide: SiOx Etching rate: 5 nm/min static (over 8 mm diameter substrate, total time 23 mins)

27 Plasma surface treatment Comparison of wetability of untreated and treated PET film 1 pass.

28 Robust mechanical design, easy to access and connect

29 Long operating lifetime, very easy to service and maintain No water or vacuum seal broken during anode / cathode change, typically 2 hours for full conversion from straight beam to focused beam mode.

30 Gencoa provide a unique customer built power supply that automatically regulates the gas flow for ease of operation Output voltage Up to 2500V ( 3000V ignition voltage ) Output current V, short circuit 2.5A Output Power 2000V Output polarity Positive Regulation Mode Current 0-2.5A Output connector Fischer, type 105, 10kV rating for RG213 coax cable Mains input 3x400Vac +/- 10% 50Hz ( L1,L2,L3 PE) Dimensions Standard Rack 19 4U=177mm High Weight 12kg Cooling Forced air cooling Working temperature C

31 Schematic of the ion source with power supply and automatic gas regulation Removes beam variation I & V regulated Chamber IM BDS-VT Power Cable MFC cable (for MKS's MFC), D9- D15 Shielded GENCOA I M Power Supply MKS MFC Pump Gas MFC Spec: MKS 1179A Db15 ±15V

32 Schematic of the ion source with power supply and automatic gas regulation Of more than 1 gas type needs speedflo mini Gas 1 MKS MFC1 Chamber GENCOA I M Gas 2 MKS MFC2 Pump Gas Line Speedflo Cable High Power Cable Gas 3 MKS MFC3 IM BDS-VT Voltage feedthru cable Speedflo IM Voltage Feedback (0-10V)

33 IM600 at 300mA - gas Ar - Example of voltage tracking feature via auto control of gas

34 Any length of plasma beam is available and a variety of mounting options Thank you for your attention