Introducing The ebeam Initiative

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2 Introducing The ebeam Initiative 20 Charter Members & Advisors Across the Ecosystem Jan Willis ebeam Initiative Facilitator

3 Member Companies & Advisors Marty Deneroff D. E. Shaw Research Jack Harding esilicon Colin Harris PMC-Sierra Jean-Pierre Geronimi STMicroelectronics Riko Radojcic Qualcomm

4 Why Industry Collaboration? Removes barriers to adoption of design for e-beam (DFEB) Increases investment in multiple supply chains Inspires leadership More designs, Faster Time to Market

5 ebeam Initiative Roadmap Initiative Launch >10 members, advisors Website and papers Design Proven 65-nm test chip Methodology guide 45-nm test chip DFEB Certification Design certification training Semi-annual member meetings with advisors Manufacturability Proven 65-, 45-nm and 32-nm proof points On-going effort for each node Multiple Chip Suppliers Design kit availability Equipment readiness

6 Today s Agenda Industry Need for DFEB Aki Fujimura, CEO - D2S, Inc. Managing Sponsor ebeam Initiative Fujitsu Viewpoint Shinichi Machida, President and CEO - Fujitsu Microelectronics America Steering Group ebeam Initiative esilicon Viewpoint Jack Harding, Chairman and CEO - esilicon Corporation Design Team Advisor ebeam Initiative Summary and Q&A

7 Industry Need for DFEB Aki Fujimura CEO - D2S, Inc. Managing Sponsor - ebeam Initiative

8 Mask Cost is Top Concern Other 9% Test costs Packaging costs 0% 2% Semiconductor IP quality 6% Semiconductor IP cost and 13% Inadequate EDA tools for 10% Increased design complexity Higher-mask costs 26% 34% 0% 10% 20% 30% 40% Source: Global Semiconductor Association (GSA) member survey, December 2007

9 Enabling the Long Tail of SoCs mand Dem The long tail Popularity Rank Source: Chris Anderson s The long tail: Why the future of business is selling less of more

10 The Tail is Getting Shorter We can enable the tail with DFEB Revenue e per Des sign Big opportunity Cost of Manufacturing Chips per Design Non-addressable market 32-nm with mask 40-nm with mask 65-nm with mask Maskless SoC # of Designs

11 The Derivatives Opportunity 10x reduction in mask cost increases derivatives by 10x Ratio of Revis sed to New Design ns >=500-nm >=300 but <500nm >=200 but <300nm >=160 but <200nm >=120 but <160nm >=75 but <120nm Power law fit $100,000 $10,000 Copyright (c) 2007 by VLSI RESEARCH INC. All rights reserved. Reprinted with permission from VLSI RESEARCH INC. Reticle ASP $1,000 $100

12 Fast EbDW using CP Available today and uniquely effective at and below 65-nm ELECTRON GUN 1 ST - APERTURE 2 ND - APERTURE DEMAGNIFICATION (A) VSB: Variable Shaped Beam (B) CP: Character or Cell Projection Drawing Courtesy Hitachi High-Technologies

13 EbDW Underutilized Even with CP due to throughput X VSB VSB Today CP VSB With CP Comparison Source: D2S Computer simulation of e-beam write time on a particular test case (speed up is dependent on aperture size and utilization %)

14 DFEB Starts with Design RTL w/ DFEB 10-25X VSB SP&R DFEB Overlay Library DFEB SP&R GDSII CoDes sign 193i Data Prep No DFEB 3-5X VSB Ebeam Data Prep Stencil Mask GDSII E-beam Data Prep Mask Making EbDW Format EbDW Format

15 DFEB Breakthrough Makes CP EbDW practical for low volume X X VSB CP VSB CP 0 Today With CP With DFEB and CP Comparison Source: D2S Computer simulation of e-beam write time on a particular test case (speed up is dependent on aperture size and utilization %)

16 Collaboration Already Underway Fujitsu, e-shuttle and D2S to Prove DFEB Design and Manufacturing 65-nm low-power test chip Announced October 2008 Pictured are (left to right) Dr. Haruo Tsuchikawa, President of e-shuttle, Hiroyuki Asahida, Director of Marketing at Fujitsu Microelectronics, and Aki Fujimura, Chairman and CEO of D2S.

17 Today s Proof Point at SPIE CEA/Leti, Advantest, and D2S joint paper at 2:20 p.m., Session 5: EBDW Manufacturing proof of accurate CP projection for 32-nm contacts

18 Summary of Today s News 20 charter members launch the ebeam Initiative Initiative roadmap established Execution already underway Design test chip in 2009 Today s SPIE paper proves manufacturability at 32-nm With DFEB, direct write has arrived

19 Member Companies & Advisors Marty Deneroff D. E. Shaw Research Jack Harding esilicon Colin Harris PMC-Sierra Jean-Pierre Geronimi STMicroelectronics Riko Radojcic Qualcomm

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