THE NEXT LEVEL IN ARCHITECTURAL GLASS COATING ADVANCED EQUIPMENT & PROCESS EXPERTISE ADVANCED EQUIPMENT & PROCESS EXPERTISE

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1 THE NEXT LEVEL IN ARCHITECTURAL GLASS COATING ADVANCED EQUIPMENT & PROCESS EXPERTISE THE NEXT LEVEL IN ARCHITECTURAL GLASS COATING ADVANCED EQUIPMENT & PROCESS EXPERTISE

2 ARCHITECTURAL GLASS COATING REACHES THE NEXT LEVEL VON ARDENNE is a leading manufacturer of architectural glass coating systems. We supply these most advanced systems to major glass manufacturers all over the world. They feature VON ARDENNE magnetrons - the key components of our equipment. We fit our GC330H and GC254H modular glass coating systems with the configuration and layer system that suit the customer s individual requirements. Coated architectural glass drastically reduces energy consumption and therefore helps to protect the environment. TECHNICAL DATA Subject to change without notice due to technical improvement.! TECHNOLOGY IMPROVEMENTS EXCELLENT COATING UNIFORMITY optimized magnetic fields TECHNOLOGY SUPPORT > 25 years of process experience ADVANCED PROCESS STABILIZATION & HIGH RATE VAprocos2 FAST PROCESS TUNING trimming & shimming software TRIPLE LOW-E WITH EXCELLENT COATING UNIFORMITY EASY UNIFORMITY CONTROL integration of adjustable magnet systems TECHNOLOGY IMPROVEMENTS VON ARDENNE found answers to the increasing demands of the industry through the optimization of the magnetic fields and the process gas delivery system, benefiting from a long history of designing a machine platform with an excellent plasma process stability. Uniformity requirements of ± 0.8 percent are routinely met by our glass coating systems and magnetron commissioning results show layer thickness variations of even less than ± 0.5 percent. Individual layer non-uniformities can also be corrected by in-situ magnet bar adjustment. The hardware improvements are complemented by our advanced process control system VAprocos2 with up-to-date hardware components and extended control features. Furthermore, we have made our optimization software for magnetron commissioning available as a web-based trimming & shimming tool. PRODUCTIVITY IMPROVEMENTS We have also improved the productivity of our equipment. VON ARDENNE has developed and qualified a revised pumping concept that allows for a cycle time of less than 28 seconds for a standard Jumbo coating tool. GC330H Material Substrate size Jumbo (W x L) Substrate size Super Jumbo (W x L) Thickness (including unevenness) Cycle time Base pressure in sputtering chamber Utility requirements Mains connection flat glass mm x mm mm x mm 2 mm to 19 mm < 28 s 5 x 10-6 mbar between 0.5 and 5 MVA, depending on application and throughput 400 VAC, 50 Hz or 480 VAC, 60 Hz IMPROVEMENTS FOR HIGHER PRODUCTIVITY Typically, high-productivity tools require a larger footprint. Several measures can be taken to optimize or reduce the factory floor size. This is a relevant factor for investment costs both in newly built factories and in existing ones, as more magnetrons can be installed on a given footprint. GC254H Material flat glass COMPACT CONFIGURATION LONG CAMPAIGN TIME MINIMUM PROCESS FOOTPRINT ULTIMATE PRODUCTIVITY MINIMUM LOCK CHAMBER FOOTPRINT We have increased the machine flexibility so that it can be adjusted for changing market requirements in the future with continuous design improvements, such as: Substrate size (W x L) mm x mm! T-Series magnetrons long target uptime for Ag WSM 780 mm process compartment cycle times < 28 s for Jumbo glass smart and fast pumping concepts HIGH PRODUCTIVITY + SMALL FOOTPRINT = LOW COST OF OWNERSHIP Optimized process compartment size for high deposition rate without wasting unnecessary length in transport direction Simple lock/transfer chamber solutions avoiding the extra entry and exit buffer chamber by smart pumping concepts Directly pumped magnetrons eliminate separate pumping positions within the process set-up, except for gas separation Higher target lifetime, in particular for Ag, to accommodate a larger target stock in each compartment Thickness (including unevenness) Cycle time Base pressure in sputtering chamber Utility requirements Mains connection 2 mm to 19 mm < 18 s 5 x 10-6 mbar between 0.5 and 5 MVA, depending on application and throughput 400 VAC, 50 Hz or 480 VAC, 60 Hz

ARCHITECTURAL GLASS COATING SYSTEMS With our GC330H and GC254H glass coating systems, we offer equipment to produce a high-quality product portfolio of architectural glass for all global markets.

We provide our inline systems in customized configurations suitable for all common glass sizes including 100, Jumbo and Super Jumbo format.

All compartments are identical to provide for maximum flexibility.

be manufactured at high rates and a coating uniformity of ±0.8 %.

VON ARDENNE MAGNETRONS Our magnetrons are available for a wide range of applications.

applications and even magnetrons with integrated turbopumps. T-SERIES MAGNETRONS These magnetrons are independent sputtering and pumping units.

X-SERIES END BLOCKS The X-Series end block is our next generation of drop-in end blocks for architectural glass coating systems.

T-Series Magnetrons increase the coating speed, improve the layer uniformity, reduce the machine footprint and the cost of ownership and are available as upgrades and retrofits.

3 ARCHITECTURAL GLASS COATING SYSTEMS With our GC330H and GC254H glass coating systems, we offer equipment to produce a high-quality product portfolio of architectural glass for all global markets. We have delivered more than 50 of these coating systems to customers all over the world. We provide our inline systems in customized configurations suitable for all common glass sizes including 100, Jumbo and Super Jumbo format. VON ARDENNE PROCESS CHAMBERS The sputtering chamber consists of a customized number of universal compartments with a standard width of 780 mm. All compartments are identical to provide for maximum flexibility. PROVEN SPUTTERING TECHNOLOGY The technology used for glass coating on VON ARDENNE equipment is magnetron sputtering: HIGH RATES, EXCELLENT UNIFORMITY By magnetron sputtering, all required layers can be manufactured at high rates and a coating uniformity of ±0.8 %. OVER 40 YEARS OF EXPERIENCE We develop and manufacture the necessary components such as magnetron sputtering sources in-house and have more than 40 years of experience with magnetron sputtering. VON ARDENNE MAGNETRONS Our magnetrons are available for a wide range of applications. Thanks to many years of experience gained from designing and installing advanced sputtering equipment, we can offer a complete portfolio of solutions from AC to DC processes, planar to rotatable applications and even magnetrons with integrated turbopumps. T-SERIES MAGNETRONS These magnetrons are independent sputtering and pumping units. They combine state-of-the-art sputter sources and their superior coating uniformities with turbomolecular pumps and their necessary pumping speed in one component. X-SERIES END BLOCKS The X-Series end block is our next generation of drop-in end blocks for architectural glass coating systems. LOWER COST OF OWNERSHIP, EASY MAINTENANCE It meets the requirements of the coating market by reducing the cost of ownership and offering a convenient and easy maintenance model. T-Series Magnetrons increase the coating speed, improve the layer uniformity, reduce the machine footprint and the cost of ownership and are available as upgrades and retrofits. MEASURING SYSTEMS, QUALITY INSPECTION AND TRIMMING & SHIMMING SOFTWARE PROVEN LAYER STACK COMPETENCE We have more than 40 years of experience with depositing functional layers on large-area glass substrates. This experience is based on more than 50 VON ARDENNE glass coating systems installed all over the world. Furthermore, we have excellent sampling facilities and simulation software to demonstrate, develop and improve layer properties. TECHNOLOGY & APPLICATION CENTER Sample coatings, testing of new technologies and components, conducting experiments, operating testing equipment SIMULATION-DRIVEN PRODUCT DEVELOPMENT Plasma process and magnetic field simulation for excellent film growth, optical simulation for outstanding film properties POST-TREATMENT FLASH LAMP ANNEALING Flash lamp annealing improves the optical and electrical properties of coatings or surfaces without causing thermomechanical stress within the substrate. VON ARDENNE has successfully demonstrated that by using this technology for improving architectural glass coatings. Our flash lamp annealing units feature the longest tubes in the world. IN-SITU MEASUREMENT Combines the results from different coating steps within the coater and helps monitor the coating process for quality control TRIMMING & SHIMMING SOFTWARE Web-based, enables the quick optimization of the thickness uniformity of single thin layers RECORDING OF PROCESS DATA Our PROCESSDB SQL data base records the process data of coating systems 24/7 allowing fordetailed data analysis and correlations. EX-SITU MEASURING SYSTEM Quality assurance and quality monitoring for coatings on glass VAPROCOS2 PROCESS CONTROL SYSTEM Controls the reactive magnetron sputtering of compound layers SERVICE, SUPPORT & TRAINING GLOBAL CUSTOMER SERVICE In addition to our headquarters in Dresden, our subsidiaries are located in China, Malaysia, Taiwan, Japan and in the USA. They provide our customers with service and support on site. PARTS, UPGRADES & RETROFITS VON ARDENNE spare and wear parts, lifecycle extension of wear parts, technology upgrades, upgrades to reduce cycle time, retrofits with new components TECHNOLOGY SUPPORT & TRAINING Layer stack optimization, layer uniformity optimization, advanced maintenance service, layer stack competence training, maintenance training

ARCHITECTURAL GLASS COATING MILESTONES AND CONTRIBUTIONS ADVANCED LAYER SYSTEMS FOR LOW-E & SOLAR CONTROL VON ARDENNE has a long tradition in glass coating.

This institute achieved a leading position in electron beam and plasma technologies and their application in vacuum coating.

An important milestone was the first inline sputter system in 1983 for continuous coating of precious metal-free mirrors for the furniture industry.

The system was the predecessor of the equipment used for the production of heatinsulating architectural glass today. What were the other milestones?

means of coated glass. Every since the beginning of the oil crisis in 1973 and the resulting drastic price increase for fossil fuels, energy saving and efficiency have become increasingly important.

After thermal coating methods such as thermal evaporation had initially dominated in the early years, magnetron sputtering became prevalent in the 1970ies.

1974 On 14 October, a ring gap discharge was ignited in Dresden for the first time at the Institute - since then VON ARDENNE has become a leader in magnetron technology.

We owe this success to our more than 40 years of expertise in mastering and further developing the technology, the equipment and the components.

4 ARCHITECTURAL GLASS COATING MILESTONES AND CONTRIBUTIONS ADVANCED LAYER SYSTEMS FOR LOW-E & SOLAR CONTROL VON ARDENNE has a long tradition in glass coating. In 1955, the Manfred von Ardenne Research Institute was established in Dresden. This institute achieved a leading position in electron beam and plasma technologies and their application in vacuum coating. Many times, the institute paved the way for large-area coating and the development of highly productive production processes and systems. An important milestone was the first inline sputter system in 1983 for continuous coating of precious metal-free mirrors for the furniture industry. The success of the project mainly depended on the newly developed large-area planar magnetron. The system was the predecessor of the equipment used for the production of heatinsulating architectural glass today. What were the other milestones? For more than 50 years, the glass industry has been striving to increase the comfort of buildings, to minimize the transmission of heat into the interior and the heat loss through the windows by means of coated glass. Every since the beginning of the oil crisis in 1973 and the resulting drastic price increase for fossil fuels, energy saving and efficiency have become increasingly important. The development of the corresponding technologies has been accelerated by the growing awareness of the climate change caused by greenhouse gas emissions. After thermal coating methods such as thermal evaporation had initially dominated in the early years, magnetron sputtering became prevalent in the 1970ies Manfred von Ardenne Research Institute manufactured Europe s first inline vacuum coating system for solar control glass at industrial scale with a Cu and SiO x layer system (1.8 m x 2.2 m) On 14 October, a ring gap discharge was ignited in Dresden for the first time at the Institute - since then VON ARDENNE has become a leader in magnetron technology. In 1974, we have started to establish our expertise in magnetron sputtering. Since then, we have become a worldwide leading company in magnetron sputtering. We owe this success to our more than 40 years of expertise in mastering and further developing the technology, the equipment and the components. Our expertise in magnetron sputtering continues to grow and is constantly being incorporated into the development of layer stacks and the corresponding deposition processes. This ensures excellent layer properties. It is vital that the coatings are impeccable, especially for modern architecture with large glass façades. with VON ARDENNE equipment you will achieve your required visible transmittance and infrared reflectance as well as the best optical performance. Beyond that, a high uniformity is crucial for the quality of the layer systems. VON ARDENNE coating systems easily achieve a thickness uniformity of ±0.8 percent for Triple layer systems at a maximum long-term stability for an efficient production process. On top of that, the mechanical stability of the layers is excellent, which is an ideal precondition for further processing The first inline sputter system for the continuous coating of precious metal-free (Al) mirrors was built Breakthrough: VON ARDENNE delivers the first horizontal inline sputter coater for Jumbo format architectural glass (6.00 m x 3.21 m) to Pilkington. Being a newcomer in this business then, VON ARDENNE has gained market leadership within a short period of time. This is true no matter for what climate zones and requirements the energy efficient glass coatings are needed. Whether it is Solar Control, Single, Double or Triple coatings, 2002 Market entrance in China: After having sold several glass coating systems in Europe, VON ARDENNE enters the Chinese market. Since then, we have sold more than 30 systems and have become the leading supplier in China. Dielectric/protection 2010 The world s longest coating system was built: The 120 m long GC330H inline coater for flat glass was put into operation at Euroglas in Poland. It is the longest of its kind in the world. Infrared reflection 2013 The 50 th VON ARDENNE coating system for architectural glass was sold. infrared reflection 2014 VON ARDENNE proved technology leadership: The world s first large-area glass coater fully equipped with directly pumped magnetrons (T-Series Magnetrons) is sold. This GC330H is also the first large-area coater for Jumbo formats in North America. Dielectric/protection Reflectance Infrared reflection 2015 In October, VON ARDENNE sold a GC254H large-area glass coater to Viglacera in Vietnam. It was the first of its kind in Vietnam and the whole of South-East Asia. Only nine months later, the coater was put into operation. SOLAR CONTROL SINGLE DOUBLE TRIPLE 2016 VON ARDENNE introduced new high-utilization WSM magnetron with a target lifetime of more than 6000 kwh. for reduced radiation of incoming sunlight for residential heat insulation for façade glazings of energy-efficient commercial buildings

REFERENCE BUILDINGS WITH GLAZINGS COATED ON VON ARDENNE EQUIPMENT Abu Dhabi, Financial Center Glas Trösch Chile, Gran Torre Santiago - Tower 2 Jose Luis Stephens PRODUCT TOPICS PRODUCT INDEX

These coatings give the surfaces new functional properties and can be between one nanometer and a few micrometers thin, depending on the application.

5 REFERENCE BUILDINGS WITH GLAZINGS COATED ON VON ARDENNE EQUIPMENT Abu Dhabi, Financial Center Glas Trösch Chile, Gran Torre Santiago - Tower 2 Jose Luis Stephens PRODUCT TOPICS PRODUCT INDEX COMPONENTS VON ARDENNE WHO WE ARE & WHAT WE DO. VON ARDENNE develops and manufactures industrial equipment for vacuum coatings on materials such as glass, wafers, metal strip and polymer films. These coatings give the surfaces new functional properties and can be between one nanometer and a few micrometers thin, depending on the application. Our customers use these materials to make high-quality products such as architectural glass, absorbers and absorber tubes for solar-thermal power plants, refl ectors for lighting systems, displays for smartphones and touchscreens, solar modules and heat protection window film for automotive glass. We supply our customers with technologically sophisticated vacuum coating systems, extensive expertise and global service. The key components are developed and manufactured by VON ARDENNE itself. Systems and components made by VON ARDENNE make a valuable contribution to protecting the environment. They are vital for manufacturing products which help to use less energy or to generate energy from renewable resources. SALES CONTACTS SERVICE CONTACTS WORLDWIDE SALES AND SERVICE VON ARDENNE GmbH (headquarters) I Am Hahnweg 8 I DRESDEN I GERMANY Sales: +49 (0) I sales@vonardenne.biz Service: +49 (0) I support@vonardenne.biz VON ARDENNE Vacuum Equipment (Shanghai) Co., Ltd. I I I sales-vave@vonardenne.biz; support-vave@vonardenne.biz VON ARDENNE Malaysia Sdn. Bhd. I I I sales-vama@vonardenne.biz; support-vama@vonardenne.biz VON ARDENNE Japan Co., Ltd. I Tokyo office I I I sales-vajp@vonardenne.biz; support-vajp@vonardenne.biz VON ARDENNE Japan Co., Ltd. I Osaka office I I I sales-vajp@vonardenne.biz; support-vajp@vonardenne.biz VON ARDENNE North America, Inc. I Ohio office I I I sales-vana@vonardenne.biz; support-vana@vonardenne.biz VON ARDENNE North America, Inc. I Arizona office I I I sales-vana@vonardenne.biz; support-vana@vonardenne.biz Photos VON ARDENNE Corporate Archive, ENGLISH 02/2017

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VACUUM WEB COATING SYSTEMS ROLL-TO-ROLL ROLL-TO-ROLL VACUUM WEB COATING SYSTEMS VACUUM WEB COATING APPLICATIONS VON ARDENNE provides tailored web coating solutions for today s most ambitious thin-film