More Precision. capancdt // Capacitive displacement sensors and systems
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1 More Precision capancdt // Capacitive displacement sensors and systems
2 High resolution measuring system capancdt Multi-channel system with subnanometer precision resolution - Virtually independent of temperature - Also measures against insulators -A s benchtop unit and as card carrier for a 19-inch format - I ntegrated calculation function for thickness measurements capancdt N umerous filters, averaging, trigger functions, measured value storage, digital linearization System design The capancdt 6500 can be used for multi-channel operation and is modular in its design. Up to eight sensors can be connected to the signal conditioning electronics (Euro-size cards) via a preamplifier module. For the DL6530 version, the pre-amplifier is integrated in the housing and is used for cable lengths up to 4m (with CC cable) or 8m (with CCg cable). For longer cable lengths, the external preamplifiers CP6001 or CPM6011 are used. sensors sensor cable signal output socket D-Sub, -pin preamplifier preamplifier cable DL 65 DL 65 DL 65 DL 65 DL 6530 DL 6530 DL 6530 DL 6530 oscillator Ethernet display 230VAC 0VAC mains ±15VDC power +5VDC supply 12 ch 1 ch 2 ch 3 ch 4 ch 5 ch 6 ch 7 ch 8 A measuring system with n measurement channels consists of: 1. controller DT6530 with power supply, display, Ethernet, oscillator and analog output 2. n x modules DL65 (DL6530 with integral pre-amplifier) 3. n x pre-amplifier connecting cables 4. n x pre-amplifier modules CP n x sensor cables 6. n x sensors DL65: One item of position 2 to 6 is needed for each channel. DL6530: One item of position 2, 5 and 6 is needed for each channel.
3 13 Web interface The web interface for controller configuration opens via Ethernet. Up to 8 channels can be visualized and linked arithmetically. System configuration System capancdt 6500 (with integral pre-amplifier): DT6530 / DT6530C Rack Demodulator DL6530 Sensor cable Sensor System capancdt 65 (with external pre-amplifier): DT6530 / DT6530C Rack Demodulator DL65 Sensor cable Sensor Pre-amplifier CPM6011 / CP6001 Pre-amplifier cable CPM6011 External pre-amplifier for standard measurements CP6001 External pre-amplifier for high precision measurements DT6530C 2 channel rack DT channel rack
4 High resolution measuring system capancdt 6500 Controller DT channel rack Controller DT6530C 2-channel rack CPM6011 capacitive pre-amplifier DL6530/65 front cover DL65: connector CP6001 DL 6530: connector sensor LED: offset LED: range LED: status Poti: gain Poti: lin Poti: offset BNC: analog output CONTROLLER SENSOR CP6001 capacitive pre-amplifier Mounting adapter CP Controller Sensor ø Text Text. ø4 Pre-amplifier cable CA5 / CAx Ø 4.3 ±0.3 x=cable length 5... m (standard 5m) ~35 Ø 8.9 ~ WS
5 15 Controller type DT6530 DT6530 with pre-amplifier CPM6011 Resolution static % FSO % FSO Resolution dynamic 0.002% FSO (8.5kHz) 0.015% FSO (8.5kHz) Data rate analog output 8.5kHz (-3dB) 8.5kHz (-3dB) Bandwidth (switchable) 20Hz; 1kHz; 8.5kHz 20Hz; 1kHz; 8.5kHz Data rate digital output 4 x 7.8kSa/s; 8 x 3.9kSa/s 4 x 7.8kSa/s; 8 x 3.9kSa/s Linearity (typ.) 0.0% FSO 0.05% FSO Max. sensitivity deviation 0.05% FSO 0.1% FSO Repeatability % FSO 0.001% FSO Long-term stability ± 0.002% FSO / month ± 0.02% FSO / month Synchronous operation yes yes Insulator measurement yes no Temperature stability ± digital: 5ppm/ C analog: ppm/ C 80ppm Sensor C C Controller C C Temperature range (storage) C C Supply 230 VAC 230 VAC 0... V (max. ma short circuit proof); 0... V (max. ma short circuit proof); mA (load max. 500Ω) mA (load max. 500Ω) optional: mA (load max. 500Ω) optional: mA (load max. 500Ω) Temperature range (during operation) Output Ethernet 24 Bit; EtherCAT Ethernet 24 Bit; EtherCAT Sensors suitable for all sensors suitable for all sensors Sensor cable standard CC cable 1m CCm cable = 1.4m CCg cable = 2m CC cable 1m CCm cable = 1.4m CCg cable = 2m Sensor cable (special tuning) double / triple / quadruple standard cable length double / triple / quadruple standard cable length Trigger TTL, 5V TTL, 5V No. of channels max. 8 max. 8 FSO = Full Scale Output Options Article number Description Description EMR2 CP6001 extended measuring range (factor: 2) in combination with DL RMR 1/2 CP6001 reduced measuring range (factor: 1/2) in combination with DL ECL2 CP6001 special tuning for double standard cable length in combination with DL ECL3 CP6001 special tuning for triple standard cable length in combination with DL ECL4 CP6001 special tuning for quadruple standard cable length in combination with DL ECL2 CPM6011 special tuning for 2m sensor cable in combination with DL EMR2 DL65x0 extended measuring range (factor: 2) RMR 1/2 DL65x0 reduced measuring range (factor: 1/2) ECL2 DL65x0 special tuning for double standard cable length ECL3 DL65x0 special tuning for triple standard cable length ECL4 DL65x0 special tuning for 4m sensor cable EMR2 CPM6011 extended measuring range (factor: 2)
6 Accessories 24 capancdt Sensor cable Cable CCx,x / CCx,x/90 Cable CCmx,x / CCmx,x/90 Cable CCgx,x / CCgx,x/90 Description Low-outgassing cable up to 4m length, for applications in clean rooms Low-outgassing cable up to 4.2m length, for applications in clean rooms, UHV and EUV Robust cable up to 8m length, for industrial applications Temperature stability -0 C to +200 C -0 C to +200 C -20 C to +80 C (permanent) -20 C to +0 C (;000 h) Connector type C/90 2.1mm ±0.1mm Sensor cable with connector type C Outer diameter 3.1mm ±0.1mm Ø6 3.1mm ±0.1mm Ø4 3x cable diameter during installation; 7x cable diameter for movement; 12x cable diameter recommend at continuous movement 8 Bending radius 1.4 m 2m 8m 6m CCgx,xB/ m CCmx,xB/90 4m 1 x straight / 1 x 90 connector CCx,xB/90 3m 2 x straight connector Ø5,4 CCx,xB Ø6 CCmx,xB CCgx,xB m Cable with connector type B for sensors CS1 / CS1HP / CS2 / CSE2 / CS3 / CS5 / CS 16,9 Cable with connector type C for sensors CS005 / CS02 8.6/ CS05 / CSE05 / CS08 / CSE Design 2 x straight connector 1 x straight / 1 x 90 connector 17.5 Ø3.1 ±0.1 (CC/ CCg) Model CCx,xC CCmx,xC CCgx,xC CCx,xC/90 CCmx,xC/90 CCgx,xC/90 Ø2.1 ±0.1 (CCm ) Standard 1m 13,1 Ø5.4 Standard length 1m Connector type C/90 Sensor cable with connector type C Ø ,9 8 13,1 Ø6 Ø5.4 Standard length 1m Ø3.1 ±0.1 (CC/ CCg) Ø2.1 ±0.1 (CCm ) 16 Sensor cable with connector type B Ø5,4 Ø6 Connector type B/90 Standard length 1m Ø3.1 ±0.1 (CC/ CCg) Ø2.1 ±0.1 (CCm ) Ø Accessories capancdt MC2.5 Micrometer for sensor calibration, range 0-2.5mm, Resolution 0.1µm. Suitable for sensors CS005 to CS2 MCD Digital micrometer for sensor calibration, range 0 - mm, adjustable offset (zero). Suitable for all sensors. HV/B Vacuum feed through triaxial UHV/B Vacuum feed through triaxial for ultra-high vacuum PC6200-3/4 Power-/trigger cable, 4 pin, 3m SCAC3/4 Signal output cable, (necessary for multi-channel applications), 4 pin, 3m Sensor cable with connector type B Connector type B/90 SCAC3/5 Signal output cable, analog, 5 pin, 3m Standard length 1m SC6000-1,0 Synchronization cable, 5 pin, 1m CA5 Preamplifier cable 5 pin, 5m 30.5 Ø3.1 ±0.1 (CC/ CCg) Ø2.1 ±0.1 (CCm ) 20.5 PS2020 Power supply for DIN rail mounting; Input 230VAC (115VAC); Output 24VDC / 2.5 A; L/W/H 120x120x40mm
7 UHV/B Vacuum feed triax weldable (Art.-no ) HV/B Vacuum feed through (Art.-no ) 2-1 UHV/B Vacuum feed triax screwable (Art.-no ) ø13.50h6 ø13.50h6 Max. leak rate 1xe-9 mbar l s-1, compatible withws11 connector type B Max. leak rate 1xe-9 mbar l s-1, compatible with connector type B 1.75 WS11 Weld seam Weld seam 1.75 M9x0.5 M9x0.5 ø34standard (flange standard ø34 (flange CF16) CF16) Max. leak rate 1xe mbar l s, compatible with connector type B UHV/B Vacuum feed triax screwable (Art.-no ) -1 UHV/B Vacuum 13.5 feed triax with flange CF16 (Art.-no ) 6 WS11 Max. leak rate 1xe mbar l s, compatible with connector type B ø13.50h6 WS Max. leak rate 1xe feed mbar triax l s, compatible with connector type B UHV/B Vacuum with flange CF16 (Art.-no ) ø13.50h6 Max. leak rate 1xe mbar l s, compatible with connector type B max Ø14 Ø8.8 Ø8.8 max Ø14 WS12 WS12 34 Mx0.75 M9x0.5 M9x0.5 UHV/B Vacuum feed triax weldable (Art.-no ) Mx0.75 HV/B Vacuum feed through (Art.-no ) M9x0.5 M9x Max. leak rate 1xe-9 mbar l s-1, compatible with connector type B Max. leak rate 1xe-9 mbar l s-1, compatible with connector type B SCA3/5 Signal output cable (Art.-no ) SCA3/4 Signal output cable (Art.-no ) CA5 Preamplifier cable (Art.-no ) SC6000-1,0 Synchronization cable (Art.-no ) 11 CA5 Preamplifier cable (Art.-no ) CA5 Preamplifier cable (Art.-no ) Ø4.9 ±0. Ø4.9 ±0. Ø4.9 ±0. SC6000-1,0 Synchronization cable (Art.-no ) Ø4.3 ±0. Ø4.3 ± SC6000-1,0 Synchronization cable (Art.-no ) 150 Ø4.3 ±0. Ø5.5 ±0.3 Ø5.5 ± Ø5.5 ±0.3 Ø11.5 Ø9 Ø9 Ø11.5 PC6200-3/4 Power-/trigger cable (Art.-no ) 11 Ø9 PC6200-3/4 Power-/trigger cable (Art.-no ) Ø11.5 Ø4.3 ±0. Ø4.3 ±0. Ø4.3 ±0. PC6200-3/4 Power-/trigger cable (Art.-no ) SCA3/5 Signal output cable (Art.-no ) Ø4.3 ±0. Ø4.3 ±0. Ø4.3 ±0. 50 SCA3/5 Signal output cable (Art.-no ) 50 SCA3/4 Signal output cable (Art.-no ) SCA3/4 Signal output cable (Art.-no )
8 Modifications reserved / Y H0248GKE High performance sensors made by Micro-Epsilon Sensors and systems for displacement and position Sensors and measurement devices for non-contact temperature measurement 2D/3D profile sensors (laser scanner) Optical micrometers, fibre optic sensors and fibre optics Color recognition sensors, LED analyzers and color inline spectrometer Measurement and inspection systems MICRO-EPSILON USA 8120 Brownleigh Dr. Raleigh, NC 617 / USA Phone +1/919/ Fax +1/919/ me-usa@micro-epsilon.com
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