Low voltage actuators with preloaded casings VS... 6

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2 Contents Actuators are arranged according to increasing stack diameters A. Stack types piezo actuators Low voltage actuators with preloaded casings VS PSt 150/4/ VS PSt 150/5/ VS PSt 150/7/ VS PSt 150/10/ VS PSt 150/14/ VS PSt 150/20/ VS Piezocartridges: Low voltage actuators in casings with front mount threading FPSt 150/4/ M8x FPSt 150/5/ M10x FPSt 150/5/ M12x0.5 (former versions MPSt-BD) FPSt 150/7/ M14x FPSt 150/10/ M18x Low voltage electrostrictive stacks ESt 150/5/ VS ESt 150/7/ VS ESt 150/5/ M12x0.5 electrostrictive stacks, front mount cartridge versions High voltage stack actuators PSt 500: max. operating voltage 500 V PSt 1000: max. operating voltage 1000 V Bare stacks without casing: PSt 500/5/ and PSt 1000/5/ PSt 500/10/ and PSt 1000/ PSt 1000/16/ PSt 1000/25/ PSt 1000/35/ High voltage actuators with casing and internal prestress: PSt 500/10/ VS18 and PSt 1000/10/ VS PSt 1000/16/ VS PSt 1000/25/ VS PSt 1000/35/ VS

3 B. Ring actuators (stack type hollow cylinders) Low voltage ring actuators Bare ring actuators (without casing) HPSt 150/14-10/ HPSt 150/20-15/ Low voltage ring actuators with internally prestressed casings VS: HPSt 150/14-10/ VS HPSt 150/20-15/ VS High voltage ring actuators Bare ring actuators without casing: HPSt 500/10-5/ and HPSt 1000/10-5/ HPSt 500/15-8/ and HPSt 1000/15-8/ HPSt 1000/25-15/ HPSt 1000/35-25/ High voltage ring actuators, with casing, internally prestressed VS: HPSt 500/10-5/ VS18 and HPSt 1000/10-5/ VS HPSt 500/15-8/ VS22 and HPSt 1000/15-8/ VS HPSt 1000/25-15/ VS HPSt 1000/35-25/ VS Electrostrictive low voltage ring actuators HESt 150/15-8/ bare rings, without casing HESt 150/15-8/ VS22 casing with internal prestress C. Accessories Electricals Mechanics Optic adaptors for ring actuators Screw-in front adaptors SE for stacks with casings VS

4 New Developments The Piezomechanik GmbH specialists in PZT actuation have a more than 20 years experience in this field now and are well known to supply customers not only with standardized piezo system components like catalog actuators and supply electronics. Piezomechanik GmbH has been always contacted, when new fields of application for piezo actuation shall be successfully exploited and special solutions are needed. No technician/customer interface problems: By profound consulting Piezomechanik GmbH bridges the (potential) gap between the technical specialities of piezo actuation and the new coming user and guides him towards really working system solutions. Piezomechanik GmbH provides complete piezo actuation systems with highly sophisticated electronics dealing with all the subs like sub-micrometers, sub-nanometers, sub-milliseconds on one hand and real powers in the kilowatt range on the other. When you want to go towards the limits of piezo actuation: contact Piezomechanik GmbH Piezomechanik GmbH is making the pace again: Only a few highlights out of a bundle: 1 mm = 1000 µm piezo stroke with Newtons load generated by a 500 mm long ceramic stack Piezomechanik GmbH provided heavily preloaded PSt1000/ 35 /L=500 actuator packages for studies related to active vibration cancellation in heavy mobile structures. The enormous strain of 2 was achieved by semi-bipolar operation based on Piezomechanik s recharging switching amplifi ers providing more than 10 Amperes peak current into a 200 V/+1000 V swing for highest dynamics of this big block actuator. (Fig.1) Long stroke / high load actuators for cryogenic operation at 2 K Piezomechanik GmbH delivered custom designed PSt 1000/16/200 VS 25 actuators to the SNS (Spallation Neutron Source) activity as mechanical modulators for the superconducting resonator elements within the accelerator arrangement. Fig. 1 The elements have been designed as high force actuating elements showing very long lifetime by using the bipolar activation scheme applicable during the operation at 2 K. Generation of highest power mechanical shocks Big block piezo actuators with mechanical energy contents up to several Joules have been used to produce mechanical shock waves with mechanical powers peaking at Watts by charging the stack with electrical pulses of 50 µsec duration. Piezomechanik provided both the actuators and the electrical supplies. High large amplitude oscillators Piezomechanik GmbH provided PSt 1000/16/150 VS 25 thermostable /HS/HT actuators together with the necessary power electronics for tunable 150 µm/khz oscillators for special applications like rapid valve control and fretting test machines.

5 General remarks When you need a better understanding of piezomechanics with its effects and parameters: Please refer to brochure Piezomechanics: An Introduction Coefficients of thermal expansion (CTE) of ceramic stacks (axial): Low voltage stacks: 3 ppm/ K High voltage stacks about <+ 1 ppm/ K Definition of polarities: (+) means voltage polarity parallel to ceramic s polarity (-) means voltage polarity antiparallel to ceramic s polarity Example: semibipolar operating range of a PSt 1000 actuator ( ) 200V => (+)1000V Definition of strokes A/B A defined for specifi ed maximum semibipolar voltage swing (e.g. ( ) 200V / (+) 1000V for PSt 1000) B defined for max. unipolar activation (e.g. 0V / (+) 1000V for PSt 1000) Due to the larger voltage swing in case A: stroke A > B Electrical s: Stated values are related to small voltage variations Real large signal values: multiply at least by factor 1.5 Defined for standard material Tolerances (+/ 20%) (see catalog Piezomechanics: An Introduction ) ceramic diameters up to 65 mm for very high loading (high voltage types) special driving voltage ranges, bipolar types custom materials extra wide stroke (see fig. 1) extra high preloading for symmetric push/pull forces antagonistic systems high mechanical power materials high stability materials cryogenic applications high temperature application up to +200 C UHV applications Space applications Actuators with internal heat management ( Thermostable ) Position detection Force detection Special casing materials (INVAR, Titanium, nonmagnetic alloys etc.)

6 A. Stack type piezo actuators Low voltage actuators with preloaded casings VS PSt 150/4 / VS9 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = approx. 40 N Max. load force: 300 N Max. force generation: 300 N Open loop sensitivity at 1 mv noise for actuator PSt 150/4/7 VS9: approx Nanometer µm mm nf N/µm khz PSt 150/4/7 VS9 13/ PSt 150/4/20 VS9 27/ PSt 150/4/40 VS9 55/ PSt 150/4/60 VS9 80/ Standard configuration: Tapped hole in moving end Electrical connection: 1 m coaxial cable RG 178 with BNC connector Coaxial cable RG 178 with LEMOSA connectors or 0S250 Moving end with spherical end piece VbS UHV compatibility Accessories see section C Stroke A/B Max. force generation: A: for 30 V thru +150 V B: for 0 V thru +150 V for 30 V thru +150 V 6

7 PSt 150/5/ VS10 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = approx. 150 N Max. load force: 800 N Max force generation: 800 N Open loop sensitivity at 1 mv noise for actuator PSt 150/5/7 VS10: 0.05 Nanometer µm mm nf N/µm khz PSt 150/5/7 VS10 13/ PSt 150/5/20 VS10 27/ PSt 150/5/40 VS10 55/ PSt 150/5/60 VS10 80/ PSt 150/5/80 VS10 105/ PSt 150/5/100 VS10 130/ Standard configuration: Tapped hole in moving end Electrical connection: 1 m coaxial cable RG 178 with BNC connector Coaxial cable RG 178 with LEMOSA connectors or 0S250 Moving end with spherical end piece Vbs Moving end with threaded pin VAg Moving end plane pf Thermostable modifi cation Low temperature modifi cation UHV compatibility Position detection Accessories see section C 7

8 PSt 150/7/ VS12 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = 300 N Max. load force: 1800 N Max. force generation: 1800 N Open loop sensitivity at 1 mv noise for actuator PSt 150/7/7: 0.05 Nanometer µm mm µf N/µm khz PSt 150/7/700VS12 013/ PSt 150/7/20 VS12 27/ PSt 150/7/400VS12 55/ PSt 150/7/60 VS12 80/ PSt 150/7/800VS12 105/ PSt 150/7/100 VS12 130/ PSt 150/7/120 VS12 160/ PSt 150/7/140 VS12 190/ PSt 150/7/160 VS12 210/ Standard configuration: Tapped hole in moving end Electrical connection: 1 m coaxial cable RG 178 with BNC connector Coaxial cable RG178 with LEMOSA connectors or 0S250 Moving end with spherical end piece VbS Moving end with threaded pin VAg Moving end plane pf Thermostable modifi cation Low temperature modifi cation UHV compatibility Position detection Accessories see section C 8

9 PSt 150/10/ VS15 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = approx. 400 N Max. load force: 4000 N Max. force generation: 3500 N Open loop sensitivity at 1 mv noise for actuator PSt 150/10/7 VS15: 0.05 Nanometer µm mm µf N/µm khz PSt 150/10/20 VS15 27/ PSt 150/10/40 VS15 55/ PSt 150/10/60 VS15 80/ PSt 150/10/80 VS15 105/ PSt 150/10/100 VS15 130/ PSt 150/10/120 VS15 160/ PSt 150/10/140 VS15 190/ PSt 150/10/160 VS15 210/ PSt 150/10/180 VS15 240/ PSt 150/10/200 VS15 270/ Standard configuration: Tapped hole in moving end Electrical connection: 1 m coaxial cable RG 178 with BNC connector Coaxial cable RG 178 with LEMOSA connectors or 0S250 Moving end with spherical end piece Vbs Moving end with threaded pin VAg Moving end plane pf Thermostable modifi cation Low temperature modifi cation UHV compatibility Position detection Accessories see section C 9

10 PSt 150/14/ VS20 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = approx N Max. load force: 7000 N Max. force generation: 7000 N Open loop sensitivity at 1 mv noise for actuator PSt 150/14/20: approx. 0.1 Nanometer µm mm µf N/µm khz PSt 150/14/20 0VS20 27/ PSt 150/14/40 VS20 55/ PSt 150/14/60 VS20 80/ PSt 150/14/80 VS20 105/ PSt 150/14/100 VS20 130/ PSt 150/14/120 VS20 160/ PSt 150/14/140 VS20 190/ PSt 150/14/160 VS20 210/ PSt 150/14/180 VS20 240/ PSt 150/14/200 VS20 270/ Standard configuration: Tapped hole in moving end 1 m coaxial cable RG 178 with BNC connector Coaxial cable RG178 with LEMOSA connectors or 0S250 Coaxial cable RG 316 for power applications Moving end with spherical end piece Vbs Moving end with threaded pin VAg Moving end plane pf Thermostable modifi cation Low temperature modifi cation UHV compatibility Position detection Accessories see section C 10

11 PSt 150/20/ VS25 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = approx N Max. load force: N Max. force generation: N Open loop sensitivity at 1 mv noise for actuator PSt 150/20/20 VS25: approx. 0.1 Nanometer (see 2.8.) µm mm µf N/µm khz PSt 150/20/18 VS25 25/ PSt 150/20/36 VS25 50/ PSt 150/20/54 VS25 75/ PSt 150/20/72 VS25 95/ PSt 150/20/90 VS25 120/ PSt 150/20/110 VS25 150/ PSt 150/20/130 VS25 175/ PSt 150/20/150 VS25 200/ PSt 150/20/170 VS25 230/ PSt 150/20/190 VS25 250/ Standard configuration: Tapped hole in moving end Electrical connection: 1 m coaxial cable RG 178 with BNC connector Thermostable modifi cation Low temperature modifi cation UHV compatibility Position detection Accessories see section C Coaxial cable RG178 with LEMOSA connectors or 0S250 Coaxial cable RG 316 for power applications Modified end pieces on request Stroke A/B A: for 30 V thru +150 V B: for 0 V thru +150 V Max. force generation: for 30 V thru +150 V 11

12 Piezocartridges: Low voltage actuators in casings with front mount threading Stack actuators in cartridge-version offer elegant design features by simple attachment of an actuator to the mechanics using a front mounting thread. Using this thread a coarse adjustment for the system is provided. Piezocartridges can retrofit conventional lead screws. Mechanical arrangements for adjusting purposes can be very simply upgraded by using piezocartridges. 12

13 Schematic of a mirror mount based on piezo cartridges for coarse adjust by mounting screw and ultra fi ne adjustment by piezo action. The stiffness of piezo cartridges is reduced compared to a normally mounted stack because of the force transmission from mounting plate to moving end via stack + casing, and in addition by the quality the screw mount. A lock nut is provided to increase attaching force. Piezocartridges can therefore withstand high loads, but force generation is reduced due to the lower stiffness. Most applications (e.g. for adjusting purposes) use constant loading. Standard configuration: Casing: stainless steel Electrical connection: 1 m coaxial cable RG 178 with BNC connector Stroke A/B Max. force generation: A: for 30 V thru +150 V B: for 0 V thru +150 V for 30 V thru +150 V Coaxial cable RG178 with LEMOSA connectors or 0S250 Position detection Thermostable 13

14 FPSt 150/4/ M8x0.5 (no internal prestress) Maximum load: 150 N Open loop sensitivity at 1 mv noise for actuator FPSt 150/4/20: approx. 0.1 Nanometer Type max. stroke length el. µm mm nf FPSt 150/4/20 M8 27/ FPSt 150/4/40 M8 55/ FPSt 150/4/60 M8 80/ FPSt 150/5/ M10x0.75 (no internal prestress) Maximum load 600 N Open loop sensitivity at 1 mv noise for actuator FPSt 150/5/20: approx. 0.1 Nanometer Type max. stroke length el. µm mm nf FPSt 150/5/20 M10 27/ FPSt 150/5/40 M10 55/ FPSt 150/5/60 M10 80/ FPSt 150/5/80 M10 105/ FPSt 150/5/100 M10 130/ FPSt 150/5/ M12x0.5(-BD) (former versions MPSt(-BD) (no internal prestress) For retrofitting translation stages MRL and Newport mirror mounts SL Maximum load: 600 N Open loop sensitivity at 1 mv noise for actuator FPSt 150/5/20 : approx. 0.1 Nanometer Type max. stroke length el. µm mm nf FPSt 150/5/20 M12 (BD) 27/ FPSt 150/5/30 M12 (BD) 40/ FPSt 150/5/40 M12 (BD) 60/ FPSt 150/5/60 M12 (BD) 80/ FPSt 150/5/80 M12 (BD) 105/ FPSt 150/5/100 M12 (BD) 130/ FPSt 150/5/120 M12 (BD) 160/ FPSt 150/5/140 M12 (BD) 190/

15 FPSt 150/7/ M14x1 Prestress force = max. tensile force = 200 N Maximum load: 1500 N Open loop sensitivity at 1 mv noise for actuator FPSt 150/7/20: approx. 0.1 Nanometer Type max. stroke length el. µm mm µf FPSt 150/7/20 M14 27/ FPSt 150/7/40 M14 60/ FPSt 150/7/60 M14 80/ FPSt 150/7/80 M14 105/ FPSt 150/7/1000 M14 130/ FPSt 150/7/120 M14 160/ FPSt 150/7/140 M14 190/ FPSt 150/7/>140 M14 />140 on request FPSt 150/10/ M18x1 (with internal prestress) Prestress force = max. tensile force = 400 N Maximum load: 3000 N Open loop sensitivity at 1 mv noise for actuator FPSt 150/10/20: approx. 0.1 Nanometer Type max. stroke length el. µm mm µf FPSt 150/10/20 M18 27/ FPSt 150/10/40 M18 55/ FPSt 150/10/60 M18 80/ FPSt 150/10/80 M18 105/ FPSt 150/10/100 M18 130/ FPSt 150/10/120 M18 160/ FPSt 150/10/140 M18 190/ FPSt 150/10/>140 M18 >/140 on request 15

16 Low voltage electrostrictive stacks Operating voltage 0 V thru +150 V, arbitrary polarity Bare stacks: on request Stacks with preloaded casings VS ESt 150/5/ VS10 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = 150 N Maximum compressive load: 500 N Open loop sensitivity for ESt 150/5/6 VS10 at 1 mv noise: approx Nanometer Type max. stroke length el. stiffness µm mm nf N/µm ESt 150/5/6 VS ESt 150/5/12 VS ESt 150/5/18 VS ESt 150/5/25 VS ESt 150/7/ VS12 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = 200 N Maximum compressive load: 1000 N Open loop sensitivity for ESt 150/7/6 VS12 at 1 mv noise: approx Nanometer Type max. stroke length el. stiffness µm mm µf N/µm ESt 150/7/6 VS ESt 150/7/12 VS ESt 150/7/18 VS ESt 150/7/25 VS ESt 150/7/40 VS

17 Electrostrictive stacks, frontmount cartridges versions FESt 150/5/ M10x0.75 on request FESt 150/5/ M12x0.5(-BD) Maximum load: 500 N Open loop sensitivity for 1 mv noise with FESt 150/5/12 M12: approx. 0.1 Nanometer Type max. stroke length el. µm mm nf FESt 150/5/12 M12 (BD) FESt 150/5/18 M12 (BD) FESt 150/5/25 M12 (BD) FESt 150/5/40 M12 (BD)

18 High voltage stack actuators Bare stacks without casing Configuration: discretely stacked elements Endfaces piezo ceramic of aluminia,electrically insulated Potential free operation possible Surface coating General data: see brochure: Piezomechanics: An Introduction PSt 500/5/ and PSt 1000/5/ Maximum load: 800 N Maximum force generation: 600 N Open loop sensitivity for 5 mv noise at PSt 500/5/5: approx Nanometer µm mm nf N/µm khz PSt 500/5/5 12/ PSt 500/5/15 24/ PSt 500/5/25 35/ PSt 500/5/40 55/ PSt 1000/5/5 12/ PSt 1000/5/15 24/ PSt 1000/5/25 35/ PSt 1000/5/40 55/ PSt 1000/5/60 80/ Spherical endface bs, R = 2.5 mm When not otherwise stated, the half sphere will be applied to the moving end Threaded piece for fix end (tapped hole M3): Ig Low temperature modifi cation UHV modification 18

19 PSt 500/10/ and PSt 1000/10/ Maximum load: 5000 N Maximum force generation: 4000 N Open loop sensitivity for 5 mv noise at PSt 500/10/5: approx Nanometer µm mm nf N/µm khz PSt 500/10/5 12/ PSt 500/10/15 24/ PSt 500/10/25 35/ PSt 500/10/40 55/ PSt 500/10/60 80/ PSt 500/10/80 105/ PSt 1000/10/5 12/ PSt 1000/10/15 24/ PSt 1000/10/25 35/ PSt 1000/10/40 55/ PSt 1000/10/60 80/ PSt 1000/10/80 105/ PSt 1000/10/>100 >/100 on request Spherical endface bs, R = 5 mm (order code e.g. PSt 500/10/25 bs) When not otherwise stated, the half sphere will be applied to the moving end. Threaded piece for fi x end (tapped hole M3): Ig Materials HP, HS, HT on request Low temperature modifi cation UHV modification 19

20 PSt 1000/16/ Maximum load: N Maximum force generation: N Open loop sensitivity for 10 mv noise at PSt 1000/16/5: approx Nanometer µm mm nf N/µm khz PSt 1000/16/5 12/ PSt 1000/16/15 25/ PSt 1000/16/40 55/ PSt 1000/16/60 80/ PSt 1000/16/80 105/ PSt 1000/16/>100 >/100 on request End pieces for fixed and moving end on request Materials HP, HS HT on request Low temperature modifi cation UHV modification PSt 1000/25/ Maximum load: N Maximum force generation: N Open loop sensitivity for 10 mv noise at PSt 1000/25/5: approx Nanometer µm mm nf N/µm khz PSt 1000/25/5 12/ PSt 1000/25/15 25/ PSt 1000/25/40 55/ PSt 1000/25/60 80/ PSt 1000/25/80 105/ PSt 1000/25/>100 >/100 on request End pieces for fixed and moving end on request Materials HP, HS HT on request Low temperature modifi cation UHV modification 20

21 PSt 1000/35/ Maximum load: N Maximum force generation: N Open loop sensitivity for 10 mv noise a tpst 1000/35/5: approx Nanometer µm mm nf N/µm khz PSt 1000/35/5 12/ PSt 1000/35/15 25/ PSt 1000/35/40 55/ PSt 1000/35/60 80/ PSt 1000/35/80 105/ PSt 1000/35/>100 >/100 on request End pieces for fixed and moving end on request Materials HP, HSHT on request Low temperature modification UHV modification Stroke A/B: PSt 500: A: 100 V thru +500 V B: 0 V thru +500 V Max. force generation: for 100 V thru +500 V PSt 1000: A: 200 V thru V B: 0 V thru V Max. force generation: for 200 V thru V 21

22 High Voltage Actuators with casing and internal prestress PSt 500/5/xx VS10PSt 1000/5/xx VS10 on request PSt 500/10/ VS18 and PSt 1000/10/ VS18 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = 700 N Maximum load: 5000 N Maximum force generation: 4000 N Open loop sensitivity at 5 mv noise for actuator PSt 500/10/5: approx Nanometer µm mm nf N/µm khz PSt 500/10/5 VS18 12/ PSt 500/10/15 VS18 25/ PSt 500/10/25 VS18 35/ PSt 500/10/40 VS18 55/ PSt 500/10/60 VS18 80/ PSt 500/10/80 VS18 105/ PSt 500/10/100 VS18 130/ Stroke A/B: PSt 500: A: 100 V thru +500 V B: 0 V thru +500 V Max. force generation: for 100 V thru +500 V PSt 1000: A: 200 V thru V B: 0 V thru V Max. force generation: for 200 V thru V 22

23 µm mm nf N/µm khz PSt 1000/10/5 VS18 12/ PSt 1000/10/15 VS18 25/ PSt 1000/10/25 VS18 35/ PSt 1000/10/40 VS18 55/ PSt 1000/10/60 VS18 80/ PSt 1000/10/80 VS18 105/ PSt 1000/10/100 VS18 130/ PSt 1000/10/125 VS18 160/ PSt 1000/10/150 VS18 200/ PSt 1000/10/200 VS18 260/ Standard configuration: Coaxial cable RG 178, 1 m with connectors BNC or LEMOSA 0S250 Coaxial cable RG178 with LEMOSA connectors 0A250 Piezomaterials HP, HP, HT Thermostable modifi cation for power applications Low temperature modifi cation UHV modifi cation Position sensor Negative polarity Accessories: see section C Mechanical end pieces 23

24 PSt 1000/16/ VS 25 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = 1500 N Maximum load: N Maximum force generation: N Open loop sensitivity at 10 mv noise for actuator PSt 1000/16/5 VS25: approx Nanometer µm mm nf N/µm khz PSt 1000/16/5 VS25 12/ PSt 1000/16/20 VS25 25/ PSt 1000/16/40 VS25 55/ PSt 1000/16/60 VS25 80/ PSt 1000/16/80 VS25 105/ PSt 1000/16/100 VS25 130/ PSt 1000/16/125 VS25 160/ PSt 1000/16/150 VS25 200/ PSt 1000/16/200 VS25 260/ PSt 1000/16/ >200 VS25 > 200 on request Standard configuration: Coaxial cable RG 178, 1.5 m with connectors BNC or LEMOSA 0S250 Coaxial cable RG 178 with LEMOSA connector 0A250 Coaxial cable RG 316 for power applications Piezomaterials HP, HS, HT Thermostable modification for power applications Low temperature modifi cation UHV modification Position sensor Negative polarity Accessories: see chapter C Mechanical end pieces for moving end: on request 24

25 PSt 1000/25/ VS35 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = 4000 N Maximum load: N Maximum force generation: N Open loop sensitivity for 10 mv noise for actuator PSt 1000/25/5 VS35: approx Nanometer µm mm nf N/µm khz PSt 1000/25/7 VS35 12/ PSt 1000/25/ 20 VS35 25/ PSt 1000/25/40 VS35 55/ PSt 1000/25/60 VS35 80/ PSt 1000/25/80 VS35 105/ PSt 1000/25/100 VS35 130/ PSt 1000/25/125 VS35 160/ PSt 1000/25/150 VS35 200/ PSt 1000/25/200 VS35 260/ Standard configuration: Coaxial cable RG 178, 1.5 m with connectors BNC or LEMOSA 0S250 Coaxial cable RG 178 with LEMOSA connector 0A250 Coaxial cable RG 316 for power applications Piezomaterials HP, HS, HT Thermostable modification for power applications Low temperature modification UHV modification Position detection Negative polarity Accessories: see chapter C Mechanical end pieces for moving end: on request 25

26 PSt 1000/35/ VS45 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = 6000 N Maximum load: N Maximum force generation: N Open loop sensitivity at 10 mv noise for actuator PSt 1000/35/7 VS 45: approx Nanometer µm mm nf N/µm khz PSt 1000/35/7 VS45 12/ PSt 1000/35/15 VS45 27/ PSt 1000/35/40 VS45 55/ PSt 1000/35/60 VS45 80/ PSt 1000/35/80 VS45 105/ PSt 1000/35/100 VS45 130/ PSt 1000/35/125 VS45 160/ PSt 1000/35/150 VS45 200/ PSt 1000/35/200 VS45 260/ Standard configuration: Coaxial cable RG 178, 1.5 m with connectors BNC or LEMOSA 0S250 Coaxial cable RG 178 with LEMOSA connector 0A250 Coaxial cable RG 316 for power applications Piezomaterials HP, HS, HT Thermostable modification for power applications Low temperature modification UHV modification Position sensor Negative polarity Accessories: see chapter C Mechanical end pieces for moving end: on request Stroke A/B PSt 500: A: 100 V thru +500 V B: 0 V thru +500 V Max. force generation: for 100 V thru +500 V PSt 1000: A: 200 V thru V B: 0 V thru V Max. force generation: for 200 V thru V 26

27 B. Ring Actuators (Stack type hollow cylinders) Low voltage ring actuators without casing Stroke A/B: A: for 30 V thru V B: for1 00 V thru V Max. force generation: for 30 V thru V HPSt 150/14-10/xx Maximum load: 6000 N Maximum force generation: 4500 N Open loop sensitivity for 1 mv noise for actuator HPSt 150/14-10/12: approx. 0.1 Nanometer µm mm µf N/µm khz HPSt 150/14-10/12 16/ HPSt 150/14-10/25 32/ HPSt 150/14-10/35 50/37 on request Threaded end pieces HAg (together with 1 screw cap) Optics adaptor 0A ½ (see section C) 27

28 HPSt 150/20-15/xx Maximum load: N Maximum force generation: 8000 N Open loop sensitivity for 1 mv noise for actuator HPSt 150/20-15/12: approx. 0.1 Nanometer µm mm µf N/µm khz HPSt 150/20-15/12 16/ HPSt 150/20-15/25 32/ HPSt 150/20-15/35 50/ HPSt 150/20-15/55 70/ Threaded end pieces HAg (together with 1 screw cap) Optics adaptor 0A 1 (see section C) Stroke A/B: A: for 30 V thru V B: for 10 V thru V Max. force generation: for 30 V thru V 28

29 Low voltage ring actuators with internally prestressed casings VSHPSt 150/14-10/ VS22 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = 400 N Maximum load: 6000 N Maximum force generation: 4500 N Open loop sensitivity for 1 mv noise for actuator HPSt 150/14-10/12 VS22: approx. 0.1 Nanometer µm mm µf N/µm khz HPSt 150/14-10/12 VS22 16/ HPSt 150/14-10/25 VS22 32/ HPSt 150/14-10/40 VS22 50/ HPSt 150/14-10/55 VS22 70/ Standard configuration: Coaxial cable RG 178 length 1 m with BNC connector Coaxial cable RG 178 length 1 m with LEMOSA or 0S250 connector UHV compatibility Low temperature application Thermostable modification Position sensor Optics adaptor 0A ½ : see section C Adaptor rings AR: see section C Stroke A/B A: for 30 V thru +150 V B: for 0 V thru +150 V Max. force generation: for 30 V thru +150 V 29

30 HPSt 150/20-15/ VS35 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = 700 N Maximum load: N Maximum force generation: 8000 N Open loop sensitivity for 1 mv noise for actuator HPSt 150/20-15/12 VS35: approx. 0.1 Nanometer µm mm µf N/µm khz HPSt 150/20-15/12 VS35 16/ HPSt 150/20-15/25 VS35 32/ HPSt 150/20-15/40 VS35 50/ HPSt 150/20-15/55 VS35 70/ Standard configuration: Coaxial cable RG 178 length 1 m with BNC connector Coaxial cable RG 178 length 1m with LEMOSA or 0S250 connector UHV compatibility Low temperature application Thermostable modification Position detector Optics adaptor 0A 1 : see section C Adaptor rings AR: see section C Stroke A/B A: for 30 V thru +150 V B: for 0 V thru +150 V Max. force generation: for 30 V thru +150 V 30

31 High voltage ring actuators without casing Technology: discrete stacking Endfaces PZT ceramics or corundum (alumina) Endfaces completely electrically insulated, surface insulation coating Wiring by 2 pigtails General data: see brochure: Piezomechanics: An Introduction Stroke A/B PSt 500: A: 100 V thru +500 V B: 0 V thru +500 V Max. force generation: for 100 V thru +500 V PSt 1000: A: 200 V thru V B: 0 V thru V Max. force generation: for 200 V thru V 31

32 HPSt 500/10-5/ und HPSt 1000/10-5/ Maximum load: 3500 N Maximum force generation: 2800 N Open loop sensitivity for 5 mv noise for actuator HPSt 500/10-5/5: approx Nanometer µm mm nf N/µm khz HPSt 500/10-5/5 12/ HPSt 500/10-5/15 25/ HPSt 500/10-5/25 35/ HPSt 500/10-5/40 55/ HPSt 500/10-5/> 40 > 40 on request HPSt 1000/10-5/5 13/ HPSt 1000/10-5/15 25/ HPSt 1000/10-5/25 35/ HPSt 1000/10-5/40 55/ HPSt 1000/10-5/60 80/ HPSt 1000/10-5/>60 > 60 on request Threaded end pieces HAg (together with 1 screw cap) 32

33 PSt 500/15-8/ und PSt 1000/15-8/ Maximum load: 9000 N Maximum generation force: 5500 N Open loop sensiviy for 5 mv noise for actuator HPSt 500/15-8/5: approx Nanometer µm mm nf N/µm khz HPSt 500/15-8/5 12/ HPSt 500/15-8/15 25/ HPSt 500/15-8/25 35/ HPSt 500/15-8/40 55/ HPSt 500/15-8/60 80/ HPSt 500/15-8/80 105/ HPSt 500/15-8/L>80 > /80 on request HPSt 1000/15-8/5 12/ HPSt 1000/15-8/15 25/ HPSt 1000/15-8/25 35/ HPSt 1000/15-8/40 55/ HPSt 1000/15-8/60 80/ HPSt 1000/15-8/80 105/ HPSt 1000/15-8/>80 > 80 > 72 on request Threaded end pieces HAg (together with 1 screw cap) Optics adaptor 0A ½ (see section C) Piezo ceramics: HP, HS, HT 33

34 HPSt 1000/25-15/ Maximum load: N Maximum force generation: N Open loop sensitivity for 10 mv noise for actuator HPSt 1000/25-15/5: approx Nanometer µm mm nf N/µm khz HPSt 1000/25-15/5 12/ HPSt 1000/25-15/15 25/ HPSt 1000/25-15/25 35/ HPSt 1000/25-15/40 55/ HPSt 1000/25-15/60 80/ HPSt 1000/25-15/80 105/ HPSt 1000/25-15/> 80 > /80 > 72 on request Threaded end pieces HAg (together with 1 screw cap) Optics adaptor 0A 1 (see section C) Piezo ceramics: HP, HS, HT 34

35 HPSt 1000/35-25/ Maximum load: N Maximum force generation: N Open loop sensitivity for 10 mv noise for actuator HPSt 1000/35-25/5: approx Nanometer µm mm nf N/µm khz HPSt 1000/35-25/5 12/ HPSt 1000/35-25/15 25/ HPSt 1000/35-25/25 35/ HPSt 1000/35-25/40 55/ HPSt 1000/35-25/60 80/ HPSt 1000/35-25/80 105/ HPSt 1000/35-35/ / HPSt 1000/35-25/>100 > /100 > 90 on request Threaded end pieces HAg (together with 1 screw cap) Piezo ceramics HP, HS, HT 35

36 High voltage ring actuators, with internally prestressed casing VS HPSt 500/10-5/ VS18 and HPSt 1000/10-5/ VS18 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = 200 N Maximum load: 3500 N Maximum force generation: 2800 N Open loop sensitivity for 10 mv noise for actuator PSt 1000/10-5/7 VS18: approx Nanometer µm mm nf N/µm khz HPSt 500/10-5/7 VS18 12/ HPSt 500/10-5/15 VS18 25/ HPSt 500/10-5/25 VS18 35/ HPSt 500/10-5/40 VS18 55/ HPSt 500/10-5/>40 VS18 > /40 on request HPSt 1000/10-5/7 VS18 12/ HPSt 1000/10-5/15 VS18 25/ HPSt 1000/10-5/25 VS18 35/ HPSt 1000/10-5/40 VS18 55/ HPSt 1000/10-5/60 VS18 80/ HPSt 1000/10-5/>60 VS18 > /60 on request Standard configuration: Coaxial cable RG 178 length 1.5 m with connectors BNC or LEMOSA 0S250 1 screw cap for top UHV compatibility Low temperature application Thermostable modification Negative polarity Piezo ceramics: HP, HS, HT Adaptor rings AR: see section C 36

37 HPSt 500/15-8/ VS22 and HPSt 1000/15-8/ VS22 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = 400 N Maximum load: 9000 N Maximum force generation: 5500 N Open loop sensitivity for 5 mv noise for actuator HPSt 500/15-8/7 VS22: approx Nanometer µm mm nf N/µm khz HPSt 500/15-8/7 VS22 13/ HPSt 500/15-8/15 VS22 25/ HPSt 500/15-8/25 VS22 35/ HPSt 500/15-8/40 VS22 55/ HPSt 500/15-8/60 VS22 80/ HPSt 500/15-8/80 VS22 105/ HPSt 500/15-8/>800 VS22 >/80 on request HPSt 1000/15-8/7 VS22 13/ HPSt 1000/15-8/15 VS22 25/ HPSt 1000/15-8/25 VS22 35/ HPSt 1000/15-8/40 VS22 55/ HPSt 1000/15-8/60 VS22 80/ HPSt 1000/15-8/80 VS22 105/ HPSt 1000/15-8/>80 VS22 > /80 on request Standard configuration: Coaxial cable RG 178 length 1.5 m with connectors BNC or LEMOSA 0S250 UHV compatibility Low temperature application Thermostable modification Negative polarity Piezo ceramics: HP, HS, HT Positions sensor Optics adaptor 0A1/2 : see section C Adaptor rings AR: see section C 37

38 HPSt 1000/25-15/ VS35 General data: see brochure: Piezomechanics: An Introduction Prestress force = max. tensile force = 2000 N Maximum load: N Maximum force generation: N Open loop sensitivity for 10 mv noise for actuator PSt 1000/25-15/7 VS35: approx Nanometer µm mm nf N/µm khz HPSt 1000/25-15/7 VS35 13/ HPSt 1000/25-15/15 VS35 25/ HPSt 1000/25-15/25 VS35 35/ HPSt 1000/25-15/40 VS35 55/ HPSt 1000/25-15/60 VS35 80/ HPSt 1000/25-15/80 VS35 105/ HPSt 1000/25-15/>80 VS35 > / 80 on request Standard configuration: Coaxial cable RG 178 length 1.5 m with connectors BNC or LEMOSA 0S250 Coaxial cable RG 316 for power application UHV compatibility Low temperature application Thermostable modification Negative polarity Piezo ceramics: HP, HS, HT Position sensor Optics adaptor 0A 1 : see section C Adaptor rings AR: see section C 38

39 HPSt 1000/35-25/ VS45 General data: see chapter Prestress force = max. tensile force = 3000 N Maximum load: N Maximum force generation: N Open loop sensitivity for 10 mv noise for actuator HPSt 1000/35-25/7 VS45: approx Nanometer µm mm nf N/µm khz HPSt 1000/35-25/7 VS45 12/ HPSt 1000/35-25/15 VS45 25/ HPSt 1000/35-25/25 VS45 35/ HPSt 1000/35-25/40 VS45 55/ HPSt 1000/35-35/60 VS45 80/ HPSt 1000/35-25/80 VS45 105/ HPSt 1000/35-25/100 VS45 130/ HPSt 1000/35-25/>100 VS45 /> 100 on request Standard configuration: Coaxial cable RG 178 length 1.5 m with connectors BNC or LEMOSA 0S250 Coaxial cable RG 316 for power applications UHV compatibility Low temperature modifi cation Thermostable modification Position sensor Negative polarity Piezo ceramics: HP, HS, HT 39

40 Electrostrictive low voltage ring actuators General data: see brochure: Piezomechanics: An Introduction HESt 150/15-8/ bare rings, without casing Maximum force load: 5000 N Type max. stroke length el. stiffness µm mm µf N/µm HESt 150/15-8/ HESt 150/15-8/ HESt 150/15-8/ HESt 150/15-8/ Mechanical end piece HAg as Piezo ring actuators HPSt /15-8/ Optics adaptor 0A ½ : see chapter C HESt 150/15-8/ VS 22 casing with internal prestress Prestress force = max. tensile force = 400 N Maximum load: 5000 N Open loop sensitivity for 1 mv noise for actuator HESt 150/15-8/6 VS22: 0.05 Nanometer Type max. stroke length el. stiffness µm mm µf N/µm HESt 150/15-8/6 VS HESt 150/15-8/12 VS HEST 150/15-8/>12 VS22 on request Standard configuration: Coaxial cable RG 178 length 1 m with BNC connector UHV compatibility Optics adaptor 0A ½ : see section C Adaptor rings AR: see section C 40

41 C. Accessories Electricals Supply coaxial cables: one side connector, other side free for attaching piezocomponents such as bare stacks etc. Cable type RG 178 (PTFE), thickness 1.8 mm: length 1.5 m Connectors available: BNC, LEMOSA 0S250 Cable type RG 316 (PTFE), thickness 2.5 mm: length 1.5 m for power applications Connectors available: BNC, LEMOSA 0S250 Extension cables: Connector system LEMOSA 0S250, length 2 m/4 m/6 m Cable types RG 178 or RG 316 (see above) Connecting adaptors for matching different connecting systems plug (from electronics) / Cable s connector LEMOSA 0S 250/BNC (this adaptor is used to match amplifiers with LEMOSA output to a component, having a BNC connector) BNC/LEMOSA 0S250 BNC/LEMOSA Mechanics Adaptor rings The adaptor rings are normally used to match the diameter of actuators with casing to mirror mounts, defi ned for a distinct mirror s diameter. An often used combination are ring actuators (e.g. with casing VS22), which are adopted to 2 mirror mount system. The proper adaptor ring is an AR (51/22). Designation AR X/Y X external diameter, Y internal diameter (corresponds to actuator s casing s diameter), T thickness of ring (all dimensions in mm) AR 25/10 t 5 AR 31/12 t 7 AR 25/12 t 5 AR 31/22 t 7 AR 25/18 t 5 AR 31/25 t 7 AR 50/18 t 7 AR 51/18 t 7 AR 50/20 t 7 AR 51/20 t 7 AR 50/22 t 7 AR 51/22 t 7 AR 50/25 t 7 AR 51/22 t 7 AR 50/35 t 7 AR 51/35 t 7 41

42 Optic adaptor for ring actuators Ring actuators are often used within optical arrangements for precise adjustment of transmissive optical components e.g. within laser resonators or tunable etalons. The optic adaptors allow the simple mounting and changing of circular optics with the standard diameters 1/2 sand 1. Optic adaptor 0A ½ This element allows mounting of optics with diameter 1/2 up to a thickness of 8 mm. It can be simply attached using the M12x0.5 thread to all the corresponding ring actuators with a HAg M12x0.5 end piece (bare rings) such as the HPSt 150/14-10/, HPSt 500/15-8/, HPSt 1000/15-8/ or the equivalent cased types with a VS22 casing. Optic adaptor 0A 1 This element allows mounting of optics with diameter 1 up to a thickness of 8 mm. It can be simply attached using the M22x0.5 thread to all the corresponding ring actuators with a HAg M22x0.75 end piece (bare rings) such as the HPSt 150/25-15/ or the equivalent cased types with a VS35 casing. Screw in front adaptor SE: For stacks with casings VS The adaptors have a threaded pin for simple attachment to the standard front pieces VS with tapped hole and provide a plane or spherical front to match the actuator for various uses. For example small mirrors can be glued onto the plane faces. Designation: SE xx plane and SE x sphere, where xx represents the casing s diameter, where it is mounted to (e.g. 12 for VS 12) Mx (mm) D (mm) L (mm) R (mm) SE SE SE SE SE18/ Magnetic front pieces Based on the above described front adaptors, MA components with magnetic plane face are offered for VS10 and VS12 casings (designation MA10/MA12). Small ferromagnetic components can be easily attached to the moving pin of stack actuators. 42

43 Piezomechanik Make your piezo actuation system complete by using Piezomechanik s range of supply electronics Analog / switching amplifiers Voltage controller type +150 / +200 V: up to 50 Amperes peak +500 V: up to 20 Amperes peak V: up to 15 Amperes peak semi-bipolar supplies for widest range piezo-deflection Current and charge controlling amplifiers for linearized, hysteresis free high dynamic operation of piezo actuators low and high voltage / low and high power versions available High power, electronic pulsers: Low and high voltage versions, pulse powers up to 500 Kilo Watts Constant current pulsers for charge control piezo-driving strategy e.g. in highest speed / high power valve control Feedback controlled systems A, for position control: PosiCon B, to provide piezo-active self alignment for stabilizing position sensitive equipment: OptiSeek Custom designed systems Optical phase shifting systems involving: piezo mirror shifters and PC plug in high voltage boards PC-AHV SCIENCE LABORATORIES 千葉県松戸市小金原 株式会社サイエンスラボラトリーズ TEL: FAX: Berg-am-Laim-Str. 次世代技術知識集団 sales@scilab.co.jp 64 D Munich Phone ++ 49/89/ Fax ++ 49/89/ info@piezomechanik.com Stand: Oktober 2006