ATOM miniature encoder system

Transcription

1 L70D ATOM miniature encoder system ATOM is the world s first miniature encoder with filtering optics, providing improvements in dirt immunity, signal stability and reliability for linear and rotary applications. ATOM features a number of other advances that help maintain signal stability, including integral Auto Gain Control and Auto Offset Control, along with a highly reliable IRED light source, making the product suitable for use in applications demanding quality and dependability. The miniature readhead is available in formats: hiflex cable output or FlexiblePrinted Circuit (FPC) output. The FPC version helps reduce overall package size, with a reduced Zheight and easy cable routing. ATOM is available with a range of highaccuracy optical linear and rotary scales, including conventional glass spars, unbreakable stainless steel tape scales and glass discs. Installation has been simplified by an intuitive setup LED on the readhead that indicates signal level. Optical reference mark phasing and incremental signal optimisation can be achieved with the simple press of a button. ATOM is suitable for use in a variety of applications that require compact size, including laser scanners, CMM arms, semiconductor manufacturing, compact linear motors/motion stages, small DDR torque motors, galvanometers and microscope stages. ATOM miniaturisation without compromise. Miniature package:. mm x.7 mm x. mm (7. mm x.7 mm x. mm for FPC version) Highest signal stability and dirt immunity in its class due to filtering optics Longterm stability provided by integral Auto Gain Control and Auto Offset Control Low SubDivisional Error (SDE) and jitter Easy installation and diagnostics using the setup LED on the readhead Fast, simple calibration at the push of a button Autophase optical reference mark Available in µm and 0 µm scale pitch versions Analogue output direct from the readhead Multiple interpolation options, with resolutions to nm Range of high accuracy rotary and linear scales

2 System features High performance u Need higher speed? ATOM is the fastest encoder in its class, with maximum speeds up to m/s and a range of highspeed interpolation options for digital versions. u Need higher accuracy? ATOM offers linear tape scales with specified overall accuracy to ± C, without the need for point compensation that competitor encoders require. u Need smoother velocity control? Reduce velocity ripple, improve scanning performance, reduce blur on vision systems and image capturing all thanks to ATOM s superior optical scheme and integral Auto Offset Control (AOC). u Need improved positional stability and repeatability? ATOM has low noise (jitter), allowing users to increase servoloop gain without instability, whilst reaping other dynamic performance benefits such as faster settling times and higher acceleration. Error (µm) 0 ±. µm Position Typical accuracy for a m length of RTLF µm scale Lissajous stability ATOM features a miniaturized version of Renishaw s unique filtering optics that are used in the TONiC encoder range. This optical scheme is tuned to a specific spatial frequency, so it rejects other harmonics, including those caused by dirt or other contaminants. The result is a Lissajous with high purity, that retains its fidelity even when the scale is exposed to contamination: ideal for applications where reliability is critical. Product range u µm and 0 µm readheads with highflex cable: for general purpose applications. Superior quality cable tested to million flex cycles. u µm and 0 µm readheads with FPC cable: side exit FPC cable allows the smallest overall package size. u Stainless steel tape scale (RTLF): highaccuracy scales with graduations directly marked onto the steel tape surface. Available on reels for cuttosuit flexibility. u Glass linear spars (RCLC): conventional glass scales, available in lengths up to 0 mm. u Glass discs (RCDM): highaccuracy rotary scales with outer diameters down to 7 mm.

3 ATOM interface options ATOM readheads are available in three versions all giving industry standard analogue output: u High flex cable terminated with a way Dtype connector for highvolume users requiring analogue outputs. NOTE: A CAL button is not included on this option. Refer to installation guide for details on how to calibrate. u High flex cable terminated with a Ttype interboard connector for use with ACi/Ri/Ti interfaces. u FPC connector for use with ACi interface or direct connection to user electronics. ACi interfaces are a range of high performance, miniature, open interpolator subsystems. They bring unparalleled priceperformance benefits to today s motion systems that need fine resolution coupled to high speed performance in an ultra compact, open format, small footprint solution and have provision for calibrating the system. Digital interpolation down to nm at up to MHz clocked output is available. FPC or cable input versions available. Ri interfaces are contained within an industry standard way Dtype connector shell, including CAL button. They offer digital interpolation down to 0 nm (clocked) and 0. µm (nonclocked). Analogue variants are also available. Ti interfaces are designed for applications that require higher speed, lower SDE, digital interpolation down to nm resolution and include a CAL button. Clocked outputs have been optimised for speed and performance at all resolutions for industrystandard controllers. Analogue variants are also available.

4 ATOM readhead dimensions Dimensions and tolerances in mm Setup LED* Readhead datum faces. (Cabled version).. (FPC version). (0 µm version). ( µm version) Readhead / scale orientation. No hole here on FPC variant. Datum face off mounting holes Ø. min through. Ø max FPC cable.. min >R Dynamic bend radius >R Static bend radius Ø. max Identification marks for readhead manufacture only. Notches will vary depending on readhead type. *On FPC variants the Setup LED cutout is circular. Maximum speed 0 µm system m/s µm system m/s Readhead output signals JST = (on interboard) Interboard connector (T) FPC (F) way Dtype (D) Function Signal Colour Pin Pin Pin Pin Power* V Brown,, White,,,, Incremental Cosine V Red Blue Sine V Yellow Green 7 Violet V 0 Grey Setup V X Clear Remote CAL CAL Orange Shield Screen Cable ferrule Cable ferrule Readhead body Case Do not connect,,, 7, 7, 7,, *All power connections can be used either to minimise voltage drop down the cable or incorporate voltage sensing. = Only available on interboard connector Pin Pin Pin JST connector Interboard connector FPC connection way Dtype plug

5 RTLF tape scale installation drawing Dimensions and tolerances in mm 0 µm version (Yaw tol. ± ) 0. (Roll tol. ± ).0 ±0. Setup LED µm version (Yaw tol. ±0. ) Scale datum edge Datum clamp FPC cable (Pitch tol. ± ) 0. Scale thickness 0. For detailed installation drawings refer to Forward direction of readhead relative to scale Rideheight (for calibration):. ±0.0 (0 µm version). ±0.0 ( µm version) Operating rideheight:. ±0. (0 µm version). ±0.0 ( µm version) Technical specifications Material Form Scale pitch Hardened and tempered martensitic stainless steel fitted with a selfadhesive backing tape 0. mm x mm (H x W) (including adhesive) μm and 0 μm Datum fixing Adhesive datum clamp (A00) secured with Loctite Accuracy Coefficient of thermal expansion Length Mass Autophase optical reference mark repeatable to unit of resolution throughout specified speed and temperature range Customer deselectable reference marks at 0 mm spacing in the centre of scale for lengths <0 mm 0 μm (high accuracy) ± μm/m 0 μm ± μm/m μm ± μm/m ~. µm/m/ C* mm to 0 mm in mm increments 0 mm to m in 0 mm increments = Measuring length = Overall length 7 mm. g/m *Substrate coefficient of thermal expansion does not need to match that of the scale. = Maximum recommended axis length m for µm systems. For further information contact your local Renishaw representative.

6 RCLC glass spar installation drawing Dimensions and tolerances in mm End reference mark head orientation 0 µm version (Yaw tol. ± ) 0. Mid reference mark head orientation Readhead datum face µm version (Yaw tol. ±0. ) 0. L/ (Roll tol. ± ) 0.. ±0. Setup LED Scale datum edge. ±0. A00 Reference mark. Adhesive datum clamp ( length width ) FPC cable Scale thickness. ±0. (Pitch tol. ± ) 0. Forward direction of readhead relative to scale For detailed installation drawings refer to Forward direction of readhead relative to scale Rideheight (for calibration):. ±0.0 (0 µm version). ±0.0 ( µm version) Operating rideheight:. ±0. (0 µm version). ±0.0 ( µm version) Technical specifications Material Form Scale pitch Datum fixing Soda lime glass. mm x. mm (H x W) (including adhesive) μm and 0 μm Fillet of adhesive (A0) on one side of the scale Either mid or one end of travel, determined by orientation of the readhead Accuracy ± µm Coefficient of thermal expansion Length ~ µm/m/ C Overall length (L) Measuring length 7 Mass. g/m

7 RCDM rotary disc installation drawing Dimensions and tolerances in mm Centre of alignment band Setup LED. ± 'F' Glass disc 'A' ± 'E' Forward direction of disc (increasing count) Alignment band D D Centre of alignment band FPC cable (Roll tol. ± ) 0. Black film on reverse of disc underneath incremental and reference track. See installation guide for more details. D (Pitch tol. ± ) 0. *Operating rideheight:. ±0. (0 µm version). ±0.0 ( µm version) Rideheight (for calibration)*:. ±0.0 (0 µm version). ±0.0 ( µm version). ±0. For detailed information see ATOM rotary installation guide. Disc size Line count µm version 0 µm version D D D Optical diameter A Radial tolerance E µm version 0 µm version Longitudinal tolerance F µm version 0 µm version Technical specifications Material Form Graduation accuracy Soda lime glass. mm thick Single reference mark Disc size Graduation accuracy (arc seconds) Coefficient of thermal expansion 7 ~ μm/m/ C Nominal outer diameter 0 μm 7,,, 7, 0,, 0,,, μm 0,, 0,,,

8 ACi interface dimension drawing FPC variant FPC input connector.. Dimensions and tolerances in mm JST output connector*. Pin 7.7 Pin. mounting columns. x CAL pads mounting holes M through.. * way JST, GH crimp connector.. mm pitch. Suitable for cable size to 0 AWG. Cable input variant coming soon. For more details contact your local Renishaw representative. Provisional speed µm system Greyed out options coming soon 00 ( µm) 000 (0. µm) 000 (0. µm) Maximum speed (m/s) 00 (0. µm) 00 (0. µm) 000 (0 nm) 00 ( nm) 00 ( nm) Lowest recommended counter input frequency (MHz) µm system 00 ( µm) 000 ( µm) 000 (0. µm) Maximum speed (m/s) 00 (0. µm) 00 (0. µm) 000 (0. µm) 00 (0 nm) 00 ( nm) Lowest recommended counter input frequency (MHz) Angular speed Angular speed depends on disc optical diameter use the following equation to convert to rev/min. Angular speed (rev/min) = V x 00 x 0 p D Where V = maximum linear speed (m/s) and D = Optical diameter

9 Ri interface Dimension drawing Dimensions and tolerances in mm CAL/AGC push button switch access hole Ø. 0 UNC x. 0 R> Dynamic bend radius R> Static bend radius min Speed Clocked outputs The medium resolution Ri00, Ri00 and Ri000 interfaces have clocked outputs. Customers must ensure they comply with the lowest recommended counter input frequency. 00 (0. µm) 00 (0. µm) Maximum speed (m/s) µm system 0 µm system 000 (0 nm) 00 (0. µm) 00 (0. µm) 000 (0. µm) Lowest recommended counter input frequency (MHz) Nonclocked outputs The low resolution Ri000, Ri00 and Ri000 interfaces have nonclocked outputs. Interface type µm system 0 µm system Maximum speed (m/s) Interface type Maximum speed (m/s) Lowest recommended counter input frequency (MHz) 000 ( µm) 000 (. µm) 00 ( µm) 000 ( µm) 000 ( µm) 00 ( µm) Encoder velocity (m/s) Resolution (µm) x safety factor 000 (0. µm) 000 ( µm) Analogue outputs 0 µm system m/s (db) µm system m/s (db) Angular speed Angular speed depends on disc optical diameter use the following equation to convert to rev/min. Angular speed (rev/min) = V x 00 x 0 p D Where V = maximum linear speed (m/s) and D = Optical diameter

10 Data sheet Ti interface Dimensions and tolerances in mm Dimension drawing 7 Diagnostic LED (Ti000 TiKD) Requires mm hex key CAL/AGC push switch access hole Ø.. 0 R> Dynamic bend radius R> Static bend radius min Cover plate 0 UNC x Speed µm system Lowest recommended counter input frequency (MHz) Ti000 µm Ti00 µm Ti µm Ti00 0. µm Ti00 0. µm Maximum speed (m/s) Ti000 0 nm Ti00 nm Ti00 nm Ti000 nm TiKD nm TiKD nm Analogue output (db) 0 µm system Lowest recommended counter input frequency (MHz) Ti000 µm Ti00 µm Ti000 µm Ti00 0. µm Ti00 0. µm Maximum speed (m/s) Ti µm Ti00 0 nm Ti00 nm Ti000 nm TiKD nm TiKD nm Analogue output (db) Angular speed Angular speed depends on disc optical diameter use the following equation to convert to rev/min. Angular speed (rev/min) = V x 00 x 0 p D Where V = maximum linear speed (m/s) and D = Optical diameter

11 Interface output signals Digital (Ti and Ri interfaces) Function Signal Pin Power* V 7, Incremental signals A, Ri connector B Z Ti connector Alarm E Setup X Shield Case Do not connect, *All power connections can be used either to minimise voltage drop down the cable or incorporate voltage sensing. The alarm signal can be output as a line driver signal or state. Please select the preferred option at time of ordering. Analogue (Ti and Ri interfaces) Function Signal Pin Power* V,, Incremental Cosine V Sine V V 0 Setup V X Remote CAL CAL Shield Case Do not connect 7,, *All power connections can be used either to minimise voltage drop down the cable or incorporate voltage sensing. Digital (ACi interface) Function Signal FPC input Pin Signal JST output Pin Pin Pin Power* V 7,,,, V ACi FPC input connector Incremental V A Pin Pin V B V 0 Z ACi JST output connector Setup V X X 7 Remote CAL CAL CAL Shield Do not connect, *All power connections can be used either to minimise voltage drop down the cable or incorporate voltage sensing.

12 General specifications Power supply V ±% ATOM readhead typically <0 ma ATOM with ACi typically <0 ma ATOM with Ri typically <0 ma ATOM with Ti typically <0 ma NOTE: Current consumption figures refer to unterminated systems. For analogue outputs a further ma in total will be drawn when terminated with R. For digital outputs a further ma per channel pair (eg A, A) will be drawn when terminated with R. Power from a V dc supply complying with the requirements for SELV or standard IEC/BS/EN 00. Ripple 0 mvpp maximum@frequency up to 00 khz Temperature Storage C to 70 C Operating 0 C to 0 C Humidity Rated up to 0 C, % relative humidity (noncondensing) Sealing Cable variant IP0 Ri IP FPC variant IP (with lid fitted) Ti IP Acceleration (scale and readhead) Operating 00 m/s² BS EN 007: 0 Shock (scale and readhead) Operating 00 m/s², ms, ½ sine BS EN 007: 0 Vibration Operating 0 m/s² Hz to 00 Hz, axes BS EN 00: 0 Mass FPC readhead <. g Cable readhead g Cable < g/m ACi <0 g Ri 70 g Ti 0 g EMC compliance Cable variant BS EN : FPC variant and ACi Designed as system components and to be compliant with EMC regulations for products of their type. Care must be taken with shielding and grounding arrangements to ensure EMC performance once installed. It is the system integrator s responsibility to implement, test and prove EMC compliance for the whole machine. Environmental Readhead cable FPC cable Compliant with EU Directive //EU (RoHS) core, high flex, EMI screened cable, outside diameter. mm maximum Flex life > x cycles at mm bend radius, maximum length. m. (Extension cable up to m when using Renishaw approved extension cable) UL recognised core, 0. mm pitch, maximum exposed conductor length. mm, maximum length m Connector options Cable variants Interboard connector compatible with the Ri/Ti series interfaces way, Dtype connector FPC core, 0. mm pitch Typical SDE (analogue) 0 µm version <± nm µm version <±7 nm Electrical connections Grounding and shielding Recommended signal termination FPC readhead FPC cable ACi/customer electronics V Output signals Digital outputs Interface A B Z Customer electronics Shield (optional) Cable Z 0 = R R For more information on FPC refer to installation guide. A B Z Standard RSA line receiver circuitry Cable readhead Connector/ interface Customer electronics V Output signals Remote CAL operation CAL Remote operation of the CAL is possible via the CAL pin. For applications where no interface is used, remote operation of CAL is essential. Shield Analogue outputs IMPORTANT: The shield should be connected to the machine earth (Field Ground). NOTE: Maximum cable length between interface and customer electronics is m for Ri and 0 m for Ti depending on clocked output. V V V 0 V V R

13 Interface output specifications Analogue output signals All ATOM readheads and Ri and Ti analogue interfaces Incremental channels V and V differential sinusoids in quadrature, centred ~. V (0 phase shifted) 0/ µm Digital output signals Form Square wave differential line driver to EIA RSA Incremental channels A and B in quadrature (0 phase shifted) Signal period Resolution (V )(V ) 0.7 to. Vpp with green LED indication (readhead) and R termination. 0 A (V )(V ) B Reference Vpp Reference (V 0 )(V 0 ) 0 (nom) Bidirectionally repeatable Differential pulse V 0 centred on Z Synchronised pulse Z, duration as resolution (after CAL) Setup (ACi, Ri and Ti analogue) During normal operation. V (nom) Voltage at X and V X 0 0 0% Signal level 70% 0% Between 0% and 70% signal level, X and V X is a duty cycle, µm duration. Setup* (Ti digital) Voltage at X 0 0 Signal level 0% Setup signal voltage proportional to incremental signal amplitude Alarm = Differential line driven output Time spent at. V increases with incremental signal level. At >70% signal level V X is nominal. V. E > ms During CAL routine Interface model Alarm asserted when Interface model Alarm asserted when Voltage at X and V X. V. V >70% signal >70% signal Normal operation Start of calibration routine Incremental calibration End of incremental calibration routine Reference mark calibration End of calibration routine Normal operation Ri000 Ri00 Ri000 Ri00 Ri00 Ri000 <0% signal or overspeed <% signal or >0% signal state alarm (option) Differentially transmitted signals forced open circuit for > ms when alarm conditions valid. Ti <% signal or >% signal or overspeed *Setup signals as shown are not present during calibration routine = Inverse signals not shown for clarity

14 ATOM readhead ATOM F Scale period = μm = 0 μm Head type F = FPC T = Cabled: interboard connector (for use with Ri and Ti interfaces) D = Cabled: Dtype connector Cable length 000 = FPC 0 = 0 mm 00 = 00 mm 00 = 00 mm 0 = 00 mm 0 = 00 mm Head gain setting Head gain setting RTLF (tape scale) RCLC (glass scale) 0 µm rotary discs <, 7, 0 >0 µm rotary discs 0 0,, 0 RTLF tape scale Scale type Length Increments Part number (where xxxx is the length in cm) Head gain setting 0 µm (high accuracy) mm to 0 mm 0 mm to m mm 0 mm A0xxxx 0 0 µm mm to 0 mm 0 mm to m mm 0 mm A07xxxx 0 µm mm to 0 mm 0 mm to m mm 0 mm A0xxxx 0 RCLC glass scale Length µm 0 µm Head gain setting A0 A00 0 A00 A000 A0 A00 0 A00 A000 0 A0 A00 A0 A0 0 A00 A00 RCDM rotary discs (0 µm version) RCDM rotary discs ( µm version) Diameter Part number Head gain setting Diameter Part number Head gain setting 7 A007 0 A00 A00 A0 A00 0 A00 7 A007 A0 0 A000 A0 A00 A0 0 A000 A00 A00 A0

15 ACi interface Series Interpolation factor Interpolation factor Ri interface Analogue: Digital: Series Ri Interpolation factor Interpolation factor µm system µm 0. µm 0. µm 0. µm 0. µm 0 nm nm nm µm system µm. µm µm 0. µm 0. µm 0. µm 0 nm Resolution Resolution ACi 00 A 0 A 0 µm system µm µm 0. µm 0. µm 0. µm 0. µm 0 nm nm Ri 0000 A 00 A Ri 000 A B 0 µm system µm µm µm µm 0. µm 0. µm 0. µm Options A = Standard Clocked output option 0 = 0 MHz (00, 000, 000, 00 and 00 interpolation factors only) = MHz (00, 000, 000, 00 and 00 interpolation factors only) = MHz (000, 00 and 00 interpolation factors only) = MHz (00, 000, 000, 00 and 00 interpolation factors only) 0 = MHz (000, 00 and 00 interpolation factors only) 0 = MHz (00, 000, 000, 00 and 00 interpolation factors only) 0 = MHz (000, 00 and 00 interpolation factors only) PCB type A = FPC input connector B = Cable input connector Options B = Standard Clocked output option = MHz (00 and 000 interpolation factors only) = MHz (00 and 000 interpolation factors only) 0 = MHz (00, 00 and 000 interpolation factors only) 0 = MHz (00, 00 and 000 interpolation factors only) 00 = Nonclocked (000, 000, 00 and 000 interpolation factors only) Alarm format A = Line driven E = state Ti interface Analogue: Options A = Vmid =. V V = Vmid =. V Digital: Series Ti Interpolation factor Interpolation factor KD KD µm system µm µm 0. µm 0. µm 0. µm 0 nm nm nm nm nm nm Resolution Ti 0000 A 00 A Ti 00 A E 0 µm system µm µm µm 0. µm 0. µm 0. µm 0 nm nm nm nm nm Options E = Standard Clocked output option 0, 0,,,,, 0, 0, 0, 0 (MHz) Alarm format and conditions A = Line driven; All alarms B = Line driven; low signal, high signal E = state; All alarms F = state; low signal, high signal Greyedout options not available with this variant

16 Renishaw plc New Mills, WottonunderEdge, Gloucestershire GL JR United Kingdom T (0) F (0) 0 E uk@renishaw.com ATOM compatible scales: RTLF tape scale RCLC glass scale RCDM glass disc ATOM compatible interfaces: ACi interface (coming soon) Ri interface Ti interface ACi interface Contact your local Renishaw representative for more information For worldwide contact details, please visit our main website at RENISHAW HAS MADE CONSIDERABLE EFFORTS TO ENSURE THE CONTENT OF THIS DOCUMENT IS CORRECT AT THE DATE OF PUBLICATION BUT MAKES NO WARRANTIES OR REPRESENTATIONS REGARDING THE CONTENT. RENISHAW EXCLUDES LIABILITY, HOWSOEVER ARISING, FOR ANY INACCURACIES IN THIS DOCUMENT. RENISHAW and the probe symbol used in the RENISHAW logo are registered trade marks of Renishaw plc in the United Kingdom and other countries. apply innovation and names and designations of other Renishaw products and technologies are trade marks of Renishaw plc or its subsidiaries. Loctite is a registered trademark of the Henkel Corporation. Renishaw plc All rights reserved Issued 0 *L70*