State of the art RF generators

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1 State of the art RF generators cost-efficient adaptation to your systems Speaker: Andreea Vasiliu Business Manager Speaker: Tobias Keller Productmanager RFsystems 1

We are regarded as an innovative partner due to close collaboration with customers on: Cost reduction Design improvement for process efficiency Development of

2 About SPM SPM is a private and independent company based in Liechtenstein. We specialise in providing services and spares for the semiconductor industry and offering sputtering target materials and services. We are regarded as an innovative partner due to close collaboration with customers on: Cost reduction Design improvement for process efficiency Development of independent solutions Company headquarters in Liechtenstein We welcome the opportunity to introduce our products and innovations to you. All information on this presentation is confidental. Copyright 2012 SPM AG, Benderer Strasse 29, FL-9494 Schaan. All rights reserved.

History of SPM Spare parts for the Semiconductor

Ceramic and quartz spare parts 1997 Silicon sputtering

Ceramic Heaters Built up our own local bondshop 2013

from Nova-Fabrica All information on this presentation is

3 History of SPM Spare parts for the Semiconductor manufacturing industry PVD Coating Industry Start 1997 Ceramic and quartz spare parts 1997 Silicon sputtering targets sold mostly to Bondshops around the world Ceramic Heaters Built up our own local bondshop 2013 Present Orings from Innores 2013 Process control system from Nova-Fabrica All information on this presentation is confidental. Copyright 2012 SPM AG, Benderer Strasse 29, FL-9494 Schaan. All rights reserved.

4 What is our customer s concern? Efficiency How can we achieve all this? Quality Higher yield Cost reduction All information on this presentation is confidental. Copyright 2012 SPM AG, Benderer Strasse 29, FL-9494 Schaan. All rights reserved.

6 Tune up your tool! Heaters /ESCs Electrodes QCM Thin film measurement sensor FFKM Seals End Point detection All information on this presentation is confidental. Copyright 2012 SPM AG, Benderer Strasse 29, FL-9494 Schaan. All rights reserved.

7 Our Mission Active and reactive relationship with endusers and suppliers Sales people with good understanding of your needs, and techical degree Understand the qualification process and provide all necessary support together with our expert supplier All information on this presentation is confidental. Copyright 2012 SPM AG, Benderer Strasse 29, FL-9494 Schaan. All rights reserved.

8 TRUMPF Hüttinger GmbH + Co. KG and SPM STATE OF THE ART RF GENERATORS cost-efficient adaptation to your systems Tobias Keller Freiburg 8

9 STATE OF THE ART RF GENERATORS Do you buy secondary equipment on e-bay? Don t you look for better more reliable equipment? Who can help you-experienced and competent? 9

10 Our company FAMILY COMPANY 10

Lars Grünert Sitting: Dr.-Ing. Mathias Kammüller Dipl.-Ök. Harald Völker Dr.

11 A strong team Our management Standing: Dr. phil. Nicola Leibinger-Kammüller Dr.-Ing. E.h. Peter Leibinger Dr. rer. pol. Lars Grünert Sitting: Dr.-Ing. Mathias Kammüller Dipl.-Ök. Harald Völker Dr. rer. soc. Gerhard Rübling Chairman of the Supervisory Board: Dr. Jürgen Hambrecht [not in the picture] 11

12 About us Business divisions Innovation and quality Service and locations

13 SYNCHRO World Class in all Processes SYNCHRO is the TRUMPF production system. Thanks to synchronized flow production the needed material is located at the right place at the right time. 13

14 What is our customers concern? Tool time 14

Tools Maximizing Lifecycle Solutions Problem Statement Obsolescence is a growing problem for 6 & 8 customers Capabilities may be limited by the existing system Risk to manufacturing operations and

15 Tools Maximizing Lifecycle Solutions Problem Statement Obsolescence is a growing problem for 6 & 8 customers Capabilities may be limited by the existing system Risk to manufacturing operations and product line sustainability Approach Provide technical support to address obsolescence impact to customer operations Integrate 300mm & 450mm proven hardware and solutions in legacy systems Provide product performance same or better than existing equipment Establish alternative supply paths for obsolete equipment 15

16 STATE OF THE ART RF GENERATORS Do you buy secondary equipment on e-bay? 16

TruPlasma RF 13MHz line of products Power

Single faced Complete water-cooled 208VAC

17 TruPlasma RF 13MHz line of products Power Range from 3kW 24kW 3kW 6kW Half rack Single faced Complete water-cooled 208VAC (* V) Single faced Complete water-cooled Compact in size Wide AC input V Other Features: Interface: RS232, A/D, ECAT Standard pulsing (*simmer mode) CEX Auto frequency tuning Advanced Arc management Analog scaling 24kW 12kW Air and water-cooled Compact in size 208V or 480V options 17

TruPlasma RF Superior Performance Best in class

Efficiency Comparision 0,8 0,7 0,6 0,5 0,4 0,3 0,2

Paramount 3 TRUMPF SSM3000 0 0 500 1000 1500 2000

allows true 50 output characteristic Resulting to:

18 TruPlasma RF Superior Performance Best in class efficiency gain 15-20% Advanced ArcManagement 0,9 Efficiency Comparision 0,8 0,7 0,6 0,5 0,4 0,3 0,2 0,1 Supplier Apex 1 Supplier Sure Power 2 Supplier Paramount 3 TRUMPF SSM Output Power, W Unique coupling technology allows true 50 output characteristic Resulting to: 1) Cable length insensitive, 2) Superior stable plasma performance 18

Reference TruPlasma RF 1003 Silicon etch: Comparison of RF-forward (400W)

19 TruPlasma RF series 1000 Reference case Results from qualification: Reference TruPlasma RF 1003 Nitride etch: Comparison of RF-forward (225W) RF-reflected Reference TruPlasma RF 1003 Silicon etch: Comparison of RF-forward (400W) RF-reflected Excellent RF stability for all process settings Low reflected power

20 STATE OF THE ART RF GENERATORS Don t you look for better more reliable equipment? 20

caused by down equipment Safe 15-20% energy cost due to better efficiency Warehouse costs for multiple types of

21 Return on investment: ROI Fast payback Increase yield with new advanced features e.g. ArcManagement Less wafer loss Prevent repair cost (better MTBF) Tool downtime + maintenance labor Production backlog caused by down equipment Safe 15-20% energy cost due to better efficiency Warehouse costs for multiple types of backup generators Reference customer: Using new state of the art RF-Power supply with new Advanced ArcManagement 1 day = 300 Euro 40 weeks = Euro 21

22 Power Supplies for Plasma Excitation TruPlasma RF RF 1000 RF 3000 RF 7000 TruPlasma MF 1-3 kw 6-12 kw 24 kw kw MF 3000 MF 7000 New TruPlasma DC DC-Puls / DC-Bias 4000 New kw Bipolar 4000 New DC kw Highpulse 4000 Arc series kW-12kW 10 kw-40kw 10 kw-60kw 10 kw-240kw 22

23 STATE OF THE ART RF GENERATORS Who can help you-experienced and competent? 23

Implementation of Paramount 3013 in Implanter Tools

APPLICATION NOTE Implementation of Paramount 3013 in Implanter Tools Introduction The Advanced Energy (AE) Paramount 3013 option AE PN: 3156330-626 provides improved Common Exciter (CEX) performance and