Digital Flow Switch for Air/Water

Transcription

1 Digital Flow Switch for ir/water Series PF/PFW RoHS For ir Series PF For Water New digital flow switch product, Series PFW, with the compact design and expanded flow rate range has been launched. Please examine to use Series PFW (page 09). For details about Series PFW, refer to the catalog at SMC website. Series PFW PFM PFMV PF PFW PFD IF -channel Flow Monitor Series PF00 07

2 Flow rate setting and monitoring are possible with the digital display. Two types are available: Integrated and Remote type. Three types of output: Switch, accumulated pulse, and analog outputs. Switching from instantaneous flow rate to accumulated flow is possible. 5 Two independent flow rate settings are possible. 6 Water resistant construction conforming to IP65 (ccumulated flow rate is reset when the power supply turns OFF.) For ir Series PF For Water Series PFW single controller can monitor the flow rate of different sensors. independent flow rate ranges can be monitored by a single controller. -channel Flow Monitor Series PF00 76 % reduced intallation space (Compared with a PF and PFW, when panel mounted.) 0 mm 08 Reduced panel fitting labor 0 mm PF00 65 mm PF00/PFW00 are panel-mounted. Connection CH CONNECTOR No tools required! Power supply/output connector Function Copy function Possible to copy information from one channel to one or more other channels. Copying CH setting to CH, and. copy copy copy CH CH CH Keylock function Unit switching function Peak value and lowest value holding connector Channel scan function llows constant monitoring of the displayed pressure value for each channel.

3 COM B COM GND F.G. R.S. COM MULTI COUNTER:CEU5 LEFT MODE UP DOWN SEL. C00~0VCOM OUTOUTOUTOUTOUT5 RD SD SG SET Series PF/PFW pplication Examples Flow control of N gas to prevent detection camera shimmering and lead frame oxidation Clean gas filter Set the clean gas filter on the outlet side piping of the flow switch. Flow control of cooling water for wafer temperature control and high frequency power supply Flow control of pressurized cooling water for welding gun Makes it possible to monitor the air flow from the main line to each branch line. Main line flow control The accumulated pulse output function enables remote monitoring of accumulated flow. (Refer to page 08.) PFM PFMV PF PFW PFD IF M/C M/C Pulse counter M/C Flow control for each branch line 09

4 For ir Digital Flow Switch Series PF RoHS Integrated Display Type Flow rate range 0 to 0 L/min 50 5 to 50 L/min 0 to 00 L/min 0 to 00 L/min 5 50 to 500 L/min Symbol Specifications Environment Output Note 5) specifications Port size /8 / /8 / Status LED s Response time Hysteresis Power supply voltage 0 Thread type N F Enclosure Operating temperature range Withstand voltage Insulation resistance Standards and regulations Rc NPT G Flow rate (L/min) Port size pplicable model PF70/750 PF7/7 PF75 How to Order Lead wire (Refer to page 07.) Note ) For digital flow switch with unit switching function. (Fixed SI unit [(L/min, or L, m or m x 0 )] will be set for switch type without the unit switching function.) Note ) Flow rate display can be switched between the basic condition of 0 C, 0. kpa and the standard condition (NR) of 0 C, 0. kpa, and 65% RH. Note ) Without lead wire. Note ) ccumulated flow rate is reset when the power supply turns OFF. Note 5) Switch output and accumulated pulse output can be selected during initial setting. Note 6) Window comparator mode Since hysteresis will reach digits, keep P_ and P_ or n_ and n_ apart by 7 digits or more. (In case of output OUT, n_, to be n_, and P_, to be P_,.) Note 7) The flow switch conforms to the CE marking. Note 8) For details about wiring and thread type, refer to the Operation Manual that can be downloaded from SMC website ( Symbol 7 67 Symbol N Lead wire with M connector ( m) Without lead wire Output specifications Output specification NPN open collector outputs PNP open collector outputs Unit specifications With unit switching function Note) M Fixed SI unit Note) Note) Under Japan's new Measurement ct, this is only for overseas sales (SI units are to be used inside Japan). Note) Fixed units: Instantaneous flow rate: L/min ccumulated flow: L Model PF70 PF750 PF7 PF7 PF75 Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit ccumulated pulse flow rate exchange value (Pulse width: 50 ms) 0.5 to 0.5 L/min 0.5 to 0.5 L/min to 0 L/min 0. L/min 0. L/pulse.5 to 5.5 L/min.5 to 5.5 L/min 5 to 50 L/min 0.5 L/min 0.5 L/pulse ir, Nitrogen 5 to 05 L/min 5 to 05 L/min 0 to 00 L/min L/min L/pulse 0 to 0 L/min 0 to 0 L/min 0 to 00 L/min L/min L/pulse 5 to 55 L/min 5 to 55 L/min 50 to 500 L/min 5 L/min 5 L/pulse Note, ) Instantaneous flow rate L/min, CFM x 0 - L/min, CFM x 0 - Display units ccumulated flow L, ft x 0 - Operating fluid temperature ccuracy 0 to 50 C ±5% F.S. Repeatability ±% F.S. ±% F.S. Temperature characteristics ±% F.S. (5 to 5 C, 5 C reference), ±5% F.S. (0 to 50 C, 5 C reference) Current consumption 50 m or less 60 m or less 70 m or less Weight Note ) 50 g 90 g Port size (Rc, NPT, G) /8, / /8 / Detection type Indicator light Heater type -digit, 7-segment LED Operating pressure range 50 kpa to 0.5 MPa 50 kpa to 0.75 MPa Proof pressure ccumulated flow range Note ).0 MPa 0 to L 00 Switch output ccumulated pulse output PF M Conforming to ISO8-. For details about the Flow Switch Precautions, refer to pages 95 and 95. For details about the Specific Product Precautions, refer to the Operation Manual at SMC website. Maximum load current: 80 m; Internal voltage drop: V or less (with load current of 80 m) NPN open collector Maximum applied voltage: 0 V; outputs Maximum load current: 80 m PNP open collector Internal voltage drop:.5 V or less (with load current of 80 m); outputs NPN or PNP open collector (same as switch output) Lights up when output is turned ON OUT: Green; OUT: Red sec. or less Hysteresis mode: Variable (can be set from 0), Window comparator mode Note 6) : -digit fixed to VDC ±0% IP65 Operating: 0 to 50 C, Stored: 5 to 85 C (with no freezing and condensation) 000 VC for minute between terminals and housing 50 MΩ or more (500 VDC measured via megohmmeter) between terminals and housing CE, RoHS

5 U U U For ir Digital Flow Switch Series PF Set Flow Rate Range and Rated Flow Range Set the flow rate within the rated flow range. The set flow range is the range of flow rate that is possible in setting. The rated flow range is the range that satisfies the sensor s specifications (accuracy, linearity etc.). It is possible to set a value outside off the rated flow range, however, the specification is not be guaranteed. <For ir/pf> Flow rate range L/min 5L/min 0L/min 0L/min 50L/min 00L/min 00L/min 500L/min PF70 PF50 L/min 0.5L/min 0L/min 0.5L/min PF750 PF550 5L/min.5L/min 50L/min 5.5L/min PF7 PF5 5L/min 0L/min 00L/min 05L/min PF7 PF5 0L/min 0L/min 00L/min 0L/min PF75 PF55 5L/min 50L/min 500L/min 55L/min Rated flow range of sensor Set flow rate range of sensor Internal Circuits and Wiring Examples PF7-7 NPN ( outputs) Brown DC(+) Black OUT White OUT Blue DC( ) + to VDC -67 PNP ( outputs) Brown DC(+) Black OUT U+ to VDC White OUT Blue DC( ) PFM PFMV PF PFW PFD IF 0

6 Series PF How to Order RoHS Remote Type Unit PF5 0 0 C Flow rate range Symbol to 0 L/min 5 to 50 L/min 0 to 00 L/min 0 to 00 L/min 50 to 500 L/min Port size /8 / /8 / 0 Thread type N F Flow rate (L/min) Rc NPT G Conforming to ISO8-. Port size pplicable model PF50/550 PF5/5 PF55 Symbol Lead wire (Refer to page 07.) N C Lead wire with M connector ( m) Without lead wire Specification Output for monitor unit Output for monitor unit + analog output ( to 5 V) Output for monitor unit + analog output ( to 0 m) Option (Only for output specifications ) (Refer to page 07.) None e-con connector ( pc.) The cable and connector are shipped unassembled. Output specifications pplicable monitor unit model Series PF00 Series PF00/00 Series PF00 Specifications For details about the Flow Switch Precautions, refer to pages 95 and 95. For details about the Specific Product Precautions, refer to the Operation Manual at SMC website. Model PF50 PF550 PF5 PF5 PF55 Measured fluid Detection type Rated flow range to 0 L/min 5 to 50 L/min ir, Nitrogen Heater type 0 to 00 L/min 0 to 00 L/min 50 to 500 L/min Operating pressure range 50 kpa to 0.5 MPa 50 kpa to 0.75 MPa Proof pressure Operating fluid temperature ccuracy Note ) Repeatability Note ) Temperature characteristics.0 MPa 0 to 50 C ±5% F.S. ±% F.S. (Connected with PF), ±%F.S. (Connected with PF) ±% F.S. (5 to 5 C, 5 C reference) ±% F.S. (0 to 50 C, 5 C reference) Output for monitor unit nalog voltage output (non-linear) output impedance kω output for monitor unit PF Environment Output Note ) specifications nalog output Power supply voltage Current consumption Enclosure Operating temperature range Withstand voltage Insulation resistance Standards and regulations Voltage output to 5 V (within the flow rate range) ccuracy: ±5%F.S., Min. load impedance: 00 kω (Output impedance: kω) Current output to 0 m (within the flow rate range) ccuracy: ±5%F.S., Max. load impedance: 00 Ω or less (at VDC), 600 Ω or less (at VDC) to VDC ±0% 00 m or less 0 m or less IP65 Operating: 0 to 50 C, Stored: 5 to 85 C (with no freezing and condensation) 000 VC for minute between terminals and housing 50 MΩ or more (500 VDC measured via megohmmeter) between terminals and housing CE, RoHS Weight Note ) 00 g 0 g Port size (Rc, NPT, G) /8, / /8 / Note ) The system accuracy when combined with PF/. Note ) Output system can be selected during initial setting. Note ) Without lead wire. (dd 0 g for the types of analog output whether voltage or current output selected.) Note ) Flow rate unit measured under the following conditions: 0 C and 0. kpa. Note 5) The sensor unit conforms to the CE marking. Note 6) For details about wiring and thread type, refer to the Operation Manual that can be downloaded from SMC website ( 0

7 For ir Digital Flow Switch Series PF How to Order RoHS Remote Type Monitor Unit PF 0 0 M Flow rate range Symbol Flow rate range Type for sensor unit 0 to 0 L/min PF50 5 to 50 L/min PF550 0 to 00 L/min 0 to 00 L/min 50 to 500 L/min PF5 PF5 PF55 Mounting Panel mounting Output specifications Symbol 0 Output specification NPN open collector outputs PNP open collector outputs pplicable model PF00, 0 PF0, Unit specifications With unit switching function Note) M Fixed SI unit Note) Note) Since the unit for Japan is fixed to SI due to new measurement law, this option is for overseas. Note) Fixed units: Instantaneous flow rate: L/min ccumulated flow: L Specifications For details about the Flow Switch Precautions, refer to pages 95 and 95. For details about the Specific Product Precautions, refer to the Operation Manual at SMC website. Model Flow rate measurement range Note ) Set flow rate range Note ) Minimum set unit Note ) ccumulated pulse flow rate exchange value (Pulse width: 50 ms) Note ) Note, ) Instantaneous flow rate Display units ccumulated flow ccumulated flow range Note ) ccuracy Note 5) Repeatability Note 5) Temperature characteristics Current consumption Weight Environment Output Note 6) specifications Switch output ccumulated pulse output Indicator light Status LED s Power supply voltage Response time Hysteresis Enclosure Operating temperature range Withstand voltage Insulation resistance PF00/0 0.5 to 0.5 L/min.5 to 5.5 L/min 0.5 to 0.5 L/min.5 to 5.5 L/min 0. L/min 0.5 L/min 0. L/pulse L/min, CFM x 0-50 m or less 0.5 L/pulse NPN open collector (PF00, PF0) PNP open collector (PF0, PF) 5 to 05 L/min 5 to 05 L/min L/min L/pulse PF0/ 0 to 0 L/min 0 to 0 L/min L/min L/pulse L/min, CFM x 0 - L, ft x 0-0 to L ±5% F.S. ±% F.S. ±% F.S. (5 to 5 C, 5 C reference) ±% F.S. (0 to 50 C, 5 C reference) 60 m or less 5 g Maximum load current: 80 m Internal voltage drop:.5 V or less (with load current of 80 m) outputs NPN or PNP open collector (same as switch output) -digit, 7-segment LED Lights up when output is turned ON OUT: Green; OUT: Red to VDC ±0% sec. or less Hysteresis mode: Variable (can be set from 0), Window comparator mode Note 7) : Fixed (-digits) IP0 Operating: 0 to 50 C, Stored: 5 to 85 C (with no freezing and condensation) 000 VC for minute between terminals and housing 50 MΩ or more (500 VDC measured via megohmmeter) between terminals and housing 5 to 55 L/min 5 to 55 L/min 5 L/min 5 L/pulse Maximum load current: 80 m Internal voltage drop: V or less (with load current of 80 m) Maximum applied voltage: 0 V outputs Standards and regulations CE, RoHS Note ) The flow rate measurement range can be modified depending on the setting. Note ) For digital flow switch with unit switching function. (Fixed SI unit [L/min or L] will be set for switch types without the unit switching function.) Note ) Flow rate display can be switched between the basic condition of 0 C, 0. kpa and the standard condition (NR) of 0 C, 0. kpa, and 65% RH. Note ) ccumulated flow rate is reset when the power supply turns OFF. Note 5) The system accuracy when combined with PF5. Note 6) Switch output and accumulated pulse output can be selected during initial setting. Note 7) Window comparator mode Since hysteresis will reach digits, keep P_ and P_ or n_ and n_ apart by 7 digits or more. (In case of output OUT, n_, to be n_, and P_, to be P_,.) Note 8) The monitor unit conforms to the CE marking. Note 9) For details about wiring, refer to the Operation Manual that can be downloaded from SMC website ( 0 PFM PFMV PF PFW PFD IF

8 Series PF How to Order RoHS -channel Flow Monitor Remote Type Monitor Unit ccessory/power supply output cable ( m) Specifications Model pplicable flow rate sensor Flow rate measurement range Note ) Set flow rate range Note ) Minimum set unit Note ) ccumulated pulse flow rate exchange value (Pulse width: 50 ms) Note ) Note, ) Instantaneous flow rate Display units ccumulated flow ccumulated flow range Note ) Power supply voltage Current consumption Power supply voltage for sensor Power supply current for sensor Note ) input No. of inputs Input protection Output Note ) specifications Output specifications 0 NPN outputs PNP outputs Unit specifications With unit switch function Note ) M Fixed SI unit Note ) Note) Under the new Measurement ct, devices with unit switching functions cannot be used inside Japan. Note) Fixed units: Instantaneous flow rate: L/min ccumulated flow: L PF to 0.5 L/min 0.5 to 0.5 L/min 0. L/min 0. L/pulse PF to 5.5 L/min.5 to 5.5 L/min 0.5 L/min 0.5 L/pulse Option (Refer to page 07.) None C connector ( pc.) Option (Refer to page 07.) B None Panel mounting Front protective cover + Panel mounting PF00/0 PF5-- 5 to 05 L/min 5 to 05 L/min L/min L/pulse PF5-- 0 to 0 L/min 0 to 0 L/min L/min L/pulse PF to 55 L/min 5 to 55 L/min 5 L/min 5 L/pulse L/min, CFM x 0 - L/min, CFM x 0 - L, ft x 0 - L, ft x 0-0 to L, 0 to ft x 0-0 to L, 0 to ft x 0 - VDC ±0% (With power supply polarity protection) 55 m or less (Not including the current consumption of the sensor) Same as [Power supply voltage] Max. 0 m (However, the total current for the inputs is 0 m maximum or less.) to 5 VDC (Input impedance: pprox. 800K Ω) inputs Excess voltage protection Maximum load current: 80 m NPN open collector (PF00) Internal voltage drop: V or less (with load current of 80 m) Maximum applied voltage: 0 V Maximum load current: 80 m PNP open collector (PF0) Internal voltage drop: V or less (with load current of 80 m) NPN open collector or PNP open collector (same as switch output) outputs ( output per sensor input) With short circuit protection Hysteresis Hysteresis mode: Variable (can be set from 0), Window comparator mode: Fixed (-digits) Response time Note 5) s or less ccuracy Note 5) ±5% F.S. Repeatability Note 5) ±% F.S. Temperature characteristics ±% F.S. (0 to 50 C, 5 C reference) Display method For measured value display: -digits, 7-segment LED (Orange) For channel display: -digit, 7-segment LED (Red) Status LED s Lights up when output is turned ON OUT: Red Enclosure IP65 for the front face only, and IP0 for the remaining parts. Operating temperature range Operating: 0 to 50 C, Stored: 0 to 60 C (with no freezing and condensation) Operating humidity range Operating or Stored: 5 to 85%RH (with no condensation) Standards and regulations CE, RoHS Connection Power supply/output connection: 8P connector, connection: P connector (e-con) Material Housing: PBT, Monitor: PET, Backside rubber: CR Weight 60 g (Except for any accessories that are shipped together) Note ) Fixed SI unit [L/min or L] will be set for switch types without the unit switching function. ( -M is suffixed at the end of part number.) ccumulated flow is reset when the power supply turns OFF. Note ) Flow rate display can be switched between the basic condition of 0 C, 0. kpa and the standard condition (NR) of 0 C, 0. kpa, and 65% RH. Note ) If Vcc side on sensor input connector part is short-circuited with the 0V side, the flow monitor inside will be damaged. Note ) Switch output and accumulated pulse output can be selected during initial setting. Note 5) The system accuracy when combined with an applicable flow sensor. Note 6) This product conforms to the CE marking. Note 7) For details about wiring, refer to the Operation Manual that can be downloaded from SMC website ( Environment 0 Switch output (Real-time switch output, ccumulated switch output) ccumulated pulse output No. of outputs Output protection PF0 0 M Connectable remote type sensor unit is PF5-- (with analog output to 5 V). For details about the Flow Switch Precautions, refer to pages 95 and 95. For details about the Specific Product Precautions, refer to the Operation Manual at SMC website.

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10 U U U U U Series PF Internal Circuits and Wiring Examples For PF5/PF Monitor PF Output for Black PF Brown DC(+) Blue DC( ) 5 + Switch output to VDC -/ nalog voltage output nalog current output Monitor PF Output for 8 Black PF 7 Brown DC(+) 6 Blue DC( ) 5 White nalog output + Switch output to VDC For PF5/PF - nalog voltage output Monitor PF Black Brown DC(+) Blue DC( ) White nalog output + to VDC Switch output PF -0 NPN ( outputs) - PNP ( outputs) Black input Brown DC(+) Blue DC( ) OUT OUT DC(+) DC( ) + to VDC Black input Brown DC(+) Blue DC( ) OUT OUT DC(+) DC( ) + to VDC PFM PFMV PF PFW PF00 NPN ( outputs) Brown DC(+) White CH_OUT PF0 PNP ( outputs) Brown DC(+) White CH_OUT PFD IF Gray Red Green CH_OUT Blue CH_OUT CH_OUT DC( ) + VDC Gray Red Green CH_OUT Blue CH_OUT CH_OUT DC( ) + VDC 0-

11 For ir Digital Flow Switch Series PF Flow Characteristics (Pressure Loss) PF70, 50 PF750, 550 PF7, Pressure loss (kpa) Pressure loss (kpa) Pressure loss (kpa) Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) PF7, 5 0 PF75, Pressure loss (kpa) Pressure loss (kpa) Flow rate (L/min) Flow rate (L/min) PFM Wetted Parts Construction/ Unit PFMV PF70/750 PF50/550 PF7/7/75 PF5/5/55 q w q e w r e w Flow direction r t t Flow direction w y e Parts list No. 5 Parts list No. 5 6 Description ttachment Seal Mesh Body Description ttachment Seal Spacer Mesh Body Material DC NBR Stainless steel PBT PBT Material DC NBR PBT Stainless steel PBT PBT PF PFW PFD IF 05

12 7 Series PF Dimensions: Integrated Display Type For ir PF70, FLOW SWITCH UP Connector pin numbers 5 SET OUT OUT FOR IR DOWN x ø (.) x Port size Pin no. Pin description DC(+) OUT DC( ) OUT x ø. Flow direction PF7, 7, FLOW SWITCH U P 5 SET OUT OUT FOR IR DOWN x ø x Port size 0 (.) Flow direction Be sure to allow straight pipe length that is minimum 8 times the port size upstream and downstream of the switch piping. 06

13 For ir Digital Flow Switch Series PF Dimensions: Remote Type Unit For ir PF50, B.6 5 (.) x ø x Port size x ø. Flow direction Connector pin numbers Pin no. Pin description DC(+) NC/nalog output DC( ) OUT Output specifications Output for monitor unit only Output for monitor unit + nalog output 5 (mm) B 6 7 PF5, 5, 55 PFM B.6 (.) PFMV PF PFW 5 PFD x ø x Port size Be sure to allow straight pipe length that is minimum 8 times the port size upstream and downstream of the switch piping. 0 Flow direction Output specifications Output for monitor unit only Output for monitor unit + nalog output 8 58 (mm) B 6 7 IF ZS-7- Lead wire with M connector : Brown : Black M : White : Blue ø5 (8.6) (000) (5) Lead Wire Specifications Nominal cross section WG Conductor Insulator Sheath O.D. Material O.D. Color Material pprox. 0.7 mm Cross-linked vinyl pprox.. mm Brown, White, Black, Blue Oil-resistant vinyl Finished O.D. ø 07

14 Series PF Dimensions: Remote Type Monitor Unit For ir PF- Panel mount adapter type SMC FLOW SWITCH UNIT RESET SET 6. x 7. (=.6) 8 x M Panel fitting dimensions or more View Note) R.5 or less nalog output to 5 VDC Note) Decide the length of taking into account the size of terminal you use. The applicable panel thickness is to. mm. to 0 m DC 5 0 nalog output [V] nalog output [m] Min. rated flow rate value Max. rated flow rate value Instantaneous flow rate [L/min] Min. rated flow rate value Max. rated flow rate value Instantaneous flow rate [L/min] Normal condition Standard condition Part no. Min. rated flow Max. rated flow Min. rated flow Max. rated flow rate value [L/min] rate value [L/min] rate value [L/min] rate value [L/min] PF50-- PF550-- PF5-- PF5-- PF Normal condition Standard condition Part no. Min. rated flow Max. rated flow Min. rated flow Max. rated flow rate value [L/min] rate value [L/min] rate value [L/min] rate value [L/min] PF50-- PF550-- PF5-- PF5-- PF

15 For ir Digital Flow Switch Series PF Dimensions: Remote Type Monitor Unit For ir (-channel Flow Monitor) PF00, 0 0. (7.5) L/min L OUT SMC SET FLOW CH 6.8 Front protective cover + Panel mount adapter connector (option) () Panel fitting dimensions 55 or more 55 or more 6. PFM Front protective cover Waterproof seal Panel Panel mount adapter PFMV PF PFW PFD IF R or less pplicable panel thickness: 0.5 to 8 mm 09

16 Series PF Dimensions: Remote Type Monitor Unit For ir (-channel Flow Monitor) CH connector port connector (P x ) Connector (option) r e w q Power supply/ Output connector port Pin no. q w e r Terminal DC+ N.C. DC IN: to 5 V Connector no. Cable wire color Brown Not used Blue White Power supply/output connector (8P) q w e r t y u i Pin no. q w e r t y u i Terminal DC (+) DC ( ) CH_OUT N.C. CH_OUT CH_OUT CH_OUT N.C. Power supply/output connector (accessory) Pin no. 8 Yellow N.C. 7 Green CH_OUT 6 Red CH_OUT 5 Gray CH_OUT White N.C. Black CH_OUT Blue DC( ) Brown DC(+) 000 Cable Specifications No. of cable wire Nominal cross-sectional area Conductor Dimension Insulator Dimension Material Sheath O.D mm pprox. 0.5 mm pprox. 0.9 mm Brown, White, Blue, Black, Gray, Red, Green, Yellow Heat-resistant polyethylene.8 mm 00

17 For ir Digital Flow Switch/High Flow Rate Type Series PF RoHS Integrated Display Type Flow rate range to 000 L/min 00 to 6000 L/min 600 to 000 L/min Symbol 0 0 Specifications PF7 High flow rate type Port specifications Port size / 000 H N F Rc NPT G Conforming to ISO8-. How to Order Port size Output specifications Flow rate (L/min) 8 pplicable model PF70H PF706H PF7H Lead wire (Refer to page 07.) N M Lead wire with M connector ( m) Without lead wire NPN open collector output + nalog output ( to 5 V) NPN open collector output + nalog output ( to 0 m) PNP open collector output + nalog output ( to 5 V) PNP open collector output + nalog output ( to 0 m) Switching of switch output and accumulated pulse output is possible with NPN or PNP open collector outputs. Unit specifications M Made to Order X795 Wide range Refer to page 0 for details. With unit switching function Note) Fixed SI unit Note) Note) Under Japan's new Measurement ct, this is only for overseas sales (SI units are to be used inside Japan). Note) Fixed units: Instantaneous flow rate: L/min ccumulated flow: L, m, m x 0 For details about the Flow Switch Precautions, refer to pages 95 and 95. For details about the Specific Product Precautions, refer to the Operation Manual at SMC website. Model Measured fluid Detection type Rated flow range Note ) Minimum set unit Note ) Note ) Instantaneous flow rate Display units ccumulated flow Operating pressure range Proof pressure Pressure loss ccumulated flow range Note ) ccuracy Note ) Repeatability Pressure characteristics Temperature characteristics Output ccumulated Note 5) specifications pulse output Response time Hysteresis Power supply voltage Current consumption Enclosure Operating temperature range Withstand voltage Insulation resistance Noise resistance Standards and regulations Weight Port size (Rc, NPT, G) Environment Switch output Note 5) nalog output Note 6) PF70H 50 to 000 L/min 5 L/min PF706H Dry air, Nitrogen Heater type 00 to 6000 L/min L/min, CFM L, m, m x 0, ft, ft x 0, ft x to.5 MPa.5 MPa 0 kpa (at maximum flow rate) 0 to 9,999,999,999 L ±.5% F.S. (0.7 MPa, at 0 C) ±.0% F.S. (0.7 MPa, at 0 C), ±.0% of F.S. in case of analog output ±.5% F.S. (0. to.5 MPa, 0.7 MPa reference) ±.0% F.S. (0 to 50 C, 5 C reference) Flow rate per pulse: 00 L/pulse, 0.0 ft NPN or PNP open collector /pulse ON time per pulse width: 50 msec Output voltage: to 5 V; Min. load impedance: 00 kω (Output impedance: kω) Output current: to 0 m; Max. load impedance: 50 Ω sec. or less Hysteresis mode: Variable (can be set from 0); Window comparator mode: (can be set from 0 to % F.S.) VDC ±0% 50 m or less IP65 0 to 50 C (with no freezing and condensation) 000 VC for minute between terminals and housing 50 MΩ or more (500 VDC measured via megohmmeter) between terminals and housing 000 Vp-p, Pulse width µs, Rise time ns CE, RoHS. kg (without lead wire) / 0 L/min PF7H 600 to 000 L/min NPN open collector Max. load current: 80 m; Max. applied voltage: 0 V; Internal voltage drop: V or less (with load current of 80 m) PNP open collector Max. load current: 80 m; Internal voltage drop:.5 V or less (with load current of 80 m). kg (without lead wire).0 kg (without lead wire) Note ) Flow rate display can be switched between the basic condition of 0 C, 0. kpa and the standard condition (NR) of 0 C, 0. kpa, and 65% RH. Note ) For digital flow switch with unit switching function. (Fixed SI unit [(L/min, or L, m or m x 0 )] will be set for switch type without the unit switching function.) Note ) ccumulated flow rate is reset when the power supply turns OFF. It is possible to select a function that holds the accumulated value so it is not reset. In such cases, data is written on EEPROM (electrically erasable programmable read-only memory) at approximately four-minute intervals. When using, please take into consideration that the EEPROM writing is guaranteed up to million times (four minutes x million = million 7.9 years). Note ) The high flow rate type is CE marking compatible; however, the linearity with applied noise is ±5% F.S. or less. Note 5) Switch output and accumulated pulse output selections are made using the button controls. Note 6) The analog output operates only for instantaneous flow rate, and does not operate for accumulated flow. Note 7) For details about wiring and thread type, refer to the Operation Manual that can be downloaded from SMC website ( 0 PFM PFMV PF PFW PFD IF

18 Series PF Flow Characteristics (Pressure Loss) PF70H 0 PF706H 0 PF7H 0 Pressure loss (kpa) 0 Pressure loss (kpa) 0 Pressure loss (kpa) Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) Wetted Parts Construction q w e y r t Flow direction Parts list No. 5 6 Description ttachment Seal Mesh Body Spacer Material luminum alloy HNBR Stainless steel luminum alloy PPS PBT Note nodized nodized Internal Circuits and Wiring Examples -8/9 8: NPN ( output) + nalog voltage output 9: NPN ( output) + nalog current output Brown DC(+) -68/69 68: PNP ( output) + nalog voltage output 69: PNP ( output) + nalog current output Brown DC(+) Black OUT U+ VDC White nalog output Blue DC( ) Black OUT U+ VDC White nalog output Blue DC( ) ccumulated pulse output wiring examples -8/9-68/69 Black OUT Max. 0 V 80 m or less Brown Blue Black OUT 80 m 0 V or 0 V or 50 msec 50 msec 50 msec 50 msec 0

19 For ir Digital Flow Switch/High Flow Rate Type Series PF Dimensions PF70H, 706H, 7H B D E F U P SET MODE DOWN 60 C x G Connector pin numbers Pin no. Pin description DC(+) nalog output DC( ) OUT (.) 0 x I thread depth J H Be sure to allow straight pipe length that is minimum 8 times the port size upstream and downstream of the switch piping. Model B C D E F G H I J PF70H Rc, NPT, G 6 M5 x PF706H Rc /, NPT /, G / 6 M6 x 9 PF7H Rc, NPT, G 56 M6 x 9 ZS-7- Lead wire with M connector : Brown : Black M nalog output to 5 VDC : White : Blue ø5 (8.6) (000) (5) to 0 m DC Lead Wire Specifications Nominal cross section WG Conductor Insulator Sheath O.D. Material O.D. Color Material pprox. 0.7 mm Cross-linked vinyl pprox.. mm Brown, White, Black, Blue Oil-resistant vinyl Finished O.D. ø PFM PFMV PF PFW PFD IF 5 0 nalog output [V] nalog output [m] Min. rated flow rate value Max. rated flow rate value Instantaneous flow rate [L/min] Min. rated flow rate value Max. rated flow rate value Instantaneous flow rate [L/min] Part no. PF70H--8 PF70H--68 PF706H--8 PF706H--68 PF7H--8 PF7H--68 Min. rated flow rate value [L/min] Max. rated flow rate value [L/min] Part no. PF70H--9 PF70H--69 PF706H--9 PF706H--69 PF7H--9 PF7H--69 Min. rated flow rate value [L/min] Max. rated flow rate value [L/min]

20 Series PF7 Made to Order Please contact SMC for detailed dimensions, specifications and lead times. Made to Order Wide Range Specifications -X795 One flow switch can measure small flows to large flows by enlarging the lower limit of the flow rate measurement range. Dynamic range :00 (Lower limit of the flow rate measurement: Upper limit of the flow rate measurement) How to Order Integrated Display Type Symbol Flow rate range 0 to 000 L/min 60 to 6000 L/min 0 to 000 L/min High flow rate type Port specifications Rc Port size / PF7 0 H 0 8 Port size Output specifications Flow rate (L/min) pplicable 8 NPN open collector output + nalog output ( to 5 V) model Switching of switch output and accumulated pulse output is possible PF70H with NPN outputs. PF706H PF7H M X795 Unit specifications M Fixed SI unit Note) Note) Fixed units: Instantaneous flow rate: L /min ccumulated flow: L, m, m x 0 Lead wire (Refer to page 07.) Lead wire with M connector ( m) N Without lead wire Specifications Model PF70H PF706H PF7H Rated flow range 0 to 000 L/min 60 to 6000 L/min 0 to 000 L/min Displayable range 0 to 05 L/min 0 to 6050 L/min 80 to 050 L/min Settable range 0 to 05 L/min 0 to 6050 L/min 0 to 050 L/min Dimensions The PF7H series dimensions are the same as the standard models. Refer to page 0. B 0

21 For ir Digital Flow Switch Series PF Functions Refer to the operation manual for information on setting and operating. Flow rate measurement selection Instantaneous flow rate and accumulated flow rate can be selected. flow rate of up to can be accumulated. The accumulated flow rate is reset when the power supply turns OFF. (With PF7H, it is possible to select a holding function.) Unit switching For ir Display CFM = ft /min Instantaneous flow rate L/min CFM x 0-, CFM x 0- High Flow Rate Type (For ir) Display Instantaneous flow rate L/min CFM ccumulated flow For Water/High Temperature Fluid Type (For Water) Display Instantaneous flow rate ccumulated flow L/min L GPM gal (US) GPM = gal (US)/min Note) Fixed SI unit (L/min, or L, m, m x 0 ) will be set for the type without the display unit switching function. Flow rate conversion Normal condition: 0 C, 0. kpa, dry air Standard condition: 0 C, 0. kpa, 65%RH (NR) Switchable between these conditions. Flow rate measuring unit confirmation This function allows for the confirmation of the accumulated flow rate when instantaneous flow rate is selected and to confirm the instantaneous flow rate when accumulated flow rate is selected. Keylock This function prevents accidental operations such as changing the set value. ccumulation clearance This function clears the accumulated value. Initialization of setting (only for Series PF7H) This function restores the setting to the original state, just as it had been shipped from the factory. L ft x 0- ccumulated flow L, m, m x 0 ft, ft x 0, ft x 0 6 Output types Real-time switch output, accumulated switch output, or accumulated pulse output can be selected as an output type. Real-time switch output OUT OUT is also the same. "P" Output mode YES NO YES "n" Note ) Output mode is set to inverted output at the factory before NO shipment. ccumulated switch output OUT "P" Output mode ON OFF ON P- ccumulated flow Hysteresis mode ON OFF P- P- Instantaneous flow rate Window comparator mode H : Hysteresis H H ON OFF P- P- Instantaneous flow rate Hysteresis mode ON OFF n- n- Instantaneous flow rate Window comparator mode H : Hysteresis H H ON OFF n- n- Instantaneous flow rate Note ) OFF "n" n- ccumulated flow Note ) Output mode is set to inverted output at the factory before shipment. ccumulated pulse output "P" ON OFF PFM PFMV PF PFW PFD IF OUT Output mode 50 ms ON Note ) OFF "n" Note) For a digital flow switch with an unit switching function. (Fixed SI unit [L/min, or L, m or m x 0 ] will be set for switch types without an unit switching function.) Refer to the specifications of the display unit for the flow rate value per pulse. 05

22 Series PF Functions Copy function (PF00, 0 only) Information to be copied is: Flow rate range Display mode Display unit (Only available when the unit specification is nil.) Output method Output mode Flow rate display unit (available with PF0 only) Flow rate value Peak hold, Bottom hold display function (PF00, 0 only) The maximum or minimum value can be held in the case where the instantaneous flow rate display mode is selected during the initial setting. The hold value is reset when the power supply turns OFF or the hold is released. Error correction LED display Contents ction For PF00, 0 LED display Contents Over current is flowing to the load of a switch output. Internal data error. Internal data error. Internal data error. Internal data error. Internal data error. The flow rate is over the flow rate measurement range. ction Eliminate the cause of the over current by turning off the power supply, and then turn on it again. Please contact SMC for investigation. Turn off the power supply and then turn on it again. Use an adjustment valve, etc. to reduce the flow rate until it is within the flow rate range. Note ) Note ) Note ) Note ) Note ) Note ) Note ) current of more than 80 m is flowing to OUT. current of more than 80 m is flowing to OUT. The set data has changed for some reason. The flow rate is over the flow rate measurement range. Check the load and the wiring for OUT. Check the load and the wiring for OUT. Perform the RESET operation, and reset all the data again. Use an adjustment valve, etc. to reduce the flow rate until it is within the flow rate range. Note ) pplicable to monitor integrated type and remote type except the PF7H series. Note ) pplicable to the PF7H series only. Channel select function (PF00, 0 only) Every pushing the button, channel selection... is available. The flow rate measurement of each selected channel is shown in the monitor unit. Channel scan function (PF00, 0 only) Changes displaying the channel shown every about seconds and its detected flow rate. Detection principle of digital flow switch for air heated thermistor is installed in the passage, and fluid absorbs heat from the thermistor as it is introduced to the passage. The thermistor's resistance value increases as it loses heat. Since the resistance value increase ratio has a uniform relationship to the flow velocity, the flow velocity can be detected by measuring the resistance value. To further compensate the fluid and ambient temperature, the temperature sensor is also built into the switch to allow stable measurement within the operating temperature range. Temperature compensation element Flow velocity detecting element Contact SMC regarding the specifications for clean environment. This flow switch uses L/min as the flow rate indicator unit. The mass flow is converted and displayed under the conditions of 0 C and 0. kpa and 0 C and 0. kpa. 06

23 SET U P For ir Digital Flow Switch Series PF Option When only optional parts are required, order with the part numbers listed below. Lead wire with M connector Part no. Qty. Lead wire length ZS-7- m e-con connector Part no. Qty. ZS-8-C- e-con connector PF7 (H) Lead wire with M connector PF0 Lead wire with M connector PF5 In addition to the lead wire assembly shown above, those listed below (female contact) can be connected. However, they cannot be connected with an e-con connector because the diameter of the core wire and its coverage diameter are different. For details, contact each manufacturer. Contact each manufacturer for details including RoHS compliance. Connector size Pin no. Manufacturer pplicable series M Correns Corp. OMRON Corp. Yamatake Corp. HIROSE ELECTRIC CO., LTD. DDK Ltd. V-D XS P5-I HR CM0-8DPS In addition to the connectors shown above, those listed below (e-con) can be connected. Manufacturer Model Sumitomo M Limited FL Tyco Electronics Japan G.K OMRON Corp. XN-0 PFM Cable Specifications No. of cable wire Nominal cross-sectional area Conductor Dimension Insulator Dimension Material Sheath O.D. WG 0.7 mm. mm Brown, White, Blue, Black Heat-resistant and oil-resistant lead-free PVC.00 mm PFMV PF PFW PFD IF Panel mounting Pin no. Description ZS--E Panel mount adapter, B Note With mounting bracket Part no. ZS-6-B ZS-6-C Description Note Panel mount adapter With waterproof seal, mounting screw Front protective cover + Panel mount adapter With waterproof seal, mounting screw Panel PF Front protective cover Panel mount adapter Panel mount adapter B Mounting bracket (accessory) PF0 Waterproof seal (accessory) Panel Mounting screw (M x 8 L) (accessory) Panel mount adapter 07

24 Related Product Multi Counter/Series CEU5 How to Order CEU5 Output transistor mode P NPN open collector output PNP open collector output External output B Power supply voltage D RS-C RS-C + BCD 00 to 0 VC VDC COM COM COM B DCV GND F.G. R.S. HOLD BNK BNK MULTI COUNTER:CEU5 COUNT PRESET FUNC. LEFT MODE C00~0VCOM OUTOUTOUTOUTOUT5S.STOP RD UP DOWN SEL. SD RIGHT SG SET RS-C Connection Method Connection with the Digital Flow Switch (Series PF) COM COM COM B DCV GND F.G. R.S. HOLD BNK BNK MULTI COUNTER:CEU5 UP COUNT PRESET FUNC. LEFT DOWN RIGHT BCD MODE SEL. SET C00~0VCOM OUTOUTOUTOUT OUT5S.STOP RD SD SG RS-C OUT to OUT 5 RS-C OUT to OUT0 (Bank switching) Binary output ( points) Possible to measure accumulated pulse output of a Digital Flow Switch by an unit of 00 L (litter) and 0 ft (cube foot) using the pre-scaling function* of the multi counter (When inputting to the multi counter, Up or Down is selected as input method.) Possible to take advantage of all CEU5 functions using preset mode and function mode. The set value is calculated by selecting manual mode. By multiplication by, then, per pulse value is set. <Connection with other manufacturers encoders> Possible to switch multi counter side input method to -phase or Up/Down. Possible to connect to an encoder if the output method is Open Collector. When selecting UP or DOWN, phase to COM input is counted toward addition direction, phase B to COM input is counted toward subtraction direction. Caution When connecting the CEU5 with an encoder from another manufacturer, please thoroughly confirm the specification beforehand. Please note that the CEU5 may not count normally depending on the output method, output frequency and connecting cable length, etc. of the encoders. Regarding connection with scale cylinder, refer to Stroke Reading Cylinder and Counter Series CE in the Best Pneumatics No.. 08