IoT, IIoT, and Industrie November, 2016 Hotel Chancery Pavilion, Lavelle Road, Bengaluru

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1 ISATRNG/ /Slide No. 1 ISA Bangalore Section International Society of Automation ISA Bangalore s training program on: November, 2016 Hotel Chancery Pavilion, Lavelle Road, Bengaluru Standards Certification Education & Training Publishing Conferences & Exhibits Dr. Vijay Mishra, Chief Technology Officer, Centre for Nano Science and Engineering, IISc, Bangalore, India MailID: vijaymish@gmail.com Tel:

2 ISATRNG/ /Slide No. 2 Dr. Vijay Mishra Academic: - M. Sc. (Physics: Electronics), Mumbai University - Ph. D. (Physics: Solid State Sensors), Bhabha Atomic Research Centre, Mumbai Formerly: - Electronics Division, BARC, Scientist for 2 years, development of solid state radiation sensors - Principal Technologist, Sarnoff Corporation, Advance Imager Designs for scientific and semiconductor applications for 5 years - Scientist, CMTI, nano manufacturing technologies for 1 year - Technology Manager, CeNSE, IISc for 5 years : Sensors Designs and Systems Engineering using Nanotechnology Currently: - Chief Technology Officer, CeNSE, IISc since 2 years Association: - Member, ISSS (Institute of Smart Structures and Systems)

3 ISATRNG/ /Slide No. 3 Contents Introduction Sensor qualification for IoT Manufacturing Infrastructure for IoT Sensors Manufacturing Challenges in IoT Sensors: a case study Calibration of Sensors Glimpses of Product Prototypes around Nanotech Sensors Summary

4 ISATRNG/ /Slide No. 4 Introduction A flying conscious system of Sensors-Actuators! Intelligent! Self-powered/ highly power efficient! Strong coordination among fellow systems! Well connected with World! Travels more than thousands of miles in one go!

5 ISATRNG/ /Slide No. 5 Sensor Qualifications for IoT Miniaturized small form factor Batch processed Low cost Calibration standards developed, no calibration needed Rugged Low power consumption/self powered Smart readout Interconnectivity

6 ISATRNG/ /Slide No. 6 Sensor Qualifications for IoT Gas Analyzer Gas detector Gas sensor MEMS gas sensor Portable water quality analyzer & water leak water quality sensor & liquid flow sensor to detect

7 ISATRNG/ /Slide No. 7 Sensor Qualifications for IoT

8 ISATRNG/ /Slide No. 8 Sensor Qualifications for IoT 12+ sensors IOT INFOGRAPHIC: WHAT EXACTLY IS THE "INTERNET OF THINGS POSTSCAPES COLLABORATED WITH HARBOR RESEARCH ON AN INFOGRAPHIC TO TELL A MORE COMPLETE STOREY ABOUT THE INTERNET OF THINGS

9 ISATRNG/ /Slide No. 9 Sensor Qualifications for IoT

10 ISATRNG/ /Slide No. 10 Sensor Qualifications for IoT Holter monitor A mini medical lab implanted under the skin

11 ISATRNG/ /Slide No. 11 Sensor Qualifications for IoT Evolution of pacemaker technology

12 ISATRNG/ /Slide No. 12 Sensor Qualifications for IoT The well connected man

13 ISATRNG/ /Slide No. 13 Manufacturing Infrastructure for IoT Sensors Centre for nano-science technology State of the art capital intensive facilities Very specialized skilled manpower Complete ecosystem within arms reach

14 ISATRNG/ /Slide No. 14 Manufacturing Infrastructure for IoT Sensors Centre for nano-science technology Nano-fabrication facility

15 ISATRNG/ /Slide No. 15 Manufacturing Infrastructure for IoT Sensors Centre for nano-science technology 2000 sqfeet lab, housing most of the infrastructure to enable packaging of various MEMS devices. The lab has facilities for Wafer Dicing, Die Attach, Ball/Wedge bonding, Low / High level pressure calibration & Oil filling station.

16 ISATRNG/ /Slide No. 16 Manufacturing Infrastructure for IoT Sensors Centre for nano-science technology Micro and nano-characterization facility

17 ISATRNG/ /Slide No. 17 Manufacturing Infrastructure for IoT Sensors Centre for nano-science technology Micro and nano characterization facility

18 ISATRNG/ /Slide No. 18 Manufacturing Infrastructure for IoT Sensors Centre for nano-science technology Packaging facility Wafer Dicing: Semiautomatic Wafer dicing machine for Silicon and Glass wafers Wire Bonding: Semiautomatic wirebonderwith Ball & Wedge bonding capability for Au, Al and Cu wires Welding Machine: Nd-YAG Laser welding machine Pressure Calibration: Pneumatic and Hydraulic Pressure calibrator and data acquisition system.

19 ISATRNG/ /Slide No. 19 Manufacturing Infrastructure for IoT Sensors Centre for nano-science technology System engineering facility (SysEF)

20 ISATRNG/ /Slide No. 20 Manufacturing Challenges in IoT Sensors: Case studies A typical solid state gas sensor platform Design, fabrication and packaging

21 ISATRNG/ /Slide No. 21 Manufacturing Challenges in IoT Sensors: Case studies Step 1: Wafer cleaning process and SiO2deposition Materials needed: CH3COCH3 IPA NH4OH H2O2 Dilute HF Pyrex bath container Cleaning steps: Solvent clean RCA clean HF dip Step 2: Deposition of 1 micron PECVD SiO2 on both sides of silicon wafer Temperature: 350 o C Growthrate: ~ 0.7nm/sec. Gasmixture: SiH4+N2+N2O

22 ISATRNG/ /Slide No. 22 Manufacturing Challenges in IoT Sensors: Case studies Step 3: Micro-heater patterning and lift-off (Ti/Pt 90 nm thickness) Good temperature uniformity % area within 1% variation in temperature Low power consumption ~ 300oC, Power ~ 13.4 (±0.5 mw) Step 4: Deposition of 200 nm SiO2as an insulator and heater pad opening Heater pads Tr-3 ms(~300 oc) Applied voltage = 5V

23 ISATRNG/ /Slide No. 23 Manufacturing Challenges in IoT Sensors: Case studies Step 5: Sensing electrode patterning and lift off (Ti/Pt 80 nm thickness ) Step 6: Sensing material deposition

24 ISATRNG/ /Slide No. 24 Manufacturing Challenges in IoT Sensors: Case studies Step 7: Backside complete silicon etch using DRIE Front side Back side

25 ISATRNG/ /Slide No. 25 Manufacturing Challenges in IoT Sensors: Case studies Step 8: Packaged sensor

26 ISATRNG/ /Slide No. 26 Manufacturing Challenges in IoT Sensors: Case studies Device at a glance (1.2 mm)

27 ISATRNG/ /Slide No. 27 Manufacturing Challenges in IoT Sensors: Case studies Sensor Characterization

28 ISATRNG/ /Slide No. 28 Manufacturing Challenges in IoT Sensors: Case studies Optimized Packaging Two types of packages - Type 1 contains all four distinct dies to sense four gases CO, NO2, CO2,SO2 Type 2 will contain Sensor array die to sense all four gases Packaging to be done in a standard TO metal can (16 pin). Both types are pin compatible to work with same electronics reader Also Temp, RH and Pressure sensors integrated

29 ISATRNG/ /Slide No. 29 Manufacturing Challenges in IoT Sensors: Case studies A typical Gas Sensor Calibration System at for a packaged device against Gas Concentration

30 ISATRNG/ /Slide No. 30 Manufacturing Challenges in IoT Sensors: Case studies A typical gas sensor calibration system at for a packaged device against gas concentration

31 ISATRNG/ /Slide No. 31 Manufacturing Challenges in IoT Sensors: Case studies Sensor reliability tests The VCL300 Votsch Chamber is used along side the gas calibration unit to calibrate sensors against temperature and humidity. Some significant studies were carried out both with Commercial Sensors and CeNSE s indigenous Sensors Comparison of performance on the basis of varying humidity. A significant but irregular drift was observed Our Studies show that the effect of temperature and humidity must be taken into account while calibrating the sensors

32 ISATRNG/ /Slide No. 32 Manufacturing Challenges in IoT Sensors: Case studies Intracranial pressure sensor

33 ISATRNG/ /Slide No. 33 Manufacturing Challenges in IoT Sensors: Case studies Blood pressure monitor

34 ISATRNG/ /Slide No. 34 Manufacturing Challenges in IoT Sensors: Case studies Flexible skin-like heart monitor is small enough to wear under a bandage

35 ISATRNG/ /Slide No. 35 Manufacturing Challenges in IoT Sensors: Case studies Sweat sensor The flexible sensor developed at UC Berkeley can be made into "smart" wristbands or headbands that provide continuous, real-time analysis of the chemicals in sweat. ScientificAmerican

36 ISATRNG/ /Slide No. 36 Manufacturing Challenges in IoT Sensors: Case studies Glucose sensing contact lenses google[x] s ambitious venture into diabetes

37 ISATRNG/ /Slide No. 37 Manufacturing Challenges in IoT Sensors: Case studies Diabetes sensor

38 ISATRNG/ /Slide No. 38 Glimpses of Product Prototypes around Nanotech Sensors

39 ISATRNG/ /Slide No. 39 Glimpses of Product Prototypes around Nanotech Sensors Low power low cost wireless urban air quality monitoring device Key Features Data communication using GSM and GPS On board CO, CO2, SO2, NO2, O3, Temp, RH and pressure sensors Integrated Temperature and humidity sensors SD CARD Interface. Two-way communication using TCP/IP

40 ISATRNG/ /Slide No. 40 Glimpses of Product Prototypes around Nanotech Sensors Healthy vs unhealthy: breath analysis Righettoni, Marco, Anton Amann, and Sotiris E. Pratsinis. "Breath analysis by nanostructured metal oxides as chemo-resistive gassensors."materials Today(2014); Tangerman, Albert. "Halitosis in medicine: a review."international dental journal52 (2002):

41 ISATRNG/ /Slide No. 41 Glimpses of Product Prototypes around Nanotech Sensors Halitosis Halitosis General term which used to define an unpleasant odoremanating from the breath regardless of whether the odororiginates from oral or nonoral sources Originates from Latin words Halitus Breath Osis Disease

42 ISATRNG/ /Slide No. 42 Glimpses of Product Prototypes around Nanotech Sensors Exemplary Sensor Field Testing

43 ISATRNG/ /Slide No. 43 Glimpses of Product Prototypes around Nanotech Sensors Block diagram for vehicular emission monitoring setup

44 ISATRNG/ /Slide No. 44 Summary Nano Scale System Integration Integration of multiple sensor platforms and ROC with Radio Chips for sensor fusion More than 1K sensors non-intrusive to human body, monitoring body parameters like heart rate, electrical activity around heart, odour analysis, pressure under the feet etc. Nano scale integration has wide applications in other domains as well Objectives of Smart Cities, Smart Villages.etc. will require trillions of sensors that are robust, low cost-- batch processed, self calibration embedded Self powered and so are smart human bodies

45 ISATRNG/ /Slide No. 45 Dr. Vijay Mishra